Loading and unloading apparatus and method for dual chambers of coating apparatus

Abstract

The present application relates to a loading and unloading apparatus for dual chambers of a coating apparatus, comprising a first chamber, a second chamber and a loading device used for loading workpieces to be coated. A connection channel is provided between the first chamber and the second chamber; and the connection channel is provided with a first adjusting device, and is further provided with a second adjusting device used for adjusting the movement of the loading device between the first chamber and the second chamber. The loading device is provided with a first connection part; the second adjusting device is provided with a second connection part; and one of the first connection part and the second connection part consists of an electromagnet connection member, and the other consists of a magnetic connection member, the magnetic connection member and the electromagnet connection member constituting a magnet-type separable connection structure. The described solution provided in the present application uses the magnetic connection member and the electromagnet connection member to constitute the magnet-type separable connection structure, such that the structure is more stable, which reduces the failure rate of loading and unloading apparatuses, thus improving the efficiency of coating production.

Description

An apparatus and method for loading and unloading a dual-chamber coating equipment Technical Field

[0001] This application relates to the field of vacuum coating, and more specifically to a device and method for loading and unloading a dual-chamber coating equipment. Background Technology

[0002] Dual-chamber configurations in coating equipment can improve coating efficiency. Currently, dual-chamber vacuum coating equipment uses a combination of magnetic arms and rotating hooks for loading and unloading products between chambers. This method suffers from insufficient magnetic torque transmission, and the extended magnetic arm is prone to tip vibration, leading to instability and frequent malfunctions. Furthermore, the use of rotating hooks to connect the magnetic arm to the substrate turntable is a rigid connection. If the hook fails to rotate properly, loading and unloading of the entire substrate turntable cannot be completed, further complicating the process and increasing the overall failure rate of the loading and unloading device.

[0003] Application content

[0004] The primary objective of this application is to provide a device for loading and unloading in a dual-chamber coating equipment, which can solve the aforementioned problems and improve the stability of loading and unloading.

[0005] The specific technical solution adopted in this application is as follows.

[0006] A dual-chamber loading and unloading device for a coating equipment includes a first chamber, a second chamber, and a loading device for loading workpieces to be coated. The loading device is movably installed between the first and second chambers. A connecting channel for the loading device to move is provided between the first and second chambers. A first adjusting device for adjusting the connectivity of the connecting channel is provided at the connecting channel, and a second adjusting device for adjusting the movement of the loading device between the first and second chambers is also provided. The loading device has a first connecting part, and the second adjusting device has a second connecting part. One of the first and second connecting parts is composed of an electromagnet connector, and the other is composed of a magnetic connector. The magnetic connector and the electromagnet connector form a magnetically separable connection structure.

[0007] A further proposed solution is to install a first sensor and a second sensor in the first chamber and the second chamber, respectively, for detecting the position of the loading device.

[0008] The second chamber is a coating chamber, and a third sensor is also installed in the first chamber to detect the position of the first connection part.

[0009] The second adjustment device is equipped with a fourth sensor for detecting the connection status between the first connecting part and the second connecting part.

[0010] The first connecting part is composed of an electromagnet connector, and the second connecting part is composed of a magnetic connector.

[0011] The magnetic connector is made of iron.

[0012] The first connecting part is floatingly mounted on the loading device by means of a spring along a first direction, which is the direction of the distance between the first connecting part and the second connecting part. The spring drives the first connecting part to move towards the side closer to the second connecting part.

[0013] The second adjustment device is composed of a vacuum cylinder, which is mounted on the first chamber. The first chamber is located between the second chamber and the vacuum cylinder. The piston rod of the vacuum cylinder is arranged along the first direction, and the second connecting part and the fourth sensor are installed on the pushing end of the piston rod.

[0014] The first adjustment device is composed of a slide valve installed on the connecting channel. The first chamber is a loading chamber for loading the workpiece to be coated onto the loading device. The loading device is moved by a servo motor on the vacuum cylinder.

[0015] This application also provides a method for loading and unloading a dual-chamber coating equipment, comprising the following operations.

[0016] First, the workpiece to be coated is loaded onto the loading device located in the first chamber. The first adjusting device is adjusted to make the connecting channel open. The electromagnet connector is energized and assembled with the magnetic connector. When the assembly of the electromagnet connector and the magnetic connector is detected, the second adjusting device is adjusted to move the loading device into the second chamber. When the loading device is detected to be in place, the electromagnet connector is de-energized and separated from the magnetic connector. The electromagnet connector is then moved into the first chamber. When the electromagnet connector is detected to be in place, the first adjusting device is adjusted to make the connecting channel closed. Then, the workpiece on the loading device located in the second chamber is coated.

