Rotary support device and workpiece support method

Abstract

In this rotary support device, which is capable of supporting a workpiece so as to be rotatable around a first axis, a second table can rotate around the first axis with respect to a first table while supporting the workpiece. A support device is spaced apart from the second table when the second table is rotating around the first axis with respect to the first table, and can support the second table from a direction orthogonal to the first axis when the second table is not rotating around the first axis.

Description

Rotary support device and method for supporting a workpiece

[0001] The present technology relates to a rotary support device and a method for supporting a workpiece.

[0002] Conventionally, a rotary support device that rotatably supports a workpiece has been known. Examples of such a rotary support device include those described in Utility Model Registration No. 2520519 (Patent Document 1) and Patent No. 4590244 (Patent Document 2).

[0003] Utility Model Registration No. 2520519Patent No. 4590244

[0004] When using the rotary support device, effective utilization of space and improvement of reliability are required. Also, when manufacturing the rotary support device, it is required to reduce labor or cost.

[0005] An object of the present technology is to provide a compact rotary support device from one viewpoint, to provide a rotary support device with reduced manufacturing labor or cost from another viewpoint, and to provide a highly reliable rotary support device or a method for supporting a workpiece from still another viewpoint.

[0006] The present technology provides the following rotary support device and method for supporting a workpiece.

[0007] [1] A rotary support device capable of supporting a workpiece rotatably about a first axis, comprising a fixed first table, a second table that is cantilever-supported on the first table so as to be rotatable about the first axis with respect to the first table, and a support device that is separated from the second table when the second table rotates about the first axis and that can support the second table from a direction orthogonal to the first axis when the second table does not rotate about the first axis.

[0008] According to the embodiment described in [1] above, by adopting a cantilever structure for the second table, it becomes possible to omit the other table (support table) required in a double-support structure, thereby reducing the number of parts. Furthermore, the alignment work of the first axis can be omitted during the manufacturing of the rotary support device. As a result, the labor and cost involved in the manufacturing of the rotary support device can be reduced. In addition, the reliability of the rotary support device or the support of the workpiece is improved.

[0009] Furthermore, it becomes possible to configure the rotary support device as a whole in a compact manner, and the interference area during workpiece loading or processing can be reduced, thereby expanding the usable space.

[0010] Furthermore, when the second table is not rotating around the first axis, it can be supported from a direction perpendicular to the first axis, allowing for more stable support of the second table during workpiece machining and other processes. As a result, the reliability of the rotation support device is further improved.

[0011] [2] The rotary support device according to [1], further comprising a support mechanism provided in a first region of the second table for supporting the workpiece, wherein the support device is capable of supporting the second table on the opposite side of the first table with respect to the first region.

[0012] According to the embodiment of [2] above, by arranging the support device on the opposite side of the first table from the workpiece support mechanism, the second table can be supported on both sides of the workpiece when the second table is not rotating. As a result, the second table can be supported more stably, and the reliability of the rotating support device is further improved.

[0013] [3] The rotary support device according to [2], further comprising a rotation mechanism provided on the second table, which is capable of rotating the support mechanism around a second axis perpendicular to the first axis.

[0014] According to the embodiment described in [3] above, the workpiece supported on the second table can be rotated around the mutually orthogonal first and second axes, making it possible to freely change the orientation of the workpiece on the second table.

[0015] [4] The rotational support device according to any one of [1] to [3], wherein the support device includes a contact portion that is provided to be movable in a direction perpendicular to the first axis, the second table includes a columnar portion extending along the direction of the first axis, the columnar portion has an outer peripheral surface facing the contact portion, and the contact portion is capable of supporting the second table by contacting the outer peripheral surface.

[0016] According to the embodiment described in [4] above, the support of the second table by the support device can be achieved without using a complex mechanism. As a result, both a reduction in the number of parts and stable support can be achieved.

[0017] [5] The rotational support device according to [4], wherein, when viewed from the direction of the first axis, at least a part of the outer circumference of the columnar portion is formed in an arc shape.

[0018] According to the embodiment of [5] above, the distance between the arc-shaped portion and the contact portion can be kept substantially constant regardless of the rotation angle of the second table. Therefore, the support device can support the second table without excessively increasing the forward and backward movement of the contact portion. As a result, the support device can be miniaturized.

