Overhead transport vehicle system

Abstract

This overhead transport vehicle system comprises: a first inspection rail on which a transport vehicle can travel; a second inspection rail, which has at least a portion overlapping the first inspection rail in a plan view and is provided at a height position different from that of the first inspection rail, and on which the transport vehicle can travel; and a lifter that moves the transport vehicle between the first inspection rail and the second inspection rail.

Description

Ceiling transfer cart system

[0001] One aspect of the present invention relates to a ceiling transfer cart system.

[0002] A ceiling transfer cart system is known that includes a running rail laid on a ceiling or near a ceiling, and a plurality of transfer carts run along the running rail. Such a ceiling transfer cart system may include a plurality of inspection rails on which the transfer carts can run, and various inspections may be performed on the transfer carts on these plurality of inspection rails (see, for example, Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2006-290599

[0004] However, in the ceiling transfer cart system as described above, a plurality of inspection rails are arranged in respective areas separated from each other in a plan view. Therefore, when performing various inspections on the transfer cart, there is a possibility that a large space in the plan view may be required.

[0005] Therefore, an aspect of the present invention aims to provide a ceiling transfer cart system capable of performing various inspections on a transfer cart while minimizing the required space in a plan view.

[0006] (1) A ceiling transfer cart system according to an aspect of the present invention is a ceiling transfer cart system including a running rail laid on a ceiling or near a ceiling, and a plurality of transfer carts running along the running rail, including a first inspection rail on which the transfer cart can run, and a second inspection rail provided at a height position different from that of the first inspection rail and at least partially overlapping the first inspection rail in a plan view and on which the transfer cart can run, and a lifter for moving the transfer cart between the first inspection rail and the second inspection rail.

[0007] This overhead transport vehicle system is equipped with first and second inspection rails, allowing various inspections to be performed on the transport vehicle. Furthermore, since the first and second inspection rails are installed at different heights and overlap at least partially in a plan view, the space required in a plan view (hereinafter also referred to as "planar space") when performing inspections using the first and second inspection rails can be minimized. Therefore, it becomes possible to perform various inspections on the transport vehicle while minimizing the necessary clearance space.

[0008] (2) In the overhead transport vehicle system described in (1) above, the first inspection rail is a high-altitude inspection rail provided at a height corresponding to the running rail, and the second inspection rail may be a low-altitude inspection rail provided at a lower position than the high-altitude inspection rail. In this case, the first and second inspection rails can be specifically configured.

[0009] (3) In the overhead transport vehicle system described in (1) or (2) above, an inspection device for measuring the aging of the transport vehicle may be placed on the first inspection rail, and an inspection device for measuring the mounting condition of parts to the transport vehicle may be placed on the second inspection rail. In this case, for example, inspections required for transport vehicles in operation can be performed on the first inspection rail, and inspections required for transport vehicles at the start of operation, etc., can be performed on the second inspection rail. Thus, it becomes possible to perform the required inspections quickly and efficiently.

[0010] (4) In the overhead transport vehicle system described in any of (1) to (3) above, the second inspection rail may be connected to an entry rail for bringing transport vehicles into the second inspection rail from the outside, and to an exit rail for bringing transport vehicles out of the second inspection rail. In this case, transport vehicles brought in from the outside can be inspected efficiently, and any transport vehicles in which abnormalities are found during the inspection can be efficiently removed to the outside.

[0011] (5) In the overhead transport vehicle system described in (4) above, the lifter has a lifting rail configured to move up and down, and the height position of the lifting rail may be switched between a first height position in which the lifting rail connects the running rail and the first inspection rail, and a second height position in which the lifting rail connects the entry rail or exit rail to the second inspection rail. In this case, the movement of the transport vehicle between the first inspection rail and the second inspection rail by the lifter can be specifically realized.

[0012] (6) The overhead transport vehicle system described in any of (1) to (5) above may further include a third inspection rail which overlaps at least a portion of the first inspection rail and the second inspection rail in a plan view, and is located at a height between the first inspection rail and the second inspection rail, and on which the transport vehicle can travel. In this case, it becomes possible to perform more inspections on the transport vehicle while minimizing the required planar space.

[0013] (7) The overhead transport vehicle system described in (6) above may be equipped with a circular rail on which the transport vehicle can travel, connected to the downstream side and the upstream side of the third inspection rail. In this case, the transport vehicle on the downstream side of the third inspection rail can be moved to the upstream side by the circular rail, and the transport vehicle can be inspected on the third inspection rail.

[0014] (8) In the overhead transport vehicle system described in any of (1) to (7) above, the system is provided with other running rails located at a different height from the running rails, and the lifter may further move the transport vehicle between the running rails and the other running rails. In this case, the lifter that moves the transport vehicle between the running rails and the other running rails can be used interchangeably with the lifter that moves the transport vehicle between the first and second inspection rails.

[0015] According to one aspect of the present invention, it is possible to provide an overhead transport vehicle system that enables various inspections of the transport vehicle to be performed while minimizing the space required in a plan view.

