Apparatus for manufacturing display device, method for manufacturing display device, and method for manufacturing electronic device

Abstract

Disclosed is an apparatus for manufacturing a display device, the apparatus comprising: a stage on which a display substrate is mounted; a light source unit that generates light and emits a laser beam in a first direction; and a light path module that reflects the laser beam emitted from the light source unit and input, and outputs the laser beam in a second direction intersecting the first direction, thereby irradiating the stage with the laser beam. The light path module comprises: a head part provided with an input opening through which the laser beam is input; a level adjustment part that is disposed below the head part and can adjust the level of the head part in the height direction; a position adjustment part that is disposed below the level adjustment part and can adjust the position of the head part in the longitudinal direction; and a base disposed below the position adjustment part.

Description

Manufacturing device for display device, manufacturing method for display device, and manufacturing method for electronic device

[0001] The present invention relates to a device and a method, and more particularly, to a device for manufacturing a display device, a method for manufacturing a display device, and a method for manufacturing an electronic device.

[0002] Electronic devices are widely used these days. They are used in a variety of ways, including both mobile and stationary electronic devices. These devices include display devices that can provide users with visual information, such as images or videos, to support various functions.

[0003] During the manufacturing process of display devices, various foreign substances can cause defects, such as pixels that don't turn on or off. These defects are considered defective and require the display device to be scrapped, increasing manufacturing costs. To reduce manufacturing costs and defect rates, a repair process is essential to the manufacturing process.

[0004] In these repair processes, laser-based repair processes can be utilized. Applying the laser to the display device requires precise control. This necessitates precise control and standardization of the laser's input and output positions.

[0005] The embodiments of the present invention aim to provide a manufacturing device for a display device, a manufacturing method for a display device, and a manufacturing method for an electronic device capable of precisely controlling and standardizing the input and output positions of a laser.

[0006] However, these tasks are exemplary, and the tasks to be solved by the present invention are not limited thereto.

[0007] According to one feature of the present invention, a manufacturing apparatus for a display device is disclosed, comprising: a stage on which a display substrate is mounted; a light source unit that generates light and irradiates a laser beam in a first direction; and an optical path module that reflects the laser beam irradiated and input from the light source unit and outputs a laser beam in a second direction intersecting the first direction to irradiate the laser beam on the stage; wherein the optical path module includes a head unit that defines an input opening through which a laser beam is input, a level adjustment unit that is disposed below the head unit and can adjust a level in a height direction of the head unit, a position adjustment unit that is disposed below the level adjustment unit and can adjust a position in a longitudinal direction of the head unit, and a base that is disposed below the position adjustment unit.

[0008] In one embodiment, the optical path module may further include a grid plate having grid lines, the grid plate being arranged to cover the input opening of the head portion.

[0009] In one embodiment, the optical path module may further include a guide rail disposed on one surface of the head portion and defining a groove so that the grid plate can be slidably removed.

[0010] In one embodiment, the grid plate includes an alignment protrusion protruding from the bottom, and the alignment protrusion can be coupled to an early-in groove provided in the level adjustment unit.

[0011] In one embodiment, the level adjustment unit includes a first plate and a first bolt and a second bolt inserted into the first plate, wherein the first bolt is fastened to a threaded hole of the position adjustment unit, and the second bolt may not be fastened to the position adjustment unit.

[0012] In one embodiment, the first bolt can lower the first plate as it is tightened, and the second bolt can raise the first plate as it is tightened.

[0013] In one embodiment, the second bolt may be in contact with the upper surface of the positioning member.

[0014] In one embodiment, the second bolt may comprise a rounded end screw.

[0015] In one embodiment, the first bolt may be positioned further inside the first plate than the second bolt.

[0016] In one embodiment, the level adjustment unit may further include a horizontal measurement unit disposed on the first plate to measure the horizontality of the first plate.

[0017] In one embodiment, the horizontal measuring unit may be positioned on each edge along the perimeter of the first plate.

[0018] In one embodiment, the positioning unit includes a second plate that is movable in the longitudinal direction, a third bolt formed to be inserted into the second plate, and the second plate can define an extension hole formed to be inserted into the third bolt.

[0019] In one embodiment, the extension hole may be an opening extending in the longitudinal direction so that the third bolt is positioned within the extension hole when the second plate moves in the longitudinal direction.

[0020] In one embodiment, the position adjustment unit may further include a position measurement unit disposed on one side of the second plate in the longitudinal direction to measure the degree of movement of the second plate in the longitudinal direction.

[0021] In one embodiment, the positioning member further includes a projection that protrudes from the lower portion of the second plate toward the base and extends in the longitudinal direction, the base defines a receiving groove that extends in the longitudinal direction to receive the projection, and the projection can be slidably moved along the receiving groove.

[0022] In one embodiment, the stage further includes a detachable target plate on one side, and the target plate has a target mark on its upper surface, so that a position at which the output laser beam is irradiated can be indicated.

[0023] In one embodiment, the target plate further includes a protruding shaft protruding from the lower surface, the stage further defines a mounting hole provided at a position corresponding to the protruding shaft, and the protruding shaft can be fitted into the mounting hole.

[0024] In one embodiment, the device may further include an optical unit disposed between the light source unit and the optical path module and including a plurality of lenses.

[0025] In one embodiment, the device may further include a support plate that supports the light source unit and the optical path module and is positioned to face the stage and spaced apart from it.

[0026] According to one feature of the present invention, a method for manufacturing a display device is disclosed, including the steps of: arranging a display substrate on a stage; generating light from a light source and irradiating a laser beam in a first direction; and reflecting the laser beam irradiated and input from the light source and outputting a laser beam in a second direction intersecting the first direction to irradiate the display substrate with the laser beam to repair the display substrate; wherein the optical path module includes a head portion defining an input opening into which a laser beam is input, a level adjustment portion disposed below the head portion and capable of adjusting a level in a height direction of the head portion, a position adjustment portion disposed below the level adjustment portion and capable of adjusting a position in a longitudinal direction of the head portion, and a base disposed below the position adjustment portion.