[0019] [6] A method for supporting a workpiece so as to be rotatable about a first axis, comprising the steps of: preparing a rotatable support device including a fixed first table, a second table supported by the first table in a state so as to be rotatable about the first axis, and a support device capable of supporting the second table from a direction perpendicular to the first axis; placing the workpiece on the second table; rotating the second table about the first axis with the first table cantilevering the second table and the support device separated from the second table; and, after rotating the second table about the first axis, placing the second table in a state where the second table is not rotating, placing the support device to support the second table from a direction perpendicular to the first axis.

[0020] According to the embodiment described in [6] above, by cantilevering the second table during rotation, a compact rotary support device with reduced manufacturing effort and cost can be realized. Furthermore, a highly reliable rotary support device or workpiece support can be realized, which can stably support the workpiece by the support device after the workpiece has been rotated.

[0021] [7] The method for supporting a workpiece according to [6], wherein the support device supports the second table on the opposite side of the first table to the workpiece supported on the second table.

[0022] According to the embodiment of [7] above, when the second table does not rotate around the first axis, the second table is supported on both sides of the workpiece, thereby providing more stable support for the second table. As a result, the reliability of workpiece support is further improved.

[0023] Thus, this technology offers several advantages: one is the provision of a compact rotary support device; another is the provision of a rotary support device with reduced manufacturing effort and cost; and yet another is the provision of a highly reliable rotary support device or workpiece support method. However, the scope of this technology is not necessarily limited to achieving all of the above advantages.

[0024] This figure shows a machine tool including a rotary support device according to an embodiment. This figure shows the rotary support device according to an embodiment as viewed from the direction of arrow II in Figure 1. This is a cross-sectional view (1) showing the structure of the support device included in the rotary support device according to an embodiment. This is a cross-sectional view (2) showing the structure of the support device included in the rotary support device according to an embodiment. This figure shows a machine tool including a rotary support device according to a first comparative example. This figure shows a machine tool including a rotary support device according to a second comparative example. This figure shows a support device included in the rotary support device according to a first modified example. This is a diagram (1) showing the support device included in the rotary support device according to a second modified example. This is a diagram (2) showing the support device included in the rotary support device according to a second modified example. This figure shows a rotary support device according to a third modified example. This is a diagram (1) showing the support device included in the rotary support device according to a third modified example. This is a diagram (2) showing the support device included in the rotary support device according to a third modified example. This figure shows a rotary support device according to a fourth modified example. This is a diagram (1) showing the support device included in the rotary support device according to a fourth modified example. This is a diagram (2) showing the support device included in the rotary support device according to a fourth modified example.

[0025] Embodiments of this technology are described below. Note that the same or corresponding parts may be denoted by the same reference numerals, and their descriptions may not be repeated.

[0026] In the embodiments described below, when referring to the number, quantity, etc., unless otherwise specified, the scope of this technology is not necessarily limited to that number, quantity, etc. Also, in the embodiments described below, each component is not necessarily essential to this technology unless otherwise specified. Furthermore, this technology is not necessarily limited to achieving all of the effects and advantages mentioned in these embodiments.

[0027] In this specification, the terms "comprise," "include," and "have" are in open-ended form. That is, if a configuration includes one configuration, it may also include other configurations, or it may not.

[0028] Furthermore, when geometric terms and terms describing positional and directional relationships are used in this specification, such as "parallel," "orthogonal," "45° oblique," "coaxial," and "alongside," these terms allow for manufacturing tolerances or slight variations. When terms describing relative positional relationships, such as "upper side" and "lower side," are used in this specification, these terms are used to indicate the relative positional relationship in a single state, and the relative positional relationship may be reversed or rotated to any angle depending on the installation direction of each mechanism (for example, by inverting the entire mechanism upside down).

[0029] Furthermore, the dimensions of each component illustrated in this specification, such as width, length, and diameter, are not limited to those shown and may be changed as appropriate. In this specification, each component may be assigned an ordinal number such as "first" or "second," but these ordinal numbers do not limit priority, order, etc., unless explicitly specified.

[0030] Figure 1 shows a machine tool 10 (machining center) according to one embodiment. As shown in Figure 1, the machine tool 10 includes a rotary support device 1, a spindle 2, and a cutting tool 3. The rotary support device 1 is mounted on a base 4. The rotary support device 1 can hold a workpiece W. The spindle 2 can hold the cutting tool 3. The cutting tool 3 is a tool for performing cutting on the workpiece W (workpiece) held by the rotary support device 1.

