Chamber device and position adjustment mechanism

Abstract

In the present invention, by utilizing the elasticity of a seal part, a chamber mechanism is capable of changing the relative position of a second chamber forming part with respect to a first chamber forming part between a first position and a second position separated from the first position, while maintaining a state in which a chamber is formed. This position adjustment mechanism enables adjustment of the relative position of the second chamber forming part between the first position and the second position, and comprises a movable part and a cam structure configured as follows. The movable part is installed on the first chamber forming part, and is configured to be capable of translational movement in a second direction perpendicular to a first direction. The cam structure is provided on the movable part and the second chamber forming part, and is configured to be capable of converting translational movement of the movable part in the second direction into translational movement of the second chamber forming part toward the first position.

Description

Chamber device and position adjustment mechanism

[0001] The present invention relates to a technique for suppressing the expansion and contraction of a chamber itself due to a change in internal pressure.

[0002] Patent Document 1 discloses a peeling device that peels a support substrate from a wafer inside a chamber. In this peeling device, after creating a crack that serves as a starting point for growing a cleavage between the wafer and a part of the outer peripheral edge of the support substrate, the support substrate is moderately pressed with a pad provided with a plurality of suction holes, and then, in that state, the internal pressure of the chamber is increased. After that, using the crack as a trigger, a pressure difference is generated between the front and back of the support substrate by suction using the holes of the pad in order. Thereby, the support substrate is lifted while compressing and deforming the pad, and a cleavage is grown between the support substrate and the wafer.

[0003] Japanese Patent No. 6377956

[0004] On the other hand, when the internal pressure of the chamber is increased, the chamber itself may expand accordingly. Therefore, in the above-described peeling device, if the internal pressure of the chamber is increased while the support substrate is moderately pressed with the pad, the compression amount of the pad itself becomes small and the pressing force on the support substrate weakens. Due to this, there is a possibility that peeling failure may occur when growing a cleavage. Thus, the expansion of the chamber may have an adverse effect on the processing inside the chamber. Similarly, when the chamber itself contracts due to a decrease in the internal pressure of the chamber, this may also have an adverse effect on the processing inside the chamber.

[0005] Therefore, an object of the present invention is to suppress the expansion and contraction of the chamber itself due to a change in internal pressure as needed while aiming for simplification and miniaturization of a device provided with the chamber.

[0006] The chamber device according to the present invention comprises a chamber mechanism and a position adjustment mechanism configured as follows (Aspect 1). The chamber mechanism includes a first chamber forming section and a second chamber forming section. Here, these chamber forming sections are capable of changing their relative positional relationship with each other in a first direction and form a chamber by joining together via an elastic seal section. The chamber mechanism utilizes the elasticity of the seal section to change the relative position of the second chamber forming section with respect to the first chamber forming section between a first position and a second position further away, while maintaining the joined state of the chamber forming sections. The position adjustment mechanism is a mechanism applicable to the chamber mechanism and enables adjustment of the relative position of the second chamber forming section between a first position and a second position. Specifically, the position adjustment mechanism comprises a movable section and a cam structure configured as follows. The movable section is installed in the first chamber forming section and is configured to be capable of translational movement in a second direction perpendicular to the first direction. The cam structure is provided in the movable part and the second chamber forming part, and is configured to convert the translational motion of the movable part in the second direction into the translational motion of the second chamber forming part directed toward the first position.

[0007] According to the above embodiment 1, a position adjustment mechanism can be configured as a separate mechanism from the mechanism (lifting mechanism) that enables the relative proximity and separation of the second chamber forming section to the first chamber forming section. Using such a position adjustment mechanism, it becomes possible to adjust the position of the second chamber forming section specifically when the chamber is being formed (including immediately before the chamber is formed). Therefore, it becomes unnecessary to have a function in the lifting mechanism to adjust the relative position of the second chamber forming section with high precision, and the lifting mechanism can be configured with a simpler mechanism such as an air cylinder or hydraulic cylinder instead of a ball screw. As a result, the device can be simplified and miniaturized, and safety can be improved by using an air cylinder or hydraulic cylinder in the lifting mechanism.

[0008] The chamber device according to Embodiment 1 described above may have the following configuration (Embodiment 2). The chamber mechanism may be configured to open the chamber by relatively moving the second chamber forming portion to a third position that is further away from the second position. The movable portion may also be configured to move to a retracted position that avoids collision with the cam component on the second chamber forming portion side that constitutes the cam structure when the second chamber forming portion moves relatively between the second position and the third position.

[0009] According to the above embodiment 2, it becomes possible to perform the function of the position adjustment mechanism without interfering with the function of the lifting mechanism (a mechanism that enables the relative proximity and separation of the second chamber forming part with respect to the first chamber forming part).

[0010] The chamber device according to the above embodiment 1 or 2 may have the following configuration (embodiment 3). The position adjustment mechanism may further include a second movable part and a second cam structure configured as follows, separate from the above movable part and cam structure (hereinafter referred to as the "first movable part" and the "first cam structure"). The second movable part is installed in the first chamber forming part and is configured to move in the same direction or the opposite direction in conjunction with the first movable part when the first movable part moves in the second direction. The second cam structure is provided in the second movable part and the second chamber forming part and is configured to convert the translational motion of the second movable part in the same direction or the opposite direction to the second direction into translational motion of the second chamber forming part directed toward the first position, and to displace the second chamber forming part in the same direction and by the same amount as the displacement of the second chamber forming part obtained by the first cam structure at that time.

[0011] According to embodiment 3 described above, it becomes possible to adjust the position of the second chamber forming section at multiple locations in the same direction with the same amount of displacement. As a result, it becomes possible to adjust the position of the second chamber forming section while maintaining an appropriate orientation (for example, a horizontal orientation) (in other words, without causing tilting of the second chamber forming section).

[0012] A chamber device according to any of the above embodiments 1 to 3 may have the following configuration (embodiment 4). The chamber device may further include a displacement sensor for detecting the relative position of the second chamber forming part with respect to the first chamber forming part, and a control device. The control device may adjust the relative position of the second chamber forming part to coincide with a predetermined position set between the first position and the second position by controlling the position of the movable part based on the output of the displacement sensor.

[0013] According to the above embodiment 4, it becomes possible to align the relative position of the second chamber forming portion with a predetermined position when forming the chamber, and furthermore, even if the relative position of the second chamber forming portion shifts from the predetermined position after the formation of the chamber, it becomes possible to correct the positional shift from the predetermined position as needed.

[0014] A position adjustment mechanism may be extracted as the subject of the invention from the chamber apparatus according to the above embodiments 1 to 4 (Embodiment 5).

