Treatment device and method for wetting a surface of a body with a treatment fluid

Abstract

The invention relates to a treatment device for wetting a surface (15) of a body (14) with a treatment fluid (25), comprising a holding apparatus (12), a fluid supply apparatus (21) and a rotary drive (23). The holding apparatus (12) is designed to hold the body (14). The rotary drive (23) is designed to set the holding apparatus (12) with the held body (14) in a rotational movement about an axis of rotation (16). The fluid supply apparatus (21) is designed to spray the treatment fluid (25) onto the surface (15) of the body (14). The fluid supply apparatus (21) comprises a plurality of outlet openings (22) for the treatment fluid (25), wherein the plurality of outlet openings (21) comprises at least three outlet openings (22), the azimuth positions (41, 42) of which relative to the axis of rotation (16) differ from one another in pairs. The invention also relates to a method for wetting a surface.

Description

[0001] 10.02.2026 / PH

[0002] Treatment device and method for wetting a body surface with a treatment fluid

[0003]

[0001] The invention relates to a treatment device and a method for wetting a surface of a body with a treatment fluid. The present patent application claims priority from German patent application DE 10 2025 106 417.2, filed on February 20, 2025, to which reference is made and whose content is incorporated herein in its entirety (“incorporation by reference”).

[0004]

[0002] There are various application areas where a surface of a body is to be wetted with a treatment fluid. These include, for example, coating processes where a layer is to be applied to a body. These include testing methods where a test fluid is applied to a body. These include surface treatment methods where a chemically active liquid is applied to the body. These include cleaning methods, in particular ultra-fine cleaning methods, where the surface is to be wetted with a cleaning fluid. These include lithographic processes where a surface coated with a photoresist is to be wetted with a developer fluid. These include paint stripping processes where a surface of a body is to be freed from a coating.

[0005]

[0003] With three-dimensionally shaped surfaces, the problem arises that the treatment fluid flows off the surface under the influence of gravity while being applied. This can lead to some of the treatment fluid accumulating in lower-lying areas of the surface, while in other areas the treatment fluid no longer forms a continuous film. This can result in the treatment fluid acting on different areas of the surface with different time-averaged reaction rates. One reason for this may be that a local reaction rate at a position on the surface depends on the history of the chemical and / or physical preconditions, for example, because a chemical reaction was stopped or altered by a breakdown of the continuous film on the surface in question.

[0006]

[0004] The invention is based on the objective of providing a treatment device and a method for wetting a body surface with a treatment fluid, thereby reducing the aforementioned disadvantages. This objective is achieved by the features of the independent claims. Advantageous embodiments are specified in the dependent claims.

[0007]

[0005] A treatment device according to the invention for wetting the surface of a body with a treatment fluid comprises a holding device, a fluid supply device, and a rotary drive. The holding device is designed to hold the body. The rotary drive is designed to set the holding device with the held body into a rotary motion about an axis of rotation. The fluid supply device is designed to apply the treatment fluid to the surface of the body. The fluid supply device can, for example, be a device for spraying or injecting the treatment fluid. A treatment fluid according to the invention can, for example, be a treatment fluid or a reaction fluid.The fluid supply device comprises a plurality of outlet openings for the treatment fluid, wherein the plurality of outlet openings includes three outlet openings whose azimuth positions relative to the axis of rotation differ from each other in pairs. The outlet openings can, for example, be designed as outlet nozzles.

[0008]

[0006] According to the invention, two measures are combined. The rotating device allows the body to be set into a rotational movement while the fluid supply device is active. With suitable orientation of the body and the axis of rotation, this results in the direction in which the treatment fluid flows on the surface changing during one revolution of the body. This reduces the probability of a continuous film of treatment fluid breaking up.

[0009]

[0007] Furthermore, a configuration of the fluid supply device is proposed with which the update rate of the treatment fluid can be increased. The update rate refers to the frequency with which fresh treatment fluid is supplied to the areas of the surface. When using a conventional spray bar, all outlet openings would lie within a plane defined by the axis of rotation of the rotary device and the spray bar. This would mean that each surface area would only come into contact with an outlet opening of the fluid supply device twice during a complete rotation of the body. According to the invention, in contrast to a conventional spray bar, the fluid supply device comprises three outlet openings whose azimuth positions relative to the axis of rotation differ from one another in pairs.

