Film forming device

Abstract

A film forming device (100), comprising a film forming unit (10). The film forming unit (10) comprises a film forming chamber (1) and a substrate support mechanism (2) arranged in the film forming chamber (1). The film forming chamber (1) comprises a main housing (11), a first door (12), and a second door (13). A cavity having a first opening (114) at one end and a second opening (115) at the other opposite end is defined in the main housing (11); the first door (12) is connected to the main housing (11) and closes the first opening (114); and the second door (13) is connected to the main housing (11) and closes the second opening (115). The first door (12) is detachably connected to the main housing (11), and the first door (12) can slide to a position out of contact with the main housing (11) so as to open the first opening (114). Optionally, the second door (13) is detachably connected to the main housing (11), and the second door (13) can slide to a position out of contact with the main housing (11) so as to open the second opening (115).

Description

Film forming equipment

[0001] Related applications

[0002] This application claims priority to Chinese patent application No. 202411433714.1, filed on October 14, 2024, entitled "Film Forming Equipment", the entire contents of which are incorporated herein by reference. Technical Field

[0003] This application relates to the field of forming thin films on the surface of a substrate, and in particular to film-forming equipment. Background Technology

[0004] Vacuum coating equipment is a device that coats a substrate using physical or chemical methods in a vacuum environment. In related technologies, the substrate support mechanism and the coating material supply mechanism of the vacuum coating equipment are jointly installed inside the process chamber, and the distance between the coating material supply mechanism and the substrate support mechanism is relatively small. Maintenance and cleaning of vacuum coating equipment is difficult, requiring the removal of some structural components, resulting in lengthy maintenance times and impacting equipment efficiency. Summary of the Invention

[0005] According to various embodiments of this application, a film-forming apparatus is provided.

[0006] A film-forming apparatus includes a film-forming unit; the film-forming unit includes:

[0007] Mounting base;

[0008] A film-forming chamber includes a main shell, a first door, and a second door. The main shell is fixedly mounted on a mounting base. The main shell includes a bottom wall, two side walls connected to opposite sides of the bottom wall, and a top wall connected to the side walls at the end furthest from the bottom wall. The bottom wall, side walls, and top wall together define a cavity with a first opening at one end and a second opening at the opposite end. The first door is connected to the main shell and closes the first opening. The second door is connected to the main shell and closes the second opening. The first door, second door, and main shell can form an airtight film-forming chamber. The relative orientation of the first opening and the second opening is a first direction.

[0009] The substrate support mechanism is located in the film-forming chamber and is used to support the substrate for film formation.

[0010] In some embodiments, the first door is detachably connected to the main housing, and the first door is slidably disposed on the mounting base. The first door can slide to a point where it is no longer in contact with the main housing in order to open the first opening.

[0011] In some embodiments, the second door is detachably connected to the main housing and is slidably disposed on the mounting base. The second door can slide to a point where it does not contact the main housing in order to open the second opening.

[0012] In some embodiments, the film-forming unit further includes a moving component; the moving component includes a first slide rail and a first slider, the first slide rail is disposed on the mounting base and extends along a first direction, the first slider is slidably connected to the first slide rail, the first door is connected to the first slider, the first slider supports the first door on the first slide rail and enables the first door to slide along the first slide rail.

[0013] In some embodiments, the film-forming unit further includes a moving component; the moving component includes a second slide rail and a second slider, the second slide rail is disposed on the mounting base and extends along a first direction, the second slider is slidably connected to the second slide rail, the second door is connected to the second slider, the second slider supports the second door on the second slide rail and enables the second door to slide along the second slide rail.

[0014] In some embodiments, the moving component further includes a first moving drive member, which is connected to the first door body or the first slider in a transmission manner, and is used to drive the first door body to slide along the first slide rail.

[0015] In some embodiments, the moving component further includes a second moving drive member, which is connected to the second door or the second slider in a transmission manner, and is used to drive the second door to slide along the second slide rail.

[0016] In some embodiments, the substrate support mechanism is disposed on the first door body, and the first door body can drive the substrate support mechanism to be inserted into or removed from the film-forming chamber through the first opening;

[0017] The film-forming unit also includes a gas supply device disposed in the film-forming chamber and configured to supply film-forming material into the film-forming chamber.

[0018] In some embodiments, the base support mechanism includes a support cylinder configured to rotate about its own central axis;

[0019] The relative orientation of the two side walls is the second orientation, and the relative orientation of the bottom wall and the top wall is the third orientation. When the support cylinder is installed in the film-forming chamber, the central axis of the support cylinder is parallel to the first orientation. The two sides of the support cylinder along the second orientation face the two side walls respectively, and the two sides of the support cylinder along the third orientation face the bottom wall and the top wall respectively. The first orientation, the second orientation, and the third orientation are perpendicular to each other.

[0020] In some embodiments, the film-forming chamber further includes two support arms connected to the first door body and a support beam connected to the two support arms. The two support arms are spaced apart along a second direction. The first door body, the two support arms, and the support beam together define an installation space. The support cylinder is located within the installation space. One axial end of the support cylinder is rotatably connected to the first door body, and the other axial end of the support cylinder is rotatably connected to the support beam.

[0021] In some embodiments, the support beam is supported on the first side of the two support arms in a third direction; wherein the first side of the support arm is the side facing the top wall when inserted into the film-forming chamber.

[0022] In some embodiments, a connecting portion is provided in the middle of the second side of the support beam along a third direction, and the connecting portion is connected to the other end of the support cylinder in the axial direction; wherein, the second side of the support beam is the side facing the bottom wall when it is installed in the film-forming chamber.

[0023] In some embodiments, the gas supply device includes a spray element disposed in a film-forming chamber, the spray element being configured to supply gas toward the outer peripheral wall of the support cylinder.

[0024] In some embodiments, the projected profile of the outer peripheral wall of the support cylinder along the first direction is circular; the spraying component includes a spraying plate, the spraying plate having a first surface, the projected profile of the first surface along the first direction being an arc, and the radius of the arc of the first surface being greater than the radius of the circle of the outer peripheral wall of the support cylinder.

[0025] When the support cylinder is installed in the film-forming chamber, the first surface of the spray plate surrounds part of the outer peripheral wall of the support cylinder and has a first gap with the outer peripheral wall of the support cylinder.

[0026] In some embodiments, the ratio of the projected area of ​​the first surface on the outer peripheral wall of the support cylinder along the radial direction of the support cylinder to the surface area of ​​the outer peripheral wall of the support cylinder is 1 / 5 to 2 / 3.

[0027] In some embodiments, when the support cylinder is installed in the film-forming chamber, the support arm is located between the side wall and the spray plate along the second direction, and the spray plate is located between the support arm and the support cylinder.

[0028] In some embodiments, the first gap is 2 mm to 10 mm.

[0029] In some embodiments, the base support mechanism further includes at least two support guide rollers, the axial direction of which is parallel to the first direction, and one axial end of the support guide roller is connected to the first door body, and the other axial end of the support guide roller is connected to the support beam.

