Damping device

Abstract

The invention relates to the technical field of damping devices, in particular to a damping device which comprises a supporting platform. The fixing plate is arranged on the supporting platform; the displacement assembly is movably arranged on the fixing plate in the first direction; the damping block is arranged on the displacement assembly, the damping block is provided with a first side and a second side, the first side and the second side are oppositely arranged in the first direction, and the first side and the second side are used for being connected with two corrugated pipes of a vacuum system respectively. According to the scheme, the damping block is arranged on the displacement assembly capable of moving in the first direction, so that the damping block can also move in the first direction along with the displacement assembly. When the pressure of the vacuum system is changed, the length of the corrugated pipe is changed, the damping block is pulled, the damping block moves along with the corrugated pipe, and the pulling of the corrugated pipe to the electron microscope is reduced. According to the scheme, infinitesimal displacement and vibration caused by vibration transmission of the electron microscope are remarkably reduced, and the stability and the measurement precision of the electron microscope are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of shock absorbing devices, and in particular to a shock absorbing device. Background Art

[0002] In traditional electron microscopes and scanning probe imaging applications, damping blocks are usually used to reduce vibration and are connected through longer metal bellows. Because the closer the molecular pump is to the electron microscope, the higher the actual vacuum efficiency, in order to optimize the performance of the vacuum system, the length of the vacuum bellows needs to be shortened as much as possible. The optimized bellows should be in a natural hanging state, and the electron microscope and the damping block are not subject to tensile stress in the axial direction of the bellows. However, since the relative positions of the electron microscope and the damping block are fixed, and changes in the vacuum system pressure will cause changes in the length of the bellows connecting the two, causing the bellows to be subjected to tensile stress on related components on the electron microscope. For example, when the vacuum degree of the vacuum system is increased, the contraction of the bellows will cause stress, so that the connection becomes a rigid connection, thereby increasing vibration transmission. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a shock absorbing device for solving the problem of poor shock absorbing effect of the shock absorbing block in the prior art.

[0004] To achieve the above-mentioned and other related purposes, the present invention provides a shock absorbing device, comprising:

[0005] Support platform;

[0006] A fixing plate, arranged on the supporting platform;

[0007] A displacement assembly, movably disposed on the fixing plate along a first direction;

[0008] The shock absorbing block is arranged on the displacement assembly, and the shock absorbing block has a first side and a second side arranged opposite to each other along a first direction, and the first side and the second side are used to be connected to two bellows of the vacuum system respectively.

[0009] Optionally, the displacement assembly includes a first support plate, first limit blocks are respectively arranged on the outer side walls of the first support plate, the first support plate has a first surface for supporting the shock-absorbing block, each of the limit blocks and the first surface form a limit area, and the shock-absorbing block is arranged in the limit area.

[0010] Optionally, the displacement assembly further comprises a second support plate, a rotation bearing is provided on the second support plate, and the first support plate is horizontally rotatably provided on the second support plate via the rotation bearing.

[0011] Optionally, the displacement assembly further includes a third support plate, the second support plate is movably disposed on the third support plate along a second direction, and the first direction and the second direction are perpendicular to each other.

[0012] Optionally, a first slide rail is disposed on the third support plate along the second direction, a first slider is disposed on the opposite side of the second support plate and the third support plate, and the first slider cooperates with the first slide rail.

[0013] Optionally, the first slide rails are configured as at least two rails arranged along a first direction, and the number of the first sliding blocks is the same as the first slide rails and are respectively configured in a one-to-one correspondence.

[0014] Optionally, two second limit blocks for limiting the first sliding block along a second direction are arranged on the first sliding rail, and the first sliding block is arranged between the two second limit blocks along the second direction.

[0015] Optionally, a second slide rail is arranged on the fixed plate along the first direction, the displacement assembly is movably arranged on the fixed plate along the first direction through the second slide rail, and a second slider is arranged on the side of the third support plate facing the fixed plate, and the second slider cooperates with the second slide rail.

[0016] Optionally, two third limit blocks for limiting the second sliding block along the first direction are arranged on the second sliding rail, and the second sliding block is arranged between the two third limit blocks along the first direction.