[0010]

[0008] In cylindrical coordinates, the position of each outlet opening can be specified by a distance r to the axis of rotation, by a position z in the direction of the axis of rotation, and by an azimuth angle. , which indicates the azimuth position. In a conventional spray bar, each of the outlet openings has either an azimuth angle or an azimuth angle <5-180°. With a conventional spray bar, there are therefore no more than two different azimuth positions of the outlet openings. The body must be rotated 180° between the two arms of the spray bar. This results in a longer section of the rotation during which the treatment fluid is not refreshed on the relevant surface area. It has been shown that this phase can lead to a disruption of the fluid film, which can be accompanied by an uneven intensity of reaction between the surface and the treatment fluid. By distributing the outlet openings across more than two azimuth positions, the sections of the rotation during which the treatment fluid is not refreshed can be shortened. This shortening is equivalent to an increase in the update rate.

[0011]

[0009] The fluid supply device can comprise at least four, preferably at least five, preferably at least ten, and further to be shown at least twenty outlet openings, the azimuth positions of which differ from each other in pairs. Each of the outlet openings can be designed as an outlet nozzle.

[0012]

[0010] The fluid supply device can have a plurality of outlet openings whose fluid outlet cones overlap upon impact with the surface. The fluid outlet cones can, in particular, be spray cones. An area on the surface covered by overlapping fluid outlet cones is referred to as a spray field. The fluid supply device can be configured such that a spray field is formed which extends without interruption from a central area of ​​the surface to be wetted to a peripheral area of ​​the surface to be wetted. The terms central and peripheral refer to the axis of rotation located within the body. The central area can coincide with the axis of rotation or be at a distance from the axis of rotation.In the case of a distance, the central area can coincide with a central end of the surface, as might be the case, for example, if the body has a recess in the region of the axis of rotation. The peripheral area can be the region of the surface to be wetted that is furthest from the axis of rotation. In the case of such a spray field, the entire surface comes within the influence of the spray field during one complete revolution of the body. A complete revolution of the body is defined as rotating the body 360° around the axis of rotation.

[0013]

[0011] The fluid supply device can be designed to form a plurality of spray fields extending from the central region of the surface to the peripheral region of the surface. The difference between the azimuth position of two spray fields can be less than 160°, preferably less than 130°, and more preferably less than 100°. If a spray field has a circumferential extent, the specification refers to a center line of the spray field. All spray fields together form the spray pattern of the fluid supply device. In the case of overlapping spray fields, the spray pattern can be a continuous spray pattern.

[0014]

[0012] The fluid supply device can be designed such that the treatment fluid exiting the outlet openings forms a fluid outlet cone at each outlet opening. The fluid outlet cone is the area within which the treatment fluid exiting an outlet opening spreads. This area need not be conical. The fluid supply device can be designed such that the maximum azimuth distance between the fluid outlet cones of two outlet openings is no greater than 120°, preferably no greater than 90°, preferably no greater than 60°, and more preferably no greater than 30°. With an azimuth distance of no more than 90°, there is no area on the surface that is not affected by at least one fluid outlet cone during a 90° rotation of the body.During a complete rotation of the body, each surface area enters the influence of one of the outlet openings at least four times. With an azimuth distance of no more than 60°, each surface area enters the influence of one of the outlet openings at least six times during a complete rotation of the body. This increased update rate reduces the probability of the liquid film breaking up during operation of the treatment device.

[0015]

[0013] The fluid supply device can be designed such that the fluid outlet cones together cover at least 30%, preferably at least 50%, and more preferably at least 70% of the area to be wetted. This refers to a state free from relative movement between the fluid supply device and the surface to be wetted. The body can be designed such that the surface to be wetted is defined by an edge extending around the surface to be wetted. It is also possible that the surface to be wetted is defined in another way.