[0016] Figure 1 is a schematic plan view showing the overhead transport vehicle system according to the first embodiment. Figure 2 is a schematic front view of the overhead transport vehicle of Figure 1 as seen from the direction of travel. Figure 3 is a schematic side view showing the inspection area of ​​the overhead transport vehicle system of Figure 1. Figure 4 is a schematic side view showing the inspection area of ​​Figure 3 seen through the inspection tower. Figure 5(a) is a schematic front view showing the inspection area of ​​the overhead transport vehicle system of Figure 1. Figure 5(b) is a schematic cross-sectional view along the line V(b)-V(b) of Figure 3. Figure 6(a) is a schematic plan view showing the upper floors of the inspection tower of Figure 4. Figure 6(b) is a schematic plan view showing the middle floors of the inspection tower of Figure 4. Figure 6(c) is a schematic plan view showing the lower floors of the inspection tower of Figure 4. Figure 7(a) is a schematic side view showing the inspection area of ​​Figure 4 to illustrate an example of an inspection to be performed. Figure 7(b) is a schematic side view to illustrate the continuation of Figure 7(a). Figure 8(a) is a schematic side view to illustrate the continuation of Figure 7(b). Figure 8(b) is a schematic plan view showing the middle floor of the inspection tower in Figure 6(b) to explain the continuation of Figure 8(a). Figure 9(a) is a schematic side view to explain the continuation of Figure 8(b). Figure 9(b) is a schematic side view to explain the continuation of Figure 9(a). Figure 10(a) is a schematic side view to explain the continuation of Figure 9(b). Figure 8(b) is a schematic side view to explain the continuation of Figure 10(a). Figure 11(a) is a schematic plan view showing the upper floor of the inspection tower of the overhead transport system according to the second embodiment. Figure 11(b) is a schematic plan view showing the middle floor of the inspection tower in Figure 11(a). Figure 11(c) is a schematic plan view showing the lower floor of the inspection tower in Figure 11(a). Figure 12 is a schematic side view showing the inspection area of ​​the overhead transport system according to the third embodiment, seen through the inspection tower.

[0017] Hereinafter, one embodiment will be described in detail with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference numerals, and redundant explanations will be omitted. For the sake of convenience in the explanation, the directions "up," "down," "left," "right," "front," and "back" will be defined.

[0018] [First Embodiment] As shown in Figures 1 and 2, the overhead transport system 1 according to the first embodiment is a system that transports articles 10 between loading sections 9, 9 using transport vehicles 6 that can move along a running rail 4. The articles 10 include, for example, containers such as FOUPs (Front Opening Unified Pods) for storing multiple semiconductor wafers, containers for storing glass substrates, reticle pods, and general parts. The loading sections 9 are arranged along the running rail 4 and are provided at positions where articles 10 can be transferred between them and the transport vehicles 6. The loading sections 9 include a buffer on which articles 10 are temporarily placed, and a transfer port for transferring articles 10 to semiconductor processing equipment, etc. The overhead transport system 1 comprises a running rail 4, a plurality of transport vehicles 6, and an area controller 8.

[0019] The running rail 4 is laid, for example, near the ceiling, which is the space above the workers' heads. The running rail 4 is suspended from the ceiling, for example. The running rail 4 is a predetermined running path for the transport vehicle 6 to travel on. The running rail 4 is supported by pillars 40A, 40A. The running rail 4 may also be laid on the ceiling. The running rail 4 is configured in a cylindrical shape consisting of a bottom surface, a pair of side surfaces, and a top surface. The running rail 4 has a main line section 4A that circulates in one direction over a predetermined area, and a retraction section 4B that introduces the transport vehicle 6 into an inspection area IA, described later, for inspecting the transport vehicle 6. In the retraction section 4B, the transport vehicle 6 also moves in a predetermined one direction. The running rail 4 has a cylindrical rail body section 40. The rail body section 40 houses (encloses) the running section 50 of the transport vehicle 6.

[0020] The transport vehicle 6 travels along the travel rail 4 and transports the goods 10. The transport vehicle 6 is configured to be able to transfer the goods 10. The transport vehicle 6 is an overhead-traveling unmanned vehicle. The number of transport vehicles 6 provided in the overhead transport vehicle system 1 is not particularly limited and can be multiple. The transport vehicle 6 has a main body 7, a travel unit 50, and a travel vehicle controller 35. The main body 7 has a main frame 22, a lateral feed unit 24, a θ drive 26, a lifting drive unit 28, a lifting platform 30, and a cover 33. The travel unit 50 makes the transport vehicle 6 travel along the travel rail 4.

