X-ray analysis system

Abstract

Provided is an X-ray analysis system in which it is possible to readily move a sample between a sample conveyance mechanism and a holder receiver, while having a simple and compact configuration. The present invention is an X-ray analysis system including: a holder receiver; a sample conveyance mechanism in which a sample is disposed and that conveys the sample from a first position to a second position close to the holder receiver; a sample movement mechanism that moves the sample between the second position and a sample holding position; a first inclined part that is disposed between the second position and the holder receiver, that is provided in an end section on the first sample conveyance mechanism side, and that gradually becomes higher toward the holder receiver side; and a sample bridge that is provided on the holder receiver side of the first inclined part so as to be contiguous with the first inclined part and that is provided with a support part for supporting the sample. When the sample is pushed out to the holder receiver side, an end section of the sample on the sample holder side abuts on the first inclined part and then slides on the first inclined part to reach a first support part. Furthermore, when the sample is pushed out from a position on the first support part to the second position side, the end section of the sample is placed directly on the first sample conveyance mechanism.

Description

X-ray analysis system

[0001] The present invention relates to an X-ray analysis system.

[0002] X-ray analyzers are known as devices for analyzing the elements contained in samples and the crystalline structure of samples. X-ray analyzers are sometimes equipped with a sample transport mechanism that transports samples located remotely to the X-ray analyzer. Furthermore, by providing a sample loader that loads the sample transported to the X-ray analyzer by the sample transport mechanism into a sample holder, it becomes possible to transport a sample located remotely from the X-ray analyzer to the X-ray analyzer and analyze it without user intervention.

[0003] A conventional sample loading machine is provided with a moving mechanism that pushes a sample between the sample transport mechanism and the sample loading machine. The sample transport mechanism transports the sample to the operating range of the moving mechanism, and the moving mechanism pushes the sample toward the sample holding position of the sample holder, thereby loading the sample into the sample holder. Similarly, the moving mechanism pushes the sample in the sample holding position of the sample holder toward the sample transport mechanism, thereby moving the sample onto the sample transport mechanism.

[0004] In addition, conventional X-ray fluorescence analyzers sometimes use two sample transfer mechanisms: a first sample transfer mechanism that transfers unanalyzed samples located at a location remote from the X-ray fluorescence analyzer to the analyzer, and a second sample transfer mechanism that transfers analyzed samples from the X-ray fluorescence analyzer back to their original location or another remote location. By positioning the sample transfer mechanism so that the position of the sample placed on the first sample transfer mechanism is higher than the position of the sample in the sample holding position of the sample holder, the sample can be loaded into the sample holder simply by pushing it from the side. Similarly, by positioning the sample transfer mechanism so that the position of the sample placed on the second sample transfer mechanism is lower than the position of the sample in the sample holding position of the sample holder, the sample can be moved onto the sample transfer mechanism simply by pushing it from the side.

[0005] As described above, using a different sample transport mechanism to return the sample to its original position results in a complex configuration. To simplify the configuration, it is conceivable to use a sample transport mechanism that transports the sample to the X-ray fluorescence analyzer and then returns the sample from the X-ray fluorescence analyzer to its original position. In this configuration, the sample transport mechanism must be positioned so that the height of the sample when placed on the sample transport mechanism is the same as the height of the sample in the sample holding position. However, it is difficult to precisely adjust the height of the sample transport mechanism, and because the sample transport mechanism includes moving parts, there is a risk that the height may change due to vibrations or other factors during operation.

[0006] The present disclosure has been made in consideration of the above-mentioned problems, and its purpose is to provide an X-ray analysis system with a simple and compact configuration that can easily move a sample between a sample transport mechanism and a holder receiver.

[0007] (1) An X-ray analysis system according to one aspect of the present disclosure includes a holder receiver on which a sample holder for temporarily holding a sample is placed, a first sample transport mechanism on which the sample is placed and which transports the sample from a first position to a second position closer to the holder receiver than the first position, a sample transport mechanism which pushes the sample at the second position from the second position to a sample holding position of the sample holder placed on the holder receiver and pushes the sample at the sample holding position from the sample holding position to the second position, and a first sample bridge which is placed between the second position of the first sample transport mechanism and the holder receiver, and which is provided at an end of the first sample transport mechanism on the side of the first sample transport mechanism and which moves the sample holder and a first sample bridge including a first inclined portion formed so as to gradually become higher toward the first inclined portion, and a first support portion provided on the holder receiving side of the first inclined portion so as to be continuous with the first inclined portion and supporting the sample, wherein when the sample is pushed from the second position toward the holder receiving side by the sample moving mechanism, an end of the sample on the sample holder side abuts on the first inclined portion of the first sample bridge, and then slides on the first inclined portion to reach the first support portion, and when the sample is pushed from a position on the first support portion toward the second position by the sample moving mechanism, an end of the sample on the first sample transport mechanism side rests directly on the first sample transport mechanism.

