Vibration actuator and vibration presentation device

Abstract

Provided are a vibration actuator and a vibration presentation device that can output vibration suitable for tactile feedback and can be reduced in size and thickness.　The vibration actuator comprises a first frame and a second frame having a plate shape, first and second elastic support parts that elastically connect the first frame and the second frame, and a drive unit. Each of the first and second elastic support parts has a first support block, a second support block, and a plate spring which is arranged such that the plate thickness direction thereof coincides with a second direction and of which a plate surface is joined to the first and second support blocks. The first and second support blocks can restrict vibration-direction movement of the first frame or the second frame.

Description

Vibration actuator and vibration presentation device

[0001] The present invention relates to a vibration actuator and a vibration presentation device including the same.

[0002] In recent years, tactile feedback technology has been implemented in contact-type input devices such as trackpads, which simulates the feeling of touch operation (the feeling of operating by touch) by applying vibrations to the operator's fingers. As an actuator for realizing tactile feedback, for example, a vibration actuator that linearly vibrates a movable body relative to a fixed body is known (see, for example, Patent Document 1).

[0003] The vibration actuator disclosed in Patent Document 1 includes an electromagnet consisting of a coil and a core, and uses the magnetic attraction force generated by controlling the flow of current to the coil and the restoring force of a spring to vibrate a movable body relative to a fixed body.

[0004] Japanese Patent Application Laid-Open No. 2022-56147

[0005] In order to reduce the size of contact-type input devices and improve the degree of freedom in design, vibration actuators are desired to be made even smaller and thinner.

[0006] An object of the present invention is to provide a vibration actuator and a vibration presentation device that can output vibrations suitable for tactile feedback and can be made smaller and thinner.

[0007] The vibration actuator of the present invention comprises: a first frame having a plate shape; a second frame also having a plate shape and arranged at a distance from the first frame in a first direction so that their plate surfaces face each other; a first elastic support portion and a second elastic support portion arranged opposite each other in a second direction perpendicular to the first direction and elastically connecting the first frame and the second frame; and a drive portion that moves the first frame or the second frame in the second direction, wherein the first elastic support portion and the second elastic support portion each have: a first support block arranged on a surface of the first frame facing the second frame; and a second support block arranged on a surface of the second frame facing the first frame; and a leaf spring arranged so that its plate thickness direction coincides with the second direction and its plate surface is joined to the first support block and the second support block, and wherein the first support block and the second support block are capable of restricting movement of the first frame or the second frame in the second direction.

[0008] A vibration presentation device of the present invention includes the vibration actuator described above, and a control unit that controls the energization of the coil in response to a contact operation input via an operation input unit.

[0009] According to the present invention, it is possible to output vibrations suitable for tactile feedback, and to achieve a smaller and thinner device.

[0010] FIGS. 1A and 1B are external perspective views of a vibration actuator according to a first embodiment. FIG. 2 is a top view of the vibration actuator according to the first embodiment. FIG. 3 is a bottom view of the vibration actuator according to the first embodiment. FIG. 4 is a side view of the vibration actuator according to the first embodiment. FIG. 5 is an exploded perspective view of the vibration actuator according to the first embodiment. FIG. 6 is an exploded perspective view of the vibration actuator according to the first embodiment. FIG. 7 is an exploded perspective view of an electromagnet unit according to the first embodiment. FIGS. 8A and 8B are diagrams showing the magnetic circuit configuration of a vibration actuator according to the first embodiment. FIG. 9 is a diagram showing an example of a contact-type input device equipped with a vibration presentation device. FIG. 10 is a diagram showing an example of a drive circuit of a control unit. FIG. 11 is a perspective view of a vibration actuator according to Modification 1-1. FIGS. 12A and 12B are perspective cross-sectional views showing the periphery of a sliding member. FIG. 13 is a diagram showing an example of an arrangement of capacitance sensors according to Modification 1-2. FIG. 14 is a diagram showing an example of an arrangement of strain sensors according to Modification 1-3. FIG. 15 is an external perspective view of a vibration actuator according to the second embodiment. FIG. 16 is an exploded perspective view of the vibration actuator according to the second embodiment. FIG. 17 is an external perspective view of a vibration actuator according to the third embodiment. FIGS. 18A and 18B are perspective views showing an electromagnet unit according to the third embodiment. FIGS. 19A and 19B are diagrams showing an example of a movable body of a vibration actuator according to Modification 1-4. FIG. 20 is a diagram showing an example of a vibration actuator according to Modification 1-5. FIG. 21 is a diagram showing an example of a vibration actuator according to Modification 1-5. FIG. 22 is a diagram showing an example of an elastic support part of a vibration actuator according to Modification 1-7. FIG. 23 is a diagram showing an example of a movable frame of a vibration actuator according to Modification 1-8. FIG. 24 is a diagram showing an example of a base frame of a vibration actuator according to Modification 1-8. FIG. 25 is a diagram showing an example of a movable frame and base frame of a vibration actuator according to Modification 1-8. FIG. 26 is a top view showing an example of a vibration actuator according to Modification 1-9. FIGS. 27A and 27B are external perspective views showing a vibration actuator according to the fourth embodiment.FIG. 28 is a top view of a vibration actuator according to the fourth embodiment. FIG. 29 is a bottom view of a vibration actuator according to the fourth embodiment. FIG. 30 is a bottom view of a vibration actuator according to the fourth embodiment. FIG. 31 is an exploded perspective view of a vibration actuator according to the fourth embodiment. FIGS. 32A and 32B are exploded perspective views of an electromagnet unit according to the fourth embodiment. FIGS. 33A and 33B are diagrams showing the shape of a core in a drive section. FIGS. 34A and 34B are external perspective views of a vibration actuator according to the fifth embodiment. FIG. 35 is an exploded perspective view of a vibration actuator according to the fifth embodiment. FIG. 36 is an exploded perspective view of a vibration actuator according to the fifth embodiment. FIG. 37 is a cross-sectional view of a vibration actuator according to the fifth embodiment. FIGS. 38A and 38B are external perspective views of a vibration actuator according to the sixth embodiment. FIG. 39 is an exploded perspective view of a vibration actuator according to the sixth embodiment. FIGS. 40A and 40B are top views of a vibration actuator according to the sixth embodiment.

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments described below, common elements are designated by the same reference numerals, and redundant description thereof will be omitted.

[0012] [First embodiment] Figures 1A and 1B are external perspective views showing a vibration actuator 1 according to one embodiment of the present invention. Figures 2 to 4 are top views of the vibration actuator 1 as seen from the + side in the Z-axis direction, bottom views as seen from the - side in the Z-axis direction, and side views as seen from the + side in the Y-axis direction, respectively. Figures 5 and 6 are exploded perspective views of the vibration actuator 1.

[0013] Here, the explanation will be given using a Cartesian coordinate system (X, Y, Z). In Figure 1A etc., the Z-axis direction is the thickness direction of the vibration actuator 1 and is the "first direction" in which the movable frame 11 and the base frame 12 face each other. The X-axis direction is the vibration direction of the vibration actuator 1 and is the "second direction" perpendicular to the Z-axis direction (first direction). The Y-axis direction is the "third direction" perpendicular to the Z-axis direction (first direction) and the X-axis direction (second direction).

[0014] 1A and other figures, the vibration actuator 1 is a flat plate-shaped (card-shaped) actuator and includes a movable frame 11, a base frame 12, a flexible printed circuit board 13, a drive unit 20, a first elastic support member 30, and a second elastic support member 40.

[0015] The movable frame 11 is a movable body that can move in the X-axis direction relative to the base frame 12, which serves as a fixed body. The movable frame 11 is a plate-like member. For example, the movable frame 11 has a substantially rectangular shape in a plan view seen from the Z-axis direction.

[0016] The movable frame 11 is formed by sheet metal processing of, for example, a stainless steel plate. The movable frame 11 may also be formed from a sintered material or an MIM (metal injection molding) material. The movable frame 11 is disposed relative to the base frame 12 so that their plate surfaces face each other in the Z-axis direction (thickness direction) and are spaced a predetermined distance apart.

[0017] The movable frame 11 may be made of a resin material, which can reduce the weight of the movable frame 11 and the cost of parts.

[0018] An opening 111 is formed in approximately the center of the movable frame 11. The opening 111 is formed to be larger than the shape of the yoke 26 and the coil 23 of the electromagnet unit 21 projected in the Z-axis direction. When the vibration actuator 1 is assembled, the yoke 26 and a portion of the electromagnet unit 21 are disposed within the opening 111. Specifically, the portions of the yoke 26 and the coil 23 on the + side in the Z-axis direction, or more specifically, the portion that protrudes beyond the plate surface of the main core 22A of the electromagnet unit 21 on the + side in the Z-axis direction, are disposed within the opening 111. By disposing in this manner, the distance between the movable frame 11 and the base frame 12 can be reduced, allowing the vibration actuator 1 to be made thinner.

[0019] A gap 111a is formed in the X-axis direction between the opening 111 and the yoke 26. The gap 111a allows movement of the movable frame 11 toward the positive side in the X-axis direction (for example, movement due to an impact such as a drop).

[0020] The movable frame 11 has a core mounting portion 112 on the periphery of an opening 111 on the negative side in the Z-axis direction (the surface facing the base frame 12). The core 22 (main core 22A) of the electromagnet unit 21 is mounted to the core mounting portion 112. The core mounting portion 112 is disposed, for example, on the positive side in the X-axis direction of the opening 111.

[0021] The movable frame 11 has support block mounting portions 113 on its negative surface in the Z-axis direction (the surface facing the base frame 12). The movable support blocks 32, 42 of the first elastic support member 30 and the second elastic support member 40 are attached to the support block mounting portions 113. The support block mounting portions 113 are arranged, for example, on two peripheral edges extending along the Y-axis direction of the movable frame 11. In this embodiment, the support block mounting portions 113 are arranged at two locations on the peripheral edge on the positive side in the X-axis direction, at both ends in the Y-axis direction, and at one location on the peripheral edge on the negative side in the X-axis direction, in the center in the Y-axis direction.

[0022] Furthermore, notches 114 are formed in the movable frame 11 at portions of the first elastic support member 30 and the second elastic support member 40 that overlap with the fixed-side support blocks 33, 43 in the Z-axis direction. The notches 114 are arranged, for example, on two peripheral edges extending along the Y-axis direction of the movable frame 11. In this embodiment, the notches 114 are formed in two locations: one at the center in the Y-axis direction on the peripheral edge on the positive side in the X-axis direction, and one at both ends in the Y-axis direction on the peripheral edge on the negative side in the X-axis direction.

[0023] The base frame 12 is a fixed body that supports the movable frame 11 so that the movable frame 11 can move in the X-axis direction (vibration direction). The base frame 12 is a plate-shaped member. The base frame 12 has a substantially rectangular shape in a plan view seen from the Z-axis direction, for example.

[0024] The base frame 12 is formed by sheet metal processing of a stainless steel plate, for example. The base frame 12 may also be formed from a sintered material or an MIM material. The base frame 12 is disposed relative to the movable frame 11 so that their plate surfaces face each other in the Z-axis direction (thickness direction) and are spaced a predetermined distance apart.

[0025] The base frame 12 may be made of a resin material, which can reduce the weight of the base frame 12 and the cost of parts.

[0026] An opening 121 is formed in approximately the center of the base frame 12. The opening 121 is formed to be larger than the shape of the entire electromagnet unit 21 projected in the Z-axis direction. When the vibration actuator 1 is assembled, a portion of the electromagnet unit 21 is disposed in the opening 121. Specifically, the portion of the electromagnet unit 21 on the negative side in the Z-axis direction, or more specifically, the portion of the electromagnet unit 21 that protrudes further to the negative side in the Z-axis direction than the plate surface of the main core 22A of the electromagnet unit 21 (the coil 23 and auxiliary core 22B), is disposed within the opening 121. By disposing in this manner, the distance between the movable frame 11 and the base frame 12 can be reduced, allowing the vibration actuator 1 to be made thinner.

[0027] A gap 121a is formed in the X-axis direction between the opening 121 and the auxiliary core 22B of the electromagnet unit 21. The gap 121a allows movement of the movable frame 11 toward the positive side in the X-axis direction (for example, movement due to an impact such as a drop).

