Mounting-related device and control method

Abstract

A mounting-related device that performs a mounting-related process relating to a mounting process for positioning a component on an object, said mounting-related device comprising: a first drive unit that moves a work head along the axial direction of a first axis, said work head performing prescribed work with regard to the object; a second drive unit that moves a work unit along the axial direction of a second axis, said second axis being along the first axis, and said work unit being provided to the work head and performing the prescribed work; and a control unit that, when the work unit is to be moved, drives the second drive unit on the basis of a work driving command value for the second drive unit for moving the work unit, and causes the first drive unit to output a driving force which is based on a compensation driving command value, said compensation driving command value having been obtained using the work driving command value and according to an interference transmission characteristic.

Description

Implementation-related apparatus and control method

[0008] ,

[0007] , ,

[0006] ,

[0001] This specification discloses an implementation-related apparatus and a control method.

[0002] Conventionally, as an implementation apparatus for implementing components on an object such as a substrate, for example, a Z-axis moving base movable in the Z-axis direction, and an implementation head provided on the Z-axis moving base and having an implementation tool for sucking and holding a semiconductor chip, And a pressurizing mechanism for applying a force in the Z-axis direction to the mounting head, and a pressure receiving member slidable by the pressurizing mechanism have been proposed (see, for example, Patent Document 1). In this apparatus, it is said that while maintaining high implementation accuracy, it is possible to prevent the entire apparatus from becoming large.

[0003] Japanese Patent Application Laid-Open No. 2016-015472

[0004] In the implementation apparatus of Patent Document 1 described above, the implementation tool is configured to move up and down and the implementation head is also configured to move up and down. However, in the operation of the two axes, interference may occur and the positioning accuracy may decrease.

[0005] The present disclosure has been made in view of such problems, and a main object thereof is to provide an implementation-related apparatus and a control method that can further improve the execution accuracy of operations related to implementation processing.

[0006] The implementation-related apparatus and control method disclosed in this specification have adopted the following means in order to achieve the above main object.

[0007] The implementation-related apparatus of the present disclosure is an implementation-related apparatus that works on a substrate, and includes a first drive unit that moves a work head that performs a predetermined operation on an object along the axial direction of a first axis, and a work unit that is disposed on the work head and performs the predetermined operation. A second drive unit that moves along the axial direction of a second axis along the first axis, and when the work unit moves, the second drive unit is driven based on a work drive command value of the second drive unit that moves the work unit, and a compensation drive command value based on the work drive command value. And a control unit that outputs a driving force to the first drive unit.

[0008] In this mounting-related device, when moving the work unit, the driving force of the compensated drive command value obtained based on the work drive command value is output to the first drive unit. This further suppresses the reaction force on the second axis side acting on the first axis side, and for example, the positioning accuracy of the work unit can be further improved. Therefore, this mounting-related device can further improve the execution accuracy of tasks related to the mounting process.

[0009] A schematic diagram showing an example of the mounting system 10 and mounting device 13. A schematic diagram showing an example of the work head 32 equipped with the large sampling unit 42. A schematic diagram showing an example of the mounting device 13 equipped with the dispenser unit 43. A diagram showing an example of the appearance of the work head 32 equipped with the dispenser unit 43. A diagram showing an example of the circuit configuration of the control device 20. A block diagram showing an example of Z-Zs axis interference. A flowchart showing an example of the interference transmission characteristic filter generation processing routine. A diagram showing an example of the filter design model for Z-Zs axis interference. A flowchart showing an example of the mounting-related processing routine. A diagram showing an example of Z-Zs axis interference control.

[0010] This embodiment will be described below with reference to the drawings. Figure 1 is a schematic diagram showing an example of a mounting system 10 and a mounting device 13. Figure 2 is a schematic diagram showing an example of a work head 32 equipped with a large sampling unit 42. Figure 3 is a schematic diagram showing an example of a mounting device 13 equipped with a dispenser unit 43. Figure 4 is an explanatory diagram showing an example of the external appearance of the work head 32 equipped with the dispenser unit 43. Figure 5 is an explanatory diagram showing an example of the circuit configuration of the control device 20. In this embodiment, the left-right direction (X-axis), front-back direction (Y-axis), and up-down direction (Z-axis) are as shown in Figures 1 to 4.

[0011] The mounting system 10 is configured as a production line in which mounting devices 13, which process components P onto a substrate S as an object, are arranged in the transport direction of the substrate S. Here, the object to be mounted is described as a substrate S, but it is not particularly limited as long as it mounts components P, and may also be a three-dimensional substrate. As shown in Figure 1, this mounting system 10 is configured to include a printing device 11, a printing inspection device 12, a mounting device 13, a mounting inspection device 15, a reflow device (not shown), and a control device 18. The printing device 11 is a device that prints a viscous fluid such as solder paste onto the substrate S. The printing device 11 may also be a device that prints adhesives or conductive pastes as the viscous fluid. The printing inspection device 12 is a device that inspects the state of the printed viscous fluid. The mounting device 13 is a device that processes components P onto the substrate S. When the work head 32 is fitted with the dispenser unit 43, this mounting device 13 can also be configured as a viscous fluid coating device. The mounting inspection device 15 is a device that inspects the state of the components P mounted by the mounting device 13. The mounting device 13 may also be a mounting-inspection device that has the functions of the mounting inspection device 15. The reflow device is a device that reflows a substrate on which solder has been printed and components P have been mounted. The printing device 11, the printing inspection device 12, the mounting device 13, the mounting inspection device 15, and the reflow device are all mounting-related devices that perform mounting-related processing related to the mounting process of placing components P on a substrate S as the target object. The management device 18 is a computer that manages information on each device of the mounting system 10.