[0027] According to one feature of the present invention, a method for manufacturing an electronic device is disclosed, comprising: a step of arranging a display substrate on a stage; a step of generating light from a light source and irradiating a laser beam in a first direction; and a step of reflecting the laser beam irradiated and input from the light source and outputting a laser beam in a second direction intersecting the first direction to irradiate the laser beam onto the display substrate and repairing the display substrate; wherein the optical path module includes a head portion defining an input opening into which a laser beam is input, a level adjustment portion disposed below the head portion and capable of adjusting a level in a height direction of the head portion, a position adjustment portion disposed below the level adjustment portion and capable of adjusting a position in a longitudinal direction of the head portion, and a base disposed below the position adjustment portion.

[0028] Other aspects, features and advantages other than those described above will become apparent from the following detailed description, claims and drawings for carrying out the invention.

[0029] According to embodiments of the present invention, a display device manufacturing device and a display device manufacturing method can be provided, which can precisely adjust laser input and output positions to perform a more efficient repair process.

[0030] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0031] FIG. 1 is a drawing schematically showing a manufacturing device for a display device according to one embodiment of the present invention.

[0032] FIG. 2 is a perspective view schematically showing an optical path module according to one embodiment of the present invention.

[0033] FIG. 3 is a cross-sectional view schematically showing a part of a level adjustment unit according to one embodiment of the present invention, which may correspond to a cross-section taken along line III-III' of FIG. 2.

[0034] Figure 4 is a perspective view schematically showing a stage according to one embodiment of the present invention.

[0035] FIG. 5 is a plan view schematically showing a display device manufactured using a display device manufacturing device according to one embodiment of the present invention.

[0036] FIG. 6 is a cross-sectional view schematically illustrating a display device manufactured by a display device manufacturing apparatus according to one embodiment of the present invention, and may correspond to a cross-section of the display device taken along line VI-VI' of FIG. 5.

[0037] The present invention is capable of various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, as well as the methods for achieving them, will become clearer with reference to the embodiments described in detail below, along with the drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms.

[0038] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same drawing reference numerals, and redundant descriptions thereof will be omitted.

[0039] In the examples below, the terms first, second, etc. are not used in a limiting sense, but are used for the purpose of distinguishing one component from another.

[0040] In the examples below, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0041] In the examples below, terms such as “include” or “have” mean that a feature or component described in the specification is present, and do not preclude the possibility that one or more other features or components may be added.

[0042] In the following examples, when a part such as a film, region, component, etc. is said to be on or above another part, it includes not only a case where it is directly on top of the other part, but also a case where another film, region, component, etc. is interposed in between.

[0043] In the following examples, when it is said that a film, region, component, etc. are connected, it includes cases where the films, regions, components, etc. are directly connected, and / or cases where other films, regions, components, etc. are interposed between the films, regions, components, and so on, and so on are indirectly connected. In addition, when it is said that a film, region, component, etc. are electrically connected, it includes cases where the films, regions, components, etc. are directly electrically connected, and / or cases where other films, regions, components, etc. are interposed between the films, regions, components, and so on are indirectly electrically connected.

[0044] For convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily indicated for convenience of explanation, and thus the present invention is not necessarily limited to what is shown.

[0045] In the examples below, “A and / or B” indicates that it is A, that it is B, or that it is both A and B. In addition, “at least one of A and B” indicates that it is A, that it is B, or that it is both A and B.

[0046] In the following embodiments, the meaning of the wiring "extending in the first direction or the second direction" includes not only extending in a straight shape, but also extending in a zigzag or curved shape along the first direction or the second direction.

[0047] In the following examples, the term "planar" refers to a top-view of the target portion. In the following examples, the term "cross-sectional" refers to a side-view of a vertical cross-section of the target portion. In the following examples, the term "overlapping" a first component with a second component refers to the first component being positioned above or below the second component.

[0048] In the following examples, the x-axis, y-axis, and z-axis are not limited to three axes on an orthogonal coordinate system, and can be interpreted in a broad sense that includes them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

[0049] In some embodiments, where implementations are otherwise feasible, specific process sequences may be performed in a different order than described. For example, two processes described in succession may be performed substantially simultaneously, or in a reverse order from the described order.

[0050] FIG. 1 is a drawing schematically showing a manufacturing device for a display device according to one embodiment of the present invention.

[0051] Referring to FIG. 1, a manufacturing device (2) of a display device may include, in one embodiment, a support plate (10), a light source unit (20), an optical unit (30), a light path module (40), and a stage (50).

[0052] The support plate (10) can support the light source unit (20), the optical unit (30), and the optical path module (40). In one embodiment, the light source unit (20), the optical unit (30), and the optical path module (40) can be arranged, for example, mounted, on the support plate (10), and can be arranged to face the stage (50) and spaced apart from it, for example, on the top. Although not shown in the drawing, the support plate (10) can be connected to a gantry and moved forward and backward in the first direction (x direction).

[0053] The light source unit (20) is a laser source and can emit a laser beam, for example, an excimer laser beam. As another example, the light source unit (20) can emit a linearly polarized laser beam. The light source unit (20) may be a concept including a conventional laser source and a linearly polarizing plate. The light source unit (20) may use, for example, a fiber laser, and the fiber laser has the advantages of being able to control output over a wide range, having relatively low maintenance costs, and being highly efficient. For convenience of explanation, the following description will focus on a case where the light source unit (20) irradiates a laser beam in a first direction (x direction).