[0008] (2) In an X-ray analysis system according to one aspect of the present disclosure, the first sample bridge is provided at the end on the holder receiving side and is formed so as to gradually increase in height toward the first sample transport mechanism side, and is further characterized by having a second inclined portion provided on the holder receiving side of the first support portion so as to be connected to the first support portion and forming an angle with the first support portion.

[0009] (3) In an X-ray analysis system according to one aspect of the present disclosure, when the sample moving mechanism pushes the sample from its position on the first support portion toward the sample holding position, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample moving mechanism pushes the sample from its position toward the sample moving mechanism, the end of the sample on the first sample transport mechanism side abuts the second inclined portion of the first sample bridge, and then slides up the second inclined portion to reach the first support portion.

[0010] (4) In an X-ray analysis system according to one aspect of the present disclosure, when the sample moving mechanism pushes the sample from its position on the first support portion toward the sample holding position, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample moving mechanism pushes the sample from its position toward the sample moving mechanism, the end of the sample on the first sample transport mechanism side rests directly on the first support portion without abutting the second inclined portion of the first sample bridge.

[0011] (5) In an X-ray analysis system according to one aspect of the present disclosure, the first inclined portion is a curved surface whose inclination gradually changes from the first sample transport mechanism side toward the holder receiving side.

[0012] (6) In an X-ray analysis system according to one aspect of the present disclosure, the second inclined portion is a curved surface whose inclination gradually changes from the holder receiving side toward the first sample transport mechanism side.

[0013] (7) An X-ray analysis system according to one aspect of the present disclosure further includes a second sample transport mechanism on which the sample is placed and which transports the sample between a third position and a fourth position closer to the holder receptacle than the third position; and a second sample bridge arranged between the fourth position of the second sample transport mechanism and the holder receptacle, the second sample bridge comprising: a third inclined portion provided at an end of the second sample transport mechanism side and formed so as to gradually increase in height toward the holder receptacle side; and a second support portion provided on the holder receptacle side of the third inclined portion so as to be connected to the third inclined portion and which supports the sample, wherein the sample moving mechanism is further characterized in that it pushes and moves the sample located at the fourth position from the fourth position to a sample holding position of the sample holder placed in the holder receptacle, and pushes and moves the sample located at the sample holding position from the sample holding position to the fourth position.

[0014] (8) In an X-ray analysis system according to one aspect of the present disclosure, the first sample bridge further has a first support plate fixed to a back surface opposite to the front surface on which the first support portion is formed, and the first sample transport mechanism is a belt conveyor having a belt on the front surface of which the first position and the second position are located, and a pulley that transports the sample from the first position to the second position by rotating the belt, and the first support plate is positioned so that the front surface of the first support plate is in contact with the back surface of the belt.

[0015] (9) In an X-ray analysis system according to one aspect of the present disclosure, the second sample bridge further has a second support plate fixed to the back surface opposite to the front surface on which the second support portion is formed, and the second sample transport mechanism is a belt conveyor having a belt on the front surface of which the third position and the fourth position are located, and a pulley that transports the sample between the third position and the fourth position by rotating the belt, and the second support plate is positioned so that the front surface of the second support plate is in contact with the back surface of the belt.

[0016] 1 is a diagram showing an X-ray analysis system; 2 is a diagram showing the inside of an X-ray analysis apparatus; 3 is a bird's-eye view of a connection between a first sample transport mechanism and a sample loader; 4 is a top view of the connection between the first sample transport mechanism and the sample loader; 5 is a schematic cross-sectional view of a connection between the first sample transport mechanism and the sample loader; 6 is a diagram showing an example of a cross-sectional view of the first sample transport mechanism; 7 is a schematic view showing the inside of a measurement chamber; 8 is a diagram for explaining movement of a sample between a second position and a sample holding position; 9 is a diagram for explaining movement of a sample between a second position and a sample holding position; 10 is a diagram for explaining movement of a sample between a second position and a sample holding position; 11 is a diagram for explaining movement of a sample between a second position and a sample holding position; 12 is a diagram for explaining movement of a sample between a second position and a sample holding position; 13 is a diagram for explaining movement of a sample between a second position and a sample holding position; 14 is a diagram for explaining a cross-section of a first sample bridge according to a modified example; 15 is a top view of a connection between the first sample transport mechanism, the second sample transport mechanism, and the sample loader; 16 is a schematic cross-sectional view of a connection between the first sample transport mechanism, the second sample transport mechanism, and the sample loader;

[0017] [First Embodiment] A preferred embodiment for carrying out the present invention (hereinafter referred to as an embodiment) will be described below with reference to the drawings. Fig. 1 is a bird's-eye view of an X-ray analysis system 100 according to the first embodiment. Fig. 2 is a view showing the interior of the X-ray analysis system 100. As shown in Figs. 1 and 2, the X-ray analysis system 100 includes an X-ray analysis apparatus 102, a first sample transport mechanism 104, and a sample loader 106.