[0031] Figure 2 shows the rotary support device 1 as viewed from the direction of arrow II in Figure 1. The configuration of the rotary support device 1 will be explained with reference to Figures 1 and 2.

[0032] The rotary support device 1 is capable of supporting a workpiece W so as to be rotatable around the A-axis (first axis). As shown in Figures 1 and 2, the rotary support device 1 includes a first table 100, a second table 200, an axis support device 300, a clamping device 400, a nozzle 500, and a conduit 600.

[0033] The first table 100 is fixed on the base 4. The first table 100 is provided with a rotary joint 110, a rotating member 120, and a roller gear cam 130.

[0034] The rotary joint 110 is provided on the first table 100 along the A-axis. The rotary joint 110 is built into the first table 100. Multiple flow paths 111 are formed inside the rotary joint 110.

[0035] Power from a motor (first drive source), not shown, is transmitted to the rotating member 120 via a roller gear cam 130. The rotating member 120 is supported via a roller bearing 140 so as to be rotatable about the A-axis relative to the first table 100. The rotating member 120 is fixed to the second table 200. Therefore, the rotating member 120 can rotate the first table 100 and the second table 200 relative to each other about the A-axis. That is, the second table 200 can be rotated about the A-axis relative to the first table 100.

[0036] As shown in Figure 1, the roller gear cam 130 includes an input shaft 131 and a cam follower 132. By using the roller gear cam 130, torque can be transmitted by rolling contact, resulting in a highly durable rotary support device 1 that enables high-precision and stable operation.

[0037] The second table 200 is rotatably mounted on the first table 100 around the A-axis. When the second table 200 rotates, it is cantilevered to the first table 100. A flow path 201 is formed within the second table 200. The second table 200 includes a shaft member 210 (columnar portion) extending along the direction of the A-axis. When viewed from the direction shown in Figure 2, the shaft member 210 has an arc-shaped outer shape (outer surface).

[0038] The shaft support device 300 (support device) is provided on the base 41 located on the opposite side of the first table 100 from the second table 200. The shaft support device 300 includes a head portion 310 (contact portion) that is provided to be able to move back and forth in a direction perpendicular to the A axis (up and down direction in Figure 1). The head portion 310 of the shaft support device 300 can support the second table 200 by contacting the outer circumferential surface of the shaft member 210. The working fluid for driving the head portion 310 to move back and forth is supplied and discharged via the pipeline 320.

[0039] When the second table 200 rotates around the A axis, the head portion 310 of the axis support device 300 moves away from the axis member 210. When the second table 200 does not rotate around the A axis, the axis support device 300 can support the second table 200 from a direction perpendicular to the A axis.

[0040] The second table 200 is rotated around the A-axis and, after coming to a stop in a predetermined position, the head portion 310 is extended and brought into contact with the shaft member 210 of the second table 200. By locking the head portion 310 in this state, the second table 200 (shaft member 210) can be supported from a direction perpendicular to the A-axis. Therefore, when cutting a workpiece W, the second table 200 can be supported more stably from both sides of the workpiece W in the A-axis direction.

[0041] The clamping device 400 (support mechanism) and nozzle 500 are provided on the second table 200. The clamping device 400 clamps the workpiece W, thereby supporting the workpiece W on the rotating support device 1. Coolant is discharged from the nozzle 500 toward the workpiece W.

[0042] A pipeline 600 is connected to the first table 100. The pipeline 600 includes multiple pipelines 610 and 620 (only two are shown in Figure 1, but the number is not limited to two). Various fluids necessary for the second table 200 supporting the workpiece W can be supplied from the pipelines 610 and 620.

[0043] The rotary joint 110 includes a shaft portion that rotates about the A axis together with the rotating member 120, and a housing fixed to the first table 100. The flow path 111 can be formed along the axis of the shaft portion and can also be formed between the shaft portion and the housing. The rotary joint 110 can relatively rotate the shaft portion and the housing while communicating each flow path 111.

[0044] The plurality of flow paths 111 are independent of each other. Different types of fluids can flow through the plurality of flow paths 111. Through the plurality of flow paths 111, the working fluid in the clamp device 400 (hydraulic drive or pneumatic drive), the coolant discharged from the nozzle 500, etc. can be supplied. However, the fluid flowing through the flow path 111 is not limited to these. The fluid flowing through the flow path 111 may be a liquid or pressurized air.

