Substrate processing system

Abstract

A technology disclosed in the present application relates to a substrate processing system which: includes a first substrate processing device, a substrate conveyance device disposed downstream of the first substrate processing device, and a second substrate processing device disposed downstream of the substrate conveyance device; and conveys a substrate from the first substrate processing device to the second substrate processing device in a production line. The substrate processing system comprises a control device for determining whether or not the pattern of at least one of signal exchange performed between the first substrate processing device and the substrate conveyance device and signal exchange performed between the substrate conveyance device and the second substrate processing device is a normal pattern.

Description

Substrate Processing System

[0001] The technology disclosed in this specification relates to a substrate processing system.

[0002] Japanese Patent Publication No. 2012-186232 discloses a management system for a manufacturing line that mounts electronic components on substrates. The manufacturing line includes multiple substrate processing apparatuses. Substrates are transported through each substrate processing apparatus in sequence, and processing (e.g., mounting electronic components on the substrate) is performed in each substrate processing apparatus. Each substrate processing apparatus is equipped with a device that reads barcodes representing the serial numbers of the substrates. The management system creates a list indicating the substrate transport order based on the barcodes read in the first substrate processing apparatus. The management system also determines whether the substrates are being transported to the second substrate processing apparatus in the order listed based on the barcodes read in the second substrate processing apparatus. This allows the system to determine whether the substrates have been transported to the second substrate processing apparatus correctly.

[0003] In the above-described management system, whether the substrate transport order is normal is determined when the substrate is transported to the second substrate processing apparatus. Therefore, even if an abnormality (e.g., removal of a substrate or introduction of another substrate) occurs in the transport path between the first substrate processing apparatus and the second substrate processing apparatus, the abnormality cannot be detected until the next substrate is transported to the second substrate processing apparatus. Thus, in the above-described management system, there is a large delay between the occurrence of an abnormality and its detection. This specification provides a technology for more effectively detecting whether substrates are being transported normally between the first substrate processing apparatus and the second substrate processing apparatus.

[0004] The substrate processing system disclosed in this specification includes a first substrate processing apparatus, a substrate transport apparatus arranged downstream of the first substrate processing apparatus, and a second substrate processing apparatus arranged downstream of the substrate transport apparatus, and transports substrates from the first substrate processing apparatus to the second substrate processing apparatus in a production line.The substrate processing system is equipped with a control device that determines whether at least one pattern of signal exchange between the first substrate processing apparatus and the substrate transport apparatus and the signal exchange between the substrate transport apparatus and the second substrate processing apparatus is a normal pattern.

[0005] In the substrate processing system described above, the control device determines whether or not at least one of the signal exchange patterns between the first substrate processing apparatus and the substrate transport apparatus and the signal exchange pattern between the substrate transport apparatus and the second substrate processing apparatus is normal. If an abnormality occurs on the substrate transport apparatus, the signal exchange pattern becomes abnormal, allowing for early detection of the substrate abnormality.

[0006] It is an explanatory view showing the operation of the substrate processing system.It is an explanatory view showing the operation of the substrate processing system.It is an explanatory view showing the operation of the substrate processing system.It is an explanatory view showing the operation of the substrate processing system.It is an explanatory view showing the operation of the substrate processing system.It is an explanatory view showing the operation of the substrate processing system.

[0007] The main features of the embodiments described below are listed below. Note that the technical elements described below are independent technical elements that exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

[0008] (Feature 1) In the substrate processing system described above, the first substrate processing apparatus may transmit a first signal to the substrate transport apparatus indicating whether a substrate can be delivered from the first substrate processing apparatus to the substrate transport apparatus, the substrate transport apparatus may transmit a second signal to the first substrate processing apparatus indicating whether the substrate transport apparatus can receive a substrate from the first substrate processing apparatus, and may transmit a third signal to the second substrate processing apparatus indicating whether a substrate can be delivered from the substrate transport apparatus to the second substrate processing apparatus, the second substrate processing apparatus may transmit a fourth signal to the substrate transport apparatus indicating whether the second substrate processing apparatus can receive a substrate from the substrate transport apparatus, and the control apparatus may determine whether a pattern of at least one of the set of the first signal and the second signal and the set of the third signal and the fourth signal is the normal pattern.