[0028] The base frame 12 has a yoke attachment portion 122 on the periphery of an opening 121 on the surface on the positive side in the Z-axis direction (the surface facing the movable frame 11). The yoke 26 is attached to the yoke attachment portion 122.

[0029] The base frame 12 has a support block mounting portion 123 on its surface on the positive side in the Z-axis direction (the surface facing the movable frame 11). The fixed-side support blocks 33, 43 of the first elastic support member 30 and the second elastic support member 40 are mounted to the support block mounting portion 123. The support block mounting portion 123 is disposed, for example, on two peripheral portions extending along the Y-axis direction of the base frame 12. In this embodiment, the support block mounting portion 123 is disposed at one location in the center in the Y-axis direction on the peripheral portion on the positive side in the X-axis direction, and at two locations on the peripheral portion on the negative side in the X-axis direction, at both ends in the Y-axis direction.

[0030] In the base frame 12, notches 124 are formed in the portions of the first elastic support member 30 and the second elastic support member 40 that overlap with the movable-side support blocks 32, 42 in the Z-axis direction. The notches 124 are arranged, for example, in two peripheral edges extending along the Y-axis direction of the base frame 12. In this embodiment, the notches 124 are formed in two locations, one at both ends in the Y-axis direction on the peripheral edge on the positive side in the X-axis direction, and one location in the center in the Y-axis direction on the peripheral edge on the negative side in the X-axis direction.

[0031] The flexible printed circuit board 13 supplies power to the coil 23 of the electromagnet unit 21. The flexible printed circuit board 13 has a frame attachment part 132 on which a power supply terminal 131 is arranged, and a wiring part 133 that is drawn out from the frame attachment part 132 and extends in an L-shape along the outer edge of the movable frame 11.

[0032] The frame mounting portion 132 is attached to the negative surface of the movable frame 11 in the Z-axis direction, i.e., the same surface as the core mounting portion 112. In this embodiment, the frame mounting portion 132 is formed so as to wrap around the core mounting portion 112 so as not to impair the thin design. The power supply terminal 131 connected to the coil 23 is installed inside the vibration actuator 1. The power supply terminal 131 and the conductor arranged outside the vibration actuator 1 are physically separated, which prevents the two from coming into contact and causing problems such as an electrical short.

[0033] The movable frame 11 may be formed of a printed circuit board (PCB), and the power supply path to the coil 23 may be built into or on the surface of the movable frame 11. Since the flexible printed circuit board 13 is not required, the number of parts can be reduced and assembly work can be facilitated.

[0034] The drive unit 20 is a drive source that moves the movable frame 11 in the X-axis direction (vibration direction) relative to the base frame 12. The drive unit 20 has an electromagnet unit 21 and a yoke 26. The drive unit 20 is a solenoid that operates the movable frame 11 by utilizing the magnetic attraction force generated between the electromagnet unit 21 and the yoke 26. In this embodiment, the electromagnet unit 21 is disposed on the movable frame 11, and the yoke 26 is disposed on the base frame 12.

[0035] Alternatively, the electromagnet unit 21 may be disposed on the base frame 12, and the yoke 26 may be disposed on the movable frame 11. In this case, the flexible printed circuit board 13 is attached to the base frame 12.

[0036] 7, the electromagnet unit 21 has a core 22 and a coil 23. The electromagnet unit 21 is a magnetic force generating unit that generates a magnetic force when the core 22 is magnetized by energizing the coil 23.

[0037] The core 22 and the coil 23 are electrically insulated. In this embodiment, an insulating film 24 is interposed between the core 22 and the coil 23. By providing the insulating film 24, the insulating performance between the core 22 and the coil 23 is improved, and dielectric breakdown can be reliably prevented.

[0038] In the assembly process of the electromagnet unit 21, for example, after the insulating film 24 is attached to the core 22, the wound coil 23 is inserted along the outer surface of the insulating film 24. Alternatively, for example, the insulating film 24 may be attached to the inner surface of the wound coil 23, and then the coil 23 with the insulating film may be inserted into the core 22. The shape of the coil 23 is maintained by the insulating film 24, so deformation and unwinding of the coil 23 can be prevented.

[0039] Furthermore, a resin bobbin may be used instead of the insulating film 24. For example, after the coil 23 is formed by winding wire around the bobbin, the bobbin with the coil 23 attached is inserted into the core 22. Because wire can be easily wound around the bobbin, the risk of the coil 23 breaking can be reduced, and the reliability of the vibration actuator 1 can be improved.

[0040] Furthermore, instead of the insulating film 24, an insulating film may be formed by applying an insulating paint to the core 22. Compared to the case where the insulating film 24 is used, the insulating film can be formed more easily, which facilitates the assembly work.

[0041] Note that the insulating film 24 may be omitted if the insulating film of the winding (enameled wire) forming the coil 23 can ensure insulation from the core 22. In this case, the number of parts can be reduced, and assembly work can be facilitated.

[0042] The core 22 is a plate-shaped member made of a soft magnetic material. The core 22 is, for example, a so-called C-shaped core that has a C-shape when viewed in a plan view from the Z-axis direction. By using a C-shaped core as the core 22, the magnetic flux generated in the core 22 does not branch, thereby achieving high efficiency.

[0043] The core 22 has a main core 22A and an auxiliary core 22B. The main core 22A has coil winding portions 221, 222 and a frame mounting portion 225. The coil winding portions 221, 222 are portions around which coils 231, 232 are wound. The frame mounting portion 225 is a portion that is mounted to the movable frame 11. In this embodiment, the coil winding portions 221, 222 extend in the X-axis direction. The frame mounting portion 225 connects the coil winding portions 221, 222 on the positive side in the X-axis direction.

[0044] The main core 22A has, for example, a laminated structure in which a plurality of electromagnetic steel plates are stacked together. By using a main core 22A with a laminated structure, iron loss can be reduced, and the product performance of the vibration actuator 1 can be improved.

[0045] The main core 22A may be constructed from a single plate with a single-layer structure. This significantly simplifies the assembly process compared to a laminated structure. Furthermore, since there is no need to glue multiple core plates together, it is possible to reduce variations in the thickness of the components due to adhesive layers and achieve a thinner design.

[0046] The auxiliary core 22B has a planar shape equivalent to that of the frame mounting portion 225 of the main core 22A. The auxiliary core 22B is joined to the negative surface of the frame mounting portion 225 in the Z-axis direction. The thickness of the frame mounting portion of the core 22 (including the auxiliary core 22B) is greater than the thickness of the coil winding portions 221, 222 by the thickness of the auxiliary core 22B. Increasing the cross-sectional area of ​​the frame mounting portion of the core 22 can alleviate magnetic saturation. This improves the degree of freedom in the planar shape of the core 22, and can alleviate magnetic saturation and achieve high efficiency, even when the planar shape of the core 22 is spatially restricted, for example.

[0047] Furthermore, the thickness of the auxiliary core 22B is, for example, approximately equal to the height of the coil 23. In other words, the auxiliary core 22B and the coil 23 protrude at the same height on the negative side in the Z-axis direction relative to the plate surface of the main core 22A. Even if the auxiliary core 22B is disposed, the overall thickness of the electromagnet unit 21 does not change, and therefore the thinning of the vibration actuator 1 is not impaired.

[0048] The coil 23 has coils 231 and 232 wound around the coil winding portions 221 and 222 of the core 22 (main core 22A). The coils 231 and 232 are connected to the power supply terminal 131 of the flexible printed circuit board 13. The winding direction and current flow direction of the coils 231 and 232 are set so that magnetic fields are generated in the coil winding portions 221 and 222 of the core 22 in opposite directions in the X-axis direction (vibration direction).

[0049] The electromagnet unit 21 is attached to the movable frame 11 so that the magnetic poles 226, 227 of the core 22 are spaced apart from the yoke 26 by a predetermined distance G1. Specifically, the frame attachment portion 225 of the main core 22A is joined to the core attachment portion 112 of the movable frame 11.

[0050] The positive side portion of the electromagnet unit 21 in the Z-axis direction, specifically the portion that protrudes further in the Z-axis direction than the plate surface of the main core 22A (the positive side portion of the coil 23 in the Z-axis direction), is disposed within the opening 111 of the movable frame 11. Furthermore, when the vibration actuator 1 is assembled, the negative side portion of the electromagnet unit 21 in the Z-axis direction, specifically the portion that protrudes further in the Z-axis direction than the plate surface of the main core 22A (the negative side portion of the coil 23 in the Z-axis direction and the auxiliary core 22B) is disposed within the opening 121 of the base frame 12.

[0051] The yoke 26 is a plate-shaped member made of a magnetic material. The yoke 26 is joined to the yoke mounting portion 122 of the base frame 12. In a plan view seen from the Z-axis direction, the yoke 26 has a shape that is narrow at both ends in the Y-axis direction and wide at the center. By partially widening only the center portion of the yoke 26 to increase its cross-sectional area, magnetic saturation in the yoke 26 can be alleviated without compromising the thinness of the yoke 26.

[0052] The first elastic support member 30 and the second elastic support member 40 are disposed opposite to each other in the X-axis direction (vibration direction), and elastically connect the movable frame 11 and the base frame 12 while being spaced apart from each other. The first elastic support member 30 and the second elastic support member 40 return the movable frame 11, which has moved in the X-axis direction due to the driving force of the drive unit 20 or an impact such as a fall, to its original position.

[0053] The first elastic support member 30 and the second elastic support member 40 only need to be arranged opposite each other in the X-axis direction, and may be arranged inside the vibration actuator 1. In this embodiment, the first elastic support member 30 and the second elastic support member 40 are arranged at both ends of the vibration actuator 1 in the X-axis direction. The first elastic support member 30 connects the movable frame 11 and the base frame 12 at the end on the positive side in the X-axis direction. The second elastic support member 40 connects the movable frame 11 and the base frame 12 at the end on the negative side in the X-axis direction. In this case, the internal space of the vibration actuator 1 can be effectively utilized, significantly improving design freedom, such as the placement of the electromagnet unit 21. Furthermore, the movable frame 11 can be supported in a stable position relative to the base frame 12.

[0054] The first elastic support portion 30 and the second elastic support portion 40 each have leaf springs 31, 41, movable side support blocks 32, 42, fixed side support blocks 33, 43, movable side pressing plates 34, 44, and fixed side pressing plates 35, 45.

[0055] The leaf springs 31, 41 are plate-shaped biasing members that exert a biasing force in response to movement (vibration) of the movable frame 11. The leaf springs 31, 41 are formed, for example, from stainless steel strips. The leaf springs 31, 41 are each disposed at both ends of the vibration actuator 1 in the X-axis direction, with their thickness direction coinciding with the X-axis direction and extending in the Y-axis direction.

[0056] The movable-side support blocks 32, 42 and movable-side pressure plates 34, 44 are support members for connecting the leaf springs 31, 41 to the movable frame 11. The movable-side support blocks 32, 42 have frame mounting surfaces 32a, 42a that are joined to the movable frame 11 and spring mounting surfaces 32b, 42b that are joined to the leaf springs 31, 41. If the movable frame 11 is formed from a sintered material or an MIM material, the movable-side support blocks 32, 42 may be molded integrally with the movable frame 11. The movable-side pressure plates 34, 44 are plate-shaped members.

[0057] The frame mounting surfaces 32a, 42a of the movable support blocks 32, 42 are joined to the support block mounting portions 113 of the movable frame 11. The leaf springs 31, 41 are joined to the spring mounting surfaces 32b, 42b of the movable support blocks 32, 42. The movable presser plates 34, 44 are joined to the leaf springs 31, 41 so as to sandwich the leaf springs 31, 41 between themselves and the movable support blocks 32, 42.

[0058] The fixed-side support blocks 33, 43 and the fixed-side pressing plates 35, 45 are support members for connecting the leaf springs 31, 41 to the base frame 12. The fixed-side support blocks 33, 43 have frame mounting surfaces 33a, 43a joined to the base frame 12 and spring mounting surfaces 33b, 43b joined to the leaf springs 31, 41. If the base frame 12 is formed from a sintered material or an MIM material, the fixed-side support blocks 33, 43 may be molded integrally with the base frame 12. The fixed-side pressing plates 35, 45 are plate-shaped members.