[0045] FIGS. 3 and 4 are cross-sectional views showing the structure of the shaft support device 300. FIG. 3 shows a state (first state) in which the head portion 310 is separated from the shaft member 210, and FIG. 4 shows a state (second state) in which the head portion 310 abuts on the shaft member 210.

[0046] As shown in FIGS. 3 and 4, the shaft support device 300 includes a housing 330, a partition member 340, a tapered piston 350, steel balls 360, a plunger 370, a tapered sleeve 380, and a piston member 390.

[0047] The housing 330 includes a first member 331, a second member 332, and a third member 333. The first member 331 and the second member 332 are screwed together at the fastening portion 334. As a result, the tapered sleeve 380 is pressed downward. The head portion 310 and the plunger 370 are held in the lowered positions shown in FIG. 3.

[0048] The partition member 340 is provided inside the housing 330 and partitions the internal space of the housing 330. The piston member 390 fits inside the partition member 340.

[0049] A spring 391 (lift spring) is provided between the head portion 310 and the piston member 390. The spring 391 biases the head portion 310 upward when the piston member 390 rises and approaches the head portion 310.

[0050] A spring 392 (return spring) is provided between the bulkhead member 340 and the piston member 390. The spring 392 biases the piston member 390 downward.

[0051] A spring 351 (return spring) is provided between the second member 332 of the housing 330 and the tapered piston 350. The spring 351 biases the tapered piston 350 upward.

[0052] When the second table 200 rotates around axis A, the shaft support device 300 is in the state shown in Figure 3. After the second table 200 comes to a rest in a predetermined position, hydraulic fluid is supplied from the pipeline 320. The hydraulic fluid is supplied to the shaft support device 300 through a flow path 42 formed inside the base 41. A flow control valve 700 is attached to the shaft support device 300. When the hydraulic fluid is supplied to the shaft support device 300, the flow control valve 700 adjusts the flow rate of the hydraulic fluid with a small gap, and when the hydraulic fluid is discharged from the shaft support device 300, it allows a large flow rate by opening a check valve.

[0053] The hydraulic fluid supplied to the shaft support device 300 flows into the lower side of the piston member 390, and the piston member 390 rises against the biasing force of the spring 392 due to the hydraulic pressure. When the piston member 390 rises and approaches the head portion 310, the spring 391 biases the head portion 310 upward. As a result, the head portion 310 comes into contact with the shaft member 210 (contact state), as shown in Figure 4.

[0054] After the head portion 310 contacts the shaft member 210, hydraulic fluid is further supplied to the shaft support device 300. The supplied hydraulic pressure drives the tapered piston 350 downward. As a result, the tapered sleeve 380 provided on the inner circumference side of the tapered piston 350 is pressed radially inward via the multiple steel balls 360. As a result, the plunger 370 fitted to the inner circumference of the tapered sleeve 380 and the head portion 310 attached to the tip of the plunger 370 are locked in the state shown in Figure 4, and strongly support the shaft member 210 of the second table 200 from below in the figure (supported state).

[0055] When the second table 200 is rotated around the A axis again, hydraulic fluid is discharged from the shaft support device 300. At this time, the tapered piston 350 is biased upward in the figure by the biasing force of the spring 351. Also, the piston member 390 is biased downward in the figure by the biasing force of the spring 392. As a result, the shaft support device 300 returns to the state shown in Figure 3 (retracted state). Even if there is a certain misalignment (deviation from the A axis) of the shaft member 210, the head portion 310 is in the retracted state when the second table 200 rotates and does not hinder the rotation of the second table 200.

[0056] The form of the shaft support device 300 is not limited to those illustrated in Figures 3 and 4. Furthermore, the flow control valve 700 is not necessarily required.

[0057] Figures 5 and 6 show machine tools 10A and 10B including rotary support devices 1A and 1B according to comparative examples.

[0058] In the comparative examples shown in Figures 5 and 6, the machine tools 10A and 10B each include rotary support devices 1A and 1B, spindles 2A and 2B, and cutting tools 3A and 3B. The rotary support devices 1A and 1B are mounted on bases 4A and 4B.

[0059] In the comparative example shown in Figure 5 (the first comparative example), the rotary support device 1A includes a first table 100A, a second table 200A, a support table 300A, a clamping device 400A, a nozzle 500A, and conduits 610A, 620A (600A). The second table 200A is rotatably mounted around the A-axis relative to the first table 100A and the support table 300A. The second table 200A is supported by both the first table 100A and the support table 300A.