[0016]

[0014] The number of outlet openings for the treatment fluid can be greater than 5, preferably greater than 10, preferably greater than 20, and more preferably greater than 30. The outlet openings can span a field that is intersected by the axis of rotation, preferably in the center. The outlet openings can be arranged concentrically to the axis of rotation. Other arrangements of the outlet openings are also possible. In one embodiment, the outlet openings form a spiral shape.

[0017]

[0015] If the axis of rotation forms an angle with the vertical, the direction in which gravity acts on the treatment fluid located on the surface changes during one revolution of the body. This promotes a uniform distribution of the treatment fluid on the surface. The axis of rotation can form an angle of at least 30°, preferably at least 45°, and more preferably at least 70° with the vertical. In one embodiment, the axis of rotation is horizontally oriented.

[0018]

[0016] The surface can have rotational symmetry with respect to the axis of rotation. This makes it possible for the distance between an outlet opening of the fluid supply device and the surface to remain constant during a revolution of the body. This can apply to all outlet openings of the fluid supply device.

[0019]

[0017] The surface can have a curved shape, for example, a convex or concave surface. The body can be an optical element, in particular a mirror of an EUV beam path, for example, a converging mirror or a diverging mirror. According to the invention, an EUV beam path can be understood to be a beam path of a mask inspection system, a wafer inspection system, or a projection exposure system. The body can have a central recess. The surface of the body to be treated can have a structure, in particular a periodic structure. The fluid supply device can have a shape adapted to the curvature of the surface. Several outlet openings of the fluid supply device can be arranged such that the spray direction of the outlet openings differs.The spray direction corresponds to the central axis of a fluid outlet cone emerging from the outlet opening.

[0020]

[0018] In one embodiment, the treatment device is designed to treat a body with a surface to be treated of a total area of ​​at least 1000 cm². 2 , preferably at least 2000 cm 2 , preferably at least 2500 cm 2 to edit.

[0021]

[0019] The angle between the spray direction of an outlet opening and the area of ​​the surface opposite the outlet opening can be between 50° and 110°. This can apply to at least 50%, preferably at least 70%, and more preferably at least 90% of the outlet openings of the fluid supply device.

[0022]

[0020] The fluid supply device can be designed such that the outlet openings have essentially the same distance from the surface. The difference between the smallest distance of an outlet opening and the largest distance of an outlet opening can be less than 30%, preferably less than 20%, and more preferably less than 10%. The reference value for comparison is in each case the larger of the two distances.

[0023]

[0021] The fluid supply device can include a supply line for delivering treatment fluid to one or more outlet openings. If the treatment fluid is supplied to several outlet openings via a single supply line, the process parameters for these outlet openings are identical. These process parameters include, for example, the temperature, the flow rate, or the concentration of the treatment fluid. Furthermore, if the outlet openings have an identical design, the exiting fluid outlet cones also have an identical shape.

[0024]

[0022] The fluid supply device can comprise a plurality of supply lines to the outlet openings. Each of the outlet openings can be supplied with treatment fluid through one of the supply lines. The outlet openings of the fluid supply device can be grouped together, with each group being supplied by a common supply line. The process parameters of different groups of outlet openings can differ. This can be particularly true if a first group of outlet openings has a different distance from the axis of rotation than a second group of outlet openings. For example, the treatment fluid for a group of outlet openings located close to the axis of rotation can be less viscous.

[0025]

[0023] The fluid supply device can be designed to spray a thinning fluid onto the surface. The thinning fluid can be dispensed when the supply of treatment fluid is interrupted. Spraying with the thinning fluid can stop a chemical reaction occurring between the treatment fluid and the surface. The fluid supply device can be configured to selectively spray either treatment fluid or thinning fluid onto the surface. In one embodiment, the thinning fluid exits from the same outlet openings as the treatment fluid. For this purpose, the supply of treatment fluid to the supply line can be stopped, and thinning fluid can be supplied to the supply line instead.

[0026]

[0024] In one embodiment, the fluid supply device comprises a first set of outlet openings to which treatment fluid is supplied, and a second set of outlet openings to which diluent fluid is supplied. The first set of outlet openings and / or the second set of outlet openings can individually or in combination have the features described in connection with a single set of outlet openings.