[0012] The mounting device 13 is a device that mounts components P onto a substrate S printed with viscous fluid by the printing device 11. The mounting device 13 comprises a control device 20, a substrate processing unit 25, a component supply unit 26, a mounting imaging unit 29, a mounting unit 30, a standby unit 46, an operation panel, and a communication unit. The control device 20 is configured as a processor centered on a control unit 21 such as a CPU, and is responsible for controlling the entire device. This control device 20 outputs control signals to the substrate processing unit 25, the component supply unit 26, the mounting imaging unit 29, the mounting unit 30, and the operation panel, and inputs signals from the substrate processing unit 25, the component supply unit 26, the mounting imaging unit 29, the mounting unit 30, and the operation panel. The control device 20 includes a storage unit 22, which is a large-capacity storage medium such as flash memory. The storage unit 22 stores mounting condition information, which includes information on the components P to be mounted, the arrangement order and position of the components P on the substrate S, and the mounting position of the feeder 27 for picking up the components. Furthermore, this implementation condition information also includes information on the application position of the viscous fluid on the substrate S by the dispenser unit 43.

[0013] The substrate processing unit 25 is responsible for loading, transporting, fixing, and unloading the substrate S at the mounting position. The component supply unit 26 is a unit that supplies components P to the mounting unit 30. The component supply unit 26 is equipped with one or more feeders 27 having reels that hold components. The component supply unit 26 includes a tray unit 28 in which components P are arranged on a tray. The mounting imaging unit 29 is a camera that images the area above and captures images of components P and the like held by the work head 32 of the mounting unit 30.

[0014] The mounting unit 30 is a unit that picks up components P from the component supply unit 26 and places them on a substrate S fixed to the substrate processing unit 25. The mounting unit 30 includes a head moving unit 31, a work head 32, and a standby unit 46. The head moving unit 31 includes a slider that moves in the XY direction guided by a guide rail and a motor that drives the slider. The work head 32 performs predetermined work on an object, is detachably mounted on the slider, and picks up one or more components and moves in the XY direction by the head moving unit 31. The head moving unit 31 has a first drive unit 34 disposed on the slider that moves along the Zs axis direction with the work head 32 as the first axis. As shown in Figure 2, the first drive unit 34 is configured as a linear motion mechanism of a ball screw mechanism, comprising a Zs axis motor 34a, a ball screw 34b, and a movable body 34c. The ball screw 34b is screwed into a ball nut (not shown) fixed to the movable body 34c. The movable body 34c rotates the ball screw 34b using the Zs-axis motor 34a, causing the movable body 34c, to which the work head 32 is fixed, to move along the axial direction A. Note that the first drive unit 34 is not limited to a ball screw mechanism, and may be a linear motor, for example.

[0015] The work head 32 comprises a mounting section 33 and a second drive section 35. The mounting section 33 is arranged on the Z-axis as the second axis and is configured to allow attachment and detachment of multiple types of work units. The work head 32 can perform various tasks by attaching various work units to the mounting section 33. Work units include, for example, a rotary section 40, a large-scale sampling section 42, and a dispenser section 43. As shown in Figure 1, the rotary section 40 is a tool in which multiple sampling members 41 for sampling small chip components are arranged around the circumference. The work head 32 with the rotary section 40 attached to the mounting section 33 can sample and place multiple components P. As shown in Figure 2, the large-scale sampling section 42 is a tool that can sample and place one large component PL which is larger than small components P such as chip components. The sampling members 41 and the large-scale sampling section 42 may be suction nozzles that use negative pressure to sample components, or mechanical chucks that mechanically hold components. As shown in Figures 3 and 4, the dispenser unit 43 is a tool capable of applying viscous fluids such as fillers, adhesives, and conductive materials. In the work head 32, to which the dispenser unit 43 is mounted on the mounting unit 33, the viscous fluid is discharged from the discharge unit 44 by means of air supply from a pressurizing unit (not shown). The second drive unit 35 is disposed on the work head 32 and moves the work unit that performs predetermined work along the axial direction A of the Z axis, which is the second axis parallel to the Zs axis, which is the first axis. When the rotary unit 40 is mounted on the mounting unit 33, the second drive unit 35 moves the cylinder on which the sampling member 41 is disposed along the axial direction A. Also, when the large sampling unit 42 is mounted on the mounting unit 33, the second drive unit 35 moves the large sampling unit 42 along the axial direction A. Also, when the dispenser unit 43 is mounted on the mounting unit 33, the second drive unit 35 moves the dispenser unit 43 along the axial direction A. The second drive unit 35 may be a linear motion mechanism of a ball screw mechanism, similar to the first drive unit 34, comprising a Z-axis motor, a ball screw, and a movable body, or it may be a linear motor. The work head 32 is disposed on the housing side of the mounting device 13 at one end and moves along the direction of the first axis by the first drive unit 34, while the work unit is disposed inside the work head 32 and moves along the axial direction of the second axis by the second drive unit 35.