[0018] The X-ray analysis device 102 is an apparatus that analyzes a sample using X-rays. Specifically, for example, the X-ray analysis device 102 is an X-ray fluorescence analysis device that irradiates a sample with primary X-rays and analyzes elements contained in the sample based on fluorescent X-rays emitted from the sample. Alternatively, the X-ray analysis device 102 is an X-ray diffraction device that irradiates the sample with X-rays at a given angle and analyzes the crystal structure of the sample based on the diffracted X-rays. Below, a case where the X-ray analysis device 102 is an X-ray fluorescence analysis device will be described.

[0019] The X-ray analysis apparatus 102 has a housing, inside which are provided a holder tray 108, a holder transporter 110, a holder insertion space 202, a measurement chamber 204, and a preliminary evacuation chamber 206. The holder tray 108 is a tray on which a plurality of sample holders 312 (described later) are arranged. The holder tray 108 is used to temporarily arrange the sample holders 312 when analyzing a plurality of samples consecutively. The holder insertion space 202 is a space located within the transport range of the holder transporter 110. The holder transporter 110 transports the sample holders 312 between the holder receiver 208 of the sample loader 106 and the holder insertion space 202. The holder transporter 110 is located above the sample loader 106.

[0020] The pre-exhaust chamber 206 is a space in which the sample holder 312 is temporarily placed and which is equipped with a vacuum pump and a leak valve (not shown). Specifically, for example, the pre-exhaust chamber 206 is a chamber for loading and unloading a sample, and is also called a load lock. The pre-exhaust chamber 206 is disposed adjacent to the holder loading space 202, and a vacuum shutter is disposed between the pre-exhaust chamber 206 and the holder loading space 202. The vacuum shutter is normally closed and is opened when the sample holder 312 is transferred between the pre-exhaust chamber 206 and the holder loading space 202. The pre-exhaust chamber 206 is disposed adjacent to the measurement chamber 204, and a vacuum shutter is disposed between the pre-exhaust chamber 206 and the measurement chamber 204. The vacuum shutter is normally closed and is opened when the sample is transferred between the pre-exhaust chamber 206 and the measurement chamber 204. The leak valve is a valve that introduces air into the pre-exhaust chamber 206. The sample holder 312 is transported between the holder insertion space 202 and the measurement chamber 204 via the pre-exhaust chamber 206. When the sample holder 312 is transported between the holder insertion space 202 and the pre-exhaust chamber 206, the interior of the pre-exhaust chamber 206 is at atmospheric pressure, separating the pre-exhaust chamber 206 from the measurement chamber 204. When the sample holder 312 is transported between the measurement chamber 204 and the pre-exhaust chamber 206, the interior of the pre-exhaust chamber 206 is at vacuum, separating the pre-exhaust chamber 206 from the holder insertion space 202.

[0021] The first sample transport mechanism 104 transports the sample from a predetermined position where the sample is placed to a position closer to the holder receiver 208 than the predetermined position. The first sample transport mechanism 104 is, for example, a belt conveyor. An embodiment in which the first sample transport mechanism 104 is a belt conveyor will be described with reference to FIGS. 3 to 6. FIG. 3 is a bird's-eye view of the connection between the first sample transport mechanism 104 and the sample loader 106, and FIG. 4 is a top view of the connection. FIG. 5 is a schematic diagram showing the VV cross section of FIG. 4, and FIG. 6 is a schematic diagram showing the VI-VI cross section of FIG. 4.

[0022] The first sample transport mechanism 104, which is a belt conveyor, includes a belt 302, pulleys 304, and a drive device (not shown). The belt 302 is made of resin and has a fixed width and a predetermined length. The first sample transport mechanism 104 transports a sample from an arbitrary position away from the X-ray analysis device 102 to within the operating range of the sample loader 106. For example, when the X-ray analysis device 102 is installed on a factory production line, the first sample transport mechanism 104 transports the sample from near a manufacturing device used in a process prior to X-ray analysis to within a range where the sample can be loaded into a sample holder 312 by a sample moving mechanism 300 included in the sample loader 106 (hereinafter referred to as the operating range of the sample moving mechanism 300). Hereinafter, the source position of the sample (near the manufacturing device) will be referred to as a first position 318, and the destination position (within the operating range of the sample moving mechanism 300) will be referred to as a second position 320. That is, a first position 318 and a second position 320 exist on the surface of the belt 302. The belt 302 has a length corresponding to the distance from the first position 318 to the second position 320.

[0023] The pulleys 304 rotate the belt 302 to transport the sample from the first position 318 to the second position 320. Specifically, as shown in Figures 3 to 6, the pulleys 304 are cylindrical, and a plurality of them are provided between the first position 318 and the second position 320. The belt 302 is arranged so as to wrap around all of the pulleys 304, and the drive device rotates the pulleys 304 to transport the sample from the first position 318 to the second position 320.