[0015] According to the present invention, it is possible to simplify and miniaturize a device equipped with a chamber, while suppressing the expansion and contraction of the chamber itself due to changes in internal pressure as needed.

[0016] Figure 1(A) is a conceptual front view of a peeling device according to an embodiment, and Figure 1(B) is a conceptual block diagram showing the configuration of the peeling device. Figure 2 is a conceptual top view of the peeling device according to an embodiment. Figure 3 is a cross-sectional view taken along the line I-I shown in Figure 2. Figure 4(A) is a bottom view of the second chamber forming section, and Figure 4(B) is a bottom view of the second chamber forming section excluding the pad. Figures 5(A) and 5(B) are a front view and a cross-sectional view showing the operation of the peeling device. Figure 6 is a front view showing the operation of the peeling device. Figures 7(A) and 7(B) are a front view and a cross-sectional view showing the operation of the peeling device. Figure 8 is an enlarged view of the J1B region in Figure 7(B). Figures 9(A) and 9(B) are enlarged views of the J1A region in Figure 7(A), where Figure 9(A) shows the case where the relative position of the second chamber forming section is in the first position, and Figure 9(B) shows the case where its relative position is in the second position. Figure 10(A) is a cross-sectional view showing the operation of the peeling device, and Figure 10(B) is an enlarged view of the J2 region within that cross-sectional view. Figure 11(A) is a cross-sectional view showing the operation of the peeling device, and Figure 11(B) is an enlarged view of the J3 region within that cross-sectional view. Figure 12 is a cross-sectional view showing the operation of the peeling device. Figures 13(A) to 13(D) are conceptual diagrams showing four different modifications of the cam structure. Figure 14 is a cross-sectional view of the peeling device according to the third modification. Figure 15 is a conceptual diagram showing the peeling device according to the fourth modification.

[0017] [1] Configuration of the peeling apparatus Figures 1(A) and 2 are a conceptual front view and a top view of the peeling apparatus according to the embodiment. Figure 1(B) is a conceptual block diagram showing the configuration of the peeling apparatus. Figure 3 is a cross-sectional view taken along the line I-I shown in Figure 2. The peeling apparatus of this embodiment is a device for peeling a laminate Ws (see Figure 3) formed by bonding two workpieces W1 and W2 together at the bonding surface, and comprises a chamber mechanism 1, a peeling mechanism 2, a position adjustment mechanism 3, a detection sensor 4, and a control device 5. As an example, workpiece W1 is a semiconductor wafer, and workpiece W2 is a substrate used for supporting semiconductor wafers in semiconductor processes or for applications such as nanoimprinting. The laminate Ws may also be attached to a dicing tape and fixed to a dicing frame via the tape. The configuration of each part will be described in detail below.

[0018] Furthermore, the laminate Ws to be peeled off may be formed by directly bonding the workpieces W1 and W2 together, or by indirectly bonding them together via an adhesive layer (such as resin), as long as the workpieces W1 and W2 can be peeled off at the bonding surface. In addition, the parts of the peeling apparatus described below that are related to the formation of the chamber 10 (mainly the chamber mechanism 1 and the position adjustment mechanism 3) can be conceptually considered as a "chamber apparatus" whose use is not limited to peeling.

[0019] [1-1] Chamber mechanism The chamber mechanism 1 is a mechanism that forms a sealed chamber 10 and comprises a first chamber forming section 11, a second chamber forming section 12, a drive section 13, and an internal pressure adjustment section 14 (see Figures 1(A) and 1(B)). In this embodiment, this chamber 10 (sealed space) is used to achieve delamination of the bonding surfaces of two workpieces W1 and W2.

[0020] The first chamber forming section 11 and the second chamber forming section 12 are the parts that, when joined together, form the chamber 10. Furthermore, these chamber forming sections are configured so that their relative positional relationship in the first direction D1 (in other words, the relative position Pr of the second chamber forming section 12 with respect to the first chamber forming section 11 (see Figure 3)) can be changed by the action of the drive section 13. As a result, the chamber mechanism 1 can form the chamber 10 by joining the two chamber forming sections (see Figure 7(B)), and conversely, the chamber 10 can be opened by separating them (see Figure 3).

[0021] In the example shown in Figure 1(A), the second chamber forming section 12 is positioned above the first chamber forming section 11 such that the vertically upward direction is the first direction D1. Furthermore, while the first chamber forming section 11 is fixed at a specific position in the first direction D1, the second chamber forming section 12 is configured to move in the first direction D1 by the action of the drive unit 13. More specifically, the drive unit 13 is composed of an air cylinder or a hydraulic cylinder and supports the second chamber forming section 12 from below. This makes it possible to raise the second chamber forming section 12 against gravity by increasing the internal pressure of the cylinder, and conversely, to lower the second chamber forming section 12 using gravity by decreasing the internal pressure of the cylinder. In other words, the drive unit 13 functions as a lifting mechanism for the second chamber forming section 12.

[0022] Furthermore, the opposing surfaces 11s and 12s of the first chamber forming section 11 and the second chamber forming section 12 (see Figure 3; in the example in Figure 3, the upper surface of the first chamber forming section 11 and the lower surface of the second chamber forming section 12) have a first recess 101 and a second recess 102 formed thereon, which become the chamber 10 when they are joined together. Also, an elastic annular sealing section 103 (see Figures 1(A) and 3) is installed on the opposing surface 11s on the first chamber forming section 11 side, surrounding the opening area of ​​the first recess 101. Here, the sealing section 103 can be an O-ring or a tubular seal (which allows adjustment of the internal pressure of the tube, and whose sealing force can be increased by expanding the tube with that internal pressure). The annular sealing section 103 may also be installed on the opposing surface 12s on the second chamber forming section 12 side, surrounding the opening area of ​​the second recess 102.

[0023] Due to the presence of this sealing portion 103, when the two chamber-forming portions are joined together, the sealing portion 103 is interposed between them (see Figure 7(B)). When these chamber-forming portions are joined together via the sealing portion 103, the internal spaces of the first recess 101 and the second recess 102 are sealed, thereby forming the chamber 10 (sealed space).

[0024] Furthermore, by utilizing the elasticity of the seal portion 103, while maintaining the state in which the two chamber forming portions are joined together (the state in which the chamber 10 is formed), the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11 can be changed between a first position P1 (see Figure 9(A)) in which the seal portion 103 is elastically deformed significantly to bring the two chamber forming portions closer together, and a second position P2 (see Figure 9(B)) in which the two chamber forming portions are moved further apart than in the first position to reduce the amount of elastic deformation of the seal portion 103. In other words, the chamber mechanism 1 is configured to change the relative position Pr of the second chamber forming portion 12 between the first position P1 and the second position P2, which is further away, while maintaining the state in which the chamber 10 is formed.

