A fiber-level waveguide chip multi-output coupling device

Abstract

The present invention discloses a fiber-level waveguide chip multi-output coupling device, comprising: an optical platform; a chip fixing device installed on the optical platform for fixing the waveguide chip and adjusting the position of the waveguide chip; a coupling system arranged in a finished shape with the chip fixing device as the center and installed on the optical platform for realizing the coupling double output detection of cone head fiber-waveguide chip-cone head fiber; a vacuum adsorption system for adsorbing the waveguide chip on the one hand and the cone head fiber on the other hand. The present invention has more adjustable degrees of freedom and less coupling loss.

Description

Technical Field

[0001] The invention relates to the technical field of integrated optical waveguide chip coupling. Background Art

[0002] Fiber waveguide coupling technology is mainly used to solve the problem of interconnecting optical signals on integrated optoelectronic chips with external optical signals, and is also a key technology for optoelectronic chip packaging. One of the important applications is the optical interaction between dual-channel optical devices and the outside world. Since the dual ports need to be aligned and coupled at the same time, the coupling errors of the ports will accumulate, which is more difficult than single-port coupling. Traditional dual-channel optical device coupling mostly uses optical fiber arrays for coupling. Two optical fibers are packaged at a fixed spacing, with fewer adjustable degrees of freedom and larger coupling losses. Summary of the invention

[0003] The object of the present invention is to provide a fiber-level waveguide chip multi-output coupling device with more adjustable degrees of freedom and less coupling loss.

[0004] The technical solution to achieve the above purpose is:

[0005] A fiber-level waveguide chip multi-output coupling device, comprising:

[0006] Optical platform;

[0007] A chip fixing device installed on the optical platform and used for fixing the waveguide chip and adjusting the position of the waveguide chip;

[0008] A coupling system is installed on the optical platform in a finished product shape with the chip fixing device as the center, and is used to realize the coupling double-output detection of the cone head optical fiber-waveguide chip-cone head optical fiber; and

[0009] On one hand, it is used to adsorb the waveguide chip, and on the other hand, it is used to adsorb the vacuum adsorption system of the cone-shaped optical fiber.

[0010] Preferably, it also includes: an imaging system installed on the optical platform for real-time observation of the position matching status of the cone-shaped optical fiber and the waveguide chip in the horizontal and vertical directions during the coupling process.

[0011] Preferably, the chip fixing device comprises:

[0012] A chip seat for placing a waveguide chip, with a plurality of air holes on the surface and the interior of which is connected to the vacuum adsorption system;

[0013] A fixing seat for fixing the chip seat;

[0014] An angle indexing plate for fixing the fixing seat and adjusting the angle of the fixing seat;

[0015] A first three-axis adjustment platform for fixing the angle indexing plate and adjusting the position of the angle indexing plate in three directions in a spatial rectangular coordinate system; and

[0016] The first base is used to fix the first three-axis adjustment platform and is fixedly mounted on the optical platform.

[0017] Preferably, the coupling system comprises: a right coupling device located on the right side of the chip fixing device, and two left coupling devices located on the left side of the chip fixing device and arranged symmetrically front to back;

[0018] The right coupling device comprises:

[0019] An optical fiber connection shaft fixedly connected to the cone optical fiber;

[0020] A connection seat for fixing the optical fiber connection shaft;

[0021] A connecting platform for fixedly connecting the connecting seat;

[0022] A second three-axis adjustment platform for fixing the connection platform and adjusting the position of the connection platform in three directions in a spatial rectangular coordinate system; and

[0023] A second base used for fixing the second three-axis adjustment platform and installed on the optical platform;

[0024] The left coupling device comprises:

[0025] a third base mounted on the optical platform;

[0026] A six-axis adjustment platform fixed on the third base for adjusting twelve degrees of freedom; and

[0027] A cone-shaped optical fiber adsorption seat installed on the six-axis adjustment platform, with twelve degrees of freedom adjusted by the six-axis adjustment platform and internally connected to the vacuum adsorption system;

[0028] The two cone-shaped optical fiber adsorption seats are opposite to each other and each adsorbs a cone-shaped optical fiber, and the two cone-shaped optical fibers are parallel;

[0029] An optical fiber support seat for supporting two cone-head optical fibers adsorbed by the two cone-head optical fiber adsorption seats is fixed on the optical platform on the left side of the two cone-head optical fiber adsorption seats.

