Boat support device and semiconductor process equipment

Abstract

The present application relates to the technical field of semiconductor preparation. Disclosed are a boat support device and semiconductor process equipment. The boat support device disclosed herein comprises a driving mechanism, a first load-bearing arm and a second load-bearing arm, wherein the driving mechanism is connected to both the first load-bearing arm and the second load-bearing arm so as to drive the first load-bearing arm and the second load-bearing arm to move toward or away from each other in a translational manner; and when the first load-bearing arm and the second load-bearing arm move toward each other, the first load-bearing arm and the second load-bearing arm are respectively used to support boat lugs on two opposite sides of a carrier boat. The first load-bearing arm and the second load-bearing arm move relative to each other in a translational manner; therefore, the gravity of the carrier boat does not easily generate a component force in the movement direction of the first load-bearing arm and the second load-bearing arm. Thus, the first load-bearing arm and the second load-bearing arm are not easily forced to spread open, such that the carrier boat can be in a relatively stable mating state with the first load-bearing arm and the second load-bearing arm, thereby improving the reliability of the process of supporting the carrier boat.

Description

Boat supporting device and semiconductor process equipment TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor preparation, and in particular to a boat supporting device and a semiconductor process equipment. BACKGROUND

[0002] At present, silicon wafers are widely used in the fields of optoelectronic device preparation and semiconductor manufacturing. For some high-temperature processing procedures of silicon wafers, a quartz boat is used as a carrier, the silicon wafers are loaded into the quartz boat, and the quartz boat is transferred to a preset station by a carrying device.

[0003] In the related art, the carrying device includes two mechanical arms, which can approach or move away from each other by rotating around an axis to clamp or release the quartz boat. However, for the scheme of clamping the quartz boat by rotating the mechanical arms, the reliability of clamping the quartz boat depends on the clamping force applied by the mechanical arms. In the case that the clamping force is insufficient due to wear and aging of parts of the mechanical arms, the two mechanical arms are prone to be forced to open, and the reliability is poor, which may cause the quartz boat to fall off and cause unnecessary loss. SUMMARY

[0004] The present application discloses a boat supporting device and a semiconductor process equipment to solve the problem of poor reliability of the scheme of clamping the quartz boat by rotating the mechanical arms in the related art.

[0005] To solve the above technical problems, the present application is implemented as follows:

[0006] In a first aspect, the embodiments of the present application disclose a boat supporting device for supporting a carrying boat, which comprises a driving mechanism, a first carrying arm and a second carrying arm. The driving mechanism is connected with the first carrying arm and the second carrying arm respectively to drive the first carrying arm and the second carrying arm to approach or move away from each other by translation.

[0007] When the first carrying arm and the second carrying arm approach each other, the first carrying arm and the second carrying arm are respectively used to support boat ears on opposite sides of the carrying boat.

[0008] In a second aspect, the embodiments of the present application disclose a semiconductor process equipment, which comprises a carrying boat and the above-mentioned boat supporting device. The carrying boat is provided with boat ears on opposite sides, and the boat supporting device is used to support the boat ears.

[0009] The technical scheme adopted by the present application can achieve the following technical effects:

[0010] The boat supporting device disclosed by the embodiment of the application improves the related art, and comprises a driving mechanism, a first bearing arm and a second bearing arm. The driving mechanism is connected with the first bearing arm and the second bearing arm respectively, so as to drive the first bearing arm and the second bearing arm to move towards or away from each other in a translational manner. In the case that the first bearing arm and the second bearing arm move towards each other, the first bearing arm and the second bearing arm are respectively used for supporting the boat ears on the opposite sides of the bearing boat. By using the above boat supporting device, the bearing boat can be stably placed on the first bearing arm and the second bearing arm only by relying on its own gravity. Since the first bearing arm and the second bearing arm move relatively in a translational manner, the gravity of the bearing boat is not easy to generate a component force in the moving direction of the first bearing arm and the second bearing arm, so that the first bearing arm and the second bearing arm are not easy to be forced to open, thereby enabling the bearing boat and the first bearing arm and the second bearing arm to be in a relatively stable cooperation state, reducing the risk of the bearing boat falling off the bearing arm, and further improving the reliability of the bearing boat supporting process. BRIEF DESCRIPTION OF DRAWINGS

[0011] FIG. 1 is an assembly schematic view of the boat supporting device and the bearing boat disclosed by the embodiment of the application;

[0012] FIG. 2 is a front structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0013] FIG. 3 is a front structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0014] FIG. 4 is a front structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0015] FIG. 5 is a back structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0016] FIG. 6 is a back structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0017] FIG. 7 is a back structure schematic view of the driving mechanism disclosed by the embodiment of the application;

[0018] FIG. 8 is a schematic view of the first rack and the second rack moving away from each other disclosed by the embodiment of the application;

[0019] FIG. 9 is a schematic view of the first rack and the second rack moving towards each other disclosed by the embodiment of the application;

[0020] FIG. 10 is a structure schematic view of the first bearing arm disclosed by the embodiment of the application;