[0017] Optionally, an anti-wear layer and an anti-corrosion layer are provided on the first surface.

[0018] As described above, the shock absorbing device of the present invention has the following beneficial effects:

[0019] This solution sets the shock-absorbing block on a displacement component that can move along a first direction, so that the shock-absorbing block can also move along the first direction with the displacement component. When the pressure of the vacuum system changes, the length of the bellows will change and pull the shock-absorbing block. At this time, the shock-absorbing block moves with the bellows, reducing the pull of the bellows on the instrument and equipment. The tiny displacement and vibration of the electron microscope caused by vibration transmission are significantly reduced, and the stability and measurement accuracy of the electron microscope are effectively improved. In addition, the shock-absorbing block can flexibly adjust its position along the first direction to minimize the length of the bellows pipeline, thereby optimizing the vacuum effect. This solution not only improves the shock-absorbing effect but also extends the service life of the electron microscope by converting high-frequency vibrations into low-frequency vibrations. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of an application environment of a shock absorbing device according to an embodiment of the present invention;

[0021] Figure 2 It is a schematic diagram of the overall structure of an embodiment of the present invention;

[0022] Figure 3 A three-dimensional diagram of the fixed plate and the displacement assembly after installation according to an embodiment of the present invention;

[0023] Figure 4 It is a side view of the fixed plate and the displacement assembly after installation according to the embodiment of the present invention.

[0024] Part Number Description

[0025] 1- Vacuum instrument;

[0026] 2- shock absorbing device; 21- shock absorbing block; 22- supporting platform; 23- fixing plate; 231- second slide rail; 232- third limit block; 24- displacement assembly; 241- first support plate; 241a- first limit block; 242- second support plate; 242a- first slider; 243- third support plate; 243a- first slide rail; 243b- second slider; 244- rotating bearing;

[0027] 3-Dry pump; 4-Bellows. DETAILED DESCRIPTION

[0028] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0029] It should be noted that the diagram provided in the present embodiment only illustrates the basic concept of the present invention in a schematic manner, so the diagram only shows the components related to the present invention rather than drawing according to the number, shape and size of the components during actual implementation. The type, quantity and ratio of each component during actual implementation can be a random change, and the component layout type may also be more complicated. The structure, ratio, size, etc. illustrated in the drawings of the present specification are only used to match the content disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions that the present invention can implement, so they have no technical substantive significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effect that the present invention can produce and the purpose that can be achieved. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of narration, and are not used to limit the scope of the present invention. The change or adjustment of its relative relationship should also be regarded as the scope of the present invention without substantially changing the technical content.

[0030] See also Figures 1 to 4 This embodiment provides a shock absorbing device 2, which is mainly aimed at high-space imaging equipment and can be applied to instruments such as scanning electron microscopes and transmission electron microscopes. In the vacuum system, high-frequency vibrations are effectively reduced to low-frequency vibrations, thereby weakening or eliminating the vibration transmission from the vibration source to the vacuum instrument 1. The shock absorbing device 2 is arranged between the dry pump 3 and the vacuum instrument 1. The vacuum instrument 1 is a scanning electron microscope, and is respectively connected to the dry pump 3 and the vacuum instrument 1 through a bellows 4. In this embodiment, the first direction is the length direction of the bellows 4, and the second direction is the horizontal direction perpendicular to the length direction of the bellows 4. The length direction of the bellows 4 is also the extension direction of the bellows 4. The shock absorbing device 2 includes a support platform 22, a fixing plate 23, a displacement assembly 24 and a shock absorbing block 21. The support platform 22 can be fixed to the ground by fasteners such as bolts. The support platform 22 includes a support leg and a support surface arranged on the support leg. The support leg is an aluminum profile, and the support surface is an aluminum plate. The fixing plate 23 can be a stainless steel plate, which can be fixed on the top of the support platform 22 by fasteners such as bolts. The displacement assembly 24 is movably arranged on the top surface of the fixed plate 23 along the first direction, and the shock absorbing block 21 is fixedly arranged on the top of the displacement assembly 24, so that the shock absorbing block 21 can move along the first direction with the displacement assembly 24. The shock absorbing block 21 has a first side and a second side arranged opposite to each other along the first direction, and the first side and the second side are respectively connected to the first ends of the two bellows 4 of the vacuum system, and the second ends of the two bellows 4 are respectively connected to the dry pump 3 and the vacuum instrument 1. The shock absorbing block 21 is made of stainless steel material to improve its durability and stability under high load conditions.