[0054] The optical unit (30) may include a plurality of lenses. The optical unit (30) may include a cylindrical or spherical lens. In one embodiment, the optical unit (30) may reduce or enlarge the laser beam in a first direction (x direction) and / or a third direction (y direction). In addition, in one embodiment, the optical unit (30) may include a beam splitter and / or an optical rotation unit, etc.

[0055] The optical path module (40) can change the path of the laser beam input from the light source unit (20). For example, the optical path module (40) can reflect a laser beam incident in a first direction (x direction) and output it in a second direction (z direction). At this time, a laser beam incident with the optical path module (40) as the center can be defined as an input laser beam. In addition, a laser beam radiated with the optical path module (40) as the center can be defined as an output laser beam. The optical path module (40) can include a reflecting mirror (not shown) to change the path of the input laser beam. The output laser beam from the optical path module (40) can be irradiated toward the stage (50).

[0056] The stage (50) can support the display substrate (DS). That is, the display substrate (DS) can be loaded and mounted on the stage (50). The output laser beam from the optical path module (40) described above is irradiated onto the display substrate (DS) on the stage (50), and a portion of the display substrate (DS), for example, a pixel, can be repaired. In one embodiment, a rotational driving unit (51) can be arranged at the bottom of the stage (50). The rotational driving unit (51) can rotate the stage (50) around the rotational driving unit (51) as a rotational axis. Accordingly, after the display substrate (DS) is loaded onto one side of the stage (50), the stage (50) can rotate around the rotational driving unit (51) as a rotational axis to position the display substrate (DS) on the opposite side. Next, the support plate (10) can be moved in the first direction (x direction) so that the laser beam is irradiated toward the display substrate (DS).

[0057] Fig. 2 is a perspective view schematically showing an optical path module according to one embodiment of the present invention. Fig. 3 is a cross-sectional view schematically showing a portion of a level adjustment unit according to one embodiment of the present invention, which may correspond to a cross-section taken along line III-III' of Fig. 2.

[0058] Referring to FIG. 2, in one embodiment, the optical path module (40) may include a head portion (41), a level adjustment portion (42), a position adjustment portion (43), and a base (44).

[0059] The head unit (41) can receive a laser beam irradiated from the light source unit (20). For example, the laser beam can be irradiated from the light source unit (20) in a first direction, and at this time, the head unit (41) can be positioned spaced apart from the light source unit (20) in the first direction (x direction).

[0060] The head portion (41) can define an input opening (41OP) through which a laser beam is input. The input opening (41OP) can be defined on the front surface of the head portion (41). In one embodiment, the input opening (41OP) can be provided in a circular shape, but is not necessarily limited thereto, and of course, can be provided in a polygonal shape such as a square, for example.

[0061] A laser beam input through the input opening (41OP) may be reflected by a reflective mirror (not shown) arranged inside the head portion (41) and its path may be changed. The reflective mirror may reflect a laser beam input in a first direction and output it in a second direction (z direction) intersecting the first direction. At this time, the reflective mirror may be arranged at an angle with respect to the first direction.

[0062] In one embodiment, a grid plate (41PT) may be arranged on one surface of the head portion (41), for example, the front surface. The grid plate (41PT) may be arranged to cover the input opening (41OP) on the front surface of the head portion (41). The grid plate (41PT) may be transparent to a laser beam. In one embodiment, the grid plate (41PT) may have grid lines. The grid lines may have a predetermined interval, for example, an interval in millimeters, and may be used as a scale. Accordingly, the input position of the laser beam may be marked on the grid plate (41PT), and precise control of the input position of the laser beam may be facilitated.

[0063] In addition, in one embodiment, in order to mount the grid plate (41PT) on the front surface of the head portion (41), a guide rail (41GR) may be arranged on the front surface of the head portion (41). For example, the guide rails (41GR) may be arranged on both sides of the front surface of the head portion (41) and may extend vertically. The guide rails (41GR) may define a groove so that the grid plate (41PT) may be accommodated in the groove. The grid plate (41PT) may be inserted into the groove of the guide rail (41GR) and may slide up and down, thereby being easily removable. Since the grid plate (41PT) is easily removable, maintenance of the manufacturing device (2) of the display device may be easy.

[0064] In one embodiment, the grid plate (41PT) may include an alignment protrusion (41PP) protruding from the bottom. For example, the alignment protrusion (41PP) may be formed by protruding from the center of the lower edge of the grid plate (41PT). Although the drawing illustrates that one alignment protrusion (41PP) is arranged at the center of the lower edge of the grid plate (41PT), the present invention is not limited thereto. In another embodiment, the alignment protrusion (41PP) may be provided in multiple numbers, and it goes without saying that the multiple alignment protrusions (41PP) may be arranged to be spaced apart from each other at the lower edge of the grid plate (41PT). For convenience of explanation, the following description will focus on a case where one alignment protrusion (41PP) is provided.

[0065] The alignment protrusion (41PP) can be inserted into and fitted into the alignment groove (42GV) provided in the level adjustment unit (42) to be described later. Accordingly, the grid plate (41PT) can be arranged in alignment with the head unit (41) and the level adjustment unit (42). In addition, the grid plate (41PT) can be fixed by the combination of the alignment protrusion (41PP) and the alignment groove (42GV).

[0066] The level adjustment unit (42) can adjust the level of the head unit (41). At this time, the level can mean a position in the height direction, for example, in the second direction (z direction). The level adjustment unit (42) can be arranged at the bottom of the head unit (41). In one embodiment, the level adjustment unit (42) can include a first plate (42PL), a first bolt (42B1), a second bolt (42B2), and a horizontal measurement unit (42LV).

[0067] The first plate (42PL) can be arranged at the lower portion of the head portion (41) to support the head portion (41). The first plate (42PL) can be formed larger than the head portion (41) in a plan view. In one embodiment, the first plate (42PL) can be provided in a rectangular shape, but the present invention is not limited thereto. In another embodiment, the first plate (42PL) can of course be provided in a circular or other polygonal shape. Hereinafter, the case where the first plate (42PL) is provided in a rectangular shape will be mainly described.