[0021] The vehicle controller 35 is an electronic control unit consisting of a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc. The vehicle controller 35 controls various operations of the transport vehicle 6. Specifically, the vehicle controller 35 controls the travel unit 50, the lateral feed unit 24, the θ drive 26, the lifting drive unit 28, the lifting platform 30, and the roller drive unit 53B. The vehicle controller 35 can be configured as software, for example, in which a program stored in ROM is loaded onto RAM and executed by the CPU. The vehicle controller 35 may also be configured as hardware, such as an electronic circuit. The vehicle controller 35 communicates with the area controller 8.

[0022] The area controller 8 is an electronic control unit consisting of a CPU, ROM, RAM, etc. The area controller 8 can be configured as software in which a program stored in ROM is loaded onto RAM and executed by the CPU. The area controller 8 may also be configured as hardware, such as an electronic circuit. The area controller 8 transmits a transport command to the transport vehicle 6 to transport the goods 10.

[0023] As shown in Figures 1, 3, 4, 5(a), and 5(b), the inspection area IA is located in a part of the retraction section 4B and is the area where the transport vehicle 6 is inspected. The overhead transport vehicle system 1 in the inspection area IA includes a high-altitude inspection rail (first inspection rail) 60, a low-altitude inspection rail (second inspection rail) 70, a middle-level inspection rail (third inspection rail) 80, a lifter 90, and an inspection controller 98.

[0024] The high-altitude inspection rail 60, the low-altitude inspection rail 70, the mid-level inspection rail 80, and the lifter 90 are located inside the inspection tower 2. The inspection tower 2 is a tower-type structure constructed on the floor surface F. The interior of the inspection tower 2 is divided into the upper floor 2H, which constitutes the highest platform, the lower floor 2L, which constitutes the lowest platform, and the mid-level floor 2M, which is located between the upper floor 2H and the lower floor 2L. The high-altitude inspection rail 60 is located on the upper floor 2H, the low-altitude inspection rail 70 is located on the lower floor 2L, and the mid-level inspection rail 80 is located on the mid-level floor 2M.

[0025] A door 3L, which serves as an entrance to the lower floor 2L, is provided in the wall of the lower floor 2L of the inspection tower 2. A door 3H, which serves as an entrance to the upper floor 2H, is provided in the wall of the upper floor 2H of the inspection tower 2. A ladder 12 for accessing door 3H is provided on the outer wall surface of the inspection tower 2. A ladder 13 for ascending to or descending from the middle floor 2M is provided inside the lower floor 2L of the inspection tower 2. On the outer wall surface of the inspection tower 2, for example, a monitor 14 for displaying inspection results in the inspection area 160 and an operation panel 15 for receiving various operation inputs from workers are provided.

[0026] As shown in Figures 4 and 6(a), the high-altitude inspection rail 60 is provided at a height corresponding to the running rail 4. In this embodiment, the high-altitude inspection rail 60 is provided at the same height as the retraction section 4B. The same height includes not only the exact same height but also approximately the same height (hereinafter the same). In the illustrated example, the high-altitude inspection rail 60 extends linearly along the horizontal plane.

[0027] The high-altitude inspection rail 60 is a track on which the transport vehicle 6 can travel. The high-altitude inspection rail 60 may be a non-self-propelled section of track that does not include side and top sections like those provided on the running rail 4, and does not have power supply lines or the like that supply power to the power supply core of the transport vehicle 6, so that the transport vehicle 6 cannot travel under its own power. In this case, the transport vehicle 6 may be moved (forward and backward) on the high-altitude inspection rail 60 by an external mechanism such as a traverser (the same applies to the non-self-propelled section of track described below). The high-altitude inspection rail 60 may also be a self-propelled section of track on which the transport vehicle 6 can travel under its own power, similar to the running rail 4.

[0028] The high-altitude inspection rail 60 is equipped with an inspection device for measuring the aging and wear of the transport vehicle 6. This makes it possible to inspect the aging and wear of the transport vehicle 6 using the high-altitude inspection rail 60. The high-altitude inspection rail 60 may also be equipped with an inspection device capable of measuring other inspection items suitable for periodic inspections (for example, the diameter, isolation, wear, and scratches of each roller of the running section 50 of the transport vehicle 6). In this case, the high-altitude inspection rail 60 can be used to inspect other inspection items suitable for periodic inspections.

[0029] On the upstream side of the high-altitude inspection rail 60 in the direction of travel, the retraction section 4B of the running rail 4 is connected via a lifter 90. This allows, for example, a transport vehicle 6 to enter the high-altitude inspection rail 60 from the retraction section 4B. On the downstream side of the high-altitude inspection rail 60 in the direction of travel, the retraction section 4B of the running rail 4 is connected via a lifter 90. This allows, for example, a transport vehicle 6 to return to the retraction section 4B after inspection by the high-altitude inspection rail 60.