[0059] The frame mounting surfaces 33 a, 43 a of the fixed-side support blocks 33, 43 are joined to the support block mounting portions 123 of the base frame 12. The leaf springs 31, 41 are joined to the spring mounting surfaces 33 b, 43 b of the fixed-side support blocks 33, 43. The fixed-side pressing plates 35, 45 are joined to the leaf springs 31, 41 so as to sandwich the leaf springs 31, 41 between themselves and the fixed-side support blocks 33, 43.

[0060] Specifically, in the first elastic support section 30, movable-side support blocks 32 are joined to two support block mounting sections 113 of the movable frame 11, and a fixed-side support block 33 is joined to one support block mounting section 123 of the base frame 12. The two movable-side support blocks 32 and one fixed-side support block 33 are arranged so that their respective spring mounting surfaces 32b, 33b are aligned in the same YZ plane. Leaf springs 31 are joined to the respective spring mounting surfaces 32b, 33b, and further, a movable-side pressure plate 34 and a fixed-side pressure plate 35 are joined thereto.

[0061] In the first elastic support section 30, the leaf spring 31 is connected to the movable frame 11 at both ends in the Y-axis direction and to the base frame 12 at the center in the Y-axis direction. The leaf spring 31 has two elastically deformable spring sections. In the leaf spring 31, the Y-axis end points of the movable-side support block 32 and the movable-side pressure plate 34, which are located at both ends in the Y-axis direction, form the movable ends of the spring sections, and the Y-axis end points of the fixed-side support block 33 and the fixed-side pressure plate 35, which are located in the center, form the fixed ends of the spring. The resonant frequency of the spring sections is adjusted by the plate thickness of the leaf spring 31 and the effective length of the spring sections.

[0062] In the second elastic support section 40, a movable-side support block 42 is joined to one support block mounting section 113 of the movable frame 11, and fixed-side support blocks 43 are joined to two support block mounting sections 123 of the base frame 12. The one movable-side support block 42 and the two fixed-side support blocks 43 are arranged so that their respective spring mounting surfaces 42b, 43b are aligned in the same YZ plane. Leaf springs 41 are joined to the respective spring mounting surfaces 42b, 43b, and further, a movable-side pressure plate 44 and a fixed-side pressure plate 45 are joined thereto.

[0063] In the second elastic support section 40, the leaf spring 41 is connected to the movable frame 11 at its center in the Y-axis direction and to the base frame 12 at both ends in the Y-axis direction. The leaf spring 41 has two elastically deformable spring sections. In the leaf spring 41, the Y-axis end points of the movable-side support block 42 and the movable-side pressure plate 44, which are located in the center in the Y-axis direction, form the movable ends of the spring, and the Y-axis end points of the fixed-side support block 43 and the fixed-side pressure plate 45, which are located at both ends, form the fixed ends of the spring. The resonant frequency of the spring sections is adjusted by the plate thickness of the leaf spring 41 and the effective length of the spring sections.

[0064] When sheet metal parts are used for the movable support blocks 32, 42 and the fixed support blocks 33, 43, the flatness of the respective spring mounting surfaces 32b, 42b, 33b, 43b can be easily ensured, and the spring mounting surfaces 32b, 42b, 33b, 43b can be arranged perpendicular to the movable frame 11 and the base frame 12. In other words, the leaf springs 31, 41 can be arranged so that the plate surfaces are perpendicular to the movable frame 11 and the base frame 12, preventing defects such as twisting of the leaf springs 31, 41.

[0065] If the movable-side pressure plates 34, 44 and the fixed-side pressure plates 35, 45 are not provided, the spot welded locations between the leaf springs 31, 41 and the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 become the movable and fixed ends of the springs. This makes it difficult to achieve the designed effective length (resonance frequency) of the springs. In contrast, if the movable-side pressure plates 34, 44 and the fixed-side pressure plates 35, 45 are provided, the positions of the movable and fixed ends of the springs, i.e., the designed effective length (resonance frequency), can be achieved, resulting in stable quality. In other words, the fixing conditions of the leaf springs 31, 41 are less affected by chemical bonding, welding conditions, and vibration direction, improving robustness.

[0066] As described above, the provision of the pressure plates 34, 35, 44, and 45 stabilizes quality and improves robustness, but the pressure plates 34, 35, 44, and 45 may be omitted to reduce the number of parts.

[0067] In the vibration actuator 1, the thickness of the movable support blocks 32, 42 in the Z-axis direction is greater than the separation distance between the movable frame 11 and the base frame 12. In addition, the base frame 12 has cutouts 124 at locations that overlap with the movable support blocks 32, 42 in the Z-axis direction. In other words, when the vibration actuator 1 is assembled, the movable support blocks 32, 42 face the plate thickness surface (cut surface) of the cutouts 124 of the base frame 12 in the X-axis direction.

[0068] Similarly, the thickness of the fixed-side support blocks 33, 43 in the Z-axis direction is also greater than the separation distance between the movable frame 11 and the base frame 12. Furthermore, the movable frame 11 has cutouts 114 at locations that overlap with the fixed-side support blocks 33, 43 in the Z-axis direction. In other words, when the vibration actuator 1 is assembled, the fixed-side support blocks 33, 43 face the plate thickness surface (cut surface) of the cutouts 114 of the movable frame 11 in the X-axis direction.

[0069] Therefore, when the vibration actuator 1 is driven and the movable frame 11 moves toward the negative side in the X-axis direction relative to the base frame 12, the notches 114 of the movable frame 11, which are located at both ends in the Y-axis direction, and the fixed-side support blocks 43 move closer together, and the notches 124 of the base frame 12 move closer together with the movable-side support blocks 32. The abutment between the notches 114 of the movable frame 11 and the fixed-side support blocks 43, and the abutment between the notches 124 of the base frame 12 and the movable-side support blocks 32, restricts the movement of the movable frame 11.

[0070] The distance between the electromagnet unit 21 and the yoke 26 in the X-axis direction is larger than the distance between the movable support block 32 and the notch 124 and the distance between the fixed support block 43 and the notch 114. In other words, the electromagnet unit 21 and the yoke 26 do not come into contact with each other before the movable support block 32 and the notch 124, and the fixed support block 43 and the notch 114 come into contact with each other.

[0071] Furthermore, when the vibration actuator 1 receives an impact, such as being dropped, and the movable frame 11 moves toward the positive side in the X-axis direction relative to the base frame 12, the notch 114 of the movable frame 11, which is located in the center in the Y-axis direction, moves closer to the fixed-side support block 33, and the notch 124 of the base frame 12 moves closer to the movable-side support block 42. The abutment of the notch 114 of the movable frame 11 and the fixed-side support block 33, and the abutment of the notch 124 of the base frame 12 and the movable-side support block 42, restricts the movement of the movable frame 11.

[0072] That is, the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 function as mechanical stoppers that restrict movement of the movable frame 11 in the X-axis direction, thereby preventing the leaf springs 31, 41 from being significantly bent and damaged when the amount of movement of the movable frame 11 in the X-axis direction becomes greater than expected.

[0073] The movable frame 11, the electromagnet unit 21 (main core 22A), and the movable support blocks 32, 42, the base frame 12, the yoke 26, and the fixed support blocks 33, 43, and the leaf springs 31, 41, the movable support blocks 32, 42, and the fixed support blocks 33, 43 can be joined by welding. The use of welding eliminates the need for bolts, rivets, etc., and results in a structure where fastening parts do not protrude, making it suitable for achieving a thin structure.

[0074] The movable frame 11 and the base frame 12 are supported at three points by the first elastic support members 30 and the second elastic support members 40. Specifically, the movable frame 11 is supported by two points at both ends of the first elastic support members 30 in the Y-axis direction and one point at the center of the second elastic support members 40 in the Y-axis direction, forming a triangle in a plan view seen from the Z-axis direction. The base frame 12 is supported by one point at the center of the first elastic support members 30 in the Y-axis direction and two points at both ends of the second elastic support members 40 in the Y-axis direction, forming a triangle in a plan view seen from the Z-axis direction. Furthermore, the three support points on the movable frame 11 and the three support points on the base frame 12 are symmetrical with respect to each other by 180°. Three-point support increases torsional rigidity and stabilizes assembly, improving robustness.

[0075] 8A and 8B are diagrams showing the magnetic circuit configuration of the vibration actuator 1. The magnetic circuit has magnetic flux flow J in parts not shown that is similar to that in the parts shown. Note that the movable frame 11 is not shown in Figures 8A and 8B.

[0076] Specifically, in the electromagnet unit 21, when current is applied to the coils 231 and 232, the core 22 is excited to generate a magnetic field, and opposite magnetic poles 226 and 227 appear at the open end of the C-shape of the core 22. Fig. 8A shows a case where the magnetic pole 226 is a north pole and the magnetic pole 227 is a south pole. A magnetic circuit indicated by the flow of magnetic flux J is formed mainly in the core 22 and the yoke 26. The flow of magnetic flux J in this magnetic circuit flows from the magnetic pole 226 to the yoke 26, passes through the yoke 26, and returns to the core 22 via the magnetic pole 227.

[0077] A magnetic attractive force F1 is generated between the magnetic poles 226, 227 of the core 22 and the yoke 26. The movable frame 11 to which the electromagnet unit 21 is attached moves in the direction of the magnetic attractive force F1 against the biasing forces of the leaf springs 31, 41.

[0078] When the current supply to the coils 231 and 232 is stopped, the core 22 is de-energized, and the magnetic attraction force between the core 22 and the yoke 26 disappears. The movable frame 11 returns to its original position due to the biasing force F2 of the leaf springs 31 and 41. By repeatedly energizing and de-energizing the coil 23, the movable frame 11 moves back and forth in the X-axis direction relative to the base frame 12, generating vibration.

[0079] The vibration actuator 1 can be applied to, for example, a vibration presentation device 101 mounted on a contact-type input device 100. Fig. 9 is a diagram showing an example of a contact-type input device 100 mounted with the vibration presentation device 101.

[0080] The contact-type input device 100 is, for example, a trackpad serving as a pointing device used in place of a mouse in a notebook computer, etc. The contact-type input device 100 includes a vibration presentation device 101 and an operation input unit 102.

[0081] The operation input unit 102 is, for example, a plate-shaped pad main body that is touched by a finger. When a touch operation such as tracing or tapping is performed on the operation input unit 102 with a finger, the vibration presentation device 101 applies vibration to the operator's fingers to simulate a touch operation feeling.

[0082] The vibration presentation device 101 includes the above-described vibration actuator 1 and a control unit 2. The vibration presentation device 101 is mounted on the contact-type input device 100 so that the vibration actuator 1 is disposed opposite the back surface of the operation input unit 102. A contact operation input via the operation input unit 102 is detected by a detection unit 3 such as a strain sensor, for example.

[0083] Although not shown, the control unit 2 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an auxiliary storage unit, etc. The CPU reads out a program corresponding to the processing content from the ROM, loads it into the RAM, and controls the operation of the vibration presentation device 101 including the vibration actuator 1 in cooperation with the loaded program.

[0084] The control unit 2 controls the operation of the vibration actuator 1, for example, in response to the detection results of the detection unit 3, i.e., the contact operation input via the operation input unit 102. The control unit 2 also performs feedback control based on the detection results of the capacitance sensor 46 and the strain sensor 36 provided in the vibration actuator 1. The control unit 2 includes, for example, a drive circuit 2A shown in FIG.

[0085] The drive circuit 2A includes a metal-oxide-semiconductor field-effect transistor (MOSFET) and resistors RG and RGS.

[0086] The MOSFET is a switching element that supplies current pulses to the vibration actuator 1. The gate G of the MOSFET is connected to port 1. The drain D of the MOSFET is connected to the vibration actuator 1. The source S of the MOSFET is grounded. A direct current voltage DC is also applied to the vibration actuator 1 from a power supply unit (not shown).

