Surface detection sensor and surface inspection device

Abstract

Provided is a surface detection sensor (1) for detecting a protrusion (3a) present on the surface of an object (3). The surface detection sensor (1) comprises: a sheet-shaped elastic member (10); a sheet-shaped covering member (20) that is located on the side of the object (3) when the surface detection sensor (1) is in use; an electrode (30) that is arranged between the elastic member (10) and the covering member (20); a plurality of detection lines (41) that are located between the electrode (30) and the covering member (20), and that are arranged so as to cross the electrode (30); and an insulating layer (42) that is located between the electrode (30) and the plurality of detection lines (41). The covering member (20) displaces the positions of at least two detection lines (41) among the plurality of detection lines (41) when the surface detection sensor (1) is in contact with a protrusion (3a) present on the surface of the object (3).

Description

Surface Detection Sensor and Surface Inspection Device

[0001] The present disclosure relates to a surface detection sensor that detects convex portions present on the surface of an object and a surface inspection device including the surface detection sensor.

[0002] Conventionally, a technique for non-contact inspection of the surface state of an object by using a non-contact sensor such as an optical sensor has been known (for example, Patent Document 1). For example, when inspecting the surface state of an object using an optical sensor, laser light is irradiated onto the surface of the object, and the reflected light reflected from the surface of the object is received and analyzed.

[0003] Japanese Patent Application Laid-Open No. 2000-9453

[0004] However, when trying to inspect convex portions present on the surface of an object (inspection target object) using an optical sensor, the laser light emitted from the optical sensor is diffusely reflected on the surface of the object due to the surface material of the object (such as porous or micro uneven shape), and it may not be possible to correctly detect the convex portions present on the surface of the object. Examples of convex portions present on the surface of the object include foreign substances attached to the surface of the object or protrusions formed as a part of the object.

[0005] In addition, it is also conceivable to inspect convex portions present on the surface of an object non-contact using an imaging camera instead of an optical sensor. In this case, the imaging light (such as ambient light) is diffusely reflected on the surface of the object or the contrast is affected by the shadow of the convex portion. Therefore, it may not be possible to correctly detect the convex portions present on the surface of the object even when using an imaging camera. In particular, when the surface of the object is curved or has a complex surface shape, the effects of light diffuse reflection and the shadow of the convex portion become large, and it becomes difficult to detect the convex portions present on the surface of the object with an imaging camera.

[0006] Therefore, it is conceivable to detect the convex portions on the surface of an object by bringing a pressure sensor (pressure-sensitive sensor) into contact with the object. However, with conventional pressure sensors, it has been impossible to detect the convex portions on the surface of the object or the detection sensitivity has been low.

[0007] This disclosure is made to solve these problems and aims to provide a surface detection sensor and a surface inspection device that can easily detect protrusions on the surface of an object.

[0008] To achieve the above objective, one embodiment of a surface detection sensor according to the present disclosure is a surface detection sensor for detecting protrusions present on the surface of an object, comprising: a sheet-like elastic member; a sheet-like covering member located on the object side when the surface detection sensor is in use; an electrode disposed between the elastic member and the covering member; a plurality of detection lines located between the electrode and the covering member and arranged to intersect the electrode; and an insulating layer located between the electrode and the plurality of detection lines, wherein the covering member displaces the position of at least two of the plurality of detection lines when the surface detection sensor contacts a protrusion present on the surface of the object.

[0009] Furthermore, one embodiment of the surface inspection apparatus according to this disclosure comprises the above-mentioned surface detection sensor, a fixing member for fixing the surface detection sensor, and a buffer member disposed between the surface detection sensor and the fixing member.

[0010] According to this disclosure, protrusions present on the surface of an object can be easily detected.

[0011] Figure 1 is a plan view of the surface detection sensor according to Embodiment 1, when the covering member is omitted, as seen from the covering member side. Figure 2 is a cross-sectional view of the surface detection sensor according to Embodiment 1 along line II-II in Figure 1. Figure 3 is an enlarged cross-sectional view of the surface inspection device according to Embodiment 1. Figure 4 is a diagram illustrating a method for inspecting the surface of an object using the surface inspection device according to Embodiment 1. Figure 5 is an enlarged cross-sectional view showing the inspection of the surface of an object using the comparative example surface inspection device equipped with the comparative example surface detection sensor. Figure 6 is an enlarged cross-sectional view showing the inspection of the surface of an object using the surface inspection device equipped with the surface detection sensor according to Embodiment 1. Figure 7 is an enlarged cross-sectional view showing the inspection of the surface of an object using the comparative example surface inspection device equipped with the comparative example surface detection sensor. Figure 8 is an enlarged cross-sectional view showing the inspection of the surface of an object using the surface inspection device equipped with the surface detection sensor according to Embodiment 1. Figure 9 is a diagram illustrating another method for inspecting the surface of an object using the surface inspection device according to Embodiment 1. Figure 10 is a plan view of the surface detection sensor according to Embodiment 2, when the covering member is omitted, as seen from the covering member side. Figure 11 is a cross-sectional view of the surface detection sensor according to Embodiment 2 along the line XI-XI in Figure 10. Figure 12 is an enlarged cross-sectional view of a modified surface inspection device.

[0012] The embodiments of this disclosure will be described below with reference to the drawings. The embodiments described below are all specific examples of this disclosure. Therefore, the numerical values, shapes, materials, components, arrangement and connection configurations of components, as well as the processes (steps) and their order, shown in the following embodiments are examples and are not intended to limit this disclosure. Accordingly, any components in the following embodiments that are not described in the independent claims representing the highest-level concepts of this disclosure will be described as optional components.

[0013] Note that each figure is a schematic diagram and not necessarily a strictly accurate representation. Therefore, the scale and other aspects may not necessarily match in each figure. Also, in each figure, substantially identical components are given the same reference numerals, and redundant explanations are omitted or simplified. In each figure, the X, Y, and Z axes represent the three axes of a three-dimensional Cartesian coordinate system. In this embodiment, the Z-axis direction is defined as the vertical direction, and the direction perpendicular to the Z-axis (parallel to the XY plane) is defined as the horizontal direction. The X and Y axes are mutually orthogonal, and both are also perpendicular to the Z-axis. Note that in this specification, the terms "up" and "down" do not necessarily refer to the upward direction (vertically upward) and the downward direction (vertically downward) in absolute spatial perception.

[0014] (Embodiment 1) First, the configuration of the surface detection sensor 1 according to Embodiment 1 will be described using Figures 1 and 2. Figure 1 is a plan view of the surface detection sensor 1 according to Embodiment 1, when the covering member 20 is omitted, as seen from the covering member 20 side. Figure 2 is a cross-sectional view of the surface detection sensor 1 according to Embodiment 1 along the line II-II in Figure 1.