[0068] Referring additionally to FIG. 3, the first bolt (42B1) and the second bolt (42B2) can adjust the level of the head portion (41) mounted on the first plate (42PL) by adjusting the level of the first plate (42PL). In one embodiment, the first bolt (42B1) may be a pull bolt, and the second bolt (42B2) may be a push bolt.

[0069] In one embodiment, the first bolt (42B1) may be provided in multiple numbers, and the first bolts (42B1) may be arranged around the periphery of the first plate (42PL). In a plan view, the first bolts (42B1) may be arranged adjacent to each vertex of the first plate (42PL). The second bolts (42B2) may also be provided in multiple numbers, and may be arranged around the periphery of the first plate (42PL). In a plan view, the second bolts (42B2) may be arranged adjacent to each vertex of the first plate (42PL). In this case, the first bolts (42B1) may be arranged inside the second bolts (42B2). The fact that the first bolt (42B1) is arranged inside the second bolt (42B2) may mean that the first bolt (42B1) is arranged closer to the center of the first plate (42PL). That is, the first bolt (42B1) and the second bolt (42B2) can be arranged sequentially in the direction from the center of the first plate (42PL) toward the vertex.

[0070] The first bolt (42B1) may be positioned to be inserted into the first plate (42PL) as a full bolt. In addition, the first bolt (42B1) may be threaded and fastened to the second plate (43PL) of the position adjustment unit (43) positioned at the lower portion of the first plate (42PL). That is, the second plate (43PL) may define a threaded hole (43TH) corresponding to the first bolt (42B1), and the first bolt (42B1) may be inserted into and fastened to the threaded hole (43TH). Accordingly, as the first bolt (42B1) is tightened, the level of the first plate (42PL) may be lowered.

[0071] The second bolt (42B2) may be positioned to be inserted into the first plate (42PL) as a push bolt. In addition, the second bolt (42B2) may not be fastened to the second plate (43PL) of the position adjustment unit (43) positioned at the lower portion of the first plate (42PL). That is, the second bolt (42B2) may be positioned in contact with the upper surface of the second plate (43PL). Accordingly, as the second bolt (42B2) is tightened, the second bolt (42B2) can raise the level of the first plate (42PL). The level adjustment unit (42) can raise and lower the level through the first bolt (42B1) and the second bolt (42B2) positioned along the periphery of the first plate (42PL) in this way. In addition, the level of the head portion (41) mounted on the first plate (42PL) is also adjusted, so that the input position of the laser beam can be controlled more precisely.

[0072] Additionally, in one embodiment, the second bolt (42B2) may include a rounded end screw. In other words, the end of the second bolt (42B2) that contacts the upper surface of the second plate (43PL) may have a rounded protruding shape. This can ensure that a constant point is always in contact with the second plate (43PL) even when the screw rotates as it is tightened. Accordingly, the level of the first plate (42PL) can be adjusted more finely.

[0073] The horizontal measurement unit (42LV) can allow the level adjustment unit (42) to be positioned horizontally. In one embodiment, the horizontal measurement unit (42LV) can include a level. The horizontal state of the first plate (42PL) can be measured and confirmed and the level can be adjusted through the horizontal measurement unit (42LV). At least one horizontal measurement unit (42LV) can be provided, and at least one horizontal measurement unit (42LV) can be positioned adjacent to at least one of each edge of the first plate (42PL). For example, four horizontal measurement units (42LV) can be provided, and each horizontal measurement unit (42LV) can be positioned adjacent to each of the four edges. That is, each horizontal measurement unit (42LV) can be positioned between two adjacent first bolts (42B1). In addition, each horizontal measurement unit (42LV) can be said to be positioned between two adjacent second bolts (42B2).

[0074] The position adjustment unit (43) can adjust the position of the head portion (41). Specifically, the position adjustment unit (43) can adjust the position of the head portion (41) in the longitudinal direction, for example, in the first direction (x direction). In one embodiment, the position adjustment unit (43) may include a second plate (43PL), a third bolt (43B3), and a position measurement unit (43LC).

[0075] The second plate (43PL) can be disposed below the level adjustment unit (42), for example, the first plate (42PL), to support the level adjustment unit (42). The second plate (43PL) can be formed larger than the first plate (42PL) in a plan view. In one embodiment, the second plate (43PL) can be provided in a rectangular shape, but the present invention is not limited thereto. In another embodiment, the second plate (43PL) can of course be provided in a circular or other polygonal shape. Hereinafter, the case where the second plate (43PL) is provided in a rectangular shape will be mainly described.

[0076] In one embodiment, the second plate (43PL) may include a protrusion (43PP) protruding from the lower portion of the second plate (43PL). The protrusion (43PP) may protrude from the lower surface of the second plate (43PL) toward the base (44) under the second plate (43PL). In addition, the protrusion (43PP) may extend lengthwise, for example, in the first direction (x direction), from the center of the width, for example, the length in the third direction (y direction), on the lower surface of the second plate (43PL). At this time, the protrusion (43PP) may be accommodated in a receiving groove (44RG) provided in the base (44). Accordingly, the second plate (43PL) may be slidably moved in the first direction, and the protrusion (43PP) may be slidably moved in the first direction along the receiving groove (44RG) in the first direction. As the protrusion (43PP) is received in the receiving groove (44RG) and slides in the first direction, the second plate (43PL) is fixed in the width direction and can be moved in the first direction.