[0009] With this configuration, abnormalities in the substrate can be detected in an appropriate manner.

[0010] (Feature 2) In the substrate processing system described above, the control device may determine that the set of the first signal and the second signal is an abnormal pattern when a difference between the timing at which the first signal changes from a value at which the substrate can be unloaded to a value at which the substrate cannot be unloaded and the timing at which the second signal changes from a value at which the substrate can be accepted to a value at which the substrate cannot be accepted is equal to or greater than a reference time.

[0011] With this configuration, the control device can determine whether or not a new substrate has been placed on the substrate transport device.

[0012] (Feature 3) In the substrate processing system described above, the control device may determine that the set of the third signal and the fourth signal is an abnormal pattern when the fourth signal remains at a value that does not allow the substrate to be accepted for a predetermined period of time, and the third signal changes from a value that allows the substrate to be unloaded to a value that does not allow the substrate to be unloaded, without changing to a value that does not allow the substrate to be accepted.

[0013] With this configuration, it is possible to determine whether or not the substrate has been removed from the substrate transport device.

[0014] (Example) A substrate processing system 100 shown in FIG. 1 includes a production line 10 having a plurality of substrate processing apparatuses 12. Each substrate processing apparatus 12 is a solder printer, a component mounter, a reflow machine, or the like. The production line 10 mounts electronic components on substrates 2 to produce component-mounted substrates 2. FIG. 1 shows two of the substrate processing apparatuses 12, 12a and 12b, and a substrate transfer apparatus 14 disposed therebetween. The substrate transfer apparatus 14 is disposed downstream of the substrate processing apparatus 12a, and the substrate processing apparatus 12b is disposed downstream of the substrate transfer apparatus 14. The substrate processing apparatus 12a transfers processed substrates 2 to the substrate transfer apparatus 14. The substrate transfer apparatus 14 transfers the substrates 2 to the substrate processing apparatus 12b. The substrate processing apparatus 12b processes the substrates 2 received from the substrate transfer apparatus 14. The substrate transfer apparatus 14 also includes a sensor 16 that detects whether or not a substrate 2 is present on the substrate transfer apparatus 14.

[0015] The substrate processing apparatus 12a, the substrate transport apparatus 14, and the substrate processing apparatus 12b exchange signals S1 to S4 in accordance with the SMEMA (Surface Mount Equipment Manufacturers Association) standard. The substrate processing apparatus 12a and the substrate transport apparatus 14 exchange signals S1 and S2, and the substrate transport apparatus 14 and the substrate processing apparatus 12b exchange signals S3 and S4.

[0016] The substrate processing apparatus 12a transmits a first signal S1 to the substrate transport device 14, indicating whether or not the substrate 2 can be delivered from the substrate processing apparatus 12a to the substrate transport device 14. As shown in Figures 2 and 3, the first signal S1 changes between the value "0" and the value "1." The value "0" indicates that the substrate 2 cannot be delivered. The value "1" indicates that the substrate 2 can be delivered. The substrate processing apparatus 12a outputs the value "1" as the first signal S1 when it is holding a processed substrate 2, and outputs the value "0" as the first signal S1 in other cases.

[0017] The substrate transport device 14 transmits a second signal S2 to the substrate processing apparatus 12a indicating whether the substrate transport device 14 can receive the substrate 2 from the substrate processing apparatus 12a. As shown in Figures 2 and 3, the second signal S2 changes between the value "0" and the value "1." The value "0" indicates that the substrate 2 cannot be received. The value "1" indicates that the substrate 2 can be received. The substrate transport device 14 outputs the value "0" as the second signal S2 when the sensor 16 detects the substrate 2, and outputs the value "1" as the second signal S2 when the sensor 16 does not detect the substrate 2.