[0015] The surface detection sensor 1 is a contact-type sensor that inspects the surface of an object (subject) by making contact with its surface. Specifically, the surface detection sensor 1 detects protrusions on the surface of an object by moving relative to the object in a predetermined direction, which is the first direction (the X-axis direction in this embodiment). The surface detection sensor 1 is a thin, sheet-like sensor.

[0016] As shown in Figures 1 and 2, the surface detection sensor 1 comprises an elastic member 10, a covering member 20, a plurality of electrodes 30, and a plurality of electric wires 40. As shown in Figure 2, the plurality of electrodes 30 and the plurality of electric wires 40 are arranged between the elastic member 10 and the covering member 20.

[0017] The elastic member 10 is a sheet-like sheet member. Specifically, the elastic member 10 is a flat sheet member with a constant thickness. The planar shape of the elastic member 10 is, for example, rectangular, but is not limited to this.

[0018] The elastic member 10 is an elastic body that has elasticity and is elastically deformable. Specifically, the elastic member 10 is a rubber body made of rubber material and has rubber elasticity. In this embodiment, the elastic member 10 is made of ethylene propylene diene rubber (EPDM). Alternatively, the elastic member 10 may be made of an elastomer. In this case, EPDM elastomer can be used as the material for the elastic member 10. However, the material for the elastic member 10 is not limited to EPDM. Furthermore, the elastic member 10 may have a laminated structure in which multiple elastic sheets are laminated together.

[0019] As shown in Figure 1, the elastic member 10 is provided over the entirety of the multiple electrodes 30. In other words, the elastic member 10 is arranged to cover the multiple electrodes 30. In this embodiment, the elastic member 10 covers all of the electrodes 30.

[0020] The covering member 20 is positioned opposite the elastic member 10. The covering member 20 has an outer shell member 21 that forms the outer shell and a rigid member 22.

[0021] The outer casing member 21 constitutes the outer casing of the surface detection sensor 1. The outer casing member 21 comes into contact with the target object when the surface detection sensor 1 is in use. The outer casing member 21 may be made of a resin material or a metal material, but since the surface detection sensor 1 is slid with the outer casing member 21 in contact with the target object when the surface detection sensor 1 is in use, it is preferable to use a material that is slippery and resistant to scratches for the outer casing member 21. The outer casing member 21 may be an elastic body that deforms elastically, a solid body that does not deform elastically, or a soft fibrous material such as cloth or nonwoven fabric. In this embodiment, the outer casing member 21 is made of a flexible, soft material.

[0022] The rigid member 22 does not possess flexibility or rubber elasticity and is made of a hard material. The rigid member 22 may be made of a resin material or a metal material, but it is made of a material that is harder than the outer member 21. Specifically, the Young's modulus of the rigid member 22 is higher than that of the outer member 21. As a result, the hardness (hardness) of the rigid member 22 is greater than that of the outer member 21. As an example, the rigid member 22 may be a resin plate made of polyethylene terephthalate (PET) or polybutylene terephthalate (PBT), or a metal plate made of aluminum, etc.

[0023] The rigid member 22 is laminated on the outer enclosure member 21. The rigid member 22 is laminated on the inner surface (wire 40 side) of the outer enclosure member 21. The rigid member 22 is an insertion member inserted between the outer enclosure member 21 and the multiple wires 40. In other words, the rigid member 22 is located between the outer enclosure member 21 and the multiple wires 40. As will be described later, each of the multiple wires 40 has a detection wire 41, so the rigid member 22 is located between the outer enclosure member 21 and the multiple detection wires 41.

[0024] Each of the outer casing member 21 and the rigid member 22 is a sheet-like sheet material. Specifically, each of the outer casing member 21 and the rigid member 22 is a flat sheet material with a uniform thickness. The plan view shape of each of the outer casing member 21 and the rigid member 22 is, for example, rectangular, but is not limited to this.

[0025] The covering member 20 configured in this way covers multiple electric wires 40. Therefore, the outer casing member 21 and the rigid member 22 cover multiple electric wires 40. In this embodiment, the covering member 20 covers all of the electric wires 40. In other words, the outer casing member 21 and the rigid member 22 cover all of the electric wires 40.

[0026] Furthermore, the covering member 20 covers the multiple electrodes 30 along with the electric wire 40. In other words, the outer casing member 21 and the rigid member 22 also cover the multiple electrodes 30. Although not shown in the figures, the covering member 20, like the elastic member 10, is provided over the entirety of the multiple electrodes 30. In this case, each of the outer casing member 21 and the rigid member 22 may be provided over the entirety of the multiple electrodes 30. Note that the rigid member 22 does not have to be provided over the entirety of the multiple electrodes 30. For example, the rigid member 22 may be divided to correspond to each of the multiple electrodes 30. In this case, the multiple rigid members 22 may be arranged to face each of the multiple electrodes 30 in a one-to-one correspondence, or one rigid member 22 may be arranged to face two or more multiple electrodes 30.

[0027] As shown in Figure 2, the electrode 30 is positioned on the elastic member 10 side of the electric wire 40. In this embodiment, multiple electrodes 30 are arranged on the elastic member 10. Each of the multiple electrodes 30 is a pattern electrode formed in a predetermined pattern.

[0028] Multiple electrodes 30 are arranged in a predetermined layout. As shown in Figure 1, the multiple electrodes 30 are arranged along the Y-axis. The multiple electrodes 30 are arranged separately from each other without touching. Therefore, two adjacent electrodes 30 in each direction of the Y-axis are arranged with a predetermined gap between them.

[0029] In this embodiment, the outer shape of each of the multiple electrodes 30 is a rectangle with the X-axis direction as its longitudinal direction. While it is preferable that all of the multiple electrodes 30 have the same area, the multiple electrodes 30 may include electrodes 30 with different areas. In Figure 1, four electrodes 30 are arranged in the Y-axis direction, but the number of electrodes 30 is not limited to this.

[0030] The multiple electrodes 30 may be arranged along the X-axis and Y-axis directions, respectively. Specifically, the multiple electrodes 30 may be arranged in a matrix. For example, in Figure 1, one electrode 30 may be split into two in the center along the X-axis. In this case, a total of eight electrodes 30 will be arranged, two along the X-axis and four along the Y-axis, and two adjacent electrodes 30 in each of the X-axis and Y-axis directions will be arranged with a predetermined gap between them.