[0027]

[0025] The first set of outlet openings and the second set of outlet openings can be equipped with separate supply lines.

[0028]

[0026] The outlet openings of the first set of outlet openings and the outlet openings of the second set of outlet openings can be combined in pairs. The outlet openings can be combined in such a way that identical spray fields are created for the treatment fluid and for the thinning fluid. The distance of one outlet opening to the nearest outlet opening of the other set can be smaller than the distance to the nearest outlet opening of the same set. This can apply to each outlet opening.

[0029]

[0027] The fluid supply device can be connected to a reservoir from which treatment fluid is supplied. One or more valves and / or one or more pumps can be arranged between the reservoir and the outlet openings, with which the supply of treatment fluid to the outlet openings can be adjusted. The valves and / or pumps can be configured so that they can be switched between an active state and a passive state under the control of a control unit. The treatment fluid can be, for example, a coating fluid, a test fluid, a chemically active fluid, a developer fluid, a cleaning fluid, in particular a cleaning fluid for fine cleaning, or a paint stripping fluid.

[0028] The fluid supply device can be connected to a reservoir from which thinning fluid is supplied.One or more valves and / or pumps can be arranged between the reservoir and the outlet openings to regulate the supply of diluent to the outlet openings. The valves and / or pumps can be configured to switch between an open and a closed state under the control of a control unit. Additionally or alternatively, the valves can be switched between a first state in which treatment fluid is supplied to the outlet openings and a second state in which diluent is supplied to the outlet openings.

[0030]

[0029] The invention also relates to a method for wetting a surface of a body with a treatment fluid, wherein the treatment fluid is sprayed onto the surface by means of a fluid supply device while the body is rotated about an axis of rotation, wherein the fluid supply device has a plurality of outlet openings for the treatment fluid, wherein the plurality of outlet openings comprises at least three outlet openings whose azimuth positions relative to the axis of rotation differ from each other in pairs.

[0031]

[0030] The disclosure includes further developments of the method with features that are described in connection with the treatment device according to the invention. The disclosure includes further developments of the treatment device with features that are described in connection with the method according to the invention.

[0032]

[0031] The invention is described below by way of example with reference to the accompanying drawings and advantageous embodiments. Figure 1 shows an exemplary embodiment of a body with a surface to be wetted;

[0033] Fig. 2 : an embodiment of a treatment device according to the invention;

[0034] Fig. 3 : a view in the direction of the axis of rotation of the fluid supply device of the treatment device from Fig. 2 ;

[0035] Fig. 4: the view according to Fig. 2 in an alternative embodiment of a treatment device according to the invention;

[0036] Fig. 5: the view according to Fig. 3 of the treatment device from Fig. 4;

[0037] Fig. 6: the view according to Fig. 2 in a further embodiment of the invention;

[0038] Figs. 7, 8: another embodiment of the invention;

[0039] Fig. 9: a view in the direction of the axis of rotation of an embodiment of a fluid supply device according to the invention;

[0040] Figs. 10, 11: the view according to Fig. 9 in alternative embodiments of the invention;

[0041] Fig. 12: a schematic representation of a further embodiment of the invention;

[0042] Fig. 13: The view according to Fig. 12 in a further embodiment of the invention.

[0032] A body 14 shown in Fig. 1 has the basic shape of a cuboid, wherein one of the surfaces 15 deviates from the cuboid shape and has a doubly curved three-dimensional shape. A treatment device according to the invention is used to wet the curved surface 15 with a treatment fluid, which in the exemplary embodiment is a reaction fluid.

[0043]

[0033] According to Fig. 2, a treatment device according to the invention comprises a frame 18, which supports a fluid supply device in the form of a spray device 21 and the body 14. The body 14 is supported by a holding device 12, which is suspended from a rotary drive 23 attached to the frame 18. During operation of the treatment device, the rotary drive 23 rotates the body 14 relative to the frame 18 about a horizontal axis of rotation 16. The direction of the horizontal axis 16 is referred to as the Z-direction. The axis 16 extends centrally through the spray device 21 and centrally through the body 14. The axis of rotation 16 forms a right angle with a rear side of the body 14 that faces the surface 15 to be wetted. The surface 15 to be wetted is bounded all around by an edge of the body 14.This is a special feature of the embodiment; within the scope of the invention, the surface 15 to be wetted can also be defined in other ways.