[0030] Preferably, the cone-shaped optical fiber adsorption seat is provided with a threaded hole for connecting to the vacuum adsorption system, the front end surface of the cone-shaped optical fiber adsorption seat is provided with two groups of air holes connected to the threaded hole, and the end of the cone-shaped optical fiber adsorption seat between the two groups of air holes is provided with a groove;

[0031] The edge of the end of the cone-shaped optical fiber adsorption seat is provided with two curved parts with different radii.

[0032] Preferably, the vacuum adsorption system comprises: a vacuum pump, two one-to-two conversion joints, and three external threaded straight-through joints respectively threadedly connected to the chip seat and two cone-head optical fiber adsorption seats;

[0033] The input end of the first one-to-two conversion joint is connected to the vacuum pump, one output end is connected to the external threaded straight joint of the chip seat through a transparent soft air tube connection thread, and the other output end is connected to the external threaded straight joints of the two cone-head optical fiber adsorption seats through the second one-to-two conversion joint and a transparent soft air tube connection thread.

[0034] Preferably, the imaging system comprises: a first imaging device and a second imaging device, wherein:

[0035] The first imaging device comprises:

[0036] A gantry fixed on the optical platform;

[0037] A linear moving platform fixed on the top of the gantry;

[0038] An X / Y axis adjustment table horizontally slidably connected to the linear moving table and used for adjusting the position in the X axis direction and the Y axis direction in the spatial rectangular coordinate system;

[0039] A first L-shaped bracket connected to the X / Y axis adjustment table, the X / Y axis adjustment table being used to adjust the position in the X-axis direction and the Y-axis direction;

[0040] A Z-axis adjustment table fixedly connected to the first L-shaped bracket and used for adjusting the position in the Z-axis direction in the spatial rectangular coordinate system;

[0041] A second L-shaped bracket connected to the Z-axis adjustment table, the Z-axis position of which is adjusted by the Z-axis adjustment table;

[0042] A first lens sleeve vertically fixed on the second L-shaped bracket and located above the waveguide chip;

[0043] a CCD (charge coupled device) camera mounted on top of the first lens tube; and

[0044] A display connected to the CCD camera via a cable;

[0045] The second imaging device comprises:

[0046] A three-dimensional displacement stage fixed on the optical platform directly behind the chip fixing device, used for adjusting the position in three-axis directions in a spatial rectangular coordinate system;

[0047] A sleeve base mounted on the three-dimensional displacement platform, the three-axis position of which is adjusted by the three-dimensional displacement platform;

[0048] A second lens sleeve directly facing the rear of the chip fixing device;

[0049] A holder for fixing the second lens sleeve on the sleeve base; and

[0050] A CCD camera with a screen is mounted on the second lens tube.

[0051] Preferably, the gantry comprises:

[0052] a pair of base plates fixed to the optical platform;

[0053] Two upright posts vertically fixed to the base plate; and

[0054] A crossbar connecting the two uprights.

[0055] The beneficial effects of the present invention are as follows: the present invention adopts a coupling system and a chip fixing device arranged in a "pin" shape, with a reasonable layout and a compact structure. It can not only realize coupling tests such as detecting the two output ends of a 1×2 multi-mode interference optical coupler (MMI), but also realize fiber-level simultaneous input and output tests, greatly improving the scope of application of the device. In addition, the vacuum adsorption system can not only ensure the flatness of the platform, but also facilitate chip protection. The imaging system is used to observe the position matching of the cone head optical fiber and the waveguide chip in the horizontal and vertical directions in real time during coupling, thereby realizing a more efficient coupling test. And through each displacement adjustment device, there are more adjustable degrees of freedom and less coupling loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 is a three-dimensional diagram of the fiber-level waveguide chip multi-output coupling device of the present invention;

[0057] Figure 2 is a top view of the chip fixing device of the present invention;

[0058] Figure 3 is a schematic diagram of a chip holder in the present invention;

[0059] Figure 4 is a structural diagram of the right coupling device in the present invention;

[0060] Figure 5 is a structural diagram of the left coupling device in the present invention;

[0061] Figure 6 It is a structural diagram of the cone head optical fiber adsorption seat in the present invention;

[0062] Figure 7 yes Figure 6Cross-sectional view along the BB direction;

[0063] Figure 8 It is a schematic diagram of the arrangement of the coupling system in the present invention;

[0064] Fig. 9 It is a schematic diagram of the waveguide chip coupling in the present invention. DETAILED DESCRIPTION

[0065] The present invention will be further described below in conjunction with the accompanying drawings.