[0030] In some embodiments, at least two support guide rollers are disposed on the first side of the support cylinder along a third direction, and at least two support guide rollers are spaced apart along a second direction; wherein, the first side of the support cylinder is the side facing the top wall when it is installed in the film-forming chamber.

[0031] In some embodiments, at least two support guide rollers are arranged at intervals along a third direction.

[0032] In some embodiments, the base support mechanism further includes a support drive member, which is disposed on the first door body and is connected to the support cylinder in a transmission manner. The support drive member is used to drive the support cylinder to rotate.

[0033] In some embodiments, the projected profile shape of the top wall along the first direction is arc-shaped.

[0034] In some embodiments, the film-forming apparatus further includes:

[0035] The unwinding / rewinding unit includes an unwinding / rewinding chamber and an unwinding shaft and a winding shaft disposed within the unwinding / rewinding chamber; and

[0036] The transition unit includes a transition chamber and a valve structure disposed within the transition chamber. The transition chamber is connected between the take-up and untake-up chamber and the film forming chamber. The interior of the transition chamber forms a conduction channel from the take-up and untake-up chamber to the film forming chamber. The valve structure is used to open or close the conduction channel.

[0037] The aforementioned film-forming equipment features a detachable sliding door structure for the film-forming chamber. This allows the first and / or second doors to be operated to open the chamber, facilitating the removal and relocation of components such as the substrate support mechanism. This also makes it easier to hoist, disassemble, maintain, or repair the substrate support mechanism. The disassembly and assembly are simple and convenient, and the interior of the film-forming chamber is easy to clean and maintain. This makes maintenance quick and easy, reduces maintenance time, improves maintenance efficiency, and ultimately enhances the overall efficiency of the film-forming equipment.

[0038] The above description is an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, specific embodiments of this application are given below. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or conventional technology, the drawings used in the description of the embodiments or conventional technology will be briefly introduced below. Obviously, the drawings described below are embodiments of this application. For those skilled in the art, other drawings can be obtained based on the disclosed drawings without creative effort. In the drawings:

[0040] Figure 1 is a three-dimensional structural schematic diagram of a film-forming device according to some embodiments of this application.

[0041] Figure 2 is a front view of a film-forming apparatus according to some embodiments of this application.

[0042] Figure 3 is a top view of a film-forming apparatus according to some embodiments of this application.

[0043] Figure 4 is a cross-sectional view of a film-forming apparatus according to some embodiments of this application.

[0044] Reference numerals in the attached figures: 100, Film-forming equipment; 10, Film-forming unit; 1, Film-forming chamber; 101, Film-forming cavity; 11, Main shell; 111, Bottom wall; 112, Side wall; 113, Top wall; 114, First opening; 115, Second opening; 12, First door; 120, First side; 121, First door panel; 122, First base; 123, First reinforcing plate; 13, Second door; 131, Second door panel; 132, Second base; 133, Second reinforcing plate 14. Plate; 15. Support arm; 16. Support beam; 17. Connecting part; 2. Base support mechanism; 28. Support cylinder; 29. ​​Support guide roller; 30. Mounting seat; 41. Moving assembly; 42. First slide rail; 43. First slider; 44. Second slide rail; 45. First moving drive component; 46. Second moving drive component; 5. Gas supply device; 51. Spray component; 511. Spray plate; 510. First surface; 20. Take-up and unwinding unit; 201. Take-up and unwinding chamber; 202. Take-up shaft; 203. Unwinding shaft; 204. Take-up and unwinding cavity; 205. Take-up guide roller; 206. Unwinding guide roller; 30. Transition unit; 301. Transition chamber; 302. Valve structure; 200. Base material. Detailed Implementation

[0045] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0046] In the description of this application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0049] In the description of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" can mean that the first feature is directly above or diagonally above the second feature, or that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or that the first feature is at a lower horizontal level than the second feature.

[0050] It should be noted that an element is referred to as being "fixed to" or "set on" another element, which may be directly on the other element or may also include an intervening element. An element is considered to be "connected" to another element, which may be directly connected to the other element or may also include an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0051] In related technologies, the substrate support mechanism and the coating material supply mechanism of vacuum coating equipment are jointly installed inside the process chamber, and the distance between the coating material supply mechanism and the substrate support mechanism is small. Maintenance and cleaning of vacuum coating equipment is difficult, requiring the removal of some structural components, resulting in lengthy maintenance times and impacting equipment efficiency.

[0052] Referring to Figures 1 to 4, Figure 1 shows a three-dimensional structural schematic diagram of the film-forming device 100 in some embodiments of this application, Figure 2 shows a front view of the film-forming device 100 in some embodiments of this application, Figure 3 shows a top view of the film-forming device 100 in some embodiments of this application, and Figure 4 shows a cross-sectional view of the film-forming device 100 in some embodiments of this application. The film-forming device 100 provided in the embodiments of this application includes a film-forming unit 10; the film-forming unit 10 includes a mounting base 3, a film-forming chamber 1, and a substrate support mechanism 2. The film-forming chamber 1 includes a main housing 11, a first door 12, and a second door 13, and the main housing 11 is fixedly mounted on the mounting base 3. The main housing 11 includes a bottom wall 111, two side walls 112 connected to opposite sides of the bottom wall 111, and a top wall 113 connected to the side walls 112 at the end away from the bottom wall 111. The bottom wall 111, the side walls 112, and the top wall 113 together define a cavity with a first opening 114 at one end and a second opening 115 at the other end. A first door 12 is connected to the main housing 11 and closes the first opening 114, and a second door 13 is connected to the main housing 11 and closes the second opening 115. The first door 12, the second door 13, and the main housing 11 can form an airtight film-forming chamber 101. The relative orientation of the first opening 114 and the second opening 115 is a first direction. A substrate support mechanism 2 is disposed in the film-forming chamber 101 to support the substrate 200 for film formation. The first door 12 is detachably connected to the main housing 11 and is slidably mounted on the mounting base 3; the first door 12 can slide to a point where it is no longer in contact with the main housing 11 to open the first opening 114. And / or, the second door 13 is detachably connected to the main housing 11 and is slidably mounted on the mounting base 3; the second door 13 can slide to a point where it is no longer in contact with the main housing 11 to open the second opening 115.

[0053] As shown in Figures 1 to 3, the X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction. The X, Y, and Z directions are perpendicular to each other.

[0054] The film-forming unit 10 is used to deposit a thin film on the surface of the substrate 200 in a vacuum environment using a deposition process. For example, the deposition process may include atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), etc.