[0031] This embodiment is applied to the vacuum system of an electron microscope. By setting the shock-absorbing block 21 on the displacement assembly 24 that can move along the first direction, the shock-absorbing block 21 can also move along the first direction with the displacement assembly 24. When the pressure of the vacuum system changes, the length of the bellows 4 will change and pull the shock-absorbing block 21. At this time, the shock-absorbing block 21 moves with the bellows 4, reducing the pull of the bellows 4 on the electron microscope. The tiny displacement and vibration of the electron microscope caused by vibration transmission are significantly reduced, and the stability and measurement accuracy of the electron microscope are effectively improved. In addition, the shock-absorbing block 21 can flexibly adjust its position along the first direction to minimize the length of the bellows 4 pipeline, thereby optimizing the vacuum effect. By converting high-frequency vibration into low-frequency vibration, this embodiment not only improves the shock-absorbing effect, but also extends the service life of the electron microscope. The material selection of the support platform 22, the fixing plate 23 and the shock-absorbing block 21 can achieve efficient vibration isolation and stable support, optimize the performance of the vacuum system, and extend the service life of the electron microscope.

[0032] During installation, first, the support platform 22 is firmly fixed to the laboratory floor to ensure its fixation and stability. The displacement assembly 24 is mounted on the support platform 22 and fixed by bolts and other fasteners to ensure that the whole has high vibration isolation characteristics. Then the shock absorbing block 21 is installed on the displacement assembly 24. The two ends of the vacuum bellows 4 are respectively connected to the shock absorbing block 21 and the dry pump 3, and the reliability of the sealing and connection needs to be ensured.

[0033] During operation, the dry pump 3 is started to make the system reach the required vacuum state. The high-frequency vibration generated by the dry pump 3 is transmitted to the displacement assembly 24 through the vacuum bellows 4. When the high-frequency vibration passes through the shock-absorbing block 21, it is effectively absorbed and attenuated due to the mass and low-frequency vibration characteristics of the shock-absorbing block 21, thereby reducing the vibration transmitted to the vacuum instrument 1. The setting of the displacement assembly 24 enables the shock-absorbing block 21 to adapt to the length change of the bellows 4 by moving, minimize stress, and ensure the stability of the vacuum system. Under the protection of the shock-absorbing device 2, the vacuum instrument 1 is significantly less susceptible to vibration and maintains high stability, thereby improving the measurement accuracy and the reliability of the experimental data.

[0034] In one embodiment, if Figures 1 to 4 As shown, the supporting platform 22, the fixing plate 23 and the shock absorbing block 21 are all rectangular in shape, which is convenient for processing and can improve the stability of the overall structure.

[0035] In one embodiment, if Figure 3 and Figure 4As shown, the displacement assembly 24 includes a first support plate 241, which can be a stainless steel plate so that it can maintain stable performance after multiple uses. The first support plate 241 is a rectangular plate, and each corner is rounded. The axis of the first support plate 241 is on the same straight line as the axis of the fixed plate 23, thereby improving the stability of the displacement assembly 24. A first limiting block 241a is respectively arranged on the outer side wall of the first support plate 241, and the first support plate 241 has a first surface for supporting the shock absorbing block 21, and the first surface is the top surface of the first support plate 241. The height of the first limiting block 241a is higher than the top surface of the first support plate 241, and each limiting block and the top surface of the first support plate 241 form a limiting area, and the shock absorbing block 21 is arranged in the limiting area. The first limiting block 241a can fix the shock absorbing block 21 to prevent relative movement between the shock absorbing block 21 and the first support plate 241, thereby reducing vibration.