[0016] The standby unit 46 is a unit that houses and keeps one or more work units in standby mode. The mounting device 13 can automatically change the tools used as work units by moving the work head 32 to the standby unit 46. The mounting device 13 may also be equipped with a maintenance unit that performs maintenance such as cleaning the dispenser unit 43. The operation panel is a unit that receives input from the operator and presents information to the operator. This operation panel includes a display unit which is a display and an operation unit which has a touch panel and buttons. The communication unit is an interface for exchanging information with external devices such as the printing device 11 and the management device 18.

[0017] Furthermore, the control device 20 has the circuit configuration shown in Figure 5. As will be described in detail later, when the work unit attached to the work head 32 is moved, the control unit 21 drives the second drive unit 35 based on the work drive command value of the second drive unit 35 that moves the work unit, and performs axial interference control in which the driving force of the compensation drive command value based on this work drive command value is output to the first drive unit 34. The control unit 21 uses the work drive command value to output the driving force of the compensation drive command value obtained by interference transmission characteristics to the first drive unit 34. The control device 20 receives the work drive command value of the second drive unit 35 as input, outputs a compensation drive command value that matches this work drive command value through an interference transmission characteristic filter, and performs axial interference control to cancel out the "Z→Zs force disturbance" exerted on the first drive unit 34. In addition, when the work drive command value of the second drive unit 35 is value "0", the control device 20 also outputs a compensation drive command value of value "0". Furthermore, the control device 20 performs delay processing on the compensation drive command value to synchronize the timing of cancellation with the "Z→Zs force disturbance".

[0018] Figure 7 is a block diagram showing an example of Z-Zs axis interference. In the work head 32, which is equipped with a large sampling unit 42 and a dispenser unit 43, there are two axes, the Z axis and the Zs axis, which operate along the axial direction A, as shown in Figure 2. Therefore, when a heavy tool such as the large sampling unit 42 or the dispenser unit 43 is mounted on the Z axis and operated with the Z axis torque command value Tcmd, the driving reaction force of the Z axis is transmitted to the Zs axis and applied to the Zs axis as a force disturbance of "Gz→zs" (Figure 6). This causes a deviation in the Zs axis, which adversely affects the positioning accuracy of the work unit tip. For this reason, the mounting device 13 for changing tools performs axis interference control to cancel out the "Z→Zs force disturbance" using a compensating drive command value (Tcomp) as needed. The meaning of the symbols shown in Figures 6, 8, and 10 is summarized in Table 1.

[0019]

[0020] Next, the operation of the mounting system 10 of this embodiment, as configured in this way, will be explained, starting with the process of generating a filter for the interference transmission characteristics of the workpiece to be attached to the work head 32 of the mounting device 13. Figure 6 is a flowchart showing an example of an interference transmission characteristic filter generation process routine. This routine may be executed by the control device 20 of the mounting device 13 owned by the manufacturing company of the mounting system 10, for example, when a new workpiece is manufactured, in order to generate a filter for the interference transmission characteristics of that workpiece. Alternatively, this routine may be executed by the control device 20 within the factory of the company that owns the mounting device 13, or by the management device 18. This routine is stored in the storage unit 22 of the mounting device 13 and is executed by the control unit 21 of the control device 20 after execution input by the operator.

[0021] Figure 8 is an explanatory diagram showing an example of a filter design model for Z-Zs axis interference. Figure 8A is an example of a filter design model for interference transmission characteristics, and Figure 8B is an explanatory diagram of the related equations for the design model. The filter for interference transmission characteristics (Z→Zs axis interference characteristic G'z→zs) can be obtained as shown in Figure 8B by using the influence INTR including the Zs axis velocity Vzs of the Zs axis when the Z axis is excited (Equation 1), the sensitivity characteristic SENS of the Zs axis when the Zs axis is excited (Equation 2), and the Zs axis plant characteristic Pzs (Equation 3), dividing the influence INTR by the sensitivity characteristic SENS and then by the Zs axis velocity Vzs, as shown in Equation 4. For example, as shown in Figure 8A, the Z→Zs axis interference characteristic Gz→zs is determined by experiments or calculations when the Z axis is operated by the Z axis torque command Tzcmd, and the Zs axis sensitivity characteristic and Zs axis plant characteristic are determined when the Zs axis is excited, thereby generating an interference transmission characteristic filter. Then, a Zs axis interference control compensation value Tcomp is output through this filter to cancel out the reaction force acting on the Zs axis when the Z axis is operated by the Z axis torque command value Tcmd.