[0055] In the film-forming unit 10, the film-forming chamber 1 provides a reaction space for the thin film deposition process. Within the film-forming chamber 1, the main housing 11 has an internal cavity, and the main housing 11 has openings at opposite ends along a first direction that communicate with the cavity. One end of the opening is a first opening 114, and the other end is a second opening 115. A first door 12 is connected to the main housing 11 and closes the first opening 114, and a second door 13 is connected to the main housing 11 and closes the second opening 115, thereby enclosing and forming an airtight film-forming chamber 101. The bottom wall 111 of the main housing 11 forms the bottom inner wall of the film-forming chamber 101, the side walls 112 of the main housing 11 form the opposite inner walls of the film-forming chamber 101 along a second direction, and the top wall 113 of the main housing 11 forms the top inner wall of the film-forming chamber 101; the first door 12 and the second door 13 form the opposite inner walls of the film-forming chamber 101 along the first direction. The airtight film-forming chamber 101 can switch between atmospheric and vacuum environments. For example, the film-forming chamber 101 can be evacuated to make the process pressure inside the film-forming chamber 101 reach 1 to 10 Torr (Torr is a unit of pressure, 1 Torr is 1 millimeter of mercury (mmHg), which is equal to 133.3223684 Pa)), so that the film-forming chamber 101 is in the vacuum environment required by the deposition process.

[0056] The substrate support mechanism 2 is used to support the substrate 200 within the film-forming chamber 101 for surface coating of the substrate 200. For example, the substrate 200 can be a flexible thin film material that can be rolled up. For example, the substrate support mechanism 2 can include a roller support mechanism, a support platform, or a support bracket, etc.

[0057] When the film-forming equipment 100 is in use, the first door 12 closes the first opening 114, and the second door 13 closes the second opening 115, forming an airtight film-forming chamber 101 inside the film-forming chamber 1. Inside the film-forming chamber 101, the substrate 200 is supported on the substrate support mechanism 2, so that the film-forming chamber 101 is in a vacuum environment, and the film-forming material is provided to the surface of the substrate 200, thereby realizing the deposition of a thin film on the surface of the substrate 200.

[0058] Mounting base 3 provides the mounting foundation for film-forming chamber 1. Main housing 11 is fixed to mounting base 3, and the first opening 114 and second opening 115 of main housing 11 are arranged opposite each other along a first direction. First door 12 is located on the side of main housing 11 where the first opening 114 is located. Second door 13 is located on the side of main housing 11 where the second opening 115 is located.

[0059] In some cases, the first door 12 can be detachably connected to the main housing 11, and the first door 12 can be slidably mounted on the mounting base 3, while the second door 13 is not detachably connected to the main housing 11. Alternatively, the first door 12 can be not detachably connected to the main housing 11, while the second door 13 can be detachably connected to the main housing 11, and the second door 13 can be slidably mounted on the mounting base 3. Thus, either the first door 12 or the second door 13 can be detached from the main housing 11, forming a single-sided detachable sliding door structure. Another option is that both the first door 12 and the second door 13 can be detachably connected to the main housing 11, and both the first door 12 and the second door 13 can be slidably mounted on the mounting base 3. Both the first door 12 and the second door 13 can be detached from the main housing 11, forming a double-sided, openable, detachable sliding door structure. The first door body 12 and / or the second door body 13 may be slidably disposed on the mounting base 3 along the first direction, or along the second direction, the third direction or other directions. This application embodiment does not impose any limitations.

[0060] When maintaining the film-forming equipment 100, the first door 12 and / or the second door 13 can be disassembled from the main housing 11, and the first door 12 and / or the second door 13 can be slid until they are no longer in contact with the main housing 11, thereby opening the first opening 114 and / or the second opening 115. At this time, through the opened first opening 114 and / or the second opening 115, it is convenient to disassemble and remove components such as the substrate support mechanism 2 from the film-forming chamber 101, thereby facilitating the hoisting, disassembly, maintenance, or repair of the substrate support mechanism 2; at the same time, it is convenient to directly clean the process dust on the surface of the substrate support mechanism 2, and to facilitate the cleaning and maintenance of the inside of the film-forming chamber 101.

[0061] In some embodiments, for the double-sided, detachable sliding door structure, the first door 12 can be a drive side door, which can be used to install and drive the substrate support mechanism 2; the second door 13 can be a process chamber side door. Both the first door 12 and the second door 13 can be moved and opened independently. After operating the first door 12 to open the first opening 114, the substrate support mechanism 2 and the interior of the film-forming chamber 101 can be cleaned and maintained; after operating the second door 13 to open the second opening 115, the substrate 200 can be replaced or other maintenance operations that do not require major maintenance can be performed through the second opening 115. In this way, disassembly and assembly operations can be reduced, maintenance can be made more convenient and faster, and the efficiency of equipment use can be further improved.

[0062] The film-forming device 100 of this application embodiment adopts a detachable sliding door structure for the film-forming chamber 1. The first door 12 and / or the second door 13 are simple and convenient to assemble and disassemble from the main housing 11. When maintaining the film-forming device 100, the first door 12 and / or the second door 13 can be operated to open the film-forming chamber 101, making it convenient to disassemble and remove components such as the substrate support mechanism 2 from the film-forming chamber 101. This facilitates the hoisting, disassembly, maintenance, or repair of the substrate support mechanism 2, making disassembly and assembly simple and convenient. At the same time, it facilitates the cleaning and maintenance of the inside of the film-forming chamber 101, making maintenance convenient and quick, reducing maintenance time, improving maintenance efficiency, and helping to improve the utilization efficiency of the film-forming device 100.

[0063] In some embodiments, referring to Figures 1 to 3, the film-forming unit 10 further includes a moving component 4. The moving component 4 is used to slidably mount the first door 12 and / or the second door 13 onto the mounting base 3.

[0064] In some embodiments, the moving component 4 includes a first slide rail 41 and a first slider 42. The first slide rail 41 is disposed on the mounting base 3 and extends along a first direction. The first slider 42 is slidably connected to the first slide rail 41. The first door body 12 is connected to the first slider 42. The first slider 42 supports the first door body 12 on the first slide rail 41 and enables the first door body 12 to slide along the first slide rail 41.

[0065] The first door 12 is detachably connected to the main housing 11, and the first door 12 is slidably supported on the first slide rail 41 by the first slider 42, thereby slidably mounting the first door 12 on the mounting base 3. The first slide rail 41 is located on the side of the main housing 11 where the first opening 114 is provided, and the extending direction of the first slide rail 41 is parallel to the first direction. The first door 12 slides along the first slide rail 41, that is, the first door 12 can slide towards or away from the first opening 114 on the main housing 11 along the first direction.

[0066] In some embodiments, the moving component 4 includes a second slide rail 43 and a second slider 44. The second slide rail 43 is disposed on the mounting base 3 and extends along a first direction. The second slider 44 is slidably connected to the second slide rail 43. The second door body 13 is connected to the second slider 44. The second slider 44 supports the second door body 13 on the second slide rail 43 and enables the second door body 13 to slide along the second slide rail 43.

[0067] The second door 13 is detachably connected to the main housing 11, and is slidably supported on the second slide rail 43 by a second slider 44, thereby slidably mounting the second door 13 onto the mounting base 3. The second slide rail 43 is located on the side of the main housing 11 where the second opening 115 is located, and the extending direction of the second slide rail 43 is parallel to the first direction. The second door 13 slides along the second slide rail 43, that is, the second door 13 can slide towards or away from the second opening 115 of the main housing 11 along the first direction.