[0024] The sample loader 106 has a holder receiver 208, a sample moving mechanism 300, and a first sample bridge 306. A sample holder 312 that temporarily holds a sample is disposed on the holder receiver 208. Specifically, for example, the holder receiver 208 is a pedestal-like member that is disposed within the transport range of the holder transporter 110 and within the operating range of the sample moving mechanism 300. The sample holder 312 is disposed on the holder receiver 208. The sample holder 312 is, for example, a substantially disc-shaped tray on which the sample is disposed. Hereinafter, the position on the sample holder 312 where the sample is disposed will be referred to as the sample holding position.

[0025] The sample moving mechanism 300 pushes and moves a sample located at the second position 320 from the second position 320 to the sample holding position of the sample holder 312 arranged in the holder receiver 208, and also pushes and moves a sample located at the sample holding position from the sample holding position to the second position 320. Specifically, for example, the sample moving mechanism 300 has a first pushing unit 314 and a second pushing unit 316. The first pushing unit 314 pushes the sample in a direction from the first sample transport mechanism 104 side toward the holder receiver 208 side. The second pushing unit 316 pushes the sample in a direction from the holder receiver 208 side toward the first sample transport mechanism 104 side. The first pushing unit 314 and the second pushing unit 316 have recesses formed in the portions that come into contact with the sample so that the sample can be pushed out. The first and second pushing units 314, 316 are positioned at the same height as the second position 320 and the sample holding position so as to be able to push out the sample. The sample moving mechanism 300 moves the first pushing unit 314 from the second position 320 toward the sample holding position when loading the sample into the sample holder 312. The sample moving mechanism 300 moves the second pushing unit 316 from the sample holding position toward the second position 320 when returning the sample loaded into the sample holder 312 to above the first sample transport mechanism 104.

[0026] The first sample bridge 306 is disposed between the second position 320 of the first sample transport mechanism 104 and the holder receiver 208. Specifically, for example, the first sample bridge 306 has a first bridge plate 308 and a first support plate 310. The first bridge plate 308 in this embodiment has a substantially trapezoidal shape in the cross-sectional view shown in Fig. 5, and includes a first inclined portion 402, a first support portion 404, and a second inclined portion 406 on the surface that comes into contact with the sample.

[0027] The first inclined portion 402 is provided at the end on the first sample transport mechanism 104 side, and is formed so as to gradually increase in height toward the holder receiver 208. Specifically, for example, the first inclined portion 402 is provided at the end on the first sample transport mechanism 104 side, and is an inclined surface that forms an angle with the rear surface of the first bridge plate 308.

[0028] The first support portion 404 is provided on the holder receiver 208 side of the first inclined portion 402 so as to be continuous with the first inclined portion 402, and supports the sample. Specifically, for example, the first support portion 404 is provided adjacent to the holder receiver 208 side of the first inclined portion 402 and has a flat surface that forms an angle with the first inclined portion 402. The flat surface may be parallel to a horizontal plane or may be inclined relative to the horizontal plane as long as it can stably support the sample thereon. Furthermore, although the first support portion 404 shown in FIGS. 3 to 6 is composed of a single flat surface, this is not limiting. For example, the first support portion 404 may be composed of multiple flat surfaces, may be a flat surface including irregularities, or may be a curved surface. In other words, the shape of the first support portion 404 is not important as long as it can perform the function of stably supporting the sample thereon.

[0029] The second inclined portion 406 is provided at the end on the holder receiver 208 side, and is formed so as to gradually increase in height toward the first sample transport mechanism 104 side. Specifically, for example, the second inclined portion 406 is provided on the holder receiver 208 side of the first support portion 404 so as to be continuous with the first support portion 404, and is an inclined surface that forms an angle with the first support portion 404. Furthermore, in this embodiment, the angle formed between the back surface of the first bridge plate 308 and the inclined surface that is the first inclined portion 402 is smaller than the angle formed between the back surface of the first bridge plate 308 and the inclined surface that is the second inclined portion 406.

[0030] The first support plate 310 is fixed to the back surface of the first sample bridge 306, opposite to the front surface on which the first support portion 404 is formed. Specifically, for example, the first support plate 310 is a flat plate-like member whose back surface is fixed to the sample loader 106. The first support plate 310 is arranged so that the front surface of the first support plate 310 contacts the back surface of the belt 302 and the belt 302 can slide. The back surface of the first bridge plate 308 is fixed to an area of ​​the front surface of the first support plate 310 that is not in contact with the belt 302. A second position 320 is present on the surface of the belt 302 in the area where the first support plate 310 and the belt 302 contact each other. The first bridge plate 308 and the first support plate 310 may be integrally formed.

[0031] Because the shape of the belt 302 is indefinite, it may bend while wound around the pulley 304. On the other hand, the first support plate 310 is fixed to the sample loader 106, and therefore its position is fixed. Therefore, even if the belt 302 is bent, the provision of the first support plate 310 can prevent the height of the second position 320 located directly above the first support plate 310 from changing.