[0036] In one embodiment, if Figure 3 and Figure 4 As shown, the displacement assembly 24 also includes a second support plate 242, which is also a rectangular plate, and each corner is rounded, and the axis of the second support plate 242 is on the same straight line as the axis of the first support plate 241. The second support plate 242 is arranged at the bottom of the first support plate 241, and a rotating bearing 244 is arranged on the top surface of the second support plate 242. The first support plate 241 is arranged on the rotating bearing 244, and the first support plate 241 is arranged on the second support plate 242 through the rotating bearing 244 and along the axis of the rotating bearing 244. It can be horizontally rotatable. When the bellows 4 contracts, most of the time, it is not only displaced in the first direction. If displacement occurs in other directions, it may still cause the bellows 4 to be hard-connected. The above structure can increase the degree of freedom of the shock-absorbing block 21, so that the shock-absorbing block 21 can rotate horizontally when receiving the vibration transmitted in the corresponding direction by the bellows 4, thereby further reducing the transmission of vibration to the vacuum instrument 1, and improving the measurement accuracy and reliability of experimental data.

[0037] In one embodiment, if Figure 3 and Figure 4 As shown, the displacement assembly 24 further includes a third support plate 243, which is disposed at the bottom of the second support plate 242, and the axis of the third support plate 243 is in the same straight line as the axis of the second support plate 242. The second support plate 242 is movably disposed on the third support plate 243 along the second direction, so that the shock absorbing block 21 disposed on the displacement assembly 24 can also move along the second direction, so that the shock absorbing block 21 can move along the second direction when receiving the vibration transmitted in the corresponding direction by the bellows 4, further increasing the freedom of movement of the shock absorbing block 21, thereby further reducing the transmission of vibration to the vacuum instrument 1, and improving the measurement accuracy and reliability of the experimental data.

[0038] In one embodiment, if Figure 3 and Figure 4 As shown, the third support plate 243 is provided with a first slide rail 243a extending in the second direction, and the length of the first slide rail 243a is less than or equal to the size of the third support plate 243 in the second direction. A first slider 242a is provided at the bottom of the second support plate 242, and the first slider 242a and the first slide rail 243a are arranged opposite to each other and cooperate with each other, that is, the first slider 242a is slidably arranged on the first slide rail 243a. The second support plate 242 is slidably arranged on the third support plate 243 in the second direction through the cooperation between the first slider 242a and the first slide rail 243a. The above-mentioned arrangement can improve the stability of the second support plate 242 moving in the second reverse direction, thereby reducing the vibration transmitted to the vacuum instrument 1.

[0039] In one embodiment, if Figure 3 and Figure 4 As shown, there are at least two first slide rails 243a, and they are arranged side by side along the first direction. The number of first sliders 242a is the same as the number of first slide rails 243a, and each first slider 242a is arranged in a one-to-one correspondence with each first slide rail 243a. Multiple first slide rails 243a can improve the sliding stability of the second support plate 242, so that when the bellows 4 transmits vibration to the shock-absorbing block 21, the shock-absorbing block 21 moves more stably along the second direction, reducing the vibration transmitted to the vacuum instrument 1.

[0040] In one embodiment, two stainless steel second limit blocks are provided on the first slide rail 243a, which can maintain its fixing performance after multiple uses. The second limit block is used to limit the first slider 242a along the second direction, and the first slider 242a is arranged between the two second limit blocks along the second direction. The second limit block can be tightened on the first slide rail 243a by screws. When the second support plate 242 needs to remain fixed, the second limit block can lock the position of the first slider 242a to prevent the movement of the second support plate 242, thereby ensuring the reliability of the vacuum system in long-term use. And the position of the second limit block on the first slide rail 243a can be adjusted to adjust the range of motion of the first slider 242a, thereby adjusting the range of motion of the displacement assembly 24 along the second direction.

