Fluid machine integrating roots rotors and rotary vane rotor

By using the same power source to drive the Roots rotor and the vane rotor in fluid machinery, the problems of large size and low integration of traditional Roots vane pump units are solved, achieving higher integration and lower power consumption.

WO2026040177A1PCT designated stage Publication Date: 2026-02-26ZHEJIANG VALUE MECHANICAL & ELECTRICAL PROD CO LTD
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Patent Information

Application Number
PCT/CN2024/123360
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-08-27
Filing Date
2024-10-08
Publication Date
2026-02-26

AI Technical Summary

Technical Problem

Traditional Roots rotary vane pump units suffer from problems such as large size, low integration, high power consumption, complex assembly, and numerous parts.

Method used

Fluid machinery employing a composite Roots rotor and vane rotor integrates the Roots rotor and vane rotor within the same fluid machinery by driving them with the same power source, thereby reducing the number of parts and optimizing the structure.

Benefits of technology

It improves the integration of fluid machinery, reduces size, lowers power consumption, and simplifies the assembly process.

✦ Generated by Eureka AI based on patent content.

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Abstract

A fluid machine integrating Roots rotors (1) and a rotary vane rotor (3), comprising: two Roots rotors (1), each of which comprises a Roots rotor shaft (11) and a Roots rotor body (12); at least one rotary vane rotor (3), comprising a rotary vane rotor shaft (31) and a rotary vane rotor body (32); and a power source, comprising a motor (2), wherein all of the Roots rotors (1) and the rotary vane rotor (3) are driven by the same power source.
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Description

Fluid machine with combined roots rotor and vane rotor TECHNICAL FIELD

[0001] The utility model belongs to vacuum pump technical field, and specifically relates to fluid machine with combined roots rotor and vane rotor. BACKGROUND

[0002] With the rapid growth of vacuum processing demand, the traditional single vacuum pump cannot meet the increasingly complex vacuum needs, and different functional vacuum pumps need to be combined and transformed to form a combined vacuum pump unit. The vacuum pump unit integrates multiple vacuum pumps of different types to meet diversified needs. The roots vane pump unit is a common vacuum pump unit, which combines roots vacuum pumps and vane vacuum pumps and has the advantages of low cost and high performance.

[0003] The most basic structure of the roots vacuum pump is to drive two roots blades (roots blades are double or triple) to rotate synchronously and reversely through a motor and a gear set. The most basic structure of the vane vacuum pump is to drive one or more vane rotors through a motor. Usually, the roots vane pump unit is obtained by stacking the separately produced roots vacuum pump and vane vacuum pump up and down and then connecting them with a pipeline. Therefore, the traditional roots vane pump unit has the disadvantages of large size, low integration, high power consumption, complex assembly, and many components.

[0004] Therefore, it is of positive significance to provide a roots vane composite roots vane composite vacuum pump (or compressor) that drives the roots rotor and the vane rotor by the same power source, improves the integration, reduces the size, reduces the power consumption, and reduces the components. SUMMARY

[0005] The utility model provides fluid machine with combined roots rotor and vane rotor in view of the insufficient of the existing roots vane pump unit, such as large size, low integration, high power consumption, complex assembly, and many components, integrates the roots rotor and the vane rotor, drives the roots rotor and the vane rotor by the same power source, and can improve the integration of the vacuum pump, reduce the size of the vacuum pump, reduce the power consumption of the vacuum pump, and reduce the components of the vacuum pump.

[0006] To achieve the above object, the utility model adopts the following technical scheme: fluid machine with combined roots rotor and vane rotor, the fluid machine with combined roots rotor and vane rotor includes:

[0007] Two roots rotors, the two roots rotors each include a roots rotor shaft and a roots rotor body;

[0008] At least one vane rotor, the vane rotor includes a vane rotor shaft and a vane rotor body;

[0009] a power source comprising an electric motor;

[0010] wherein all of the roots rotors and the scroll rotors are driven by the same power source.

[0011] The fluid machine of the composite roots rotor and scroll rotor of the utility model integrates roots rotors and scroll rotors in the same fluid machine, improves the integration of the fluid machine, can reduce the volume of the fluid machine, reduces the power consumption of the fluid machine, and reduces the parts of the fluid machine. The scroll rotor can be one or more.

