Micro-pressure vacuum transmitter

Abstract

A micro-pressure vacuum transmitter, comprising: a housing (1), a first end of the housing (1) being configured as an open end, and a second end of the housing (1) being configured as a closed end; a core seat (2) provided on the first end of the housing (1); a connecting nozzle (3) provided on the core seat (2) and outside the housing (1); a ceramic capacitor core (4) provided on the core seat (2) and inside the housing (1), the interior of the ceramic capacitor core (4) being provided with a vacuum cavity; and a detection and amplification module (5), wherein the interior of the ceramic capacitor core (4) is provided with a wave-shaped elastic member and a recovery elastic member. The wave-shaped elastic member reduces a deformation region and enhances a shape recovery capability, and the recovery elastic member reduces the degree of deformation of the wave-shaped elastic member and further enhances the shape recovery capability of the wave-shaped elastic member.

Description

Micro-pressure vacuum transmitter TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of sensors, and in particular to a micro-pressure vacuum transmitter. BACKGROUND

[0002] The micro-pressure vacuum transmitter relates to a sensor device that measures vacuum degree by using capacitance change. The working principle is that in a vacuum environment, the dielectric constant of the dielectric (i.e. gas) changes with the change of the vacuum degree. This change in dielectric constant affects the capacitance value of the capacitor.

[0003] Therefore, by measuring the change in capacitance, the vacuum degree can be indirectly determined. Specifically, when the vacuum degree increases, the number of gas molecules decreases, the dielectric constant of the dielectric decreases, resulting in a decrease in the capacitance value; conversely, when the vacuum degree decreases, the capacitance value increases.

[0004] The existing technical problem is that the film inside the micro-pressure vacuum transmitter is mainly fixed at the edge, and the recovery needs to rely on the elasticity of the film itself. When the range is out of limit and frequently operated, the film inside the micro-pressure vacuum transmitter will appear fatigue and slight deformation, resulting in inaccurate detection results.

[0005] Content of the utility model

[0006] In order to solve one or more of the above technical problems, the present disclosure provides a micro-pressure vacuum transmitter, which reduces the deformation area by using a wave-shaped elastic member, improves the recovery shape ability, reduces the deformation degree of the wave-shaped elastic member by using a recovery elastic member, and further improves the recovery shape ability of the wave-shaped elastic member.

[0007] The above object of the present disclosure is achieved by the following technical solutions:

[0008] The present disclosure provides a micro-pressure vacuum transmitter, comprising:

[0009] A shell, a first end of the shell is set as an open end, and a second end of the shell is set as a closed end;

[0010] A core seat is arranged on the first end of the shell;

[0011] A connector nozzle is arranged on the core seat and outside the shell;

[0012] A ceramic capacitor core is arranged on the core seat and inside the shell, and a vacuum cavity is arranged inside the ceramic capacitor core;

[0013] A detection and amplification module is arranged in the shell, and a detection end of the detection and amplification module extends into the vacuum cavity;

[0014] The communicator is arranged on the shell and is arranged to be electrically connected with the detection and amplification module.

[0015] The ceramic capacitor core body has a wave-shaped elastic member and a restoring elastic member inside.

[0016] In a possible implementation of the present disclosure, the ceramic capacitor core body comprises:

[0017] The core body sleeve is arranged in the shell.

[0018] The upper cover is arranged on the core body sleeve, and a transmission space is arranged between the upper cover and the core body sleeve.

[0019] The wave-shaped spring washer is arranged in the transmission space.

[0020] The spring is located in the transmission space, and two ends of the spring abut against the upper cover and the core body sleeve respectively.

[0021] The detection end of the detection and amplification module extends into the spring surrounding area.

[0022] A gap is arranged between the core body sleeve and the core body seat.

[0023] In a possible implementation of the present disclosure, further comprising:

[0024] The pressing column is arranged on the upper cover and is arranged to communicate with the transmission space.

[0025] The getter is arranged in the pressing column.

[0026] The heating column wraps the pressing column.

[0027] In a possible implementation of the present disclosure, the getter is located in the heating column.

[0028] In a possible implementation of the present disclosure, a filter screen is arranged in the pressing column, and the filter screen is located between the transmission space and the getter.

[0029] In a possible implementation of the present disclosure, the core body sleeve abuts against the core body seat.

[0030] In a possible implementation of the present disclosure, a part of the core body sleeve extends into the core body seat.

[0031] In a possible implementation of the present disclosure, further comprising a copper pipe arranged on the upper cover, a first end of the copper pipe is arranged to communicate with the transmission space, and a second end of the copper pipe is closed after the transmission space is vacuumized.

[0032] In a possible implementation of the present disclosure, at least one sealing member is arranged between the core body sleeve and the shell.