[0025] Furthermore, the drive unit 13 described above can move the relative position Pr of the second chamber forming section 12 with respect to the first chamber forming section 11 to a third position P3 (see Figure 3) where the chamber forming sections are separated and the chamber 10 is opened. In other words, the chamber mechanism 1 is configured to open the chamber 10 by relatively moving the second chamber forming section 12 to a third position P3, which is even further away than the second position P2.

[0026] The internal pressure adjustment section 14 (see Figure 1(B)) is a part that enables adjustment of the internal pressure of the chamber 10 and includes a pressure boosting section, such as a compression pump, which increases the internal pressure of the chamber 10 by supplying air into the chamber 10. The internal pressure adjustment section 14 may also include a pressure reducing section, such as a vacuum pump, which decreases the internal pressure of the chamber 10 by exhausting air from inside the chamber 10.

[0027] [1-2] Delamination Mechanism The delamination mechanism 2 is a mechanism that enables the separation of two bonded workpieces W1 and W2 within the chamber 10 by growing a crack Kw between their bonded surfaces. Specifically, the delamination mechanism 2 is a mechanism that enables the growth of a crack Kw across the entire bonded surface, triggered by a crack (see Figure 8) created along the bonded surface between the two workpieces W1 and W2 at a part of the outer edge of the laminate Ws, and has the following configuration (see Figure 3). In the following, the two axial directions perpendicular to each other in a virtual plane perpendicular to the first direction D1 are referred to as the X-axis direction and the Y-axis direction.

[0028] A stage portion 20 for holding the laminate Ws is installed on the bottom surface of the first recess 101 formed in the first chamber forming portion 11 (see Figure 3). This stage portion 20 is equipped with a chuck function (such as vacuum suction or electrostatic chuck) for fixing the laminate Ws placed thereon. In this embodiment, the laminate Ws is placed on the stage portion 20 with the back surface of the workpiece W2 (the surface opposite to the bonding surface) facing the first direction D1 (vertically upward in the example of Figure 3).

[0029] On the other hand, a platform-shaped raised portion 121 is provided on the bottom surface of the second recess 102 formed in the second chamber forming portion 12, and an annular groove 21A and a plurality of slit grooves 21B are formed on the surface 121a of the raised portion 121 (in the example of Figure 3, the bottom surface of the raised portion 121), and the pad 22 is attached so as to cover only the slit grooves 21B. Furthermore, the raised portion 121 is formed so that when the chamber 10 is formed, the pad 22 is pressed against the back surface of the workpiece W2, and the amount of compression of the pad 22 itself at that time is within an acceptable range. Specifically, it is as follows.

[0030] Figure 4(A) is a bottom view of the second chamber forming section 12, and Figure 4(B) is a bottom view of the second chamber forming section 12 excluding the pad 22. As shown in Figure 4(B), the annular groove 21A is formed in the peripheral region of the surface 121a, along the outer edge of the surface 121a. The multiple slit grooves 21B are formed in the region of the surface 121a that is inside the annular groove 21A, and each has a shape that extends elongated in the Y-axis direction. In other words, each of these slit grooves 21B is formed parallel to one another, with its formation position changing in the X-axis direction. Furthermore, the annular groove 21A and the slit grooves 21B, as well as the slit grooves 21B to each other, are formed so that they do not connect to one another.

[0031] Furthermore, the second chamber forming section 12 (see Figure 3) has a ventilation opening 23A that penetrates in the first direction D1 from the bottom surface of the annular groove 21A to the back surface 12t of the second chamber forming section 12 (the surface opposite to the opposing surface 12s; the top surface in the example of Figure 3), and ventilation openings 23B that penetrate in the first direction D1 from the bottom surface of each slit groove 21B to the back surface 12t. Specifically, it is as follows.

[0032] As shown in Figure 4(B), when the imaginary line Lx extending in the X-axis direction is set to intersect all the slit grooves 21B when viewed from the direction opposite to the first direction D1, the vents 23B are formed one by one in the slit grooves 21B so that they are aligned in a line along the imaginary line Lx. Similarly, the annular groove 21A is formed in the annular groove 21A so that it is aligned in a line along the imaginary line Lx together with the vents 23B. In the example in Figure 4(B), the case where the imaginary line Lx is set to pass through the center of each slit groove 21B is shown.

[0033] A cylinder chamber 24 is installed on the back surface 12t of the second chamber forming section 12 (see Figure 1(A)). Specifically, the cylinder chamber 24 is positioned such that the cylinder axis coincides with the dashed line Lx when viewed from the first direction D1 (see Figure 2), and all the vents 23A and 23B lead into the cylinder chamber 24 (see Figure 3). In this embodiment, the back surface 12t of the second chamber forming section 12 is exposed into the cylinder chamber 24, and as a result, all the vents 23A and 23B directly lead into the cylinder chamber 24 (see Figures 2 and 3). Note that Figure 2 is a top view showing a portion of the top wall of the cylinder chamber 24 broken off. Therefore, Figure 2 also shows the state in which the vents 23A and 23B are exposed on the back surface 12t of the second chamber forming section 12.

[0034] A piston 241 is provided inside the cylinder chamber 24, which reciprocates in the direction of the cylinder axis (in this case, the X-axis direction). The reciprocating motion of this piston 241 is performed through a shaft 242. In this embodiment, when the crack Kw is grown along the bonding surface, the piston 241 is moved from a starting position Ps (see Figure 10(A)) between a vent 23A and the adjacent vent 23B to an ending position Pt (see Figure 12) after passing through all the vents 23B.

[0035] Furthermore, of the two spaces within the cylinder chamber 24 separated by the piston 241 (see Figure 3), a pressure reducing unit 25A (such as a vacuum pump; see Figure 1(B)) is connected to the first space S1, which leads to the vent 23A when the piston 241 is in the starting position Ps, in order to reduce the internal pressure of the first space S1. The other space, the second space S2, is connected to a pressure increasing unit 25B (such as a compression pump; see Figure 1(B)) in order to increase the internal pressure of the second space S2.

[0036] This allows the pressure inside the annular groove 21A to be reduced or increased through the vent 23A, and the pressure inside the slit groove 21B to be reduced or increased through the vent 23B, depending on the position of the piston 241 within the cylinder chamber 24. Furthermore, by moving the piston 241 toward the end position Pt, the number of depressurized slit grooves 21B can be increased.

[0037] Furthermore, a pad 22 is attached to the surface 121a of the raised portion 121, covering only the slit groove 21B of the grooves formed therein (annular groove 21A and slit groove 21B) (see Figure 4(A)). The pad 22 is made of a material that is airtight and elastic (such as a non-porous sponge).