[0012] As an improvement, part of the roots rotors and the scroll rotors are coaxially distributed along the axial direction of the fluid machine.

[0013] As an improvement, the coaxial roots rotors and the scroll rotors are integrally formed; or,

[0014] The coaxial roots rotors and the scroll rotors share the same rotor shaft, and at least one of the coaxial roots rotor body and the scroll rotor body is assembled with the rotor shaft; or,

[0015] The coaxial roots rotor shaft and the scroll rotor shaft are assembled together, the roots rotor is an integral or an assembly, and the scroll rotor is an integral or an assembly.

[0016] As an improvement, the fluid machine of the composite roots rotor and scroll rotor comprises a plurality of coaxial scroll rotors, and the plurality of coaxial scroll rotors are integrally formed or assembled together.

[0017] As an improvement, the electric motor is located at the end of the roots rotor shaft away from the scroll rotor, or the electric motor is located at the end of the scroll rotor shaft away from the roots rotor.

[0018] As an improvement, the roots rotor shaft and the scroll rotor shaft are assembled together, and the electric motor is located between the roots rotor shaft and the scroll rotor shaft in the axial direction.

[0019] As an improvement, the electric motor is a double-output-shaft electric motor, and the two ends of the motor shaft of the electric motor are respectively assembled with the first part and the second part of the rotor shaft.

[0020] As an improvement, the axis of at least part of the scroll rotor shaft is parallel to the axes of the two roots rotor shafts, at least one roots rotor shaft and the scroll rotor shaft are connected through a transmission mechanism, and the transmission mechanism is a belt transmission, a gear transmission, a chain transmission, a worm transmission, a friction wheel, a magnetic transmission or a hydraulic transmission.

[0021] As an improvement, the motor drives the Roots rotor, the motor is located axially between the transmission mechanism and the Roots rotor, or the Roots rotor is located axially between the motor and the transmission mechanism; or,

[0022] The motor drives the Roots rotor, the motor is located axially between the transmission mechanism and the Roots rotor, or the Roots rotor is located axially between the motor and the transmission mechanism; or,

[0023] As an improvement, the Roots rotor body or the Roots rotor body is assembled on the Roots rotor shaft or the Roots rotor body by one or more of the following methods: shrinkage, keyway, internal expansion, cold shrinkage, threaded compression, glue sticking, welding and gear cutting.

[0024] As an improvement, the motor shaft and the rotor shaft (Roots rotor shaft or Roots rotor shaft) coaxial therewith are connected by a coupling or the like.

[0025] The fluid machine of the composite Roots rotor and Roots rotor of the utility model has the following beneficial effects: two Roots rotors and at least one Roots rotor, all the Roots rotors and the Roots rotor are driven by the same power source, that is, the Roots rotor and the Roots rotor are combined in the same fluid machine, the integration of the fluid machine is improved, the volume of the fluid machine can be reduced, the power consumption of the fluid machine is reduced, and the parts of the fluid machine are reduced. BRIEF DESCRIPTION OF DRAWINGS

[0026] Fig. 1 is a structural schematic diagram of the fluid machine of the utility model embodiment one.

[0027] Fig. 2 is a structural schematic diagram of the fluid machine of the utility model embodiment two.

[0028] Fig. 3 is a structural schematic diagram of the fluid machine of the utility model embodiment three.

[0029] Fig. 4 is a structural schematic diagram of the fluid machine of the utility model embodiment four.

[0030] Fig. 5 is a structural schematic diagram of the fluid machine of the utility model embodiment five.

[0031] Fig. 6 is a structural schematic diagram of the fluid machine of the utility model embodiment six.

[0032] Fig. 7 is a structural schematic diagram of the fluid machine of the utility model embodiment seven.

[0033] Fig. 8 is a structural schematic diagram of the fluid machine of the utility model embodiment eight.

[0034] Fig. 9 is a structural schematic diagram of the fluid machine of the utility model embodiment nine.

[0035] Fig. 10 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0036] Fig. 11 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0037] Fig. 12 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0038] Fig. 13 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0039] Fig. 14 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0040] Fig. 15 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0041] Fig. 16 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0042] Fig. 17 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0043] Fig. 18 is a structural schematic diagram of a fluid machine according to an embodiment of the present application.