[0021] FIG. 11 is a cooperation schematic view of the positioning part and the boat ear disclosed by the embodiment of the application;

[0022] FIG. 12 is a structure schematic view of the positioning part disclosed by the embodiment of the application;

[0023] Fig. 13 is a second structural schematic diagram of the positioning portion disclosed by the embodiments of the present application;

[0024] Fig. 14 is a third structural schematic diagram of the positioning portion disclosed by the embodiments of the present application;

[0025] Fig. 15 is a schematic diagram of linear arrangement of multiple carrier boats disclosed by the embodiments of the present application;

[0026] Fig. 16 is a first structural schematic diagram of the carrier boat disclosed by the embodiments of the present application;

[0027] Fig. 17 is a second structural schematic diagram of the carrier boat disclosed by the embodiments of the present application;

[0028] Fig. 18 is a structural schematic diagram of the semiconductor process equipment disclosed by the embodiments of the present application;

[0029] Fig. 19 is an assembly schematic diagram of the carrier boat and the reaction chamber disclosed by the embodiments of the present application.

[0030] Legend: 100-boat supporting device, 110-driving mechanism, 111-base, 1111-first mounting plate, 1112-second mounting plate, 1113-third mounting plate, 1114-bar-shaped hole, 112-driving body, 1121-gear, 113-transmission part, 1131-first rack, 1132-second rack, 1133-first sliding block, 1134-second sliding block, 1135-first connecting piece, 1136-second connecting piece, 1137-first sliding rail, 1138-second sliding rail, 1139-third sliding rail, 120-first carrying arm, 121-carrying arm body, 122-connecting part, 123-positioning part, 1231-bottom plate, 1232-first guide plate, 1233-second guide plate, 1234-guide surface, 130-second carrying arm, 140-first direction, 200-carrier boat, 210-boat ear, 220-detection matching part, 230-separator, 240-first positioning groove, 250-boat paddle matching part, 251-second positioning groove, 300-conveying device, 400-lifting mechanism, 500-pushing and pulling boat, 501-boat paddle, 600-reaction chamber. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described below in conjunction with the embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0032] The terms "first", "second", and the like in the description and claims of the application are used for distinguishing between similar objects and are not necessarily used to describe a particular sequential or chronological order. It is to be understood that the use of the terms so

[0033] The technical solutions disclosed in the embodiments of the application will be described below in detail with reference to the drawings.

[0034] In the processing of silicon wafers, some high-temperature processing procedures will be experienced. In these procedures, a carrier boat is usually used as a carrier to load the silicon wafers into the carrier boat, and the carrier boat is transported to a predetermined station by a carrying device. In the related art, the carrying device usually includes two mechanical arms. The two mechanical arms can exert a rotary driving force by built-in driving devices such as motors and rotary cylinders, so that the two mechanical arms can approach or move away from each other by rotating around the shaft, so as to clamp or release the carrier boat.

[0035] For the scheme of clamping the carrier boat by rotating the mechanical arms, the driving device needs to continuously exert a rotary driving force to enable the mechanical arms to stably clamp the carrier boat in the case of clamping the carrier boat by the mechanical arms. This makes the mechanical arms often work in a load condition, which causes the internal parts of the mechanical arms to be prone to wear and aging. The reliability of clamping the carrier boat depends on whether the mechanical arms can stably exert the clamping force. In the case that the clamping force is insufficient due to wear and aging of the parts of the mechanical arms, the gravity of the carrier boat will generate a component force in the clamping direction of the two mechanical arms under the action of the component force. The two mechanical arms are prone to be forced to open, and the reliability is poor, which can easily cause the quartz boat to fall off and cause unnecessary loss.

[0036] Based on the above problems, please refer to FIGS. 1 to 19, the boat supporting device 100 disclosed in the embodiments of the application is used to support the carrier boat 200, which can include a quartz boat, a graphite boat, etc. Taking the diffusion process of silicon-based solar cell wafers as an example, a quartz boat is used as a carrier to load the silicon wafers into the quartz boat, and the quartz boat is supported by the boat supporting device. Then, the quartz boat loaded with the silicon wafers is transported into or out of the diffusion furnace by matching with lifting equipment, horizontal moving equipment, etc.

[0037] As shown in FIG. 1, the boat supporting device 100 can include a driving mechanism 110, a first bearing arm 120 and a second bearing arm 130, the driving mechanism 110 is connected with the first bearing arm 120 and the second bearing arm 130 respectively to drive the first bearing arm 120 and the second bearing arm 130 to move closer to or away from each other by translation. It should be noted that translation refers to the movement of the first bearing arm 120 and the second bearing arm 130 in the same plane in a certain linear direction, and the plane can be a horizontal plane, a vertical plane, or other planes at an angle to the horizontal plane or the vertical plane.