[0087] The drive signal voltage generated by the control unit 2 is input from port 1 and input to the gate G of the MOSFET via resistor RG. This drive signal voltage controls the on / off of the MOSFET. The waveform of the drive signal voltage is, for example, a rectangular wave. However, the waveform of the drive signal voltage may also be a sine wave, a sawtooth wave, or the like. When the MOSFET is turned on, a current flows through the vibration actuator 1, energizing the coil 23.

[0088] When a touch operation is performed on the operation input unit 102, the control unit 2 controls the flow of electricity to the coil 23. In the vibration actuator 1, the movable frame 11 vibrates, and this vibration is transmitted to the operator via the operation input unit 102. The operator can experience tactile feedback according to the roughness of the contact.

[0089] [Modification 1-1] Fig. 11 is a perspective view of a vibration actuator 1 according to modification 1-1. The movable frame 11 is not shown in Fig. 11. Fig. 12A is a perspective cross-sectional view showing the periphery of the sliding member 125 on the + side in the X-axis direction. Fig. 12B is a perspective cross-sectional view showing the periphery of the sliding member 125 on the - side in the X-axis direction.

[0090] 11 and other figures, sliding members 125 may be arranged on the surface of the base frame 12 on the positive side in the Z-axis direction (the surface facing the movable frame 11). The sliding members 125 are formed of a resin material such as polyacetal (POM) or MC nylon. The sliding members 125 are arranged, for example, at one location on the positive side in the X-axis direction of the base frame 12 and at two locations on the negative side in the X-axis direction.

[0091] The sliding member 125 is interposed between the movable frame 11 and the base frame 12 in a preloaded state. For example, the preload can be applied to the sliding member 125 by utilizing the biasing forces of the leaf springs 31 and 41.

[0092] In the example shown in Figure 11 and other figures, a preload piece 31a is formed in the center of the Y-axis direction (longitudinal direction) of the leaf spring 31, bending from the edge on the negative side in the Z-axis direction toward the negative side in the X-axis direction (see Figures 11 and 12A). Also, a preload piece 41a is formed in the center of the Y-axis direction (longitudinal direction) of the leaf spring 41, bending from the edge on the positive side in the Z-axis direction toward the positive side in the X-axis direction (see Figures 11 and 12B). The preload piece 31a is joined to the base frame 12, and the preload piece 41a is joined to the movable frame 11.

[0093] In the first elastic support section 30, the fixed-side support block 33 shown in the first embodiment is not arranged, and the leaf spring 31 is directly joined to the base frame 12. In the second elastic support section 40, the movable-side support block 42 is not arranged, and the leaf spring 41 is directly joined to the movable frame 11. When the vibration actuator 1 is assembled, a biasing force in the Z-axis direction is generated in the preload piece 31a of the leaf spring 31 and the preload piece 41a of the leaf spring 41. This biasing force holds the sliding member 125 in a preloaded state.

[0094] By providing the sliding member 125, it is possible to quickly damp vibrations of the movable frame 11, providing sharp tactile feedback. Furthermore, since there is no need to provide a clearance between the movable frame 11 and the base frame 12 to avoid unintended sliding, a slim design is not impeded.

[0095] The contact mode between the sliding member 125 and the movable frame 11 is not particularly limited and may be surface contact, line contact, or point contact. The sliding member 125 may also be disposed on the negative surface of the movable frame 11 in the Z-axis direction (the surface facing the base frame 12) so as to come into contact with the base frame 12.

[0096] [Variation 1-2] In the vibration actuator 1, a capacitance sensor 46 may be disposed on the surface of the movable support block 42 facing the yoke 26 (see FIG. 13). The capacitance between the movable support block 42 and the yoke 26 changes as the movable frame 11 moves. Therefore, the capacitance sensor 46 can detect the displacement of the movable frame 11 in the X-axis direction. The detection result of the capacitance sensor 46 is output to the control unit 2 (see FIG. 9), for example, via the flexible printed circuit board 13. The control unit 2 feeds back the detection result of the capacitance sensor 46 to control the current supply to the coil 23.

[0097] By detecting the displacement of the movable frame 11 according to the detection results of the capacitance sensor 46, it is possible to adjust the vibration and variation of the movable frame 11. If the capacitance sensor 46 is positioned so that its capacitance changes depending on the operating load, it can also detect the operating load. The capacitance sensor 46 may be positioned opposite the yoke 26, and may be positioned on the inner circumferential surface of the opening 111 of the movable frame 11, for example.

[0098] [Variation 1-3] In the vibration actuator 1, a strain sensor 36 may be disposed on the leaf spring 31 (see FIG. 14). The strain of the leaf spring 31 changes as the movable frame 11 moves. Therefore, the strain sensor 36 can detect the displacement of the movable frame 11 in the X-axis direction. The detection result of the strain sensor 36 is output to the control unit 2 (see FIG. 9), for example, via the flexible printed circuit board 13. The control unit 2 feeds back the detection result of the strain sensor 36 to control the current supply to the coil 23.

[0099] By detecting the displacement of the movable frame 11 according to the detection results of the strain sensor 36, it is possible to adjust the vibration and variation of the movable frame 11. If the strain sensor 36 is arranged so that the amount of strain changes depending on the operating load, it can also detect the operating load. The strain sensor 36 may also be arranged on the leaf spring 41.

[0100] [Variation 1-4] In the vibration actuator 1, a weight addition plate 14 may be disposed on the movable frame 11 (see Figures 19A and 19B). Figure 19A shows the state in which the weight addition plate 14 is joined to the upper surface of the movable frame 11, and Figure 19B shows the state in which the movable frame 11 and the weight addition plate 14 are disassembled.

[0101] The weight addition plate 14 has, for example, the same planar shape as the movable frame 11. As shown in Figures 19A and 19B, the weight addition plate 14 does not have to have an opening formed therein. By providing the weight addition plate 14, it is possible to adjust the weight of the movable body and easily optimize the resonance frequency of the vibration actuator 1. It is also possible to increase the inertial force and achieve a large vibration amplitude.

[0102] The shape of the weight addition plate 14 is not particularly limited. For example, a plurality of openings may be formed inside the plate to reduce weight, adjust the weight and center of gravity, and avoid interference with other components. Furthermore, for example, the weight addition plates 14 may be arranged dotted on the upper surface of the movable frame 11.

[0103] [Variation 1-5] Elastic springs 51 made of an elastic material such as rubber or elastomer may be used as the first elastic support members 30 and the second elastic support members 40 of the vibration actuator 1 (see FIG. 20). The elastic springs 51 are arranged, for example, at the four corners of the base frame 12. The elastic springs 51 are interposed between the movable frame 11 and the base frame 12, and are firmly joined to the movable frame 11 and the base frame 12.

[0104] In the electromagnet unit 21, when the coil 23 is energized and the core 22 is excited, the movable frame 11 moves to the negative side of the X-axis direction due to the magnetic attraction force between the core 22 and the yoke 26. As the movable frame 11 moves, the elastic spring 51 elastically deforms and exerts an urging force. When the current to the coil 23 is stopped, the core 22 is no longer excited, and the urging force of the elastic spring 51 causes the movable frame 11 to return to its original position.

[0105] In the vibration actuator 1, an elastic spring 51 may be applied to one of the first elastic support member 30 and the elastic support member 40 (see FIG. 21). In FIG. 21, the elastic spring 51 is applied to the second elastic support member 40.

[0106] When an elastic body spring 51 is applied to the first elastic support portion 30 and / or the second elastic support portion 40, the number of parts can be reduced compared to when the first elastic support portion 30 and the second elastic support portion 40 are constructed using leaf springs 31, 41, etc.

[0107] [Variation 1-6] In the vibration actuator 1, the movable frame 11 and the base frame 12 may be integrally molded by sheet metal processing, and the connecting portions between the movable frame 11 and the base frame 12 may function as the first elastic support member 30 and the second elastic support member 40. In this case, the number of parts can be reduced compared to when the first elastic support member 30 and the second elastic support member 40 are configured using leaf springs 31, 41, etc.

[0108] [Variation 1-7] In the first elastic support member 30 of the vibration actuator 1, the leaf spring 31 may have a split structure consisting of two leaf springs 31A and 31B (see FIG. 22). In this case, the leaf spring 31 can be made smaller, and parts costs can be reduced. The same applies to the second elastic support member 40.

[0109] [Variation 1-8] In the vibration actuator 1, the movable frame 11 and / or the base frame 12 may have flange portions 116, 126 for reinforcement (see FIGS. 23 to 25). The flange portions 116, 126 are provided on sides of the movable frame 11 and / or the base frame 12 on which the first elastic support member 30 and the second elastic support member 40 are not arranged, i.e., on sides along the X-axis direction.

[0110] In the example shown in Fig. 23, flange portions 116 are formed on two sides of the movable frame 11 along the X-axis direction, bending and hanging down toward the negative side of the Z-axis direction. In the example shown in Fig. 24, flange portions 126 are formed on two sides of the base frame 12 along the X-axis direction, bending and standing up toward the positive side of the Z-axis direction. In the example shown in Fig. 25, flange portion 116 is formed on one side of the movable frame 11 along the X-axis direction, and flange portion 126 is formed on one side of the base frame 12 along the X-axis direction so as to face flange portion 116 of the movable frame 11 in the Y-axis direction.

[0111] By providing the flange portions 116, 126 on the movable frame 11 and / or the base frame 12, the rigidity (strength against bending and twisting) of the components is increased, thereby improving the reliability of the vibration actuator 1.

[0112] [Variation 1-9] In the vibration actuator 1, the base frame 12 may have a bolt fixing tab 127 (see FIG. 26). The movable frame 11 is not shown in FIG. 26. The bolt fixing tab 127 is provided so as to protrude outward from a side of the base frame 12 on which the first elastic support member 30 and the second elastic support member 40 are not arranged, i.e., a side along the X-axis direction. When the base frame 12 is fixed to an attachment target (for example, the housing frame of a contact-type input device), it can be firmly fixed with a bolt, thereby improving the product performance of the vibration actuator 1.

[0113] The configurations shown in the above modified examples may be applied in appropriate combinations. The configurations shown in the above modified examples may also be applied appropriately to vibration actuators 1-2 to 1-6 according to other embodiments described below.

[0114] As described above, the vibration actuator 1 according to the first embodiment has the following features either alone or in appropriate combination.

[0115] That is, the vibration actuator 1 includes a plate-shaped movable frame 11 (first frame), a plate-shaped base frame 12 (second frame) that is spaced apart from the movable frame 11 in the Z-axis direction (first direction) so that their plate surfaces face each other, a first elastic support member 30 and a second elastic support member 40 that are arranged opposite each other in the X-axis direction (second direction orthogonal to the first direction) and elastically connect the movable frame 11 and the base frame 12, and a drive unit 20 that moves the movable frame 11 (first frame or second frame) in the X-axis direction. The drive unit 20 includes an electromagnet unit 21 that has a core 22 and a coil 23 made of a magnetic material and is arranged on the movable frame 11, and a yoke 26 that is arranged on the base frame 12 so as to face the core 22 in the X-axis direction. The first elastic support member 30 and the second elastic support member 40 each have movable-side support blocks 32, 42 (first support blocks) arranged on the surface of the movable frame 11 facing the base frame 12, fixed-side support blocks 33, 43 (second support blocks) arranged on the surface of the base frame 12 facing the movable frame 11, and leaf springs 31, 41 arranged with their plate thickness direction aligned with the X-axis direction and with their plate surfaces joined to the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43. The movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 can restrict movement of the movable frame 11 or the base frame 12 in the X-axis direction.

[0116] Specifically, in the vibration actuator 1, the movable-side support blocks 32, 42 (first support blocks) and the fixed-side support blocks 33, 43 (second support blocks) have a thickness in the Z-axis direction that is greater than the separation distance between the movable frame 11 (first frame) and the base frame 12 (second frame). The movable-side support blocks 32, 42 can abut against a plate thickness surface of the base frame 12 that is perpendicular to the X-axis direction (second direction), and the fixed-side support blocks 33, 43 can abut against a plate thickness surface of the movable frame 11 that is perpendicular to the X-axis direction.