[0033] In a possible implementation of the present disclosure, the gap between the copper pipe and the upper cover is filled with solder, and the copper pipe and the upper cover are welded.

[0034] The present disclosure has the advantages of:

[0035] In the micro-pressure vacuum transmitter in some embodiments of the present disclosure, the deformation area is reduced by the wavy elastic member, the recovery shape ability is improved, the deformation degree of the wavy elastic member is reduced by the recovery elastic member, and the recovery shape ability of the wavy elastic member is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0036] The above and other features, advantages and aspects of embodiments of the present disclosure will become more apparent upon reading the following detailed description in conjunction with the accompanying drawings, in which:

[0037] Fig. 1 is a schematic diagram of the external structure of a micro-pressure vacuum transmitter according to an embodiment of the present disclosure.

[0038] Fig. 2 is a schematic diagram of the internal structure of a micro-pressure vacuum transmitter according to an embodiment of the present disclosure.

[0039] Fig. 3 is a schematic diagram of a communicator interface according to an embodiment of the present disclosure.

[0040] Fig. 4 is a schematic diagram of the structure of a ceramic capacitor core according to an embodiment of the present disclosure.

[0041] Fig. 5 is a schematic diagram of a getter placed in a heating column according to an embodiment of the present disclosure.

[0042] In the various drawings, the same or corresponding reference numerals represent the same or corresponding parts; wherein the reference numerals are: 1, housing, 2, core seat, 3, connector nozzle, 4, ceramic capacitor core, 5, detection and amplification module, 6, communicator, 41, core sleeve, 42, upper cover, 43, wavy spring washer, 44, transmission space, 46, spring, 47, pressure column, 48, getter, 49, heating column, 410, copper pipe, 412, filter screen. DETAILED DESCRIPTION

[0043] Embodiments of the present disclosure will be described in more detail by referring to the drawings. Although certain embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms, and should not be interpreted as being limited to the embodiments set forth herein. Rather, these embodiments are provided so as to more thoroughly and completely understand the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are merely for exemplary purposes, and are not intended to limit the scope of protection of the present disclosure.

[0044] In the description of embodiments of the disclosure, the term "includes" and its conjugates are to be construed as open-ended, i.e., "includes but is not limited to". The term "based on" is to be construed as "based at least in part on". The term "one embodiment" or "the embodiment" is to be construed as "at least one embodiment". The terms "first", "second", etc. can refer to different or same objects. Other explicit or implicit definitions can also be included below.

[0045] In view of the fact that the film inside the micro-pressure vacuum transmitter is mainly fixed by the edge, and the recovery needs to rely on the elasticity of the film itself, when the range is out of limit and frequently operated, the film inside the micro-pressure vacuum transmitter will appear fatigue and slight deformation, resulting in inaccurate detection result. In order to solve one or more of the above technical problems, the present disclosure proposes a micro-pressure vacuum transmitter. In some embodiments, the micro-pressure vacuum transmitter of the present disclosure includes a shell 1, a core seat 2, a connecting nozzle 3, a ceramic capacitor core 4, a detection and amplification module 5 and a communicator 6. The connecting nozzle 3 is responsible for connecting with the detection area, the ceramic capacitor core 4 is responsible for converting the external pressure change into an electrical signal (capacitance value) that can be measured, the detection and amplification module 5 is responsible for detecting and amplifying the electrical signal, and the communicator 6 is responsible for transmitting the amplified electrical signal to a designated terminal, such as a programmable logic controller, an industrial computer or a communicator.

[0046] Please refer to FIG. 1 and FIG. 2, the first end of the shell 1 is set as an open end, and the second end is set as a closed end; the core seat 2 is fixed on the first end of the shell 1, the ceramic capacitor core 4 is installed on the core seat 2 and is set inside the shell 1, and a vacuum cavity is set inside the ceramic capacitor core 4.

[0047] The connecting nozzle 3 is fixed on the core seat 2 and is set outside the shell 1.

[0048] The detection and amplification module 5 is fixed inside the shell 1, the detection end of the detection and amplification module 5 extends into the vacuum cavity, is responsible for detecting the capacitance value of the vacuum cavity in combination with the detection circuit, and the communicator 6 is set on the shell 1 and is set to be electrically connected with the detection and amplification module 5.

[0049] In some possible implementations, the communicator 6 uses an RS232 serial port, as shown in FIG. 3.

[0050] In some embodiments, please refer to FIG. 4, the ceramic capacitor core 4 includes a core sleeve 41, an upper cover 42, a wave spring washer 43, a transmission space 44 and a spring 46, the core sleeve 41 is fixed inside the shell 1, and the upper cover 42 is fixed on the core sleeve 41.

[0051] The space is arranged between the upper cover 42 and the core sleeve 41, the wave spring washer 43 is located in the transmission space 44, and the transmission space 44 is the vacuum cavity described above.

