Suction stage

Abstract

A suction stage according to the present embodiment comprises: a suction body having a plurality of upper suction holes; a plurality of check valves disposed on the suction body; and a lower vacuum chamber having at least one lower space that communicates with the inside of the respective check valves, and having at least one lower suction hole, wherein the check valves can be in one-to-one correspondence to the upper suction holes.

Description

Adsorption stage

[0001] The present invention relates to an absorption stage used in manufacturing a display.

[0002] A display is a display device that visually outputs data on a screen.

[0003] The process of manufacturing a display may include a process of adsorbing a semiconductor die, a display substrate, a display panel, etc. onto an adsorption stage.

[0004] Korean Patent Publication No. 10-2339079 B1 (published on December 14, 2021) discloses an adsorption stage for adsorbing and holding semiconductor dies of different sizes, the adsorption stage including an upper plate having a plurality of adsorption holes installed thereon, a plurality of vacuum channels for connecting the plurality of adsorption holes installed on the upper plate to a vacuum device for each of a plurality of groups according to the size of the semiconductor dies, and a check valve installed in at least one vacuum channel among the plurality of vacuum channels.

[0005] The present embodiment provides an adsorption stage capable of manufacturing a wider variety of display models of different sizes without mechanical changes.

[0006] An adsorption stage according to the present embodiment includes an adsorption body having a plurality of upper suction holes formed therein; a plurality of check valves arranged in the adsorption body; and a lower vacuum chamber having at least one lower space in which the interiors of each of the plurality of check valves are connected and at least one lower suction hole formed therein, wherein the check valve can correspond 1:1 with the upper suction hole.

[0007] Part or all of the check valve may be accommodated in the upper suction hole.

[0008] The suction body may be formed with an upper stopper in which a check valve is engaged in an upward direction.

[0009] The suction body may be formed with a lower stopper in which the large valve is directed downward.

[0010] A check valve may include a flow body having an inner space and an inlet and an outlet formed therein, which are connected to the inner space; a valve body movably received in the inner space and having an inner flow path formed therein; and a spring disposed inside the flow body and elastically supporting the valve body.

[0011] The inner euro may include an inlet formed vertically and an outlet formed horizontally and facing the inner space.

[0012] The valve body may include an upper body having an inlet formed therein; and a lower body formed on the lower side of the upper body and having the inlet and outlet formed therein.

[0013] The cross-sectional area of ​​the lower body may be smaller than the cross-sectional area of ​​the upper body.

[0014] The adsorption body includes an upper plate having a plurality of upper holes formed therein; and a valve housing having a receiving space in which a plurality of check valves are received, and a lower hole communicating with the lower space may be formed in the valve housing.

[0015] An upper stopper may be formed on the upper plate, which allows the check valve to be caught in an upward direction.

[0016] The valve housing may be formed with a lower stopper that engages the check valve downward.

[0017] The top and receiving space of the valve housing may face the bottom surface of the upper plate.

[0018] The upper and lower spaces of the lower vacuum chamber may face the bottom of the valve housing.

[0019] An inlet insertion hole into which the above inlet is inserted can be formed on the lower surface of the upper plate.

[0020] The valve housing may be formed with an outlet insert hole into which an outlet is inserted.

[0021] The adsorption stage may further include a packing disposed between the lower surface of the upper plate and the upper surface of the euro body. The cross-sectional area of ​​the packing is smaller than the cross-sectional area of ​​the valve.

[0022] The lower vacuum chamber may include partition walls that divide a plurality of lower spaces.

[0023] The lower stone hall can correspond 1:1 with the lower space.

[0024] The adsorption stage may further include multiple vacuum pumps connected to the lower vacuum chamber and corresponding 1:1 with the lower space.

[0025] According to this embodiment, the check valve corresponds 1:1 with the upper suction hole, so that it can correspond to workpieces of various sizes, and various models of displays can be manufactured without mechanical changes.

[0026] In addition, part or all of the check valve can be accommodated in the upper suction hole to minimize the thickness of the suction stage and enable compactification of the suction stage.

[0027] Additionally, a stopper formed on the suction body can prevent the check valve from being accidentally removed.

