Voltage / current sensor applicable to various frequencies

Abstract

A voltage / current sensor of the present disclosure may comprise: a conductor unit including an inner cylinder and an outer cylinder; a sensor unit located between the inner cylinder and the outer cylinder of the conductor unit and including a coil around which an electric wire is wound at least once, wherein both end portions of the coil are connected to a pair of connectors installed on the outer cylinder, the pair of connectors are connected to two coaxial cables having an identical length, and resistors having an identical resistance value (Rp) are connected to respective ends of the two coaxial cables; a measurement unit configured to measure a first voltage (V1) and a second voltage (V2) at the respective ends of the two coaxial cables; and a processor unit configured to derive a voltage (V) and a current (I) of high-frequency power transmitted through a high-frequency power line by using the first voltage (V1) and the second voltage (V2).

Description

[0001] Description of the Invention

[0002]

Title of invention

[0003]

Technical Field

[0004]

Background Technology of the Invention

[0005]

Contents of the invention

[0006]

Problem to be Solved

[0007]

Means for Solving the Problem

[0008] [Effect of the invention] The voltage / current sensor of the present disclosure can accurately detect the voltage / current of power transmitted through a high-frequency power line in real time by compensating for errors of the sensor itself. The voltage / current sensor of the present disclosure can detect voltage / current for power of various frequencies transmitted through a high-frequency power line. The effects of the present disclosure are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present disclosure or the composition of the invention described in the claims.

[0009] [Brief Description of Drawings] Fig. 1 is a schematic diagram of a voltage / current sensor of the present disclosure. Fig. 2 is a schematic diagram of a high-frequency power line and connection configuration of a voltage / current sensor according to an embodiment of the present disclosure. Fig. 3 is a cross-sectional diagram of a high-frequency power line and connection configuration in a matching network of a voltage / current sensor according to an embodiment of the present disclosure. Fig. 4 is a cross-sectional diagram of a high-frequency power line and connection configuration between a power source and a load of a voltage / current sensor according to an embodiment of the present disclosure. Fig. 5 is a schematic diagram of a conductor portion and a sensor portion of a voltage / current sensor of the present disclosure. Fig. 6 is a schematic diagram of a use configuration of a voltage / current sensor of the present disclosure in a plasma process. Fig. 7 is a conceptual diagram of a current return path of a voltage / current sensor of the present disclosure. Fig. 8 is an equivalent circuit of a voltage / current sensor of the present disclosure. Fig. 9 is experimental data of a voltage / current sensor of the present disclosure. Fig. 10 is a schematic diagram of a voltage / current sensor of the present disclosure. Figure 11 is a conceptual diagram of error correction due to the difference between the center position of the coil of the sensor section of the voltage / current sensor of the present disclosure and the position of the load plane.