[0032] The measurement chamber in an embodiment in which the X-ray analysis apparatus 102 is an X-ray fluorescence analysis apparatus will be described. Fig. 7 is a schematic diagram showing the interior of the measurement chamber 204. The measurement chamber 204 is a chamber in which sample analysis is performed. Specifically, as shown in Fig. 7, a sample stage 702, an X-ray source 704, a spectroscopic element 706, and a detector 708 are arranged in the measurement chamber 204.

[0033] The sample stage 702 is a stage on which the sample holder 312 is placed. The X-ray source 704 irradiates the sample placed on the sample holder 312 in the measurement chamber 204 with primary X-rays from above. The primary X-rays generated by the X-ray source 704 irradiate the surface of the sample. The spectroscopic element 706 disperses fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 708 is disposed at a position where the fluorescent X-rays dispersed by the spectroscopic element 706 are incident. The detector 708 measures the intensity of the fluorescent X-rays emitted from the sample. The detector 708 is, for example, a proportional counter. A counter (not shown) counts the pulse signals output from the detector 708 to obtain the intensity of the fluorescent X-rays. A spectroscopic element 706 and a detector 708 may be provided for each element to be analyzed, or a single pair of spectroscopic element 706 and detector 708 may be rotated for measurement. When the pair of spectroscopic element 706 and detector 708 is to be rotated, a mechanism (goniometer) for rotating the spectroscopic element 706 and detector 708 is disposed in the measurement chamber 204 .

[0034] Next, the movement of a sample between the second position 320 on the first sample transport mechanism 104 and the sample holding position of the sample holder 312 will be described. The case where the sample has a fixed shape (disk-shaped in this case) will be described. Figures 8(a) to 9(c) show the movement of the sample when the sample moving mechanism 300 pushes the sample from the second position 320 toward the holder receiver 208. Figures 8(a) to 9(c) are schematic views for explanatory purposes, and the dimensions of each component differ from the actual size. In the state shown in Figure 8(a), the sample is positioned at the second position 320 on the first sample transport mechanism 104. First, the first pusher 314 pushes the sample from the second position 320 toward the holder receiver 208. At this time, because the bottom surface of the first bridge plate 308 is lower than the surface of the belt 302 of the first sample transport mechanism 104, the end of the sample on the sample holder 312 side abuts against the first inclined portion 402 of the first sample bridge 306 (FIG. 8(b)). After that, when the first pushing portion 314 pushes the sample toward the holder receiver 208, the sample slides up the first inclined portion 402 (FIG. 8(c)) and reaches the first support portion 404 (FIG. 9(a)). In this embodiment, because the first support portion 404 is a horizontal plane, the sample positioned on the first support portion 404 is in a stable state.

[0035] Next, when the sample moving mechanism 300 pushes the sample from its position on the first support 404 toward the sample holding position, the end of the sample on the holder receiver 208 side rests directly on the sample holding position of the sample holder 312 (FIG. 9(b)). In this embodiment, the horizontal plane of the first support 404 and the surface of the tray on the holder receiver 208 are at the same height. Furthermore, the distance A-B between the end of the first support 404 on the holder receiver 208 side (position A in the figure) and the end of the tray on the first sample transport mechanism 104 side (position B in the figure) is sufficiently small compared to the size of the sample. Therefore, when the center of gravity of the sample is above the first support 404, the end of the sample on the holder receiver 208 side can be placed on the sample holding position of the sample holder 312.

[0036] When the sample moving mechanism 300 pushes the sample, which is in the state shown in FIG. 9(b), toward the sample holding position, the sample reaches the sample holding position (FIG. 9(c)). Because the distance A-B between the end of the first support part 404 on the holder receiver 208 side (position A in the figure) and the end of the tray on the first sample transport mechanism 104 side (position B in the figure) is sufficiently small compared to the size of the sample, when the center of gravity of the sample reaches the top of the tray, the end of the sample on the first sample transport mechanism 104 side is above the first support part 404. Therefore, the sample can be moved to the sample holding position without coming into contact with the second inclined part 406.

[0037] After the sample is placed in the sample holding position of the sample holder 312, the sample holder 312 is transported to the holder insertion space 202 by the holder transporter 110. The sample holder 312 is then transported to the measurement chamber 204 via the pre-evacuation chamber 206, where the sample is analyzed. After the analysis is completed, the sample holder 312 is transported to the holder insertion space 202 via the pre-evacuation chamber 206. The sample holder 312 is then transported to the holder receiver 208 by the holder transporter 110 (FIG. 10(a)). FIGS. 10(a) to 11(b) are diagrams showing the movement of the sample when the sample moving mechanism 300 pushes the sample from the sample holding position toward the first sample transport mechanism 104. FIGS. 10(a) to 11(b) are schematic views for the purpose of explanation, and the sizes of the components differ from the actual sizes.