[0028] Additionally, the valve housing of the suction body can protect multiple check valves.

[0029] Additionally, the adsorption stage can be made as compact as possible by using packing smaller than the valve.

[0030] In addition, multiple lower spaces are formed in the lower vacuum chamber by the partition wall, and multiple vacuum pumps correspond 1:1 to the multiple lower spaces, so that workpieces of various sizes can be adsorbed by multiple vacuum pumps that are small in size and selectively turned on.

[0031] Figure 1 is a diagram showing an example of an adsorption stage according to the present embodiment when suctioning a workpiece.

[0032] Figure 2 is a plan view of another example of an adsorption stage according to the present embodiment when suctioning a workpiece;

[0033] Figure 3 is a cross-sectional view of another example of an adsorption stage according to the present embodiment;

[0034] Figure 4 is a diagram showing another example of an adsorption stage according to the present embodiment when absorbing a work.

[0035] Hereinafter, specific embodiments of the present invention will be described in detail with drawings.

[0036] Figure 1 is a diagram showing an example of an adsorption stage according to the present embodiment when suctioning a work.

[0037] An example of an adsorption stage may include an adsorption body (1); a plurality of check valves (2); and a lower vacuum chamber (3), and a vacuum pump (4), and may adsorb a workpiece (W).

[0038] Examples of the work (W) may include a semiconductor die, a micro LED substrate, a micro LED panel, etc., and are not limited to the type of the work, as long as it can form a display.

[0039] The upper surface (1a) of the adsorption body (1) may be an adsorption surface that adsorbs the work (W).

[0040] The bottom surface (1b) of the adsorption body (1) can cover the upper surface of the lower vacuum chamber (3). The bottom surface (1b) of the adsorption body (1) can cover the lower space (32) of the lower vacuum chamber (3) from the upper side of the lower vacuum chamber (3).

[0041] An upper suction hole (12) can be formed in the suction body (1). The upper suction hole (12) can penetrate the upper surface (1a) of the suction body (1) and the lower surface (1b) of the suction body (1), and can be formed long in the up-down direction (Z).

[0042] A stopper that limits the upward and downward movement (Z) of the check valve (2) can be formed in the suction body (1).

[0043] An upper stopper (1c) on which a check valve (2) is caught in an upward direction may be formed in the suction body (1). The upper stopper (1c) may be ring-shaped.

[0044] A lower stopper (1d) on which a check valve (2) is engaged in a downward direction may be formed in the suction body (1). The lower stopper (1d) may be ring-shaped. The check valve (2) may be mounted on the lower stopper (1d).

[0045] An example of a stopper may be formed integrally with the suction body (1).

[0046] Another example of a stopper is one that is manufactured separately from the suction body (1) and then bonded to the suction body (1).

[0047] The upper suction hole (12) can be formed inside the upper stopper (1c), inside the suction body (1), and inside the lower stopper (1d).

[0048] The suction body (1) may include a valve housing that accommodates a check valve (2). The upper suction hole (12) may be a check valve accommodation hole that accommodates a check valve (2).

[0049] A plurality of upper suction holes (12) can be formed in the suction body (1).

[0050] A plurality of upper suction holes (12) can be formed at equal intervals in the suction body (1).

[0051] The check valve (2) may correspond 1:1 to the upper suction hole (12). A check valve (2) may be placed in each upper suction hole (12). When four upper suction holes (12) are formed in the suction body (1), four check valves (2) may be installed, and when 98 upper suction holes (12) are formed in the suction body (1), 98 check valves (2) may be installed. It goes without saying that the number of upper suction holes (12) and the number of check valves (2) are not limited.

[0052] Part or all of each of the multiple check valves (2) can be accommodated in the upper suction hole (12).

[0053] When each of the plurality of check valves (2) is accommodated in the upper suction hole (12), the vertical length (Z) of the check valves (2) can be smaller than the thickness of the suction body (1), and the thickness of the suction stage can be minimized.

[0054] A plurality of check valves (2) may be arranged in the suction body (1). Each of the plurality of check valves (2) may be arranged inside the suction body (1) and may be protected by the suction body (1). The plurality of check valves (2) may be arranged at equal intervals in the suction body (1).