[0052] The spring 46 is located in the transmission space 44, and two ends of the spring 46 abut against the upper cover 42 and the wave spring washer 43 respectively, and the spring 46 has two functions, one is to reduce the deformation amount of the wave spring washer 43, and the other is to assist the wave spring washer 43 to restore the original state.

[0053] In some possible implementation manners, the core sleeve 41 abuts against the core seat 2.

[0054] In some possible implementation manners, a part of the core sleeve 41 extends into the core seat 2.

[0055] In some possible implementation manners, at least one sealing member is arranged between the core sleeve 41 and the shell 1.

[0056] In some possible implementation manners, the gap between the copper pipe 410 and the upper cover 42 is filled with solder, and the copper pipe 410 and the upper cover 42 are welded.

[0057] In some possible implementation manners, the spring 46 uses a pagoda-shaped spring.

[0058] The detection end of the detection and amplification module 5 extends into the area surrounded by the spring 46, and it can be seen from the figure that the spring 46 is located at the highest point of one wave of the wave spring washer 43, so that the wave spring washer 43 can be restored to or as close as possible to the original shape in each restoration.

[0059] Meanwhile, the detection end of the detection and amplification module 5 can also be well protected from damage after contacting the wave spring washer 43.

[0060] The gap is arranged between the core sleeve 41 and the core seat 2, from which it can be seen that a hole is formed in the core sleeve 41, the hole is in communication with the pipe mouth 3 through the gap, and there is a distance between the axis of the pipe mouth 3 and the axis of the hole formed in the core sleeve 41. The distance can make the pressure change in the pipe mouth 3 not directly act on the wave spring washer 43, which is equivalent to providing a buffer for the wave spring washer 43.

[0061] The vacuumization of the transmission space 44 can be achieved by using the copper pipe 410, the copper pipe 410 is fixed on the upper cover 42, a first end of the copper pipe 410 is arranged in communication with the transmission space 44, and a second end of the copper pipe 410 is closed after the transmission space 44 is vacuumized.

[0062] In addition, the vacuum degree can be further improved by means of the pressing column 47, the getter 48 and the heating column 49. Specifically, the pressing column 47 is fixed on the upper cover 42 and is arranged in communication with the transmission space 44, the getter 48 is placed in the pressing column 47, and the heating column 49 wraps the pressing column 47.

[0063] When the transmission space 44 is vacuumized, the heating column 49 can be simultaneously powered and heated, generally at a constant temperature of 800°C for 5 minutes, so that the getter 48 is activated to absorb gas, and the transmission space 44 reaches vacuum.

[0064] The heat source of the heating column 49 is electricity. In some possible implementations, the heating column 49 is connected to the communicator 6 through an electric wire, and a circuit in the communicator 6 is used to supply power to the heating column 49.

[0065] The getter 48 can be placed in the filter screen 412, as shown in FIG. 5, to avoid entering the transmission space 44. Of course, one or more additional filter screens can be added in the pressing column 47 to intercept the getter 48 and avoid entering the transmission space 44.

[0066] It should be noted that, in some embodiments, the gap between the core seat 2 and the connecting pipe mouth 3 can be circumferentially welded.

[0067] Further, in some embodiments, the gap between the upper cover 42 and the heating column 49 can be circumferentially welded.

[0068] Further, in some embodiments, the filter screen 412 is clamped between the upper and lower pressing columns 47.

[0069] Further, in some embodiments, the gap between the pressing column 47 and the heating column 49 can be circumferentially spot-welded.

[0070] It should be understood that, in the industrial field, the micro-pressure vacuum transmitter is an advanced high-performance, non-heating capacitive sensor device specially designed for low-vacuum and pressure measurement applications. Advanced manufacturing technology and process ensure the repeatability in application scenarios, and advanced digital architecture is adopted to ensure high precision and high stability. High overpressure limit voltage resistance ensures pressure impact in the event of sudden system failure, and the application industries include vacuum furnaces, freeze-drying, natural gas, plasma etching process equipment, vacuum distillation, etc.

[0071] In the embodiments of the present disclosure, the micro-pressure vacuum transmitter measurement principle is to work by using the principle of capacitance value change. It is a device specially used for detecting small pressure changes in a vacuum environment. It is based on pressure sensing technology, which uses a sensing element to sense the change in vacuum pressure and converts it into a measurable and transmittable electrical signal. It consists of two parts: a sensor and a conversion circuit. The sensor consists of two cavities: a vacuum cavity and a detection cavity. The vacuum cavity is a fully sealed vacuum structure, and the fixed plate ceramic capacitor core is located in the vacuum cavity. The two electrodes are connected to the outside of the vacuum cavity and connected to the circuit. The diaphragm is located between the vacuum cavity and the detection cavity. The diaphragm is a movable plate that forms a flat capacitor with the fixed plate ceramic capacitor core. When the diaphragm is deflected by low vacuum pressure, the distance between the fixed plate ceramic capacitor core and the diaphragm changes, and the capacitance value also changes. Different low vacuum pressures correspond to different capacitance values. The capacitance value signal change is transmitted to the conversion circuit, which converts the capacitance signal through conversion, arrangement, amplification, etc. to output a standard electrical signal. The electrical signal is proportional to the low vacuum pressure.

