Assembly for connecting parts

Abstract

Disclosed is an assembly for connecting parts, which is suitable for attaching one of an upper object and a lower object to the other object or interconnecting the two objects in a reactive gas atmosphere. The assembly for connecting parts, according to one embodiment of the present invention, comprises: a stud including a connection shaft part, a head part formed on one end of the connection shaft part so as to be connected or fixed to an upper object, and a support part formed on the other end of the connection shaft part; a socket including a cover part having a through-hole formed in the center thereof, and a fastening pipe part connected to the cover part so as to be fastened to a lower object; and an elastic unit concentrically disposed on the stud and aligned in the fastening pipe part, wherein the connection shaft part includes a first section that is connected to the head part and formed with a first diameter, which is smaller than that of the head part, and a third section that is formed with a third diameter, which is larger than the first diameter, and slides along the through-hole while in contact with the inner surface of the through-hole, and the third diameter is equal to the diameter of the through-hole.

Description

Assembly for connection

[0001] The present invention relates to a connecting assembly used to interconnect two objects, and more particularly to an assembly for connecting parts used to attach one of two objects to another object or to interconnect two objects that are placed opposite each other in a reactive gas atmosphere.

[0002] There are various methods for connecting various components. Examples include bonding methods using adhesives or methods that allow the components' structures to interlock or overlap. However, conventional methods for joining components may be limited by the environment to which the components are exposed or the operating conditions. A typical example of a condition that limits conventional methods for joining components is exposure to a highly reactive gas atmosphere.

[0003] Under these conditions (exposure to a highly reactive gas atmosphere), limitations are inherent in the selection of components, including materials and adhesives for bonding. Therefore, overcoming these limitations requires utilizing a specially structured assembly rather than conventional connection methods. For reference, a technology that utilizes reactive gases is the wafer etching process during semiconductor manufacturing.

[0004] Korean Patent No. 10-1708060, entitled "Cam Fixed Electrode Clamp," presents an assembly suitable for connecting (or fastening) two objects (a backing plate and an electrode) in a reactive gas atmosphere. Korean Patent No. 10-1708060, entitled "Cam Fixed Electrode Clamp," addresses the challenge of alleviating stress caused by differences in thermal expansion between the two objects to be connected (a backing plate and an electrode) in a reactive gas environment.

[0005] As a solution to the problem, the 'cam fixed electrode clamp' of Korean Patent No. 10-1708060 includes a body portion and a stud having first and second ends at one end and the other end of the body portion, a socket attached to a consumable electrode in a plasma processing environment (a semi-consumable gas environment), and a stack of disc springs arranged within the socket to allow limited lateral movement of the stud in a direction perpendicular to the longitudinal axis of the stud.

[0006] The "cam-fixed electrode clamp" of Korean Patent No. 10-1708060 is structurally suitable for connecting two objects to be connected in a reactive gas atmosphere. In particular, the disk spring stack is arranged within the socket to allow limited lateral movement of the stud in a direction perpendicular to the longitudinal axis of the stud, thereby resolving stress problems caused by differences in thermal expansion coefficients between the objects (backing plate and electrode).

[0007] However, the limited lateral movement of the studs makes it difficult to align one end (head area) of the stud to the specified joining position when connecting the objects to be connected by mutually aligning them at the joining position. In other words, the play of the studs due to the lateral movement allowed makes it difficult to align the studs to the correct joining position, which causes difficulties in connecting objects.

[0008] The technical problem to be solved by the present invention is to provide a connecting assembly that is structurally capable of suppressing lateral movement or tilting of a stud, so that when connecting two objects to be connected, the stud can be accurately aligned vertically without shaking toward a desired connecting position (e.g., a predetermined connecting position of the upper object), thereby enabling a quick and accurate connection between objects.

[0009] Another technical problem to be solved by the present invention is to provide a connecting assembly that can minimize corrosion caused by a reactive gas and is therefore suitable for attaching one of two objects to be connected to another object or for interconnecting two objects in a reactive gas atmosphere.

[0010] According to a first embodiment of the present invention as a means for solving the problem, a connecting assembly for attaching one of an upper object and a lower object to another object or for interconnecting two objects in a reactive gas atmosphere is provided, the connecting assembly comprising: a stud including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; a socket including a cover portion having a through hole formed at the center and a fastening tube portion connected to the cover portion and fastened to the lower object; and an elastic unit concentrically arranged on the stud and aligned within the fastening tube portion; wherein the connecting shaft portion includes a first section connected to the head portion and formed with a first diameter smaller than the head portion, and a third section formed with a third diameter larger than the first diameter and sliding along the through hole while contacting an inner surface of the through hole, wherein the third diameter is the same as the diameter of the through hole.

[0011] In the first embodiment, the connecting shaft portion may further include a second section formed with a second diameter between the first section and the third section, and a fourth section formed with a fourth diameter between the third section and the support portion.

[0012] In the first embodiment, the second section protrudes upwardly from the socket together with the first section, and the elastic unit is concentrically coupled to the fourth section, so that the fourth section can be aligned within the fastening member together with the elastic unit.

[0013] In the first embodiment, the second diameter may be formed to be larger than the first diameter and smaller than the third diameter, and the fourth diameter may be formed to be larger than the third diameter and smaller than the diameter of the support formed to be the fifth diameter.

[0014] According to a second embodiment of the present invention as a means for solving the problem, a connecting assembly for attaching one of an upper object and a lower object to another object or for interconnecting two objects in a reactive gas atmosphere is provided, the connecting assembly including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; a socket including a cover portion having a through hole formed at the center and a fastening pipe portion connected to the cover portion and fastened to the lower object; and an elastic unit concentrically arranged on the stud and aligned within the fastening pipe portion; wherein the diameter of the support portion is formed to be a fifth diameter that is the same as the inner diameter of the fastening pipe portion.

[0015] In the second embodiment, the connecting shaft portion includes a first section formed with a first diameter smaller than the head portion and connected to the head portion, a third section formed with a third diameter, a second section formed with a second diameter between the first section and the third section, and a fourth section formed with a fourth diameter between the third section and the support portion.

[0016] In the second embodiment, the second section protrudes upwardly from the socket together with the first section, and the elastic unit is concentrically coupled to the fourth section, so that the fourth section can be aligned within the fastening member together with the elastic unit.

[0017] In the second embodiment, the second diameter may be larger than the first diameter and smaller than the third diameter, and the fourth diameter may be larger than the third diameter and smaller than the fifth diameter.

[0018] In the second embodiment, the connecting shaft portion is formed with a third diameter and includes a third section that slides along the through hole while coming into contact with the inner surface of the through hole, and the third diameter can be formed to be the same as the diameter of the through hole.

[0019] According to a third embodiment of the present invention as a means for solving the problem, a connecting assembly for attaching one of an upper object and a lower object to another object or for interconnecting two objects in a reactive gas atmosphere is provided, the connecting assembly comprising: a stud including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; a socket including a cover portion having a through hole formed at the center and a fastening tube portion connected to the cover portion and fastened to the lower object; an elastic unit concentrically arranged on the stud and aligned within the fastening tube portion; and a bushing coupled to the stud so as to surround the support portion; wherein the outer diameter of the bushing is the same as the inner diameter of the fastening tube portion.

[0020] In a third embodiment, the connecting shaft portion includes a first section formed with a first diameter smaller than the head portion and connected to the head portion, a third section formed with a third diameter, a second section formed with a second diameter between the first section and the third section, and a fourth section formed with a fourth diameter between the third section and the support portion.