[0022] When the routine in Figure 7 is started, the control unit 21 first acquires information about the work unit as a tool attached to the mounting part 33 of the work head 32 (S100). The control unit 21 may acquire tool information directly from the work unit, or it may acquire tool information from another management device such as the management device 18. The tool information includes, for example, tool identification information (ID), size, weight, and information about the size and weight of the work object, such as a large part PL. Next, the control unit 21 vibrates the Z axis as the second axis using the second drive unit 35 and acquires the characteristic INTER (S110). The control unit 21 vibrates the second drive unit 35 with the Z axis torque command value Tcmd and applies the Zs axis torque command value Tzscmd to the Zs axis and acquires the speed Vzs at that time. Next, the control unit 21 vibrates the Zs axis, which is the first axis, with the first drive unit 34, obtains the sensitivity characteristic SENS of the Zs axis (S120), and obtains the plant characteristic Pzs of the Zs axis (S130). When the control unit 21 drives the first drive unit 34 with the Z axis torque command Tzcmd, it obtains the Zs axis disturbance dzs and the Zs axis velocity Vzs, and obtains the sensitivity characteristic SENS and the plant characteristic Pzs from equations 2 and 3, respectively. Subsequently, the control unit 21 generates an interference transmission characteristic filter using the obtained characteristic INTER, sensitivity characteristic SENS, and plant characteristic Pzs (S140). The control unit 21 performs curve fitting and obtains the Z→Zs axis interference characteristic G'z→zs, which is the Z-Zs axis interference transmission characteristic filter, from equation 4. The control unit 21 then determines whether the generation of all filters has been completed (S150). If the generation of filters has not been completed, the control unit 21 changes the mounting unit 33 to the next tool (S160) and executes the processing from S100 onwards. On the other hand, if the generation of filters is completed in S150, the generated filters are output to the storage unit 22 or the management device 18 (S170), and this routine ends. When using the tool in this work unit, the control unit 21 uses the generated interference transmission characteristic filters to perform axial interference control of the Zs axis.

[0023] Next, we will explain the operation of the mounting device 13, specifically the execution of mounting-related processes such as placing components P and large components PL on the substrate S and applying viscous fluid to the substrate S. Figure 9 is a flowchart showing an example of a mounting-related processing routine executed by the control unit 21 of the mounting device 13. This routine is stored in the memory unit 22 of the mounting device 13 and executed by the control unit 21 after the mounting device 13 is started and execution input is received from the operator. Here, we will explain the case in which mounting-related processes are performed by the rotary unit 40 and the large sampling unit 42, and by the application process performed by the dispenser unit 43.

[0024] When this routine is started, the control unit 21 of the control device 20 first reads and acquires mounting condition information from the storage unit 22 (S200). Next, the control unit 21 controls the substrate processing unit 25 to load and fix the substrate S (S210). Next, the control unit 21 sets the work to be performed based on the mounting condition information 23 (S220). The work includes either the collection and placement of parts P and large parts PL, or the application of viscous fluid. Next, the control unit 21 determines whether it is necessary to replace the work unit when performing the set work, based on the work to be performed and the work unit attached to the work head 32 (S230). If it is necessary to replace the work unit, the control unit 21 performs the replacement of the work unit in the standby unit 46 (S240). After S240, or if it is determined in S230 that it is not necessary to replace the work unit, the control unit 21 determines whether it is necessary to perform predetermined axial interference control (S250). The control unit 21 determines that predetermined axial interference control is required when the work unit mounted on the mounting unit 33 is either a heavy large sampling unit 42 or a dispenser unit 43. Axial interference control is a process that outputs a compensating drive command value to cancel out the reaction force acting on the Zs axis, which is the first axis, when the Z axis, which is the second axis, is operated by a work drive command value. For example, if the rotary unit 40 is mounted on the mounting unit 33, the control unit 21 determines that axial interference control is not required and allows the work unit to operate without performing axial interference control. That is, the control unit 21 switches whether or not to perform axial interference control, which outputs a driving force of a compensating drive command value using interference transmission characteristics to the first drive unit 34, depending on the type of work unit mounted on the work head 32. At this time, the control unit 21 causes the second drive unit 35 to move the Z axis, i.e., raise and lower the work unit, with the Zs axis stopped at a predetermined height.

[0025] On the other hand, when the set operation requires predetermined axial interference control, the control unit 21 selects an interference transmission characteristic filter corresponding to the work unit (S270), performs axial interference control, and executes the operation of the work unit (S280). That is, the control unit 21 derives a compensation drive command value using the interference transmission characteristics corresponding to the type of work unit mounted on the work head 32. The control unit 21 executes axial interference control using the interference transmission characteristic filter corresponding to the work unit mounted on the mounting unit 33. In axial interference control, the control unit 21, for example, drives the second drive unit 35 based on the operation drive command value of the second drive unit 35, which holds the Zs axis at a predetermined height and moves the work unit relative to the Z axis. The control unit 21 also inputs this operation drive command value to the interference transmission characteristic filter and outputs a driving force based on the output compensation drive command value to the first drive unit 34. The control unit 21 derives a compensation drive command value through an interference transmission characteristic filter obtained from the sensitivity characteristic SENS and the plant characteristic Pzs of the first axis when the Zs axis as the first axis is excited, and the Zs axis velocity Vzs of the first axis when the Z axis as the second axis is excited.