[0038] The driving mechanism 110 can include a power source and a transmission device, the power source can include a motor, a rotary cylinder and the like, the transmission device can include at least one or a combination of a plurality of components such as transmission teeth, connecting rods, lead screws and conveyor belts, the power source is connected with the first bearing arm 120 and the second bearing arm 130 through the transmission device, and the driving force generated by the power source can be transmitted to the first bearing arm 120 and the second bearing arm 130 through the transmission device to drive the first bearing arm 120 and the second bearing arm 130 to move relative to each other.

[0039] As shown in FIG. 1 and FIG. 10, the first bearing arm 120 and the second bearing arm 130 adopt a ring design and can be wrapped around the side of the bearing boat 200 to support the bearing boat 200, the structure of the first bearing arm 120 and the second bearing arm 130 can be the same and can be made of stainless steel, aluminum alloy or the like, and the opposite sides of the bearing boat 200 are respectively provided with boat ears 210, the boat ears 210 protrude from the side of the bearing boat 200, and the first bearing arm 120 and the second bearing arm 130 can support the bearing boat 200 by supporting the boat ears 210.

[0040] During the supporting process of the bearing boat 200, taking the translation along the horizontal plane as an example, the first bearing arm 120 and the second bearing arm 130 can be controlled to move away from each other along the horizontal direction, the space surrounded by the first bearing arm 120 and the second bearing arm 130 is larger, which facilitates the placement of the first bearing arm 120 and the second bearing arm 130 on the side of the bearing boat 200; after the first bearing arm 120 and the second bearing arm 130 are placed on the side of the bearing boat 200, the first bearing arm 120 and the second bearing arm 130 can be controlled to move closer to each other along the horizontal direction and gradually approach the lower side of the boat ears 210 of the bearing boat 200, and after the upper surfaces of the first bearing arm 120 and the second bearing arm 130 are located directly below the boat ears 210, the bearing boat 200 can be supported.

[0041] The first bearing arm 120 and the second bearing arm 130 move closer to or away from each other by translation along the horizontal plane, which has the following advantages:

[0042] Firstly, the driving mechanism 110 only needs to exert a driving force in the process of translation of the first bearing arm 120 and the second bearing arm 130, and the driving force can be removed after the first bearing arm 120 and the second bearing arm 130 are in place. The carrier boat 200 can be stably placed on the first bearing arm 120 and the second bearing arm 130 by relying on its own gravity. For the driving mechanism 110, the load is small, and wear is not easy to occur, thereby improving the durability of the driving mechanism 110.

[0043] Secondly, the first bearing arm 120 and the second bearing arm 130 support the carrier boat 200 in the vertical direction, and the gravity of the carrier boat 200 is not easy to generate a component force in the translation direction of the first bearing arm 120 and the second bearing arm 130. Therefore, the first bearing arm 120 and the second bearing arm 130 will not be opened due to the action of the component force, thereby improving the stability of the supporting process.

[0044] Thirdly, by using the translation mode, the first bearing arm 120 and the second bearing arm 130 can approach or move away from each other on both sides of the carrier boat 200 from the lower area of the boat ear 210. Compared with the scheme of rotating and clamping the carrier boat 200 by the mechanical arm, it is not necessary to excessively approach the top of the carrier boat 200, thereby avoiding interference with the related structure on the top of the carrier boat 200, and reducing the probability of knocking and damaging the carrier boat 200.

[0045] Fourthly, since the movement mode of the relative movement of the first bearing arm 120 and the second bearing arm 130 is relatively simple, it is convenient to adjust the levelness of the first bearing arm 120 and the second bearing arm 130. The adjustment process of the levelness of the first bearing arm 120 and the second bearing arm 130 is also relatively easy, thereby avoiding the problem that the carrier boat 200 is inclined due to poor levelness of the first bearing arm 120 and the second bearing arm 130.

[0046] Fifthly, since the first bearing arm 120 and the second bearing arm 130 only involve horizontal movement in the process of translation, and the resistance and resistance arm do not change in the movement process, compared with the scheme of rotating and clamping the carrier boat 200 by the mechanical arm, it is not easy to cause partial wear of parts, thereby improving the durability and stability of the device.

[0047] It can be known from the above that the boat supporting device 100 disclosed in the embodiments of the present application improves the related art, and the carrier boat 200 can be stably placed on the first carrier arm 120 and the second carrier arm 130 only by relying on its own gravity; since the first carrier arm 120 and the second carrier arm 130 move relatively in a translation manner, the gravity of the carrier boat 200 is not easy to generate a component force in the moving direction of the first carrier arm 120 and the second carrier arm 130, so that the first carrier arm 120 and the second carrier arm 130 are not easy to be forced to open, thereby enabling the carrier boat 200 and the first carrier arm 120 and the second carrier arm 130 to be in a relatively stable cooperation state, reducing the risk of the carrier boat falling off the carrier arm, and further improving the reliability of the supporting process of the carrier boat.