[0010] [Specific details for carrying out the invention] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the attached drawings. Regardless of the drawing numbers, identical or similar components will be given the same reference numbers, and redundant descriptions thereof will be omitted. The suffixes "module" and "part" used for components in the following description are assigned or used interchangeably only for the convenience of writing the specification, and do not in themselves have distinct meanings or roles. In addition, when describing the embodiments disclosed in this specification, if a detailed description of a related known technology is judged to obscure the gist of the embodiments disclosed in this specification, the detailed description thereof will be omitted. In addition, the attached drawings are only intended to facilitate easy understanding of the embodiments disclosed in this specification, and the technical ideas disclosed in this specification are not limited by the attached drawings, and should be understood to include all modifications, equivalents, and substitutes included in the spirit and technical scope of the present disclosure. Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the above terms. The above terms are used only for the purpose of distinguishing one component from another. In the present application, terms such as “comprises” or “has” should be understood to indicate the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof. Hereinafter, a voltage / current sensor according to an embodiment of the present disclosure will be described in detail with reference to the drawings.FIG. 1 is a configuration diagram of a voltage / current sensor of the present disclosure, FIG. 2 is a connection configuration diagram of a high-frequency power line (10) of a voltage / current sensor according to an embodiment of the present disclosure, FIG. 3 is a cross-sectional diagram of a high-frequency power line and a connection configuration in a matching network (40) of a voltage / current sensor according to an embodiment of the present disclosure, FIG. 4 is a cross-sectional diagram of a high-frequency power line and a connection configuration between a power source (20) and a load (30) of a voltage / current sensor according to an embodiment of the present disclosure, FIG. 5 is a configuration diagram of a conductor section (100) and a sensor section (200) of a voltage / current sensor of the present disclosure, and FIG. 6 is a configuration diagram of the voltage / current sensor of the present disclosure used in a plasma process. Referring to FIG. 1, a voltage / current sensor according to an embodiment of the present disclosure may include a conductor portion (100), a sensor portion (200), a measurement portion (300), and a processor portion (400). The conductor portion (100) includes an inner cylinder (110) and an outer cylinder (120). Both the inner cylinder (110) and the outer cylinder (120) may be made of a metallic material or a conductive material, and preferably may be made of copper. The inner cylinder (110) and the outer cylinder (120) may be spatially separated from each other. The space between the inner cylinder (110) and the outer cylinder (120) of the conductor portion (100) may be an empty space containing only air, or may be filled with a dielectric. As a configuration diagram of the voltage / current sensor of the present disclosure, referring to FIG. 6, the voltage / current sensor of the present disclosure is configured to be positioned between a power source (20) of a high-frequency power line (10) and a load (30). Here, the power source (20) of the high-frequency power line (10) may be an RF generator, and the load (30) may be a plasma reactor for a semiconductor process.The high-frequency power line (10) may be a type of coaxial cable, and the coaxial cable may be formed such that an inner conductor (11) is formed therein, an insulator is wrapped around the inner conductor (11), and an outer conductor (12) is wrapped around the insulator. The outer conductor (12) is configured to be wrapped by a covering. The inner conductor (11) and the outer conductor (12) may be formed of a metal material, and preferably may be formed of copper. Since the outer conductor (12) blocks external noise, the high-frequency power line (10) can stably transmit high-frequency power through the inner conductor (11) without being affected by noise. As an embodiment, the conductor part (100) may be positioned between the power source (20) and the load (30) of the high-frequency power line (10), and the high-frequency power line (10) may be coupled to the conductor part (100) of the voltage / current sensor of the present disclosure in the form of a connector. The connection configuration of the high-frequency power line (10) to be detected and the voltage / current sensor of the present disclosure is as follows. Referring to FIG. 2, the inner cylinder (110) of the conductor part (100) may be connected to the inner conductor (11) of the high-frequency power line (10), and the outer cylinder (120) of the conductor part (100) may be connected to the outer conductor (12) of the high-frequency power line (10). As another embodiment, the inner conductor (11) of the high-frequency power line (10) may be configured to penetrate the outer cylinder (120) of the conductor portion (100) and the outer conductor (12) of the high-frequency power line (10) may be connected to the outer cylinder (120) of the conductor portion. The conductor portion (100) may be installed at an output port of a power source (20) of the high-frequency power line (10) or an input port of a load (30). Alternatively, it may be installed at an input port or an output port of a matching network (40) located between the power source (20) of the high-frequency power line (10) and the load (30).Here, the matching network (40) may be an impedance matching device that performs a function of matching the impedance of the plasma reactor and the impedance of the high-frequency power line (10) in response to a change in the impedance of the plasma reactor during a semiconductor process. As an example, FIG. 3 shows a connection configuration of a voltage / current sensor of the present disclosure installed at an output section of the matching network (40) and a high-frequency power line (10). Referring to FIG. 3, the voltage / current sensor of the present disclosure may be installed inside the output section of the matching network (40). A high-frequency power line connecting member (50) may be installed outside the output section of the matching network (40). The high-frequency power line connecting member (50) may be a coaxial cable connector capable of connecting a high-frequency power line, such as an SMA type or a BNC type. When a high-frequency power line (10) is connected to a high-frequency power line connecting member (50), the inner conductor (11) of the high-frequency power line (10) is connected to the inner cylinder (110) of the conductor part (100), and the outer conductor (11) of the high-frequency power line (10) is connected to the outer cylinder (120) of the conductor part (100). As an embodiment, FIG. 4 shows a connection configuration of a voltage / current sensor of the present disclosure installed between a power source (20) and a load (30) and a high-frequency power line (10). Referring to FIG. 4, a first high-frequency power line connecting member (51) may be installed on one surface of the voltage / current sensor of the present disclosure facing the power source (20), and a second high-frequency power line connecting member (52) may be installed on the other surface of the voltage / current sensor of the present disclosure facing the load (30).When a high-frequency power line (10) coming from a power source (20) side