[0077] The third bolt (43B3) can secure the second plate (43PL) after the position of the second plate (43PL) in the first direction is determined. In one embodiment, a plurality of third bolts (43B3) may be provided, and the third bolts (43B3) may be arranged on both sides of the second plate (43PL) in the width direction, for example, in the third direction. In one embodiment, two third bolts (43B3) may be arranged on one side in the width direction, and two may be arranged on the other side. However, it will be understood that the present invention is not limited thereto, and four or more or four or less may be arranged.

[0078] In one embodiment, the third bolt (43B3) may be positioned to be inserted into the second plate (43PL). At this time, the third bolt (43B3) may penetrate the second plate (43PL) and be fastened to the base (44) as the third bolt (43B3) is tightened, thereby fixing the second plate (43PL). Specifically, the second plate (43PL) may define an extension hole (43EH) through which the third bolt (43B3) is inserted. The extension hole (43EH) may be a hole that extends longitudinally, for example, in the first direction. Accordingly, even when the second plate (43PL) moves in the first direction on the base (44), the third bolt (43B3) and the extension hole (43EH) may not interfere with each other. That is, even when the second plate (43PL) moves in the first direction, the third bolt (43B3) can be positioned within the extension hole (43EH). In this case, after the second plate (43PL) moves and its position is determined, the third bolt (43B3) can be tightened to secure the second plate (43PL) to the base (44).

[0079] The position measuring unit (43LC) can precisely position the position adjusting unit (43). In one embodiment, the position measuring unit (43LC) can include a micrometer caliper. The amount of movement of the second plate (43PL) in the first direction can be precisely measured through the position measuring unit (43LC), and the position adjusting unit (43) can be positioned at a desired position. At least one position measuring unit (43LC) can be provided, and at least one position measuring unit (43LC) can be positioned on one side in the longitudinal direction of the second plate (43PL), for example, on the rear side. For example, two position measuring units (43LC) can be provided, and can be respectively positioned on one side and the other side in the width direction at the rear of the second plate (43PL).

[0080] The base (44) can be positioned below the position adjustment unit (43), for example, the second plate (43PL), to support the position adjustment unit (43). The base (44) can be formed larger than the second plate (43PL) in a plan view. In one embodiment, the base (44) can be provided in a rectangular shape, but the present invention is not limited thereto. In another embodiment, the base (44) can be provided in a circular or other polygonal shape. Hereinafter, the case where the base (44) is provided in a rectangular shape will be mainly described.

[0081] As described above, the base (44) can define a concave grooved receiving groove (44RG) on its upper surface. The receiving groove (44RG) can extend lengthwise, for example, in the first direction, from the center of the width, for example, the length in the third direction, on the upper surface of the base (44). The receiving groove (44RG) can receive a protrusion (43PP). Accordingly, the second plate (43PL) can slide in the first direction on the base (44).

[0082] Additionally, the base (44) can be fixed to the aforementioned support plate (10). The fourth bolt (44B4) is inserted into the base (44) and fastened to the support plate (10) to fix the base (44).

[0083] Figure 4 is a perspective view schematically showing a stage according to one embodiment of the present invention.

[0084] Referring to FIG. 4, as described above, a display substrate (not shown) may be mounted on the stage (50). In addition, an output laser beam from the optical path module (40) may be irradiated toward the stage (50). At this time, in one embodiment, a target plate (60) may be placed on one side of the stage (50). The target plate (60) may be placed on one edge of the stage (50) to cover a portion of the upper surface of the stage (50). In one embodiment, the target plate (60) may be formed as a plate that is bent to cover a portion of the upper surface of the stage (50) and an adjacent side surface.

[0085] In addition, in one embodiment, the target plate (60) may be detachably mounted on the stage (50). Specifically, the target plate (60) may include a protruding shaft (60SH) protruding downward. In this case, the stage (50) may define a mounting hole (50MH) into which the protruding shaft (60SH) is inserted and fitted. It goes without saying that the protruding shaft (60SH) and the corresponding mounting hole (50MH) may each be provided in multiple numbers.

[0086] The target plate (60) may be irradiated with an output laser beam from the optical path module (40). In one embodiment, a target mark (60TM) may be provided on the upper surface of the target plate (60). In one embodiment, the target mark (60TM) may be provided with grid lines. The grid lines may have a predetermined interval, for example, an interval in mm units, and may be used as a scale. Accordingly, the output position of the laser beam may be marked on the target mark (60TM), and precise control of the output position of the laser beam may be facilitated. In the drawing, two target marks (60TM) are provided on both sides, but the present invention is not limited thereto. For example, it will be understood that the target mark (60TM) may be provided in one, two, or more.

[0087] As described above, the target plate (60) can be temporarily attached to the stage (50) and used for marking and adjusting the output laser beam from the optical path module (40), and then detached. Next, after the display substrate (DS) is mounted on the stage (50), the display substrate (DS) can be repaired using a laser beam.

[0088] FIG. 5 is a plan view schematically showing a display device manufactured using a display device manufacturing device according to one embodiment of the present invention.

[0089] Referring to FIG. 5, a display device (1) manufactured according to one embodiment of the present invention may include a display area (DA) and a peripheral area (PA) located outside the display area (DA). The display device (1) may provide an image through an array of a plurality of pixels (PX) two-dimensionally arranged in the display area (DA).

[0090] The peripheral area (PA) is an area that does not provide an image and may completely or partially surround the display area (DA). Drivers, etc. that provide electrical signals or power to the pixel circuits corresponding to each pixel (PX), may be located in the PA. Pads, which are areas to which electronic components or printed circuit boards can be electrically connected, may also be located in the PA.