[0031] Furthermore, although there were multiple electrodes 30 in this embodiment, the invention is not limited to this. In other words, there may be only one electrode 30. For example, in Figure 1, four electrodes 30 may be connected in the Y-axis direction to form a single electrode.

[0032] Multiple electrodes 30, which are arranged separately from each other, are provided on the elastic member 10 and together with the elastic member 10 constitute an electrode block. In other words, the surface detection sensor 1 has multiple electrode blocks.

[0033] As shown in Figure 2, each of the multiple electrodes 30 is a laminated structure in which multiple conductive layers are stacked. In this embodiment, each electrode 30 has a two-layer structure and comprises a first conductive layer 31 and a second conductive layer 32 laminated on the first conductive layer 31. The first conductive layer 31 and the second conductive layer 32 are made of a conductive material such as a metal material.

[0034] The outer shape of the first conductive layer 31 corresponds to the outer shape of the electrode 30. Therefore, in this embodiment, the plan view shape of the first conductive layer 31 is rectangular. The first conductive layer 31 is, for example, a carbon layer (carbon electrode) made of carbon (C).

[0035] The second conductive layer 32 is located between the first conductive layer 31 and the elastic member 10. In other words, the second conductive layer 32 is laminated on the first conductive layer 31 on the elastic member 10 side of the first conductive layer 31. Specifically, the second conductive layer 32 is provided on the elastic member 10, and the first conductive layer 31 is provided on the elastic member 10 so as to cover the second conductive layer 32.

[0036] The second conductive layer 32 is laminated on a portion of the first conductive layer 31. In this embodiment, the second conductive layer 32 extends along the longitudinal direction (X-axis direction in this embodiment) of the first conductive layer 31 in the central part of the width direction of the first conductive layer 31. In other words, the second conductive layer 32 is narrower than the first conductive layer 31. For example, the second conductive layer 32 has a certain width and is formed in a straight line.

[0037] The resistivity of the second conductive layer 32 is lower than that of the first conductive layer 31. For example, if the first conductive layer 31 is made of carbon, the material of the second conductive layer 32 is silver (Ag). By laminating the second conductive layer 32, which has a lower resistivity than the first conductive layer 31, onto the first conductive layer 31, the overall resistivity of the electrode 30 can be reduced compared to the case where the electrode 30 is made only of the first conductive layer 31. In other words, the resistance of the electrode 30 can be reduced.

[0038] In this embodiment, the second conductive layer 32 was positioned on the elastic member 10 side of the first conductive layer 31, but this is not limited to this configuration. Specifically, the second conductive layer 32 may be positioned on the covering member 20 side (wire 40 side) of the first conductive layer 31. In this case, the first conductive layer 31 would be located between the elastic member 10 and the second conductive layer 32.

[0039] The electrodes 30 configured in this way are connected to a detection circuit 50. The detection circuit 50 is, for example, an IC (integrated circuit) and can be placed on the elastic member 10. The electrodes 30 and the detection circuit 50 are connected by lead wires 60. The lead wires 60 are drawn out from a plurality of electrodes 30. The lead wires 60 are connected to the second conductive layer 32 of each electrode 30. Specifically, the lead wires 60 and the second conductive layer 32 are formed integrally and simultaneously. In this embodiment, since the second conductive layer 32 is made of silver, the lead wires 60 are also made of silver. In this case, for example, the lead wires 60 and the second conductive layer 32 can be formed integrally by applying silver paste to the elastic member 10 and hardening it. The surface detection sensor 1 may also have a separate circuit board for mounting the detection circuit 50.

[0040] As shown in Figure 1, in a plan view, the electric wire 40 is arranged to intersect with a plurality of electrodes 30. In this embodiment, the electric wire 40 extends in the Y-axis direction and intersects with a plurality of electrodes 30 aligned in the Y-axis direction in three dimensions.

[0041] Furthermore, the wire 40 is connected to the detection circuit 50. Specifically, the wire 40 is drawn out from the detection circuit 50, crosses all the electrodes 30 arranged in the Y-axis direction, is folded back in a U-shape beyond the final electrode 30, crosses all the same electrodes 30 again, and is routed back to the detection circuit 50. In other words, one wire 40 is folded back, so that four wires 40 cross each electrode 30. Thus, one end of the wire 40 and the other end are connected to the detection circuit 50, and the wire 40 is routed in a loop shape. Note that the wire 40 may be folded back in a shape other than U. Also, the wire 40 does not have to be folded back beyond the final electrode 30. In other words, instead of one folded wire 40 crossing a single electrode 30, multiple unfolded, separate wires 40 may cross each other.

[0042] In this embodiment, there are multiple wires 40. Specifically, four wires 40 (eight wires 40 in total, round trip) intersect one electrode 30. In other words, four detection cells correspond to one electrode 30, and in Figure 1, there are a total of 16 detection cells. Note that the number of wires 40 is not limited to multiple wires; it is sufficient that at least one wire 40 is arranged to intersect with multiple electrodes 30.

[0043] Further, as shown in FIG. 2, the electric wire 40 is located between the electrode 30 and the covering member 20. Specifically, the electric wire 40 is located between the electrode 30 and the hard member 22 of the covering member 20. As described above, since the electric wire 40 intersects with the plurality of electrodes 30, the electric wire 40 is located between the plurality of electrodes 30 and the covering member 20. In the present embodiment, the electric wire 40 is sandwiched between the electrode 30 and the covering member 20 and is in contact with each of the electrode 30 and the covering member 20. Specifically, the electric wire 40 is in contact with the first conductive layer 31 of the electrode 30 and is in contact with the hard member 22 of the covering member 20.

[0044] The electric wire 40 is a wire (cable). As shown in FIG. 2, the cross-sectional shape of the electric wire 40 is circular. That is, unlike the layered electrode 30, the electric wire 40 is not patterned in a predetermined shape.

[0045] As shown in FIG. 2, the electric wire 40 includes a detection wire 41 and an insulating layer 42. In the present embodiment, the electric wire 40 is an insulated wire and has a core wire made of a conductive material and an insulating film (insulating coating) that coats the core wire. The detection wire 41 is the core wire of this insulated wire, and the insulating layer 42 is the insulating film of this insulated wire. As shown in FIG. 2, in cross-section, the insulating layer 42 covers the detection wire 41 so as to surround the entire circumference of the detection wire 41. In the present embodiment, the electric wire 40 is a copper wire. In this case, the detection wire 41, which is the core wire of the copper wire, is made of copper. The insulating layer 42, which is the insulating film of the copper wire, is made of a dielectric material having insulating properties. For example, the insulating layer 42 is a resin coating made of an insulating resin material.