[0038] As a result, the portion of the pad 22 covering the depressurized groove of the slit groove 21B is elastically deformed in a direction toward the surface 121a of the raised portion 121 (here, the first direction D1; upward in the example of Figure 3) by the suction force generated by the depressurization within the slit groove 21B (see Figure 10(B)), while the portion of the pad 22 covering the pressurized groove of the slit groove 21B is elastically deformed in a direction toward away from the surface 121a of the raised portion 121 (here, the opposite direction to the first direction D1; downward in the example of Figure 3) by the pressure generated by the pressurization within the slit groove 21B (see Figure 11(B)).

[0039] Therefore, by moving the piston 241 toward the end position Pt, and thereby increasing the number of depressurized slit grooves 21B, the portion of the pad 22 that has been elastically deformed by the suction force can be expanded (see Figures 11(A) and 11(B)).

[0040] An annular sealing portion 26 is fitted into the raised portion 121 (see Figures 3 and 4(A)). Furthermore, when the pad 22 is pressed against the back surface of the workpiece W2 (the surface opposite to the bonding surface) (see Figures 7(B) and 8), the sealing portion 26 is pressed against the peripheral region of the back surface of the workpiece W2 around the pad 22, thereby dividing the space inside the chamber 10 into two regions, an inner and an outer region of the sealing portion 26 (hereinafter, the inner region will be called the "inner sealing region Rg" and the outer space will be called the "outer sealing region Rh"), and sealing the space between these regions.

[0041] Therefore, when sealing between the two regions by the seal portion 26, if the internal pressure adjustment portion 14 increases the pressure inside the chamber 10, only the outer seal region Rh will be pressurized. On the other hand, on the surface 121a of the raised portion 121, the annular groove 21A is exposed and not covered by the pad 22 (see Figure 4(A)). Therefore, when sealing, the inner seal region Rg can be depressurized by the depressurization portion 25A through the first space S1 of the cylinder chamber 24, the vent 23A, and the annular groove 21A. This creates a pressure difference between the inner seal region Rg and the outer seal region Rh, where the outer seal region Rh side is under positive pressure, and this pressure difference can be used to keep the back surface of the workpiece W2 in constant contact with the surface of the pad 22.

[0042] Therefore, by gradually elastically deforming the pad 22 with the suction force generated by moving the piston 241 toward the end position Pt, the work W2 in close contact with the pad 22 can be moved together with the pad 22 in a direction approaching the surface 121a of the raised portion 121 (here, the first direction D1; in the example of FIG. 3, the upward direction) (see FIGS. 11(A) and 11(B)). As a result, a pressure difference can be generated on the front and back of the work W2 such that the bonding surface side of the work W2 becomes a positive pressure by utilizing the internal pressure of the chamber 10, and the region where the pressure difference is generated can be expanded. Thereby, a cleavage Kw can be grown along the bonding surface between the two works W1 and W2.

[0043] According to such a peeling mechanism 2, starting from a crack (see FIG. 8) formed along the bonding surface between the two works W1 and W2 at a part of the outer peripheral edge of the laminate Ws, the cleavage Kw can be grown across the entire bonding surface in the chamber 10. As a result, the two works W1 and W2 can be peeled at the bonding surface (see FIG. 12).

[0044] [1-3] Position adjustment mechanism The position adjustment mechanism 3 is a mechanism different from the lifting mechanism (drive unit 13) provided in the chamber mechanism 1, and adjusts the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11. When combining these chamber forming portions (when forming the chamber 10), it is possible to perform the adjustment between the first position P1 and the handover position Ph, and after combining them (after forming the chamber 10), it is possible to perform the adjustment between the first position P1 and the second position P2. The details of the handover position Ph will be described later.

[0045] In this embodiment, the position adjustment mechanism 3 comprises a biasing unit 301 and a main adjustment unit 302 (see Figures 1(A) and 2), with one main adjustment unit 302 installed on each side of the chamber mechanism 1 (specifically, on both sides in the Y-axis direction; see Figure 2). These two main adjustment units 302 work in conjunction with each other to adjust their positions, thereby enabling the relative position Pr of the second chamber forming unit 12 to be changed while maintaining an appropriate orientation (in this case, a horizontal orientation) of the second chamber forming unit 12 (in other words, without causing tilting of the second chamber forming unit 12). Below, we will focus on the biasing unit 301 and one main adjustment unit 302 and describe their specific configurations.

[0046] The biasing unit 301 is installed in the first chamber forming unit 11, and when the second chamber forming unit 12 descends due to the action of the drive unit 13 to form the chamber 10, the biasing unit 301 takes over from the drive unit 13 just before the second chamber forming unit 12 joins with the first chamber forming unit 11 and supports it from below (see Figure 5(A)). In this embodiment, the biasing unit 301 is a support unit 301Q that is spring-biased in the first direction D1. Furthermore, the relative position Pr of the second chamber forming unit 12 when the biasing unit 301 takes over the support from below of the second chamber forming unit 12 from the drive unit 13 is defined as the takeover position Ph.

[0047] The main adjustment section 302 comprises a pair of movable parts 31A and 31B and a pair of cam structures 32A and 32B (see Figure 1(A)).

[0048] The movable parts 31A and 31B are both installed on the side surface of the first chamber forming part 11. The movable part 31A is configured to be capable of translational movement in the second direction D2 (which coincides with the X-axis direction in this embodiment) perpendicular to the first direction D1. The movable part 31B is configured to move in the reverse direction in conjunction with the movable part 31A when the movable part 31A moves in the second direction D2. More specifically, the ball screw 310 is installed on the side surface of the first chamber forming part 11 with its axial direction coinciding with the second direction D2, and a right-handed screw portion and a left-handed screw portion are formed on its screw shaft 311. The movable part 31A is fixed to the nut 312A that moves one screw portion, and the movable part 31B is fixed to the nut 312B that moves the other screw portion. Also, the movable parts 31A and 31B are both slidably supported by the guide rail 313 so that their proper postures are maintained even during movement.

[0049] The cam structure 32A is provided on the movable part 31A and the side surface of the second chamber forming part 12, and is configured to convert the translational movement of the movable part 31A in the second direction D2 into the translational movement of the second chamber forming part 12 toward the first position P1 (here, in the direction opposite to the first direction D1).

[0050] Specifically, as the cam (prime mover) constituting the cam structure 32A, an inclined surface 321A facing diagonally downward to the right in FIG. 1(A) is formed on the movable part 31A. Also, as the follower constituting the cam structure 32A, a roller 322A is installed on the side surface of the second chamber forming part 12. These inclined surface 321A and roller 322A are configured such that when the second chamber forming part 12 is supported from below by the urging part 301, the inclined surface 321A can be brought into contact with the circumferential surface of the roller 322A by moving the movable part 31A in the second direction D2 (see FIG. 6).