[0068] In some embodiments, the main housing 11 is fixed to the mounting base 3; the first slide rail 41 and the second slide rail 43 are disposed on the mounting base 3 and located on opposite sides of the main housing 11 along a first direction. For example, the mounting base 3 may include a ground rail, and the first slide rail 41 and the second slide rail 43 may include linear rails disposed on the ground rail.

[0069] By setting the first slide rail 41 and / or the second slide rail 43, the disassembly and assembly movements of the first door body 12 and / or the second door body 13 and the main housing 11 can be guided and limited. The first door body 12 and / or the second door body 13 can move smoothly and the disassembly and assembly with the main housing 11 can be simpler and more convenient, further improving maintenance efficiency, making maintenance convenient and quick, reducing maintenance time, and improving the utilization efficiency of the film forming equipment 100.

[0070] In some embodiments, referring to Figures 1 to 3, the moving component 4 further includes a first moving drive 45, which is connected to the first door 12 or the first slider 42 in a transmission manner; the first moving drive 45 is used to drive the first door 12 to slide along the first slide rail 41.

[0071] The first door body 12 is slidably supported on the first slide rail 41 by the first slider 42, and the first door body 12 is slidably mounted on the mounting base 3. The first moving drive component 45 may include a linear motion pair to drive the first door body 12 to move along a first direction. For example, the linear motion pair may include one of the following: ball screw, worm gear, rack and pinion, linear motor, hydraulic push rod, etc., as long as it can achieve linear drive.

[0072] In some embodiments, two first slide rails 41 may be provided, and the two first slide rails 41 are parallel to each other and spaced apart along a second direction; the first door body 12 is slidably supported on the two first slide rails 41; the first moving drive member 45 is disposed on the mounting base 3 and located between the two first slide rails 41. In this way, the support for the first door body 12 is more stable and reliable, the movement of the first door body 12 is smoother, and it is beneficial to improve the reliability of the disassembly and assembly of the first door body 12 and the main housing 11.

[0073] In some embodiments, referring to Figures 1 and 3, the moving component 4 further includes a second moving drive 46, which is connected to the second door 13 or the second slider 44 in a transmission manner; the second moving drive 46 is used to drive the second door 13 to slide along the second slide rail 43.

[0074] The second door body 13 is slidably supported on the second slide rail 43 by the second slider 44, and is slidably mounted on the mounting base 3. The second moving drive component 46 may include a linear motion pair to drive the second door body 13 to move along the first direction. For example, the linear motion pair may include one of the following: ball screw, worm gear, rack and pinion, linear motor, hydraulic push rod, etc., as long as it can achieve linear drive.

[0075] In some embodiments, two second slide rails 43 may be provided, which are parallel to each other and spaced apart along a second direction; the second door body 13 is slidably supported on the two second slide rails 43; the second moving drive member 46 is disposed on the mounting base 3 and located between the two second slide rails 43. In this way, the support for the second door body 13 is more stable and reliable, the movement of the second door body 13 is smoother, and it is beneficial to improve the reliability of the disassembly and assembly of the second door body 13 and the main housing 11.

[0076] By setting the first moving drive component 45 to drive the first door body 12 to slide and / or setting the second moving drive component 46 to drive the second door body 13 to slide, the movement of the first door body 12 and / or the second door body 13 is smoother, and the disassembly and assembly with the main housing 11 is simpler and more convenient, which is conducive to further improving maintenance efficiency.

[0077] In some embodiments, referring to Figures 1 and 2, the first door 12 includes a first door panel 121, a first base 122, and a first reinforcing plate 123. The first door panel 121 may have a first side surface 120. When the first door 12 is detachably covered at the first opening 114, the first door panel 121 is sealed to the main housing 11, and the first side surface 120 closes the first opening 114, which can improve the airtightness of the film-forming chamber 101. The first base 122 is connected to the bottom of the first door panel 121 and is located on the side of the first door panel 121 away from the first side surface 120. The first base 122 is used to connect the first slider 42 to slide the first door 12 on the first slide rail 41. The first reinforcing plate 123 is connected to the side of the first door panel 121 away from the first side surface 120 and the first base 122, and the width of the end of the first reinforcing plate 123 connected to the first base 122 is greater than the width of the end of the first reinforcing plate 123 away from the first base 122. For example, the first reinforcing plate 123 may include a triangular rib. In some embodiments, the structure of the second door 13 may be substantially the same as that of the first door 12, and the second door 13 includes a second door panel 131, a second base 132, and a second reinforcing plate 133. By providing the first reinforcing plate 123 and the second reinforcing plate 133, the structural strength of the first door 12 and the second door 13 can be improved, thereby increasing the reliability and service life of the film-forming equipment 100.

[0078] In some embodiments, referring to Figures 1 to 3, a substrate support mechanism 2 is disposed on a first door 12, and the first door 12 can drive the substrate support mechanism 2 to be inserted into or removed from the film-forming chamber 101 through a first opening 114. The film-forming unit 10 also includes a gas supply device 5, which is disposed in the film-forming chamber 1 and configured to supply film-forming material into the film-forming chamber 101.

[0079] The gas supply device 5 is used to supply vapor-phase film-forming material to the film-forming chamber 101 and the surface of the substrate 200 supported by the substrate support mechanism 2, so that the vapor-phase film-forming material can be adsorbed onto the surface of the substrate 200 and react to form a deposited thin film. The gas supply device 5 can supply the film-forming material into the film-forming chamber 101 in either a gas advection or spray mode, and there is no limitation on this.

[0080] When maintaining the film-forming equipment 100, the substrate support mechanism 2 can be removed from the film-forming chamber 101 along with the first door body 12, while the gas supply device 5 remains inside the film-forming chamber 101. This separation of the substrate support mechanism 2 and the gas supply device 5 facilitates direct cleaning of process dust from both surfaces, reducing the need for disassembly and reassembly of the gas supply device 5. Furthermore, removing the substrate support mechanism 2 from the film-forming chamber 101 facilitates its hoisting, disassembly, maintenance, or repair, making disassembly and installation convenient. After the substrate support mechanism 2 is removed from the film-forming chamber 101, it facilitates maintenance of the gas supply device 5 within the chamber. Thus, the maintenance of the film-forming equipment 100 is convenient and quick, reducing maintenance time and improving maintenance efficiency.

[0081] In some embodiments, referring to Figures 1 to 4, the substrate support mechanism 2 includes a support cylinder 21 configured to rotate about its own central axis. The relative orientation of the two side walls 112 is a second direction, and the relative orientation of the bottom wall 111 and the top wall 113 is a third direction. When the support cylinder 21 is inserted into the film-forming chamber 101, the central axis of the support cylinder 21 is parallel to the first direction. The two sides of the support cylinder 21 facing each other along the second direction face the two side walls 112, and the two sides of the support cylinder 21 facing each other along the third direction face the bottom wall 111 and the top wall 113, respectively. The first direction, the second direction, and the third direction are perpendicular to each other.

[0082] The support cylinder 21 is rotatably mounted on the first door body 12, and the first door body 12 can move and drive the support cylinder 21 to be inserted into or removed from the film-forming chamber 101.