[0046] As described above, the electric wire 40 is arranged so as to intersect with the plurality of electrodes 30. Therefore, the detection wire 41 and the insulating layer 42 are also arranged so as to intersect with the plurality of electrodes 30. Further, as described above, the electric wire 40 is located between the plurality of electrodes 30 and the covering member 20. Therefore, the detection wire 41 and the insulating layer 42 are also located between the plurality of electrodes 30 and the covering member 20. Specifically, the detection wire 41 is located between the plurality of electrodes 30 and the hard member 22 of the covering member 20. [[ID=!0]] [[ID=!1]]

[0047] Further, the insulating layer 42 is located between the electrode 30 and the detection line 41. That is, an insulating layer 42 exists between the electrode 30 and the detection line 41, and the electrode 30 and the detection line 41 are arranged with a predetermined interval therebetween. Therefore, the electrode 30 and the detection line 41 facing each other constitute a capacitor with one as the first opposing electrode and the other as the second opposing electrode.

[0048] In this embodiment, the insulating layer 42 covers the entire circumference of the detection line 41 (core wire) as an insulating film. Therefore, the insulating layer 42 not only exists between the electrode 30 and the detection line 41, but also exists between the covering member 20 and the detection line 41. Therefore, when the covering member 20 is made of a conductive material such as a metal material, a capacitor is also constituted by the covering member 20 and the detection line 41.

[0049] In the surface detection sensor 1 configured as described above, a detection unit that detects the convex portions present on the surface of the object is constituted by each of the plurality of electrodes 30 and the detection line 41 that intersects the plurality of electrodes 30. In this embodiment, the electrode 30 and the detection line 41 constitute a capacitor as the detection unit, and the surface detection sensor 1 detects the convex portions present on the surface of the object based on the change in the capacitance (capacitance value) generated between the electrode 30 and the detection line 41. Specifically, since the electrode 30 and the detection line 41 are electrically connected to the detection circuit 50, when the capacitance generated between the electrode 30 and the detection line 41 changes, the detection circuit 50 detects the change in the capacitance. Thereby, the detection circuit 50 can detect that there are convex portions on the surface of the object.

[0050] In this embodiment, the electrodes 30 are arranged in a plurality separated from each other. Therefore, a plurality of capacitors are constituted by each of the plurality of electrodes 30 and the detection line 41 facing this electrode 30, and the region where the plurality of electrodes 30 exist becomes a detection region for detecting the convex portions on the surface of the object.

[0051] As shown in FIG. 3, the surface detection sensor 1 in this embodiment can be used for a surface inspection device 2 that inspects the surface of an object. FIG. 3 is an enlarged cross-sectional view of the surface inspection device 2 according to Embodiment 1.

[0052] As shown in Figure 3, in the surface inspection device 2, the surface detection sensor 1 is fixed to a fixing member 110 for fixing the surface detection sensor 1. In this embodiment, the surface inspection device 2 comprises the surface detection sensor 1, the fixing member 110, and a buffer member 120 positioned between the surface detection sensor 1 and the fixing member 110. In other words, the surface detection sensor 1 is fixed to the fixing member 110 via the buffer member 120.

[0053] Next, a method for inspecting the surface of an object using the surface inspection device 2 will be explained with reference to Figure 4. Figure 4 is a diagram illustrating a method for inspecting the surface of an object 3 using the surface inspection device 2 according to Embodiment 1.

[0054] As shown in Figure 4, the surface inspection device 2 can detect protrusions 3a on the surface of object 3 as defective parts. Specifically, the protrusions 3a on the surface of object 3 can be detected by the surface detection sensor 1. The protrusions 3a on the surface of object 3 are, for example, foreign matter adhering to the surface of object 3 or protrusions formed as part of object 3.

[0055] When inspecting the surface of object 3 with the surface inspection device 2, as shown in Figure 4, the surface inspection device 2 is positioned so that the surface detection sensor 1 faces object 3. Specifically, the surface inspection device 2 is positioned so that the covering member 20 of the surface detection sensor 1 faces object 3. In this way, the covering member 20 is located on the object 3 side when the surface detection sensor 1 is in use. Then, the surface inspection device 2 is placed on object 3 so that the covering member 20 of the surface detection sensor 1 is in contact with object 3. Specifically, the surface inspection device 2 is pressed against object 3 so that the entire covering member 20 of the surface detection sensor 1 is in close contact with the surface of object 3.

[0056] Here, the features of the surface detection sensor 1 and the surface inspection device 2 will be explained in comparison with the comparative surface detection sensor 1X and the comparative surface inspection device 2X using Figures 5 and 6. Figure 5 is an enlarged cross-sectional view showing the inspection of the surface of object 3 using the comparative surface inspection device 2X equipped with the comparative surface detection sensor 1X. Figure 6 is an enlarged cross-sectional view showing the inspection of the surface of object 3 using the surface inspection device 2 equipped with the surface detection sensor 1 according to Embodiment 1.

[0057] As shown in Figure 5, the surface detection sensor 1X and surface inspection device 2X of the comparative example differ in the configuration of the covering member 20X from the surface detection sensor 1 and surface inspection device 2 of the embodiment shown in Figure 6. Specifically, as shown in Figure 6, in the surface detection sensor 1 of the embodiment, the covering member 20 is composed of an outer casing member 21 and a rigid member 22, but as shown in Figure 5, in the surface detection sensor 1X of the comparative example, the covering member 20X does not have a rigid member 22 and is composed only of an outer casing member 21.

[0058] When inspecting the surface of object 3 using the surface inspection device 2X of the comparative example configuration as shown in Figure 4, as shown in Figure 5, if the protrusion 3a is positioned below the wire 40 of the surface detection sensor 1X and the wire 40 and the protrusion 3a face each other, the wire 40 is pushed inward together with the covering member 20X, and the position of the wire 40 is displaced. In other words, the wire 40 is displaced by the pressure from the protrusion 3a via the covering member 20X. Specifically, the wire 40 moves upward (in the Z-axis direction). Therefore, the detection wire 41 and the insulating layer 42 that constitute the wire 40 move upward.

[0059] At this time, the electrode 30 and the detection wire 41 form a capacitor, so as the electrode 30 and the wire 40 move upward, the capacitance (capacitance value) between the electrode 30 and the detection wire 41 changes. By detecting this change in capacitance, it is possible to detect the presence of a protrusion 3a on the surface of object 3.

[0060] However, if the protrusion 3a of object 3 is very small and its height is low, the amount of pressure exerted on the wire 40 by the protrusion 3a will be small, resulting in a smaller movement of the wire 40 and a smaller change in capacitance between the electrode 30 and the detection wire 41. As a result, it may not be possible to detect the change in capacitance, and therefore it may not be possible to detect the presence of the protrusion 3a on the surface of object 3.