[0044] In the drawings, 1, Roots rotor; 11, Roots rotor shaft; 12, Roots rotor body;

[0045] 2, motor;

[0046] 3, vane rotor; 31, vane rotor shaft; 32, vane rotor body;

[0047] 4, gear set;

[0048] 5, pulley assembly. Embodiments of the application

[0049] The technical solutions of the embodiments of the application are explained and described below, but the following embodiments are only preferred embodiments of the application, not all. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the application.

[0050] Embodiment one

[0051] Referring to Fig. 1, the fluid machine of the composite Roots rotor 1 and the vane rotor 3 according to the embodiment one of the present application, the fluid machine of the composite Roots rotor 1 and the vane rotor 3 comprises:

[0052] Two Roots rotors 1, both of the two Roots rotors 1 comprise Roots rotor shafts 11 and Roots rotor bodies 12;

[0053] A vane rotor 3, comprising a vane rotor shaft 31 and a vane rotor body 32;

[0054] A power source, comprising a motor 2;

[0055] Wherein, both of the two Roots rotors 1 and the vane rotor 3 are driven by the same power source.

[0056] In this embodiment, the power source only comprises one motor 2. In other embodiments, the power source can comprise two motors 2, which simultaneously drive the two Roots rotor shafts 11 respectively.

[0057] In this embodiment, the vane rotor 3 and one of the Roots rotors 1 are coaxially arranged, and the motor 2 is located at the end of the Roots rotor shaft 11 away from the vane rotor 3.

[0058] In this embodiment, the structure connecting the two Roots rotor shafts 11 is not shown, and is usually connected by two sets of gear sets 4.

[0059] In this embodiment, the two Roots rotor shafts 11 can be distributed vertically or horizontally.

[0060] In this embodiment, the Roots rotor 1 and the vane rotor 3 are integrally formed (excluding the vanes of the vane rotor body 32), although the processing difficulty is increased, but the coaxiality is good, the structure is simple, and the assembly is simplified.

[0061] In other embodiments, the components composed of the Roots rotor and the vane rotor can also be an assembly. When it is an assembly, the Roots rotor shaft and the vane rotor shaft can be assembled together, the Roots rotor is integrally formed, and the vane rotor is integrally formed. Alternatively, the Roots rotor shaft and the vane rotor shaft can share the same integral shaft, and at least one of the Roots rotor body and the vane rotor body is assembled with the integral shaft. The Roots rotor body and / or the vane rotor body are assembled on the rotor shaft by one or more of the following methods: hot sleeve, keyway, internal expansion, cold shrinkage, threaded compression, glue paste, welding and gear cutting.

[0062] In this embodiment, the motor shaft and the Roots rotor shaft 11 can be connected by gears, synchronous belts, chain wheels, magnetic transmission, hydraulic transmission, etc.

[0063] In this embodiment, the vane rotor 3 is generally used as the front stage, the inlet is arranged at the vane rotor 3, and the outlet is arranged at the Roots rotor 1. In other embodiments, the positions of the inlet and the outlet can be adjusted as needed.

[0064] In this embodiment, the fluid machine is a vacuum pump. In other embodiments, the fluid machine can also be a compressor or the like.

[0065] Embodiment Two

[0066] Referring to Fig. 2, the difference between the second embodiment and the first embodiment is that the fluid machine has two lobe rotors 3 which are coaxial.

[0067] In this embodiment, the two lobe rotors 3 are coaxial with one of the roots rotors 1, and the roots rotors 1 are located at the ends. Two lobe rotor bodies 32 are provided, which can further improve the vacuum degree.

[0068] In other embodiments, the roots rotors can be arranged between the two lobe rotors.

[0069] The other structures of the second embodiment are the same as those of the first embodiment.

[0070] Embodiment Three

[0071] Referring to Fig. 3, the difference between the third embodiment and the first embodiment is that the fluid machine has two lobe rotors 3 which are parallel.

[0072] In this embodiment, two lobe rotor bodies 32 are provided, which can further improve the vacuum degree or efficiency. Compared with the scheme of the second embodiment, the total length of the fluid machine of this embodiment can be shorter, and the operation is more stable.

[0073] The other structures of the third embodiment are the same as those of the first embodiment.