[0117] In addition, the movable frame 11 (first frame) and the base frame 12 (second frame) have cutouts 114, 124, and the plate thickness surface of the cutout 114 of the movable frame 11 can abut against the fixed side support blocks 33, 43, and the plate thickness surface of the cutout 124 of the base frame 12 can abut against the movable side support blocks 32, 42.

[0118] According to the vibration actuator 1, the movable frame 11 and base frame 12 are arranged to face each other in the thickness direction (the direction perpendicular to the plate surface), and the movable frame 11 is vibrated by the magnetic attraction force of the drive unit 20 and the restoring force of the elastic support units 30, 40, which allows for the output of vibrations suitable for tactile feedback and allows for a smaller, thinner device. Furthermore, the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 function as mechanical stoppers that restrict movement of the movable frame 11 in the X-axis direction, preventing the leaf springs 31, 41 from bending too much and breaking, thereby improving the reliability of the vibration actuator 1. Furthermore, because no magnets are used in the drive unit 20, costs can be reduced.

[0119] In the vibration actuator 1, the first elastic support member 30 and the second elastic support member 40 are disposed at both ends in the X-axis direction (second direction). This allows for effective use of the internal space of the vibration actuator 1, significantly improving the degree of freedom in design, such as the placement of the electromagnet unit 21. Furthermore, the movable frame 11 can be supported in a stable position relative to the base frame 12.

[0120] In the vibration actuator 1, the movable frame 11 (first frame) has an opening 111 in which the electromagnet unit 21 and part of the yoke 26 can be placed. This allows the distance between the movable frame 11 and the base frame 12 to be reduced, allowing the vibration actuator 1 to be made thinner.

[0121] In the vibration actuator 1, the base frame 12 (second frame) has an opening in which part of the electromagnet unit 21 can be placed. This allows the distance between the movable frame 11 and the base frame 12 to be reduced, making it possible to make the vibration actuator 1 thinner.

[0122] In the vibration actuator 1, the movable frame 11 (first frame), the electromagnet unit 21, and the movable-side support blocks 32, 42 (first support blocks), the base frame 12 (second frame), the yoke 26, and the fixed-side support blocks 33, 43 (second support blocks), and the leaf springs 31, 41, and the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 are joined by welding. This eliminates the need for bolts, rivets, etc., and results in a structure where fastening parts do not protrude, making it ideal for achieving a thin structure.

[0123] In the vibration actuator 1, the movable side support blocks 32, 42 (first support blocks) and the fixed side support blocks 33, 43 (second support blocks) have spring mounting surfaces 32b, 42b, 33b, 43b that are perpendicular to the movable frame 11 (first frame) and the base frame 12 (second frame), and the leaf springs 31, 41 are joined to the spring mounting surfaces 32b, 42b, 33b, 43b of the movable side support blocks 32, 42 and the fixed side support blocks 33, 43. This allows the leaf springs 31, 41 to be positioned so that their plate surfaces are perpendicular to the movable frame 11 and the base frame 12, preventing defects such as twisting from occurring in the leaf springs 31, 41.

[0124] In the vibration actuator 1, a movable-side pressure plate 34 and a fixed-side pressure plate 35 are joined to the surfaces of the leaf springs 31, 41 opposite to the surfaces where they are joined to the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43. This allows the positions of the movable and fixed ends of the spring section, i.e., the effective length (resonance frequency) of the spring section, to be achieved as designed, ensuring stable quality.

[0125] In the vibration actuator 1, the first elastic support member 30 has two movable-side support blocks 32 (first support blocks) and one fixed-side support block 33 (second support block), the second elastic support member 40 has one movable-side support block 42 (first support block) and two fixed-side support blocks 43 (second support blocks), and the movable frame 11 (first frame) and the base frame 12 (second frame) are each supported at three points by the first elastic support member 30 and the second elastic support member 40. Specifically, the two movable-side support blocks 32 (first support blocks) and one fixed-side support block 33 (second support block) of the first elastic support member 30 are respectively arranged at both ends and the center of the leaf spring 31 to be joined, and the one movable-side support block 42 (first support block) and two fixed-side support blocks 43 (second support blocks) of the second elastic support member 40 are respectively arranged at the center and both ends of the leaf spring 41 to be joined. This increases torsional rigidity and stabilizes assembly, improving robustness.

[0126] In the vibration actuator 1, the core 22 has coil winding portions 221, 222 and a frame mounting portion 225, and the thickness of the frame mounting portion 225 is greater than the thickness of the coil winding portions 221, 222. This increases the degree of freedom in the planar shape of the core 22, and, for example, even if the planar shape of the core 22 is spatially restricted, magnetic saturation can be alleviated to achieve high efficiency.

[0127] In the vibration actuator 1, the width of the yoke 26 in the X-axis direction (second direction) is greater at the center than at the ends in the longitudinal direction, which makes it possible to reduce magnetic saturation in the yoke 26 without compromising the thinness of the actuator.

[0128] In the vibration actuator 1, the core 22 is a C-shaped core, which prevents the magnetic flux generated in the core 22 from branching, thereby achieving high efficiency.

[0129] In the vibration actuator 1, an insulating film 24 is interposed between the core 22 and the coil 23. This improves the insulating performance between the core 22 and the coil 23, making it possible to reliably prevent dielectric breakdown.

[0130] In the vibration actuator 1, a flexible printed circuit board 13 for supplying power to the coil 23 is joined to the surface of the movable frame 11 (first frame) where the core 22 is joined. Specifically, the flexible printed circuit board 13 is arranged in an L-shape along the outer edge of the movable frame 11 (first frame). As a result, the power supply terminal 131 connected to the coil 23 is installed inside the vibration actuator 1 and is physically separated from the conductor arranged outside the vibration actuator 1, preventing the two from coming into contact and causing problems such as an electrical short.

[0131] In the vibration actuator 1, a sliding member 125 is interposed between the movable frame 11 (first frame) and the base frame 12 (second frame), and a preload is applied in the Z-axis direction (first direction). This allows the vibration of the movable frame 11 to be quickly damped, providing sharp tactile feedback.

[0132] In the vibration actuator 1, a capacitance detection unit is disposed between the movable side support block 32 (first support block) or the movable frame 11 (first frame) and the yoke 26. This makes it possible to detect the displacement of the movable frame 11 according to the detection results of the capacitance sensor 46, and to adjust the vibration and variation of the movable frame 11.

[0133] In the vibration actuator 1, strain detection units are arranged on the leaf springs 31 and 41. This makes it possible to detect the displacement of the movable frame 11 according to the detection results of the strain sensor 36, and to adjust the vibration and variations of the movable frame 11.

[0134] Second Embodiment Fig. 15 is a perspective view of the appearance of a vibration actuator 1-2 according to a second embodiment, and Fig. 16 is an exploded perspective view of the vibration actuator 1-2 according to the second embodiment.

[0135] The vibration actuator 1-2 according to the second embodiment has the same configuration and features as the vibration actuator 1 according to the first embodiment, except for the configuration relating to the first elastic support member 30-2 and the second elastic support member 40-2.

[0136] The arrangement of the first elastic support members 30-2 and the second elastic support members 40-2 and their constituent members are the same as those in the first embodiment. In the first embodiment, the movable frame 11 and the base frame 12 are supported at three points by the first elastic support members 30 and the second elastic support members 40. In contrast, in the second embodiment, the movable frame 11 and the base frame 12 are supported at two points by the first elastic support members 30-2 and the second elastic support members 40-2.

[0137] Specifically, in the first elastic support member 30-2, the leaf spring 31 is connected to the movable frame 11 at its end on the negative side in the Y-axis direction, and is connected to the base frame 12 at its end on the positive side in the Y-axis direction. The leaf spring 31 has one elastically deformable spring portion. In the second elastic support member 40-2, the leaf spring 41 is connected to the movable frame 11 at its end on the positive side in the Y-axis direction, and is connected to the base frame 12 at its end on the negative side in the Y-axis direction. The leaf spring 41 has one elastically deformable spring portion.

[0138] That is, in the second embodiment, the movable side support block 32 (first support block) and the fixed side support block 33 (second support block) of the first elastic support part 30-2 are respectively arranged at both ends of the leaf spring 31 to be joined, and the movable side support block 42 (first support block) and the fixed side support block 43 (second support block) of the second elastic support part 40-2 are respectively arranged at both ends of the leaf spring 41 to be joined so as to be diagonally positioned relative to the movable side support block 32 and the fixed side support block 33 of the first elastic support part 30-2.

[0139] In this case, fatigue characteristics can be improved by increasing the length of the spring portion and reducing the stress generated in the leaf springs 31, 41. Furthermore, compared to the first embodiment, the number of parts in the first elastic support portion 30-2 and the second elastic support portion 40-2 is smaller, which reduces the number of assembly steps and reduces costs.

[0140] [Third embodiment] Fig. 17 is a perspective view showing the appearance of a vibration actuator 1-3 according to a third embodiment. Figs. 18A and 18B are exploded perspective views of an electromagnet unit 21-3 according to the third embodiment.

[0141] A vibration actuator 1-3 according to the third embodiment has the same configuration and features as the vibration actuator 1 according to the first embodiment, except for the configuration related to the electromagnet unit 21-3. In the first embodiment, a C-shaped core is used as the core 22 of the electromagnet unit 21. In contrast, in the third embodiment, an E-shaped core is used as the core 22 of the electromagnet unit 21-3.

[0142] As shown in FIGS. 18A and 18B, the electromagnet unit 21-3 has a core 22 and a coil 23. The core 22 is a so-called E-shaped core, which has an E-shape when viewed in a plan view from the Z-axis direction. By using an E-shaped core as the core 22, coils 231 to 233 can be arranged on three coil winding sections 221 to 223, thereby increasing the magnetic attraction force. Furthermore, by branching the magnetic flux, the space required on the back surface of the core can be reduced. Therefore, the electromagnet unit 21-3 can achieve both compactness and high output.

[0143] [Fourth embodiment] Figures 27A and 27B are external perspective views showing a vibration actuator 1-4 according to a fourth embodiment. Figures 28 and 29 are top views of the vibration actuator 1-4 as seen from the + side in the Z-axis direction and bottom views as seen from the - side in the Z-axis direction, respectively. Figure 30 is a bottom view of the vibration actuator 1-4, with the base frame 12 not shown. Figure 31 is an exploded perspective view of the vibration actuator 1-4.

[0144] 27A and other figures, the vibration actuator 1-4 is a flat plate-shaped (card-shaped) actuator and includes a movable frame 11, a base frame 12, a flexible printed circuit board 13, a drive unit 20, a first elastic support member 30-4, and a second elastic support member 40-4.

[0145] The movable frame 11 is a movable body that can move in the X-axis direction relative to the base frame 12, which serves as a fixed body. The movable frame 11 is a plate-like member. For example, the movable frame 11 has a substantially rectangular shape in a plan view seen from the Z-axis direction.

[0146] The movable frame 11 is formed by sheet metal processing of, for example, a stainless steel plate. The movable frame 11 may also be formed from a sintered material or an MIM (metal injection molding) material. The movable frame 11 is disposed relative to the base frame 12 so that their plate surfaces face each other in the Z-axis direction (thickness direction) and are spaced a predetermined distance apart.

[0147] The movable frame 11 may be made of a resin material, which can reduce the weight of the movable frame 11 and the cost of parts.

[0148] An opening 111 is formed in approximately the center of the movable frame 11. The opening 111 is formed to be larger than the shape of the yoke 26 and the coil 23 of the electromagnet unit 21 projected in the Z-axis direction. When the vibration actuator 1-4 is assembled, the yoke 26 and a portion of the electromagnet unit 21 are disposed within the opening 111. Specifically, the positive side portions of the yoke 26 and the coil 23 in the Z-axis direction, more specifically, the portion that protrudes beyond the plate surface of the main core 22A of the electromagnet unit 21 toward the positive side in the Z-axis direction, are disposed within the opening 111. By disposing them in this manner, the distance between the movable frame 11 and the base frame 12 can be reduced, allowing the vibration actuator 1-4 to be made thinner.

[0149] A gap 111a is formed in the X-axis direction between the opening 111 and the yoke 26. The gap 111a allows movement of the movable frame 11 toward the positive side in the X-axis direction (for example, movement due to an impact such as a drop).