[0018] The substrate transport device 14 transmits a third signal S3 to the substrate processing device 12b indicating whether or not the substrate 2 can be delivered from the substrate transport device 14 to the substrate processing device 12b. As shown in FIG. 4 , the third signal S3 changes between the value "0" and the value "1." The value "0" indicates that the substrate 2 cannot be delivered. The value "1" indicates that the substrate 2 can be delivered. The substrate transport device 14 outputs a value "1" as the third signal S3 when the sensor 16 detects the substrate 2, and outputs a value "0" as the third signal S3 when the sensor 16 does not detect the substrate 2.

[0019] The substrate processing apparatus 12b transmits a fourth signal S4 to the substrate transport apparatus 14, indicating whether the substrate processing apparatus 12b can receive the substrate 2 from the substrate transport apparatus 14. As shown in FIG. 4 , the fourth signal S4 changes between the value "0" and the value "1." The value "0" indicates that the substrate 2 cannot be received. The value "1" indicates that the substrate 2 can be received. The substrate processing apparatus 12b outputs the value "1" as the fourth signal S4 when the substrate 2 is not present in the substrate processing apparatus 12b, and outputs the value "0" as the fourth signal S4 when the substrate 2 is present in the substrate processing apparatus 12b.

[0020] The substrate processing system 100 includes a control device 50. The control device 50 is connected to signal wiring for a first signal S1, a second signal S2, a third signal S3, and a fourth signal S4, and receives the first signal S1, the second signal S2, the third signal S3, and the fourth signal S4. The control device 50 controls each substrate processing device 12 and the substrate transport device 14 based on the first signal S1, the second signal S2, the third signal S3, and the fourth signal S4.

[0021] While the production line 10 is in operation, the substrate processing system 100 performs the operations described below.

[0022] 2 shows normal operation when a substrate 2 is transported from the substrate processing apparatus 12a to the substrate transport device 14. During period T1 in FIG. 2, the substrate processing apparatus 12a processes the substrate 2. At this time, the substrate processing apparatus 12a is unable to remove the substrate 2, and therefore sets the first signal S1 to a value of "0." Furthermore, during period T1, there is no substrate 2 on the substrate transport device 14, and therefore the substrate transport device 14 sets the second signal S2 to a value of "1."

[0023] Thereafter, the substrate processing apparatus 12a finishes processing the substrate 2. During period T2 in FIG. 2 , the substrate processing apparatus 12a holds the processed substrate 2. When the processing of the substrate 2 is finished, the substrate processing apparatus 12a changes the first signal S1 from value "0" to value "1," so that the first signal S1 is set to value "1" during period T2. Furthermore, since there is no substrate 2 on the substrate transport device 14 during period T2, the substrate transport device 14 maintains the second signal S2 at value "1." Thus, during period T2, since both the value of the first signal S1 and the value of the second signal S2 are "1," the substrate processing apparatus 12a starts transporting the substrate 2 to the substrate transport device 14.

[0024] When the substrate 2 is transported from the substrate processing apparatus 12a to the substrate transport device 14, the substrate processing apparatus 12a changes the first signal S1 from value "1" to value "0", and the substrate transport device 14 changes the second signal S2 from value "1" to value "0". Therefore, during a period T3, the first signal S1 and the second signal S2 match at value "0". Note that there is a difference between the timing ta when the first signal S1 changes from value "1" to value "0" and the timing tb when the second signal S2 changes from value "1" to value "0". Under normal conditions, the first signal S1 changes from value "1" to value "0" within a period of a reference time Δt before and after timing tb.

[0025] 3 shows an example in which a substrate 2x other than substrate 2 is placed on substrate transport device 14 during period T1 while substrate processing apparatus 12a is processing substrate 2. In this case, second signal S2 changes from value "1" to value "0" during period T1. First signal S1 is maintained at value "0" for a long period of time before and after timing tb when second signal S2 changes from value "1" to value "0." Therefore, if substrate 2x is mistakenly placed on substrate transport device 14, first signal S1 will not change within the reference time Δt before and after timing tb.