[0038] In this embodiment, the horizontal plane of the first support section 404 and the surface of the tray on the holder receiver 208 are at the same height. Therefore, when the sample moving mechanism 300 (second pusher 316) pushes the sample from the sample holding position toward the first sample transport mechanism 104, the end of the sample on the first sample transport mechanism 104 side rests directly on the first support section 404 without abutting against the second inclined section 406 of the first sample bridge 306 ( FIG. 10( b) ). In other words, when the center of gravity of the sample is above the tray, the end of the sample on the first sample transport mechanism 104 side can be placed on the first support section 404. When the sample is further pushed toward the first sample transport mechanism 104 side, the sample reaches a position above the first support section 404 ( FIG. 10( c) ).

[0039] Next, when the sample is pushed from its position on the first support member 404 toward the second position 320 by the sample moving mechanism 300 (second pusher 316), the end of the sample on the first sample transport mechanism 104 side is placed directly on the first sample transport mechanism 104 ( FIG. 11( a)). In this embodiment, the horizontal plane of the first support member 404 is higher than the second position 320 (the surface of the belt 302). Therefore, when the center of gravity of the sample reaches the first sample transport mechanism 104 side beyond the boundary between the first support member 404 and the first inclined member 402, the sample tilts. At this time, by making the distance C-D between the end of the belt 302 on the holder receiver 208 side (position C in the figure) and the end of the first support member 404 on the first sample transport mechanism 104 side (position D in the figure) sufficiently smaller than the sample, the end of the sample on the first sample transport mechanism 104 side can be placed on the first sample transport mechanism 104. This prevents the sample from contacting the side surface of the belt 302. Furthermore, the sample moving mechanism 300 pushes the sample from its position on the first support part 404 toward the second position 320, so that the sample reaches the second position 320 (FIG. 11(b)).

[0040] As described above, by providing the first inclined portion 402 on the first sample bridge 306, the sample can be easily moved between the sample transport mechanism and the holder receiver 208 with a simple and compact configuration.

[0041] In the above embodiment, the height of the position where the first support part 404 holds the sample (the position of the horizontal plane that is the first support part 404) and the height of the sample holding position (the position of the surface of the tray in the holder receiver 208) are the same, but this is not limited to this. The position where the first support part 404 holds the sample may be lower than the second position 320 as long as it is higher than the lower end of the second inclined part 406. In this case, when the sample moving mechanism 300 pushes the sample from the sample holding position toward the first sample transport mechanism 104, the end of the sample on the first sample transport mechanism 104 side abuts against the second inclined part 406 of the first sample bridge 306, and then slides on the second inclined part 406 to reach the first support part 404.

[0042] Furthermore, the shape of the first sample bridge 306 is not limited to the above. Specifically, for example, Figures 12(a) to 12(f) are schematic diagrams showing modified cross-sectional shapes of the first bridge plate 308. As described above, if the height of the position where the first support portion 404 holds the sample and the height of the second position 320 are the same, the second inclined portion 406 does not need to be provided as shown in Figures 12(a) to 12(c).

[0043] As shown in Figures 12(b) and 12(e), if the lower end of the first inclined portion 402 is lower than the second position 320, the lower end of the first inclined portion 402 does not have to coincide with the rear surface of the first sample bridge 306. Similarly, as shown in Figure 12(e), if the sample holding position is higher than the lower end of the second inclined portion 406, the lower end of the second inclined portion 406 does not have to coincide with the rear surface of the first sample bridge 306. As shown in Figure 12(d), the slopes of the first inclined portion 402 and the second inclined portion 406 may be the same. As shown in Figures 12(c) and 12(f), the first inclined portion 402 may be a curved surface whose slope gradually changes from the first sample transport mechanism 104 side toward the holder receiver 208 side. In this case, it is desirable that the slope of the first inclined portion 402 be greatest at the center of the first inclined portion 402 and become smaller as it approaches the first sample transport mechanism 104 and the holder receiver 208. Similarly, as shown in FIG. 12( f ), the second inclined portion 406 may be a curved surface whose inclination gradually changes from the holder receiver 208 side toward the first sample transport mechanism 104 side.

[0044] The speed at which the sample moving mechanism 300 moves may be constant or may vary. Specifically, for example, the first pushing unit 314 may move the sample at a constant speed in the process of pushing the sample from the second position 320 to the sample holding position. Alternatively, the first pushing unit 314 may move the sample from the second position 320 to a position on the first support unit 404 at a constant speed, stop for a certain period of time, and then move the sample from the position on the first support unit 404 to the sample holding position at a constant speed. Similarly, the second pushing unit 316 may move the sample at a constant speed in the process of pushing the sample from the sample holding position to the second position 320. Alternatively, the second pushing unit 316 may move the sample from the sample holding position to a position on the first support unit 404 at a constant speed, stop for a certain period of time, and then move the sample from the position on the first support unit 404 to the second position 320 at a constant speed.