[0030] As shown in Figures 4 and 6(c), the low-altitude inspection rail 70 overlaps with the high-altitude inspection rail 60 in at least part in a plan view. In this embodiment, the entire low-altitude inspection rail 70 overlaps with the high-altitude inspection rail 60 in a plan view. The low-altitude inspection rail 70 is installed at a different height than the high-altitude inspection rail 60. Specifically, the low-altitude inspection rail 70 is installed at a lower position than the high-altitude inspection rail 60. In the illustrated example, the low-altitude inspection rail 70 extends linearly along the horizontal plane. The low-altitude inspection rail 70 is a travel path on which the transport vehicle 6 can travel. The low-altitude inspection rail 70, like the high-altitude inspection rail 60, may be a travel path in a non-self-propelled section or a travel path in a self-propelled section.

[0031] The low-altitude inspection rail 70 is equipped with an inspection device that measures the mounting condition of parts to the transport vehicle 6. This makes it possible to inspect the mounting condition of parts to the transport vehicle 6 using the low-altitude inspection rail 70. The low-altitude inspection rail 70 may also be equipped with an inspection device that can inspect the dimensions of the transport vehicle 6. In this case, the low-altitude inspection rail 70 can inspect the dimensions of the transport vehicle 6.

[0032] On the upstream side of the low-altitude inspection rail 70 in the direction of travel, an entry rail 71 is connected via a lifter 90 to allow a transport vehicle 6 to enter the low-altitude inspection rail 70 from the outside. This allows a new transport vehicle 6, for example, transported by a transport cart C, to enter the low-altitude inspection rail 70 from the entry rail 71. On the downstream side of the low-altitude inspection rail 70 in the direction of travel, a departure rail 72 is connected via a lifter 90 to allow the transport vehicle 6 to exit the low-altitude inspection rail 70 to the outside. This allows a transport vehicle 6, for example, after inspection by the low-altitude inspection rail 70, to exit via the departure rail 72. The entry rail 71 and the departure rail 72 are tracks on which the transport vehicle 6 can travel, and like the high-altitude inspection rail 60, they may be tracks in non-self-propelled sections or tracks in self-propelled sections.

[0033] As shown in Figures 4 and 6(b), the intermediate inspection rail 80 overlaps with at least one of the high-altitude inspection rail 60 and the low-altitude inspection rail 70 in a plan view, at least in part. In this embodiment, the entire intermediate inspection rail 80 overlaps with the high-altitude inspection rail 60 and the low-altitude inspection rail 70 in a plan view. The intermediate inspection rail 80 is provided at a height between the high-altitude inspection rail 60 and the low-altitude inspection rail 70. In the illustrated example, the intermediate inspection rail 80 extends linearly along the horizontal plane. The intermediate inspection rail 80 is a travel path on which the transport vehicle 6 can travel. The intermediate inspection rail 80, like the high-altitude inspection rail 60, may be a travel path in a non-self-propelled section or a travel path in a self-propelled section.

[0034] The intermediate inspection rail 80 is equipped with inspection devices different from those located on the high-altitude inspection rail 60 and the low-altitude inspection rail 70. This allows for inspections on the intermediate inspection rail 80 that are different from those performed on the high-altitude inspection rail 60 and the low-altitude inspection rail 70. For example, the intermediate inspection rail 80 may be equipped with inspection devices that check the status of various sensors, such as optical sensors, on the transport vehicle 6. In this case, the intermediate inspection rail 80 can be used to inspect the various sensors on the transport vehicle 6.

[0035] A circulating rail 81, which allows the transport vehicle 6 to travel in a loop, is connected to the downstream and upstream sides of the intermediate inspection rail 80 in the direction of travel via a lifter 90. This allows the transport vehicle 6, after inspection by the intermediate inspection rail 80, to be moved back from the downstream side to the upstream side in the direction of travel of the intermediate inspection rail 80. The circulating rail 81 is a travel path on which the transport vehicle 6 can travel. The circulating rail 81, like the high-altitude inspection rail 60, may be a travel path in a non-self-propelled section or a travel path in a self-propelled section.

[0036] The high-altitude inspection rail 60, low-altitude inspection rail 70, track entry rail 71, track departure rail 72, mid-level inspection rail 80, and loop rail 81 may be suspended and supported from the ceiling, for example, or alternatively or in addition to this, they may be supported on the floor surface F via support members.

[0037] The lifter 90 moves the transport vehicle 6 between the high-altitude inspection rail 60 and the low-altitude inspection rail 70, between the high-altitude inspection rail 60 and the intermediate-level inspection rail 80, and between the low-altitude inspection rail 70 and the intermediate-level inspection rail 80. The lifter 90 has a lifting rail 91 and a guide pillar 92 extending in the vertical direction. In the lifter 90, the lifting rail 91 is configured to move up and down along the guide pillar 92. The lifting rail 91 is a travel path on which the transport vehicle 6 can travel, and like the high-altitude inspection rail 60, it may be a travel path in a non-self-propelled section or a travel path in a self-propelled section. The lifter 90 has a first lifter 90A and a second lifter 90B.