[0055] The check valve (2) may include a euro body (5), a valve body (6) and a spring (7).

[0056] An inner space (51) can be formed in the euro body (5).

[0057] The euro body (5) may include a body having an inner space (51) formed therein. The body may be a hollow cylinder with an empty interior, for example, a cylindrical shape with an empty interior.

[0058] An inlet (52) and an outlet (53) may be formed in the euro body (5). Each of the inlet (52) and the outlet (53) may be connected to the inner space (51).

[0059] The inlet (52) may be formed on the upper side of the inner space (51) and may communicate with the inner space (51). The inlet (52) may be formed to protrude upward on the upper part of the body. The cross-sectional area of ​​the inlet (52) may be smaller than the cross-sectional area of ​​the inner space (51).

[0060] When the vacuum pump (4) is in operation, air from the upper suction hole (12) can be suctioned into the inside of the check valve (2) through the inlet (52).

[0061] An outlet (53) may be formed on the lower side of the inner space (51) and may be in communication with the inner space (51). The outlet (53) may be formed to protrude downward from the lower part of the body. The cross-sectional area of ​​the outlet (53) may be smaller than the cross-sectional area of ​​the inner space (51).

[0062] A contact surface (54) that the valve body (6) comes into contact with when the valve body (6) descends can be formed in the outlet (53).

[0063] The contact surface (54) can be formed on the upper part of the outlet (53).

[0064] The contact surface (54) can be formed to have a size that gradually decreases toward the bottom.

[0065] A spring seat (55) on which a spring (7) is mounted can be formed in the euro body (5).

[0066] The spring sheet (55) can be formed inside the euro body (5) and can be flat in the horizontal direction (X).

[0067] The valve body (6) can be movably accommodated in the inner space (51). An inner flow path (62) can be formed in the valve body (6).

[0068] The inner euro (62) may include an inlet (63) and an outlet (64).

[0069] The entrance (63) can be formed long in the vertical direction (Z).

[0070] The outlet (64) may be formed to be long in the horizontal direction (X). The outlet (64) may be connected to the lower end of the inlet (63). The outlet (64) may communicate with the inner space (51). The outlet (64) may face the inner space (51) in the longitudinal direction.

[0071] A plurality of outlets (64) can be formed in the valve body (6). The plurality of outlets (64) can be arranged radially.

[0072] The valve body (6) can be raised by the spring (7), and when the valve body (6) is raised, the valve body (6) can be separated from the outlet (53), and a gap (G) through which air can pass can be formed between the valve body (6) and the contact surface (54).

[0073] When the valve body (6) rises, the air suctioned to the inlet (63) can be suctioned to the inner space (51) through the outlet (64), and the air in the inner space (51) can pass through the outlet (53) through the gap (G).

[0074] When the valve body (6) is lowered, the valve body (6) can come into contact with the contact surface (54), and the valve body (6) can block the outlet (53).

[0075] The valve body (6) may include an upper body (65) and a lower body (66).

[0076] The upper body (65) can divide the inner space (51) into upper and lower sections.

[0077] The upper surface of the upper body (65) may be flat. An inlet (63) may be formed inside the upper body (65).

[0078] The lower body (66) may be formed on the lower side of the upper body (65). An inlet (63) and an outlet (64) may be formed in the lower body (66).

[0079] The cross-sectional area of ​​the lower body (66) may be smaller than the cross-sectional area of ​​the upper body (65).

[0080] When the valve body (6) is lowered, the lower body (66) can be inserted into the outlet (53), the lower body (66) can come into contact with the contact surface (54), and the lower body (66) can close the outlet (53).

[0081] A spring (7) can be placed inside the euro body (5). The spring (7) can elastically support the valve body (6). An example of the spring (7) may be a coil spring.

[0082] The spring (7) can elastically support the upper body (65) from the lower side of the upper body (65).

[0083] The spring (7) can be positioned between the outer surface of the lower body (66) and the inner surface of the euro body (5) in the horizontal direction (X).

[0084] The lower end of the spring (7) can be seated on the spring seat (55) of the euro body (5). The upper end of the spring (7) can be in contact with the valve body (6). The upper end of the spring (7) can be in contact with the lower surface of the upper body (65).