[0083] When the support cylinder 21 is inserted into the film-forming chamber 101, the gas supply device 5 is located on the outer periphery of the support cylinder 21. The substrate 200 can be a flexible thin film material that can be rolled up. The substrate 200 can be supported on the outer peripheral wall of the support cylinder 21, thereby supporting the substrate 200 in the film-forming chamber 101 with a vacuum environment. At the same time, the support cylinder 21 can rotate around its central axis, driving the substrate 200 supported on the outer peripheral surface of the support cylinder 21 to move, thereby realizing the transport of the substrate 200. For example, the support cylinder 21 can be driven to rotate by a drive component such as a motor. In some embodiments, the support cylinder 21 can be configured as a rotating body, for example, the support cylinder 21 can be a cylindrical roller, a frustum-shaped roller, or a spindle-shaped roller. In the film-forming chamber 101, when the substrate 200 passes around the support cylinder 21, the gas supply device 5 supplies vapor-phase film-forming material to the surface of the substrate 200. The vapor-phase film-forming material reacts effectively with the surface of the substrate 200 to form a deposited thin film.

[0084] During maintenance, the support cylinder 21 is removed from the film-forming chamber 101 along with the first door body 12, while the gas supply device 5 remains in the film-forming chamber 101, so that the support cylinder 21 and the gas supply device 5 are far apart, making it convenient to directly clean the process dust on the surface of the support cylinder 21.

[0085] Thus, the embodiments of this application can provide a roller-wound vacuum coating equipment, which can improve film quality and production efficiency, and is convenient and quick to maintain, reducing maintenance time and improving maintenance efficiency, which is conducive to improving the utilization efficiency of the film forming equipment 100.

[0086] In some embodiments, referring to Figures 1 to 4, the film-forming chamber 1 further includes two support arms 14 connected to the first door body 12 and a support beam 15 connected to the two support arms 14. The two support arms 14 are spaced apart along a second direction, and the first door body 12, the two support arms 14, and the support beam 15 together define an installation space. A support cylinder 21 is located within the installation space, with one axial end of the support cylinder 21 rotatably connected to the first door body 12 and the other axial end of the support cylinder 21 rotatably connected to the support beam 15.

[0087] One end of each of the two support arms 14 is connected to the first door body 12, forming a cantilever structure. A support beam 15 is connected to the other end of each of the two support arms 14, thus forming a quadrilateral installation space. The support cylinder 21 is rotatably accommodated within the installation space. For example, the support cylinder 21 can be driven to rotate by a drive motor, which is fixed to the first door body 12. In some embodiments, referring to Figures 1 and 2, the support arms 14 have a weight-reduction design; for example, the support arms 14 can be configured as a frame structure with holes or hollow areas. This facilitates direct cleaning of the surface of the support cylinder 21, saves materials, and reduces costs.

[0088] By installing the support cylinder 21 using a cantilever structure, the support cylinder 21 can be suspended and rotated within the film-forming chamber 101. This increases the support area of ​​the support cylinder 21 on the substrate 200, improves the film-forming efficiency of the film-forming equipment 100, and facilitates direct cleaning of the surface of the support cylinder 21, making maintenance convenient and improving maintenance efficiency.

[0089] In some embodiments, referring to Figures 1 and 2, the support beam 15 is supported on a first side of the support arm 14 along a third direction. The first side of the support arm 14 is the side facing the top wall 113 when it is installed in the film-forming chamber 101.

[0090] The third direction can be parallel to the vertical direction, supporting the support beam 15 on the first side of the support arm 14, that is, supporting the support beam 15 on the upper side of the support arm 14. In this way, the support beam 15 has a stronger load-bearing capacity and more stable and reliable support. A larger support cylinder 21 can be used to further increase the support area of ​​the support cylinder 21, which is beneficial to improving the film forming efficiency of the film forming equipment 100.

[0091] In some embodiments, referring to FIG1, a connecting portion 151 is provided at the middle of the second side of the support beam 15 along a third direction, and the connecting portion 151 is connected to the other axial end of the support cylinder 21. The second side of the support beam 15 is the side facing the bottom wall 111 when it is installed in the film-forming chamber 101.

[0092] The third direction can be parallel to the vertical direction, on the second side of the support beam 15, i.e., the lower side of the support beam 15. Specifically, a downwardly protruding connecting portion 151 is provided at the middle of the lower side of the support beam 15. The connecting portion 151 is used to rotatably connect to the support cylinder 21. In some embodiments, the orthographic projection shape of the connecting portion 151 along the first direction can be an inverted trapezoid, etc. By providing a downwardly protruding connecting portion 151, the support position of the support cylinder 21 can be lowered, reducing the support height of the first door body 12 on the support cylinder 21. Since the support height of the support cylinder 21 is reduced, the height of the top wall 113 of the main housing 11 can be reduced. This helps to reduce the volume of the film-forming chamber 1, save space, and reduce costs.

[0093] In some embodiments, referring to Figures 1 and 3, the gas supply device 5 includes a spray member 51 disposed in the film-forming chamber 101; the spray member 51 is configured to supply gas toward the outer peripheral wall of the support cylinder 21.

[0094] The spray element 51 is located inside the film-forming chamber 101 and on the outer periphery of the support cylinder 21. The gas supply device 5 uses the spray element 51 to spray film-forming material onto the substrate 200 supported on the outer periphery of the support cylinder 21 inside the film-forming chamber 101. At this time, the vapor-phase film-forming material does not fill the entire film-forming chamber 101, but is supplied locally to the surface of the substrate 200. The vapor-phase film-forming material simultaneously forms a film on the surface of the substrate 200 at different locations on the substrate 200. To achieve a better spraying effect and improve film formation, the spraying element 51 can be positioned close to the outer peripheral wall of the support cylinder 21, resulting in a smaller gap between the support cylinder 21 and the spraying element 51. This facilitates the spraying element 51 spraying vapor-phase film-forming material onto the substrate 200. Simultaneously, since the support cylinder 21 can be removed from the film-forming chamber 101 along with the disassembly of the first door 12, it is convenient to directly clean the process dust on the surface of the support cylinder 21 and the spraying element 51. This makes maintenance easier, reduces disassembly and assembly operations, and improves maintenance efficiency. It also addresses the problem of difficult equipment maintenance and cleaning caused by the small gap between the support cylinder 21 and the spraying element 51, which necessitates the removal of some structural components to separate the two.

[0095] In some embodiments, referring to Figures 1, 3, and 4, the projected profile of the outer peripheral wall of the support cylinder 21 along the first direction is circular. The spray member 51 includes a spray plate 511, which has a first surface 510, and the projected profile of the first surface 510 along the first direction is an arc. The radius of the arc of the first surface 510 is larger than the radius of the circle of the outer peripheral wall of the support cylinder 21. When the support cylinder 21 is installed in the film-forming chamber 101, the first surface 510 of the spray plate 511 surrounds a portion of the outer peripheral wall of the support cylinder 21 and has a first gap D1 between it and the outer peripheral wall of the support cylinder 21.