is connected to a first high-frequency power line connecting member (51) and a high-frequency power line (10) going to a load (30) side is connected to a second high-frequency power line connecting member (52), the inner conductor (11) of the high-frequency power line (10) is connected to an inner cylinder (110) of a conductor part (100), and the outer conductor (11) of the high-frequency power line (10) is connected to an outer cylinder (120) of the conductor part (100). The connection configuration of the voltage / current sensor of the present disclosure and the high-frequency power line (10) described above is merely an example and is not limited thereto. The sensor part (200) may be positioned in a space between the inner cylinder (110) and the outer cylinder (120) of the conductor part (100), and includes a coil in which a wire is wound at least once. The coil described above is a wire material in which a metal wire is wound multiple times, and may be a type of electrical component. The coil has various inductance values ​​depending on the number of turns (number of turns) in which the wire is wound. As can be seen in FIG. 5, the sensor unit (200) of the voltage / current sensor of the present disclosure may include a first coil (200a) and a second coil (200b). The first coil (200a) and the second coil (200b) may each have different numbers of turns. Since the sensor unit (200) includes the first coil (200a) and the second coil (200b) having different numbers of turns, the voltage / current sensor of the present disclosure can be applied to various frequencies of high-frequency power transmitted through the high-frequency power line (10). That is, a coil having a smaller number of turns can be applied to measure high-frequency power at a higher frequency, and a coil having a larger number of turns can be applied to measure high-frequency power at a lower frequency. This is because the coils can have different inductance values ​​depending on the number of turns. The sensor unit (200) of the voltage / current sensor of the present disclosure may include not only one or two coils, but also at least three coils.The sensor unit (200) includes at least three coils, and each of the coils has a different number of turns. Thus, the voltage / current sensor of the present disclosure can be applied to measure high-frequency power of more diverse frequencies. The measurement unit (300) is connected to two coaxial cables (320) having the same length connected to a pair of connectors (310). Resistors (330) having the same resistance value (heart) are respectively connected to the ends of the two coaxial cables (320), and can be configured to measure the first voltage (nai) and the second voltage (yeo) at each end of the two coaxial cables (320). Referring to FIG. 5, a pair of connectors (310) is installed on the outer cylinder (120) of the conductor unit (100) and can be any one of SMA, BNC, and SMB connectors. Both end portions of the coil of the sensor unit (200) can be respectively connected to a pair of connectors (310). The resistance value (yu) of the resistor (330) may have the same value as the characteristic impedance of the coaxial cable (320). The characteristic impedance of the coaxial cable (320) is a ratio of constant voltage and current at any point of the coaxial cable (320) and typically has a value of 50 ohms (Ohm). The resistor (330) corresponds to a connection resistor (330) connected from each end of the two coaxial cables (320) to the ground in the meter. The processor unit (400) serves to derive the voltage (nai) and current ( / ) of the high-frequency power transmitted through the high-frequency power line (10) using the first voltage (nai) and the second voltage (yeo) measured by the measurement unit (300). The processor unit (400) may be a type of circuit board including at least one CPU and at least one memory. An OS (Operating System) and software (Software) capable of deriving the voltage (nai) and current ( / ) of the high-frequency power may be stored in the processor unit (400). FIG. 7 is a conceptual diagram of the current return path of the voltage / current sensor of the present disclosure.When current flows between the outer cylinder (120) of the conductor part (100) and the grounding wall surface, a current will be generated in the opposite direction to the high-frequency power transmission. By connecting a grounding structure (500) made of other conductive materials between the outer cylinder (120) of the conductor part (100) and the grounding wall surface, a more smooth return path can be intentionally formed. As can be seen from FIG. 7, this is because the outer conductor (12) of the high-frequency power line (10) is electrically connected to the outer cylinder (120) of the conductor part (100). One end of a grounding structure (500) made of metal or other conductive materials (for example, busbar, housing, or other forms, etc.) is connected to the outer cylinder (120) of the conductor part (100), and the other end of the grounding structure (500) is connected to the ground, so that the outer cylinder (120) of the conductor part (100) can be grounded. In this way, a current return path for the power transmitted through the high-frequency power line (10) is formed, so that the influence caused by the return current can be eliminated. Due to the elimination of the influence caused by the return current, the sensing performance of the high-frequency power transmitted through the high-frequency power line (10) of the voltage / current sensor of the present disclosure can be improved. FIG. 8 is an equivalent circuit of the voltage / current sensor of the present disclosure, and FIG. 9 is the experimental data of the voltage / current sensor of the present disclosure. Hereinafter, a method for deriving the voltage (乃) and current ( / ) of the power transmitted through the high-frequency power line (10) using the first voltage (乃) and the second voltage ( 여) at each end of the two coaxial cables (320) will be described. FIG. 8a is an equivalent circuit of the voltage / current sensor of the present disclosure, FIG. 8b is an equivalent circuit in the current measurement mode of the voltage / current sensor of the present disclosure, and FIG. 8c is an equivalent circuit in the voltage measurement mode of the voltage / current sensor of the present disclosure. FIG. 8a shows a simplified equivalent circuit that emphasizes the L / C coupling distribution for explaining the principle of sensing voltage and current.The equivalent circuit described above simply shows the interaction between the high-frequency power line (10) connected through inductive (L) and capacitive (C) elements and the coil of the sensor unit (200). The impedance of the coil of the sensor unit (200) is composed of self-inductance (L), mutual inductance (M), coupling capacitance (or equivalent parallel capacitance), and a resistance component. The capacitance component related to the capacitive coupling with the coil of the sensor unit (200) can be represented as a series combination connected to the conductor part (100) of the high-frequency power line (10) and the sensor unit (200). Figure 8b shows the equivalent circuit in the current measurement mode of the voltage / current sensor of the present disclosure, and Figure 8c shows the equivalent circuit in the voltage measurement mode of the voltage / current sensor of the present disclosure. Through circuit analysis, it can be seen that the voltage difference at the measurement port depends only on the current of the high-frequency power. Also, the voltage component of the coupling capacitance (the voltage generated by the current flowing through C1 and C2) is removed, enabling accurate impedance measurement. Referring to Figure 8, according to Kirchhoff's law, the following (Equation

