Displacement Measuring Device and Displacement Measuring Method of Eddy Current Sensor

Abstract

The present invention discloses a displacement measurement device and a displacement measurement method for an eddy current sensor. The displacement measurement device includes: an eddy current sensor, a preamplifier, which is provided with a variable resistor and a resonant capacitor connected in series in sequence, and the resonant capacitor is adapted to be connected in parallel with the probe inductor; a voltage acquisition module, which is arranged in the preamplifier; a controller, which is provided with a control end and a first acquisition end, the control end is connected to the variable resistor, and the first acquisition end is connected to the voltage acquisition module; when the peak-to-peak voltage of the resonant voltage is not within a preset range, the controller adjusts the resistance value of the variable resistor to make the peak-to-peak voltage of the resonant voltage within the preset range. This ensures the consistency of the output signal of the eddy current sensor, ensures the accuracy of the position detection of the magnetic levitation system, thereby improves the stability of the magnetic levitation bearing control system, and reduces the output difference caused by the matching of the sensor probe with different preamplifiers.

Description

Technical Field

[0001] The present invention relates to the technical field of eddy current sensors, and particularly to a displacement measurement device and a displacement measurement method for an eddy current sensor. Background Art

[0002] Currently, before an eddy current sensor is applied to rotating mechanical equipment, the state of the eddy current sensor is calibrated in a production workshop, and only the eddy current sensor that passes the calibration can be applied to rotating mechanical equipment.

[0003] Generally, the probe and its preamplifier of an eddy current sensor are usually produced separately, and there is corresponding calibration with a matching preamplifier during the production process of the sensor probe. However, during the actual application of rotating mechanical equipment, as Figure 1 shown, since the preamplifier is mass-produced, and after the sensor probe is matched with the preamplifier, when there are inconsistent situations such as precision errors of components in the preamplifier, parasitic capacitance and inductance of the plug connector, and differences in cable impedance, it will cause the signal finally output by the sensor to be inconsistent with the signal during production calibration, resulting in poor consistency of the output signal of the eddy current sensor and poor detection accuracy. Summary of the Invention

[0004] The technical problem to be solved by the embodiments of the present invention is the problem of poor consistency of the output signal of the eddy current sensor and poor detection accuracy in the prior art, and thus a displacement measurement device and a displacement measurement method for an eddy current sensor are provided.

[0005] According to a first aspect, an embodiment of the present invention provides a displacement measurement device for an eddy current sensor, where the displacement measurement device includes: an eddy current sensor provided with a probe inductance; a preamplifier provided with a variable resistor and a resonant capacitor connected in series in sequence, the other end of the variable resistor is connected to an excitation source, and the other end of the resonant capacitor is grounded; the resonant capacitor is adapted to be connected in parallel with the probe inductance; a voltage acquisition module provided in the preamplifier; the voltage acquisition module is adapted to acquire the resonant voltage of the probe inductance; a controller provided with a control end and a first acquisition end, the control end is connected to the variable resistor, and the first acquisition end is connected to the voltage acquisition module; when the peak-to-peak voltage of the resonant voltage is not within a preset range, the resistance value of the variable resistor is adjusted through the controller to make the peak-to-peak voltage of the resonant voltage within the preset range.

[0006] Optionally, the displacement measurement device further includes: a signal acquisition module provided in the preamplifier; the signal acquisition module is adapted to acquire the detection signal output by the probe inductance.

[0007] Optionally, the controller is further provided with a second acquisition end, and the second acquisition end is connected to the signal acquisition module.

[0008] Optionally, the displacement measurement device further includes: a host computer, which is communicatively connected to the controller.

[0009] Optionally, the resonant capacitor is connected in parallel with the probe inductor through a plug connector.