[0096] In some embodiments, the film-forming equipment 100 can be an ALD (Atomic Layer Deposition) roll-to-roll vacuum coating equipment. When the film-forming equipment 100 is in use, the support cylinder 21 and the spray plate 511 are both located inside the film-forming chamber 101. The substrate 200 on the support cylinder 21 is coated by the spray plate 511. According to the principle of atomic layer deposition, when the substrate 200 passes around the support cylinder 21 in the film-forming chamber 101, the spray plate 511 supplies vapor-phase film-forming material to the surface of the substrate 200. The vapor-phase film-forming material reacts effectively with the surface of the substrate 200, thereby achieving the deposition of a single atomic layer and forming a deposited thin film. At least two gases can be continuously introduced into the surface of the substrate 200 in the heated film-forming chamber 101 to carry out surface reactions, thereby realizing a thermal atomic layer deposition coating process on the substrate 200.

[0097] The support cylinder 21 can be a cylindrical shape. The first surface 510 of the spray plate 511 can be a concave arc surface, and the first surface 510 can be arranged around the outer peripheral wall of the support cylinder 21, so that the shape of the first surface 510 matches the shape of the outer peripheral wall of the support cylinder 21. In some embodiments, when the support cylinder 21 is installed in the film-forming chamber 101, the central axis of the first surface 510 of the spray plate 511 is approximately coincident with the central axis of the support cylinder 21; thus, the distance of the first gap D1 is the difference between the radius of curvature of the first surface 510 and the radius of the outer peripheral wall of the support cylinder 21. In some embodiments, the spray plate 511 can be disposed in the film-forming chamber 101.

[0098] By using an arc-shaped spray plate 511 with an arc shape that matches the shape of the outer peripheral wall of the support cylinder 21, it is beneficial to reduce the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21. This allows for control and reduction of the spacing of the first gap D1, which is beneficial to improve the spraying effect on the substrate 200 and the film formation effect. Moreover, the structure is compact and saves space.

[0099] Meanwhile, since the support cylinder 21 can be removed from the film-forming chamber 101 along with the first door body 12, it is convenient to directly clean the process dust on the surface of the support cylinder 21 and the spray plate 511. Therefore, the spray plate 511 does not need to be disassembled during maintenance, reducing disassembly and installation, reducing maintenance time, improving equipment maintenance efficiency, and thus improving equipment utilization. This improves the problems of difficult maintenance and cumbersome regular maintenance caused by the close distance between the spray plate 511 and the support cylinder 21.

[0100] In some embodiments, referring to Figures 1 and 4, the ratio of the projected area S1 of the first surface 510 on the outer peripheral wall of the support cylinder 21 along the radial direction of the support cylinder 21 to the surface area S2 of the outer peripheral wall of the support cylinder 21 is 1 / 5 to 2 / 3.

[0101] The projection area of ​​the first surface 510 of the spray plate 511 onto the outer peripheral wall of the support cylinder 21 is approximately equal to the spray coverage area of ​​the support cylinder 21 when the spray plate 511 sprays the support cylinder 21. The spray coverage area of ​​the spray plate 511 onto the support cylinder 21 is greater than or equal to 1 / 5 of the outer peripheral wall surface area S2 of the support cylinder 21, and less than or equal to 2 / 3 of the outer peripheral wall surface area S2 of the support cylinder 21. For example, the ratio of the projected area S1 of the first surface 510 along the radial direction of the support cylinder 21 onto the outer peripheral wall of the support cylinder 21 to the outer peripheral wall surface area S2 of the support cylinder 21 is 1 / 2, that is, the spray plate 511 can cover half of the outer peripheral wall surface of the support cylinder 21 when spraying the support cylinder 21.

[0102] In this way, the spray plate 511 can spray a larger area of ​​the substrate 200, which is beneficial to improve the spraying efficiency of the substrate 200 and improve production efficiency.

[0103] In some embodiments, referring to FIG4, when the support cylinder 21 is installed in the film-forming chamber 101, the support arm 14 is located between the side wall 112 and the spray plate 511 along the second direction, and the spray plate 511 is located between the support arm 14 and the support cylinder 21.

[0104] In the second direction, the support cylinder 21 is housed between two support arms 14, which are housed in the gap between the support cylinder 21 and the side wall 112 of the main housing 11. The spray plate 511 is housed in the gap between the support arm 14 and the support cylinder 21. Thus, the support cylinder 21, the spray plate 511, and the support arms 14 are arranged overlapping each other within the film-forming chamber 101. This arrangement helps to reduce the distance of the first gap D1 between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21, resulting in better spraying of the substrate 200. Simultaneously, it prevents the support arms 14 from obstructing the spray path, thus improving the film-forming effect. Furthermore, the structure is compact and saves space.

[0105] In some embodiments, when the support cylinder 21 is inserted into the film-forming chamber 101, the opposite sides of the connecting portion 151 of the support beam 15 can avoid the spray plate 511, which facilitates the installation of the spray plate 511 onto the outer periphery of the support cylinder 21. This helps to further reduce the distance between the first surface 510 of the spray plate 511 and the outer periphery of the support cylinder 21, improve the spraying effect, and thus improve the film-forming effect.

[0106] In some embodiments, referring to Figures 1 and 4, the first gap D1 is 2 mm to 10 mm.

[0107] The first gap D1 between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21 can be greater than or equal to 2 mm and less than or equal to 10 mm. The smaller the first gap D1, the smaller the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21, and the better the spraying effect of the spray plate 511 on the substrate 200. However, since the distance between the support cylinder 21 and the spray plate 511 is small, there is a risk that the support cylinder 21 may shake and collide with the spray plate 511 during the process of the support cylinder 21 being inserted into or removed from the film-forming chamber 101 as the first door 12 moves.

[0108] By setting the first gap D1 within the range of 2 mm to 10 mm, it is beneficial to improve the spraying effect on the substrate 200 and improve the film formation effect. At the same time, it is convenient for the support cylinder 21 to be installed into or removed from the film formation chamber 101 as the first door 12 moves, reducing interference. The first door 12 moves more smoothly and is easy to assemble and disassemble with the main housing 11, thus improving maintenance efficiency.

[0109] In some embodiments, referring to Figures 1 and 4, the base support mechanism 2 further includes at least two support guide rollers 22, the axial direction of which is parallel to the first direction; and one axial end of the support guide roller 22 is connected to the first door body 12, and the other axial end of the support guide roller 22 is connected to the support beam 15.

[0110] The support guide rollers 22 are used to guide the substrate 200 to the support cylinder 21 and can tension the substrate 200, which is beneficial for conveying the substrate 200 as tightly as possible, thereby improving the film formation effect. The number of support guide rollers 22 can be at least two, such as two, three, four or more. In some embodiments, two support guide rollers 22 are symmetrically arranged on opposite sides of the support cylinder 21.

[0111] In some embodiments, referring to Figures 1 to 4, at least two support guide rollers 22 are disposed on the first side of the support cylinder 21 along a third direction, and the at least two support guide rollers 22 are spaced apart along a second direction. The first side of the support cylinder 21 is the side facing the top wall 113 when it is installed in the film-forming chamber 101.