[0021] In the third embodiment, the second section protrudes upwardly from the socket together with the first section, and the elastic unit is concentrically coupled to the fourth section, so that the fourth section can be aligned within the fastening member together with the elastic unit.

[0022] In the third embodiment, the second diameter may be larger than the first diameter and smaller than the third diameter, and the fourth diameter may be larger than the third diameter and smaller than the fifth diameter, which is the diameter of the support.

[0023] In the third embodiment, the connecting shaft portion is formed with a third diameter and includes a third section that slides along the through hole while contacting the inner surface of the through hole, and the third diameter can be formed with a diameter equal to the diameter of the through hole.

[0024] In the third embodiment, the bushing includes an annular upper plate portion concentrically coupled to a fourth section of the connecting shaft portion to which the support portion is connected and covering an upper surface of the support portion, and a cylindrical side plate portion disposed perpendicular to the upper plate portion and covering an outer surface of the support portion.

[0025] In the third embodiment, the bushing includes a synthetic resin having heat-resistant, chemical-resistant, wear-resistant, and insulating properties.

[0026] In the third embodiment, the bushing includes a PTFE (Polytetrafluoroethylene) or PAI (Polyamide-imide) material.

[0027] The connecting assembly according to an embodiment of the present invention may further include an annular spring washer provided to cover part or all of the upper surface of the cover portion, and a silicone gasket laminated on the spring washer.

[0028] At this time, the inner diameter of the spring washer and the silicone gasket can be formed to be the same as the diameter of the third section formed with the third diameter in the connecting shaft portion.

[0029] Preferably, an annular mounting groove is formed around the upper circumference of the through hole exposed to the upper surface of the cover part with a depth corresponding to the thickness of the spring washer, and the spring washer can be mounted in the mounting groove.

[0030] A sealing projection may be further formed on either the upper or lower surface of the annular silicone gasket or on either the upper or lower surface.

[0031] At this time, the above-mentioned sealing projection can be formed in a continuous ring shape concentric with the silicone gasket.

[0032] In an embodiment of the present invention, a connecting assembly can have a third section formed with a third diameter in the connecting shaft portion and a portion of the inner surface of the through hole in the height direction in the first state physically contact each other.

[0033] Here, based on the total height (h) of the through hole, the third section can physically contact the inner surface of the through hole at a height of 0.4h to 0.67h from the bottom of the through hole.

[0034] In the embodiment, the first state may be defined as a state in which the socket is coupled to the coupling groove of the lower object, the head of the stud is coupled to the designated coupling position of the upper object, and the support is seated on the bottom surface of the coupling groove.

[0035] In an embodiment of the present invention, the connecting assembly can physically contact the entire inner surface of the through hole and the third section formed with the third diameter in the connecting shaft portion in the second state.

[0036] In the embodiment, the second state may be defined as a state in which the socket is coupled to the coupling groove of the lower object, the head of the stud is coupled to the designated coupling position of the upper object, and the expanded slope of the fourth section below the third section and the boundary of the third section and the lower chamfered surface of the through hole are in contact with each other, so that the stud can no longer rise.

[0037] At this time, in the second state, the spring stack of the elastic unit is compressed to the maximum, and the outer diameter of the spring stack compressed to the maximum is the same as the inner diameter of the fastening pipe of the socket, and the inner diameter of the spring stack compressed to the maximum can be formed to the same size as the diameter of the fourth section.

[0038] According to an embodiment of the present invention, when connecting two objects to be connected, the stud can be structurally maintained in a precisely vertical alignment without shaking toward the intended connection location (e.g., the predetermined connection location of the upper object). As a result, the task of aligning one end (head) of the stud to a position where it can be precisely connected to the upper object becomes easier, and a quick and precise connection between objects can be realized.

[0039] In addition, due to the structural feature that a part of the connecting shaft part (the third section) is in close contact with the inner surface of the through hole, the gap between the through hole of the socket and the connecting shaft part of the stud is minimized from the initial state of fastening before the stud is pulled upward, so that the inflow of reactive gas between the through hole and the connecting shaft part can be minimized, and as a result, the inner surface of the through hole can be prevented from being exposed to the reactive gas and corroded.

[0040] Figure 1 is a schematic diagram showing a representative example of a plasma processing device.

[0041] Figure 2 is an exploded perspective view of a connecting assembly according to a first embodiment of the present invention.

[0042] Figure 3 is a perspective view of the assembly for connection illustrated in Figure 2.

[0043] Fig. 4 is a cutaway perspective view of the connecting assembly illustrated in Fig. 3 viewed along line AA.

[0044] Figure 5 is a front view of the cut surface of the connecting assembly illustrated in Figure 4.

[0045] Figure 6 is a drawing specifically illustrating a stud cross-section of a connecting assembly according to the first embodiment.

[0046] Fig. 7 is a drawing specifically illustrating a socket cross-section of a connection assembly according to the first embodiment.

[0047] Fig. 8 is a drawing showing an elastic unit applied to a connecting assembly according to the first embodiment.

[0048] FIG. 9 and FIG. 10 are mounting examples showing the state of connecting an upper object and a lower object using a connecting assembly according to the first embodiment of the present invention.

[0049] Fig. 11 is a cutaway perspective view of a connecting assembly according to a second embodiment of the present invention.

[0050] Fig. 12 is a front view of the cut surface of the connecting assembly illustrated in Fig. 11.

[0051] Fig. 13 is a drawing showing the operating state of a connecting assembly according to a second embodiment of the present invention.

[0052] Fig. 14 is a cutaway perspective view of a connecting assembly according to a third embodiment of the present invention.

[0053] Fig. 15 is a front view of the cut surface of the connecting assembly illustrated in Fig. 14.

[0054] Fig. 16 is a drawing showing the operating state of a connecting assembly according to a third embodiment of the present invention.

[0055] Fig. 17 is a drawing showing a preferred modified example of the connecting assembly according to the first embodiment described above.

[0056] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0057] These examples are provided to more fully explain the present invention to those skilled in the art. The following examples may be modified in various ways, and the scope of the present invention is not limited to the examples described below. Rather, these examples are provided to further faithfully and completely convey the spirit of the present invention.

[0058] The terms used herein are used to describe specific embodiments and are not intended to limit the present invention. Furthermore, the singular forms used herein may include the plural forms, unless the context clearly dictates otherwise.

[0059] In this application, the terms “include,” “comprising,” “having,” etc. are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof of the invention, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0060] And when a component is said to be "in front of," "behind," "above," or "below" another component, unless there are special circumstances, it includes not only being placed "in front of," "behind," "above," or "below" the other component in direct contact with it, but also cases where another component is placed in between. Furthermore, when a component is said to be "connected" to another component, unless there are special circumstances, it includes cases where they are indirectly connected to each other as well as cases where they are directly connected to each other.

[0061] The drawings are intended solely to facilitate understanding of the invention and should not be construed as limiting the scope of the invention. Furthermore, it should be noted that the relative thicknesses, lengths, and sizes in the drawings may be exaggerated for convenience and clarity of explanation.

[0062] A connecting assembly according to an embodiment of the present invention can be used to rigidly connect or join two objects to be connected. Preferably, the connecting assembly according to an embodiment of the present invention can be used to attach one of two objects to another object or to interconnect two objects that are positioned opposite each other in a reactive gas atmosphere, such as a wafer processing (etching) environment using high-temperature plasma.

[0063] Here, the term 'reactive gas' includes a gas that has high physical or chemical energy and easily reacts with surrounding molecules to cause corrosion, a physically and chemically unstable plasma, or a gas that can easily generate plasma.