[0010] According to a second aspect of the embodiments of the present invention, a displacement measurement method for an eddy current sensor is provided. The displacement measurement method includes: when the probe inductor and the preamplifier are secondarily matched, obtaining the current peak-to-peak voltage of the resonant voltage of the probe inductor through a controller; determining whether the current peak-to-peak voltage is within a preset range; if not, adjusting the resistance value of the variable resistor through the controller so that the peak-to-peak voltage of the resonant voltage is within the preset range.

[0011] Optionally, adjusting the resistance value of the variable resistor includes: adjusting the resistance value of the variable resistor by using a sensor matching algorithm.

[0012] Optionally, adjusting the resistance value of the variable resistor by using a sensor matching algorithm includes: the controller adjusts the resistance value of the variable resistor according to the deviation value between the peak-to-peak voltage of the resonant voltage and the preset range, so that the peak-to-peak voltage of the resonant voltage is within the preset range.

[0013] Optionally, the maximum peak-to-peak voltage is calculated according to the resonant voltage collected by the voltage acquisition module, the deviation value is obtained by subtracting the maximum resonant peak-to-peak voltage from the preset range, and the resistance value of the variable resistor is adjusted based on the deviation value so that the peak-to-peak voltage of the resonant voltage is within the preset range.

[0014] Optionally, the displacement measurement method further includes: when the probe inductor and the preamplifier are initially matched, obtaining the initial peak-to-peak voltage of the resonant voltage of the probe inductor through a controller.

[0015] Optionally, the preset range is a numerical range formed by the initial peak-to-peak voltage ±2%.

[0016] According to a third aspect of the embodiments of the present invention, a displacement measurement device for an eddy current sensor is provided. The displacement measurement device includes: a controller, which is configured to obtain the current peak-to-peak voltage of the resonant voltage of the probe inductor when the probe inductor and the preamplifier are secondarily matched; a processing module, which is configured to determine whether the current peak-to-peak voltage is within a preset range; an execution module, which is configured to, if not, adjust the resistance value of the variable resistor through the controller so that the peak-to-peak voltage of the resonant voltage is within the preset range.

[0017] According to a fourth aspect, an embodiment of the present invention provides an electronic device, which includes a memory and a processor. The memory and the processor are communicatively connected to each other. The memory stores computer instructions, and the processor executes the computer instructions to perform the displacement measurement method described in any of the above embodiments.

[0018] According to a fifth aspect, an embodiment of the present invention provides a computer-readable storage medium, which stores computer instructions for causing a computer to execute the displacement measurement method described in any of the above embodiments.

[0019] The embodiments of the present invention have the following beneficial effects:

[0020] 1. An embodiment of the present invention provides a displacement measurement device for an eddy current sensor. The displacement measurement device includes: an eddy current sensor provided with a probe inductance; a preamplifier provided with a variable resistor and a resonant capacitor connected in series in sequence. The other end of the variable resistor is connected to an excitation source, and the other end of the resonant capacitor is grounded; the resonant capacitor is adapted to be connected in parallel with the probe inductance; a voltage acquisition module provided in the preamplifier; the voltage acquisition module is adapted to acquire the resonant voltage of the probe inductance; a controller provided with a control end and a first acquisition end. The control end is connected to the variable resistor, and the first acquisition end is connected to the voltage acquisition module; when the peak-to-peak voltage of the resonant voltage is not within a preset range, the resistance value of the variable resistor is adjusted by the controller to make the peak-to-peak voltage of the resonant voltage within the preset range.