[0048] As shown in FIGS. 2 to 9, the driving mechanism 110 described above can include a base 111, a driving body 112, and a transmission part 113, the base 111 is the installation basis of the driving body 112, the transmission part 113, the first carrier arm 120, and the second carrier arm 130, the driving body 112 is arranged on the base 111 and is used to provide driving force to the first carrier arm 120 and the second carrier arm 130, the driving body 112 can include a motor, a rotary cylinder, or the like, and the connection mode between the driving body 112 and the base 111 can include bolt connection, clamping, or the like.

[0049] The transmission part 113 is in sliding connection with the base 111, and the relative sliding direction between the transmission part 113 and the base 111 can be a horizontal direction, which is conducive to maintaining the levelness of the first carrier arm 120 and the second carrier arm 130 during transmission. The transmission part 113 can include at least one or a combination of multiple kinds of components such as a transmission gear, a connecting rod, a lead screw, a conveyor belt, or the like, the driving body 112 can be connected with the first carrier arm 120 and the second carrier arm 130 through the transmission part 113, and the driving force generated by the driving body 112 can be transmitted to the first carrier arm 120 and the second carrier arm 130 through the transmission part 113, so as to drive the first carrier arm 120 and the second carrier arm 130 to move relatively.

[0050] The driving body 112 is provided with an output shaft, in the case that the output shaft of the driving body 112 rotates, the output shaft can drive the transmission part 113 to slide relative to the base 111, so as to drive the first carrier arm 120 and the second carrier arm 130 to move relatively, respectively, to support the carrier boat 200 or separate from the carrier boat 200.

[0051] As shown in FIGS. 2-9, the transmission part 113 can include a first rack 1131 and a second rack 1132, which are respectively in sliding connection with the base 111, and the sliding direction of the first rack 1131 and the second rack 1132 relative to the base 111 can be horizontal. The first carrier arm 120 is in transmission connection with the first rack 1131, and the second carrier arm 130 is in transmission connection with the second rack 1132. The specific transmission connection mode can include screw rod transmission, gear transmission, etc. The output shaft of the driving body 112 is provided with a gear 1121, which is fixedly connected with the output shaft and can rotate synchronously. The first rack 1131 and the second rack 1132 are respectively located on the opposite sides of the gear 1121 and are respectively engaged with the gear 1121.

[0052] In the case where the driving body 112 drives the gear 1121 to rotate through the output shaft, the gear 1121 can drive the first rack 1131 and the second rack 1132 to move towards or away from each other, so as to respectively drive the first carrier arm 120 and the second carrier arm 130 to move close to or away from each other, so as to support or separate from the carrier boat 200. Since the rotational driving force applied by the driving body 112 is transmitted through the gear 1121 and the rack, the first rack 1131 and the second rack 1132 can be driven to move linearly back and forth. The movement direction of the first carrier arm 120 and the second carrier arm 130 can be consistent with the movement direction of the first rack 1131 and the second rack 1132 respectively, so as to improve the stability of the driving mechanism 110.

[0053] Please continue to refer to FIGS. 2-9, the transmission part 113 further includes a first sliding block 1133, a second sliding block 1134, a first connecting piece 1135 and a second connecting piece 1136. The first sliding block 1133 and the second sliding block 1134 are respectively in sliding connection with the base 111. The first rack 1131 is connected with the first sliding block 1133 through the first connecting piece 1135, and the second rack 1132 is connected with the second sliding block 1134 through the second connecting piece 1136. The specific connection mode can include bolt connection, welding, riveting, etc. The first carrier arm 120 is connected to the first sliding block 1133, and the first rack 1131 can be in transmission connection with the first carrier arm 120 through the first connecting piece 1135 and the first sliding block 1133. The second carrier arm 130 is connected to the second sliding block 1134, and the second rack 1132 can be in transmission connection with the second carrier arm 130 through the second connecting piece 1136 and the second sliding block 1134. The connection mode between the above-mentioned components can include bolt connection, clamping, etc.

[0054] When the gear 1121 rotates, the first rack 1131 and the first slider 1133 move synchronously, and the second rack 1132 and the second slider 1134 move synchronously, so as to drive the first bearing arm 120 and the second bearing arm 130 to move relatively. FIG. 8 shows a schematic view of the first rack 1131 and the second rack 1132 moving away from each other, at this time, the first slider 1133 and the second slider 1134 drive the first bearing arm 120 and the second bearing arm 130 to move away from each other, and the first bearing arm 120 and the second bearing arm 130 can be separated from the bearing boat 200; then the gear 1121 can be controlled to rotate counterclockwise, and FIG. 9 shows a schematic view of the first rack 1131 and the second rack 1132 moving close to each other, at this time, the first slider 1133 and the second slider 1134 drive the first bearing arm 120 and the second bearing arm 130 to move close to each other, and the bearing boat 200 can be supported.

[0055] As shown in FIG. 1, the length extension direction of the first bearing arm 120 or the second bearing arm 130 can be defined as the first direction 140 (the direction shown by the arrow in FIG. 1), and the two ends of the whole formed by the first bearing arm 120 and the second bearing arm 130 along the first direction 140 are respectively provided with the driving mechanism 110, and the structures of the two driving mechanisms 110 can be the same, so as to simultaneously provide support and driving force for the first bearing arm 120 and the second bearing arm 130, thereby improving the load capacity and the stability of operation of the first bearing arm 120 and the second bearing arm 130.