[0150] The movable frame 11 has a core mounting portion 112 on the periphery of an opening 111 on the negative side in the Z-axis direction (the surface facing the base frame 12). The core 22 (main core 22A) of the electromagnet unit 21 is mounted to the core mounting portion 112. The core mounting portion 112 is disposed, for example, on the positive side in the X-axis direction of the opening 111.

[0151] The movable frame 11 has support block mounting portions 113 on its negative surface in the Z-axis direction (the surface facing the base frame 12). The movable support blocks 32, 42 of the first elastic support member 30-4 and the second elastic support member 40-4 are mounted to the support block mounting portions 113. The support block mounting portions 113 are arranged, for example, on two peripheral portions extending along the Y-axis direction of the movable frame 11. In this embodiment, the support block mounting portions 113 are arranged at the end of the peripheral portion on the positive side in the X-axis direction that is on the negative side in the Y-axis direction, and at the end of the peripheral portion on the negative side in the X-axis direction that is on the positive side in the Y-axis direction.

[0152] Furthermore, notches 114 are formed in the movable frame 11 at locations of the first elastic support member 30-4 and the second elastic support member 40-4 that overlap with the fixed-side support blocks 33, 43 in the Z-axis direction. The notches 114 are arranged, for example, in two peripheral edges extending along the Y-axis direction of the movable frame 11. In this embodiment, the notches 114 are formed at the end of the peripheral edge on the positive side in the X-axis direction that is on the negative side in the Y-axis direction, and at the end of the peripheral edge on the negative side in the X-axis direction that is on the positive side in the Y-axis direction.

[0153] The base frame 12 is a fixed body that supports the movable frame 11 so that the movable frame 11 can move in the X-axis direction (vibration direction). The base frame 12 is a plate-shaped member. The base frame 12 has a substantially rectangular shape in a plan view seen from the Z-axis direction, for example.

[0154] The base frame 12 is formed by sheet metal processing of a stainless steel plate, for example. The base frame 12 may also be formed from a sintered material or an MIM material. The base frame 12 is disposed relative to the movable frame 11 so that their plate surfaces face each other in the Z-axis direction (thickness direction) and are spaced a predetermined distance apart.

[0155] The base frame 12 may be made of a resin material, which can reduce the weight of the base frame 12 and the cost of parts.

[0156] An opening 121 is formed in approximately the center of the base frame 12. The opening 121 is formed to be larger than the shape of the entire electromagnet unit 21 projected in the Z-axis direction. When the vibration actuator 1-4 is assembled, a portion of the electromagnet unit 21 is disposed in the opening 121. Specifically, the portion of the electromagnet unit 21 on the negative side in the Z-axis direction, or more specifically, the portion of the electromagnet unit 21 that protrudes further to the negative side in the Z-axis direction than the plate surface of the main core 22A of the electromagnet unit 21 (the coil 23 and auxiliary core 22B), is disposed within the opening 121. By disposing in this manner, the distance between the movable frame 11 and the base frame 12 can be reduced, allowing the vibration actuator 1-4 to be made thinner.

[0157] A gap 121a is formed in the X-axis direction between the opening 121 and the auxiliary core 22B of the electromagnet unit 21. The gap 121a allows movement of the movable frame 11 toward the positive side in the X-axis direction (for example, movement due to an impact such as a drop).

[0158] The base frame 12 has a yoke attachment portion (reference numeral omitted) on the periphery of the opening 121 on the positive side surface in the Z-axis direction (the surface facing the movable frame 11). A yoke 26 is attached to the yoke attachment portion.

[0159] The base frame 12 has a support block mounting portion 123 on its surface on the positive side in the Z-axis direction (the surface facing the movable frame 11). The fixed-side support blocks 33, 43 of the first elastic support member 30-4 and the second elastic support member 40-4 are mounted to the support block mounting portion 123. The support block mounting portion 123 is disposed, for example, on two peripheral portions extending along the Y-axis direction of the base frame 12. In this embodiment, the support block mounting portion 123 is disposed at the end of the peripheral portion on the positive side in the X-axis direction that is on the positive side in the Y-axis direction, and at the end of the peripheral portion on the negative side in the X-axis direction that is on the negative side in the Y-axis direction.

[0160] In the base frame 12, notches 124 are formed in the first elastic support member 30-4 and the second elastic support member 40-4 at positions that overlap with the movable-side support blocks 32, 42 in the Z-axis direction. The notches 124 are arranged, for example, in two peripheral edges extending along the Y-axis direction of the base frame 12. In this embodiment, the notches 124 are arranged at the end of the peripheral edge on the positive side in the X-axis direction that is on the negative side in the Y-axis direction, and at the end of the peripheral edge on the negative side in the X-axis direction that is on the positive side in the Y-axis direction.

[0161] The base frame 12 also has a pressure tab 128. The pressure tab 128 is provided so as to protrude outward from a side of the base frame 12 on which the first elastic support member 30-4 and the second elastic support member 40-4 are not arranged, i.e., a side along the X-axis direction. In this embodiment, the pressure tab 128 is provided so as to be close to the core mounting portion 112 of the movable frame 11 on the periphery on the negative side in the Y-axis direction.

[0162] When attaching the movable body (movable frame 11) of the vibration actuator 1-4 to an attachment object (for example, the operation input part of a contact-type input device) using double-sided tape or the like, it is necessary to apply pressure to the fixed body (base frame 12) to avoid deformation of the movable body.

[0163] Without the pressure tabs 128, pressure is not applied directly to the periphery of the core mounting portion 112 of the movable frame 11, which could result in an unstable adhesion to the mounting object. In contrast, when the pressure tabs 128 are provided as in this embodiment, the number of locations that can be pressurized increases, and strong pressure can be applied to the periphery of the core mounting portion 112 of the movable frame 11. This stabilizes the adhesion to the mounting object, improving the product performance of the vibration actuator 1-4.

[0164] The flexible printed circuit board 13 supplies power to the coil 23 of the electromagnet unit 21. The flexible printed circuit board 13 has a frame attachment part 132 on which a power supply terminal 131 is arranged, and a wiring part 133 that is drawn out from the frame attachment part 132 and extends in an L-shape along the outer edge of the movable frame 11.

[0165] The frame mounting portion 132 is attached to the negative surface of the movable frame 11 in the Z-axis direction, i.e., the same surface as the core mounting portion 112. In this embodiment, the frame mounting portion 132 is formed so as to wrap around the core mounting portion 112 so as not to impair the thin design. The power supply terminal 131 connected to the coil 23 is installed inside the vibration actuator 1-4. The power supply terminal 131 and the conductor arranged outside the vibration actuator 1-4 are physically separated, which prevents the two from coming into contact and causing problems such as an electrical short.

[0166] The movable frame 11 may be formed of a printed circuit board (PCB), and the power supply path to the coil 23 may be built into or on the surface of the movable frame 11. In this case, the flexible printed circuit board 13 is not required, and the number of parts can be reduced.

[0167] The drive unit 20 is a drive source that moves the movable frame 11 in the X-axis direction (vibration direction) relative to the base frame 12. The drive unit 20 has an electromagnet unit 21 and a yoke 26. The drive unit 20 is a solenoid that operates the movable frame 11 by utilizing the magnetic attraction force generated between the electromagnet unit 21 and the yoke 26. In this embodiment, the electromagnet unit 21 is disposed on the movable frame 11, and the yoke 26 is disposed on the base frame 12.

[0168] Alternatively, the electromagnet unit 21 may be disposed on the base frame 12, and the yoke 26 may be disposed on the movable frame 11. In this case, the flexible printed circuit board 13 is attached to the base frame 12.

[0169] 32A and 32B, the electromagnet unit 21 has a core 22 and a coil 23. The electromagnet unit 21 is a magnetic force generating unit that generates a magnetic force when the core 22 is magnetized by energizing the coil 23.

[0170] The core 22 and the coil 23 are electrically insulated. In this embodiment, an insulating film 24 is interposed between the core 22 and the coil 23. By providing the insulating film 24, the insulating performance between the core 22 and the coil 23 is improved, and dielectric breakdown can be reliably prevented.

[0171] In the assembly process of the electromagnet unit 21, for example, after the insulating film 24 is attached to the core 22, the wound coil 23 is inserted along the outer surface of the insulating film 24. Alternatively, for example, the insulating film 24 may be attached to the inner surface of the wound coil 23, and then the coil 23 with the insulating film may be inserted into the core 22. In this case, the shape of the coil 23 is maintained by the insulating film 24, so that deformation and unwinding of the coil 23 can be prevented.

[0172] Furthermore, a resin bobbin may be used instead of the insulating film 24. For example, after the coil 23 is formed by winding wire around the bobbin, the bobbin with the coil 23 attached is inserted into the core 22. In this case, wire can be easily wound around the bobbin, which reduces the risk of breakage of the coil 23 and improves the reliability of the vibration actuator 1-4.

[0173] Furthermore, instead of the insulating film 24, an insulating film may be formed by applying an insulating paint to the core 22. Compared to the case where the insulating film 24 is used, the insulating film can be formed more easily, which improves the productivity of the vibration actuator 1-4.

[0174] Note that the insulating film 24 may be omitted if the insulation between the core 22 and the insulating film of the winding (enameled wire) forming the coil 23 can be ensured. In this case, the number of parts can be reduced, thereby achieving cost reduction.

[0175] The core 22 is a plate-shaped member made of a soft magnetic material. The core 22 is, for example, a so-called C-shaped core that has a C-shape when viewed in a plan view from the Z-axis direction. By using a C-shaped core as the core 22, the magnetic flux generated in the core 22 does not branch, thereby achieving high efficiency.

[0176] The core 22 has a main core 22A and an auxiliary core 22B. The main core 22A has coil winding portions 221, 222 and a frame mounting portion 225. The coil winding portions 221, 222 are portions around which coils 231, 232 are wound. The frame mounting portion 225 is a portion that is mounted to the movable frame 11. In this embodiment, the coil winding portions 221, 222 extend in the X-axis direction. The frame mounting portion 225 connects the coil winding portions 221, 222 on the positive side in the X-axis direction.

[0177] The main core 22A has a laminated structure in which, for example, a plurality of electromagnetic steel plates are stacked together. By using the main core 22A with a laminated structure, iron loss can be reduced, and the product performance of the vibration actuator 1-4 can be improved.

[0178] The main core 22A may be constructed from a single plate with a single-layer structure. This simplifies the manufacturing process compared to a laminated structure, reducing the number of parts and lowering costs. Furthermore, since there is no need to glue multiple core plates together, it is possible to reduce variations between parts due to adhesive layers and achieve a thinner design.

[0179] In the frame mounting portion 225 of the main core 22A, the connecting portion 225a connected to the coil winding portions 221, 222 has a protrusion 228 protruding in the Y-axis direction and is formed wider than the main body portion 225b attached to the movable frame 11 (see FIG. 33A). Compared to when the connecting portion 225a is the same width as the main body portion 225b (see FIG. 33B), the cross-sectional area of ​​the base of the coil winding portions 221, 222 can be made larger, reducing magnetic saturation and improving efficiency. The same can be said for the auxiliary core 22B.

[0180] The auxiliary core 22B has a planar shape equivalent to that of the frame mounting portion 225 of the main core 22A. The auxiliary core 22B is joined to the negative surface of the frame mounting portion 225 of the main core 22A in the Z-axis direction. The thickness of the frame mounting portion of the core 22 (including the auxiliary core 22B) is greater than the thickness of the coil winding portions 221, 222 by the thickness of the auxiliary core 22B. Increasing the cross-sectional area of ​​the frame mounting portion of the core 22 can alleviate magnetic saturation. This improves the degree of freedom in the planar shape of the core 22, and can alleviate magnetic saturation and achieve high efficiency, even when the planar shape of the core 22 is spatially restricted, for example.

[0181] Furthermore, the thickness of the auxiliary core 22B is, for example, approximately equal to the height of the coil 23. In other words, the auxiliary core 22B and the coil 23 protrude at the same height on the negative side in the Z-axis direction relative to the plate surface of the main core 22A. Even if the auxiliary core 22B is disposed, the overall thickness of the electromagnet unit 21 does not change, and therefore the thinning of the vibration actuator 1-4 is not impaired.