[0051] With this cam structure 32A, by moving the movable part 31A further in the second direction D2 after the inclined surface 321A contacts the circumferential surface of the roller 322A, the roller 322A can be moved relatively along the inclined surface 321A (see Figure 7(A)). As a result, the roller 322A can be moved in the opposite direction to the first direction D1 against the biasing force of the biasing part 301. By moving the roller 322A in this way, the second chamber forming part 12, which is the driven part of the cam structure 32A, can be displaced toward the first position P1 by the same amount as the displacement of the roller 322A.

[0052] Therefore, by controlling the amount of movement of the movable part 31A, it becomes possible to control the amount of displacement of the second chamber forming part 12, and as a result, it becomes possible to adjust the relative position Pr of the second chamber forming part 12 with respect to the first chamber forming part 11. In this embodiment, such adjustment of the relative position Pr of the second chamber forming part 12 (position adjustment process) is performed when the second chamber forming part 12 is joined to the first chamber forming part 11 (when the chamber 10 is formed) and when correcting any positional misalignment that occurs after they have been joined (i.e., after the chamber 10 has been formed) as needed.

[0053] The cam structure 32B is provided on the movable part 31B and the side surface of the second chamber forming part 12, and is configured to convert the translational motion of the movable part 31B in the opposite direction to the second direction D2 into translational motion of the second chamber forming part 12 directed toward the first position P1 (in this case, in the opposite direction to the first direction D1), and to displace the second chamber forming part 12 in the same direction and by the same amount as the displacement of the second chamber forming part 12 obtained by the cam structure 32A at that time.

[0054] Specifically, as a cam (driving link) constituting the cam structure 32B, a sloped surface 321B is formed on the movable part 31B, facing diagonally downward to the left in Figure 1(A), so as to be symmetrical with the sloped surface 321A. Furthermore, as a follower constituting the cam structure 32B, a roller 322B separate from roller 322A is installed on the side surface of the second chamber forming part 12. More specifically, this roller 322B has the same diameter as roller 322A and is installed so as to be in the same position (at the same height in this embodiment) as roller 322A in the first direction D1. Furthermore, these inclined surfaces 321B and roller 322B are configured such that, when the second chamber forming section 12 is supported from below by the biasing section 301, the movable section 31B is moved in the opposite direction to the second direction D2 in conjunction with the movable section 31A, so that the inclined surface 321B can be brought into contact with the circumferential surface of roller 322B at the same time that the inclined surface 321A comes into contact with the circumferential surface of roller 322A by the cam structure 32A (see Figure 6).

[0055] With this cam structure 32B, after the inclined surface 321B contacts the circumferential surface of the roller 322B, the movable part 31B is moved further in the opposite direction to the second direction D2 in conjunction with the movable part 31A, thereby allowing the roller 322B to move relatively along the inclined surface 321B (see Figure 7(A)). As a result, the roller 322B can be moved in the same direction and by the same amount of displacement as the roller 322A. Therefore, in the cam structure 32B as well, the second chamber forming part 12, which is its driven link (a driven link common to the cam structure 32A), can be moved toward the first position P1 by the same amount of displacement as the second chamber forming part 12 obtained by the cam structure 32A at that time.

[0056] Therefore, with this configuration of the position adjustment mechanism 3, it becomes possible to adjust the position of the second chamber forming section 12 at multiple locations in the same direction with the same amount of displacement. As a result, it becomes possible to adjust the position while maintaining the appropriate orientation of the second chamber forming section 12 (in this embodiment, a horizontal orientation) (in other words, without causing tilting of the second chamber forming section 12).

[0057] Furthermore, according to the position adjustment mechanism 3 described above, the position adjustment mechanism 3 can be configured as a separate mechanism from the mechanism (lifting mechanism; in this embodiment, the drive unit 13 (air cylinder or hydraulic cylinder)) that enables the relative proximity and separation of the second chamber forming section 12 to the first chamber forming section 11. Using such a position adjustment mechanism 3, it becomes possible to adjust the position of the second chamber forming section 12 specifically when the chamber 10 is being formed (including immediately before the formation of the chamber 10). Therefore, it becomes unnecessary to have the lifting mechanism (drive unit 13) have a function to adjust the relative position Pr of the second chamber forming section 12 with high precision, and the lifting mechanism (drive unit 13) can be configured with a simpler mechanism such as an air cylinder or hydraulic cylinder instead of a ball screw. As a result, the device can be simplified and miniaturized, and safety can be improved by using an air cylinder or hydraulic cylinder in the lifting mechanism (drive unit 13). Moreover, the position adjustment mechanism 3 itself can be made thin along the side surface of the chamber mechanism 1.

[0058] Furthermore, in this embodiment, the movable part 31A is configured to move to a retracted position that avoids collision with the cam component (roller 322A) on the second chamber forming part 12 side of the cam structure 32A when the second chamber forming part 12 moves relative to the second position P2 and the third position P3 (see Figures 1(A) and 5(A)). Also, the movable part 31B is configured to move in conjunction with the movement of the movable part 31A to a retracted position that avoids collision with the cam component (roller 322B) on the second chamber forming part 12 side of the cam structure 32B when the movable part 31A moves to the retracted position.

[0059] With this configuration, it becomes possible to perform the function of the position adjustment mechanism 3 without interfering with the function of the lifting mechanism (drive unit 13).

[0060] [1-4] Detection Sensor The detection sensor 4 (see Figures 1(A) and 1(B)) includes a displacement sensor 41 that detects the relative position Pr of the second chamber forming section 12 with respect to the first chamber forming section 11. In this embodiment, the displacement sensor 41 is a contact type sensor installed in the first chamber forming section 11 and detects the position of the opposing surface 12s on the second chamber forming section 12 side as the relative position Pr of the second chamber forming section 12 by contacting the opposing surface 12s from below (see Figures 9(A) and 9(B)) in the first direction D1. A non-contact type displacement sensor 41 may also be used.

[0061] [1-5] Control Device The control device 5 (see Figure 1(B)) consists of a processing device (such as a CPU) and a storage device (such as RAM or ROM), and controls each part of the peeling device (chamber mechanism 1, peeling mechanism 2, position adjustment mechanism 3, detection sensor 4, etc.) according to a control program installed in the peeling device. In this embodiment, the position adjustment process and the peeling process are performed by the control device 5. Details of these processes will be described below.