[0011] 1) is satisfied. 占 = / 2 + / 3 + / 4 (Equation 1)

[0012] (Equation 1) is equivalent to the following (Equation 2). jmCAV — 70) = j'mC2凡 + — z (凡 + 伏) + 느(凡 — 伏) (Equation 2) s十尺 p 匕 s十尺 p Here, I is the voltage of the power transmitted through the high-frequency power line (10)

[0013] I is the current of the power transmitted through the high-frequency power line (10)

[0014] C1 is the coupling capacitance between the high-frequency power line (10) and the sensor unit (200)

[0015] C2 is the coupling capacitance between the sensor unit (200) and the external conductor 比 is the voltage at the center of the coil of the sensor unit (200)

[0016] Z s is the impedance of the sensor unit (200), and the electromotive force (=, ⑵%) is due to magnetic coupling

[0017] ⑴ is the frequency of the power transmitted through the high-frequency power line (10), and 財 is the mutual inductance between the high-frequency power line (10) and the sensor unit (200)

[0018] Rearranging (Equation 2) with respect to 比 gives the following (Equation 3). And, analyzing the current loop flowing through the impedance of the sensor unit (200), the dependence of the voltage (比) at the center of the coil of the sensor unit (200) and the measured voltage on the electromotive force (院) due to magnetic coupling is as follows: 匕 =으 (原 +凡) (Equation 4) 匕 =오 (—原 +凡) (Equation 5)

[0019] Rearranging (Equation 4) and (Equation 5) with respect to the voltage (比) at the center of the coil of the sensor unit (200) and the electromotive force (易) due to magnetic coupling gives the following (Equation 6) and (Equation 7). 匕 +匕 = % 凡 (Equation 6) 匕 - 匕 =쯔 原 (Equation 7)

[0020] As can be seen from (Equation 6) and (Equation 7), the sum of the first voltage (乃) and the second voltage (어) depends on the voltage (比) at the center of the coil with the magnetic coupling component removed, and the difference between the first voltage (乃) and the second voltage (四) depends on the electromotive force O □ due to magnetic coupling.

[0021] Rearranging (Equation 7) with respect to the current ( / ) of the power transmitted through the high-frequency power line (10) gives (Equation 8).

[0022] 1 = μ (V₂ - V₁) (Equation 8) Here, in the case of voltage measurement where the line voltage is measured through the current value by capacitance coupling, since the sensor coil acts as a single conductor, the impedance component Zs of the coil can be approximately ignored, enabling a simple equivalent circuit configuration such as that of C in FIG. 8.