[0026] Figure 10 is an explanatory diagram showing an example of Z-Zs axis interference control. As shown in Figure 10, in the Z-axis control loop, when the second drive unit 35 is driven by the Z-axis torque command value Tcmd as a work drive command value with a heavy work unit attached, based on the Z-axis controller characteristic Cz, a Z-→Zs axis interference disturbance dz→zs acts on the Zs axis as a force disturbance of Z→Zs axis interference characteristic Gz→zs from the Z-axis acceleration αz based on the Z-axis plant characteristic Pz. In the Zs axis control loop, based on the Zs axis controller characteristic Czs, the force disturbance of the above Z→Zs axis interference characteristic Gz→zs acts on the loop based on Pz, and vibrations and other movements may occur while the Zs axis is stopped. Here, the control unit 21 outputs a Zs axis interference control compensation value Tcomp as a compensation drive command value from the first drive unit 34 using a filter of the estimated Z→Zs axis interference characteristic G'z→zs, thereby canceling out this force disturbance. At this time, the force disturbance is transmitted to the Zs axis as a reaction force in the driving direction of the second drive unit 35, so the control unit 21 causes the first drive unit 34 to output a driving force based on the compensation drive command value in the same phase as driving the second drive unit 35. In addition, depending on the interference transmission characteristic filter, a compensation drive command value that is not 0 may be output even when the work drive command value of the second drive unit 35 is 0. In this control device 20, as shown in Figure 5, when the work unit is stopped, the compensation drive command is set to 0. Furthermore, after driving the second drive unit 35 based on the work drive command value, the control unit 21 may perform a predetermined delay and then use this work drive command value to output a driving force based on the compensation drive command value obtained by the interference transmission characteristic to the first drive unit 34. This is because the force disturbance may act on the Zs axis with a delay after the movement of the Z axis. In this way, by performing axis interference control, the positional accuracy of the work unit can be further improved, and the execution accuracy of implementation-related processing can be further enhanced.

[0027] After S280 or S260, the control unit 21 determines, based on the mounting condition information, whether there is work to be done by the next work unit (S290), and if there is work to be done, it executes the processing from S220 onwards. On the other hand, if there is no work to be done in S290, the control unit 21 determines whether the production of all substrates S has been completed (S300), and if the production of substrates S has not been completed, it executes the processing from S210 onwards. That is, the control unit 21 discharges the substrates S that have been processed in this mounting device 13 from the device, loads and secures the next substrates S, and executes mounting-related processing. On the other hand, if the production of all substrates S is completed in S300, this routine is terminated.

[0028] Here, the correspondence between the components of this embodiment and the components of the present disclosure will be clarified. The mounting apparatus 13 of this embodiment is an example of a mounting-related apparatus of the present disclosure, the work head 32 is an example of a work head, the first drive unit 34 is an example of a first drive unit, the second drive unit 35 is an example of a second drive unit, the large sampling unit 42 and the dispenser unit 43 are examples of work units, and the control unit 21 is an example of a control unit. Furthermore, the mounting unit 33 is an example of a mounting unit, the axial direction A is an example of an axial direction, the substrate S is an example of an object, and the component P and the large component PL are examples of components. In addition, in this embodiment, an example of a control method of the present disclosure is also clarified by describing the operation of the mounting apparatus 13.

[0029] The mounting apparatus 13 of this embodiment, as described above, is a mounting-related apparatus that performs mounting-related processing related to the mounting process of placing a component P on a substrate S as the target object. The mounting apparatus 13 includes a first drive unit 34 that moves a work head 32 that performs predetermined work on the substrate S along the axial direction A of the Zs axis as the first axis, a second drive unit 35 that moves a work section disposed on the work head 32 that performs predetermined work along the axial direction A of the Z axis as the second axis which is aligned with the first axis, and a control unit 21 that drives the second drive unit 35 based on the work drive command value of the second drive unit 35 that moves the work section when the work section is moved, and outputs a driving force to the first drive unit 34 based on a compensation drive command value obtained by interference transmission characteristics using the work drive command value. In this mounting apparatus 13, when the work section is moved, the driving force to the first drive unit 34 is output based on a compensation drive command value obtained by applying the work drive command value to interference transmission characteristics, so that the reaction force on the second axis side can be further suppressed and, for example, the positioning accuracy of the work section can be further improved. Therefore, this mounting device 13 can further improve the accuracy of the work related to the mounting process.