[0026] As described above, the patterns of the first signal S1 and the second signal S2 before and after the timing tb at which the second signal S2 changes from the value "1" to the value "0" differ between normal and abnormal conditions. The control device 50 constantly monitors the first signal S1 and the second signal S2 while the production line 10 is operating. When the second signal S2 changes from the value "1" to the value "0," the control device 50 determines whether the first signal S1 changes from the value "1" to the value "0" within the period of the reference time Δt before and after the timing tb. In other words, the control device 50 determines whether the difference between the timing ta and the timing tb is equal to or greater than the reference time Δt. If the difference between the timing ta and the timing tb is less than the reference time Δt, the control device 50 determines that the set of the first signal S1 and the second signal S2 is in a normal pattern. If the difference between the timing ta and the timing tb is equal to or greater than the reference time Δt, the control device 50 determines that the set of the first signal S1 and the second signal S2 is in an abnormal pattern. Therefore, in the case of Fig. 2, the control device 50 determines that the set of the first signal S1 and the second signal S2 is a normal pattern. Also, in the case of Fig. 3, the control device 50 determines that the set of the first signal S1 and the second signal S2 is an abnormal pattern, and brings the substrate transport device 14 to an emergency stop and displays a warning on a monitor or the like.

[0027] In this way, the control device 50 monitors the set of the first signal S1 and the second signal S2, thereby making it possible to detect that the substrate 2x has been erroneously placed on the substrate transport device 14. According to this technology, an abnormality can be detected within the time Δt from the timing tb when the substrate 2x is placed on the substrate transport device 14. Therefore, an abnormality can be detected almost in real time.

[0028] 4 shows normal operation when a substrate 2 is transported from the substrate transport device 14 to the substrate processing apparatus 12b. During period T11 in FIG. 4, the substrate 2 is present on the substrate transport device 14. At this time, the substrate transport device 14 is able to dispense the substrate 2, and therefore the third signal S3 is set to a value of "1." Also, during period T11, no substrate is present in the substrate processing apparatus 12b, and the substrate processing apparatus 12b is waiting to receive a substrate. Therefore, the substrate processing apparatus 12b sets the fourth signal S4 to a value of "1." Because both the third signal S3 and the fourth signal S4 are "1," the substrate transport device 14 begins transporting the substrate 2 to the substrate processing apparatus 12b.

[0029] When the substrate 2 is transported from the substrate transport device 14 to the substrate processing apparatus 12b, the substrate transport device 14 changes the third signal S3 from the value "1" to the value "0", and the substrate processing apparatus 12b changes the fourth signal S4 from the value "1" to the value "0". Therefore, in the period T12, the value of the third signal S3 and the value of the fourth signal S4 match, both being "0". Note that there is a difference between the timing tc when the third signal S3 changes from the value "1" to the value "0" and the timing td when the fourth signal S4 changes from the value "1" to the value "0".

[0030] Figure 5 shows an example in which substrate 2a is mistakenly removed from substrate transport device 14. During period T21 in Figure 5, substrate 2b (a different substrate from substrate 2a) is present in substrate processing apparatus 12b, and substrate processing apparatus 12b is processing substrate 2b. Also, during period T21, substrate 2a is waiting on substrate transport device 14. Therefore, during period T21, fourth signal S4 is set to the value "0" and third signal S3 is set to the value "1." Note that because processing by substrate processing apparatus 12b is performed for a long time before substrate 2a enters the standby state, fourth signal S4 is maintained at the value "0" for a long time.

[0031] 5, when substrate 2a is removed from substrate transport device 14, third signal S3 changes from value "1" to value "0" at time tc. Furthermore, since substrate processing apparatus 12b continues to process substrate 2b at time tc, fourth signal S4 is maintained at value "0" at time tc. In this way, when substrate 2a is removed, after the fourth signal S4 remains at value "0" for a predetermined period of time, the third signal S3 changes from value "1" to value "0" while the fourth signal S4 remains at value "0".