[0017] After the workpiece has completed the coating process, the first adjustment device is adjusted to make the connecting channel open, and the second adjustment device is activated to move the electromagnet connector into the second chamber. When the electromagnet connector is detected to be in place, the electromagnet connector is energized and assembled with the magnetic connector. When the electromagnet connector and the magnetic connector are detected to be assembled and connected, the second adjustment device is activated to move the loading device into the first chamber. When the loading device is detected to be in place, the first adjustment device is adjusted to make the connecting channel closed, and the coated workpiece is unloaded.

[0018] The above-mentioned solution provided in this application adopts a magnetic detachable connection structure composed of magnetic connectors and electromagnet connectors. This structure is more stable, reduces the failure rate of loading and unloading devices, and thus improves the coating production efficiency. Attached Figure Description

[0019] Figure 1 is a schematic diagram of the structure of this application.

[0020] Figure 2 is a schematic diagram of the assembly of the second adjusting device and the loading device.

[0021] The correspondence between the reference numerals and components in the attached drawings is as follows: 11-first chamber, 12-second chamber, 13-first adjusting device, 14-second adjusting device, 15-servo motor, 21-first sensor, 22-second sensor, 23-third sensor, 24-fourth sensor, 30-loading device, 31-magnetic connector, 32-spring, 41-electromagnetic connector. Detailed Implementation

[0022] To make the objectives and advantages of this application clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific implementations of this application and does not strictly limit the scope of protection specifically claimed in this application.

[0023] As shown in Figures 1 and 2, a dual-chamber loading and unloading device for a coating equipment includes a first chamber 11, a second chamber 12, and a loading device 30 for loading workpieces to be coated. The loading device 30 is movably installed between the first chamber 11 and the second chamber 12. A connecting channel for the loading device 30 to move is provided between the first chamber 11 and the second chamber 12. A first adjusting device 13 for adjusting the connectivity of the connecting channel is provided at the connecting channel, and a second adjusting device 14 for adjusting the movement of the loading device 30 between the first chamber 11 and the second chamber 12 is also provided. The loading device 30 has a first connecting part, and the second adjusting device 14 has a second connecting part. One of the first connecting part and the second connecting part is composed of an electromagnet connecting member 41, and the other is composed of a magnetic connecting member 31. The magnetic connecting member 31 and the electromagnet connecting member 41 form a magnetically separable connection structure. The magnetic connecting member 31 refers to a part that can be attracted by an electromagnet.

[0024] The above-mentioned solution provided in this application adopts a magnetic detachable connection structure composed of magnetic connector 31 and electromagnet connector 41. This structure is more stable, reduces the failure rate of loading and unloading device, and thus improves coating production efficiency.

[0025] A further design includes: a first sensor 21 and a second sensor 22 for detecting the position of the loading device 30 are respectively installed in the first chamber 11 and the second chamber 12. The second chamber 12 is a coating chamber, and a third sensor 23 for detecting the position of the first connecting part is also installed in the first chamber 11. A fourth sensor 24 for detecting the connection status between the first and second connecting parts is installed on the second adjustment device 14. The first connecting part is composed of an electromagnet connector 41, and the second connecting part is composed of a magnetic connector 31. The magnetic connector 31 is composed of an iron block. The first sensor 21, the second sensor 22, the third sensor 23, and the fourth sensor 24 are all contact sensors. The loading device 30 can specifically be a substrate turntable trolley, which can be slidably or rollwise. For example, a slide rail or a traveling track can be provided between the first chamber 11 and the second chamber 12, with gaps corresponding to the first adjustment device 13, thereby reliably and conveniently adjusting the loading device 30 for sliding or traveling. The first chamber 11 and the second chamber 12 can be respectively equipped with a first locking assembly and a second locking assembly to lock the loading device 30 after it has been moved into place. Alternatively, a locking structure can be directly installed on the loading device 30 to lock the loading device 30 in place after it has been moved into place.

[0026] Furthermore, the first connecting part is floatingly mounted on the loading device 30 along a first direction via a spring 32. The first direction is the distance direction between the first connecting part and the second connecting part. The spring 32 drives the first connecting part to move closer to the second connecting part. The distance direction between the first chamber 11 and the second chamber 12 is consistent with the first direction. The second adjusting device 14 is composed of a vacuum cylinder, which is mounted on the first chamber 11. The first chamber 11 is located between the second chamber 12 and the vacuum cylinder. The piston rod of the vacuum cylinder is arranged along the first direction, and the second connecting part and the fourth sensor 24 are installed on the pushing end of the piston rod. The first adjusting device 13 is composed of a slide valve provided on the connecting channel. The first chamber 11 is a loading chamber for loading the workpiece to be coated onto the loading device 30. A servo motor 15 is used on the vacuum cylinder to drive the loading device 30 to move. Driven by the servo motor 15, the loading device 30 reciprocates precisely between the first chamber 11 and the second chamber 12. An electromagnet connector 41, specifically a high-strength electromagnet, is installed at the front end of the piston rod of the vacuum cylinder. When energized, the electromagnet connector 41 generates magnetic force to attract the iron block on the loading device 30 (substrate turntable trolley). The iron block is mounted on the loading device 30 via a spring 32, avoiding rigid assembly. This elastic connection provides good deformation and shock resistance within a certain range. A fourth sensor 24 (contact sensor) at the front end of the vacuum cylinder detects whether the electromagnet connector 41 and the iron block are completely attracted. The loading and unloading of the substrate turntable trolley between the loading chamber and the coating chamber is achieved through the setup of the vacuum cylinder, the electromagnet connector 41, and multiple sensors.