[0182] The coil 23 has coils 231 and 232 wound around the coil winding portions 221 and 222 of the core 22 (main core 22A). The coils 231 and 232 are connected to the power supply terminal 131 of the flexible printed circuit board 13. The winding direction and current flow direction of the coils 231 and 232 are set so that magnetic fields are generated in the coil winding portions 221 and 222 of the core 22 in opposite directions in the X-axis direction (vibration direction).

[0183] The electromagnet unit 21 is attached to the movable frame 11 so that the magnetic poles 226, 227 of the core 22 are spaced apart from the yoke 26 by a predetermined distance. Specifically, the frame attachment portion 225 of the main core 22A is joined to the core attachment portion 112 of the movable frame 11.

[0184] The positive side portion of the electromagnet unit 21 in the Z-axis direction, specifically the portion that protrudes further in the Z-axis direction than the plate surface of the main core 22A (the positive side portion of the coil 23 in the Z-axis direction), is disposed within the opening 111 of the movable frame 11. Furthermore, when the vibration actuator 1-4 is assembled, the negative side portion of the electromagnet unit 21 in the Z-axis direction, specifically the portion that protrudes further in the Z-axis direction than the plate surface of the main core 22A (the negative side portion of the coil 23 in the Z-axis direction and the auxiliary core 22B) is disposed within the opening 121 of the base frame 12.

[0185] The yoke 26 is a plate-shaped member made of a magnetic material. The yoke 26 is joined to the yoke mounting portion 122 of the base frame 12. In a plan view seen from the Z-axis direction, the yoke 26 has a shape that is narrow at both ends in the Y-axis direction and wide at the center. By partially widening only the center portion of the yoke 26 to increase its cross-sectional area, magnetic saturation in the yoke 26 can be alleviated without compromising the thinness of the yoke 26.

[0186] The first elastic support member 30-4 and the second elastic support member 40-4 are disposed opposite each other in the X-axis direction (vibration direction) and elastically connect the movable frame 11 and the base frame 12 while they are spaced apart from each other. The first elastic support member 30-4 and the second elastic support member 40-4 return the movable frame 11, which has moved in the X-axis direction due to the driving force of the drive unit 20 or an impact such as a fall, to its original position.

[0187] The first elastic support member 30-4 and the second elastic support member 40-4 may be disposed inside the vibration actuator 1-4 as long as they are disposed opposite each other in the X-axis direction. In this embodiment, the first elastic support member 30-4 and the second elastic support member 40-4 are disposed at both ends of the vibration actuator 1-4 in the X-axis direction. The first elastic support member 30-4 connects the movable frame 11 and the base frame 12 at the end on the positive side in the X-axis direction. The second elastic support member 40-4 connects the movable frame 11 and the base frame 12 at the end on the negative side in the X-axis direction. In this case, the internal space of the vibration actuator 1-4 can be effectively utilized, significantly improving design freedom, such as the placement of the electromagnet unit 21. Furthermore, the movable frame 11 can be supported in a stable position relative to the base frame 12.

[0188] The first elastic support portion 30-4 and the second elastic support portion 40-4 have leaf springs 31, 41, movable side support blocks 32, 42, fixed side support blocks 33, 43, movable side pressing plates 34, 44, and fixed side pressing plates 35, 45, respectively.

[0189] The leaf springs 31, 41 are plate-shaped biasing members that exert a biasing force in response to the movement (vibration) of the movable frame 11. The leaf springs 31, 41 are formed, for example, from stainless steel strips. The leaf springs 31, 41 are each disposed at both ends of the vibration actuator 1-4 in the X-axis direction, with their thickness direction coinciding with the X-axis direction and extending in the Y-axis direction.

[0190] The movable-side support blocks 32, 42 and the movable-side pressure plates 34, 44 are support members for connecting the leaf springs 31, 41 to the movable frame 11. The movable-side support blocks 32, 42 have frame mounting surfaces (not shown) joined to the movable frame 11 and spring mounting surfaces (not shown) joined to the leaf springs 31, 41. The movable-side pressure plates 34, 44 are plate-shaped members.

[0191] The frame mounting surfaces (not shown) of the movable support blocks 32, 42 are joined to the support block mounting portions 113 of the movable frame 11. The leaf springs 31, 41 are joined to the spring mounting surfaces (not shown) of the movable support blocks 32, 42. The movable presser plates 34, 44 are joined to the leaf springs 31, 41 so as to sandwich the leaf springs 31, 41 between themselves and the movable support blocks 32, 42.

[0192] The fixed-side support blocks 33, 43 and the fixed-side pressing plates 35, 45 are support members for connecting the leaf springs 31, 41 to the base frame 12. The fixed-side support blocks 33, 43 have frame mounting surfaces (not shown) joined to the base frame 12 and spring mounting surfaces (not shown) joined to the leaf springs 31, 41. The fixed-side pressing plates 35, 45 are plate-shaped members.

[0193] If the movable frame 11 is formed by sheet metal processing, the leaf springs 31, 41 may be molded integrally with the movable frame 11. In this case, the movable support blocks 32, 42 and the movable pressure plates 34, 44 can be omitted. Similarly, if the base frame 12 is formed by sheet metal processing, the leaf springs 31, 41 may be molded integrally with the base frame 12. This eliminates the need for the fixed support blocks 33, 43 and the movable pressure plates 35, 45, reducing the number of parts and facilitating assembly work.

[0194] Furthermore, when the movable frame 11 is made of a resin material, the leaf springs 31, 41 and the movable-side support blocks 32, 42 may be molded integrally with the movable frame 11. Similarly, when the base frame 12 is made of a resin material, the leaf springs 31, 41 and the fixed-side support blocks 33, 43 may be molded integrally with the base frame 12. In this case as well, the number of parts can be reduced, and assembly work is facilitated.

[0195] Furthermore, when the movable frame 11 is made of a sintered material or an MIM material, the movable support blocks 32, 42 may be molded integrally with the movable frame 11. Similarly, when the base frame 12 is made of a sintered material or an MIM material, the fixed support blocks 33, 43 may be molded integrally with the base frame 12. In this case as well, the number of parts can be reduced, and assembly work is facilitated.

[0196] The frame mounting surfaces (not shown) of the fixed-side support blocks 33, 43 are joined to the support block mounting portions 123 of the base frame 12. The leaf springs 31, 41 are joined to the spring mounting surfaces (not shown) of the fixed-side support blocks 33, 43. The fixed-side pressing plates 35, 45 are joined to the leaf springs 31, 41 so as to sandwich the leaf springs 31, 41 between themselves and the fixed-side support blocks 33, 43.

[0197] Specifically, in the first elastic support portion 30-4, the leaf spring 31 is connected to the movable frame 11 at its end on the negative side in the Y-axis direction, and is connected to the base frame 12 at its end on the positive side in the Y-axis direction. The leaf spring 31 has one elastically deformable spring portion. The resonant frequency of the spring portion is adjusted by the plate thickness of the leaf spring 31 and the effective length of the spring portion.

[0198] In the second elastic support portion 40-4, the leaf spring 41 is connected to the movable frame 11 at its end on the positive side in the Y-axis direction and to the base frame 12 at its end on the negative side in the Y-axis direction. The leaf spring 41 has one elastically deformable spring portion. The resonant frequency of the spring portion is adjusted by the plate thickness of the leaf spring 41 and the effective length of the spring portion.

[0199] That is, the movable side support block 32 (first support block) and the fixed side support block 33 (second support block) of the first elastic support part 30-4 are respectively arranged at both ends of the leaf spring 31 to be joined, and the movable side support block 42 (first support block) and the fixed side support block 43 (second support block) of the second elastic support part 40-4 are respectively arranged at both ends of the leaf spring 41 to be joined so as to be diagonally positioned relative to the movable side support block 32 and the fixed side support block 33 of the first elastic support part 30-2.

[0200] In this case, fatigue characteristics can be improved by increasing the length of the spring portion and reducing the stress generated in the leaf springs 31, 41. Furthermore, compared to the first embodiment, the number of parts in the first elastic support portion 30-4 and the second elastic support portion 40-4 is smaller, which reduces the number of assembly steps and reduces costs.

[0201] If the movable-side pressure plates 34, 44 and the fixed-side pressure plates 35, 45 are not provided, the spot welded locations between the leaf springs 31, 41 and the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 become the movable and fixed ends of the springs. This makes it difficult to achieve the designed effective length (resonance frequency) of the springs. In contrast, if the movable-side pressure plates 34, 44 and the fixed-side pressure plates 35, 45 are provided, the positions of the movable and fixed ends of the springs, i.e., the designed effective length (resonance frequency), can be achieved, resulting in stable quality. In other words, the fixing conditions of the leaf springs 31, 41 are less affected by chemical bonding, welding conditions, and vibration direction, improving robustness.

[0202] As described above, the provision of the pressure plates 34, 35, 44, and 45 stabilizes quality and improves robustness, but the pressure plates 34, 35, 44, and 45 may be omitted to reduce the number of parts.

[0203] In the vibration actuator 1-4, the thickness of the movable support blocks 32, 42 in the Z-axis direction is greater than the separation distance between the movable frame 11 and the base frame 12. In addition, the base frame 12 has cutouts 124 at locations that overlap with the movable support blocks 32, 42 in the Z-axis direction. In other words, when the vibration actuator 1-4 is assembled, the movable support blocks 32, 42 face the plate thickness surface (cut surface) of the cutouts 124 of the base frame 12 in the X-axis direction.

[0204] Similarly, the thickness of the fixed-side support blocks 33, 43 in the Z-axis direction is also greater than the separation distance between the movable frame 11 and the base frame 12. Furthermore, the movable frame 11 has cutouts 114 at locations that overlap with the fixed-side support blocks 33, 43 in the Z-axis direction. In other words, when the vibration actuator 1-4 is assembled, the fixed-side support blocks 33, 43 face the plate thickness surface (cut surface) of the cutouts 114 of the movable frame 11 in the X-axis direction.

[0205] Therefore, when the vibration actuator 1-4 is driven and the movable frame 11 moves toward the negative side in the X-axis direction relative to the base frame 12, the notch 114 of the movable frame 11 and the fixed-side support block 43 move closer together, and the notch 124 of the base frame 12 and the movable-side support block 32 move closer together. The abutment of the notch 114 of the movable frame 11 and the fixed-side support block 43, and the abutment of the notch 124 of the base frame 12 and the movable-side support block 32, restricts the movement of the movable frame 11.

[0206] The distance between the electromagnet unit 21 and the yoke 26 in the X-axis direction is larger than the distance between the movable support block 32 and the notch 124 and the distance between the fixed support block 43 and the notch 114. In other words, the electromagnet unit 21 and the yoke 26 do not come into contact with each other before the movable support block 32 and the notch 124, and the fixed support block 43 and the notch 114 come into contact with each other.

[0207] Furthermore, when the vibration actuator 1-4 receives an impact, such as from being dropped, and the movable frame 11 moves toward the positive side in the X-axis direction relative to the base frame 12, the notch 114 of the movable frame 11 and the fixed-side support block 33 move closer together, and the notch 124 of the base frame 12 and the movable-side support block 42 move closer together. The abutment of the notch 114 of the movable frame 11 and the fixed-side support block 33, and the abutment of the notch 124 of the base frame 12 and the movable-side support block 42, restricts the movement of the movable frame 11.

[0208] That is, the movable-side support blocks 32, 42 and the fixed-side support blocks 33, 43 function as mechanical stoppers that restrict movement of the movable frame 11 in the X-axis direction, thereby preventing the leaf springs 31, 41 from being significantly bent and damaged when the amount of movement of the movable frame 11 in the X-axis direction becomes greater than expected.

[0209] The movable frame 11, the electromagnet unit 21 (main core 22A), and the movable support blocks 32, 42, the base frame 12, the yoke 26, and the fixed support blocks 33, 43, and the leaf springs 31, 41, the movable support blocks 32, 42, and the fixed support blocks 33, 43 can be joined by welding. The use of welding eliminates the need for bolts, rivets, etc., and results in a structure where fastening parts do not protrude, making it suitable for achieving a thin structure.