[0066] See also Figure 1-9 The fiber-level waveguide chip multi-output coupling device of the present invention includes: an optical platform 101, a chip fixing device 200, a coupling system 300, a vacuum adsorption system and an imaging system.

[0067] The chip fixture 200 is installed on the optical platform 101, and is used to fix the waveguide chip and adjust the position of the waveguide chip. The horizontal and vertical flatness of the chip is ensured to facilitate coupling. The coupling system 300 is arranged in a finished product shape on the optical platform 101 with the chip fixture 200 as the center, and is used to realize the coupled dual-output detection of the cone head optical fiber-waveguide chip-cone head optical fiber. The coupling system includes: a right-side coupling device located on the right side of the chip fixture 200, and two left-side coupling devices located on the left side of the chip fixture 200 and arranged symmetrically front and back. That is: the right side is used for light source input by the right-side coupling device, and the left side is composed of two left-side coupling devices arranged side by side for dual output, thereby realizing the coupled dual-output detection of the cone head optical fiber-waveguide chip-cone head optical fiber. At the same time, the two left-side coupling devices can also be used as the same-input and same-output detection to realize the coupling detection of the optical fiber level.

[0068] The vacuum adsorption system is used to adsorb the waveguide chip to ensure its vertical flatness on the one hand, and to adsorb the tapered optical fiber on the other hand to achieve fiber-level coupling.

[0069] The imaging system is installed on the optical platform 101 and is used to observe the position matching status of the cone optical fiber and the waveguide chip in the horizontal and vertical directions in real time during the coupling process, thereby achieving a more efficient coupling test.

[0070] The chip fixing device 200 includes: a chip seat 205 , a fixing seat 204 , an angle indexing plate 203 , a first three-axis adjustment platform 202 , and a first base 201 .

[0071] The chip seat 205 is used to place the waveguide chip, and a plurality of air holes are provided on the surface, and the interior is connected to the vacuum adsorption system. The fixing seat 204 is used to fix the chip seat 205. The angle indexing plate 203 is used to fix the fixing seat 204 and adjust the angle of the fixing seat 204. The first three-axis adjustment platform 202 is used to fix the angle indexing plate 203 and adjust the position of the angle indexing plate 203 in three directions (X-axis, Y-axis and Z-axis) in the spatial rectangular coordinate system. The first base 201 is used to fix the first three-axis adjustment platform 202 and is fixedly mounted on the optical platform 101. The tail of the chip seat 205 is provided with threads connected to the external thread straight-through connector 404. The chip seat 205 can realize 8 degrees of freedom adjustment, which are controlled by the first three-axis adjustment platform 202 and the angle indexing plate 203 respectively. In addition, the first base 201 and the optical platform 101 are fixed with long waist-shaped holes, which greatly improves the rapid alignment and coupling efficiency of the waveguide chip, while also increasing the size limit of the waveguide chip; the adjustment range of the first three-axis adjustment platform 202 on the X, Y, and Z axes is ±5mm. The chip seat 205 is divided into straight-through type and T-type according to the size of the waveguide chip, and has a double row of 12 air holes with a diameter of 1mm-3mm on the surface, which are connected to the threaded holes; the entire device is easy to disassemble and can quickly switch different waveguide chips; the adjustment range of the angle indexing plate 203 is ±10°.

[0072] The right coupling device includes: an optical fiber connecting shaft 305 fixedly connected to the tapered optical fiber; a connecting seat 304 for fixing the optical fiber connecting shaft 305; a connecting platform 303 fixedly connected to the connecting seat 304; a second three-axis adjustment platform 302 for fixing the connecting platform 303 and adjusting the position of the connecting platform 303 in three directions in a spatial rectangular coordinate system; and a second base 301 for fixing the second three-axis adjustment platform 302 and installed on the optical platform 101.