[0044]

[0034] The spray device 21 is connected to a reservoir 20, which is filled with a reaction fluid 25. The reaction fluid 25 is supplied to the spray device 21 via a pump 19 and emerges there from a plurality of outlet openings in the form of nozzles 22. At each nozzle 22, the reaction fluid 25 forms a fluid outlet cone in the form of a spray cone 24, which impinges on the surface 15 of the body 14 to be wetted. In Fig. 2, the spray cone 24 is shown by way of example for one of the nozzles 22.

[0045]

[0035] According to Fig. 3, the spraying device has four arms extending from the axis 16 within the XY plane. The four arms each form a right angle between them, so that two of the arms extend along a common axis. The intersection point of the arms coincides with the axis of rotation 16 of the rotary drive 23. A plurality of outlet nozzles 22 are formed on each of the arms.

[0046]

[0036] With respect to the axis of rotation 16, the outlet nozzles 22 of a first arm all have the same azimuth position. This is indicated in Fig. 3 using the example of a first azimuth position 41 and a second azimuth position 42. If the azimuth position 41 of an arm is defined as the 0° position, then the outlet nozzles 22 of a second arm have an azimuth position 42 of 90°, the outlet nozzles 22 of a third arm have an azimuth position of 180°, and the outlet nozzles 22 of a fourth arm have an azimuth position of 270°. The azimuth spacing 45 between two adjacent arms is 90°. In contrast, conventional devices have a spray bar concentric with the axis of rotation 16, the arms of which have an azimuth spacing of 180°. A third azimuth position according to the invention does not exist in such a conventional treatment device.

[0047]

[0037] The distribution of the outlet nozzles 22 according to the invention results in improved wetting of the surface 15. The body 14 only needs to be rotated by 90° before passing another arm of the spray device 21. The update rate, within which a specific area of ​​the surface 15 is supplied with fresh reaction fluid, is higher than when a rotation of 180° is required, as is the case with a conventional spray bar. This higher update rate ensures that the surface 15 is continuously wetted with an uninterrupted film of the reaction fluid 25.

[0048]

[0038] The spray device 21 is designed such that the spray cones 24 of two adjacent outlet nozzles 22 overlap. The spray cones 24 of one arm form a spray field 11 that extends from a central surface area 43 to a peripheral surface area 44. The four spray fields 11 together form a continuous spray pattern 26, the shape of which is indicated on a reduced scale in Fig. 3.

[0049]

[0039] In some applications, it is desirable that the reaction between the reaction liquid 25 and the surface 15 can be selectively terminated. In the embodiment according to Fig. 4, in addition to the first reservoir 20 containing the reaction liquid 25, a second reservoir 27, filled with a thinning liquid 28, is connected to the spray device 21. A switching valve 29 is arranged between the first reservoir 20 and the second reservoir 27, so that the pump 19 can deliver either reaction liquid 25 or thinning liquid 28 to the spray device 21.

[0050]

[0040] When the time has come to stop the chemical reaction, the switching valve 29 is switched so that instead of reaction fluid 25, diluent fluid 28 is supplied to the spray device 21. As soon as the diluent fluid 28 comes into contact with the surface 15, only a 90° rotation of the body 14 is required until the entire surface 15 is wetted with diluent fluid 28. The diluted reaction fluid 25 can no longer trigger chemical reactions to any significant extent. The time within which the chemical reaction can be stopped across the entire surface 15 can thus be significantly reduced, for example to a period of 10 s.