[0027] The above-described method for loading and unloading in a dual-chamber coating equipment includes the following operations: First, the workpiece to be coated is loaded onto the loading device 30 located in the first chamber 11. The first adjusting device 13 is adjusted to ensure the connection channel is open. The electromagnet connector 41 is energized and connected to the magnetic connector 31. When the connection between the electromagnet connector 41 and the magnetic connector 31 is detected, the second adjusting device 14 is adjusted to move the loading device 30 into the second chamber 12. When the loading device 30 is detected to be in position, the electromagnet connector 41 is de-energized and separated from the magnetic connector 31. The electromagnet connector 41 is then moved into the first chamber 11. When the electromagnet connector 41 is detected to be in position, the first adjusting device 13 is adjusted to close the connection channel. Then, the workpiece on the loading device 30 located in the second chamber 12 is coated. After the workpiece has completed the coating process, the first adjusting device 13 is adjusted to make the connecting channel open, and the second adjusting device 14 is activated to move the electromagnet connector 41 into the second chamber 12. When the electromagnet connector 41 is detected to have moved into place, the electromagnet connector 41 is energized and assembled with the magnetic connector 31. When the assembly of the electromagnet connector 41 and the magnetic connector 31 is detected to be complete, the second adjusting device 14 is activated to move the loading device 30 into the first chamber 11. When the loading device 30 is detected to have moved into place, the first adjusting device 13 is adjusted to make the connecting channel closed, and the coated workpiece is unloaded.

[0028] In detail, when the workpiece (coated product) needs to be loaded for coating, the workpiece is first loaded onto the loading device 30 (substrate turntable trolley). At this time, the loading device 30 is in the loading chamber. The first sensor 21 detects that the loading device 30 is in the preset position in the loading chamber, and the vacuum cylinder is in the initial position. When the product loading button is pressed, the slide valve between the loading chamber and the coating chamber opens, and the electromagnet connector 41 at the front end of the vacuum cylinder is energized to attract the loading device 30. At the same time, the fourth sensor 24 at the front end of the vacuum cylinder detects that the electromagnet connector 41 and the loading device 30 are completely attracted. Driven by the servo motor 15, the vacuum cylinder begins to push the loading device 30 forward and gradually moves away from the loading chamber. When the loading device 30 moves into the coating chamber and the second sensor 22 in the coating chamber detects that the loading device 30 has moved into place, the vacuum cylinder stops. At this time, the electromagnet connector 41 loses power and loses its magnetic force. The vacuum cylinder begins to adjust the loading device 30 to move backward and return to the initial position. After the third sensor 21 detects that the first connection part (electromagnet connector 41) has returned to the initial position, the vacuum cylinder stops, the slide valve closes, and the loading device 30 is loaded. When the workpiece needs to be unloaded after coating, press the product unloading button. The second sensor 22 detects that the loading device 30 is in the coating chamber. Adjust the slide valve to open, start the vacuum cylinder, and adjust the electromagnet connector 41 to move towards the coating chamber. When the electromagnet connector is in place, the electromagnet connector 41 is energized and attracts the loading device 30. The fourth sensor 24 detects that the electromagnet connector 41 is completely attracted to the iron block. Start the vacuum cylinder, which pulls the loading device 30 from the coating chamber back to the loading chamber. When the first sensor 21 detects that the loading device 30 has returned to its position and the third sensor 23 detects that the electromagnet connector 41 has returned to its position, stop the vacuum cylinder, close the slide valve, and unload the coated workpiece from the loading device 30. The servo motor 15 is part of the vacuum cylinder and serves as its power source, driving the cylinder's movement. The servo motor 15 drives the rotation of a threaded connection, which in turn moves the piston rod of the vacuum cylinder. Linear motion is achieved through the rotational movement of the servo motor 15. The electromagnet connector 41 is mounted on the front end of the piston rod of the vacuum cylinder via a threaded structure and moves with the piston rod. The electromagnet connector 42 itself has an electromagnetic coil, which is energized and de-energized by a PLC (controller unit). When the electromagnetic coil is energized, it generates magnetic force; when de-energized, the magnetic force disappears.