[0072] It should be understood that the communicator in the embodiments of the present disclosure is not intended to propose a new communicator. The communicator in the embodiments of the present disclosure generally refers to a device or component used for signal transmission, processing or control in a communication system. It can be a separate hardware device, a software program or a combination of the two.

[0073] It should be understood that the working principle of the micro-pressure vacuum transmitter in the present disclosure mainly depends on its internal sensitive elements (such as pressure chips or diaphragms) and conversion elements. When vacuum or small pressure acts on the sensitive element, it will produce a displacement or resistance change proportional to the pressure. This change is then captured by the conversion element and converted into a standard signal (such as 4-20 mA or 1-5 VDC) output through electronic circuit for subsequent measurement, display or control.

[0074] The above has described the embodiments of the present disclosure. The above description is exemplary and is not exhaustive and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments. The choice of terms used herein is intended to best explain the principles, practical applications or improvements in technology in the market of the embodiments, or to enable other ordinary skilled persons in the art to understand the embodiments disclosed herein.

[0075] The above is only an optional embodiment of the present disclosure and is not intended to limit the present disclosure. For those skilled in the art, the present disclosure can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A micro-pressure vacuum transmitter characterized by, The application relates to a ceramic capacitor detection device, which comprises the following parts: an outer shell (1), the first end of the outer shell (1) being arranged as an open end, and the second end of the outer shell (1) being arranged as a closed end; a core seat (2) arranged on the first end of the outer shell (1); a connector nozzle (3) arranged on the core seat (2) and arranged outside the outer shell (1); a ceramic capacitor core (4) arranged on the core seat (2) and arranged inside the outer shell (1), a vacuum cavity being arranged inside the ceramic capacitor core (4); a detection and amplification module (5) arranged in the outer shell (1), the detection end of the detection and amplification module (5) extending into the vacuum cavity; a communicator (6) arranged on the outer shell (1) and arranged in electrical connection with the detection and amplification module (5); wherein the ceramic capacitor core (4) is internally provided with a wave-shaped elastic member and a restoring elastic member.

2. The micro-pressure vacuum transmitter of claim 1, wherein, The ceramic capacitor core (4) comprises: a core sleeve (41) arranged in the outer shell (1); an upper cover (42) arranged on the core sleeve (41), a transmission space (44) being arranged between the upper cover (42) and the core sleeve (41); a wave-shaped spring washer (43) arranged in the transmission space (44); a spring (46) located in the transmission space (44), the two ends of the spring (46) abutting against the upper cover (42) and the core sleeve (41) respectively; wherein the detection end of the detection and amplification module (5) extends into the area surrounded by the spring (46); a gap being arranged between the core sleeve (41) and the core seat (2).

3. The micro-pressure vacuum transmitter of claim 2, wherein, Further comprising: a pressing column (47) arranged on the upper cover (42) and arranged in communication with the transmission space (44); an air absorbent (48) arranged in the pressing column (47); a heating column (49) wrapping the pressing column (47).

4. The micro-pressure vacuum transmitter of claim 3, wherein, The air absorbent (48) is located in the heating column (49).

5. The micro-pressure vacuum transmitter of claim 3, wherein, A filter screen (412) is arranged in the pressing column (47), and the filter screen (412) is located between the transmission space (44) and the air absorbent (48).

6. The micro-pressure vacuum transmitter of claim 2, wherein, The core sleeve (41) abuts against the core seat (2).

7. The micro-pressure vacuum transmitter of claim 6, wherein, Part of the core sleeve (41) extends into the core seat (2).

8. The micro-pressure vacuum transmitter of claim 2, wherein, Further comprising a copper pipe (410) arranged on the upper cover (42), the first end of the copper pipe (410) being arranged in communication with the transmission space (44), and the second end of the copper pipe (410) being closed after the transmission space (44) is vacuumized.

9. The micro-pressure vacuum transmitter of claim 2, wherein, At least one sealing member is arranged between the core sleeve (41) and the outer shell (1).

10. The micro-pressure vacuum transmitter of claim 8, wherein, The gap between the copper pipe (410) and the upper cover (42) is filled with solder, and the copper pipe (410) and the upper cover (42) are welded.

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