[0074] Embodiment Four

[0075] Referring to Fig. 4, the difference between the fourth embodiment and the first embodiment is that the fluid machine has four lobe rotors 3, two of which are coaxial and the other two are parallel.

[0076] In this embodiment, the fluid machine has four lobe rotors 3, which can further improve the vacuum degree or efficiency.

[0077] Embodiment Five

[0078] Referring to Fig. 5, the difference between the fifth embodiment and the first embodiment is mainly the position of the motor 2.

[0079] In this embodiment, the motor 2 is located between the roots rotors 1 and the lobe rotors 3.

[0080] In this embodiment, one of the roots rotor shafts 11, the lobe rotor shaft 31 and the motor shaft share the same shaft, and the roots rotor body 12 and the lobe rotor body 32 are assembled to the rotor shaft.

[0081] In other embodiments, the motor is a double-output shaft motor, and the two ends of the motor shaft of the motor are assembled with the roots rotor shaft and the lobe rotor shaft respectively, so that the motor can be machined separately, and the roots rotor and the lobe rotor can also be machined independently.

[0082] In this embodiment, the motor 2 is arranged in the middle part instead of the end part, and the length between the end part of the Roots rotor 1 or the lobe rotor 3 and the motor 2 is greatly shortened, thereby reducing the swing of the rotor shaft end part and improving the stability.

[0083] Embodiment six

[0084] Referring to FIG. 6, the difference between embodiment six and embodiment five is that the fluid machine comprises two motors 2 and two lobe rotors 3, and the two motors 2 are located between the Roots rotor 1 and the lobe rotor 3.

[0085] In this embodiment, two motors 2 are arranged, and the double motors 2 are used as the power source for driving, so that the power of the fluid machine can be improved without increasing the volume.

[0086] Embodiment seven

[0087] Referring to FIG. 7, the difference between embodiment seven and embodiment five is that the fluid machine comprises two lobe rotors 3, and the two lobe rotors 3 are parallel.

[0088] Compared with embodiment five, this embodiment increases one lobe rotor 3, so that the vacuum degree or the efficiency can be improved.

[0089] Embodiment eight

[0090] Referring to FIG. 8, the difference between embodiment eight and embodiment five is that the fluid machine comprises two lobe rotors 3, and the two lobe rotors 3 are coaxially distributed.

[0091] Compared with embodiment five, this embodiment increases one lobe rotor 3, so that the vacuum degree or the efficiency can be improved.

[0092] Embodiment nine

[0093] Referring to FIG. 9, the difference between embodiment nine and embodiment five is that the fluid machine comprises two motors 2 and four lobe rotors 3, the four lobe rotors 3 are coaxially distributed in pairs and parallel to the other two, and the two motors 2 are located between the Roots rotor 1 and the lobe rotor 3.

[0094] In this embodiment, the double motors 2 are used for driving, so that the power can be improved. Four lobe rotors 3 are arranged in total, so that the vacuum degree or the efficiency can be improved.

[0095] Embodiment ten

[0096] Referring to FIG. 10, the difference between embodiment ten and embodiment five is that the fluid machine comprises one motor 2 and four lobe rotors 3, the four lobe rotors 3 are coaxially distributed in pairs and parallel to the other two, and the motor 2 is located between the Roots rotor body 12 and the lobe rotor body 32.

[0097] In this embodiment, four lobe rotor bodies 32 are arranged in total, so that the vacuum degree or the efficiency can be improved.

[0098] Embodiment eleven

[0099] Referring to Fig. 11, the difference between embodiment eleven and embodiment one is that the roots rotor shaft 11 and the vane rotor shaft 31 are assembled together.

[0100] In this embodiment, the roots rotor shaft 11 and the vane rotor shaft 31 can be connected by the existing shaft and shaft connection structure, such as through the coupling and the like. The roots rotor shaft 11 and the vane rotor shaft 31 are assembled rather than integrally formed, and the roots rotor 1 and the vane rotor 3 can be machined respectively, which is easier to process.

[0101] In this embodiment, the motor 2 is located at the end of the roots rotor 1 away from the vane rotor 3.

[0102] In this embodiment, the motor shaft and the roots rotor shaft 11 are integrally formed.