[0064] In a reactive gas atmosphere, the two objects to be connected may be, for example, an electrode that doubles as a shower head in a plasma processing device and an electrode support (backing plate) that detachably supports the electrode from behind. Of course, the two objects to be connected and the processing device in a reactive gas environment containing them are not limited to the objects (electrode and electrode support) and the processing device (plasma processing device) mentioned above.

[0065] However, since a representative example of a processing device (a device that performs a predetermined process in a reactive gas atmosphere) to which a connection assembly according to an embodiment of the present invention to be described later is applied is a plasma processing device, the present invention will be examined below by assuming a plasma processing device including an electrode and an electrode support as a preferable application example.

[0066] First, let us briefly look at the overall configuration of a plasma processing device to which a connection assembly according to an embodiment of the present invention is applied.

[0067] Figure 1 is a schematic diagram showing a representative example of a plasma processing device.

[0068] Referring to FIG. 1, a plasma processing device (100) may be configured as a capacitively coupled plasma etching device having parallel plate electrodes. For example, it may be provided with a cylindrical chamber (processing vessel) 10 made of a metal such as aluminum or stainless steel. Within the chamber (10), a disc-shaped susceptor (12) that carries a substrate to be processed, for example, a semiconductor wafer (W), may be horizontally arranged as a lower electrode.

[0069] The susceptor (12) may be supported in an ungrounded state by an insulating cylindrical support member (14) made of, for example, aluminum and extending vertically upward from the bottom of the chamber (10). An annular exhaust passage (18) may be formed between the conductive cylindrical support member (16) extending vertically upward from the bottom of the chamber (10) along the outer periphery of the cylindrical support member (14) and the inner wall of the chamber (10).

[0070] An annular baffle plate (20) is attached to the upper part or the inlet of the exhaust path (18), and an exhaust port (22) may be provided on one side of the bottom of the exhaust path (18). The exhaust port (22) may be connected to an exhaust device (28) through an exhaust pipe (26). The exhaust device (28) may reduce the pressure of the plasma processing space within the chamber (10) to a desired vacuum level, and a gate valve (30) for opening and closing an opening for loading and unloading a semiconductor wafer (W) may be installed on the outside of the side wall of the chamber (10).

[0071] The susceptor (12) can be electrically connected to first and second high-frequency power sources (32, 34) through a matching unit (36) and a power supply rod (38). In addition, an electrostatic chuck (40) for fixing a semiconductor wafer (W) and aligning the wafer (W) can be provided on the upper surface of the susceptor (12). In addition, a focus ring (42) can be provided on the radially outer side of the electrostatic chuck (40) to annularly surround the semiconductor wafer (W).

[0072] On the ceiling of the chamber (10), an electrode assembly (64) of ground potential, which faces the susceptor (12) and serves as a shower head, can be placed in a suspended state via an annular insulating member (65). The electrode assembly (64) includes an electrode (66) facing the susceptor (12) and an electrode support (68) that detachably supports the electrode (66) from its rear (the upper portion of the electrode plate in FIG. 1).

[0073] The electrode support (68) suppresses temperature fluctuations of the electrode (66), for example, as a cooling plate. A gas chamber (70) may be provided inside the electrode support (68). A plurality of gas discharge holes (72) penetrating from the gas chamber (70) toward the susceptor (12) may be formed in the electrode support (68) and the electrode (66), and the space between the electrode (66) and the susceptor (12) becomes a plasma generation space or processing space (PS).

[0074] A gas inlet (70a) may be formed in the upper center of the gas chamber (70). A processing gas supply unit (74) is connected to the gas inlet (70a) through a gas supply pipe (75), so that processing gas can be supplied to the gas chamber (70) through the gas inlet (70a). The electrode (66) may be formed of, for example, silicon (Si) or silicon carbide (SiC), and the electrode support (68) may be formed of, for example, alumite-treated aluminum.

[0075] The connecting assembly according to an embodiment of the present invention can be applied to the above plasma processing device that performs a predetermined process in a reactive gas atmosphere. The connecting assembly can be applied to the electrode assembly that faces the susceptor in parallel with the susceptor in the above plasma processing device and also serves as a shower head. More specifically, it can be applied to detachably connect the electrode to the electrode support in the electrode assembly.

[0076] Hereinafter, the connecting assembly according to the embodiment of the present invention will be examined by dividing it into embodiments.

[0077] First embodiment

[0078] Fig. 2 is an exploded perspective view of a connecting assembly according to a first embodiment of the present invention, and Fig. 3 is a combined perspective view of the connecting assembly illustrated in Fig. 2. Fig. 4 is a cutaway perspective view of the connecting assembly illustrated in Fig. 3 taken along line AA, and Fig. 5 is a front view of the cut surface of the connecting assembly illustrated in Fig. 4.

[0079] Referring to FIGS. 2 to 5, a connection assembly (5) according to the first embodiment includes a stud (50), a socket (54), and an elastic unit (57). The stud (50) may have one end (the head (51) at the top in the drawing) connected to an upper object to be connected, and the other end aligned with the elastic unit (57) on the inside of the socket (54). The socket (54) may be fastened to a lower object to be connected, and a part of the stud (50) and the elastic unit (57) may be arranged concentrically inside.

[0080] In the embodiment, the upper object may be, for example, an electrode support of the aforementioned plasma processing device. The lower object may be an electrode, a consumable part detachably connected to the electrode support and capable of being replaced. Of course, the connection target is not limited to the electrode support and the electrode. In other words, the connection assembly according to the embodiment has no particular limitations in its applicable technical fields or connection target.

[0081] Figure 6 is a drawing specifically illustrating a stud cross-section of a connecting assembly according to the first embodiment.

[0082] Referring to FIG. 6 and the preceding FIGS. 2 to 5, the stud (50) includes a head portion (51), a support portion (53) spaced apart from the head portion (51), and a connecting shaft portion (52) connecting the head portion (51) and the support portion (53). That is, the stud (50) may be configured such that the head portion (51) is integrally formed at one end of the connecting shaft portion (52) (the upper end of the connecting shaft portion in the drawing) and the support portion (53) is integrally formed at the opposite end (the lower end of the connecting shaft portion in the drawing) with the connecting shaft portion (52) as the center.

[0083] The head portion (51) may protrude upward from the socket (54) together with a portion of the connecting shaft portion (52) when coupled with the socket (54). The protruding head portion (51) may be firmly coupled and fixed to a designated coupling position of the upper object. The support portion (53) supports the elastic unit (57) concentrically arranged inside the socket (54) and prevents the elastic unit (57) from being dislodged from below the socket (54). In addition, when the stud (50) is pulled upward in the drawing for firmly coupling with the upper object, the elastic unit (57) may be compressed by applying pressure from below.

[0084] The head (51) may be integrally provided at one end (the upper end in the drawing) of the connecting shaft (52). There is no particular limitation on the shape of the head (51), but considering the quick assembly with the upper object through the cam connection method, the upper end may be formed convexly upward with a rounded surface as in the example in the drawing, and the diameter of the central part may be formed to be larger than that of other parts, so that the corresponding part may be bulged (swelled) to the side.

[0085] The head portion (51) may be formed with a maximum diameter (laterally bulging portion) that is larger than the diameters of the first section (520) and the second section (522) of the connecting shaft portion (52) described later, and may be formed with a diameter equal to or slightly larger than the diameter (D3) of the third section (524). The head portion (51) may be positioned above the socket (54) in the drawing by passing through the through hole (550) of the socket (54) described later in an interference fit when assembling the parts.