[0041] In one embodiment, if Figure 3 and Figure 4As shown, the fixed plate 23 is provided with a second slide rail 231 extending in the first direction, and the displacement assembly 24 is movably provided on the fixed plate 23 along the first direction through the second slide rail 231. A second slider 243b is provided on the bottom of the third support plate 243, and the second slider 243b cooperates with the second slide rail 231. The cooperation between the second slide rail 231 and the second slider 243b is similar to the cooperation between the first slide rail 243a and the second slider 243b, which can improve the sliding stability.

[0042] In one embodiment, if Figure 3 and Figure 4 As shown, two third stainless steel limit blocks 232 are provided on the second slide rail 231. The third limit blocks 232 are used to limit the second slider 243b along the first direction. The second slider 243b is provided between the two third limit blocks 232 along the first direction. The third limit block 232 can be screwed onto the second slide rail 231 by screws. When the third support plate 243 needs to be kept fixed, the third limit block 232 can lock the position of the second slider 243b to prevent the third support plate 243 from moving, thereby ensuring the reliability of the vacuum system in long-term use. And the position of the third limit block 232 on the second slide rail 231 can be adjusted to adjust the range of motion of the second slider 243b, thereby adjusting the range of motion of the displacement assembly 24 along the first direction.

[0043] In one embodiment, an anti-wear layer and an anti-corrosion layer are provided on the first surface, that is, the top surface of the support platform 22 can be processed by a process method disclosed in the prior art to prevent corrosion and wear and ensure reliability in long-term use. Alternatively, a coating known in the prior art that can prevent wear and / or corrosion can be added to the top surface of the support platform 22 by a process method disclosed in the prior art.

[0044] In one implementation, a plurality of the shock absorbing devices 2 of this embodiment can be combined for use, providing a flexible configuration scheme to adapt to different application requirements and experimental environments.

[0045] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A shock absorbing device, characterized in that: include: Support platform; A fixing plate, arranged on the supporting platform; A displacement assembly, movably disposed on the fixing plate along a first direction; The shock absorbing block is arranged on the displacement assembly, and the shock absorbing block has a first side and a second side arranged opposite to each other along a first direction, and the first side and the second side are used to be connected to two bellows of the vacuum system respectively.

2. The shock absorbing device according to claim 1, characterized in that: The displacement assembly includes a first support plate, and first limiting blocks are respectively arranged on the outer side walls of the first support plate. The first support plate has a first surface for supporting the shock-absorbing block. Each of the limiting blocks and the first surface form a limiting area, and the shock-absorbing block is arranged in the limiting area.

3. The shock absorbing device according to claim 2, characterized in that: The displacement assembly further includes a second support plate, on which a rotation bearing is disposed, and the first support plate is horizontally rotatably disposed on the second support plate via the rotation bearing.

4. The shock absorbing device according to claim 3, characterized in that: The displacement assembly further includes a third support plate, and the second support plate is movably disposed on the third support plate along a second direction, wherein the first direction and the second direction are perpendicular to each other.

5. The shock absorbing device according to claim 4, characterized in that: A first slide rail is disposed on the third support plate along the second direction, a first slider is disposed on the opposite side of the second support plate and the third support plate, and the first slider matches the first slide rail.

6. The shock absorbing device according to claim 5, characterized in that: The first slide rails are configured to be at least two and arranged along a first direction, and the number of the first sliding blocks is the same as that of the first slide rails and are respectively configured in a one-to-one correspondence.

7. The shock absorbing device according to claim 5 or 6, characterized in that: The first slide rail is provided with two second limit blocks for limiting the first slide block along the second direction, and the first slide block is arranged between the two second limit blocks along the second direction.

8. The shock absorbing device according to claim 4, characterized in that: A second slide rail is arranged on the fixed plate along the first direction, the displacement assembly is movably arranged on the fixed plate along the first direction via the second slide rail, a second slider is arranged on the side of the third support plate facing the fixed plate, and the second slider cooperates with the second slide rail.

9. The shock absorbing device according to claim 8, characterized in that: The second slide rail is provided with two third limit blocks for limiting the second slide block along the first direction, and the second slide block is arranged between the two third limit blocks along the first direction.

10. The shock absorbing device according to any one of claims 2 to 6, characterized in that: An anti-wear layer and an anti-corrosion layer are arranged on the first surface.

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