[0056] As shown in FIGS. 2 to 8, the base 111 can include a first mounting plate 1111, a second mounting plate 1112 and a third mounting plate 1113, the first mounting plate 1111 and the second mounting plate 1112 are located on the same side of the third mounting plate 1113 and are connected through the third mounting plate 1113, and the specific connection mode can include welding, bolt connection and the like. The first mounting plate 1111, the second mounting plate 1112 and the third mounting plate 1113 enclose a mounting space, the driving body 112 is connected to the first mounting plate 1111, and the output shaft of the driving body 112 extends into the mounting space. Taking the motor as an example, the shell of the motor can be fixed on the first mounting plate 1111 by bolts, and the output shaft of the motor extends into the mounting space.

[0057] The first rack 1131 and the second rack 1132 are arranged in the mounting space, and the first rack 1131 and the second rack 1132 are respectively in sliding connection with the second mounting plate 1112. The sliding connection between the first rack 1131, the second rack 1132 and the second mounting plate 1112 can include that pulleys are arranged on the first rack 1131, the second rack 1132 and the second mounting plate 1112, or that sliding blocks are respectively arranged on the first rack 1131 and the second rack 1132, and a sliding rail is arranged on the second mounting plate 1112, and the sliding blocks and the sliding rail are matched to realize the sliding connection.

[0058] The first sliding block 1133 and the second sliding block 1134 are respectively in sliding connection with the surface of the third mounting plate 1113 away from the mounting space, so as to facilitate the connection of the first sliding block 1133 and the second sliding block 1134 with the first bearing arm 120 and the second bearing arm 130. Considering that the first rack 1131 needs to be connected with the first sliding block 1133 through the first connecting piece 1135, and the second rack 1132 needs to be connected with the second sliding block 1134 through the second connecting piece 1136, and the first rack 1131 and the second rack 1132 are located on the inner side of the third mounting plate 1113 (the side of the third mounting plate 1113 facing the mounting space), and the first sliding block 1133 and the second sliding block 1134 are located on the outer side of the third mounting plate 1113 (the side of the third mounting plate 1113 away from the mounting space), in order to avoid the third mounting plate 1113 from hindering the first connecting piece 1135 and the second connecting piece 1136, a strip-shaped hole 1114 can be arranged on the third mounting plate 1113, the strip-shaped hole 1114 can extend along the relative movement direction of the first rack 1131 and the second rack 1132, and the first connecting piece 1135 and the second connecting piece 1136 are arranged in the strip-shaped hole 1114, so as to ensure the normal movement of the first connecting piece 1135 and the second connecting piece 1136.

[0059] As shown in FIG. 6, the transmission part 113 further includes a first sliding rail 1137, a second sliding rail 1138 and a third sliding rail 1139. The first sliding rail 1137 and the second sliding rail 1138 are arranged on the second mounting plate 1112, the first rack 1131 is in sliding connection with the first sliding rail 1137, and the second rack 1132 is in sliding connection with the second sliding rail 1138. The first sliding rail 1137 and the second sliding rail 1138 can limit the relative movement of the first rack 1131 and the second rack 1132, so as to improve the stability of the operation of the first rack 1131 and the second rack 1132.

[0060] The third sliding rail 1139 is connected to the surface of the third mounting plate 1113 facing away from the mounting space, and the first sliding block 1133 and the second sliding block 1134 are respectively in sliding connection with the third sliding rail 1139. Since the first sliding block 1133 and the second sliding block 1134 are arranged on the same sliding rail and have consistent running tracks, the flatness of the first bearing arm 120 and the second bearing arm 130 is improved.

[0061] As shown in FIGS. 10-14, the first bearing arm 120 and the second bearing arm 130 can have the same structure and each include a bearing arm body 121, a connecting portion 122, and a positioning portion 123. The bearing arm body 121 is a main bearing component, and the bearing arm body 121 can be connected to the driving mechanism 110 through the connecting portion 122. In actual assembly, the connecting portion 122 can be fixed on the first sliding block 1133 or the second sliding block 1134 of the driving mechanism 110 by bolt connection, riveting, or the like.

[0062] As shown in FIG. 11, the positioning portion 123 is arranged on the bearing arm body 121 and can be connected to the bearing arm body 121 by bolt connection, clamping, or the like. The positioning portion 123 can be connected to the top surface of the bearing arm body 121. It should be noted that the cross section of the bearing arm body 121 along the first direction 140 can be rectangular. Correspondingly, the bearing arm body 121 can include a top surface, a bottom surface, and two side surfaces. The top surface and the bottom surface are connected by the two side surfaces, respectively. The top surface of the bearing arm body 121 is actually the surface of the bearing arm body 121 for supporting the bearing boat 200.