[0086] The connecting shaft portion (52) may be an antenna shape including multiple sections with different diameters. The connecting shaft portion (52) may be a foldable antenna shape in which the diameter of a section located relatively lower among the multiple sections distinguished by diameter is larger than the diameter of a section located upper. In other words, as in the example of the drawing (Fig. 6), it may be a foldable antenna shape in which the diameter gradually increases as it goes lower in the drawing.

[0087] The connecting shaft portion (52) includes four sections (hereinafter, the sections are distinguished using the terms 'first section', 'second section', 'third section', and 'fourth section') having different diameters. The first section (520) located at the uppermost end of the connecting shaft portion (52) is connected to the head portion (51), and the fourth section (526) located at the lowest end can be connected to the support portion (53). In addition, the second section (522) and the third section (524) can be formed between the first section (520) and the fourth section (526).

[0088] The first section (520) can be connected to the head (51). The first section (520) can be formed with a first diameter (D1) smaller than the head (51). The third section (524) can be formed with a third diameter (D3) larger than the first diameter (D1). When the stud (50) is relatively displaced with respect to the socket (54), the third section (524) can slide along the through hole (550) while contacting the inner surface (551) of the through hole (550) of the socket (54), which will be described later.

[0089] The second section (522) may be formed between the first section (520) and the third section (524) to be longer than the first section (520) and the third section (524). The fourth section (526) may be formed between the third section (524) and the support member (53) to have a length equal to or longer than the third section (524). The second section (522) may have a second diameter (D2) and may protrude upward from the socket (54) together with the first section (520), and an elastic unit (57) may be concentrically coupled to the fourth section (526), ​​so that the fourth section (526) may be aligned with the inner side of the socket (54) together with the elastic unit (57).

[0090] In the first embodiment, the second diameter (D2) may be a diameter that is larger than the first diameter (D1) of the first section (520) and smaller than the third diameter (D3) of the third section (524). The fourth section (526) may be formed with a fourth diameter (D4) that is the largest among the four sections. The fourth diameter (D4) may be a diameter that is smaller than the diameter of the support (53). That is, the fourth diameter (D4) may be a diameter that is larger than the third diameter (D3) and smaller than the diameter of the support (53).

[0091] The stud (50), which includes a head portion (51), a connecting shaft portion (52), and a support portion (53), may be made of an alloy material having low electrical resistance and high thermal conductivity to enable effective heat transfer between two objects to be connected, and excellent chemical resistance or corrosion resistance in a reactive gas environment. The stud (50) may be made of, for example, an N60 material containing a specific ratio of metals such as nickel, chromium, iron, and tungsten.

[0092] Fig. 7 is a drawing specifically illustrating a socket cross-section of a connection assembly according to the first embodiment.

[0093] Referring to FIG. 7 and the preceding FIGS. 2 to 5, the socket (54) may be composed of a cover portion (55) and a fastening tube portion (56). The cover portion (55) has a through hole (550) in the center, and the fastening tube portion (56) may be integrally formed on one side (lower side in the drawing) of the cover portion (55). As the stud (50) passes through the through hole (550), a portion of the stud (50) (a portion of the head and the connecting shaft portion) protrudes above the socket (54), and a male screw thread (omitted) may be formed at a predetermined pitch on the outer surface of the fastening tube portion (56).

[0094] The socket (54) can be firmly fixed to a lower object, for example, an electrode of the aforementioned plasma processing device, through a fastening member (56) (see FIG. 9 below). A fastening groove (102, see FIG. 9) for fastening the socket (54) can be formed in the electrode, and a female thread is formed on the inner surface (inner circumference) of the fastening groove (102) with a pitch corresponding to the male thread, so that the socket (54) can be firmly fastened and fixed to the fastening groove (102) of the electrode in a screw fastening manner.

[0095] The socket (54) may be composed of a synthetic resin having electrically insulating properties. The socket (54) may be composed of a polyimide polymer having high temperature durability, high electrical insulation, excellent mechanical strength, and chemical resistance. For example, the socket (54) may be composed of a material such as Solvay's Torlon 5030, a type of polyimide polymer and a high-performance engineering plastic material.

[0096] The cover portion (55) includes a polygonal head portion (552) and a flange portion (554). A fastening torque for fastening the socket (54) to the lower object can be input through the polygonal head portion (552), and a through hole (550) can be formed in the polygonal head portion (552). The outer diameter of the flange portion (554) can be formed to be larger than the outer diameter of the fastening tube portion (56), which is a portion that is screw-fastened to the lower object and is firmly fixed thereto. Therefore, the socket (54) fastened to the coupling groove can maintain a stable, non-shaking fixed state.

[0097] The third section (524) of the aforementioned connecting shaft portion (52) may be positioned in the through hole (550). In the first embodiment, the third section (524) may slide along the through hole (550) while coming into contact with the inner surface of the through hole (550). To this end, the third section (524) may be formed to have the same diameter as the diameter (inner diameter) of the through hole (550). That is, in the first embodiment, the third diameter (D3) may be formed to have the same size as the diameter (inner diameter, d1) of the through hole (550).

[0098] Here, it should be clearly stated that ‘the third diameter (D3) and the diameter (inner diameter) of the through hole are the same’ does not mean that the diameters are completely the same, but that ‘the diameter (inner diameter) of the through hole (550) is made slightly larger than the diameter of the third section (524) within a mechanically allowable error range so that the inner surface of the through hole (550) and the outer surface of the third section (524) maintain a predetermined surface or line contact while allowing smooth sliding movement of the third section (524).

[0099] In this first embodiment, when the head of the stud is in an assembled state and the connecting shaft part is in contact with the through hole and slides along the through hole, movement or tilting (left-right shaking in the drawing) of the stud in a lateral direction, i.e., a direction perpendicular to the longitudinal direction of the stud, can be reliably prevented or suppressed while the socket is fastened to the lower object.

[0100] Accordingly, when interconnecting two objects to be connected, the stud can be maintained in a precisely vertical alignment without shaking toward the intended joining position (e.g., the designated joining position of the upper object). As a result, the task of aligning one end (head) of the stud to a position where it can be precisely joined to the upper object becomes easier, and the problem of the prior art in which the stud shakes during the connecting process, making it difficult to connect the objects, can be clearly resolved.

[0101] In addition, due to the structural feature that a portion of the connecting shaft (the third section) is in close contact with the inner surface of the through hole, the gap between the through hole of the socket and the connecting shaft of the stud can be minimized from the initial state of fastening (the first state described below) before the stud is pulled upward. As a result, the inflow of reactive gas between the through hole and the connecting shaft can be minimized, thereby exerting a service life extension effect that delays corrosion of the inner surface of the through hole or the stud.

[0102] Fig. 8 is a drawing showing an elastic unit applied to a connecting assembly according to the first embodiment.

[0103] Referring to FIG. 8 and the preceding FIGS. 2 to 5, the elastic unit (57) can be aligned within the fastening tube (56) between the support (53) and the cover (55). The elastic unit (57) can be compressed between the support (53) and the cover (55) to store restoring force when the stud (50) is pulled upwards as shown in the drawing. In addition, by using the stored restoring force to push the stud (50) downwards as shown in the drawing, a more solid connection between the stud (50) and the upper object can be achieved.

[0104] The elastic unit (57) includes a spring stack (Spring stack, 570) in which two or more disk springs (Disk springs, 572) are stacked, as shown in the examples of the drawings (Figs. 2 to 5, Fig. 8). The spring stack (570) may be a separate configuration in which two or more disk springs (572) are simply stacked (see (a) of Fig. 8). The spring stack (570) may also be an integral configuration in which adjacent disk springs (572) are joined by welding (see (b) of Fig. 8).