[0085] The spring (7) can be positioned between the bottom surface of the upper body (65) and the spring seat (55) of the euro body (5) in the vertical direction (Z).

[0086] In the absence of external force, the spring (7) can raise the valve body (7), and the check valve (2) can be in an open state.

[0087] At least one lower space (32) can be formed in the lower vacuum chamber (3).

[0088] The lower space (32) can be communicated with the inside of each of the plurality of check valves (2).

[0089] The lower space (32) can be formed inside the lower vacuum chamber (3).

[0090] At least one lower suction hole (34) can be formed in the lower vacuum chamber (3).

[0091] The vacuum pump (4) can be connected to the lower vacuum chamber (3) through the lower suction hole (34) and can suction air in the lower space (32).

[0092] An example of a vacuum pump (4) is connected to a lower suction hole (34) by a hose to suction air in the lower space (32).

[0093] Another example of a vacuum pump (4) can be mounted in the lower vacuum chamber (3) to suction air from the lower space (32).

[0094] When the size of the work (W) is large, the work (W) can be located on the upper side of all check valves (2) and cover all upper suction holes (12) of the suction body (1).

[0095] When the size of the work (W) is small, the work (W) may be positioned only on the upper side of some of the plurality of check valves (2), and may not be positioned on the upper side of the remaining plurality of check valves (2).

[0096] When the vacuum pump (4) is turned on, air between the check valve (2) and the work (W) located on the upper side can pass through the check valve (2) and be suctioned to the vacuum pump (4) through the lower space (32) and the lower suction hole (34), and the upper suction hole (12), the check valve (2), the lower space (32), and the lower suction hole (32) can be in a vacuum state.

[0097] When the vacuum pump (4) is turned on, the valve body (6) of the check valve (2) on which the workpiece (W) is not positioned on the upper side can be lowered by the suction force of the vacuum pump (4), and the valve body (6) can close the outlet (53) by contacting the contact surface (54), and the check valve (2) can be in a closed state. The air on the upper side of the suction body (1) is blocked by the check valve (2) and is not suctioned into the lower space (32).

[0098] FIG. 2 is a plan view of another example of an adsorption stage according to the present embodiment when suctioning a workpiece, FIG. 3 is a cross-sectional view of another example of an adsorption stage according to the present embodiment, and FIG. 4 is a view of another example of an adsorption stage according to the present embodiment when suctioning a workpiece.

[0099] Another example of an adsorption stage is that the configuration of the adsorption body (1') may be different from the stage example illustrated in FIG. 1, and the configuration of the plurality of check valves (2), the lower vacuum chamber (3) and the vacuum pump (4) may be the same as or similar to the adsorption stage example.

[0100] Hereinafter, the same drawing symbols are used for configurations identical or similar to the example of the adsorption stage, and detailed descriptions thereof are omitted to avoid duplicate descriptions.

[0101] The adsorption body (1') can include an upper plate (8) having a plurality of upper holes (12a) formed therein and a valve housing (9) having a receiving space (12b) in which a plurality of check valves (2) are received.

[0102] The upper plate (8) can form the upper surface appearance of the suction stage. The upper surface of the upper plate (8) can be the upper surface of the suction body (1').

[0103] A plurality of upper holes (12a) can be formed at equal intervals in the upper plate (8).

[0104] An upper stopper (1c) that catches the check valve (2) in an upward direction may be formed on the upper plate (8). The upper stopper (1c) may be around the upper hole (12a).

[0105] The upper stopper (1c) may be ring-shaped, and the upper hole (12a) may be formed in the upper stopper (1c). The upper hole (12a) may be formed in the upper stopper (1c) in the vertical direction (Z).

[0106] An inlet insertion hole (82) into which the inlet (52) of the check valve (2) is inserted can be formed on the lower surface of the upper plate (8).

[0107] The inlet insertion hole (82) can be formed to be sunken into the lower surface of the upper plate (8).

[0108] The inlet insertion hole (82) can be formed larger than the upper hole (12a).

[0109] A lower hole (12c) communicating with the lower space (32) can be formed in the valve housing (9).