[0038] Furthermore, the movement of the lifting rail 91 between the high-altitude inspection rail 60 and the low-altitude inspection rail 70 by the lifter 90 includes raising and lowering the lifting rail 91 between the height position of the high-altitude inspection rail 60 and the height position of the low-altitude inspection rail 70, and includes raising and lowering the lifting rail 91 between the upper floor 2H and the lower floor 2L. The movement of the lifting rail 91 between the high-altitude inspection rail 60 and the middle-level inspection rail 80 by the lifter 90 includes raising and lowering the lifting rail 91 between the height position of the high-altitude inspection rail 60 and the height position of the middle-level inspection rail 80, and includes raising and lowering the lifting rail 91 between the upper floor 2H and the middle floor 2M. The movement of the lifting rail 91 between the middle inspection rail 80 and the low inspection rail 70 by the lifter 90 includes raising and lowering the lifting rail 91 between the height position of the middle inspection rail 80 and the height position of the low inspection rail 70, and includes raising and lowering the lifting rail 91 between the middle floor 2M and the low floor 2L.

[0039] The first lifter 90A connects the upstream side of the high-altitude inspection rail 60 in the direction of travel to the retraction section 4B by raising the lifting rail 91 to the same height as the high-altitude inspection rail 60. The first lifter 90A sets the lifting rail 91 to a second height position that connects the upstream side of the low-altitude inspection rail 70 in the direction of travel to the entry rail 71 by raising the lifting rail 91 to the same height as the low-altitude inspection rail 70. The first lifter 90A connects the upstream side of the middle-level inspection rail 80 in the direction of travel to the loop rail 81 by raising the lifting rail 91 to the same height as the middle-level inspection rail 80.

[0040] The second lifter 90B connects the downstream side of the high-altitude inspection rail 60 in the direction of travel to the retraction section 4B by raising the lifting rail 91 to the same height as the high-altitude inspection rail 60. The second lifter 90B connects the downstream side of the low-altitude inspection rail 70 in the direction of travel to the entry rail 71 by raising the lifting rail 91 to the same height as the low-altitude inspection rail 70. The second lifter 90B connects the downstream side of the middle-level inspection rail 80 in the direction of travel to the loop rail 81 by raising the lifting rail 91 to the same height as the middle-level inspection rail 80.

[0041] In other words, the first lifter 90A and the second lifter 90B switch the height position of the lifting rail 91 between a first height position, which is the height position where the high-altitude inspection rail 60 and the running rail 4 are connected; a second height position, which is the height position where the low-altitude inspection rail 70 and the entry rail 71 or exit rail 72 are connected; and a third height position, which is the height position where the middle-level inspection rail 80 and the circulating rail 81 are connected.

[0042] Returning to Figure 3, the test controller 98 is an electronic control unit consisting of a CPU, ROM, RAM, etc. The test controller 98 can be configured as software, for example, in which a program stored in ROM is loaded onto RAM and executed by the CPU. The test controller 98 may also be configured as hardware, such as an electronic circuit.

[0043] The inspection controller 98 controls the inspections of the high-altitude inspection rail 60, the low-altitude inspection rail 70, and the mid-level inspection rail 80 based on the operation input received from the operation panel 15. The inspection controller 98 displays the inspection results from the high-altitude inspection rail 60, the low-altitude inspection rail 70, and the mid-level inspection rail 80 on the monitor 14. The inspection controller 98 may be embedded in the inspection tower 2.

[0044] Next, we will describe an example of an inspection of the transport vehicle 6 performed in the inspection area IA of the overhead transport vehicle system 1 described above.

[0045] As shown in Fig. 7(a), for example, an operator uses a transport cart C to carry the newly operated transport vehicle 6 and makes it enter (enter the line) the incoming line rail 71. At this time, the inspection controller 98 raises and lowers the lifting rails 91 of the first lifter 90A and the second lifter 90B. Thereby, the height position of the lifting rail 91 is set to a second height position where the incoming line rail 71 and the low-level inspection rail 70 are connected via the lifting rail 91, and the off-line rail 72 and the low-level inspection rail 70 are connected via the lifting rail 91.

[0046] As shown in Fig. 7(b), the transport vehicle 6 on the incoming line rail 71 is moved to the low-level inspection rail 70 on the lower floor 2L, and the inspection device on the low-level inspection rail 70 inspects the transport vehicle 6. If an abnormality of the transport vehicle 6 is detected as a result of the inspection by the low-level inspection rail 70, the transport vehicle 6 is moved to the off-line rail 72 and exited (off the line) from the off-line rail 72. If no abnormality of the transport vehicle 6 is detected as a result of the inspection by the low-level inspection rail 70, the transport vehicle 6 is moved to the lifting rail 91 of the second lifter 90B.

[0047] As shown in Fig. 8(a), the inspection controller 98 raises the lifting rails 91 of the first lifter 90A and the second lifter 90B. Thereby, the height position of the lifting rail 91 is set to a third height position where the circulating rail 81 and the middle-level inspection rail 80 are connected via the lifting rail 91, and the transport vehicle 6 after being inspected by the middle-level inspection rail 80 is moved to the middle floor 2M.