[0105] The elastic unit (57) includes a flat washer (574) arranged between the spring stack (570) and the cover portion (55) of the socket (54). The flat washer (574) functions to ensure that the pressure exerted by the compressed spring stack (570) on the socket (54) when the spring stack (570) is compressed, more specifically, the pressing force exerted by the compressed spring stack (570) on the cover portion (55) of the socket (54), is evenly distributed and transmitted to the socket (54). To this end, the flat washer (574) may be formed with an outer diameter that is larger than the diameter (d1) of the through hole (550) and smaller than the inner diameter (d2) of the fastening pipe portion (56).

[0106] In a non-compressed state, the outer diameter (omitted) of the spring stack (570) may be formed to be a predetermined size smaller than the inner diameter (d2) of the fastening tube portion (56). Accordingly, a predetermined gap may be formed between the outer surface of the spring stack (570) and the inner surface (561) of the fastening tube portion (56) (see FIG. 5). The gap (g) provides a free space that allows the spring stack (570) to easily expand in the radial direction without interference with the fastening tube portion (56) when compressed.

[0107] The spring stack (570) and the flat washer (574) may be made of various materials. The spring stack (570) and the flat washer (574) may be made of a material having high hardness and elasticity. The spring stack (570) and the flat washer (574) may be made of a stainless steel alloy having high hardness and corrosion resistance. The stainless steel alloy having high hardness and corrosion resistance may be, for example, SUS 316, SUS 630, SUS 304, Nitronic 60, etc.

[0108] Meanwhile, in the preceding drawings 2 to 5, the reference numerals 58-1 and 58-2 indicate a silicone gasket and a spring washer, respectively. The silicone gasket (58-1) and the spring washer (58-2) may be installed to cover the upper surface of the socket (54), more precisely, part or all of the upper surface of the cover part (55) of the socket (54). The silicone gasket (58-1) and the spring washer (58-2) cover part or all of the upper surface of the cover part (55) to prevent corrosion of the upper surface of the cover part (55) by reactive gases.

[0109] The silicone gasket (58-1) and the spring washer (58-2) particularly block or prevent the reactive gas from flowing into the through hole (550) through the gap between the open end of the through hole (upper opening in the drawing) and the stud (50). The silicone gasket (58-1) and the spring washer (58-2) may be arranged in a structure in which they are stacked on the socket (54) as shown in the examples of the drawings (FIGS. 4 and 5).

[0110] According to this configuration, that is, a configuration in which a silicone gasket (58-1) and a spring washer (58-2) are stacked and arranged on a socket (54), the inflow of reactive gas into the through hole (550) can be more reliably blocked or prevented due to the secondary blocking of reactive gas inflow (primary blocking of reactive gas by the silicone gasket and secondary blocking of reactive gas by the spring washer), and thus, corrosion of the inner surface of the through hole (550) can be reliably suppressed or minimized.

[0111] The material of the silicone gasket (58-1) and the spring washer (58-2) may be a stainless steel alloy, for example, SUS 316, SUS 630, SUS 304, Nitronic 60, etc., and the overall shape may be formed in an annular shape. At this time, the inner diameter (omitted) of the annular silicone gasket (58-1) and the spring washer (58-2) may be formed to have the same size as the diameter (D3) of the third section (524) formed as the third diameter (D3) in the aforementioned connecting shaft portion (52).

[0112] Here, the term 'same size' does not mean that the inner diameter of the silicone gasket and silicone washer is completely the same as the diameter (D3) of the third section, but rather that 'the inner diameter of the gasket (58-1) and the spring washer (58-2) is formed to be slightly larger than the diameter (D3) of the third section (524) within a mechanically permissible error range' so that the inner surface of the silicone gasket and silicone washer and the outer surface of the third section (524) maintain a predetermined surface or line contact while allowing smooth sliding movement of the third section (524).

[0113] A mounting groove (553) may be formed on the upper surface of the cover portion (55). The mounting groove (553) may be formed in an annular shape along the upper circumference of the through hole (550) exposed to the upper surface of the cover portion (55). The mounting groove (553) may be formed on the upper circumference of the through hole (550) to a depth equal to or slightly greater than the thickness of the spring washer (58-2). In this case, the spring washer (58-2) may be stably mounted on the cover portion (55) without protruding above the cover portion (55) by the mounting groove (553).

[0114] A sealing projection (580) may be formed on the silicone gasket (58-1). The sealing projection (580) may be formed on both the upper and lower surfaces of the silicone gasket (58-1). Although not shown, the sealing projection (580) may be formed on only one of the upper and lower surfaces of the silicone gasket (58-1). For example, it may be formed on only the lower surface of the silicone gasket (58-1). The sealing projection (580) may be formed in a continuous ring shape concentric with the silicone gasket (58-1).

[0115] The sealing projection (580) serves to block the gap that may be formed between the spring washer (58-2) and the silicone gasket (58-1) and between the cover part (55) and the upper object, thereby preventing the infiltration of reactive gas. In this case, since the inflow of reactive gas into the through hole (550) is more reliably suppressed, corrosion of the inner surface of the through hole (550) or the stud (50) can be more reliably prevented.

[0116] FIG. 9 and FIG. 10 are mounting examples showing the state of connecting an upper object and a lower object using a connecting assembly according to the first embodiment of the present invention. FIG. 9 is a drawing showing a state before a socket is connected to the lower object and the head of the connecting shaft is coupled to the upper object, and FIG. 10 is a mounting example showing a state in which the lower object and the upper object are connected (coupled) by completely coupling the head of the connecting shaft to the upper object.

[0117] The connection assembly (5) according to the first embodiment can be firmly fixed to the lower object (1) by having the socket (54) screw-fastened to the connecting groove (102) of the lower object (1), as shown in Fig. 9. Hereinafter, for convenience of explanation, the assembly state of the connection assembly (5) as shown in Fig. 9 is referred to as the 'first state'.

[0118] For reference, the first state is a state before the socket (54) is coupled to the coupling groove (102) of the lower object (1) and the head (51) of the stud (50) is coupled to the designated coupling position of the upper object, and means a state in which the support portion (53) of the stud (50) is seated on the bottom surface (104) of the coupling groove (102) as shown in FIG. 9 (a state in which it is in physical contact with the bottom surface of the coupling groove).

[0119] In the first state, the third section (524) of the connecting shaft portion (52) physically contacts a portion of the height direction of the inner surface (551) of the through hole (550). Accordingly, the gap between the through hole (550) and the third section (524) is formed very narrowly, and as a result, the inflow of reaction gas through the gap (the gap between the through hole (550) and the third section (524)) is suppressed or minimized, thereby exerting a service life extension effect that delays corrosion of the inner surface of the through hole (550) or the stud (50).

[0120] In addition, in the first state, the third section (524) of the connecting shaft portion (52) is surrounded by the through hole (550) and physically closely contacts a portion of the inner surface of the through hole (550) in the height direction, thereby preventing movement or tilting (left-right shaking in the drawing) of the stud (50) in a direction perpendicular to the longitudinal direction of the connecting assembly (5) (left-right direction in the drawing). Accordingly, the stud (50) can be maintained in a state of being accurately vertically aligned toward the intended joining position without shaking.