[0030] Furthermore, since the second drive unit 35 moves the work unit along the axial direction of the second axis which is parallel to the first axis, interference such as reaction forces in the parallel first and second axes can be further suppressed. Moreover, one end of the work head 32 is disposed on the housing side of the mounting device 13 and moves along the direction of the first axis by the first drive unit 34, and the work unit is disposed inside the work head 32 and moves along the axial direction of the second axis by the second drive unit 35. Furthermore, since the control unit 21 uses the work drive command value to output a driving force of a compensation drive command value obtained from the interference transmission characteristics to the first drive unit 34, the reaction force on the second axis side can be further suppressed by the compensation drive command value corresponding to the interference transmission characteristics.

[0031] Furthermore, the control unit 21 outputs a driving force based on the compensation drive command value to the first drive unit 34 in the same phase as driving the second drive unit 35, thereby further suppressing the reaction force on the second axis side acting in the opposite phase to act on the first axis side. Moreover, when the work unit is stopped, the control unit 21 sets the compensation drive command to a value of 0. On the second axis side, the work drive command will never be a value of 0 due to the gravity of the work unit, etc., but in this mounting device 13, this processing can be omitted when there is no suppression of force disturbances that occur during operation. Furthermore, after driving the second drive unit 35 based on the work drive command value, the control unit 21 performs a predetermined delay and then uses this work drive command value to output a driving force based on the compensation drive command value obtained by interference transmission characteristics to the first drive unit 34. In this mounting device 13, by performing delay processing, the execution accuracy of work related to the mounting process can be further improved. Furthermore, the control unit 21 derives a compensation drive command value through a filter of interference transmission characteristics obtained from the sensitivity characteristics and plant characteristics of the first axis when the first axis is excited, and the speed of the first axis when the second axis is excited. In this implementation-related device, a more appropriate compensation drive command value can be derived by using a filter that utilizes the sensitivity characteristics, plant characteristics, and speed obtained by exciting the first and second axes.

[0032] Furthermore, the work head 32 is equipped with a mounting section 33 on the second axis to which multiple types of work units can be attached and detached, and the control unit 21 derives a compensation drive command value using interference transmission characteristics corresponding to the type of work unit attached to the work head 32. In this mounting device 13, the execution accuracy of work related to the mounting process can be improved more appropriately according to the type of work unit. Moreover, the work head 32 is equipped with a mounting section 33 on the second axis to which multiple types of work units can be attached and detached, and the control unit 21 switches whether or not to perform axis interference control to output the driving force of the compensation drive command value using interference transmission characteristics to the first drive unit, depending on the type of work unit attached to the work head 32. In this mounting device 13, since axis interference control is performed according to the type of work unit, unnecessary processing can be omitted and processing can be simplified. Furthermore, the work head 32 can be equipped with a dispenser section 43 that discharges viscous fluid as a work unit, or a large sampling section 42 that samples large parting lines (PLs) larger than a predetermined size as a work unit. In this mounting device 13, when the dispenser unit 43 and the large sampling unit 42 are used as work units, the accuracy of the work related to the mounting process can be further improved.

[0033] It goes without saying that the implementation-related devices and control methods disclosed herein are not limited in any way to the embodiments described above, and can be implemented in various forms as long as they fall within the technical scope of the present invention.

[0034] For example, in the embodiment described above, the control unit 21 sets the compensation drive command to a value of 0 when the work unit is stopped, but it is not limited to this, and this process may be omitted. In this case, the interference transmission characteristic filter may be adjusted to output a value of 0 as the compensation drive command in response to the input of the work drive command value when the work unit is stopped. Also, the control device 20 is assumed to have a circuit that outputs a value of 0 as the compensation drive command when the work unit is stopped, but this may be omitted. It is preferable that the control unit 21 sets the compensation drive command to a value of 0 when the work unit is stopped.

[0035] In the above-described embodiment, the control unit 21 drives the second drive unit based on the work drive command value, then performs axis interference control using the compensation drive command value after a predetermined delay. However, it is not limited to this, and this delay process may be omitted. Also, the control device 20 is assumed to have a circuit for performing the delay process, but this may also be omitted. It is preferable that the control unit 21 performs axis interference control using the compensation drive command value after a predetermined delay as needed.

[0036] In the embodiments described above, the interference transmission characteristic filter was obtained from the sensitivity characteristic and plant characteristic of the first axis when the first axis is excited, and the velocity of the first axis when the second axis is excited. However, it is not limited to this, as long as the compensation drive command value is derived from the work drive command value. For example, in the interference transmission characteristic filter, one or more of the sensitivity characteristic SENS, Zs axis plant characteristic Pzs, and Zs axis velocity Vzs may be omitted, or other factors may be added. The interference transmission characteristic filter (Z→Zs axis interference characteristic G'z→zs) was obtained by performing curve fitting or the like using equation 4, but it is not limited to equations 1 to 4, as long as the compensation drive command value is derived from the work drive command value. Furthermore, in the embodiments described above, the interference transmission characteristic filter was determined experimentally by exciting the Zs axis and Z axis, but it is not limited to this, and the interference transmission characteristic filter may be determined by calculation after structural analysis of the work unit and work head 32.