[0091] Hereinafter, the display device (1) is described as including an organic light emitting diode (OLED, see FIG. 6) as a light emitting element, but the display device (1) of the present invention is not limited thereto. As another embodiment, the display device (1) may be a light emitting display including an inorganic light emitting diode, i.e., an inorganic light emitting display (ILD). The inorganic light emitting diode may include a PN diode including inorganic semiconductor-based materials. When a voltage is applied in the forward direction to the PN junction diode, holes and electrons are injected, and energy generated by the recombination of the holes and electrons is converted into light energy to emit light of a predetermined color. The above-described inorganic light emitting diode may have a width of several to several hundred micrometers, and in some embodiments, the inorganic light emitting diode may be referred to as a micro LED. As another embodiment, the display device (1) may be a quantum dot light emitting display (QD).

[0092] Meanwhile, the display device (1) can be used as a display screen for various products such as portable electronic devices such as mobile phones, smart phones, tablet personal computers (PCs), mobile communication terminals, electronic notebooks, electronic books, portable multimedia players (PMPs), navigation devices, and Ultra Mobile PCs (UMPCs), as well as televisions, laptops, monitors, billboards, and Internet of Things (IOT) devices. In addition, the display device (1) according to one embodiment can be used for wearable devices such as smart watches, watch phones, glasses-type displays, and head mounted displays (HMDs). In addition, the display device (1) according to one embodiment can be used as a dashboard of a vehicle, a CID (Center Information Display) placed on a center fascia or dashboard of a vehicle, a room mirror display replacing a side mirror of a vehicle, and a display screen placed on the back of a front seat as entertainment for the rear seat of a vehicle.

[0093] FIG. 6 is a cross-sectional view schematically illustrating a display device manufactured by a display device manufacturing apparatus according to one embodiment of the present invention, and may correspond to a cross-section of the display device taken along line VI-VI' of FIG. 5.

[0094] Referring to FIG. 6, the display device (1) may include a laminated structure of a substrate (100), a pixel circuit layer (PCL), a display element layer (DEL), and an encapsulation layer (300). The above-described display substrate (DS, see FIG. 1) may be, for example, a substrate (100) in which at least one of a pixel circuit layer (PCL), a display element layer (DEL), and an encapsulation layer (300) is laminated during the manufacturing process of the display device (1).

[0095] The substrate (100) may have a multilayer structure including a base layer comprising a polymer resin and an inorganic layer. For example, the substrate (100) may include a base layer comprising a polymer resin and a barrier layer of an inorganic insulating layer. For example, the substrate (100) may include a first base layer (101), a first barrier layer (102), a second base layer (103), and a second barrier layer (104) that are sequentially laminated. The first base layer (101) and the second base layer (103) may include polyimide (PI), polyethersulfone (PES), polyarylate, polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polycarbonate (PC), cellulose triacetate (TAC), and / or cellulose acetate propionate (CAP). The first barrier layer (102) and the second barrier layer (104) may include an inorganic insulating material such as silicon oxide, silicon oxynitride, and / or silicon nitride. The substrate (100) may have flexible characteristics.

[0096] A pixel circuit layer (PCL) is arranged on a substrate (100). FIG. 6 illustrates that the pixel circuit layer (PCL) includes a thin film transistor (TFT), and a buffer layer (111), a first gate insulating layer (112), a second gate insulating layer (113), an interlayer insulating layer (114), a first planarization insulating layer (115), and a second planarization insulating layer (116) arranged under and / or over components of the thin film transistor (TFT).

[0097] The buffer layer (111) can reduce or block the penetration of foreign substances, moisture, or external air from the lower portion of the substrate (100), and can provide a flat surface on the substrate (100). The buffer layer (111) can include an inorganic insulating material such as silicon oxide, silicon oxynitride, or silicon nitride, and can be formed as a single layer or multilayer structure including the aforementioned materials.

[0098] A thin film transistor (TFT) on a buffer layer (111) includes a semiconductor layer (Act), and the semiconductor layer (Act) may include polysilicon. Alternatively, the semiconductor layer (Act) may include amorphous silicon, an oxide semiconductor, an organic semiconductor, or the like. The semiconductor layer (Act) may include a channel region (C) and a drain region (D) and a source region (S) respectively disposed on both sides of the channel region (C). The gate electrode (GE) may overlap the channel region (C).

[0099] The gate electrode (GE) may include a low-resistance metal material. The gate electrode (GE) may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed as a multilayer or single layer including the above materials.

[0100] The first gate insulating layer (112) between the semiconductor layer (Act) and the gate electrode (GE) is made of silicon oxide (SiO2), silicon nitride (SiN). X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X ) may include inorganic insulators such as zinc oxide (ZnO). X ) may be zinc oxide (ZnO), and / or zinc peroxide (ZnO2).

[0101] The second gate insulating layer (113) may be provided to cover the gate electrode (GE). The second gate insulating layer (113) may be formed of silicon oxide (SiO2), silicon nitride (SiN), similar to the first gate insulating layer (112). X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X ) may include inorganic insulators such as zinc oxide (ZnO). X ) may be zinc oxide (ZnO), and / or zinc peroxide (ZnO2).

[0102] An upper electrode (Cst2) of a storage capacitor (Cst) may be placed on the second gate insulating layer (113). The upper electrode (Cst2) may overlap with the gate electrode (GE) underneath. At this time, the gate electrode (GE) and the upper electrode (Cst2) overlapping with the second gate insulating layer (113) interposed therebetween may form a storage capacitor (Cst). That is, the gate electrode (GE) may function as the lower electrode (Cst1) of the storage capacitor (Cst).

[0103] In this way, the storage capacitor (Cst) and the thin film transistor (TFT) can be formed to overlap. In some embodiments, the storage capacitor (Cst) may be formed so as not to overlap the thin film transistor (TFT).

[0104] The upper electrode (Cst2) may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and / or copper (Cu), and may be a single layer or multiple layers of the aforementioned materials.

[0105] The interlayer insulating layer (114) can cover the upper electrode (Cst2). The interlayer insulating layer (114) can be made of silicon oxide (SiO2), silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X ) may include zinc oxide (ZnO). X ) may be zinc oxide (ZnO) and / or zinc peroxide (ZnO2). The interlayer insulating layer (114) may be a single layer or multiple layers including the aforementioned inorganic insulating material.