[0112] The third direction can be vertical. The first side of the support cylinder 21 can be the upper side of the support cylinder 21. Since at least two support guide rollers 22 are located on the first side of the support cylinder 21, the substrate 200 can be guided from the first side of the support cylinder 21 to the support cylinder 21, and after passing around the second side of the support cylinder 21, it can be guided away from the support cylinder 21 from the first side of the support cylinder 21. Since the two support guide rollers 22 are spaced apart along the second direction, the substrate 200 can be guided to the support cylinder 21 from a support guide roller 22 at one position in the second direction, and guided away from the support cylinder 21 from a support guide roller 22 at another position in the second direction.

[0113] By placing the support guide rollers 22 on the first side of the support cylinder 21, the substrate 200 can be guided from and away from the support cylinder 21, allowing the substrate 200 to bypass the second side of the support cylinder 21. This facilitates the gas supply device 5 located on the second side of the support cylinder 21 to supply film-forming material to the substrate 200. It also avoids interference between the substrate 200 and the spray plate 511, allowing the spray plate 511 to surround the second side of the support cylinder 21. This helps to reduce the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21, thereby improving the spraying effect on the substrate 200 and thus improving the film-forming effect.

[0114] In some embodiments, referring to Figures 1 and 4, at least two support guide rollers 22 are arranged at intervals along a third direction.

[0115] The substrate 200 can be guided to the support cylinder 21 by the support guide roller 22 at one position above the support cylinder 21, and then guided away from the support cylinder 21 by the support guide roller 22 at another position above the support cylinder 21. Simultaneously, since the substrate 200 can be guided and guided away from the support cylinder 21 by the support guide rollers 22 at different positions in the second direction, interference between the substrate 200 and the support cylinder 21 can be reduced. This facilitates the guidance and separation of the substrate 200 from the same side of the support cylinder 21 in the second direction, simplifying substrate 200 transport. Furthermore, the structure is compact, saving space and reducing the volume of the film-forming chamber 1.

[0116] In some embodiments, the base support mechanism 2 may further include a support drive member (not shown), which is located on the first door body 12 and is throttle-connected to the support cylinder 21. The support drive member is used to drive the support cylinder 21 to rotate. For example, the support drive member may include a motor. By driving the support cylinder 21 to rotate through the support drive member, the substrate 200 supported on the outer peripheral surface of the support cylinder 21 is moved, thereby realizing the conveying of the substrate 200.

[0117] In some embodiments, referring to Figures 1 and 4, the projected profile shape of the top wall 113 along the first direction is arc-shaped.

[0118] By setting the top wall 113 of the main housing 11 to be an arc-shaped wall, it can be adapted to the shape of the outer peripheral wall of the support cylinder 21. In this way, the structure of the film-forming chamber 1 can be made more compact, which is beneficial to reducing the volume of the film-forming chamber 1 and saving the space occupied by the film-forming chamber 1.

[0119] In some embodiments, referring to Figures 1, 3, and 4, the film-forming apparatus 100 further includes a take-up / unwinding unit 20 and a transition unit 30. The take-up / unwinding unit 20 includes a take-up / unwinding chamber 201 and an unwinding shaft 203 and a take-up shaft 202 disposed within the take-up / unwinding chamber 201. The transition unit 30 includes a transition chamber 301 and a valve structure 302 disposed within the transition chamber 301. The transition chamber 301 is connected between the take-up / unwinding chamber 201 and the film-forming chamber 1, and a guiding channel from the take-up / unwinding chamber 201 to the film-forming chamber 1 is formed inside the transition chamber 301; the valve structure 302 is used to open or close the guiding channel.

[0120] The unwinding / taking-up unit 20 is used for unwinding, rewinding, flattening, and tension control of the substrate 200 roll. The unwinding / taking-up chamber 201 has a winding / taking-up cavity 204, within which an unwinding shaft 203 and a rewinding shaft 202 are disposed. The unwinding shaft 203 is used to unwind the substrate 200 roll, and the rewinding shaft 202 is used to rewind the substrate 200 roll. In some embodiments, the unwinding / taking-up unit 20 further includes an unwinding guide roller 206 and a rewinding guide roller 205. The unwinding guide roller 206 is disposed near the unwinding shaft 203, and the rewinding guide roller 205 is disposed near the rewinding shaft 202. The unwinding guide roller 206 and the rewinding guide roller 205 can be used for flattening and tension control of the substrate 200. The transition chamber 301 is used to connect the unwinding / taking-up chamber 201 and the film-forming chamber 1 to transport the substrate 200 between the unwinding / taking-up chamber 201 and the film-forming chamber 1. The transition chamber 301 is also equipped with a valve structure 302. Closing the valve structure 302 can cut off the connection between the winding chamber 201 and the film forming chamber 1. The specific structure of the valve structure 302 is not limited here.

[0121] Before using the film-forming equipment 100, the first door 12 can be disassembled from the main housing 11, opening the first opening 114. The support cylinder 21 can then move out of the film-forming chamber 101 along with the first door 12. This facilitates direct cleaning and inspection of the surface of the support cylinder 21 and the first surface 510 of the spray plate 511, as well as the interior of the film-forming chamber 101. The second door 13 can also be disassembled from the main housing 11, opening the second opening 115. This allows for substrate 200 replacement or other maintenance operations that do not require major upkeep.

[0122] When the film-forming equipment 100 is in use, the interiors of the film-forming chamber 1, the unwinding / rewinding chamber 201, and the transition chamber 301 are all in a vacuum environment, with a process pressure of 1 to 10 Torr. The substrate 200 travels from the unwinding shaft 203 through the unwinding guide roller 206 into the transition chamber 301, then through the open valve structure 302 within the transition chamber 301 into the film-forming chamber 101. After undergoing the coating process through the support cylinder 21, it returns to the transition chamber 301 through the support guide roller 22, and then reaches the take-up shaft 202 via the transition chamber 301 and the take-up guide roller 205. When it is necessary to unwind or rewind the substrate 200 roll or perform local maintenance operations, the valve structure 302 in the transition chamber 301 is closed, allowing the unwinding / rewinding chamber 201 and the film-forming chamber 1 to be emptied independently, enabling faster roll replacement and maintenance. Simultaneously, after roll replacement or maintenance is completed, the system can be evacuated more quickly, allowing for faster entry into the process time and significantly improving coating efficiency.

[0123] After the film-forming equipment 100 is used, the first door 12 and the second door 13 can be disassembled from the main housing 11, allowing the first door 12 to open the first opening 114 and the second door 13 to open the second opening 115. The support cylinder 21 moves out of the film-forming chamber 101 along with the first door 12. This facilitates the hoisting, disassembly, maintenance, or repair of the support cylinder 21, as well as the cleaning and maintenance of the inside of the film-forming chamber 101. It also facilitates the direct cleaning of process dust from the surface of the support cylinder 21 and the first surface 510 of the spray plate 511. This effectively reduces disassembly and assembly operations, making maintenance convenient and quick, reducing maintenance time, and improving maintenance efficiency.