[0062] Here, the control program described above may be stored in a readable state on a portable storage medium (e.g., flash memory) before being installed in the peeling device, or it may be stored in a downloadable state on another server or the like. Furthermore, the control processing performed by the control device 5 (such as position adjustment processing and peeling processing) is not limited to being implemented by software through the execution of the program, but may also be implemented by hardware through processing circuits built within the peeling device.

[0063] <Position Adjustment Process> The position adjustment process is started when the laminate Ws is placed on the stage section 20, and then the relative position Pr of the second chamber forming section 12 with respect to the first chamber forming section 11 reaches the handover position Ph (i.e., when the biasing section 301 takes over the support from below of the second chamber forming section 12 from the drive section 13; see Figures 5(A) and 5(B)).

[0064] When the position adjustment process is started, the control device 5 rotates the screw shaft 311 of the ball screw 310, thereby linking the movable parts 31A and 31B and moving them outward in directions away from each other (same and opposite directions to the second direction D2) (see Figure 6). As a result, the inclined surface 321A (cam) provided on the movable part 31A comes into contact with the roller 322A (follower), and at the same time, the inclined surface 321B (cam) provided on the movable part 31B comes into contact with the roller 322B (follower).

[0065] Subsequently, the control device 5 rotates the screw shaft 311 further, causing the movable parts 31A and 31B to move in conjunction and further outward (see Figure 7(A)). This moves the roller 322A relatively along the inclined surface 321A, and as a result, moves the roller 322A in the opposite direction to the first direction D1 against the biasing force of the biasing part 301. At the same time, the roller 322B moves relatively along the inclined surface 321B, and as a result, moves the roller 322B in the same direction as the roller 322A by the same amount of displacement.

[0066] In this way, the control device 5 displaces the second chamber forming section 12, which is a driven link common to the cam structures 32A and 32B, toward the first position P1 by the same amount as the displacement of the rollers 322A and 322B, while maintaining an appropriate posture (horizontal posture in this embodiment), thereby merging the second chamber forming section 12 with the first chamber forming section 11 (see Figure 7(A)).

[0067] As a result, the chamber 10 is formed, and the pad 22 is pressed against the back surface of the workpiece W2 (the surface opposite to the bonding surface) (see Figures 7(B) and 8). Furthermore, the seal portion 26 is pressed against the back surface of the workpiece W2, thereby dividing the space within the chamber 10 into an inner seal region Rg and an outer seal region Rh, and sealing the space between these regions (see Figure 8).

[0068] At this time, the control device 5 adjusts the relative position Pr of the second chamber forming section 12 to coincide with a predetermined position Pz (see Figure 9(B)) set between the first position P1 and the second position P2, so that the amount of compression of the pad 22 itself becomes an appropriate value (in other words, so that the pad 22 is in a moderately compressed state). Specifically, the control device 5 adjusts the relative position Pr of the second chamber forming section 12 to coincide with the predetermined position Pz by controlling the positions of the movable parts 31A and 31B based on the output of the displacement sensor 41.

[0069] Then, with the chamber mechanism 1 in this positional adjustment state, the peeling process described below is started. On the other hand, in the peeling process, as a process necessary to grow the crack Kw, in the initial stage (before starting peeling of the two workpieces W1 and W2), the internal pressure of the seal-out region Rh inside the chamber 10 is increased to a predetermined pressure necessary for peeling using the pressure difference with the back side of the workpiece W2. As a result, a force is generated in the first chamber forming section 11 and the second chamber forming section 12 that tries to pull them apart. Consequently, there is a risk that the chamber 10 itself will expand at that time, or in other words, the relative position Pr of the second chamber forming section 12 may change in a direction away from the first chamber forming section 11. For this reason, even if the compression amount of the pad 22 itself is adjusted to an appropriate value, if the internal pressure of the seal-out region Rh is increased afterward, the compression amount of the pad 22 itself will decrease, weakening the pressing force on the workpiece W2, which may cause peeling defects when the crack Kw is grown. Thus, the expansion of the chamber 10 may adversely affect the processing within the chamber 10.

[0070] Therefore, even when the internal pressure of the seal-external region Rh inside the chamber 10 is raised to a predetermined pressure in the initial stage of the peeling process, the control device 5 controls the positions of the movable parts 31A and 31B based on the output of the displacement sensor 41, thereby adjusting the relative position Pr of the second chamber forming section 12 to coincide with the predetermined position Pz. Such position adjustments may be performed not only in the initial stage of the peeling process, but also as needed each time the relative position Pr of the second chamber forming section 12 deviates from the predetermined position Pz, or each time the amount of deviation from the predetermined position Pz exceeds a predetermined width, until the peeling is completed.

[0071] This type of position adjustment makes it possible to align the relative position Pr of the second chamber forming section 12 with a predetermined position Pz when forming the chamber 10. Furthermore, even if the relative position Pr of the second chamber forming section 12 shifts from the predetermined position Pz after the formation of the chamber 10, it becomes possible to correct the positional shift from the predetermined position Pz as needed.

[0072] Therefore, according to this embodiment, it is possible to simplify and miniaturize the apparatus equipped with the chamber 10 (in this case, a peeling apparatus or chamber apparatus capable of forming the chamber 10) while suppressing the expansion and contraction of the chamber 10 itself due to changes in internal pressure as needed.

[0073] <Peeling Process> The peeling process is started after the chamber 10 is formed by the position adjustment process described above (see Figure 7(B)). Therefore, at the start of the peeling process, the seal portion 26 is pressed against the back surface of the workpiece W2, thereby dividing the space inside the chamber 10 into an inner seal region Rg and an outer seal region Rh, and sealing the space between these regions with the seal portion 26 (see Figure 8). The crack that triggers peeling (growth of crack Kw) (see Figure 8) is created at a position close to the ventilation opening 23A on the outer edge of the laminate Ws using a well-known generation means 6 (for example, see Patent Document 1). Furthermore, the formation of such a crack (trigger creation) may be performed before the formation of the chamber 10, or after the formation of the chamber 10 but before the start of the peeling process.

[0074] When the peeling process is started, the control device 5 sets the position of the piston 241 in the cylinder chamber 24 to the starting position Ps (the position between the vent 23A and the adjacent vent 23B) (see Figure 10(A)).

[0075] Subsequently, the control device 5 controls the pressure boosting unit 25B to increase the internal pressure of the second space S2 within the cylinder chamber 24, thereby increasing the pressure in all the slit grooves 21B through the vent 23B, and the resulting increased pressure strongly presses the entire pad 22 against the workpiece W2 (see Figures 10(A) and 10(B)). As a result, the overall amount of compression of the pad 22 itself increases, and the pressing force against the entire workpiece W2 is strengthened.