[0106] The drain electrode (DE) and the source electrode (SE) may be respectively positioned on the interlayer insulating layer (114). The drain electrode (DE) and the source electrode (SE) may be respectively connected to the drain region (D) and the source region (S) through contact holes defined in the insulating layers therebelow. The drain electrode (DE) and the source electrode (SE) may include a material having good conductivity. The drain electrode (DE) and the source electrode (SE) may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed as a multilayer or single layer including the above materials. In one embodiment, the drain electrode (DE) and the source electrode (SE) may have a multilayer structure of Ti / Al / Ti.

[0107] The first planarization insulating layer (115) can cover the drain electrode (DE) and the source electrode (SE). The first planarization insulating layer (115) can include an organic insulator such as a general-purpose polymer such as polymethylmethacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorinated polymer, a p-xylene polymer, a vinyl alcohol polymer, and a blend thereof.

[0108] The second planarization insulating layer (116) may be disposed on the first planarization insulating layer (115). The second planarization insulating layer (116) may include the same material as the first planarization insulating layer (115), and may include an organic insulator such as a general-purpose polymer such as polymethylmethacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorinated polymer, a p-xylene polymer, a vinyl alcohol polymer, and a blend thereof.

[0109] A display element layer (DEL) may be arranged on the pixel circuit layer (PCL) of the above-described structure. The display element layer (DEL) includes an organic light-emitting diode (OLED) as a display element (i.e., a light-emitting element), and the organic light-emitting diode (OLED) may include a laminated structure of a pixel electrode (210), an intermediate layer (220), and a common electrode (230). The organic light-emitting diode (OLED) may emit, for example, red, green, or blue light, or may emit red, green, blue, or white light. The organic light-emitting diode (OLED) emits light through a light-emitting area, and the light-emitting area may be defined as a pixel (PX).

[0110] The pixel electrode (210) of the organic light-emitting diode (OLED) can be electrically connected to a thin film transistor (TFT) through contact holes defined in the second planarization insulating layer (116) and the first planarization insulating layer (115) and a contact metal (CM) disposed on the first planarization insulating layer (115).

[0111] The pixel electrode (210) may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). In another embodiment, the pixel electrode (210) may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. In another embodiment, the pixel electrode (210) may further include a film formed of ITO, IZO, ZnO, or In2O3 on or under the aforementioned reflective film.

[0112] A pixel definition film (117) defining an opening (117OP) exposing the central portion of the pixel electrode (210) is disposed on the pixel electrode (210). The pixel definition film (117) may include an organic insulating material and / or an inorganic insulating material. The opening (117OP) may define an emission area of ​​light emitted from an organic light-emitting diode (OLED). For example, the size / width of the opening (117OP) may correspond to the size / width of the emission area. Accordingly, the size and / or width of the pixel (PX) may depend on the size and / or width of the opening (117OP) of the corresponding pixel definition film (117).

[0113] The intermediate layer (220) may include a light-emitting layer (222) formed to correspond to the pixel electrode (210). The light-emitting layer (222) may include a polymer or low-molecular organic material that emits light of a predetermined color. Alternatively, the light-emitting layer (222) may include an inorganic light-emitting material or a quantum dot.

[0114] In one embodiment, the intermediate layer (220) may include a first functional layer (221) and a second functional layer (223) which are respectively disposed below and above the light-emitting layer (222). The first functional layer (221) may include, for example, a hole transport layer (HTL) or a hole transport layer and a hole injection layer (HIL). The second functional layer (223) is a component disposed above the light-emitting layer (222) and may include an electron transport layer (ETL) and / or an electron injection layer (EIL). The first functional layer (221) and / or the second functional layer (223) may be a common layer formed to entirely cover the substrate (100), similar to the common electrode (230) described below.

[0115] The common electrode (230) is disposed on the pixel electrode (210) and may overlap with the pixel electrode (210). The common electrode (230) may be formed of a conductive material having a relatively low work function. For example, the common electrode (230) may include a (semi-)transparent layer including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof. Alternatively, the common electrode (230) may further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer including the aforementioned material. The common electrode (230) may be integrally formed to cover the entire substrate (100).

[0116] The encapsulation layer (300) is disposed on the display element layer (DEL) and can cover the display element layer (DEL). The encapsulation layer (300) includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and as an example, FIG. 6 illustrates that the encapsulation layer (300) includes a first inorganic encapsulation layer (310), an organic encapsulation layer (320), and a second inorganic encapsulation layer (330) that are sequentially stacked.

[0117] The first inorganic sealing layer (310) and the second inorganic sealing layer (330) may include one or more inorganic materials selected from the group consisting of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic sealing layer (320) may include a polymer-based material. Examples of polymer-based materials include acrylic resins, epoxy resins, polyimides, and polyethylene. In one embodiment, the organic sealing layer (320) may include acrylate. The organic sealing layer (320) may be formed by curing a monomer or applying a polymer. The organic sealing layer (320) may be transparent.

[0118] Although not shown, a touch sensor layer may be disposed on the encapsulation layer (300), and an optical function layer may be disposed on the touch sensor layer. The touch sensor layer may obtain coordinate information according to an external input, for example, a touch event. The optical function layer may reduce the reflectivity of light (external light) incident from the outside toward the display device, and / or improve the color purity of light emitted from the display device. In one embodiment, the optical function layer may include a phase retarder and / or a polarizer. The phase retarder may be a film type or a liquid crystal coating type, and may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may also be a film type or a liquid crystal coating type. The film type may include a stretchable synthetic resin film, and the liquid crystal coating type may include liquid crystals arranged in a predetermined array. The phase retarder and the polarizer may further include a protective film.