[0210] Furthermore, in this embodiment, the movable side support block 32 of the first elastic support portion 30-4 has a recess 32c formed on the surface opposite the spring mounting surface. By forming the recess 32c, it is possible to expand the component mounting space on the movable side frame 11. It can also be said that by bringing the movable side support block 32 closer to the flexible printed circuit board 13, it is possible to reduce unused space on the movable frame 11. Components can be mounted efficiently on the movable frame 11, and the vibration actuator 1-4 can be made more compact. Note that in this embodiment, from the perspective of component standardization, the movable side support block 42 of the second elastic support portion 40-4 also has a recess 42c.

[0211] Similarly, the fixed-side support block 33 of the first elastic support portion 30-4 and the fixed-side support block 43 of the second elastic support portion 40-4 may also have the recesses 33c, 43c. In this case, components can be mounted efficiently on the base frame 12, and the vibration actuator 1-4 can be made smaller.

[0212] [Fifth embodiment] Figures 34A and 34B are external perspective views of a vibration actuator 1-5 according to a fifth embodiment. Figures 35 and 36 are exploded perspective views of the vibration actuator 1-5. Figure 37 is a cross-sectional view of the vibration actuator 1-5.

[0213] A vibration actuator 1-5 according to the fifth embodiment has the same configuration and features as the vibration actuator 1-4 according to the fourth embodiment, except for the configuration related to the drive unit 60. In the fourth embodiment, a C-shaped core is used as the core 22 of the electromagnet unit 21. In contrast, in the fifth embodiment, a bobbin-shaped core (a core with an H-shaped cross section) is used as the core 62 of the electromagnet unit 61. With the vibration actuator 1-5, it is possible to easily reduce the size in plan view when viewed in the Z-axis direction.

[0214] The core 62 has a columnar coil winding portion 621 and a first flange portion 622A and a second flange portion 622B disposed at both longitudinal ends of the coil winding portion 621. The first flange portion 622A and the second flange portion 622B have a rectangular shape. The core 62 is disposed on the movable frame 11 so that one side of the first flange portion 622A and the second flange portion 622B faces the yoke 66. The first flange portion 622A functions as a frame attachment portion that is attached to the movable frame 11. A coil 63 is wound around the coil winding portion 621.

[0215] The yoke 66 has a U-shape in cross section as seen from the Y-axis direction, with portions that face the flange portions 622A and 622B of the core 62 protruding.

[0216] When current is applied to the coil 63, the core 62 is excited to generate a magnetic field, and magnetic poles of opposite polarity appear in the first flange portion 622A and the second flange portion 622B. Figure 37 shows a case where the first flange portion 622A is the south pole and the second flange portion 622B is the north pole. A magnetic circuit indicated by magnetic flux flow J is formed mainly in the core 62 and the yoke 66. The magnetic flux flow J in this magnetic circuit flows from the second flange portion 622B to the yoke 66, passes through the yoke 66, and returns to the core 62 via the first flange portion 622A.

[0217] [Sixth embodiment] Figures 38A and 38B are external perspective views of a vibration actuator 1-6 according to a sixth embodiment. Figure 39 is an exploded perspective view of the vibration actuator 1-6. Figures 40A and 40B are top views of the vibration actuator 1-6. The movable frame 11 is not shown in Figure 40B.

[0218] A vibration actuator 1-6 according to the sixth embodiment has the same configuration and features as the vibration actuator 1-4 according to the fourth embodiment, except for the configuration related to the drive unit 70. In the fourth embodiment, the drive unit 20 is composed of an electromagnet unit 21 and a yoke 26. In contrast, in the sixth embodiment, the drive unit 70 is composed of a first electromagnet unit 71A and a second electromagnet unit 71B. The vibration actuator 1-6 utilizes the attractive force between the magnetic poles of the two electromagnet units 71A and 71B, thereby increasing drive efficiency and improving the product performance of the vibration actuator 1-6.

[0219] The configurations of the first electromagnet unit 71A and the second electromagnet unit 71B are similar to, for example, the electromagnet unit 21 in the fourth embodiment. The first electromagnet unit 71A is attached to the movable frame 11. The second electromagnet unit 71B is attached to the base frame 12.

[0220] The first electromagnet unit 71A has a first core 72A and a first coil 73A. Power is supplied to the first coil 73A via the first flexible printed circuit board 13A. The second electromagnet unit 71B has a second core 72B and a second coil 73B. Power is supplied to the second coil 73B via the second flexible printed circuit board 13B. The first electromagnet unit 71A and the second electromagnet unit 71B are arranged so that the first magnetic poles 726A, 727A of the first core 72A face the second magnetic poles 726B, 727B of the second core 72B.

[0221] The first coil 73A and the second coil 73B are energized so that the first magnetic poles 726A, 727A and the second magnetic poles 726B, 727B have opposite polarities. A magnetic circuit indicated by a magnetic flux flow J is mainly formed in the first electromagnet unit 71A and the second electromagnet unit 71B.

[0222] The invention made by the inventor has been specifically described above based on an embodiment, but the present invention is not limited to the above embodiment and can be modified within the scope of the gist thereof.

[0223] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims.

[0224] The disclosures of the specification, drawings and abstract contained in Japanese Patent Application No. 2024-100575, filed on June 21, 2024, are incorporated herein by reference in their entirety.

[0225] 1 vibration actuator, 11 movable frame (first frame), 12 base frame (second frame), 13 flexible printed circuit board, 20 drive unit, 21 electromagnet unit, 22 core, 22A main core, 22B auxiliary core, 23 coil, 24 insulating film, 26 yoke, 30 first elastic support portion, 40 second elastic support portion, 31, 41 leaf spring, 32, 42 movable side support block (first support block), 33, 43 fixed side support block (second support block), 34, 44 movable side pressing plate (first pressing plate), 35, 45 fixed side pressing plate (second pressing plate), 32a, 33a, 42a, 43a frame mounting surface, 32b, 33b, 42b, 43b spring mounting surface, 32c, 33c, 42c, 43c relief portion

Claims

1. A vibration actuator comprising: a first frame having a plate shape; a second frame also having a plate shape and arranged at a distance from the first frame in a first direction so that their plate surfaces face each other; a first elastic support portion and a second elastic support portion arranged to face each other in a second direction perpendicular to the first direction and elastically connect the first frame and the second frame; and a drive portion that moves the first frame or the second frame in the second direction, wherein the first elastic support portion and the second elastic support portion each have: a first support block arranged on a surface of the first frame facing the second frame; and a second support block arranged on a surface of the second frame facing the first frame; and leaf springs arranged so that their plate thickness direction coincides with the second direction and their plate surfaces are joined to the first support block and the second support block, and wherein the first support block and the second support block are capable of restricting movement of the first frame or the second frame in the second direction.

2. A vibration actuator as described in claim 1, wherein the first support block and the second support block have a thickness in the first direction that is greater than the separation distance between the first frame and the second frame, the first support block is capable of abutting against a plate thickness surface of the second frame that is perpendicular to the second direction, and the second support block is capable of abutting against a plate thickness surface of the first frame that is perpendicular to the second direction.

3. A vibration actuator as described in claim 2, wherein the first frame and the second frame have cutouts, the plate thickness surface of the cutout of the first frame and the second support block can abut, and the plate thickness surface of the cutout of the second frame and the first support block can abut.

4. A vibration actuator according to claim 1, wherein the first elastic support portion and the second elastic support portion are arranged at both ends in the second direction.

5. A vibration actuator as described in claim 1, wherein the driving section includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, and a yoke arranged on the second frame so as to face the core in the second direction, and the first frame has an opening in which the electromagnet unit and a portion of the yoke can be arranged.

6. The vibration actuator according to claim 1, wherein the drive unit includes an electromagnet unit having a core and a coil made of a magnetic material and disposed on the first frame, and the second frame has an opening in which a portion of the electromagnet unit can be disposed.

7. The vibration actuator described in claim 1, wherein the driving section includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, and a yoke arranged on the second frame so as to face the core in the second direction, and the first frame, the electromagnet unit, and the first support block, the second frame, the yoke, and the second support block, and the leaf spring, the first support block, and the second support block are joined by welding.

8. The vibration actuator according to claim 1, wherein the first support block and the second support block have spring mounting surfaces perpendicular to the first frame and the second frame, and the leaf spring is joined to the spring mounting surfaces of the first support block and the second support block.

9. A vibration actuator as described in claim 1, wherein the first support block and the second support block have spring mounting surfaces perpendicular to the first frame and the second frame, and the first support block and / or the second support block have a recess on the surface opposite to the spring mounting surface.

10. A vibration actuator according to claim 1, wherein a pressing plate is joined to the surface of the leaf spring opposite to the surface joined to the first support block and the second support block.

11. A vibration actuator as described in claim 1, wherein the first elastic support portion has two of the first support blocks and one of the second support blocks, the second elastic support portion has one of the first support blocks and two of the second support blocks, and the first frame and the second frame are supported at three points by the first elastic support portion and the second elastic support portion, respectively.

12. A vibration actuator as described in claim 11, wherein the two first support blocks and one second support block of the first elastic support part are respectively arranged at both ends and the center of the leaf spring to be joined, and the one first support block and two second support blocks of the second elastic support part are respectively arranged at the center and both ends of the leaf spring to be joined.

13. A vibration actuator as described in claim 1, wherein the first support block and the second support block of the first elastic support part are respectively arranged at both ends of the leaf spring to be joined, and the first support block and the second support block of the second elastic support part are respectively arranged at both ends of the leaf spring to be joined so as to be diagonally positioned relative to the first support block and the second support block of the first elastic support part.

14. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, the core having a coil winding portion and a frame mounting portion, and the thickness of the frame mounting portion is greater than the thickness of the coil winding portion.

15. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, the core having a coil winding portion and a frame mounting portion, the frame mounting portion having a connecting portion connected to the coil winding portion and a main body portion attached to the first frame, the connecting portion having a protrusion protruding in a third direction perpendicular to the first direction and the second direction, and formed wider than the main body portion.

16. The vibration actuator according to claim 1, wherein the driving section includes an electromagnet unit having a core and a coil made of a magnetic material and disposed on the first frame, and the core is composed of a single plate with a single-layer structure.

17. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, and a yoke arranged on the second frame so as to face the core in the second direction, and the width of the yoke in the second direction is greater at the center than at the ends in the longitudinal direction.

18. The vibration actuator according to claim 1, wherein the driving section includes an electromagnet unit having a core and a coil made of a magnetic material and disposed on the first frame, and the core is a C-shaped core.

19. The vibration actuator according to claim 1, wherein the driving section includes an electromagnet unit having a core and a coil made of a magnetic material and disposed on the first frame, and the core is an E-shaped core.

20. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, an insulating layer is interposed between the core and the coil, and the insulating layer is made of an insulating film.

21. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, an insulating layer is interposed between the core and the coil, and the insulating layer is formed by applying insulating paint to the core.

22. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, and a flexible printed circuit board for supplying power to the coil is joined to the surface of the first frame that joins the core.

23. The vibration actuator according to claim 22, wherein the flexible printed circuit board is arranged in an L-shape along the outer edge of the first frame.

24. The vibration actuator according to claim 1, wherein a sliding member is interposed between the first frame and the second frame, and a preload is applied in the first direction.

25. A vibration actuator as described in claim 1, wherein the driving unit includes an electromagnet unit having a core and a coil made of a magnetic material and arranged on the first frame, and a yoke arranged on the second frame so as to face the core in the second direction, and a capacitance detection unit is arranged between the first support block or the first frame and the yoke.

26. The vibration actuator according to claim 1, wherein a strain detection unit is disposed on the leaf spring.

27. A vibration actuator according to claim 1, wherein the first frame is a movable frame that is adhered to an object to be attached, and the second frame has pressure tabs on its periphery.

28. A vibration presentation device comprising: a vibration actuator according to claim 1; and a control unit that controls the supply of electricity to the drive unit in response to a contact operation input via an operation input unit.

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