[0124] By adding a transition chamber 301 between the take-up and unwind chamber 201 and the film-forming chamber 1, the substrate 200 can be transported between the take-up and unwind chamber 201 and the film-forming chamber 1 through the transition chamber 301. Furthermore, through the valve structure 302 in the transition chamber 301, the take-up and unwind chamber 201 and the film-forming chamber 1 can be punctured independently, reducing puncture time, effectively improving replacement efficiency, reducing maintenance time, and improving the utilization efficiency of the film-forming equipment 100.

[0125] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0126] The embodiments described above illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A film-forming apparatus, wherein, Includes a film-forming unit; the film-forming unit includes: Mounting base; A film-forming chamber includes a main housing, a first door, and a second door. The main housing is fixedly mounted on the mounting base. The main housing includes a bottom wall, two side walls connected to opposite sides of the bottom wall, and a top wall connected to the two side walls at the end away from the bottom wall. The bottom wall, the two side walls, and the top wall together define a cavity with a first opening at one end and a second opening at the opposite end. The first door is connected to the main housing and closes the first opening. The second door is connected to the main housing and closes the second opening. The first door, the second door, and the main housing can form an airtight film-forming chamber. The relative orientation of the first opening and the second opening is a first direction. A substrate support mechanism is disposed within the film-forming chamber to support the substrate for film formation; The first door is detachably connected to the main housing and is slidably mounted on the mounting base. The first door can slide to a point where it is no longer in contact with the main housing to open the first opening. Optionally, the second door is detachably connected to the main housing and is slidably mounted on the mounting base. The second door can slide to a point where it is no longer in contact with the main housing to open the second opening.

2. The film-forming equipment according to claim 1, wherein, The film-forming unit also includes a moving component; The moving component includes a first slide rail and a first slider. The first slide rail is disposed on the mounting base and extends along the first direction. The first slider is slidably connected to the first slide rail. The first door body is connected to the first slider. The first slider supports the first door body on the first slide rail and enables the first door body to slide along the first slide rail. Optionally, the moving component includes a second slide rail and a second slider. The second slide rail is disposed on the mounting base and extends along the first direction. The second slider is slidably connected to the second slide rail. The second door body is connected to the second slider. The second slider supports the second door body on the second slide rail and enables the second door body to slide along the second slide rail.

3. The film-forming equipment according to claim 2, wherein, The moving component further includes a first moving drive component, which is connected to the first door body or the first slider in a transmission manner. The first moving drive component is used to drive the first door body to slide along the first slide rail. Optionally, the moving component further includes a second moving drive member, which is connected to the second door body or the second slider in a transmission manner, and is used to drive the second door body to slide along the second slide rail.

4. The film-forming apparatus (100) according to any one of claims 1 to 3, wherein, The base support mechanism is disposed on the first door body, and the first door body can drive the base support mechanism to be inserted into or removed from the film-forming chamber through the first opening; The film-forming unit further includes a gas supply device disposed in the film-forming chamber and configured to supply film-forming material into the film-forming chamber.

5. The film-forming apparatus according to claim 4, wherein, The base support mechanism includes a support cylinder configured to rotate about its own central axis; Wherein, the relative arrangement direction of the two sidewalls is the second direction, and the relative arrangement direction of the bottom wall and the top wall is the third direction; when the support cylinder is installed in the film-forming chamber, the central axis of the support cylinder is parallel to the first direction, the two opposite sides of the support cylinder along the second direction face the two sidewalls respectively, and the two opposite sides of the support cylinder along the third direction face the bottom wall and the top wall respectively; the first direction, the second direction and the third direction are perpendicular to each other.

6. The film-forming apparatus according to claim 5, wherein, The film-forming chamber further includes two support arms connected to the first door and a support beam connected to the two support arms. The two support arms are spaced apart along the second direction. The first door, the two support arms and the support beam together define the installation space. The support cylinder is located in the installation space. One axial end of the support cylinder is rotatably connected to the first door, and the other axial end of the support cylinder is rotatably connected to the support beam.

7. The film-forming apparatus according to claim 6, wherein, The support beam is supported on the first side of the two support arms along the third direction; wherein, the first side of the support arm is the side facing the top wall when it is installed in the film-forming chamber; Optionally, a connecting portion is provided on the middle of the second side of the support beam along the third direction, and the connecting portion is connected to the other end of the support cylinder in the axial direction; wherein, the second side of the support beam is the side facing the bottom wall when it is installed in the film-forming chamber.

8. The film-forming apparatus according to claim 6, wherein, The gas supply device includes a spray element disposed within the film-forming chamber, the spray element being configured to supply gas toward the outer peripheral wall of the support cylinder.

9. The film-forming apparatus according to claim 8, wherein, The outer peripheral wall of the support cylinder has a circular projection profile along the first direction; the spraying component includes a spraying plate, the spraying plate has a first surface, the projection profile of the first surface along the first direction is an arc, and the radius of the arc of the first surface is greater than the circular radius of the outer peripheral wall of the support cylinder. When the support cylinder is installed in the film-forming chamber, the first surface of the spray plate surrounds a portion of the outer peripheral wall of the support cylinder and has a first gap with the outer peripheral wall of the support cylinder.

10. The film-forming apparatus according to claim 9, wherein, The ratio of the projected area of ​​the first surface on the outer peripheral wall of the support cylinder along the radial direction of the support cylinder to the surface area of ​​the outer peripheral wall of the support cylinder is 1 / 5 to 2 / 3. Optionally, when the support cylinder is installed in the film-forming chamber, along the second direction, the support arm is located between the side wall and the spray plate, and the spray plate is located between the support arm and the support cylinder; Optionally, the first gap is 2 mm to 10 mm.

11. The film-forming apparatus according to claim 5, wherein, The base support mechanism further includes at least two support guide rollers, the axial direction of which is parallel to the first direction, and one axial end of the support guide roller is connected to the first door body, and the other axial end of the support guide roller is connected to the support beam.

12. The film-forming apparatus according to claim 11, wherein, At least two of the aforementioned support guide rollers are disposed on the first side of the support cylinder along the third direction, and at least two of the aforementioned support guide rollers are spaced apart along the second direction; wherein, the first side of the support cylinder is the side facing the top wall when it is inserted into the film-forming chamber; Optionally, at least two of the support guide rollers are arranged at intervals along the third direction.

13. The film-forming apparatus according to claim 5, wherein, The base support mechanism further includes a support drive component, which is disposed on the first door body and is connected to the support cylinder in a transmission manner. The support drive component is used to drive the support cylinder to rotate.

14. The film-forming apparatus according to claim 5, wherein, The projected outline of the top wall along the first direction is arc-shaped.

15. The film-forming apparatus according to any one of claims 5 to 14, wherein, The film-forming equipment also includes: The unwinding / rewinding unit includes an unwinding / rewinding chamber and an unwinding shaft and a winding shaft disposed within the unwinding / rewinding chamber; and The transition unit includes a transition chamber and a valve structure disposed in the transition chamber. The transition chamber is connected between the take-up and untake-down chamber and the film-forming chamber. A conduction channel from the take-up and untake-down chamber to the film-forming chamber is formed inside the transition chamber. The valve structure is used to open or close the conduction channel.

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