[0076] Next, the control device 5 controls the internal pressure adjustment unit 14 to raise the internal pressure of the seal-external region Rh within the chamber 10 to a predetermined pressure necessary for peeling using the pressure difference with the back side of the workpiece W2 (see Figure 10(B)). At this time, as described above, the control device 5 adjusts the relative position Pr of the second chamber forming unit 12 to coincide with the predetermined position Pz during the position adjustment process.

[0077] Subsequently, the control device 5 causes the peeling mechanism 2 to perform peeling (peeling within the chamber 10) on the two workpieces W1 and W2.

[0078] Specifically, the control device 5 controls the pressure reduction unit 25A to lower the internal pressure of the first space S1 in the cylinder chamber 24, thereby reducing the pressure inside the seal inner region Rg through the vent 23A and the annular groove 21A. This creates a pressure difference between the seal inner region Rg and the seal outer region Rh, where the seal outer region Rh side is under positive pressure. This pressure difference is used to bring the back surface of the workpiece W2 into close contact with the surface of the pad 22 (see Figure 10(B)). Figure 10(B) shows the case where the crack Kw grows along the seal inner region Rg to near the pad 22 due to the close contact of the workpiece W2 with the surface of the pad 22.

[0079] Next, the control device 5 moves the piston 241 through the shaft 242 from the starting position Ps to the ending position Pt (in this case, in the X-axis direction) (see Figure 11(A)), thereby expanding the occupied area of ​​the first space S1 within the cylinder chamber 24. As a result, starting with the vent 23B closest to the vent 23A, the space within the cylinder chamber 24 leading to the vent 23B is switched from the second space S2 to the first space S1. In this way, starting with the slit groove 21B closest to the vent 23A, the state within the slit groove 21B is switched from a pressurized state to a depressurized state.

[0080] As a result, a pressure difference is generated between the slit groove 21B and the seal outer region Rh (crack Kw), starting from the slit groove 21B closest to the vent 23A, causing the seal outer region Rh to be in positive pressure (i.e., generating an attractive force in the slit groove 21B). Then, by using this pressure difference to elastically deform the pad 22, the crack Kw is grown along the bonding surface (see Figures 11(A) and 11(B)). Through this process, the crack Kw is grown across the entire bonding surface in the chamber 10, causing the two workpieces W1 and W2 to be separated at the bonding surface (see Figure 12).

[0081] [2] Modified Versions [2-1] First Modified Version In the position adjustment mechanism 3 described above, the cam structure 32A is not limited to a combination of a cam and follower formed therein, where the inclined surface 321A formed on the movable part 31A is the cam and the roller 322A installed on the side surface of the second chamber forming part 12 is the follower, but may be appropriately changed to another combination that can perform the same function. The same applies to the cam structure 32B.

[0082] Figures 13(A) to 13(D) are conceptual diagrams showing four different modifications of the cam structure 32A. These modifications can also be applied to the cam structure 32B.

[0083] Figure 13(A) shows the case where the follower of the cam structure 32A is changed to an inclined surface 323. In this case, by moving the movable part 31A in the second direction D2, the inclined surface 321A (cam) is brought into surface contact with the inclined surface 323 (follower) (see the right diagram in Figure 13(A)). Then, by moving the movable part 31A further in the second direction D2, it is made to slide along the inclined surface 323 (follower) while maintaining surface contact, and as a result, the inclined surface 323 (follower) can be moved in the opposite direction to the first direction D1.

[0084] Figure 13(B) shows the configuration of Figure 13(A) in which a rolling mechanism 324 (such as a roller) is provided on the inclined surface 323 (follower). With this configuration, the sliding of the inclined surface 321A (cam) relative to the inclined surface 323 (follower) is improved.

[0085] Figure 13(C) shows a case where the follower of the cam structure 32A is composed of a linear guide 325, a block portion 326, and a receiving portion 327. Specifically, the block portion 326 is slidably installed on the inclined surface 321A via the linear guide 325. The receiving portion 327 is installed on the side surface of the second chamber forming portion 12 and is configured to receive the block portion 326 midway when the movable portion 31A moves in the second direction D2 (see the right diagram in Figure 13(C)), thereby allowing the subsequent movement of the block portion 326 (movement resulting from sliding relative to the inclined surface 321A) to be transmitted directly to the second chamber forming portion 12.

[0086] In the example shown in Figure 13(C), the receiving portion 327 is formed in an L-shape. This allows the receiving portion 327 to receive the block portion 326, and then, when the block portion 326 slides relative to the inclined surface 321A (cam) and moves in the opposite direction to the first direction D1, the movement of the block portion 326 at that time can be directly transmitted to the second chamber forming portion 12 via the receiving portion 327.

[0087] Figure 13(D) shows the case where the relationship between the cam and follower for the inclined surface 321A and roller 322A in the above-described embodiment is reversed (i.e., a reverse cam configuration).

[0088] [2-2] Second Modification In the position adjustment mechanism 3 described above, the movable part 31B may be configured to move in the same direction in conjunction with the movable part 31A. Specifically, the screw shaft 311 may be configured such that the two screw portions formed thereon (the two screw portions into which the nuts 312A and 312B are screwed) are either right-hand threads or left-hand threads.

[0089] In this case, the cam structure 32B is modified as appropriate to have a corresponding configuration. Specifically, the cam structure 32B is configured so that even when the movable part 31B is modified to move in the same direction as the movable part 31A, the second chamber forming part 12 can be displaced in the same direction and by the same amount as the displacement of the second chamber forming part 12 obtained by the cam structure 32A.

[0090] As another variation, the movable parts 31A and 31B may be configured to selectively switch between moving in opposite directions in conjunction with each other and moving in the same direction. Specifically, the two screw parts described above may be connected via a switching gear so that they can selectively switch between rotating in the same direction in conjunction with each other and rotating in opposite directions.

[0091] With this switchable configuration, when the position adjustment mechanism 3 adjusts the relative position Pr by moving the movable parts 31A and 31B in opposite directions, even if a misalignment occurs between the two cam structures 32A and 32B for some reason with respect to the displacement of the second chamber forming part 12, it becomes possible to return to a state without misalignment by moving the two movable parts 31A and 31B in the same direction and thereby adjusting the position of the midpoint that bisects the distance between the two movable parts 31A and 31B.

[0092] Furthermore, when the position adjustment mechanism 3 adjusts the relative position Pr by moving the movable parts 31A and 31B in the same direction, if a misalignment occurs between the two cam structures 32A and 32B for any reason regarding the displacement of the second chamber forming part 12, the two movable parts 31A and 31B can be moved in opposite directions, thereby adjusting the distance between the two movable parts 31A and 31B and returning to a state without misalignment.