[0045] The size and shape of each part of the first sample bridge 306 and the position of the first sample bridge 306 are appropriately determined depending on the size of the sample. Specifically, the distance A-B between the end of the first support unit 404 facing the holder receiver 208 (position A in the figure) and the end of the tray facing the first sample transport mechanism 104 (position B in the figure) is preferably less than half the size of the sample. Here, the sample size refers to the length from the end of the sample facing the first sample transport mechanism 104 to the end of the holder receiver 208. Similarly, the distance C-D between the end of the belt 302 facing the holder receiver 208 (position C in the figure) and the end of the first support unit 404 facing the first sample transport mechanism 104 (position D in the figure) is preferably less than half the size of the sample. For example, to maintain sufficient analytical accuracy, samples are often disc-shaped with a diameter of 28 mm or more, so the distance A-B is preferably 14 mm or less. Similarly, the distance C-D is preferably 14 mm or less. The disk-shaped sample is just an example, and the sample does not have to be disk-shaped as long as it has a certain shape.

[0046] The sample holder may be configured to be selected according to the size of the sample, in which case the size and shape of each part of the first sample bridge 306 and the position at which the first sample bridge 306 is disposed may be set according to the size of the sample holder.

[0047] Second Embodiment An X-ray analysis system 100 according to the second embodiment differs from the first embodiment in that it includes a second sample transport mechanism 1302 and a second sample bridge. Other aspects are similar to those of the first embodiment, and therefore description thereof will be omitted. Fig. 13 is a top view of the connection portion between the first sample transport mechanism 104 and the second sample transport mechanism 1302 and the sample loader 106 of the X-ray analysis system 100 according to the second embodiment. Fig. 14 is a schematic cross-sectional view of the connection portion.

[0048] The second sample transport mechanism 1302 transports the sample between a predetermined position where the sample is placed and a position closer to the holder receiver 208 than the predetermined position. The second sample transport mechanism 1302 is, for example, a belt conveyor, and is similar in configuration to the first sample transport mechanism 104 except for the origin and destination positions. For example, the second sample transport mechanism 1302 transports the sample from within the operating range of the sample moving mechanism 300 to near an inspection device used in a process after X-ray analysis. Hereinafter, the destination position of the sample (near the inspection device) will be referred to as the third position 1316, and the origin position (within the operating range of the sample moving mechanism 300) will be referred to as the fourth position 1318. That is, the third position 1316 and the fourth position 1318 exist on the surface of the belt 302 of the second sample transport mechanism 1302. The belt 302 has a length corresponding to the distance from the third position 1316 to the fourth position 1318.

[0049] The second sample bridge is disposed between a fourth position 1318 of the second sample transport mechanism 1302 and the holder receiver 208. The second sample bridge 1304 has a second bridge plate 1306 and a second support plate 1314. The second bridge plate 1306 in the second embodiment has a substantially trapezoidal shape in cross section, and includes a third inclined portion 1308, a second support portion 1310, and a fourth inclined portion 1312 on the surface that comes into contact with the sample. Specifically, the second sample bridge 1304 has a third inclined portion 1308 provided at the end on the second sample transport mechanism 1302 side and gradually increasing in height toward the holder receiver 208 side, a second support portion 1310 provided on the holder receiver 208 side of the third inclined portion 1308 so as to be continuous with the third inclined portion 1308 and supporting the sample, and a fourth inclined portion 1312 provided at the end on the holder receiver 208 side and gradually increasing in height toward the second sample transport mechanism 1302 side. The third inclined portion 1308 of the second sample bridge 1304 has the same shape and function as the first inclined portion 402 of the first sample bridge 306. The second support portion 1310 of the second sample bridge 1304 has the same shape and function as the first support portion 404 of the first sample bridge 306. The fourth inclined portion 1312 of the second sample bridge 1304 has the same shape and function as the second inclined portion 406 of the first sample bridge 306. The second support plate 1314 has the same shape and function as the first support plate 310 .

[0050] In addition, the sample moving mechanism 300 in the second embodiment further pushes and moves the sample located at the fourth position 1318 from the fourth position 1318 to the sample holding position of the sample holder 312 arranged in the holder receiver 208, and also pushes and moves the sample located at the sample holding position from the sample holding position to the fourth position 1318.

[0051] As described above, the X-ray analysis system 100 according to the second embodiment includes the first sample transport mechanism 104 and the second sample transport mechanism 1302. For example, if both the first sample transport mechanism 104 and the second sample transport mechanism 1302 are belt conveyors, two belts for transporting samples are included. Therefore, according to the second embodiment, after a sample transported from the first position 318 to the X-ray analysis system 100 is analyzed, the analyzed sample can be transported to a third position different from the first position 318. In the second embodiment, by providing the third inclined portion 1308 on the second sample bridge 1304, the sample can be easily moved between the sample transport mechanism and the holder receiver 208 with a simple and compact configuration.