[0048] As shown in Fig. 8(b), the transport vehicle 6 is moved along the circulating rail 81. As shown in Fig. 9(a), the transport vehicle 6 is moved to the middle-level inspection rail 80, and the inspection device on the middle-level inspection rail 80 inspects the transport vehicle 6. The transport vehicle 6 after being inspected by the middle-level inspection rail 80 is moved to the lifting rail 91 of the second lifter 90B.

[0049] As shown in Figure 9(b), the inspection controller 98 raises the lifting rails 91 of the first lifter 90A and the second lifter 90B. This sets the height position of the lifting rails 91 to a first height position where the retraction section 4B and the high-altitude inspection rail 60 are connected via the lifting rails 91, and moves the transport vehicle 6, which has been inspected by the intermediate inspection rail 80, to the upper floor 2H.

[0050] The transport vehicle 6 is driven along the retraction section 4B of the running rail 4, exiting the inspection area IA, and then made to circle along the main line section 4A. The transport vehicle 6 is again driven along the retraction section 4B and re-entered the inspection area IA as shown in Figure 10(a). As shown in Figure 10(b), the transport vehicle 6 is moved to the high-altitude inspection rail 60, and the transport vehicle 6 is inspected by the inspection device on the high-altitude inspection rail 60. Then, the transport vehicle 6 is driven along the retraction section 4B of the running rail 4, exiting the inspection area IA, and the operational run of the transport vehicle 6 begins.

[0051] As described above, the overhead transport vehicle system 1 is equipped with high-altitude inspection rails 60 and low-altitude inspection rails 70, allowing various inspections to be performed on the transport vehicle 6. Furthermore, since the high-altitude inspection rails 60 and low-altitude inspection rails 70 are installed at different heights and overlap in a plan view, the planar space required for performing inspections using the high-altitude inspection rails 60 and low-altitude inspection rails 70 can be minimized. Multiple inspection rails can be arranged with a small footprint. Therefore, various inspections of the transport vehicle 6 can be performed while minimizing the planar space required.

[0052] In the overhead transport vehicle system 1, an inspection device for measuring the aging of the transport vehicle is installed on the high-altitude inspection rail 60, and an inspection device for measuring the mounting condition of parts to the transport vehicle 6 is installed on the low-altitude inspection rail 70. In this case, for example, inspections required for the transport vehicle 6 in operation can be performed on the high-altitude inspection rail 60, and inspections required for the transport vehicle 6 at the start of operation, for example, can be performed on the low-altitude inspection rail 70. Therefore, it is possible to perform the required inspections quickly and efficiently.

[0053] In the overhead transport vehicle system 1, the low-level inspection rail 70 is connected to the entry rail 71 and the departure rail 72. In this case, the transport vehicle 6 entering from the outside can be efficiently inspected, and any transport vehicle 6 in which an abnormality is found during the inspection can be efficiently removed to the outside. The transport vehicle 6 can be inspected after it has entered the system but before it has started to travel. In particular, in this embodiment, before the transport vehicle 6 starts its operational travel, the low-level inspection rail 70 can be used to inspect and confirm any adjustment errors, defective parts, etc. of the transport vehicle 6. If an abnormality is found in a transport vehicle 6 before it starts traveling, it can be removed from the system immediately, minimizing the impact on operations. Furthermore, the transport vehicle 6 does not need to travel on the running rail 4, which is the operational track, before various inspections are performed after it has entered the entry rail 71.

[0054] In the overhead transport vehicle system 1, the height position of the lifting rail 91 in the lifter 90 is switched between a first height position in which the lifting rail 91 connects the running rail 4 and the high-altitude inspection rail 60, and a second height position in which the lifting rail 91 connects the entry rail 71 and the departure rail 72 with the low-altitude inspection rail 70. In this case, the movement of the transport vehicle 6 between the high-altitude inspection rail 60 and the low-altitude inspection rail 70 by the lifter 90 can be concretely realized.

[0055] The overhead transport vehicle system 1 overlaps with the high-altitude inspection rail 60 and the low-altitude inspection rail 70 in a plan view, and further includes an intermediate inspection rail 80 provided at a height between the high-altitude inspection rail 60 and the low-altitude inspection rail 70. In this case, it becomes possible to perform more inspections on the transport vehicle 6 while minimizing the required planar space.

[0056] The overhead transport vehicle system 1 includes a circulating rail 81 connected to the downstream and upstream sides of the intermediate inspection rail 80. In this case, the transport vehicle 6, which is circulating on the circulating rail 81, can be inspected by the intermediate inspection rail 80.

[0057] The overhead transport vehicle system 1 includes an inspection tower 2, and inside the inspection tower 2 are a high-altitude inspection rail 60, a low-altitude inspection rail 70, and a middle-level inspection rail 80. Because the high-altitude inspection rail 60, the low-altitude inspection rail 70, and the middle-level inspection rail 80 are located inside the inspection tower 2, the risk of collision with obstacles can be reduced.