[0093] [2-3] Figure 14 of the third modified example is a cross-sectional view of the peeling device according to the third modified example (a cross-sectional view along the same line I-I shown in Figure 2). As shown in this figure, a surface irregularity-relieving layer 27 may be formed on the surface of the pad 22 to reduce irregularities that may occur on the surface when the pad 22 is elastically deformed by a pressure difference (suction force). As an example, the surface irregularity-relieving layer 27 is formed by attaching a resin plate (for example, a resin plate with a thickness of about 1 to 1.5 mm) to the surface of the pad 22.

[0094] According to the third modification, even if the workpiece W2 is thin and easily deformed, it becomes possible to maintain the portion peeled off from the workpiece W1 by the growth of the crack Kw in as flat a state as possible. Furthermore, by forming an unevenness-relieving layer 27 (such as a resin plate) on the surface of the pad 22, foreign matter (dust, dirt, etc.) that was originally attached to the pad 22, as well as wear particles of the pad 22 itself that are generated by repeated elastic deformation of the pad 22, can be sealed to the pad 22 side by the unevenness-relieving layer 27. As a result, it becomes possible to prevent these foreign matter and wear particles from being transferred to the workpiece W2 during the peeling process and adversely affecting the workpiece W2.

[0095] [2-4] Figure 15 of the fourth modified example is a conceptual diagram showing a peeling device according to the fourth modified example. As shown in this figure, the vent 23A may be connected to an internal pressure adjustment section 25C (at least including a pressure reduction section) different from the pressure reduction section 25A and the pressure increase section 25B, without being exposed into the cylinder chamber 24. With this configuration, it becomes possible to reduce the pressure inside the annular groove 21A independently of the position of the piston 241, in other words, independently of the control that reduces or increases the pressure inside the slit groove 21B through the cylinder chamber 24.

[0096] [2-5] Fifth Modification The chamber mechanism 1 and position adjustment mechanism 3 described above, as well as the chamber device equipped therewith, can be applied not only to peeling devices but also to various devices that require an openable and closable chamber 10.

[0097] The above-described embodiments and modifications should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims, rather than by the above-described embodiments and modifications. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the claims.

[0098] Furthermore, from the above-described embodiments and modifications, the subject matter of the invention may not be limited to the chamber device and the position adjustment mechanism 3, but may also include some or all of the components of the peeling mechanism 2 and the peeling device equipped therewith, or some or all of the position adjustment process and peeling process (including the corresponding position adjustment method and peeling method), or even programs for performing them.

[0099] 1 Chamber mechanism 2 Delamination mechanism 3 Position adjustment mechanism 4 Detection sensor 5 Control device 6 Generation means 10 Chamber 11 First chamber forming section 12 Second chamber forming section 11s, 12s Opposing surfaces 12t Back surface 13 Drive section 14 Internal pressure adjustment section 20 Stage section 21A Annular groove 21B Slit groove 22 Pad 23A, 23B Vent 24 Cylinder chamber 25A Pressure reduction section 25B Pressure increasing section 25C Internal pressure adjustment section 26 Seal section 27 Unevenness relaxation layer 31A, 31B Movable section 32A, 32B Cam structure 41 Displacement sensor D1 First direction D2 Second direction Kw Crack Lx Imaginary line P1 First position P2 Second position P3 Third position Ph Takeover position Pr Relative position Ps: Starting position Pt: Ending position Pz: Determined position Rg: Seal inner area Rh: Seal outer area S1: First space S2: Second space W1, W2: Workpiece Ws: Laminate 101: First recess 102: Second recess 103: Seal part 121: Raised part 121a: Surface 241: Piston 242: Shaft 301: Biasing part 301Q: Support part 302: Main adjustment part 310: Ball screw 311: Screw shaft 312A, 312B: Nut 313: Guide rail 321A, 321B: Inclined surface 322A, 322B: Roller 323: Inclined surface 324: Rolling means 325: Linear guide 326: Block part 327: Receiving part

Claims

1. A chamber device comprising: a chamber mechanism that includes a first chamber forming section and a second chamber forming section that can change their relative positional relationship in a first direction and form a chamber by joining together via an elastic seal section, wherein by utilizing the elasticity of the seal section, the relative position of the second chamber forming section with respect to the first chamber forming section can be changed between a first position and a second position further away, while maintaining the joined state of the chamber forming sections; and a position adjustment mechanism applicable to the chamber mechanism that enables adjustment of the relative position of the second chamber forming section between the first position and the second position, wherein the position adjustment mechanism comprises: a movable section installed in the first chamber forming section and configured to be capable of translational movement in a second direction perpendicular to the first direction; and a cam structure provided in the movable section and the second chamber forming section that converts the translational movement of the movable section in the second direction into translational movement of the second chamber forming section directed toward the first position.

2. The chamber mechanism is configured to open the chamber by relatively moving the second chamber forming portion to a third position further away from the second position, and the movable portion is configured to move to a retracted position that avoids collision with the cam component on the second chamber forming portion side that constitutes the cam structure when the second chamber forming portion moves relatively between the second position and the third position, according to claim 1.

3. The chamber device according to claim 1 or 2, further comprising: a second movable part installed in the first chamber forming part and configured to move in the same or opposite direction in conjunction with the movable part when the movable part moves in the second direction; and a second cam structure provided in the second movable part and the second chamber forming part, which converts the translational motion of the second movable part in the same or opposite direction as the second direction into translational motion of the second chamber forming part directed toward the first position, and at that time displaces the second chamber forming part in the same direction and by the same amount as the displacement of the second chamber forming part obtained by the cam structure.

4. The chamber device according to any one of claims 1 to 3, further comprising: a displacement sensor for detecting the relative position of the second chamber forming portion with respect to the first chamber forming portion; and a control device for adjusting the relative position of the second chamber forming portion to coincide with a predetermined position set between the first position and the second position by controlling the position of the movable portion based on the output of the displacement sensor.

5. A mechanism applicable to a chamber mechanism which includes a first chamber forming part and a second chamber forming part that can be joined together via an elastic seal part to form a chamber, and which can change the relative position of the second chamber forming part with respect to the first chamber forming part while maintaining the joined state of the chamber forming parts by utilizing the elasticity of the seal part, the position adjustment mechanism which adjusts the relative position of the second chamber forming part between the first position and the second position, the position adjustment mechanism comprising: a movable part installed in the first chamber forming part and configured to be able to move in translation in a second direction perpendicular to the first direction; and a cam structure provided in the movable part and the second chamber forming part which converts the translation of the movable part in the second direction into translation of the second chamber forming part directed toward the first position.

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