[0061] In contrast, in the surface inspection device 2 according to this embodiment, the covering member 20 of the surface detection sensor 1 has a rigid member 22 in addition to the outer shell member 21. As a result, as shown in Figure 6, when the protrusion 3a is located below the wire 40 of the surface detection sensor 1 and the wire 40 and the protrusion 3a face each other, not only is the wire 40 facing the protrusion 3a pushed inward via the covering member 20, but the wire 40 adjacent to the wire 40 facing the protrusion 3a is also pushed inward by the covering member 20. In other words, the two adjacent wires 40 are displaced in position by the pressure from the protrusion 3a via the covering member 20. Specifically, the two adjacent wires 40 move upward.

[0062] As the electric wire 40 moves upward in this manner, the electric wire 40 pushes up the electrode 30 and the elastic member 10, causing the electrode 30 and the elastic member 10 to deform so that they become convex upwards. Specifically, the elastic member 10 undergoes elastic deformation, and the electrode 30 provided on the elastic member 10 also deforms in accordance with the deformation of the elastic member 10.

[0063] Then, when two adjacent wires 40 move upward due to the covering member 20, the two detection wires 41 that make up each of the two adjacent wires 40 also move upward. In other words, the covering member 20 has hardness (rigidity) such that when the surface detection sensor 1 comes into contact with a protrusion 3a on the surface of the object 3, it displaces the position of at least two of the multiple detection wires 41. Specifically, the covering member 20 has hardness (rigidity) such that when the surface detection sensor 1 comes into contact with a protrusion 3a and one of the multiple detection wires 41 (the first detection wire) is displaced by the protrusion 3a, it displaces the position of the detection wire 41 (the second detection wire) adjacent to that detection wire 41 (the first detection wire).

[0064] As a result, the covering member 20 displaces the positions of the two detection lines 41, causing a change in the capacitance (capacitance value) between each of the two detection lines 41 and the electrode 30. In other words, the capacitance of the capacitor formed by the detection lines 41 and the electrode 30 changes at two locations. By detecting this change in capacitance with the detection circuit 50, it is possible to detect the presence of a protrusion 3a on the surface of the object 3.

[0065] Thus, in the comparative example surface detection sensor 1X shown in Figure 5, only the capacitance of one capacitor changed, but in the surface detection sensor 1 according to this embodiment, the capacitance of multiple capacitors changes. In other words, the surface detection sensor 1 according to this embodiment can have a much higher detection sensitivity than the surface detection sensor 1X of the comparative example. Therefore, by using the surface detection sensor 1 according to this embodiment, even if the protrusions 3a on the surface of the object 3 are minute, it is possible to easily detect the presence of protrusions 3a on the surface of the object 3.

[0066] Furthermore, by moving the surface inspection device 2 so that the surface detection sensor 1 moves away from the object 3, the elastically deformed elastic member 10 returns to its original state due to its elastic restoring force. As a result, the electric wire 40 and electrode 30 return to their original positions.

[0067] Furthermore, the surface detection sensor 1 according to this embodiment can also detect protrusions 3a that cannot be detected by the surface detection sensor 1X of the comparative example. This point will be explained with reference to Figures 7 and 8. Figure 7 is an enlarged cross-sectional view showing the inspection of the surface of object 3 using the comparative surface inspection device 2X equipped with the surface detection sensor 1X of the comparative example. Figure 8 is an enlarged cross-sectional view showing the inspection of the surface of object 3 using the surface inspection device 2 equipped with the surface detection sensor 1 according to Embodiment 1. Note that in Figure 7, the position of the protrusions 3a of object 3 is different from that in Figure 5. Similarly, in Figure 8, the position of the protrusions 3a of object 3 is different from that in Figure 6.

[0068] As shown in Figure 7, in the comparative example surface inspection apparatus 2X equipped with the comparative example surface detection sensor 1X, if a protrusion 3a of object 3 is located between two adjacent electric wires 40 (detection wires 41), the soft covering member 20X is only pushed inward by the portion surrounding the protrusion 3a, and the position of the electric wires 40 may not change. In this case, the capacitance (capacitance value) generated between the electrode 30 and the detection wire 41 does not change, and therefore the protrusion 3a present on the surface of object 3 cannot be detected.

[0069] In contrast, as shown in Figure 8, in the surface inspection device 2 according to this embodiment, the covering member 20 of the surface detection sensor 1 has a rigid member 22 in addition to the outer shell member 21. As a result, even if a protrusion 3a of the object 3 is present between two adjacent electric wires 40 (detection wires 41), a wide area of ​​the covering member 20 is pushed inward by the protrusion 3a. As a result, the two electric wires 40 are pushed inward by the covering member 20 and their positions are displaced. In other words, the detection wires 41 and insulating layer 42 that constitute each of the two electric wires 40 move upward. Thus, the covering member 20 has hardness (rigidity) that displaces the positions of the two detection wires 41 when the surface detection sensor 1 contacts the protrusion 3a of the object 3. In other words, the positions of the two detection wires 41 are displaced by the covering member 20. As a result, the capacitance (capacitance value) generated between each of the two detection wires 41 and the electrode 30 changes. In other words, the capacitance of the capacitor formed by the detection line 41 and the electrode 30 changes at two locations. By detecting this change in capacitance with the detection circuit 50, it is possible to detect the presence of a protrusion 3a on the surface of object 3.

[0070] Thus, in the comparative example, surface detection sensor 1X may not be able to detect the presence of a protrusion 3a on the surface of object 3 if the protrusion 3a of object 3 is located between two adjacent wires 40 (detection wires 41). However, in the surface detection sensor 1 according to this embodiment, even if the protrusion 3a of object 3 is located between two adjacent wires 40 (detection wires 41), it is possible to easily detect the presence of a protrusion 3a on the surface of object 3.

[0071] As described above, the surface detection sensor 1 according to this embodiment comprises an elastic member 10, a covering member 20 located on the object 3 side when the surface detection sensor 1 is in use, a plurality of electrodes 30 positioned between the elastic member 10 and the covering member 20, a plurality of detection lines 41 positioned between the plurality of electrodes 30 and the covering member 20 and positioned to intersect with the plurality of electrodes 30, and an insulating layer 42 positioned between each of the plurality of electrodes 30 and each of the plurality of detection lines 41. The covering member 20 displaces the positions of at least two of the plurality of detection lines 41 when the surface detection sensor 1 comes into contact with a protrusion 3a present on the surface of the object 3.