[0029] The above-mentioned solution provided in this application adopts a magnetic detachable connection structure composed of magnetic connector 31 and electromagnet connector 41. This structure is more stable, reduces the failure rate of loading and unloading device, and thus improves coating production efficiency.

[0030] The above description is merely a preferred embodiment of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application. Structures, mechanisms, and operating methods not specifically described or explained in this application are implemented according to conventional methods in the art, unless otherwise specified or limited.

Claims

1. A device for double-chamber loading and unloading of a coating equipment, comprising a first chamber, a second chamber and a loading device for loading workpieces to be coated, the loading device being movably mounted between the first chamber and the second chamber, a connecting passage being provided between the first chamber and the second chamber for movement of the loading device, the connecting passage being provided with a first adjusting device for adjusting a connection state of the connecting passage, and a second adjusting device for adjusting movement of the loading device between the first chamber and the second chamber, the loading device being provided with a first connecting part, the second adjusting device being provided with a second connecting part, one of the first connecting part and the second connecting part being formed by an electromagnet connecting part and the other being formed by a magnetic connecting part, the magnetic connecting part and the electromagnet connecting part forming a magnetic separable connection structure.

2. The apparatus for double chamber loading and unloading of a coating apparatus according to claim 1, wherein: The first chamber and the second chamber are respectively provided with a first sensor and a second sensor for detecting a position of the loading device.

3. The apparatus for double chamber loading and unloading of a coating apparatus according to claim 1, wherein: The second chamber is a coating chamber, and the first chamber is further provided with a third sensor for detecting a position of the first connecting part.

4. The apparatus for double chamber loading and unloading of a coating apparatus of claim 1, wherein: The second adjusting device is provided with a fourth sensor for detecting a connection state between the first connecting part and the second connecting part.

5. The apparatus for double-chamber loading and unloading of a coating apparatus according to any one of claims 1 to 4, wherein: The first connecting part is formed by an electromagnet connecting part, and the second connecting part is formed by a magnetic connecting part.

6. The apparatus for double-chamber loading and unloading of a coating apparatus according to any one of claims 1 to 4, wherein: The magnetic connecting part is formed by an iron block.

7. The apparatus for double-chamber loading and unloading of a coating equipment according to claim 6, wherein: The first connecting part is movably mounted on the loading device by a spring in a first direction, the first direction being a spacing direction between the first connecting part and the second connecting part, and the spring drives the first connecting part to move towards the second connecting part.

8. The apparatus for double chamber loading and unloading of a coating apparatus according to claim 3, wherein: The second adjusting device is formed by a vacuum cylinder, the vacuum cylinder being mounted on the first chamber, the first chamber being located between the second chamber and the vacuum cylinder, a piston rod of the vacuum cylinder being arranged in the first direction, and the second connecting part and the fourth sensor being mounted on a pushing end of the piston rod.

9. The apparatus for double-chamber loading and unloading of a coating equipment according to claim 8, wherein: The first adjusting device is formed by a flapper valve provided on the connecting passage, the first chamber is a loading chamber for loading workpieces to be coated on the loading device, and a servo motor is used to drive the loading device to move on the vacuum cylinder.

10. An operation method of the device for double-chamber loading and unloading of a coating equipment according to claim 8, comprising the following operations: firstly, assembling workpieces to be coated on the loading device located in the first chamber, adjusting the first adjusting device so that the connecting passage is in a connected state, energizing the electromagnet connecting part and assembling the magnetic connecting part, when it is detected that the electromagnet connecting part and the magnetic connecting part are assembled and connected, adjusting the second adjusting device to move the loading device into the second chamber, when it is detected that the loading device is moved into position, de-energizing the electromagnet connecting part and separating the magnetic connecting part, adjusting the electromagnet connecting part to move into the first chamber, when it is detected that the electromagnet connecting part is moved into position, adjusting the first adjusting device so that the connecting passage is in a closed state, and then performing coating treatment on the workpieces on the loading device located in the second chamber. When the workpiece is finished with the coating treatment, the first adjusting device is adjusted to make the connecting passage in the communicating state, the second adjusting device is started to make the electromagnet connecting piece move into the second chamber, when it is detected that the electromagnet connecting piece moves into position, the electromagnet connecting piece is powered and assembled with the magnetic connecting piece, when it is detected that the electromagnet connecting piece and the magnetic connecting piece are assembled and connected, the second adjusting device is started to move the loading device into the first chamber, when it is detected that the loading device moves into position, the first adjusting device is adjusted to make the connecting passage in the closed state, and the workpiece after the coating treatment is unloaded.

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