[0058] The high-altitude inspection rail 60, the low-altitude inspection rail 70, and the mid-level inspection rail 80 may have a standard track length. The high-altitude inspection rail 60, the low-altitude inspection rail 70, and the mid-level inspection rail 80 may be unitized or modularized and configured to be easily rearranged.

[0059] In the overhead transport vehicle system 1, the number of inspectionable areas may be increased by arranging multiple high-altitude inspection rails 60 in the direction of travel. Similarly, the number of inspectionable areas may be increased by arranging multiple low-altitude inspection rails 70 in the direction of travel, or by arranging multiple mid-level inspection rails 80 in the direction of travel.

[0060] [Second Embodiment] Next, a second embodiment will be described. In describing the second embodiment, the differences from the first embodiment will be explained, and redundant explanations will be omitted.

[0061] As shown in Figures 11(a), 11(b), and 11(c), the overhead transport vehicle system 101 according to the second embodiment differs from the first embodiment in that it further includes a circulating rail 161 and a circulating rail 171, a circulating rail 181 is provided instead of the circulating rail 81 (see Figure 6(b)), and a lifter 190 is provided instead of the lifter 90 (see Figure 6(a)).

[0062] The circulating rails 161, 171, and 181 are the travel paths for the transport vehicle 6 to travel in a loop. The circulating rails 161, 171, and 181 are the travel paths on which the transport vehicle 6 can travel, and like the high-altitude inspection rail 60, they may be travel paths in non-self-propelled sections or travel paths in self-propelled sections. In a plan view, at least a portion (in this case, the whole) of the circulating rails 161, 171, and 181 overlap, and they are installed at different height positions from each other. The circulating rail 161 is connected to the downstream and upstream sides in the direction of travel of the high-altitude inspection rail 60. The circulating rail 171 is connected to the downstream and upstream sides in the direction of travel of the low-altitude inspection rail 70. The circulating rail 181 is connected to the downstream and upstream sides in the direction of travel of the mid-level inspection rail 80.

[0063] The lifter 190 is installed in a gap formed in the middle of the circulating rails 161, 171, and 181 outside the inspection tower 2. The lifter 190 is configured in the same way as the lifter 90 described above. With the lifter 190, when the lifting rail 91 is raised to the same height as the circulating rail 161, the transport vehicle 6 can enter the lifting rail 91 from the circulating rail 161 and exit the lifting rail 91 to the circulating rail 161. With the lifter 90, when the lifting rail 91 is raised to the same height as the circulating rail 171, the transport vehicle 6 can enter the lifting rail 91 from the circulating rail 171 and exit the lifting rail 91 to the circulating rail 171. In the lifter 190, when the lifting rail 191 is raised to the same height as the circulating rail 181, the transport vehicle 6 can enter the lifting rail 91 from the circulating rail 181 and exit the circulating rail 181 from the lifting rail 91.

[0064] As described above, the overhead transport vehicle system 101 also makes it possible to perform various inspections on the transport vehicle 6 while minimizing the required planar space. Furthermore, the overhead transport vehicle system 101 makes it possible to smoothly move the transport vehicle 6 to the high-altitude inspection rail 60, the low-altitude inspection rail 70, and the mid-level inspection rail using the circulating rails 161, 171, and 181.

[0065] [Third Embodiment] Next, a third embodiment will be described. In describing the third embodiment, the differences from the first embodiment will be explained, and redundant explanations will be omitted.

[0066] As shown in Figure 12, the overhead transport vehicle system 201 according to the third embodiment differs from the first embodiment in that it further includes other running rails 204 and replaces the lifter 90 (see Figure 4) with a lifter 290.

[0067] Other running rails 204 are running tracks located at a different height than running rail 4. In the illustrated example, running rail 4 is located at a normal height (a so-called cityway), while other running rails 204 are located at a higher height than running rail 4 (a so-called highway). Running rails 204 are configured similarly to running rail 4. Running rail 240 may be located on a different floor in the building than running rail 4 (for example, on an upper floor above the floor where running rail 4 is located).

[0068] The lifter 290 has a first lifter 90A and a second lifter 190B. The second lifter 190B moves the transport vehicle 6 between the high-altitude inspection rail 60 and the low-altitude inspection rail 70, between the high-altitude inspection rail 60 and the intermediate-level inspection rail 80, and between the low-altitude inspection rail 70 and the intermediate-level inspection rail 80, as well as further moves the transport vehicle 6 between the running rail 4 (high-altitude inspection rail 60) and other running rails 204. The movement of the lifting rail 91 between the running rail 4 and other running rails 204 includes raising and lowering the lifting rail 91 between the height position of the running rail 4 and the height position of the other running rail 204. The other configurations of the second lifter 190B are the same as those of the second lifter 90B (see Figure 4).