[0037] In the above-described embodiment, the control unit 21 derives a compensatory drive command value using the work drive command value and interference transmission characteristics. However, it is not limited to this, as long as interference between the first and second axes can be further suppressed. For example, the control unit 21 may derive a compensatory drive command value by adding a predetermined coefficient to the driving force obtained by interference transmission characteristics using the work drive command value. That is, the compensatory drive command value may have a predetermined margin. Alternatively, the control unit 21 may derive a compensatory drive command value without using an interference transmission characteristics filter. For example, the control unit 21 may derive a compensatory drive command value by adding a predetermined coefficient to the work drive command value. In such an implementation device 13, the reaction force on the second axis side can be further suppressed on the first axis side.

[0038] In the above-described embodiment, multiple types of work units can be attached to the mounting section 33 of the work head 32, but the invention is not limited to this, and only specific types of work units may be attached. For example, the mounting section 33 may be capable of attaching only the large sampling unit 42, or the mounting section 33 may be capable of attaching only the dispenser unit 43. Furthermore, in the above-described embodiment, the control unit 21 switches the interference transmission characteristic filter (Z→Zs axis interference characteristic G'z→zs) according to the type of work unit attached to the mounting section 33, but this switching process may be omitted. Also, the control unit 21 switches whether or not to execute axis interference control using the interference transmission characteristic filter according to the type of work unit attached to the mounting section 33, but this switching process may be omitted. This mounting device 13 can further simplify the processing. In this case, the control unit 21 may use the interference transmission characteristic filter only for specific work units. In this case, the mounting device 13 can simplify the processing. Alternatively, the control unit 21 may use the interference transmission characteristic filter for all work units. In this case, the mounting device 13 can further enhance the reliability of the mounting process. Whether or not to perform axial interference control using an interference transmission characteristic filter may be determined appropriately, for example, according to the actual accuracy of the working part's movement position.

[0039] In the embodiments described above, the work unit that performs axial interference control using an interference transmission characteristic filter is the large sampling unit 42 or the dispenser unit 43, but it is not limited to these, and either of these may be omitted, or in addition to or in place of these, a tool that performs other mounting-related processing may be included. In particular, in the mounting device 13, it is more preferable to perform axial interference control using an interference transmission characteristic filter when a tool that causes a larger reaction force to be applied to the first axis when the second axis moves is attached to the work head 32.

[0040] In the embodiment described above, the control unit 21 was described as automatically performing the replacement of the work unit attached to the work head 32, but it is not limited to this, and the replacement may be performed manually by an operator.

[0041] In the embodiments described above, the control device 20 of the mounting device 13 was described as deriving the interference transmission characteristics filter, but the invention is not limited to this. The management device 18 that manages the mounting system 10 may derive this filter, or the management device of the manufacturer of the mounting system 10 may derive this filter. Furthermore, in the mounting device 13, the interference transmission characteristics filter was described as being derived in advance, such as when a new work unit is manufactured, but the invention is not limited to this. The interference transmission characteristics filter may also be derived when the work unit is actually being used in the mounting device 13.

[0042] In the above-described embodiments, the mounting device 13 has been described as being used in the mounting system 10. However, it is not particularly limited thereto, and the mounting device 13 can be used in a system that applies a viscous fluid to an object. At this time, the mounting device 13 may be a coating device that applies a viscous fluid to an object. Further, in the above-described embodiments, the mounting device 13 has been described as a specific example of a device that executes shaft interference control using a filter for interference transfer characteristics. However, it is not particularly limited thereto, and it may be any mounting-related device such as a printing device 11, a printing inspection device 12, a mounting inspection device 15, a reflow device, a loader as a moving work device that automatically exchanges a feeder 27, a storage device that stores the feeder 27, a transport device that transports an object such as a substrate S, and the like. Further, in the above-described embodiments, the present disclosure has been described with the mounting device 13. However, it is not particularly limited thereto, and it may be a control device 20, a mounting unit 30, a control method of the mounting device 13, a mounting-related method, and a program that realizes these methods.

[0043] Here, the control method of the present disclosure may be configured as follows. For example, the control method of the present disclosure includes a first drive unit that moves a work head that executes a predetermined operation on an object along the axial direction of a first axis, and a work unit that is disposed on the work head and executes the predetermined operation. A second drive unit that moves along the axial direction of a second axis along the first axis, and is a control method of a mounting-related device that works on a substrate, (a) when moving the work unit, based on a work drive command value of the second drive unit that moves the work unit. Driving the second drive unit, and (b) outputting a driving force of a compensation drive command value based on the work drive command value to the first drive unit.

[0044] This control method of the mounting-related device can more suppress the reaction force on the second axis side from acting on the first axis side, similar to the above-described mounting-related device, and can further improve the execution accuracy of the work related to the mounting process. In this control method, any of the various aspects of the above-described mounting-related devices may be adopted, or steps for realizing the functions of the above-described mounting-related devices may be added.