[0021] With such a setting, when the peak-to-peak voltage of the resonant voltage is not within the preset range, the resistance value of the variable resistor can be adjusted by the controller, so that the peak-to-peak voltage of the resonant voltage of the probe inductance during resonance can be adjusted, and the peak-to-peak voltage is within the preset range, ensuring the consistency of the output signal of the eddy current sensor, ensuring the accuracy of the position detection of the magnetic levitation system, and further improving the stability and reliability of the magnetic levitation bearing control system. The output difference caused by the matching of the sensor probe and different preamplifiers is greatly reduced. Description of the Drawings

[0022] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0023] Figure 1 It is a schematic diagram of the displacement measurement of a traditional eddy current sensor;

[0024] Figure 2 is a schematic diagram of the displacement measurement of the eddy current sensor in the embodiment of the present invention;

[0025] Figure 3 is the working flow chart of the preamplifier in the embodiment of the present invention;

[0026] Figure 4 is the waveform diagram of the peak-to-peak voltage of the resonance peak in the embodiment of the present invention. Detailed implementation manners

[0027] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0028] Embodiment 1

[0029] As Figures 2 to 4 shown, the present invention provides a displacement measurement device for an eddy current sensor. The displacement measurement device includes an eddy current sensor, a preamplifier, and a controller.

[0030] Specifically, in the embodiment of the present invention, the eddy current sensor is provided with a probe. The probe of the eddy current sensor can be equivalent to an inductor, and thus can be used to detect the object to be measured. The preamplifier is provided with a variable resistor and a resonant capacitor connected in series in sequence. The other end of the variable resistor is connected to the excitation source, the other end of the resonant capacitor is grounded, and the resonant capacitor is adapted to be connected in parallel with the probe inductor, thereby forming an LC parallel resonant circuit. Optionally, the resonant capacitor can be connected in parallel with the probe inductor through a plug connector. The variable resistor can be a programmable coupling voltage dividing resistor.

[0031] Moreover, the preamplifier newly adds a function of collecting the peak-to-peak voltage during LC parallel resonance. Specifically, a voltage acquisition module is arranged in the preamplifier, and the voltage acquisition module is adapted to collect the resonant voltage of the probe inductor.

[0032] Furthermore, the controller is provided with a control end and a first acquisition end. The control end is connected to the variable resistor, and the first acquisition end is connected to the voltage acquisition module. In the embodiment of the present invention, the voltage acquisition module transmits the collected peak-to-peak voltage value to the controller, and the controller automatically adjusts the variable resistor through the control end.

[0033] With such a setting, during the actual working process, when the peak-to-peak voltage of the resonant voltage is not within the preset range, the controller can adjust the resistance value of the variable resistor, thereby adjusting the peak-to-peak voltage of the resonant voltage of the probe inductor at resonance, making the peak-to-peak voltage within the preset range, ensuring the consistency of the output signal of the eddy current sensor, ensuring the accuracy of the position detection of the magnetic levitation system, and further improving the stability and reliability of the magnetic levitation bearing control system. It greatly reduces the output difference caused by the matching of the sensor probe with different preamplifiers.

[0034] Furthermore, in an alternative embodiment of the present invention, the displacement measuring device further includes a signal acquisition module. The signal acquisition module is disposed in the preamplifier, and the signal acquisition module is adapted to acquire the detection signal output by the probe inductor. And, the controller is further provided with a second acquisition terminal, and the second acquisition terminal is connected to the signal acquisition module. Among them, the signal acquisition module also has a signal processing function, and the acquired signal is processed and then sent to the controller.

[0035] In the embodiment of the present invention, the controller can be the controller in the magnetic levitation bearing system, and of course, it can also be applicable to other application scenarios of eddy current sensors. This embodiment is only an example, but not limited thereto. Those skilled in the art can make changes according to the actual situation as long as the same technical effects can be achieved.

[0036] Furthermore, in an alternative embodiment of the present invention, the displacement measuring device further includes a host computer, and the host computer is communicatively connected to the controller. A display is also provided in the host computer.

[0037] Embodiment 2

[0038] According to a second aspect, an embodiment of the present invention provides a displacement measuring method for an eddy current sensor. The displacement measuring method specifically includes the following steps:

[0039] S1. When the probe inductor and the preamplifier are secondarily matched, obtain the current peak-to-peak voltage of the resonant voltage of the probe inductor through the controller;

[0040] S2. Determine whether the current peak-to-peak voltage is within the preset range;

[0041] S3. If not, adjust the resistance value of the variable resistor through the controller to make the peak-to-peak voltage of the resonant voltage within the preset range.