[0051]

[0041] In the alternative embodiment according to Figs. 5 and 6, a first outlet nozzle 31 and a second outlet nozzle 32 are combined to form a double nozzle. In each double nozzle, the first outlet nozzle 31 is connected to the first reservoir 20 containing reaction fluid 25, and the second outlet nozzle 32 is connected to the second reservoir 27 containing diluent fluid 28. A first pump 19 is designed to supply reaction fluid 25 to the first outlet nozzles 31. A second pump 30 is designed to supply diluent fluid 28 to the second outlet nozzles 32. According to the invention, the first outlet nozzles 31 of all double nozzles form a first set of outlet nozzles, and the second outlet nozzles 32 of all double nozzles form a second set of outlet nozzles.

[0052]

[0042] When the time has come to stop the chemical reaction on the surface 15, the first pump 19 is deactivated and the second pump 30 is activated. Switching between the first pump 19 and the second pump 30 results in diluent 28, rather than reaction fluid 25, exiting the spray device 21 within a very short period. The period during which the chemical reaction is stopped across the entire surface 15 can be further shortened compared to the embodiment shown in Figures 3 and 4. In the embodiment shown in Figures 3 and 4, the point in time at which diluent 28 exits the nozzles 22 is less precisely defined, particularly because undesirable mixing of reaction fluid 25 and diluent 28 can occur in the supply line between the pump 19 and the nozzles 22.

[0043] In the further embodiment according to Figs. 7 and 8, several outlet nozzles 22 of the spray device 21 are grouped together. The outlet nozzles 22 located near the axis of rotation 16 form a first group 38, the outlet nozzles 22 radially adjoining them form a second group 39, and the outermost outlet nozzles 22 form a third group 40. The first group 38 is supplied by a first supply line 35, the second group 39 is supplied by a second supply line 36, and the third group 40 is supplied by a third supply line 37. According to Fig. 8, each of the supply lines 35, 36, 37 is provided with its own pump 19, 33, 34, so that the groups 38, 39, 40 can be supplied with reaction fluid 25 independently of one another. This design makes it particularly possible to adjust the process parameters differently for different groups of outlet nozzles.Process parameters include, for example, the pressure at which the reaction liquid 25 is supplied, the flow rate of the reaction liquid, the concentration and / or temperature of the reaction liquid 25.

[0053]

[0044] Figure 9 shows another embodiment of a spray device 21 in which the azimuth positions of two adjacent arms of outlet nozzles 22 differ from each other by only 60°, as indicated by the example of two azimuth positions 41, 42. This results in a continuous star-shaped spray pattern 26. The body 14 therefore only needs to be rotated by 60° before passing the next row of outlet nozzles 22. The update rate increases, which leads to a further improvement in the wetting of the surface 15.

[0054]

[0045] A further improvement in the wetting of the surface 15 with reaction fluid 25 is made possible if the outlet nozzles 22 are densely packed as shown in Fig. 10. The spray pattern 26 then forms a closed circle, so that the surface 15 of the body 14 is completely wetted even if the body 14 is not rotated about the axis of rotation 16. For the uniformity of the chemical reaction, it is nevertheless necessary to rotate the body 14, because otherwise the reaction fluid 25 would flow off from higher areas of the surface 15 and collect in lower areas.

[0055]

[0046] In the embodiment according to Fig. 11, the outlet nozzles 22 are arranged in a spiral pattern in the view shown. This type of arrangement of the outlet nozzles 22 results in a continuous spiral spray pattern. Even with such an arrangement of the outlet nozzles 22, an update rate can be achieved that is better than with known spray devices.

[0056]

[0047] In Fig. 12, the body on which the surface 15 to be wetted is formed is rotationally symmetrical. The surface 15 has a concave shape. The spray device 22 is inserted into the volume that is defined by the concave shape of the surface 15. The outlet nozzles 22 of the spray device 21 are oriented such that the axis of the spray cone 24 is perpendicular to the surface 15 at each outlet nozzle 22. The spray device 21 is shaped such that the distance between the outlet nozzle 22 and the opposite surface 15 is the same for all outlet nozzles 22. The body 14 has a central recess through which the axis of rotation 16 extends. The body 14 can, for example, be a mirror whose surface 15 forms a reflective surface. In Fig. 13, the body 14 has the shape of a hemisphere. The surface 15 to be wetted is formed by the surface of the hemisphere.The spray device 21 is designed such that the outlet nozzles 22 surround the hemispherical shape. The outlet nozzles 22 have a constant distance from the surface 15 and are oriented such that the emerging spray cone 24 of each outlet nozzle 22 has an axis that is perpendicular to the surface 15. Viewed from above, the arrangement of the outlet nozzles 22 in FIGS. 12, 13 can have any configuration according to the invention, in particular the configurations shown in FIGS. 3, 5, 7, 9, 10, 11.