[0060] In the comparative example shown in Figure 6 (the second comparative example), the rotary support device 1B includes a first table 100B, a second table 200B, a clamping device 400B, a nozzle 500B, and conduits 610B, 620B (600B). The second table 200B is rotatably mounted on the first table 100B around the A-axis. The second table 200B is cantilevered on the first table 100B.

[0061] In the example shown in Figure 5, space is required for the support table 300A to support the second table 200A from both sides. As a result, the rotary support device 1A becomes larger and heavier, making it difficult to mount it on a small, low-cost, and high-speed device.

[0062] Furthermore, in order to achieve smooth and highly accurate rotation in a double-supported configuration, it is necessary to improve the installation accuracy (centering) of the drive-side bearing of the first table 100A and the driven-side bearing of the support table 300A. As a result, the effort or cost involved in manufacturing the rotating support device 1A may increase.

[0063] In the example shown in Figure 6, when machining the workpiece W with the cutting tool 3B, the machining load must be supported only by the drive-side bearing of the first table 100B, which may reduce the support rigidity or accuracy.

[0064] In contrast, according to the rotary support device 1 of this embodiment, by making the second table 200 a cantilever structure, the support table 300A required for the double-support structure shown in Figure 5 can be omitted, thereby reducing the number of parts. Furthermore, the A-axis alignment work can be omitted during the manufacturing of the rotary support device 1. As a result, the labor and cost involved in the manufacturing of the rotary support device 1 can be reduced. Moreover, the reliability of the operation of the rotary support device 1 is improved.

[0065] Furthermore, the rotary support device 1 can be configured to be compact as a whole, and the interference area during loading or processing of the workpiece W can be reduced, thereby expanding the usable space.

[0066] Furthermore, when the second table 200 is not rotating around the A axis, it can be supported from a direction perpendicular to the A axis. Therefore, when machining the workpiece W, the second table 200 can be supported more stably compared to the cantilever structure shown in Figure 6, and it can withstand larger machining loads.

[0067] Furthermore, by providing a rotary joint 110 on the first table 100, a multi-circuit flow path 111 (preferably between 2 and 24 circuits, but not limited thereto) leading to the second table 200 can be configured. By configuring a multi-circuit flow path 111, it becomes possible to use many automated devices on the second table 200.

[0068] Furthermore, since the first table 100 and the axial support device 300 are positioned so as to sandwich the support area P (first area) of the workpiece W supported by the second table 200, the second table 200 can be supported from both sides of the workpiece W in the A-axis direction. As a result, the second table 200 can be supported more stably, and the reliability of the rotary support device 1 is further improved.

[0069] Furthermore, since the second table 200 is provided with a shaft member 210 extending along the A-axis direction, and the outer circumferential surface of the shaft member 210 is supported, the second table 200 can be supported by the shaft support device 300 without using a complex mechanism. As a result, both a reduction in the number of parts and stable support can be achieved.

[0070] Figure 7 shows an axial support device 300 according to the first modified example. As shown in Figure 7, a plurality of axial support devices 300 (two in the example of Figure 7) may be provided so as to be arranged in the circumferential direction of the axial member 210. Furthermore, as shown in Figure 7, the plurality of axial support devices 300 may support the axial member 210 from multiple different directions (diagonal directions).

[0071] Figures 8 and 9 show an axial support device 300 according to a second modified example. When viewed from the direction shown in Figures 8 and 9, the axial member 210 has a semicircular outer shape (outer surface) that combines a straight line and an arc.

[0072] As shown in the examples in Figures 8 and 9, even if only a portion of the shaft member 210 is formed in an arc shape, within the movable range of the second table 200 (a 90° range from the state in Figure 8 to the state in Figure 9), the distance between the arc-shaped portion of the shaft member 210 and the head portion 310 can be kept substantially constant regardless of the rotation angle of the second table 200. Therefore, the shaft support device 300 can support the second table 200 without excessively increasing the forward and backward movement distance of the head portion 310. As a result, the shaft support device 300 can be miniaturized.

[0073] Furthermore, as shown in Figures 8 and 9, by forming the shaft member 210 in a semicircular shape, space can be saved around the shaft member 210, and the interference area with, for example, the workpiece W transport device can be reduced.