[0042] In an embodiment of the present invention, when the probe of the eddy current sensor is matched with the secondary installation of the preamplifier, the controller obtains the current peak-to-peak voltage of the resonant voltage of the probe inductance. If the consistency of the output signal of the eddy current sensor deteriorates, and the deterioration of the consistency of the output signal means that the current peak-to-peak voltage exceeds the preset range, then the controller can adjust the resistance value of the variable resistor to make the peak-to-peak voltage of the resonant voltage within the preset range. If the consistency of the output signal of the eddy current sensor remains stable, that is, the current peak-to-peak voltage is within the preset range, the controller can control the display of the upper computer to display that the eddy current sensor is in a qualified state and can be directly applied.

[0043] Of course, for the method of adjusting the resistance value of the variable resistor, it can be: using a sensor matching algorithm to adjust the resistance value of the variable resistor. This embodiment is only an example of the method of adjusting the resistance value of the variable resistor, but it is not limited. Those skilled in the art can make changes according to the actual situation as long as the same technical effect can be achieved.

[0044] With such a setting, in the actual working process, when the peak-to-peak voltage of the resonant voltage is not within the preset range, the controller can adjust the resistance value of the variable resistor, so as to adjust the peak-to-peak voltage of the resonant voltage of the probe inductance at resonance, make the peak-to-peak voltage within the preset range, ensure the consistency of the output signal of the eddy current sensor, ensure the accuracy of the position detection of the magnetic levitation system, and further improve the stability and reliability of the magnetic levitation bearing control system. Greatly reduce the output difference caused by the matching of the sensor probe with different preamplifiers.

[0045] Further, in an alternative embodiment of the present invention, the process of "using a sensor matching algorithm to adjust the resistance value of the variable resistor" in step S3 specifically includes the following steps:

[0046] The controller adjusts the resistance value of the variable resistor according to the deviation value between the peak-to-peak voltage of the resonant voltage and the preset range, so that the peak-to-peak voltage of the resonant voltage is within the preset range.

[0047] For the deviation value, it can be the difference between the maximum value in the preset range and the maximum value of the peak-to-peak voltage. Of course, other points can also be selected to define the deviation value. This embodiment is only an example, but it is not limited. Those skilled in the art can make changes according to the actual situation as long as the same technical effect can be achieved.

[0048] For example, the maximum peak-to-peak voltage is calculated based on the resonant voltage collected by the voltage acquisition module, and the deviation value is obtained by subtracting the maximum resonant peak-to-peak voltage from the preset range. If the deviation value is within 2% of the initial peak-to-peak voltage, there is no need to adjust the resistance value of the variable resistor. Otherwise, the controller adjusts the resistance value of the variable resistor based on the deviation value to make the peak-to-peak voltage of the resonant voltage within the deviation value range, that is, within the preset range.

[0049] Further, in an alternative embodiment of the present invention, the displacement measurement method further includes step S0:

[0050] S0. When the probe inductor and the preamplifier are initially matched, the controller obtains the initial peak-to-peak voltage of the resonant voltage of the probe inductor. The preset range can be the numerical range formed by the initial peak-to-peak voltage ± 2%.

[0051] When the sensor probe and the preamplifier are initially matched, the controller of the magnetic levitation bearing system calculates and determines the initial value of the resonant capacitor according to the parallel resonance formula, and assigns the initial value of the resonant capacitor to the variable resistor to form an LC parallel resonance circuit with the probe inductor. The controller of the magnetic levitation bearing system can obtain the peak-to-peak value of the LC parallel resonance through the voltage acquisition channel and store it as A.