[0103] In other embodiments, the motor shaft and the rotor shaft can be connected by gears, synchronous belts, chain wheels, magnetic transmission, hydraulic transmission and the like.

[0104] Embodiment twelve

[0105] Referring to Fig. 12, the difference between embodiment twelve and embodiment eleven is that the rotor shaft includes two vane rotors 3.

[0106] In this embodiment, the two vane rotor bodies 32 are coaxially distributed and the two vane rotor shafts 31 are assembled together.

[0107] In this embodiment, the roots rotor shaft 11 and the vane rotor shaft 31 are assembled, the roots rotor 1 and the vane rotor 3 can be machined independently, and the two vane rotor shafts 31 are assembled, the two vane rotors 3 can be machined independently.

[0108] Embodiment thirteen

[0109] Referring to Fig. 13, the difference between embodiment thirteen and embodiment eleven is the position of the motor 2.

[0110] In this embodiment, the motor 2 is located between the roots rotor 1 and the vane rotor 3, and the fluid machine is more stable compared to the motor 2 located at the end. The motor shaft, the roots rotor shaft 11 and the vane rotor shaft 31 are assembled, and the motor 2, the roots rotor 1 and the vane rotor 3 can be machined independently. The motor 2 is a double output shaft motor 2.

[0111] Embodiment fourteen

[0112] Referring to Fig. 14, the difference between embodiment fourteen and embodiment thirteen is that the fluid machine includes two vane rotors 3, and the two vane rotors 3 are coaxially distributed.

[0113] In the embodiment, the motor shaft, the Roots rotor shaft 11 and the vane rotor shaft 31 are assembled, the Roots rotor 1 and the vane rotor 3 can be independently processed, and the two vane rotor shafts 31 are also assembled, and the two vane rotors 3 can be independently processed.

[0114] Embodiment fifteen

[0115] Referring to FIG. 15, the difference between the embodiment fifteen and the embodiment fourteen is that the fluid machine comprises four vane rotors 3, and the four vane rotors 3 are coaxially distributed in pairs and parallel to the other two.

[0116] In the embodiment, the two vane rotor shafts 31 on one axis, the motor shaft and the Roots rotor shaft 11 are assembled together, and the two vane rotor shafts 31 on the other axis and the Roots rotor 1 are assembled together.

[0117] Embodiment sixteen

[0118] Referring to FIG. 16, the difference between the embodiment sixteen and the embodiment fifteen is that the fluid machine comprises two motors 2.

[0119] In the embodiment, the fluid machine comprises four vane rotors 3 and two motors 2, the four vane rotors 3 are coaxially distributed in pairs and parallel to the other two, and the two motors 2 are respectively located between the Roots rotor 1 and the vane rotor 3.

[0120] Embodiment seventeen

[0121] Referring to FIG. 17, in the embodiment, the fluid machine comprising the composite Roots rotor 1 and the vane rotor 3 comprises:

[0122] two Roots rotors 1, each of the two Roots rotors 1 comprises a Roots rotor shaft 11 and a Roots rotor body 12;

[0123] one vane rotor 3, the vane rotor 3 comprises a vane rotor shaft 31 and a vane rotor body 32;

[0124] a power source, the power source comprises a motor 2;

[0125] wherein, all the Roots rotors 1 and the vane rotor 3 are driven by the same power source.

[0126] In the embodiment, the axis of the vane rotor 3 is parallel to the axes of the two Roots rotors 1.

[0127] In the embodiment, the two Roots rotor shafts 11 are synchronously and reversely rotated through the gear set 4.

[0128] In the embodiment, the Roots rotor shaft 11 and the vane rotor shaft 31 are connected through a transmission mechanism.

[0129] In this embodiment, the motor 2 drives the Roots rotor 1, and the motor 2 is axially located between the transmission mechanism and the Roots rotor 1. The transmission mechanism comprises a pulley set.

[0130] Embodiment eighteen

[0131] Referring to Fig. 18, the difference between embodiment eighteen and embodiment seventeen is the position of the motor 2.

[0132] In this embodiment, the motor 2 drives the rotary vane rotor 3, and the rotary vane rotor 3 is located between the transmission mechanism and the motor 2.

[0133] In other embodiments, when part or all of the rotary vane rotors are parallel to the axes of the two rotary vane rotors, the position, relative position and number of the motor with respect to the part or all of the rotary vane rotors can be adjusted as required.