[0073] In order to prevent the influence of coupling jitter, the height of the connection seat 304 is 4-8mm higher than the angle indexing plate 203. After the connection seat 304 and the optical fiber connection shaft 305 are locked, they are kept 5-10mm away from the waveguide chip. The bottom of the connection seat 304 is provided with a "T"-shaped groove, which is connected to the middle of the connection platform 303 with an inverted "T"-shaped groove, and is locked and fixed through the two screw holes above; the optical fiber connection shaft 305 is connected to the cone optical fiber and fixed through the connection seat 304; the adjustment range of the second three-axis adjustment platform 302 on the X, Y, and Z axes is ±5mm.

[0074] The left coupling device includes: a third base 306 installed on the optical platform 101; a six-axis adjustment platform 307 fixed on the third base 306 for adjusting twelve degrees of freedom; a cone-head optical fiber adsorption seat 308 installed on the six-axis adjustment platform 307, which adjusts twelve degrees of freedom by the six-axis adjustment platform 307 and is internally connected to the vacuum adsorption system.

[0075] The two cone-head optical fiber adsorption seats 308 are opposite to each other and each adsorbs a cone-head optical fiber, and the two cone-head optical fibers are parallel; the optical platform 101 on the left side of the two cone-head optical fiber adsorption seats 308 is fixed with an optical fiber support seat 311 for supporting the two cone-head optical fibers adsorbed by the two cone-head optical fiber adsorption seats 308. The optical fiber support seat 311 bears most of the weight of the cone-head optical fiber, which facilitates the cone-head optical fiber adsorption seat 308 to stably adsorb the cone-head optical fiber through vacuum. The six-axis adjustment platform 307 can not only adjust the six degrees of freedom of X, Y, and Z, but also adjust the four degrees of freedom of rotation and flipping to ensure that the two cone-head optical fiber adsorption seats 308 maintain absolute verticality with the waveguide chip; the adjustment range of the six-axis adjustment platform 307 is ±10mm.

[0076] The cone-shaped optical fiber adsorption seat 308 is provided with a threaded hole 3081 for connecting to the vacuum adsorption system, and the front surface of the cone-shaped optical fiber adsorption seat 308 is provided with two groups of air holes 3082 connected to the threaded hole 3081, and the front diameter of the air holes matches the optical fiber cladding. A groove 3083 is provided at the end of the cone-shaped optical fiber adsorption seat 308 between the two groups of air holes 3082, which is used to adjust the position of the optical fiber; two curved parts 3084 with different radii are provided at the edge of the end of the cone-shaped optical fiber adsorption seat 308, which can place the optical fiber protective layer and cladding, and reduce the bending loss of the cone-shaped optical fiber. A groove for the optical fiber cladding is provided on the end wall of the cone-shaped optical fiber adsorption seat 308 to ensure that the optical fiber is tangent to the groove; the distance L from the groove to the end face is 13-16mm.

[0077] The two left-side coupling devices can achieve a minimum coupling spacing of 127um.

[0078] The vacuum adsorption system includes: a vacuum pump 401, two one-to-two conversion joints 402, and three external threaded straight-through joints 404 which are respectively threadedly connected to the chip seat 205 and the two cone-head optical fiber adsorption seats 308.

[0079] The input end of the first one-to-two conversion joint 402 is connected to the vacuum pump 401, and one output end is connected to the external thread straight joint 404 through a transparent soft air tube 403, and the external thread straight joint 404 is threadedly connected to the chip seat 205. The other output end is connected to two external thread straight joints 404 through a second one-to-two conversion joint 402 and a transparent soft air tube 403, and the two external thread straight joints 404 are threadedly connected to two cone-head optical fiber adsorption seats 308.