[0052] 100 X-ray analysis system, 102 X-ray analysis device, 104 First sample transport mechanism, 106 Sample loader, 108 Holder tray, 110 Holder transporter, 202 Space for holder insertion, 204 Measurement chamber, 206 Pre-exhaust chamber, 208 Holder receiver, 300 Sample movement mechanism, 302 Belt, 304 Pulley, 306 First sample bridge, 308 First bridge plate, 310 First support plate, 312 Sample holder, 314 First push-out section, 316 Second push-out section, 318 First position, 320 Second position, 402 First inclined section, 404 First support section, 406 Second inclined section, 702 Sample stage, 704 X-ray source, 706 Spectroscopic element 708 detector, 1302 second sample transport mechanism, 1304 second sample bridge, 1306 second bridge plate, 1308 third inclined portion, 1310 second support portion, 1312 fourth inclined portion, 1314 second support plate, 1316 third position, 1318 fourth position.

Claims

1. A sample bridge comprising: a holder receiver in which a sample holder that temporarily holds a sample is placed; a first sample transport mechanism in which the sample is placed and which transports the sample from a first position to a second position closer to the holder receiver than the first position; a sample transport mechanism which pushes the sample at the second position from the second position to a sample holding position of the sample holder placed in the holder receiver, and pushes the sample at the sample holding position from the sample holding position to the second position; and a first sample bridge which is placed between the second position of the first sample transport mechanism and the holder receiver, and which comprises: a first inclined portion which is provided at an end on the first sample transport mechanism side and is formed so as to gradually become higher toward the holder receiver side; and a first support portion which is provided on the holder receiver side of the first inclined portion so as to be continuous with the first inclined portion and which supports the sample; an end of the sample on the sample holder side contacting the first inclined portion of the first sample bridge when the sample is pushed from the second position toward the holder receiving side by the sample moving mechanism, and then sliding up the first inclined portion to reach the first support portion; and an end of the sample on the first sample transport mechanism side resting directly on the first sample transport mechanism when the sample is pushed from the position on the first support portion toward the second position by the sample moving mechanism.

2. The X-ray analysis system described in claim 1, characterized in that the first sample bridge is provided at the end on the holder receiving side and is formed so as to gradually increase in height toward the first sample transport mechanism side, and further comprises a second inclined portion provided on the holder receiving side of the first support portion so as to be connected to the first support portion and which forms an angle with the first support portion.

3. The X-ray analysis system described in claim 2, characterized in that when the sample moving mechanism pushes the sample from its position on the first support part toward the sample holding position, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample moving mechanism pushes the sample from its position toward the sample moving mechanism, the end of the sample on the first sample transport mechanism side abuts the second inclined part of the first sample bridge, and then slides up the second inclined part to reach the first support part.

4. The X-ray analysis system described in claim 2, characterized in that when the sample moving mechanism pushes the sample from its position on the first support portion toward the sample holding position, the end of the sample on the holder receiving side rests directly on the sample holding position of the sample holder, and when the sample moving mechanism pushes the sample from its position toward the sample moving mechanism, the end of the sample on the first sample transport mechanism side rests directly on the first support portion without abutting the second inclined portion of the first sample bridge.

5. An X-ray analysis system according to any one of claims 1 to 4, characterized in that the first inclined portion is a curved surface whose inclination gradually changes from the first sample transport mechanism side toward the holder receiving side.

6. An X-ray analysis system according to any one of claims 2 to 4, characterized in that the second inclined portion is a curved surface whose inclination gradually changes from the holder receiving side toward the first sample transport mechanism side.

7. An X-ray analysis system according to any one of claims 1 to 4, further comprising: a second sample transport mechanism on which the sample is placed and which transports the sample between a third position and a fourth position closer to the holder receptacle than the third position; and a second sample bridge which is placed between the fourth position of the second sample transport mechanism and the holder receptacle, the second sample bridge comprising: a third inclined portion which is provided at an end of the second sample transport mechanism side and which is formed so as to gradually rise towards the holder receptacle side; and a second support portion which is provided on the holder receptacle side of the third inclined portion and is connected to the third inclined portion, and which supports the sample; wherein the sample moving mechanism further pushes and moves the sample which is at the fourth position from the fourth position to a sample holding position of the sample holder placed in the holder receptacle, and pushes and moves the sample which is at the sample holding position from the sample holding position to the fourth position.

8. The X-ray analysis system described in claim 7, characterized in that the first sample bridge further has a first support plate fixed to the back surface opposite to the front surface on which the first support portion is formed, the first sample transport mechanism is a belt conveyor having a belt on the front surface of which the first position and the second position are located, and a pulley that transports the sample from the first position to the second position by rotating the belt, and the first support plate is positioned so that the front surface of the first support plate is in contact with the back surface of the belt.

9. The X-ray analysis system described in claim 8, characterized in that the second sample bridge further has a second support plate fixed to the back surface opposite to the front surface on which the second support portion is formed, the second sample transport mechanism is a belt conveyor having a belt on the front surface of which the third position and the fourth position are located, and a pulley that transports the sample between the third position and the fourth position by rotating the belt, and the second support plate is positioned so that the front surface of the second support plate is in contact with the back surface of the belt.

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