[0134] The above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Those skilled in the art should understand that the present application includes but is not limited to the above specific embodiments. Any modification that does not deviate from the functional and structural principles of the present application shall be included in the scope of the claims.

Claims

1. Fluid machine of the type of the combination of Roots rotors (1) and rotary vane rotors (3), characterized in that: The fluid machine of the combined Roots rotor (1) and vane rotor (3) comprises: Two Roots rotors (1), each of the two Roots rotors (1) comprising a Roots rotor shaft (11) and a Roots rotor body (12); At least one vane rotor (3), the vane rotor (3) comprising a vane rotor shaft (31) and a vane rotor body (32); A power source, the power source comprising a motor (2); Wherein, all of the Roots rotors (1) and the vane rotor (3) are driven by the same power source.

2. A composite Roots and scroll fluid machine (1, 3) according to claim 1, characterized in that: Part of the Roots rotors (1) and the vane rotor (3) are coaxially distributed along the axial direction of the fluid machine.

3. A composite Roots and scroll fluid machine (1, 3) according to claim 2, characterized in that: The coaxial Roots rotors (1) and the vane rotor (3) are integrally formed; or, The coaxial Roots rotors (1) and the vane rotor (3) share the same rotor shaft, and at least one of the coaxial Roots rotor body (12) and the vane rotor body (32) is assembled with the rotor shaft; or, The coaxial Roots rotor shaft (11) and the vane rotor shaft (31) are assembled together, the Roots rotor (1) is an integral or an assembled body, and the vane rotor (3) is an integral or an assembled body.

4. The compound Roots and scroll fluid machine (1) of claim 1, characterized in that: The fluid machine of the combined Roots rotor (1) and vane rotor (3) comprises a plurality of coaxial vane rotors (3), and the coaxial plurality of vane rotors (3) are integrally formed or assembled together.

5. A fluid machine of a compound Roots rotor (1) and a scroll rotor (3) according to any one of claims 1 to 4, characterized in that: The motor (2) is located at the end of the Roots rotor shaft (11) away from the vane rotor (3), or the motor (2) is located at the end of the vane rotor shaft (31) away from the Roots rotor (1).

6. A fluid machine of claim 1, 2 or 4, characterized in that: The Roots rotor shaft (11) and the vane rotor shaft (31) are assembled together, and the motor (2) is located between the Roots rotor shaft (11) and the vane rotor shaft (31) in the axial direction.

7. A composite Roots and scroll fluid machine (1, 3) according to claim 6, characterized in that: The motor (2) is a double-output-shaft motor (2), and the two ends of the motor shaft of the motor (2) are assembled with the Roots rotor shaft (11) and the vane rotor shaft (31), respectively.

8. A composite Roots and scroll fluid machine (1) according to claim 1, characterized in that: At least part of the axis of the vane rotor shaft (31) is parallel to the axes of the two Roots rotor shafts (11), at least one of the Roots rotor shaft (11) and the vane rotor shaft (31) is connected through a transmission mechanism, and the transmission mechanism is a belt transmission, a gear transmission, a chain transmission, a worm transmission, a friction wheel, a magnetic transmission or a hydraulic transmission.

9. A composite Roots and scroll fluid machine (1, 3) according to claim 8, characterized in that: The motor (2) drives the Roots rotor (1), and the motor (2) is located between the transmission mechanism and the Roots rotor (1) in the axial direction, or the Roots rotor (1) is located between the motor (2) and the transmission mechanism in the axial direction; or, The motor (2) drives the vane rotor (3), and the vane rotor (3) is located between the transmission mechanism and the motor (2) in the axial direction, or the motor (2) is located between the transmission mechanism and the vane rotor (3) in the axial direction.

10. The fluid machine of the combined Roots rotor (1) and vane rotor (3) according to claim 1, characterized in that: The power source comprises one or two electric machines (2); The fluid machine is a vacuum pump or a compressor; The fluid machine of the combined Roots rotor (1) and the scroll rotor (3) comprises a combined rotor comprising one said Roots rotor (1) and at least one said scroll rotor (3) distributed coaxially, or the axes of all said scroll rotors (3) are parallel to the axis of said Roots rotor (1).

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