[0032] As described above, the patterns of the third signal S3 and the fourth signal S4 differ between normal and abnormal conditions before and after the timing tc at which the third signal S3 changes from the value "1" to the value "0." The control device 50 constantly monitors the third signal S3 and the fourth signal S4 while the production line 10 is in operation. When the third signal S3 changes from the value "1" to the value "0," the control device 50 determines whether the fourth signal S4 is maintained at the value "0" at the timing tc and whether the value "0" of the fourth signal S4 has continued for a predetermined time tth or more before the timing tc. If the fourth signal S4 is maintained at the value "0" at timing tc and the value "0" of the fourth signal S4 continues for a predetermined time tth or longer before timing tc, the control device 50 determines that the set of the third signal S3 and the fourth signal S4 is an abnormal pattern; otherwise, the control device 50 determines that the set of the third signal S3 and the fourth signal S4 is a normal pattern. Therefore, in the case of Figure 5, the control device 50 determines that the set of the third signal S3 and the fourth signal S4 is an abnormal pattern, and brings the substrate transport device 14 to an emergency stop and displays a warning on a monitor or the like. Also, in the case of Figure 4, the control device 50 determines that the set of the third signal S3 and the fourth signal S4 is a normal pattern.

[0033] In this way, the control device 50 monitors the set of the third signal S3 and the fourth signal S4, thereby making it possible to detect that the board 2a has been erroneously removed from the board transport device 14. According to this technology, an abnormality can be detected at the timing tc when the board 2a is removed from the board transport device 14. Therefore, an abnormality can be detected almost in real time.

[0034] The substrate processing apparatus 12a is an example of a "first substrate processing apparatus." The substrate processing apparatus 12b is an example of a "second substrate processing apparatus."

[0035] Although specific examples of the technology disclosed in this specification have been described in detail above, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and variations of the specific examples exemplified above. Furthermore, the technical elements described in this specification or drawings exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Furthermore, the technology exemplified in this specification or drawings simultaneously achieves multiple objectives, and achieving one of those objectives itself has technical utility.

Claims

1. A substrate processing system comprising a first substrate processing apparatus, a substrate transport apparatus disposed downstream of the first substrate processing apparatus, and a second substrate processing apparatus disposed downstream of the substrate transport apparatus, which transports substrates from the first substrate processing apparatus to the second substrate processing apparatus in a production line, the substrate processing system further comprising a control device which determines whether or not at least one of the patterns of signal exchanges between the first substrate processing apparatus and the substrate transport apparatus and the signal exchanges between the substrate transport apparatus and the second substrate processing apparatus is a normal pattern.

2. The substrate processing system of claim 1, wherein the first substrate processing apparatus transmits a first signal to the substrate transport apparatus indicating whether or not the substrate (2) can be delivered from the first substrate processing apparatus to the substrate transport apparatus; the substrate transport apparatus transmits a second signal to the first substrate processing apparatus indicating whether or not the substrate transport apparatus can receive a substrate from the first substrate processing apparatus, and transmits a third signal to the second substrate processing apparatus indicating whether or not the substrate can be delivered from the substrate transport apparatus to the second substrate processing apparatus; the second substrate processing apparatus transmits a fourth signal to the substrate transport apparatus indicating whether or not the second substrate processing apparatus can receive a substrate from the substrate transport apparatus; and the control device determines whether or not at least one pattern of the set of the first signal and the second signal and the set of the third signal and the fourth signal is the normal pattern.

3. The substrate processing system of claim 2, wherein the control device determines that the set of the first signal and the second signal is an abnormal pattern when the difference between the timing at which the first signal changes from a value at which the substrate can be released to a value at which the substrate cannot be released and the timing at which the second signal changes from a value at which the substrate can be accepted to a value at which the substrate cannot be accepted is equal to or greater than a reference time.

4. The substrate processing system of claim 2, wherein the control device determines that the set of the third signal and the fourth signal is an abnormal pattern when the fourth signal remains at a value that does not allow the substrate to be accepted for a predetermined period of time without changing to a value that does not allow the substrate to be accepted, and the third signal changes from a value that allows the substrate to be unloaded to a value that does not allow the substrate to be unloaded.

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