[0072] In this configuration, the surface detection sensor 1 is brought into contact with the surface of the object 3 such that the covering member 20 is positioned on the object 3 side. When a protrusion 3a (foreign matter, etc.) is present on the surface of the object 3, at least two detection lines 41 are pushed inward and displaced by the protrusion 3a via the covering member 20. In other words, the two detection lines 41 are displaced by the pressure from the protrusion 3a. By detecting the displacement of the two detection lines 41, it is possible to detect the presence of a protrusion 3a on the surface of the object 3. Thus, the surface detection sensor 1 according to this embodiment can easily detect a protrusion 3a present on the surface of the object 3.

[0073] In particular, since the surface detection sensor 1 according to this embodiment is a contact-type sensor that brings the covering member 20 into contact with the surface of the object 3, it can easily detect protrusions 3a present on the surface of the object 3 even if the surface of the object 3 is curved or has a complex surface shape.

[0074] Furthermore, in the surface detection sensor 1 according to this embodiment, a capacitor is formed by each of the multiple electrodes 30 and the detection line 41, and the protrusions 3a present on the surface of the object 3 are detected based on the change in capacitance that occurs between the multiple electrodes 30 and the detection line 41. This makes it possible to easily detect the protrusions 3a present on the surface of the object 3. Thus, the surface detection sensor 1 according to this embodiment is a capacitive pressure sensor. In addition, the surface detection sensor 1 according to this embodiment is also a pressure sensor (pressure-sensitive sensor) that detects the presence of protrusions 3a by receiving pressure from the protrusions 3a.

[0075] Furthermore, the surface inspection device 2 according to this embodiment includes a surface detection sensor 1, a fixing member 110 for fixing the surface detection sensor 1, and a buffer member 120 disposed between the surface detection sensor 1 and the fixing member 110.

[0076] As a result, even if the elastic member 10 is significantly deformed by the pressure of the electric wire 40 on the surface of object 3 by the protrusion 3a, the deformation can be absorbed by the cushioning member 120.

[0077] Although not shown in the figures, the surface detection sensor 1 or surface inspection device 2 may further include at least one of the following sensors: an acceleration sensor, an angle sensor, and an angular velocity sensor. This allows for the collection of surface condition information of the object 3 or sensor operation information in response to changes in the shape of the object 3 when the surface of the object 3 is not planar. These sensors can be mounted, for example, on the elastic member 10 on which the detection circuit 50 is mounted or on the circuit board.

[0078] Furthermore, in this embodiment, when detecting the protrusions 3a on the surface of object 3, as shown in Figure 4, the surface inspection device 2 (surface detection sensor 1) is moved vertically to bring the covering member 20 into contact with object 3, and then the protrusions 3a on the surface of object 3 are detected without moving the surface inspection device 2 (surface detection sensor 1) horizontally. However, this is not the only method. Specifically, as shown in Figure 9(a), first, the surface inspection device 2 (surface detection sensor 1) is moved vertically to place the surface inspection device 2 on object 3 so that the covering member 20 contacts object 3, and then, as shown in Figure 9(b), the surface inspection device 2 (surface detection sensor 1) is moved horizontally. In other words, the surface inspection device 2 (surface detection sensor 1) is moved so that it slides along the surface of object 3 while the covering member 20 remains in contact with object 3. At this time, the surface detection sensor 1 slides along the surface of object 3. Note that in Figure 9(b), the surface inspection device 2 (surface detection sensor 1) is moved in the X-axis direction.

[0079] At this time, as shown in Figure 9(b), if a protrusion 3a exists on the surface of object 3 at the destination of the surface inspection device 2, the surface detection sensor 1 will slide over the protrusion 3a of object 3. When the surface detection sensor 1 overtakes the protrusion 3a, the covering member 20 of the surface detection sensor 1 deforms so that it is pushed inward by the protrusion 3a. Then, when the protrusion 3a is positioned below the wire 40 of the surface detection sensor 1 and the wire 40 and the protrusion 3a face each other, the wire 40 is pushed inward together with the covering member 20, and the position of the wire 40 is displaced. In other words, the wire 40 is displaced by the pressure from the protrusion 3a via the covering member 20. Specifically, the wire 40 moves upward (in the Z-axis direction). Therefore, the detection wire 41 and the insulating layer 42 that constitute the wire 40 move upward.

[0080] As the electric wire 40 moves upward in this manner, the electric wire 40 pushes up the electrode 30 and the elastic member 10, causing the electrode 30 and the elastic member 10 to deform so that they become convex upwards. Specifically, the elastic member 10 undergoes elastic deformation, and the electrode 30 provided on the elastic member 10 also deforms in accordance with the deformation of the elastic member 10.

[0081] At this time, as the electrode 30 and the wire 40 move upward, the capacitance (capacitance value) between the electrode 30 and the detection wire 41 that constitute the capacitor changes. By detecting this change in capacitance with the detection circuit 50, it is possible to detect the presence of a protrusion 3a on the surface of object 3.

[0082] Then, as the surface inspection device 2 slides further and the protrusion 3a is no longer beneath the surface inspection device 2, the elastically deformed elastic member 10 returns to its original state due to its elastic restoring force. As a result, the electric wire 40 and electrode 30 return to their original positions.

[0083] In this modified example, the surface inspection device 2 (surface detection sensor 1) is moved in the X-axis direction. In this case, the multiple electrodes 30, which are arranged separately from each other, should be aligned at least in the Y-axis direction (direction perpendicular to the direction of movement). In this modified example, the multiple electrodes 30 are aligned not only in the Y-axis direction (direction perpendicular to the direction of movement) but also in the X-axis direction (direction of movement).

[0084] (Embodiment 2) Next, the surface detection sensor 1A according to Embodiment 2 will be described with reference to Figures 10 and 11. Figure 10 is a plan view of the surface detection sensor 1A according to Embodiment 2, when the covering member 20 is omitted, as seen from the covering member 20 side. Figure 11 is a cross-sectional view of the surface detection sensor 1A according to Embodiment 2 along the line XI-XI in Figure 10.

[0085] As shown in Figures 10 and 11, the surface detection sensor 1A in this embodiment differs from the surface detection sensor 1 in the first embodiment in the plan view shape of the electrode 30A. Specifically, as shown in Figure 10, in the surface detection sensor 1A in this embodiment, each of the multiple electrodes 30A has a first inclined portion 311 and a second inclined portion 312.