[0045] This specification describes the technical concept in which, in the original claim 4, "the mounting-related device described in claim 1 or 2" was changed to "the mounting-related device described in any one of claims 1 to 3", the technical concept in which, in the original claim 5, "the mounting-related device described in claim 1 or 2" was changed to "the mounting-related device described in any one of claims 1 to 4", the technical concept in the original claim 6, "the mounting-related device described in claim 1 or 2" was changed to "the mounting-related device described in any one of claims 1 to 5", the technical concept in the original claim 7, "the mounting-related device described in claim 1 or 2" was changed to "the mounting-related device described in any one of claims 1 to 6", and The following technical concepts are also disclosed: in the original claim 8, "the mounting-related device described in claim 1 or 2" is changed to "the mounting-related device described in any one of claims 1 to 7"; in the original claim 9, "the mounting-related device described in claim 1 or 2" is changed to "the mounting-related device described in any one of claims 1 to 8"; in the original claim 10, "the mounting-related device described in claim 1 or 2" is changed to "the mounting-related device described in any one of claims 1 to 9"; and in the original claim 11, "the mounting-related device described in claim 1 or 2" is changed to "the mounting-related device described in any one of claims 1 to 10".

[0046] This disclosure is applicable to the technical field of equipment that performs processes such as component sampling and placement.

[0047] 10 Mounting system, 11 Printing device, 12 Printing inspection device, 13 Mounting device, 15 Mounting inspection device, 18 Management device, 20 Control device, 21 Control unit, 22 Storage unit, 25 Substrate processing unit, 26 Parts supply unit, 27 Feeder, 28 Tray unit, 29 Mounting imaging unit, 30 Mounting unit, 31 Head moving unit, 32 Working head, 33 Mounting unit, 34 First drive unit, 34a Zs axis motor, 34b Ball screw, 34c Movable body, 35 Second drive unit, 40 Rotary unit, 41 Sampling member, 42 Large sampling unit, 43 Dispenser unit, 44 Discharge unit, A Axis direction, P Parts, PL Large parts, S Substrate.

Claims

1. A mounting-related apparatus for working on a substrate, comprising: a first drive unit that moves a work head, which performs a predetermined operation on an object, along the axial direction of a first axis; a second drive unit that is disposed on the work head and moves a work section, which performs the predetermined operation, along the axial direction of a second axis that is aligned with the first axis; and a control unit that, when the work section moves, drives the second drive unit based on a work drive command value of the second drive unit that moves the work section, and outputs a driving force of a compensated drive command value based on the work drive command value to the first drive unit.

2. The mounting-related device according to claim 1, wherein the second drive unit moves the work unit along the axial direction of the second axis which is parallel to the first axis.

3. The mounting-related device according to claim 1 or 2, wherein one end of the work head is disposed on the housing side of the mounting-related device and moves along the direction of the first axis by the first drive unit, and the work unit is disposed inside the work head and moves along the axial direction of the second axis by the second drive unit.

4. The mounting-related device according to claim 1 or 2, wherein the control unit causes the first drive unit to output the driving force of the compensation drive command value obtained by interference transmission characteristics using the work drive command value.

5. The mounting-related device according to claim 1 or 2, wherein the control unit causes the first drive unit to output a driving force based on the compensation drive command value in the same phase as driving the second drive unit.

6. The mounting-related device according to claim 1 or 2, wherein the control unit sets the compensation drive command to a value of 0 when the work unit is stopped.

7. The mounting-related device according to claim 1 or 2, wherein the control unit drives the second drive unit based on the work drive command value, then delays the operation and causes the first drive unit to output a driving force based on the compensation drive command value obtained by interference transmission characteristics using the work drive command value.

8. The mounting-related device according to claim 1 or 2, wherein the control unit derives the compensation drive command value through a filter of interference transmission characteristics obtained from the sensitivity characteristics and plant characteristics of the first axis when the first axis is excited and the speed of the first axis when the second axis is excited.

9. The mounting-related device according to claim 1 or 2, wherein the work head is provided with a mounting section disposed on the second axis and capable of mounting and detaching multiple types of work units, and the control unit derives the compensation drive command value using interference transmission characteristics corresponding to the type of work unit mounted on the work head.

10. The mounting-related device according to claim 1 or 2, wherein the work head is provided with a mounting unit disposed on the second axis and capable of mounting and detaching a plurality of types of work units, and the control unit switches whether or not to perform axis interference control that causes the first drive unit to output a driving force of the compensation drive command value using the interference transmission characteristics, depending on the type of work unit mounted on the work head.

11. The mounting-related apparatus according to claim 1 or 2, wherein the work head is equipped with a dispenser unit for discharging a viscous fluid as the work unit, or with a large-size sampling unit for sampling large parts larger than a predetermined size as the work unit.

12. A control method for a mounting-related apparatus that performs work on a substrate, comprising: a first drive unit that moves a work head that performs a predetermined operation on an object along the axial direction of a first axis; and a second drive unit that moves a work unit disposed on the work head and performs the predetermined operation along the axial direction of a second axis that is aligned with the first axis, the control method comprising: (a) when moving the work unit, driving the second drive unit based on a work drive command value for the second drive unit that moves the work unit; and (b) causing the first drive unit to output a driving force of a compensation drive command value based on the work drive command value.

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