[0063] When the bearing arm body 121 supports the bearing boat 200, the bearing arm body 121 actually contacts the boat ear 210 through the positioning portion 123. To prevent the boat ear 210 from slipping off the bearing arm body 121, the positioning portion 123 can position the boat ear 210 from at least two directions. The positioning portion 123 can include a positioning groove, a positioning protrusion, or the like. In addition, the positioning portion 123 can adjust the position data of the bearing boat 200 by limiting the boat ear 210. The position data of the bearing boat 200 can include vertical height and horizontal position. By adjusting and correcting the position data of the bearing boat 200, the efficiency of subsequent processes is improved.

[0064] As shown in FIGS. 12-14, the positioning portion 123 can include a bottom plate 1231, a first guide plate 1232, and a second guide plate 1233. The bottom plate 1231 can be connected to the top surface of the bearing arm body 121 by screwing, clamping, or the like. The first guide plate 1232 and the second guide plate 1233 are arranged on the side of the bottom plate 1231 away from the bearing arm body 121. The first guide plate 1232 and the second guide plate 1233 are arranged intersecting each other. The bottom plate 1231, the first guide plate 1232, and the second guide plate 1233 can be an integral structure, or can be separately manufactured and assembled together by welding, riveting, or the like.

[0065] The bottom plate 1231, the first guide plate 1232, and the second guide plate 1233 form a limiting space for accommodating the boat ear 210. In the limiting space, the bottom plate 1231 can support the boat ear 210 in the vertical direction, and the first guide plate 1232 and the second guide plate 1233 can limit the boat ear 210 from at least two directions. The number of limiting spaces can be one, two, or more, which can be selected according to the number of boat ears 210 on the bearing boat 200. For example, as shown in FIGS. 12-14, two boat ears 210 are arranged on one side of the bearing boat 200. Correspondingly, the bottom plate 1231, the first guide plate 1232, and the second guide plate 1233 form two limiting spaces for cooperating with the boat ears 210. The area between the two limiting spaces is used to accommodate fasteners such as screws and rivets.

[0066] The bearing arm body 121 supports the positioning portion 123 in the vertical upward direction. Moreover, the positioning portion 123 is only subjected to the gravity applied by the bearing boat 200, and the bearing boat 200 does not pull the positioning portion 123 in other directions. Therefore, the problem of the positioning portion 123 falling off or being damaged can be avoided.

[0067] To enable the boat ear 210 to smoothly slide along the first guide plate 1232 and the second guide plate 1233 to the bottom plate 1231 for stable support, a guide surface 1234 can be arranged on at least one of the first guide plate 1232 and the second guide plate 1233. The guide surface 1234 cooperates with the boat ear 210 to enable the boat ear 210 to smoothly slide to the bottom plate 1231. The guide surface 1234 is designed as an inclined surface. As shown in FIG. 12, the area of the second guide plate 1233 near the upper part of the guide surface 1234 is relatively thin, which can provide a larger space for accommodating the boat ear 210. The second guide plate 1233 gradually thickens from the upper part to the lower part of the guide surface 1234. The boat ear 210 can gradually slide along the guide surface 1234 from the upper part to the lower part of the guide surface 1234 until it contacts the bottom plate 1231.

[0068] Referring to FIGS. 1-19, the embodiments of the present application further provide a semiconductor process equipment, which can include the carrier boat 200 and the boat supporting device 100 described above. The carrier boat 200 is provided with boat ears 210 on opposite sides thereof, and the boat supporting device 100 is used to support the boat ears 210.

[0069] As can be seen from the above, the boat supporting device 100 disclosed by the embodiments of the present application improves the related art. The carrier boat 200 can be stably placed on the first carrier arm 120 and the second carrier arm 130 by relying on its own gravity. Since the first carrier arm 120 and the second carrier arm 130 move in a translational manner, the gravity of the carrier boat 200 is not easy to generate a component force in the moving direction of the first carrier arm 120 and the second carrier arm 130. Therefore, the first carrier arm 120 and the second carrier arm 130 are not easy to be forced to open, so that the carrier boat 200 and the first carrier arm 120 and the second carrier arm 130 can be in a relatively stable cooperation state, reducing the risk of the carrier boat falling off the carrier arm, and further improving the reliability of the carrier boat supporting process.

[0070] As shown in FIGS. 15-17, in order to improve production efficiency, the number of carrier boats 200 can be multiple. The multiple carrier boats 200 can be arranged in a linear manner, for example, in the first direction 140 shown in FIG. 1. The first carrier arm 120 and the second carrier arm 130 extend along the arrangement direction of the multiple carrier boats 200, that is, the length extension direction of the first carrier arm 120 and the second carrier arm 130 is consistent with the arrangement direction of the multiple carrier boats 200.

[0071] During the operation of the carrier boat 200, a detector such as an infrared sensor or an image sensor is used to detect the operation parameters of the carrier boat 200, which can include the operation speed and the number. In order to facilitate the detection of the detector, a protruding detection matching part 220 can be arranged on the top of the carrier boat 200, which can cooperate with the detector.