[0086] The first inclined portion 311 and the second inclined portion 312 are inclined with respect to the X-axis direction, which is the direction of movement of the surface detection sensor 1A, in a plan view, but their inclination directions are different. Furthermore, the first inclined portion 311 and the second inclined portion 312 are formed continuously, and each of the first inclined portion 311 and the second inclined portion 312 is formed in a straight line. Specifically, the plan view shape of the electrode 30A, which is composed of the first inclined portion 311 and the second inclined portion 312, is V-shaped. In other words, the electrode 30A is formed to bend, and there are concave and convex portions on the opposing sides of the bent portion of the electrode 30A.

[0087] In this embodiment, the first inclined portion 311 and the second inclined portion 312 are symmetrical. Therefore, in a plan view, the area of ​​the first inclined portion 311 and the area of ​​the second inclined portion 312 are the same.

[0088] Furthermore, the multiple V-shaped electrodes 30A are arranged in close proximity to each other in the Y-axis direction. Specifically, two adjacent electrodes 30A in the Y-axis direction are formed such that the convex portion of the bent portion of one electrode 30A fits into the concave portion of the bent portion of the other electrode 30A.

[0089] In this embodiment, the first inclined portion 311 and the second inclined portion 312 are the first conductive layer 31A of the electrode 30A. That is, the first inclined portion 311 is a part of the first conductive layer 31A, and the second inclined portion 312 is the remaining part of the first conductive layer 31A. Therefore, the first conductive layer 31A is formed in a V-shape. In addition, the second conductive layer 32A of the electrode 30A is also formed in a V-shape following the shape of the first conductive layer 31A.

[0090] Except for the planar shape of the electrode 30A, the surface detection sensor 1A according to this embodiment is the same as the surface detection sensor 1 according to Embodiment 1 described above.

[0091] The surface detection sensor 1A configured in this way can be used in a surface inspection device for inspecting the surface of an object, similar to the first embodiment described above. Also, similar to the first embodiment, the surface of an object can be inspected by using a surface inspection device equipped with the surface detection sensor 1A. In other words, the surface detection sensor 1A can detect protrusions present on the surface of an object. Specifically, similar to the first embodiment, when the surface detection sensor 1A is brought into contact with an object, the presence of protrusions on the surface of the object can be detected by detecting the change in capacitance that occurs between the electrode 30A and the detection wire 41 due to the pressing of the electric wire 40.

[0092] As described above, the surface detection sensor 1A according to this embodiment also comprises an elastic member 10, a covering member 20 located on the object side when the surface detection sensor 1A is in use, a plurality of electrodes 30A disposed between the elastic member 10 and the covering member 20, a plurality of detection lines 41 located between the plurality of electrodes 30A and the covering member 20 and arranged to intersect with the plurality of electrodes 30A, and an insulating layer 42 located between each of the plurality of electrodes 30A and each of the plurality of detection lines 41. The covering member 20 displaces the position of at least two of the plurality of detection lines 41 when the surface detection sensor 1A comes into contact with a protrusion present on the surface of an object.

[0093] With this configuration, as with Embodiment 1 described above, protrusions on the surface of an object can be easily detected.

[0094] Furthermore, in the surface detection sensor 1A according to this embodiment, each of the multiple electrodes 30A has a first inclined portion 311 that is inclined with respect to the X-axis direction, which is the direction of movement of the surface detection sensor 1A.

[0095] This configuration allows for reliable detection of protrusions on the surface of an object, compared to Embodiment 1 described above. This point will be explained below.

[0096] In the surface detection sensor 1 of the above embodiment 1, each electrode 30 extends linearly parallel to the X-axis direction. Therefore, the region between two adjacent electrodes 30 in the Y-axis direction (i.e., the region where no electrodes 30 exist) also exists linearly along the X-axis direction. Consequently, when the surface detection sensor 1 is moved in the X-axis direction to inspect a protrusion on the surface of an object, if the protrusion is located in the region between two adjacent electrodes 30 in the Y-axis direction, even if the surface detection sensor 1 is slid along the X-axis direction, the protrusion will not come to a position opposite the electrode 30, and therefore cannot be detected. In other words, with the shape of the electrodes 30 of the surface detection sensor 1 of the above embodiment 1, there are protrusions that cannot be detected. That is, there are cases where protrusions cannot be detected.

[0097] In contrast, in the surface detection sensor 1A according to this embodiment, each of the multiple electrodes 30A has a first inclined portion 311 that is inclined with respect to the direction in which the surface detection sensor 1A is moved when inspecting protrusions on the surface of an object (in this embodiment, the X-axis direction). With this configuration, the region between two adjacent electrodes 30A in a direction perpendicular to the direction of movement of the surface detection sensor 1A (in this embodiment, the Y-axis direction) (i.e., the region where no electrodes 30A exist) is inclined with respect to the direction of movement of the surface detection sensor 1A (in this embodiment, the X-axis direction). As a result, when the surface detection sensor 1A is moved in the X-axis direction when inspecting protrusions on the surface of an object, the protrusions on the surface of the object will always face one of the multiple electrodes 30A. In other words, in a top view, the protrusions on the surface of the object will always pass through one of the multiple electrodes 30A. Therefore, protrusions on the surface of an object can be reliably detected.

[0098] Furthermore, in the surface detection sensor 1A according to this embodiment, the electrode 30A has not only the first inclined portion 311, but also a second inclined portion 312 that is formed continuously with the first inclined portion 311 and has a different inclination direction from the first inclined portion 311. Specifically, the electrode 30A is bent in a V-shape.

[0099] This configuration allows multiple electrodes 30A to be efficiently arranged even if the electrodes 30A are bent, thus reducing the dead space around the multiple electrodes 30A compared to the case where the electrodes 30A are composed only of the first inclined portion 311. Therefore, a compact surface detection sensor 1A can be realized even with bent electrodes 30A.

[0100] In this embodiment, the first inclined portion 311 and the second inclined portion 312 of the electrode 30A were straight lines, but this is not limited to them. For example, the first inclined portion 311 and the second inclined portion 312 may be arc-shaped. In this case, the planar shape of the electrode 30A may be wave-shaped, as an example.

[0101] (Modifications) The surface detection sensors 1, 1A and the surface inspection device 2 according to the present disclosure have been described above based on embodiments 1 and 2, but the present disclosure is not limited to embodiments 1 and 2.