[0052] When the sensor probe and the preamplifier are secondarily installed and matched, if the output consistency of the eddy current sensor deteriorates, and the output resonant peak-to-peak voltage waveform is as Figure 4 shown, then the controller of the magnetic levitation bearing system collects the peak-to-peak voltage of the LC parallel resonance, analyzes and processes the data, and uses the sensor matching algorithm to calculate and determine whether the resonant peak-to-peak voltage is within the preset range, that is, the numerical range between (A ± 2%).

[0053] Embodiment 3

[0054] According to a third aspect of the present invention, an embodiment provides a displacement measurement device for an eddy current sensor, the displacement measurement device includes:

[0055] A controller, configured to obtain the current peak-to-peak voltage of the resonant voltage of the probe inductor when the probe inductor and the preamplifier are secondarily matched; for the detailed content, please refer to the above embodiment part and will not be elaborated here;

[0056] A processing module, configured to determine whether the current peak-to-peak voltage is within the preset range; for the detailed content, please refer to the above embodiment part and will not be elaborated here;

[0057] An execution module, configured to, if not, adjust the resistance value of the variable resistor through the controller to make the peak-to-peak voltage of the resonant voltage within the preset range. For the detailed content, please refer to the above embodiment part and will not be elaborated here.

[0058] With such a setting, during the actual working process, when the peak-to-peak voltage of the resonant voltage is not within the preset range, the controller can adjust the resistance value of the variable resistor, thereby adjusting the peak-to-peak voltage of the resonant voltage of the probe inductor during resonance, making the peak-to-peak voltage within the preset range, ensuring the consistency of the output signal of the eddy current sensor, ensuring the accuracy of the position detection of the magnetic levitation system, and further improving the stability and reliability of the magnetic levitation bearing control system. It greatly reduces the output difference caused by the matching of the sensor probe with different preamplifiers.

[0059] Embodiment 4

[0060] According to a fourth aspect of the embodiments of the present invention, an electronic device is provided. The electronic device may include a processor and a memory, where the processor and the memory may be connected through a bus or other means. Taking the connection through the bus as an example.

[0061] The processor may be a central processing unit (CPU). The processor may also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. chips, or a combination of the above types of chips.

[0062] As a non-transitory computer-readable storage medium, the memory can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as the program instructions / modules corresponding to the displacement measurement method in the embodiments of the present invention. The processor executes various functional applications and data processing of the processor by running the non-transitory software programs, instructions, and modules stored in the memory, that is, implementing the displacement measurement method in the above method embodiments.

[0063] The memory may include a program storage area and a data storage area. Among them, the program storage area can store the operating system and application programs required for at least one function; the data storage area can store data created by the processor and the like. In addition, the memory may include high-speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, a flash memory device, or other non-transitory solid-state storage devices. In some embodiments, the memory may optionally include a memory remotely set relative to the processor, and these remote memories can be connected to the processor through a network. Examples of the above network include but are not limited to the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0064] The one or more modules are stored in the memory and, when executed by the processor, execute the displacement measurement method in any one of the above embodiments.

[0065] The specific details of the above electronic device can be understood by referring to the corresponding relevant descriptions and effects in any one of the above embodiments, and will not be elaborated here.

[0066] Embodiment 5

[0067] An embodiment of the present invention also provides a computer-readable storage medium storing computer instructions for causing the computer to execute any one of the displacement measurement methods.

[0068] Among them, the storage medium may be a magnetic disk, an optical disk, a read-only memory (ROM), a random access memory (RAM), a flash memory, a hard disk drive (HDD), or a solid-state drive (SSD), etc.; the storage medium may also include a combination of the above types of memories.