[0110] The lower hole (12c) can be formed on the lower side of the check valve (2).

[0111] A lower stopper (1d) may be formed in the valve housing (9) to which the check valve (2) is directed downward. The lower stopper (1d) may be around the lower hole (12a).

[0112] The lower stopper (1d) may be ring-shaped, and the lower hole (12c) may be formed in the lower stopper (1d). The lower hole (12c) may be formed in the upper and lower direction (Z) in the lower stopper (1d).

[0113] An outlet insertion hole (92) into which the outlet (53) of the check valve (2) is inserted can be formed in the valve housing (9).

[0114] The outlet insertion hole (92) can be formed to be sunken into the valve housing (9).

[0115] The outlet insertion hole (92) can be formed larger than the lower hole (12c).

[0116] The combination of the upper hole (12a), the receiving space (12b), and the lower hole (12c) can correspond to an upper suction hole (12) of an adsorption stage.

[0117] The inlet (52) of the check valve (2) can be inserted into the inlet insertion hole (82) of the upper plate (8), and the outlet (53) of the check valve (2) can be inserted into the outlet insertion hole (92) of the valve housing (9). The body of the check valve (2) can be accommodated in the accommodation space (12b).

[0118] The check valve (2) may be identical to the check valve (2) of the suction stage, and may include a euro body (5), a valve body (6), and a spring (7).

[0119] The adsorption stage may include packing (84).

[0120] The packing (84) is placed between the lower surface of the upper plate (8) and the euro body (5) to seal between the upper plate (8) and the check valve (2).

[0121] The cross-sectional area of ​​the packing (84) may be smaller than the cross-sectional area of ​​the check valve (2). The packing (84) may be annular.

[0122] An example of packing (84) may be an O-ring.

[0123] A plurality of receiving spaces (12b) may be formed in the valve housing (9). An upper partition wall (96) that partitions the plurality of receiving spaces (12b) may be formed in the valve housing (9).

[0124] The top of the valve housing (9) and the receiving space (12b) can face the bottom of the upper plate (8).

[0125] The bottom surface of the valve housing (9) may be the bottom surface of the suction body (1').

[0126] The upper part of the lower vacuum chamber (3) and the lower space (32) can face the lower surface of the valve housing (9). The upper part of the lower vacuum chamber (3) can be in close contact with the lower surface of the valve housing (9).

[0127] A lower space (32) and a lower suction hole (34) can be formed in the lower vacuum chamber (3).

[0128] The lower suction hole (34) of the lower vacuum chamber (3) can correspond 1:1 with the lower space (32).

[0129] Each of the lower space (32) and the lower suction hole (34) can be formed in multiple numbers.

[0130] Another example of an adsorption stage is one in which one vacuum pump (4) is connected to a lower vacuum chamber (3), and one lower space (32) and one lower suction hole (34) are formed in the lower vacuum chamber (3). In this case, the vacuum pump (4) can be turned on regardless of the size of the work (W) to adsorb the work (W).

[0131] Another example of an adsorption stage comprising one vacuum pump (4) may be a large-capacity vacuum pump capable of vacuuming a large lower space (32).

[0132] Another example of an adsorption stage is one in which multiple vacuum pumps (4) are connected to a lower vacuum chamber (3), and multiple lower spaces (32) and multiple lower suction holes (34) are formed in the lower vacuum chamber (3).

[0133] The lower vacuum chamber (3) has a lower partition wall (36) that divides a plurality of lower spaces (32).

[0134] This can be formed. Another example of an adsorption stage may include multiple vacuum pumps (4) connected to a lower vacuum chamber (3). The vacuum pumps (4) may correspond 1:1 with the lower space (32).

[0135] Another example of an adsorption stage comprising multiple vacuum pumps (4) may be a small-capacity vacuum pump smaller than a large-capacity vacuum pump.

[0136] Another example of an adsorption stage includes multiple vacuum pumps (4), where the multiple vacuum pumps (4) can be selectively turned on depending on the size of the work (W).

[0137] The plurality of vacuum pumps (4) may include an on-off vacuum pump and an off-off vacuum pump depending on the size of the work (W), and the on-off vacuum pump can adsorb the work (W).