Claims

Patent claims 1. Treatment device for wetting a surface (15) of a body (14) with a treatment fluid (25), comprising a holding device (12), a fluid supply device (21), and a rotary drive (23), wherein the holding device (12) is configured to hold the body (14), wherein the rotary drive (23) is configured to set the holding device (12) with the held body (14) into a rotary motion about an axis of rotation (16), wherein the axis of rotation forms an angle of at least 30° with the vertical, wherein the fluid supply device (21) is configured to apply the treatment fluid (25) to the surface (15) of the body (14), in particular to spray or dispense it, wherein the fluid supply device (21) comprises a plurality of has outlet openings ( 22 ) for the treatment fluid ( 25 ),wherein the plurality of outlet openings (21) comprises at least three outlet openings (22) whose azimuth positions (41, 42) relative to the axis of rotation (16) differ from each other in pairs, wherein the surface (15) of the body (14) is curved and wherein the fluid supply device (21) is designed such that the difference between the smallest distance of an outlet opening (22) to the surface (15) and the largest distance of an outlet opening (22) to the surface (15) is less than 30%.

2. Treatment device according to claim 1, comprising a plurality of outlet openings ( 22 ) whose fluid outlet cones ( 24 ) overlap each other upon contact with the surface ( 15 ).

3. Treatment device according to claim 1 or 2, wherein the fluid supply device ( 21 ) is designed such that a spray field ( 11 ) is formed which extends without interruption from a central surface area (43) to a peripheral surface area (44 ).

4. Treatment device according to claim 3, wherein the fluid supply device (21 ) is designed such that a plurality of spray fields ( 11 ) are formed which extend from a central surface area (43) to a peripheral surface area (44 ).

5. Treatment device according to claim 4, wherein the spray fields ( 11 ) form a continuous spray pattern (26).

6. Treatment device according to one of claims 1 to 5, wherein the treatment fluid (25) exiting from the outlet openings (22) forms fluid outlet cones (24) and wherein the largest azimuth distance (45) between the fluid outlet cones (24) of two outlet openings (22) is not greater than 120° .

7. Treatment device according to claim 6, wherein the fluid outlet cones (24) together cover at least 50% of the surface (15) to be wetted.

8. Treatment device according to one of claims 1 to 7, wherein the axis of rotation ( 16) is horizontally aligned.

9. Treatment device according to one of claims 1 to 8, wherein the surface ( 15) has rotational symmetry with respect to the axis of rotation ( 16 .

10. Treatment device according to any one of claims 1 to 9, wherein the outlet openings (22) are grouped into a plurality of groups (38, 39, 40), wherein the process parameters of a first group (38) differ from the process parameters of a second group (39).

11. Treatment device according to any one of claims 1 to 10, wherein the fluid supply device (21) is designed to spray a thinning liquid (28) onto the surface (15).

12. Treatment device according to claim 11, wherein the fluid supply device (21) comprises a first set (31) of outlet openings (22) for the treatment fluid (25) and a second set (32) of outlet openings (22) for the diluent fluid (28).

13. Treatment device according to claim 12, wherein the outlet openings (22 ) of the first set (31 ) and the outlet openings of the second set (32 ) are combined in pairs.

14. Method for wetting a surface (15) of a body (14) with a treatment fluid (25), wherein the treatment fluid (25) is sprayed onto the surface (15) by means of a fluid supply device (21) while the body (14) is rotated about an axis of rotation (16), wherein the fluid supply device (21) has a plurality of outlet openings (22) for the treatment fluid (25), wherein the plurality of outlet openings (22) comprises at least three outlet openings (22) whose azimuth positions (41, 42) relative to the axis of rotation (16) differ from each other in pairs.

Images