[0072] In order to enable the process gas to uniformly contact the silicon wafers in the carrier boat 200, a partition 230 can be arranged in at least one of the two adjacent carrier boats 200. For the two adjacent carrier boats 200, the side of one carrier boat is arranged opposite to the side of the other carrier boat. The partition 230 can be protrudingly arranged on the side of one carrier boat 200 and in contact with the side of the other carrier boat 200. The partition 230 and the carrier boat 200 can be an integral structure, or they can be separately manufactured and then assembled together by welding or the like. Under the partitioning action of the partition 230, an over-flow gap can be formed between the two adjacent carrier boats 200. The process gas can enter the inside of the carrier boat 200 through the over-flow gap and fully contact the silicon wafers.

[0073] As shown in FIG. 17, FIG. 18 and FIG. 19, the semiconductor process equipment can further comprise a conveying device 300, the bottom of the carrier boat 200 is provided with a first positioning groove 240, and a positioning structure on the conveying device 300 can be positioned and matched with the first positioning groove 240 on the bottom of the carrier boat 200 when the carrier boat 200 is transported by the conveying device 300, so that the carrier boat 200 can be adjusted and aligned by the conveying device 300, and the position deviation of the carrier boat 200 during transportation can be avoided.

[0074] In addition, the semiconductor process equipment can further comprise a lifting mechanism 400, a push-pull boat 500 and a reaction chamber 600, in a specific process, the boat supporting device 100 can be connected to the lifting mechanism 400, the carrier boat 200 is first transported to the working position of the lifting mechanism 400 by the conveying device 300, the lifting mechanism 400 drives the boat supporting device 100 to ascend or descend, so as to drive the carrier boat 200 to ascend or descend to a predetermined position, the lifting mechanism 400 can also provide the function of horizontal transmission, and the carrier boat 200 can be moved to the working position of the push-pull boat 500, the push-pull boat 500 is oppositely arranged with the reaction chamber 600, the push-pull boat 500 is provided with a boat paddle 501, the boat paddle 501 can be made of silicon carbide material, the carrier boat 200 can be supported by the boat paddle 501, and then the carrier boat 200 can be pushed into the reaction chamber 600 by the horizontal movement of the boat paddle 501, the bottom of the carrier boat 200 is provided with a boat foot, and the carrier boat 200 can be stably placed in the reaction chamber 600 by the support cooperation of the boat foot and the inner wall of the reaction chamber 600. After the process is completed, the carrier boat 200 is taken out of the reaction chamber 600 by the push-pull boat 500 through the boat paddle 501, and then the carrier boat 200 is transported to the next process by the lifting mechanism 400, the boat supporting device 100 and the conveying device 300.

[0075] In the transmission process of the carrier boat 200, in order to improve the stability of the cooperation between the carrier boat 200 and the boat paddle 501, a boat paddle cooperation part 250 can be arranged on the bottom of the carrier boat 200, the boat paddle cooperation part 250 can be overlapped on the boat paddle 501, and the two ends of the boat paddle cooperation part 250 respectively extend away from the carrier boat 200, so as to form a second positioning groove 251 on the boat paddle cooperation part 250, when the carrier boat 200 is placed on the boat paddle 501, the second positioning groove 251 can accommodate the boat paddle 501 and limit the outer side of the boat paddle 201, so that the position deviation between the carrier boat 200 and the boat paddle 501 is not easy to occur, and the groove wall of the second positioning groove 251 can also be positioned and matched with the boat paddle 501, so as to ensure that the carrier boat 200 can be placed on the predetermined position of the boat paddle 501.

[0076] The above embodiments of the present application mainly describe the differences between various embodiments. The technical features different between various embodiments can be combined to form more specific embodiments without contradiction. In view of brevity, the combination is not described here again.

[0077] The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above specific embodiments. The above specific embodiments are only illustrative but not restrictive. Those skilled in the art can make many forms under the inspiration of the present application without departing from the scope of the present application and the protection scope of the claims.

Claims

1. A boat support device for supporting a carrying boat, characterized in that, The boat supporting device comprises a driving mechanism, a first supporting arm and a second supporting arm, the driving mechanism is connected with the first supporting arm and the second supporting arm respectively to drive the first supporting arm and the second supporting arm to move towards or away from each other by translation; When the first supporting arm and the second supporting arm move towards each other, the first supporting arm and the second supporting arm are used to support the boat ears on the opposite sides of the supporting boat respectively.

2. The boat support apparatus of claim 1, wherein The driving mechanism comprises a base, a driving body and a transmission part; The driving body is arranged on the base, the transmission part is slidingly connected with the base, and the driving body is drivingly connected with the first supporting arm and the second supporting arm through the transmission part; When the output shaft of the driving body rotates, the transmission part slides relative to the base to drive the first supporting arm and the second supporting arm to move relative to each other.