[0023] Rearranging this from (Equation 2) gives the following (Equation 9) and (Equation 10). Equation 9) Substantially, K2 is a value obtained through the measurement and calibration process as the actual gain value.

[0024] As can be seen from (Equation 8) and (Equation 11), it can be known that the voltage of the power transmitted through the high-frequency power line (10) is proportional to the sum of the first voltage (乃) and the second voltage (여) measured at each end of the two coaxial cables (320) of the voltage / current sensor, and the current ( / ) of the power transmitted through the high-frequency power line (10) is proportional to the difference between the first voltage (匕) and the second voltage (어) measured at each end of the two coaxial cables (320) of the voltage / current sensor. To confirm the performance of the sensor, in an environment such as Figure 6, the current gain characteristic according to the load value, the current phase of the power transmitted through the high-frequency power line (10), and the phase difference between the phase of the current measured by the voltage / current sensor of the present disclosure were measured. The existing method is a configuration in which one terminal of the coil-type current sensor is grounded. As can be seen from Figure 9, although the current gain characteristic and the current phase difference vary according to the load value in the existing method, it can be seen that the voltage / current sensor of the present disclosure shows the same characteristics of current gain characteristic and current phase difference regardless of the load value. Figure 10 is a conceptual diagram of the voltage / current sensor of the present disclosure. Hereinafter, a method for correcting the gain error caused by the change in the impedance of the coil of the sensor unit (200) and the frequency of the power transmitted through the high-frequency power line (10) of the sensor unit (200) itself will be described. As can be seen from Figure 10, the input port of the coil of the sensor unit (200) is port 1, the output port of the coil of the sensor unit (200) is port 2, the input port of the high-frequency power line (10) is port 3, and the output port of the high-frequency power line (10) is port 4. The voltage and current gains using the S-parameters measured by the network analyzer under the matching conditions are as shown in the following (Equation 12) and (Equation 13), respectively. _昌 昌

[0025] V 9 ain (Equation 12) — —〒 —

[0026] (Equation 13) Here, S₀ is the s parameter measured by a measuring instrument that takes the j-th port as an input and the i-th port as an output. FIG. 11 is a conceptual diagram of error correction due to the position difference between the center position of the coil of the sensor unit (200) of the voltage / current sensor of the present disclosure and the load plane. Hereinafter, a method for correcting an error due to the position difference (L) between the center position of the coil of the sensor unit (200) and the position of the load plane including one cross-section of the conductor unit (100) will be described. The process for obtaining current, voltage, and impedance under general load conditions from the measured current and voltage gain obtained under matched conditions is as follows.

[0027] Step 1. The voltage gain (아 ☆) and current gain (忌끄) obtained under matched conditions are stored in the processor unit (400).

[0028] Step 2. When the voltage is measured through measurement ports 1 and 2 under an arbitrary load applied to the actual measurement, the voltage Vsensor of the high-frequency power line (10) at the position of the sensor unit (200) and the current Isen* of the high-frequency power line (10) are each calculated as Censor =. From the above-described measured values, the impedance 八… of the high-frequency power line (10) at the center position of the coil of the sensor unit (200) is also at the center position of the coil of the sensor unit (200) The equivalent reflection coefficient of the high-frequency power line (io) is r = 스 £=三스. s 匕 sensor"* ■匕 0 In the processor unit (400), Z s ens or and r s are derived.

[0029] Step 3. From the calculated the load impedance, load voltage, and load current at the output surface of the sensor unit (200) (load plane in FIG. 11) are derived through the following equations.

[0030] Zioaa = 么0(1 + 厂 / 이=) / (1 — F s e사 3 今 _ Vsensore-邦 L (l + F s e 2 邦 1 ') load 丄十 j흐'

[0031] S

[0032] I _ Vload load r丁

[0033] ^load Here, the impedance of the high-frequency power line (10)

[0034] 0 is the phase constant of the TEM waveguide structure formed in the conductor part (100). The disclosed content is only an example, and can be variously changed and implemented by those skilled in the art without departing from the gist of the claims in the claims of the patent. Therefore, the protection scope of the disclosed content is not limited to the specific embodiments described above.