[0121] In the first state, the third section (524) of the connecting shaft portion (52), in which a portion of the inner surface of the through hole (550) in the height direction is in close contact with its outer surface, may be formed to a specific length. The specific length may preferably be a length in which, in the first state, the third section (524) overlaps and physically closely contacts the inner surface of the through hole (550) from a height of 0.4h to 0.67h from the bottom of the through hole (550), based on the total height (h) of the through hole (550) of FIG. 9.

[0122] The connecting assembly (5) according to the first embodiment can be firmly fixed to the upper object (2) by the head (51) being coupled to a designated or fixed position of the upper object (2) while the stud (50) is pulled upward in the first state as shown in Fig. 9. Hereinafter, for convenience of explanation, the assembly state of the connecting assembly (5) as shown in Fig. 10 is referred to as a 'second state'.

[0123] For reference, the second state means a state in which the socket (54) is coupled to the coupling groove of the lower object, and the head (51) of the stud (50) is firmly coupled to the designated coupling position of the upper object (2), and the expanded inclined surface (525) formed at the boundary between the third section (524) and the fourth section (526) and the chamfered surface (c, inclined surface formed at the lower edge area of ​​the through hole) of the socket (54) are in contact with each other, so that the stud (50) can no longer be pulled upward (non-rising state).

[0124] The head (51) of the stud (50) can be attached to the upper object in various ways. Preferably, the stud can be firmly attached and fixed to the upper object by a method using a fastener that is installed on the upper object and has a groove or slit for hooking and fixing the head (51). For example, the stud can be firmly attached to the upper object by a method using a rotating cam shaft as proposed in Korean Patent No. 10-1708060.

[0125] During the process of joining with the upper object, the stud (50) can be pulled upward as shown in the drawing. Accordingly, the elastic unit (57) can be compressed between the support (53) and the cover (55) of the socket (54) to store restoring force. The restoring force stored by the elastic unit (57) acts as a force that pushes the stud (50) downward as shown in the drawing, and therefore, the bonding force between the stud (50) and the upper object (2) is further increased, so that a strong bond can be implemented between the connecting assembly (5) and the upper object (2).

[0126] In the second state where the stud (50) is pulled upward (the stud (50) rises), the third section (524) formed with the third diameter (D3) on the connecting shaft (52) is in close physical contact with the entire inner surface of the through hole (550). Accordingly, the gap between the inner surface of the through hole (550) and the outer surface of the third section (524) is formed very narrowly from the upper opening of the through hole (550), and therefore, the inflow of reaction gas through the gap can be further suppressed or minimized compared to the first state.

[0127] In addition, when the lower substrate and the upper object are physically and mechanically completely connected through the connecting assembly as shown in FIG. 10, the socket (54) and the stud (50) can directly / indirectly exchange heat with each other through the contact of the through hole (550) and the third section (524) and the compressed elastic unit (57). Accordingly, the upper object and the lower substrate can quickly and easily reach thermal equilibrium, and the mechanical stress caused by the thermal difference between the two substrates (1, 2) can be relieved.

[0128] Second embodiment

[0129] Fig. 11 is a cutaway perspective view of a connecting assembly according to a second embodiment of the present invention, and Fig. 12 is a front view of the cut surface of the connecting assembly illustrated in Fig. 11.

[0130] Referring to FIGS. 11 and 12, a connecting assembly (5') according to a second embodiment includes a stud (50), a socket (54), and an elastic unit (57). In the second embodiment, the socket (54) and the elastic unit (57) are identical to those of the first embodiment described above. In addition, the configuration of the connecting shaft portion (52) of the stud (50), the joint structure between the connecting shaft portion (52) and the through hole (550) of the socket (54), and the diameter relationship thereof are also identical to those of the first embodiment.

[0131] However, the second embodiment differs from the first embodiment in the support portion (53') that constitutes the stud (50). Therefore, in the following, duplicate descriptions of the same configuration as the first embodiment described above will be omitted, and only the portion (support portion) that is structurally different from the first embodiment will be briefly examined. For convenience of explanation, the same reference numbers will be assigned to the same components as the first embodiment described above.

[0132] The connecting assembly (5') according to the second embodiment can slide along the through hole (550) while the third section (524) of the connecting shaft portion (52) comes into contact with the inner surface of the through hole (550), as in the first embodiment. In addition, the connecting assembly (5') according to the second embodiment can slide along the inner surface (561) of the fastening pipe portion (56) while the support portion (53') of the stud (50) comes into contact with the inner surface of the through hole.

[0133] In the connecting assembly (5') according to the second embodiment, the diameter of the support portion (53') is formed as a fifth diameter (D5) that is the same as the inner diameter (d2) of the fastening tube portion (56), so that an operation in which the support portion (53') slides along the inner surface (561) of the fastening tube portion (56) while coming into contact with the inner surface (561) can be implemented.

[0134] Here, 'same' does not mean that the sizes or diameters (inner diameters) are completely the same, but it is a term used to mean that 'the inner diameter (d2) of the fastening pipe (56) is made slightly larger than the diameter (D5) of the support (53) within the mechanically permissible error range' so that the inner surface of the fastening pipe (56) and the outer surface of the support (53') maintain a predetermined surface or line contact with each other while allowing smooth sliding movement of the support (53').

[0135] Fig. 13 is a drawing showing the operating state of a connecting assembly according to a second embodiment of the present invention.

[0136] Referring to Fig. 13, in the first state (see (a) of Fig. 13), the third section (524) of the connecting shaft portion (52) physically contacts a portion of the inner surface of the through hole (550) in the height direction. Accordingly, the gap between the through hole (550) and the third section (524) is formed to be very narrow, and the inflow of reaction gas through the gap is suppressed or minimized, thereby exerting a life extension effect that delays corrosion of the inner surface of the through hole (550) or the stud (50).

[0137] In addition, in the first state, the third section (524) of the connecting shaft portion (52) is surrounded by the through hole (550) and physically closely contacts a portion of the inner surface of the through hole (550) in the height direction, thereby preventing movement or tilting (left-right shaking in the drawing) of the stud (50) in a direction perpendicular to the longitudinal direction of the connecting assembly (5) (left-right direction in the drawing). As a result, the stud (50) can be maintained in a state of being accurately vertically aligned toward the intended joining position without shaking.

[0138] For reference, the first state is a state before the socket (54) is coupled to the coupling groove (102) of the lower object (1) and the head (51) of the stud (50) is coupled to the designated coupling position of the upper object (2), similar to the first embodiment described above, and means a state in which the support portion (53') of the stud (50) is seated on the bottom surface (104) of the coupling groove (102) of the lower object (1) (a state in physical contact with the bottom surface of the coupling groove).

[0139] In the first state, when the stud (50) is pulled upward, the head (51) of the stud (50) is coupled to a designated or fixed position of the upper object (2) to enter the second state (see (b) of FIG. 13). In the process of transitioning from the first state to the second state, in the second embodiment, the third section (524) of the connecting shaft portion (52) can slide along the through hole (550) while coming into contact with the inner surface of the through hole (550), and the support portion (53) of the stud (50) can slide along the inner surface (561) of the fastening tube portion (56) while coming into contact with the inner surface.

[0140] In this way, since the connection assembly according to the second embodiment is configured to slide while the stud is in contact with the socket at two different positions, movement or tilting (left-right shaking in the drawing) of the stud in the direction perpendicular to the longitudinal direction of the connection assembly (left-right direction in the drawing) is more reliably prevented during the transition to the second state, and therefore, the stud can more stably maintain a vertically aligned state.

[0141] Third embodiment

[0142] Fig. 14 is a cutaway perspective view of a connecting assembly according to a third embodiment of the present invention, and Fig. 15 is a front view of the cut surface of the connecting assembly illustrated in Fig. 14.