3. The boat support apparatus of claim 2, wherein, The transmission part comprises a first rack and a second rack, the first rack and the second rack are slidingly connected with the base respectively, the first supporting arm is drivingly connected with the first rack, and the second supporting arm is drivingly connected with the second rack; The output shaft of the driving body is provided with a gear, the first rack and the second rack are located on the opposite sides of the gear respectively and are engaged with the gear respectively; When the driving body drives the gear to rotate through the output shaft, the gear drives the first rack and the second rack to move towards or away from each other to drive the first supporting arm and the second supporting arm to move relative to each other respectively.

4. The boat support apparatus of claim 3, wherein The transmission part further comprises a first sliding block, a second sliding block, a first connecting piece and a second connecting piece, the first sliding block and the second sliding block are slidingly connected with the base respectively, the first rack is connected with the first sliding block through the first connecting piece, and the second rack is connected with the second sliding block through the second connecting piece; The first supporting arm is connected with the first sliding block, the second supporting arm is connected with the second sliding block, and when the gear rotates, the first rack moves synchronously with the first sliding block, and the second rack moves synchronously with the second sliding block to drive the first supporting arm and the second supporting arm to move relative to each other respectively.

5. The boat support apparatus of claim 1 wherein, The driving mechanism is arranged at the two ends of the whole formed by the first supporting arm and the second supporting arm in a first direction, wherein the first direction is the length extension direction of the first supporting arm or the second supporting arm.

6. The boat support apparatus of claim 4, wherein The base comprises a first mounting plate, a second mounting plate and a third mounting plate, the first mounting plate and the second mounting plate are located on the same side of the third mounting plate and are connected through the third mounting plate, and the first mounting plate, the second mounting plate and the third mounting plate enclose a mounting space; The driving body is connected with the first mounting plate, the output shaft extends into the mounting space, the first rack and the second rack are arranged in the mounting space and are slidingly connected with the second mounting plate respectively; The first sliding block and the second sliding block are slidingly connected with the surface of the third mounting plate away from the mounting space respectively. The third mounting plate is provided with a strip-shaped hole extending along the direction of relative movement of the first and second racks, and the first and second connecting members are arranged in the strip-shaped hole.

7. The boat support apparatus of claim 6, wherein The transmission part further comprises a first sliding rail, a second sliding rail and a third sliding rail, the first and second sliding rails are arranged on the second mounting plate, the first rack is in sliding connection with the first sliding rail, and the second rack is in sliding connection with the second sliding rail. The third sliding rail is connected to the surface of the third mounting plate facing away from the mounting space, and the first and second sliding blocks are in sliding connection with the third sliding rail, respectively.

8. The boat support apparatus of claim 1, wherein, The first and second bearing arms are structurally identical and each comprise a bearing arm body, a connecting portion and a positioning portion, the bearing arm body is connected to the driving mechanism through the connecting portion, and the positioning portion is arranged on the top surface of the bearing arm body and used for limiting cooperation with the boat ear.

9. The boat support apparatus of claim 8, wherein, The positioning portion comprises a bottom plate, a first guide plate and a second guide plate, the bottom plate is connected to the top surface of the bearing arm body, the first and second guide plates are arranged on the side of the bottom plate facing away from the bearing arm body, and the first and second guide plates are arranged in intersection, and the bottom plate, the first guide plate and the second guide plate enclose a limiting space for accommodating the boat ear. At least one of the first and second guide plates is provided with a guide surface used for guiding cooperation with the boat ear.

10. A semiconductor process apparatus, characterized by, The boat supporting device comprises a bearing boat and the boat supporting device of any one of claims 1-9, and the bearing boat is provided with boat ears on two opposite sides, and the boat supporting device is used for supporting the boat ears.

11. The semiconductor process apparatus according to claim 10, wherein The number of the bearing boats is multiple, and the multiple bearing boats are arranged in a line, and the first and second bearing arms extend along the arrangement direction of the multiple bearing boats.

12. The semiconductor process apparatus according to claim 11, wherein The top of the bearing boat is provided with a protruding detection cooperation portion used for cooperation with a detection device.

13. The semiconductor process apparatus according to claim 11, wherein At least one of two adjacent bearing boats is provided with a partition, which is protrudingly arranged on the side edge of the bearing boat and in contact with the side edge of another bearing boat to form a flow gap between the two adjacent bearing boats.

14. The semiconductor process apparatus according to claim 10, wherein The semiconductor process equipment further comprises a conveying device, and the bottom of the bearing boat is provided with a first positioning groove used for positioning cooperation with the conveying device.

15. The semiconductor process apparatus according to claim 10, wherein The semiconductor process equipment further comprises a push-pull boat and a reaction chamber, the push-pull boat is arranged opposite to the reaction chamber, and the push-pull boat comprises a boat paddle used for supporting the bearing boat and driving the bearing boat to enter and exit the reaction chamber. The bottom of the bearing boat is provided with a boat paddle cooperation portion, two ends of the boat paddle cooperation portion extend away from the bearing boat, respectively, to form a second positioning groove on the boat paddle cooperation portion, the second positioning groove is used for accommodating the boat paddle and positioning cooperation with the boat paddle.

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