[0119] An adhesive material may be placed between the touch electrode layer and the optical function layer. The adhesive material may be any material known in the art without limitation. The adhesive material may be a pressure-sensitive adhesive (PSA).

[0120] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely examples. Those skilled in the art will readily appreciate that various modifications and equivalent alternative embodiments are possible based on the embodiments described herein. Therefore, the true scope of technical protection of the present invention should be determined based on the appended claims.

Claims

1. A stage on which a display board is placed; A light source unit that generates light and irradiates a laser beam in a first direction; and It includes an optical path module that reflects a laser beam input from the light source unit and outputs a laser beam in a second direction intersecting the first direction to irradiate the laser beam onto the stage; The above optical path module is, A head section defining an input aperture through which a laser beam is input; A level adjustment unit positioned at the lower portion of the head portion and capable of adjusting the level of the head portion in the height direction; A position adjustment unit that is positioned below the level adjustment unit and adjusts the position in the longitudinal direction of the head unit, and A manufacturing device for a display device, comprising a base disposed below the position adjustment unit.

2. In paragraph 1, A manufacturing apparatus for a display device, wherein the optical path module is arranged to cover the input opening of the head portion and further includes a grid plate having grid lines.

3. In paragraph 2, A manufacturing apparatus for a display device, wherein the optical path module further includes a guide rail disposed on one surface of the head portion and defining a groove so that the grid plate can slide and be detached from the head portion.

4. In paragraph 2, A manufacturing device for a display device, wherein the grid plate includes an alignment protrusion protruding from the lower portion of the grid plate, and the alignment protrusion is coupled to an early-in groove provided in the level adjustment unit.

5. In paragraph 1, The above level adjustment unit, It includes a first plate and a first bolt and a second bolt inserted into the first plate, A manufacturing device for a display device, wherein the first bolt is fastened to the threaded hole of the position adjustment unit, and the second bolt is not fastened to the position adjustment unit.

6. In paragraph 5, A manufacturing device for a display device, wherein the first bolt lowers the first plate as it is tightened, and the second bolt raises the first plate as it is tightened.

7. In paragraph 5, The second bolt is in contact with the upper surface of the position adjustment part. A manufacturing device for a display device, wherein the second bolt includes a rounded end screw.

8. In paragraph 5, A manufacturing device for a display device, wherein the first bolt is positioned further inside the first plate than the second bolt.

9. In paragraph 5, A manufacturing apparatus for a display device, wherein the level adjustment unit further includes a horizontal measurement unit disposed on the first plate and measuring the horizontality of the first plate.

10. In paragraph 9, A manufacturing device for a display device, wherein the horizontal measuring section is arranged on each edge along the perimeter of the first plate.

11. In paragraph 1, The above position adjustment part, A manufacturing device for a display device, comprising a second plate that is movable in the longitudinal direction, a third bolt formed to be inserted into the second plate, and the second plate defining an extension hole formed through which the third bolt is inserted.

12. In paragraph 11, A manufacturing device for a display device, wherein the extension hole is an opening extending in the longitudinal direction so that the third bolt is positioned within the extension hole when the second plate moves in the longitudinal direction.

13. In paragraph 11, The above position adjustment part, A manufacturing device for a display device, further comprising a position measuring unit disposed on one side of the second plate in the longitudinal direction to measure the degree of movement of the second plate in the longitudinal direction.

14. In paragraph 11, The above positioning part further includes a protrusion that protrudes from the lower portion of the second plate toward the base and extends in the longitudinal direction, The above base defines a receiving groove extending longitudinally to receive the above protrusion, A manufacturing device for a display device, wherein the above protrusion is slidable along the receiving groove.

15. In paragraph 1, Further including a target plate on one side of the above stage, A manufacturing device for a display device, wherein the target plate is detachable and has a target mark on the upper surface, so that the position where the laser beam output by the optical path module is irradiated is indicated.

16. In paragraph 15, A manufacturing apparatus for a display device, wherein the target plate further includes a protruding shaft protruding from the lower surface of the target plate, the stage further includes a mounting hole defined at a position corresponding to the protruding shaft, and the protruding shaft is fitted into the mounting hole.

17. In paragraph 1, A manufacturing apparatus for a display device, further comprising an optical unit disposed between the light source unit and the optical path module and including a plurality of lenses.

18. In paragraph 1, A manufacturing apparatus for a display device, further comprising a support plate that supports the light source unit and the optical path module and is positioned to face the stage and be spaced apart from it.

19. Step of placing a display board on the stage; A step of generating light from a light source and irradiating a laser beam in a first direction; and A step of reflecting a laser beam input from the light source unit by the optical path module and outputting a laser beam in a second direction intersecting the first direction to irradiate the laser beam onto the display substrate to repair the display substrate; including; The above optical path module is, A head section defining an input aperture through which a laser beam is input; A level adjustment unit positioned at the lower portion of the head portion and capable of adjusting the level of the head portion in the height direction; A position adjustment unit that is positioned below the level adjustment unit and adjusts the position in the longitudinal direction of the head unit, and A method for manufacturing a display device, comprising a base disposed below the position adjustment unit.

20. Step of placing a display board on the stage; A step of generating light from a light source and irradiating a laser beam in a first direction; and A step of reflecting a laser beam input from the light source unit by the optical path module and outputting a laser beam in a second direction intersecting the first direction to irradiate the laser beam onto the display substrate to repair the display substrate; including; The above optical path module is, A head section defining an input aperture through which a laser beam is input; A level adjustment unit positioned at the lower portion of the head portion and capable of adjusting the level of the head portion in the height direction; A position adjustment unit that is positioned below the level adjustment unit and adjusts the position in the longitudinal direction of the head unit, and A method for manufacturing an electronic device, comprising a base disposed below the position adjustment unit.

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