[0138] When a large workpiece (W) is adsorbed on the upper plate (8), all of the vacuum pumps (4) can be turned on.

[0139] When a small work (W) is adsorbed on the upper plate (8), some of the multiple vacuum pumps (4) may be kept in an off state, and only some may be turned on.

[0140] The adsorption stage can be spaced apart from the ground in the vertical direction by the base (10).

[0141] A bracket (98) may be formed on at least one of the suction body (1') and the lower vacuum chamber (3), and the bracket (98) may be mounted on the base (10) using a fastening member (99) such as a bolt or nut.

[0142] The above description is merely an example of the technical idea of ​​the present invention, and those skilled in the art will appreciate that various modifications and variations can be made without departing from the essential characteristics of the present invention.

[0143] Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of ​​the present invention but to explain it, and the scope of the technical idea of ​​the present invention is not limited by these embodiments.

[0144] The scope of protection of the present invention should be interpreted by the claims below, and all technical ideas within the scope equivalent thereto should be interpreted as being included in the scope of the rights of the present invention.

Claims

1. An adsorption body with multiple upper suction holes formed; A plurality of check valves arranged in the above adsorption body; and Each of the plurality of check valves includes a lower vacuum chamber in which at least one lower space and at least one lower suction hole are formed, The above check valve is a suction stage corresponding 1:1 to the upper suction hole.

2. In paragraph 1, An adsorption stage in which some or all of the above check valves are accommodated in the upper suction hole.

3. In paragraph 1, An adsorption stage in which an upper stopper is formed on the above adsorption body, in which the check valve is caught in an upward direction.

4. In paragraph 1, An adsorption stage in which a lower stopper is formed on the above adsorption body, in which the check valve is directed downward.

5. In paragraph 1, The above check valve A euro body having an inner space and an inlet and outlet connected to the inner space; A valve body movably accommodated in the inner space and having an inner urea formed therein; and An adsorption stage disposed inside the above-mentioned euro body and including a spring that elastically supports the valve body.

6. In paragraph 5, The above inner euro is Entrance formed in a long vertical direction and An adsorption stage formed in a horizontal direction and including an outlet facing the inner space.

7. In paragraph 5, The above valve body An upper body in which the above entrance is formed; and A lower body formed on the lower side of the upper body and having an inlet and an outlet formed therein, An adsorption stage in which the cross-sectional area of ​​the lower body is smaller than the cross-sectional area of ​​the upper body.

8. In paragraph 1, The above adsorption body An upper plate having multiple upper holes formed therein; and A valve housing having a receiving space formed to receive the plurality of check valves, An adsorption stage having a lower hole formed in the valve housing to communicate with the lower space.

9. In paragraph 8, An adsorption stage in which an upper stopper is formed on the upper plate so that the check valve is caught in an upward direction.

10. In paragraph 8, An adsorption stage in which a lower stopper is formed in the above valve housing so that the check valve is caught in a downward direction.

11. In paragraph 8, The upper part and the receiving space of the above valve housing face the lower surface of the above upper plate, The upper and lower spaces of the above lower vacuum chamber are suction stages facing the bottom surface of the above valve housing.

12. In paragraph 8, The above check valve A euro body having an inner space and an inlet and outlet connected to the inner space; A valve body movably accommodated in the inner space and having an inner urea formed therein; and An adsorption stage disposed inside the above-mentioned euro body and including a spring that elastically supports the valve body.

13. In paragraph 12, An inlet insertion hole into which the inlet is inserted is formed on the lower surface of the upper plate, An adsorption stage having an outlet insertion hole formed in the above valve housing into which the outlet is inserted.

14. In paragraph 11, Further comprising a packing arranged between the lower surface of the upper plate and the upper surface of the euro body, An adsorption stage in which the cross-sectional area of ​​the above packing is smaller than the cross-sectional area of ​​the above valve.

15. In paragraph 1, The above lower vacuum chamber includes a partition wall that divides a plurality of lower spaces, The above lower stone hall corresponds 1:1 with the lower space. An adsorption stage further comprising a plurality of vacuum pumps connected to the lower vacuum chamber and corresponding 1:1 with the lower space.

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