[0069] As described above, the overhead transport vehicle system 201 also makes it possible to perform various inspections on the transport vehicle 6 while minimizing the required planar space. Furthermore, in the overhead transport vehicle system 201, the lifter that moves the transport vehicle 6 between the running rail 4 and other running rails 204 and the lifter that moves the transport vehicle 6 between the high-altitude inspection rail 60 and the low-altitude inspection rail 70 can be used interchangeably as the second lifter 190B.

[0070] Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment, and various modifications are possible.

[0071] In the above embodiment, the layout of the running rail 4 is not particularly limited and may be in various layouts. In the above embodiment, the inspection area IA may be located at the end of the running rail 4. The above embodiment includes a high-altitude inspection rail 60, a low-altitude inspection rail 70, and a middle-level inspection rail 80, but the middle-level inspection rail 80 may not be included, or additional inspection rails may be included.

[0072] In the above embodiment, the first inspection rail is a high-altitude inspection rail 60 and the second inspection rail is a low-altitude inspection rail 70, but the embodiment is not limited to this, and the second inspection rail may be an inspection rail positioned higher than the first inspection rail. In the above embodiment, the number of inspection rails is not particularly limited, and other inspection rails may be provided.

[0073] In the first embodiment described above, the circulating rail 81 is not required. In that case, when performing an inspection using the intermediate inspection rail 80, for example, after the inspection using the low-level inspection rail 70, the transport vehicle 6 may move to the upper floor 2H using the second lifter 90B, circle the running rail 4, and enter the intermediate inspection rail 80 using the first lifter 90A. Alternatively, when performing an inspection using the intermediate inspection rail 80, after the inspection using the low-level inspection rail 70, the transport vehicle 6 may move to the middle floor 2M using the second lifter 90B and enter the intermediate inspection rail 80 in reverse using an external mechanism such as a traverser.

[0074] The above embodiments are overhead transport vehicle systems 1, 101, 201 in which a transport vehicle 6 travels along a travel rail 4. However, an overhead transport vehicle system (a so-called grid system) may also be one in which a transport vehicle 6 travels along a travel rail having a first travel rail and a second travel rail that extend in different directions (for example, orthogonal directions) in a plan view.

[0075] The components in the above embodiments and modifications are not limited to the materials and shapes described above, and various materials and shapes can be applied. Furthermore, the components in the above embodiments and modifications can be arbitrarily applied to the components in other embodiments or modifications.

[0076] 1, 101, 201... Overhead transport vehicle system, 4... Running rail, 6... Transport vehicle, 60... Rail for high-altitude inspection (first inspection rail), 70... Rail for low-altitude inspection (second inspection rail), 71... Rail for entering the track, 72... Rail for leaving the track, 80... Rail for mid-level inspection (third inspection rail), 81... Rail for circling, 90, 190... Lifter, 91... Lifting rail, 204... Other running rails.

Claims

1. An overhead transport vehicle system comprising a running rail laid on or near the ceiling, wherein a plurality of transport vehicles travel along the running rail, the system comprising: a first inspection rail on which the transport vehicles can travel; a second inspection rail that overlaps with the first inspection rail in a plan view at least in part and is provided at a different height position from the first inspection rail, and on which the transport vehicles can travel; and a lifter for moving the transport vehicles between the first inspection rail and the second inspection rail.

2. The overhead transport vehicle system according to claim 1, wherein the first inspection rail is a high-altitude inspection rail provided at a height corresponding to the running rail, and the second inspection rail is a low-altitude inspection rail provided at a lower position than the high-altitude inspection rail.

3. The overhead transport vehicle system according to claim 1 or 2, wherein an inspection device for measuring the aging of the transport vehicle is arranged on the first inspection rail, and an inspection device for measuring the mounting condition of parts to the transport vehicle is arranged on the second inspection rail.

4. The overhead transport vehicle system according to claim 1 or 2, wherein the second inspection rail is connected to an entry rail for allowing the transport vehicle to enter the second inspection rail from the outside, and an exit rail is connected to the second inspection rail for allowing the transport vehicle to exit to the outside.

5. The overhead transport vehicle system according to claim 4, wherein the lifter has a lifting rail configured to move up and down, and the height position of the lifting rail is switched between a first height position in which the lifting rail connects the running rail and the first inspection rail, and a second height position in which the lifting rail connects the entry rail or the departure rail to the second inspection rail.

6. The overhead transport vehicle system according to claim 1 or 2, further comprising a third inspection rail which, in a plan view, overlaps at least a portion with at least one of the first inspection rail and the second inspection rail, and is provided at a height position between the first inspection rail and the second inspection rail, and on which the transport vehicle can travel.

7. The overhead transport vehicle system according to claim 6, further comprising a circular rail connected to the downstream side and the upstream side of the third inspection rail, on which the transport vehicle can travel.

8. The overhead transport vehicle system according to claim 1 or 2, further comprising another running rail provided at a different height from the aforementioned running rail, wherein the lifter moves the transport vehicle between the aforementioned running rail and the other running rail.

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