[0069] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A displacement measurement device for an eddy current sensor, characterized in that an eddy current sensor is provided with a probe inductance; a preamplifier is provided with a variable resistor and a resonant capacitor connected in series in sequence. The other end of the variable resistor is connected to an excitation source, and the other end of the resonant capacitor is grounded; the resonant capacitor is adapted to be connected in parallel with the probe inductance; a voltage acquisition module is arranged in the preamplifier; the voltage acquisition module is adapted to acquire the resonant voltage of the probe inductance; a controller is provided with a control end and a first acquisition end. The control end is connected to the variable resistor, and the first acquisition end is connected to the voltage acquisition module; when the peak-to-peak voltage of the resonant voltage is not within a preset range, the resistance value of the variable resistor is adjusted through the controller to make the peak-to-peak voltage of the resonant voltage within the preset range; the resistance value of the variable resistor is adjusted by using a sensor matching algorithm.

2. The displacement measuring device according to claim 1, characterized in that, The displacement measurement device further includes: a signal acquisition module is arranged in the preamplifier; the signal acquisition module is adapted to acquire a detection signal output by the probe inductance.

3. The displacement measurement device according to claim 2, characterized in that, The controller is further provided with a second acquisition end, and the second acquisition end is connected to the signal acquisition module.

4. The displacement measuring device according to claim 3, wherein, The displacement measurement device further includes: a host computer, which is communicatively connected to the controller.

5. The displacement measuring device according to any one of claims 1 to 4, characterized in that, The resonant capacitor is connected in parallel with the probe inductance through a plug connector.

6. A displacement measurement method for an eddy current sensor, characterized in that, Applied to the displacement measurement device according to any one of claims 1 to 5, the displacement measurement method includes: when the probe inductance and the preamplifier are secondarily matched, the controller obtains the current peak-to-peak voltage of the resonant voltage of the probe inductance; judging whether the current peak-to-peak voltage is within a preset range; if not, the resistance value of the variable resistor is adjusted through the controller to make the peak-to-peak voltage of the resonant voltage within the preset range; the resistance value of the variable resistor is adjusted by using a sensor matching algorithm and through the controller.

7. The displacement measurement method according to claim 6, wherein, The adjusting the resistance value of the variable resistor by using a sensor matching algorithm includes: the controller adjusts the resistance value of the variable resistor according to the deviation value between the peak-to-peak voltage of the resonant voltage and the preset range, so that the peak-to-peak voltage of the resonant voltage is within the preset range.

8. The displacement measurement method according to claim 7, wherein The maximum peak-to-peak voltage is calculated according to the resonant voltage collected by the voltage acquisition module, the difference between the maximum resonant peak-to-peak voltage and the preset range is obtained as the deviation value, and the resistance value of the variable resistor is adjusted based on the deviation value so that the peak-to-peak voltage of the resonant voltage is within the preset range.

9. The displacement measurement method according to any one of claims 6 to 8, characterized in that It further includes: when the probe inductance and the preamplifier are initially matched, the controller obtains the initial peak-to-peak voltage of the resonant voltage of the probe inductance.

10. The displacement measurement method according to claim 9, characterized in that, The preset range is a numerical range formed by the initial peak-to-peak voltage ±2%.

11. A displacement measuring device for an eddy current sensor, characterized in that, Applied to the displacement measurement device according to any one of claims 1 to 5, the displacement measurement device includes: a controller, configured to obtain the current peak-to-peak voltage of the resonant voltage of the probe inductance when the probe inductance and the preamplifier are secondarily matched; a processing module, configured to judge whether the current peak-to-peak voltage is within a preset range; An execution module, configured to, if not, adjust the resistance value of the variable resistor through the controller so that the peak-to-peak voltage of the resonant voltage is within a preset range; and adjust the resistance value of the variable resistor by using a sensor matching algorithm and through the controller.

12. An electronic device, characterized in that, Comprising: A memory and a processor, which are communicatively connected to each other. Computer instructions are stored in the memory, and the processor executes the computer instructions to execute the displacement measurement method according to any one of claims 6 to 10.

13. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions for causing the computer to execute the displacement measurement method according to any one of claims 6 to 10.

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