[0102] For example, the cushioning member 120 of the surface inspection device 2 in the above embodiments 1 and 2 was made of a single material, but is not limited to this. Specifically, as shown in the surface inspection device 2A in Figure 12, the cushioning member 120A may be a laminated structure of a first cushioning body 121 and a second cushioning body 122. In Figure 12, the first cushioning body 121 is located on the surface detection sensor 1 side, and the second cushioning body 122 is located on the fixing member 110 side. In this case, it is preferable that the first cushioning body 121 and the second cushioning body 122 have different hardnesses. Specifically, it is preferable that the Young's modulus of the first cushioning body 121 and the Young's modulus of the second cushioning body 122 are different. This allows the cushioning member 120A to effectively absorb the changes in the elastic member 10 caused by the pressing of the electric wire 40. In this case, it is preferable that the Young's modulus of the first cushioning body 121, which is located on the surface detection sensor 1 side (elastic member 10 side), be greater than the Young's modulus of the second cushioning body 122. This allows the cushioning member 120A to more effectively absorb the changes in the elastic member 10 caused by the compression of the electric wire 40.

[0103] Furthermore, in embodiments 1 and 2 described above, the covering member 20 displaced the positions of two of the multiple detection lines 41 when the surface detection sensors 1 and 1A came into contact with the protrusions 3a of the object 3, but it is not limited to this. For example, the covering member 20 may displace the positions of three or more of the multiple detection lines 41 when the surface detection sensors 1 and 1A came into contact with the protrusions 3a of the object 3. In other words, it is sufficient for the covering member 20 to displace the positions of at least two of the multiple detection lines 41 when the surface detection sensors 1 and 1A came into contact with the protrusions 3a of the object 3.

[0104] Furthermore, in embodiments 1 and 2 described above, the protrusions 3a on the surface of object 3 were detected by moving the surface inspection device 2 (surface detection sensors 1 and 1A) without moving object 3, but this is not limited to this. For example, the protrusions 3a on the surface of object 3 may be detected by moving object 3 without moving the surface inspection device 2 (surface detection sensors 1 and 1A), or the protrusions 3a on the surface of object 3 may be detected by moving both the surface inspection device 2 (surface detection sensors 1 and 1A) and object 3 relative to each other. In other words, the protrusions 3a on the surface of object 3 can be detected by moving the surface inspection device 2 (surface detection sensors 1 and 1A) relative to object 3.

[0105] Furthermore, in embodiments 1 and 2 described above, the electrode 30 (30A) was composed of a first conductive layer 31 (31A) and a second conductive layer 32 (32A), but it is not limited to this. For example, in embodiment A, the electrode 30 (30A) may be composed of only the first conductive layer 31 (31A).

[0106] Furthermore, in embodiments 1 and 2 described above, the region between two adjacent electric wires 40 between the elastic member 10 and the covering member 20 was an air layer (space), but this is not limited to this. For example, if the electric wires 40 are displaced by the protrusion 3a of the object 3, the space between two adjacent electric wires 40 may be filled with a filler material or the like.

[0107] Furthermore, this disclosure also includes forms obtained by applying various modifications to the above embodiments that a person skilled in the art could conceive, and forms realized by arbitrarily combining the components and functions of the embodiments without departing from the spirit of this disclosure. In addition, this disclosure also includes any combination of two or more claims from the multiple claims described in the claims of this application, provided that they are not technically contradictory. For example, if the cited claims described in the claims of this application are made into a multi-claim or multi-multi-claim so as to refer to all of the higher-level claims without technically contradictory, then all combinations of claims included in that multi-claim or multi-multi-claim are also included in this disclosure.

[0108] The technology disclosed herein is useful as a surface detection sensor and surface inspection device, etc., used when inspecting the surface of an object.

[0109] 1, 1A Surface detection sensor 2, 2A Surface inspection device 3 Object 3a Protrusion 10 Elastic member 20 Covering member 21 Outer shell member 22 Hard member 30, 30A Electrode 31, 31A First conductive layer 32, 32A Second conductive layer 40 Electric wire 41 Detection wire 42 Insulating layer 50 Detection circuit 60 Outer wiring 110 Fixing member 120, 120A Buffer member 121 First buffer 122 Second buffer 311 First inclined part 312 Second inclined part

Claims

1. A surface detection sensor for detecting protrusions on the surface of an object, comprising: a sheet-like elastic member; a sheet-like covering member positioned on the object side when the surface detection sensor is in use; an electrode disposed between the elastic member and the covering member; a plurality of detection lines located between the electrode and the covering member and arranged to intersect the electrode; and an insulating layer located between the electrode and the plurality of detection lines, wherein the covering member displaces the position of at least two of the plurality of detection lines when the surface detection sensor contacts a protrusion on the surface of the object.

2. The covering member comprises an outer shell member constituting the outer shell and a rigid member positioned between the outer shell member and the plurality of detection lines, wherein the Young's modulus of the rigid member is higher than the Young's modulus of the outer shell member, the surface detection sensor according to claim 1.

3. The surface detection sensor according to claim 2, wherein the electrodes are plurality, and the rigid member is provided over the entire area of ​​the plurality of electrodes.

4. The surface detection sensor according to claim 2, wherein the electrodes are plurality, and the rigid member is divided to correspond to each of the plurality of electrodes.

5. The surface detection sensor according to any one of claims 1 to 4, wherein the surface detection sensor detects protrusions present on the surface of an object by moving relative to the object in a first direction, and the electrodes are plurality, and the plurality of electrodes are arranged in a second direction at least perpendicular to the first direction.

6. The surface detection sensor according to claim 5, wherein the plurality of electrodes are also arranged in the first direction.

7. The surface detection sensor according to claim 6, wherein, in a plan view, each of the plurality of electrodes has a first inclined portion that is inclined with respect to the first direction.

8. In a plan view, the electrode further has a second inclined portion that is inclined with respect to the first direction and in a direction different from the inclination direction of the first inclined portion, and the second inclined portion is formed in continuity with the first inclined portion, the surface detection sensor according to claim 7.

9. The surface detection sensor according to claim 8, wherein the first inclined portion and the second inclined portion extend in a straight line or an arc shape.

10. A surface detection sensor according to any one of claims 1 to 4, comprising an insulated coated wire having a core wire made of a conductive material and an insulating film covering the core wire, wherein the detection wire is the core wire and the insulating layer is the insulating film.

11. A surface detection sensor according to any one of claims 1 to 4, which detects a protrusion present on the surface of an object based on a change in capacitance occurring between the electrode and the detection line.

12. The surface detection sensor according to any one of claims 1 to 4, wherein the electrodes are plurality, and the elastic member is provided over the entire area of ​​the plurality of electrodes.

13. The surface detection sensor according to any one of claims 1 to 4, wherein the electrode comprises a first conductive layer disposed on the elastic member and a second conductive layer laminated on a part of the first conductive layer and having a lower resistivity than the first conductive layer.

14. A surface inspection device comprising: a surface detection sensor according to any one of claims 1 to 4; a fixing member for fixing the surface detection sensor; and a buffer member disposed between the surface detection sensor and the fixing member.

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