[0080] The imaging system comprises: a first imaging device and a second imaging device, wherein the first imaging device comprises: a gantry fixed on the optical platform 101; a linear moving table 504 fixed on the top of the gantry; an X / Y axis adjustment table 505 horizontally slidably connected to the linear moving table 504 and used to adjust the position in the X-axis direction and the Y-axis direction in a spatial rectangular coordinate system; a first L-shaped bracket 506 connected to the X / Y axis adjustment table 505 and used to adjust the position in the X-axis direction and the Y-axis direction by the X / Y axis adjustment table 505; a Z axis adjustment table 507 fixedly connected to the first L-shaped bracket 506 and used to adjust the position in the Z-axis direction in the spatial rectangular coordinate system; a second L-shaped bracket 508 connected to the Z axis adjustment table 507 and used to adjust the position in the Z-axis direction by the Z axis adjustment table 507; a first lens sleeve 509 vertically fixed on the second L-shaped bracket 508 and located above the waveguide chip; a CCD camera 510 installed on the top of the first lens sleeve 509; and a display 511 connected to the CCD camera 510 through a cable. The second imaging device includes: a three-dimensional displacement stage 512 fixed on the optical platform 101 directly behind the chip fixing device 200, used to adjust the position in the three-axis direction in the spatial rectangular coordinate system; a sleeve base 513 installed on the three-dimensional displacement stage 512, and the position in the three-axis direction is adjusted by the three-dimensional displacement stage 512; a second lens sleeve 515 directly facing the chip fixing device 200; a holder 514 for fixing the second lens sleeve 515 on the sleeve base 513; and a CCD camera with a screen 516 installed on the second lens sleeve 515. The gantry includes: a pair of bottom plates 501 fixed on the optical platform 101; two columns 502 vertically fixed on the bottom plate 501; and a crossbar 503 connecting the two columns 502.

[0081] The first imaging device is located vertically above the waveguide chip, and the coupling between the cone-shaped optical fiber and the waveguide chip in four degrees of freedom of the X and Y axes is observed in real time through the display 511; the second imaging device is located behind the chip fixing device, and is used to observe the coupling between the cone-shaped optical fiber and the waveguide chip in the Z axis.

[0082] The above embodiments are only used to illustrate the present invention, rather than to limit the present invention. Those skilled in the relevant technical field may make various changes or modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions should also belong to the scope of the present invention and should be defined by the claims.

Claims

1. A fiber-level waveguide chip multi-output coupling device, characterized in that: include: Optical platform (101); A chip fixing device (200) installed on the optical platform (101) and used for fixing the waveguide chip and adjusting the position of the waveguide chip; A coupling system (300) is arranged in a finished product shape and installed on the optical platform (101) with the chip fixing device (200) as the center, and is used to realize the coupling double output detection of the cone head optical fiber-waveguide chip-cone head optical fiber; and On one hand, it is used to absorb the waveguide chip, and on the other hand, it is used to absorb the vacuum absorption system of the cone-shaped optical fiber; The coupling system comprises: a right coupling device located on the right side of the chip fixing device (200), and two left coupling devices located on the left side of the chip fixing device (200) and arranged symmetrically front to back; The right coupling device comprises: An optical fiber connecting shaft (305) fixedly connected to the cone optical fiber; A connection seat (304) for fixing the optical fiber connection shaft (305); A connecting platform (303) for fixedly connecting the connecting seat (304); a second three-axis adjustment platform (302) for fixing the connection platform (303) and adjusting the position of the connection platform (303) in three directions in a spatial rectangular coordinate system; and A second base (301) for fixing the second three-axis adjustment platform (302) and mounted on the optical platform (101); The left coupling device comprises: A third base (306) mounted on the optical platform (101); A six-axis adjustment platform (307) fixed on the third base (306) for adjusting twelve degrees of freedom; and A cone-shaped optical fiber adsorption seat (308) mounted on the six-axis adjustment platform (307), with twelve degrees of freedom adjusted by the six-axis adjustment platform (307), and internally connected to the vacuum adsorption system; The two cone-shaped optical fiber adsorption seats (308) are opposite to each other and each adsorbs a cone-shaped optical fiber, and the two cone-shaped optical fibers are parallel; An optical fiber support seat (311) for supporting two cone-head optical fibers adsorbed by the two cone-head optical fiber adsorption seats (308) is fixed on the optical platform (101) on the left side of the two cone-head optical fiber adsorption seats (308).