[0035]

Description of Symbols

[0036] 10: High-frequency power line

[0037] 11: Inner conductor

[0038] 12: Outer conductor

[0039] 20: Power source

[0040] 30: Load [[ID=4x]]

[0041] 40: Matching network

[0042] 50: High-frequency power line connection member

[0043] 51: First high-frequency power line connection member

[0044] 52: Second high-frequency power line connection member

[0045] 100: Conductor part: Inner cylinder: Outer cylinder: Sensor part a: First coil b: Second coil: Measuring part: Connector: Coaxial cable: Resistance: Processor part: Ground structure: The voltage / current sensor of the present disclosure It should be noted that there may be some unclear or incorrect expressions in the original text, which may affect the accuracy of the translation. It is recommended to check and correct the original text for a more accurate translation.

Claims

【Scope of Claims】 【 Claim 11. A voltage / current sensor device for detecting the voltage and current of high-frequency power, comprising a conductor part including an inner cylinder and an outer cylinder - The conductor part is configured to be located between the power source and the load of the high-frequency power line to be measured, the inner cylinder is connected to the inner conductor of the high-frequency power line, and the outer cylinder is connected to the outer conductor of the high-frequency power line; a sensor part located between the inner cylinder and the outer cylinder of the conductor part and including a coil around which a wire is wound at least once; both end portions of the coil are connected to a pair of connectors installed on the outer cylinder, two coaxial cables having the same length are connected to the pair of connectors, resistors having the same resistance value (Fan) are respectively connected to each end of the two coaxial cables, a measuring part configured to measure the first voltage (Nai) and the second voltage (Ye) at each end of the two coaxial cables; and a processor part for deriving the voltage (Nai) and current ( / ) of the high-frequency power transmitted through the high-frequency power line by using the first voltage (Nai) and the second voltage (Ye); a voltage / current sensor device comprising.

2. According to Claim 1, The sensor part includes a first coil and a second coil, and the first coil and the second coil have different numbers of wire windings, a voltage / current sensor device characterized by this.

3. According to Claim 1, the resistance value (Yu) of the resistor has the same value as the characteristic impedance of the coaxial cable, a voltage / current sensor device characterized by this.

4. According to Claim 1, the processor part derives the voltage (Nai) and current ( / ) of the power transmitted through the high-frequency power line by the following (Equation a) and (Equation b), a voltage / current sensor device characterized by this. \ = K1 (y1 - V2') (Equation a) 7 = average (匕 + 72) (Equation b), where 1 1 1 ’ Mercury the coupling capacitance between the high-frequency power line and the sensor part G is the coupling capacitance between the sensor unit and the external conductor, and is the impedance of the sensor unit co — the angular frequency of the power transmitted through the high-frequency power line The mutual inductance between the high-frequency power line and the sensor unit 【 According to claim 5, according to claim 4, in order to correct the error caused by the difference (L) between the central position of the coil of the sensor unit and the position of the load plane including one cross-sectional plane of the conductor unit, the processor unit Is configured to store the voltage gain (bottom") and current gain (忌끄) values calculated by (Equation C) and (Equation d), respectively (Equation c) (Mathematical formula d) Here, The S parameter measured by a measuring instrument with the j-th port as the input and the i-th port as the output, and the input port of the coil is Designated as port 1, the output port of the coil is port 2, the input port of the high-frequency power line is port 3, and the output port of the high-frequency power line is port 4 Is configured to derive the voltage ti] (Zsensor) and equivalent reflection coefficient (厂5) of the current of the high-frequency power line at the central position of the coil of the sensor unit by (Equation e) and (Equation f), respectively (Mathematical formula e) 22 (after the water) - Here, the high-frequency power line voltage (匕*。『) and the high-frequency power line current ( / =*) at the center position of the coil of the sensor unit are respectively ensO r = 쀼브으, ''gain and is the impedance of the high-frequency power line going there. Equivalent reflection coefficient of the above high-frequency power line (r) s ) A voltage / current sensor device characterized in that it is configured to derive the load impedance, load voltage, and load current in the load plane of the sensor unit from the following (mathematical formula g), (mathematical formula h), and (mathematical formula i). Z load =Z0(l + r s e 2 ^L) / (1 - 厂우2州今 (mathematical formula g) y S ensore~^ L Ql + r e 2 ^ L ),,、 It should be noted that there are some unclear or potentially incorrect notations in the original text which may affect the accuracy of the overall meaning and translation. Vload = 1+r S "" - (mathematical formula h) s (Equation 1) - Here, 0 is the phase constant of the TEM waveguide structure formed in the conductor unit 【 According to claim 6, according to claim 1, the outer cylinder of the conductor unit is grounded to form a current return path for the power transmitted through the high-frequency power line, so that the first voltage (乃) and the second voltage (어) can be stably detected. Voltage / current sensor device characterized by this