[0143] Referring to FIGS. 14 and 15, a connecting assembly (5") according to a third embodiment includes a stud (50), a socket (54), and an elastic unit (57). In the third embodiment, the socket (54) and the elastic unit (57) are the same as the socket (54) and the elastic unit (57) of the first embodiment described above. In addition, the configuration of the connecting shaft portion (52) of the stud (50), the joint structure between the connecting shaft portion (52) and the through hole (550) of the socket (54), and the diameter relationship thereof are also the same as in the first embodiment.

[0144] However, the third embodiment differs from the first embodiment in that it further includes a bushing (59) added to the support portion (53) constituting the stud (50). Therefore, in the following, duplicate descriptions of the same configuration as the first embodiment described above will be omitted, and only the structurally different parts from the first embodiment will be briefly examined. For convenience of explanation, the same reference numbers are assigned to the same components as the first embodiment described above.

[0145] The connecting assembly (5") according to the third embodiment can slide along the through hole (550) while the third section (524) comes into contact with the inner surface (551) of the through hole (550), as in the first embodiment. In addition, the connecting assembly (5) according to the third embodiment can slide along the inner surface (561) of the fastening pipe portion (56) while the bushing (59) added to the support portion (53) of the stud (50) comes into contact with the inner surface (561).

[0146] The bushing (59) may be composed of an upper plate (590) and a side plate (592). The upper plate (590) may be concentrically connected to the fourth section (526) of the connecting shaft (52) to which the support (53) is connected. The side plate (592) may extend vertically downward from the outer edge of the upper plate (590). The upper plate (590) may be installed to cover the upper surface of the support (53) formed in an annular shape, and the side plate (592) may be formed in a cylindrical shape and installed to closely cover (enclose) the outer surface of the support (53).

[0147] In the connecting assembly (5") according to the third embodiment, the bushing (59) can slide along the inner surface (561) of the connecting pipe portion (56) while coming into contact with the inner surface (561) as mentioned above. To this end, in the connecting assembly (5") according to the third embodiment, the outer diameter (d3) of the bushing (59) can be formed to be the same size as the inner diameter (d2) of the connecting pipe portion (56).

[0148] Here, the expression 'same size' does not mean that the diameters (inner diameter and outer diameter) are completely the same, but it is preferable to understand and interpret it as meaning that 'the inner diameter (d2) of the connecting pipe part (56) is made slightly larger than the outer diameter (d3) of the side plate part (592) within the mechanically permissible error range' so that the inner surface of the connecting pipe part (56) and the outer surface of the side plate part (592) of the bushing (59) maintain a predetermined surface or line contact with each other while allowing smooth sliding movement of the bushing (59).

[0149] The bushing (59) can be made of a synthetic resin having a smooth surface to reduce frictional resistance and possessing heat-resistant, chemical-resistant, wear-resistant, and insulating properties. The material of the bushing (59) can preferably be PTFE (Polytetrafluoroethylene) or PAI (Polyamide-imide). Of course, it is not limited to the mentioned materials, and there is no particular limitation as long as it is a synthetic resin having a smooth surface to reduce frictional resistance and possessing heat-resistant, chemical-resistant, wear-resistant, and insulating properties.

[0150] Fig. 16 is a drawing showing the operating state of a connecting assembly according to a third embodiment of the present invention.

[0151] Referring to Fig. 16, in the first state (see (a) of Fig. 16), the third section (524) of the connecting shaft portion (52) physically contacts a portion of the inner surface of the through hole (550) in the height direction. Accordingly, the gap between the through hole (550) and the third section (524) is formed to be very narrow, and as a result, the inflow of reaction gas through the gap (the gap between the through hole (550) and the third section (524)) can be suppressed or minimized.

[0152] In addition, in the first state, the third section (524) of the connecting shaft portion (52) is surrounded by the through hole (550) and physically closely contacts a portion of the inner surface of the through hole (550) in the height direction, thereby preventing movement or tilting (left-right shaking in the drawing) of the stud (50) in the direction perpendicular to the longitudinal direction of the connecting assembly (5") (left-right direction in the drawing). As a result, the stud (50) can be maintained in a state of being accurately vertically aligned toward the intended joining position without shaking.

[0153] For reference, the first state is a state before the socket (54) is coupled to the coupling groove of the lower object and the head (51) of the stud (50) is coupled to the designated coupling position of the upper object (2), similar to the first embodiment described above, and means a state in which the support portion (53) of the stud (50) is seated on the bottom surface of the coupling groove of the lower object (a state in physical contact with the bottom surface of the coupling groove).

[0154] In the first state, when the stud (50) is pulled upward, the head (51) of the stud (50) is coupled to a designated or fixed position of the upper object (2) to enter the second state (see (b) of FIG. 16). At this time, in the process of transitioning from the first state to the second state, the third section (524) of the connecting shaft portion (52) slides along the through hole (550) while coming into contact with the inner surface of the through hole (550), and the bushing (59) covering (enclosing) the support portion (53) can slide along the inner surface (561) of the fastening tube portion (56) while coming into contact with the inner surface (561).

[0155] In this way, the connection assembly according to the third embodiment is configured so that the stud slides in contact with the socket at two different positions, thereby more reliably preventing movement or tilting (left-right shaking in the drawing) of the stud in the direction perpendicular to the longitudinal direction of the connection assembly (left-right direction in the drawing) during the transition to the second state, and therefore the stud can more stably maintain a vertically aligned state.

[0156] Meanwhile, Fig. 17 is a drawing illustrating a preferred modified example of a connecting assembly according to the first embodiment described above. More specifically, it is a drawing illustrating a preferred modified example of a spring stack constituting an elastic unit.

[0157] As illustrated in FIG. 17, the spring stack (570) may be formed with an outer diameter and an inner diameter such that all or part of its outer surface is in surface or linear contact with the inner surface of the fastening tube (56) when at maximum compression (in the second state as in FIG. 17), and all or part of its inner surface (spring stack) is in surface or linear contact with the outer surface of the fourth section (526) of the connecting shaft (52). In other words, the outer diameter of the maximum compressed spring stack (570) is the same as the inner diameter of the fastening tube (56), and the inner diameter may be formed with a size equal to the diameter (D4) of the fourth section (526).

[0158] Here, 'same size' does not mean that the outer diameter of the maximum compressed spring stack (570) is completely the same as the inner diameter of the fastening tube (56) and the inner diameter is completely the same as the diameter (D4) of the fourth section (526), ​​but rather that 'within a mechanically permissible error range, the outer diameter and inner diameter of the spring stack (570) in the maximum compressed state are formed to be slightly smaller than the inner diameter of the fastening tube (56) and slightly larger than the diameter of the fourth section (526), ​​respectively.'

[0159] According to this modified example, in addition to the entire inner surface of the through hole (550) and the third section (524) of the connecting shaft portion (52) being in physical close contact in the second state where the spring stack (570) is compressed to the maximum, the outer surface and inner surface of the spring stack (570) are physically close contact with the inner surface of the fastening tube portion (56) and the outer surface of the fourth section (526) of the connecting shaft portion (52), respectively, so that the left-right movement or tilting of the stud (50) in the drawing can be more reliably suppressed.

[0160] Although the above has been described and illustrated as an example of a modified spring stack being applied to a connecting assembly according to the first embodiment, a spring stack according to a modified example (a spring stack formed to a size such that its outer surface and inner surface, respectively, can physically closely contact the inner surface of the socket and the outer surface of the fourth section when compressed to the maximum) can be equally applied to the connecting assemblies according to the second and third embodiments described above. Therefore, it is clearly stated that such a modification can also be included in the scope of the present invention.