[0074] Figures 10 to 12 show an axis support device 300 according to a third modified example. In the example shown in Figures 10 to 12, the lower plane of the second table 200 is supported by the axis support device 300. As shown in Figures 11 and 12, multiple (two) axis support devices 300 are provided, arranged in the direction perpendicular to the plane of the paper in Figure 10. In the supported state shown in Figure 11, the axis support device 300 strongly supports the lower surface of the second table 200, and in the retracted state shown in Figure 12, the head portion 310 of the axis support device 300 can be retracted to the outside of the interference region 2000 when the second table 200 rotates.

[0075] Figures 13 to 15 show an axis support device 300 according to a fourth modified example. In the example shown in Figures 13 to 15, the second table 200 includes a rotation mechanism 220 that can rotate the workpiece support surface 230 around the C axis (second axis) which is perpendicular to the A axis. As a result, the orientation of the workpiece W on the second table 200 can be freely changed.

[0076] The rotation mechanism 220 is driven by a motor (second drive source) (not shown) assembled to the second table 200. A cable (not shown) that supplies power to this motor is housed in a cable protection tube 240 (tube member) and guided near the axis of the A-axis. The cable protection tube 240 is connected to the second table 200 via bearings. Therefore, even when the second table 200 rotates around the A-axis, the rotation of the cable protection tube 240 is suppressed.

[0077] In this way, by guiding the cable near the axis of the A-axis with the cable protection tube 240 and adopting a structure in which the rotation of the cable protection tube 240 is suppressed, the power supply cable to the rotating mechanism 220 can be effectively protected.

[0078] While embodiments of the present technology have been described above, the embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present technology is indicated by the claims, and all modifications within the meaning and scope of the claims are intended to be included.

[0079] 1, 1A, 1B Rotary support device, 2, 2A, 2B Main spindle, 3, 3A, 3B Cutting tool, 4, 4A, 4B, 41 Base, 42 Flow path, 10, 10A, 10B Machine tool, 100, 100A, 100B First table, 110 Rotary joint, 111 Flow path, 120 Rotating member, 130 Roller gear cam, 131 Input shaft, 132 Cam follower, 140 Roller bearing, 200, 200A, 200B Second table, 201 Flow path, 210 Axis member, 220 Rotation mechanism, 230 Work support surface, 240 Cable protection tube, 300 Axis support device, 300A Support table, 310 Head section, 320 Conduit, 330 Housing, 331 First member, 332 Second member, 333 Third member, 334 fastening part, 340 partition member, 350 tapered piston, 351 spring, 360 steel ball, 370 plunger, 380 tapered sleeve, 390 piston member, 391, 392 spring, 400, 400A, 400B clamping device, 500, 500A, 500B nozzle, 600, 600A, 600B, 610, 610A, 610B, 620, 620A, 620B pipeline, 700 flow control valve.

Claims

1. A rotary support device capable of supporting a workpiece so as to be rotatable around a first axis, comprising: a fixed first table; a second table cantilevered to the first table so as to be rotatable around the first axis; and a support device that separates from the second table when the second table rotates around the first axis, and supports the second table from a direction perpendicular to the first axis when the second table does not rotate around the first axis.

2. The rotary support device according to claim 1, further comprising a support mechanism provided in a first region of the second table for supporting the workpiece, wherein the support device is capable of supporting the second table on the opposite side of the first table from the first region.

3. The rotary support device according to claim 2, further comprising a rotation mechanism provided on the second table, capable of rotating the support mechanism about a second axis perpendicular to the first axis.

4. The rotational support device according to any one of claims 1 to 3, wherein the support device includes a contact portion provided to be movable in a direction perpendicular to the first axis, the second table includes a columnar portion extending along the direction of the first axis, the columnar portion has an outer peripheral surface facing the contact portion, and the contact portion is capable of supporting the second table by contacting the outer peripheral surface.

5. The rotary support device according to claim 4, wherein, when viewed from the direction of the first axis, at least a portion of the outer circumference of the columnar portion is formed in an arc shape.

6. A method for supporting a workpiece so as to be rotatable about a first axis, comprising the steps of: preparing a rotatable support device including a fixed first table, a second table supported by the first table in a manner rotatable about the first axis, and a support device capable of supporting the second table from a direction perpendicular to the first axis; placing the workpiece on the second table; rotating the second table about the first axis with the first table cantilevering the second table and the support device separated from the second table; and, after rotating the second table about the first axis, placing the support device to support the second table from a direction perpendicular to the first axis while the second table is not rotating.

7. The method for supporting a workpiece according to claim 6, wherein the support device supports the second table on the opposite side of the first table to the workpiece supported on the second table.

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