7. In a voltage / current sensor device for detecting the voltage and current of high-frequency power, a conductor unit including an inner cylinder and an outer cylinder - The conductor part is configured to be located between the power source and the load of the high-frequency power line to be measured. The inner conductor of the high-frequency power line penetrates the outer cylinder, and the outer cylinder is connected to the outer conductor of the high-frequency power line. - A sensor part located between the inner cylinder and the outer cylinder of the conductor part and including a coil around which a wire is wound at least once. Both end portions of the coil are connected to a pair of connectors installed on the outer cylinder. Two coaxial cables having the same length are connected to the pair of connectors. Resistors having the same resistance value (Fan) are respectively connected to each end of the two coaxial cables. A measuring part configured to measure the first voltage (Nai) and the second voltage (Ye) at each end of the two coaxial cables. And a processor part that derives the voltage (Nai) and current ( / ) of the high-frequency power transmitted through the high-frequency power line by using the first voltage (Nai) and the second voltage (Ye). A voltage / current sensor device comprising.

8. The voltage / current sensor device according to claim 7, wherein the sensor part includes a first coil and a second coil, and the first coil and the second coil have different numbers of wire windings. 24 A voltage / current sensor device characterized by.

9. The voltage / current sensor device according to claim 7, wherein the resistance value (You) of the resistor has the same value as the characteristic impedance of the coaxial cable.

10. The voltage / current sensor device according to claim 7, wherein the processor part derives the voltage (Nai) and current ( / ) of the power transmitted through the high-frequency power line by the following (Equation a) and (Equation b). \ = K1 (y1 - V2') (Equation a) 7 = average (匕 + 72) (Mathematical formula b), where 1 1 1 ’ Mercury The coupling capacitance between the high-frequency power line and the sensor part G is the coupling capacitance between the sensor part and the outer conductor, and is the impedance of the sensor part ⑴ is the frequency of the power transmitted through the high-frequency power line W between the high-frequency power line and the sensor unit 25 Mutual Inductance

11. According to claim 10, in order to correct an error caused by a difference (L) between the position of the center of the coil of the sensor unit and the position of the load plane including one cross-sectional area of the conductor unit, the processor unit is configured to store voltage gain (bottom ") and current gain (4 =) values calculated by (Equation c) and (Equation d) respectively, (Equation c) (Mathematical formula d) Here, is the S parameter measured by a measuring instrument having the j-th port as an input and the i-th port as an output, and the input port of the coil is referred to as port 1, the output port of the coil is port 2, the input port of the high-frequency power line is port 3, and the output port of the high-frequency power line is port 4 - is configured to derive ti] (Zsensor) of the voltage and current of the high-frequency power line and the equivalent reflection coefficient (factory 5) of the high-frequency power line at the center position of the coil of the sensor unit by (Equation e) and (Equation f) respectively, (Mathematical formula e) r匕匕s (Equation f)匕十匕where the high frequency at the center position of the coil of the sensor unit 26 Power line voltage (匕*。『) and high frequency Each one ensO r = Sseombusu 2 , ''gain is the impedance of the high-frequency power line - The equivalent reflection coefficient (r s of the high-frequency power line), from which the load impedance, load voltage, and load current on the load plane of the sensor unit are derived from the following (Equation g), (Equation h), and (Equation 0). A voltage / current sensor device characterized in that it is configured as follows. load = Zo(l + r s e 27 ") / (l - r s e 2 』W) (Equation g) fusha shi. x (Equation h) hoad = 쓰 £ Tsu (Mathematical Formula 1) load - where 0 is the phase constant of the TEM waveguide structure formed in the conductor unit - 【

12. According to claim 7, the outer cylinder of the conductor unit is grounded to form a current return path of the power transmitted through the high-frequency power line, so that the first voltage (乃) and the second voltage 09 can be stably detected. Voltage / current sensor device characterized by that.

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