[0161] The above description is merely an illustrative illustration of the technical idea of ​​the present invention, and those skilled in the art will appreciate that various modifications and variations can be made without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the technical idea of ​​the present invention, and the scope of the technical idea of ​​the present invention is not limited by these embodiments. The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within a scope equivalent thereto should be interpreted as being included in the scope of the rights of the present invention.

Claims

1. As a connecting assembly for attaching one of the upper and lower objects to another object or interconnecting two objects in a reactive gas atmosphere, A stud including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; A socket including a cover part having a through hole formed in the center and a fastening pipe part connected to the cover part and fastened to the lower object; and An elastic unit is arranged concentrically on the stud and aligned within the fastening member; The above connecting shaft part, A first section connected to the head portion and formed with a first diameter smaller than the head portion; A third section is formed with a third diameter larger than the first diameter and includes a third section that slides along the through hole while contacting the inner surface of the through hole, A connecting assembly, wherein the third diameter is the same as the diameter of the through hole.

2. In paragraph 1, The above connecting shaft part, A second section formed with a second diameter between the first section and the third section, A connecting assembly further comprising a fourth section formed with a fourth diameter between the third section and the support member.

3. In paragraph 2, The second section protrudes from the upper portion of the socket together with the first section, A connecting assembly in which the elastic unit is concentrically connected to the fourth section, and the fourth section is aligned within the connecting tube portion together with the elastic unit.

4. In paragraph 2, The second diameter is larger than the first diameter and smaller than the third diameter, A connecting assembly, wherein the fourth diameter is larger than the third diameter and smaller than the diameter of the support formed by the fifth diameter.

5. As a connecting assembly for attaching one of the upper and lower objects to another object or interconnecting two objects in a reactive gas atmosphere, A stud including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; A socket including a cover part having a through hole formed in the center and a fastening pipe part connected to the cover part and fastened to the lower object; and An elastic unit is arranged concentrically on the stud and aligned within the fastening member; A connecting assembly formed with a fifth diameter, the diameter of the support portion being the same as the inner diameter of the connecting tube portion.

6. In paragraph 5, The above connecting shaft part, A first section connected to the head portion and formed with a first diameter smaller than the head portion; A third section formed by a third diameter, A second section formed with a second diameter between the first section and the third section, A connecting assembly comprising a fourth section formed with a fourth diameter between the third section and the support member.

7. In paragraph 6, The second section protrudes from the upper portion of the socket together with the first section, A connecting assembly in which the elastic unit is concentrically connected to the fourth section, and the fourth section is aligned within the connecting tube portion together with the elastic unit.

8. In paragraph 6, The second diameter is larger than the first diameter and smaller than the third diameter, A connecting assembly wherein the fourth diameter is larger than the third diameter and smaller than the fifth diameter.

9. In paragraph 5, The above connecting shaft part, A third section formed with a third diameter and sliding along the through hole while in contact with the inner surface of the through hole, A connecting assembly, wherein the third diameter is the same as the diameter of the through hole.

10. As a connecting assembly for attaching one of the upper and lower objects to another object or interconnecting two objects in a reactive gas atmosphere, A stud including a connecting shaft portion, a head portion formed at one end of the connecting shaft portion and connected or fixed to the upper object, and a support portion formed at the other end of the connecting shaft portion; A socket including a cover part having a through hole formed in the center and a fastening pipe part connected to the cover part and fastened to the lower object; An elastic unit concentrically arranged on the stud and aligned within the fastening member; and A bushing coupled to the stud so as to surround the support; A connecting assembly in which the outer diameter of the above bushing is the same as the inner diameter of the above connecting pipe.

11. In paragraph 10, The above connecting shaft part, A first section connected to the head portion and formed with a first diameter smaller than the head portion; A third section formed by a third diameter, A second section formed with a second diameter between the first section and the third section, A connecting assembly comprising a fourth section formed with a fourth diameter between the third section and the support member.

12. In paragraph 11, The second section protrudes from the upper portion of the socket together with the first section, A connecting assembly in which the elastic unit is concentrically connected to the fourth section, and the fourth section is aligned within the connecting tube portion together with the elastic unit.

13. In paragraph 11, The second diameter is larger than the first diameter and smaller than the third diameter, A connecting assembly wherein the fourth diameter is larger than the third diameter and smaller than the fifth diameter, which is the diameter of the support.

14. In paragraph 10, The above connecting shaft part, A third section formed with a third diameter and sliding along the through hole while in contact with the inner surface of the through hole, A connecting assembly, wherein the third diameter is the same as the diameter of the through hole.

15. In paragraph 10, The above bushing, An annular upper plate concentrically connected to the fourth section of the connecting shaft to which the support is connected and covering the upper surface of the support; A connecting assembly comprising a cylindrical side plate disposed vertically with the upper plate and covering the outer surface of the support portion.

16. In paragraph 10, The above bushing is a connecting assembly comprising a synthetic resin having heat-resistant, chemical-resistant, wear-resistant, and insulating properties.

17. In paragraph 10, The above bushing is a connecting assembly comprising PTFE (Polytetrafluoroethylene) or PAI (Polyamide-imide) material.

18. In any one of paragraphs 1, 5 and 10, An annular spring washer provided to cover part or all of the upper surface of the cover portion; and Further comprising a silicone gasket laminated on the spring washer; A connecting assembly in which the inner diameter of the spring washer and silicone gasket is the same as the diameter of the third section formed with the third diameter in the connecting shaft portion.

19. In paragraph 18, A circular mounting groove is formed around the upper circumference of the through hole exposed to the upper surface of the cover portion with a depth corresponding to the thickness of the spring washer, A connecting assembly in which the spring washer is seated in the above-mentioned seating groove.

20. In paragraph 18, A sealing projection is formed on either the upper or lower surface or one of the upper and lower surfaces of the above-mentioned annular silicone gasket, A connecting assembly in which the above-mentioned sealing projection is formed in a continuous ring shape concentric with the silicone gasket.

21. In any one of paragraphs 1, 5 and 10, A connecting assembly in which a third section formed with a third diameter on the connecting shaft portion and a portion of the inner surface of the through hole in the height direction in the first state are in physical contact.

22. In paragraph 21, In the above first state, A connecting assembly in which the third section physically contacts the inner surface of the through hole at a height of 0.4h to 0.67h from the bottom of the through hole, based on the total height (h) of the through hole.

23. In paragraph 21, The above first state is, A connecting assembly in which the socket is coupled to the coupling groove of the lower object, the head of the stud is in a state before being coupled to the designated coupling position of the upper object, and the support is seated on the bottom surface of the coupling groove.

24. In any one of paragraphs 1, 5 and 10, A connecting assembly in which the entire inner surface of the through hole and the third section formed with a third diameter on the connecting shaft portion are in physical contact in the second state.

25. In paragraph 24, The second state is, A connecting assembly in which the socket is coupled to the coupling groove of the lower object, and the head of the stud is coupled to the designated coupling position of the upper object, such that the expanded slope of the fourth section below the third section and the boundary of the third section and the lower chamfered surface of the through hole are in contact with each other, so that the stud can no longer rise.

26. In paragraph 25, A connecting assembly in which the spring stack of the elastic unit is compressed to the maximum in the second state, the outer diameter of the spring stack compressed to the maximum is the same as the inner diameter of the connecting tube, and the inner diameter of the spring stack compressed to the maximum is the same as the diameter of the fourth section.

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