2. The fiber-level waveguide chip multi-output coupling device according to claim 1, characterized in that: Also includes: An imaging system is installed on the optical platform (101) and is used to observe in real time the position matching status of the cone optical fiber and the waveguide chip in the horizontal and vertical directions during the coupling process.

3. The fiber-level waveguide chip multi-output coupling device according to claim 1, characterized in that: The chip fixing device (200) comprises: A chip seat (205) for placing a waveguide chip, with a plurality of air holes on the surface and the interior of which is connected to the vacuum adsorption system; A fixing seat (204) for fixing the chip seat (205); An angle indexing plate (203) for fixing the fixing seat (204) and adjusting the angle of the fixing seat (204); A first three-axis adjustment platform (202) for fixing the angle indexing disk (203) and adjusting the position of the angle indexing disk (203) in three directions in a spatial rectangular coordinate system; and The first base (201) is used for fixing the first three-axis adjustment platform (202) and is fixedly mounted on the optical platform (101).

4. The fiber-level waveguide chip multi-output coupling device according to claim 1, characterized in that: The cone-shaped optical fiber adsorption seat (308) is provided with a threaded hole (3081) for connecting to the vacuum adsorption system, the front end surface of the cone-shaped optical fiber adsorption seat (308) is provided with two groups of air holes (3082) connected to the threaded hole (3081), and the end of the cone-shaped optical fiber adsorption seat (308) between the two groups of air holes (3082) is provided with a groove (3083); The end edge of the cone-shaped optical fiber adsorption seat (308) is provided with two curved portions (3084) with different radii.

5. The fiber-level waveguide chip multi-output coupling device according to claim 3, characterized in that: The vacuum adsorption system comprises: a vacuum pump (401), two one-to-two conversion joints (402), and three external thread straight-through joints (404) respectively threadedly connected to the chip seat (205) and two cone-head optical fiber adsorption seats (308); The input end of the first one-to-two conversion joint (402) is connected to the vacuum pump (401), and one output end is connected to the external threaded straight joint (404) of the chip seat (205) through a transparent soft air tube (403), and the other output end is connected to the external threaded straight joint (404) of the two cone-head optical fiber adsorption seats (308) through a second one-to-two conversion joint (402) and a transparent soft air tube (403).

6. The fiber-level waveguide chip multi-output coupling device according to claim 2, characterized in that: The imaging system comprises: a first imaging device and a second imaging device, wherein: The first imaging device comprises: A gantry fixed on the optical platform (101); A linear moving platform (504) fixed on the top of the gantry; An X / Y axis adjustment platform (505) horizontally slidably connected to the linear moving platform (504) and used for adjusting the position in the X axis direction and the Y axis direction in the spatial rectangular coordinate system; A first L-shaped bracket (506) connected to the X / Y axis adjustment platform (505) for adjusting the position in the X-axis direction and the Y-axis direction by the X / Y axis adjustment platform (505); A Z-axis adjustment platform (507) fixedly connected to the first L-shaped bracket (506) and used for adjusting the position in the Z-axis direction in the spatial rectangular coordinate system; A second L-shaped bracket (508) connected to the Z-axis adjustment table (507) and used to adjust the position in the Z-axis direction by the Z-axis adjustment table (507); A first lens sleeve (509) vertically fixed on the second L-shaped bracket (508) and located above the waveguide chip; a CCD camera (510) mounted on top of the first lens tube (509); and a display (511) connected to the CCD camera (510) via a cable; The second imaging device comprises: A three-dimensional displacement stage (512) fixed on the optical platform (101) directly behind the chip fixing device (200) and used for adjusting the position in three-axis directions in a spatial rectangular coordinate system; A sleeve base (513) mounted on the three-dimensional displacement platform (512) and having its position in three-axis directions adjusted by the three-dimensional displacement platform (512); a second lens sleeve (515) facing directly behind the chip fixing device (200); A holder (514) for fixing the second lens sleeve (515) on the sleeve base (513); and A CCD camera (516) with a screen is mounted on the second lens tube (515).

7. The fiber-level waveguide chip multi-output coupling device according to claim 6, characterized in that: The gantry comprises: A pair of base plates (501) fixed on the optical platform (101); Two upright posts (502) vertically fixed on the base plate (501); and A crossbar (503) connecting the two upright posts (502).

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