Multi-path light-splitting laser scribing equipment and multi-path light-splitting laser scribing method

Abstract

The invention relates to multi-path light-splitting laser scribing equipment and method. The equipment comprises an incident light-splitting unit and an emergent light-splitting unit, the incident light splitting unit sequentially comprises a first incident light splitting module and a second incident light splitting module from left to right, two groups of incident laser enter the first incident light splitting module and the second incident light splitting module respectively, and the front side and the rear side of the first incident light splitting module each comprise a plurality of first polarization reflecting prisms distributed in the front-back direction. The front side and the rear side of the second incident light splitting module comprise a plurality of second polarization reflecting prisms distributed in the front-back direction. According to the invention, the existing light splitting optical path design is improved, the lineation efficiency and accuracy are improved, the system has the functions of trajectory tracking and automatic focusing, the accuracy of lineation in the existing light splitting lineation system can be effectively improved through trajectory tracking, and the product processing yield is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field related to laser scribing, and in particular to a multi-path beam splitting laser scribing device and method. Background Art

[0002] Perovskite solar cell technology has developed rapidly in recent years. As the third generation of new solar cells, its efficiency has increased rapidly and has great potential. The perovskite process includes three steps: thin film preparation, laser scribing, and packaging.

[0003] The role of laser scribing in perovskite solar cells is to construct the circuit structure in the perovskite cell through multiple laser etchings, connect multiple perovskite cells in series into components, block conduction, and thus form a separate module. The serial interconnection structure limits the output current of the solar cell and increases the output voltage, reducing current loss.

[0004] The increase in the size of perovskite solar cells places high demands on the laser scribing speed. The defect of the existing thin-film solar cell laser scribing technology is that the laser head needs to quickly scribble across the solar cell substrate during laser scribing. Scribing processing time: single-pass scribing time * number of sub-cells - 1. And there are P1, P2, and P3 lines in each sub-cell, which further places high demands on the laser scribing speed. Taking a 1200mm*600mm perovskite solar cell as an example, if the width of its sub-cell is 5mm, the total number of laser scribing lines is more than 300. This makes it difficult to further increase the production capacity of solar cell substrates and the work efficiency is relatively low.

[0005] 1. After a massive search, it was found that the Chinese patent announcement number is CN118438043A, which discloses a thin-film solar cell laser scribing device and a laser scribing method. The laser scribing device includes an optical system and a substrate workbench. The optical system includes a laser, a beam expander collimator, a plurality of polarization beam splitters, a plurality of focusing mirrors and a plurality of total reflection mirrors placed in sequence; the substrate workbench is used to set the film layer to be scribed below the focusing mirror; wherein each of the polarization beam splitters is used to split a laser beam into two laser beams with mutually perpendicular propagation directions, one of which enters the adjacent polarization beam splitter prism, and the other laser beam scribes the film layer after passing through the focusing mirror; a total reflection mirror is arranged on the output optical path of each focusing mirror, the total reflection mirror is located below the film layer, and the total reflection mirror is used to reflect the laser passing through the film layer to the adjacent scribing position. Each scribing area of ​​the present application has two upper and lower beams acting simultaneously, which improves the efficiency of laser scribing.

[0006] In the existing method, during the laser scribing and etching process, the laser energy may exceed the etching threshold and affect the non-scribbled film layer. In order to reduce this phenomenon, multiple and low-energy scribing can be used, but multiple scribing makes the laser scribing efficiency low. This patent uses a total reflector, which is located below the film layer. The total reflector is used to reflect the laser passing through the film layer to the adjacent scribing position. In this scheme, the light path after the branch scribing is reflected to the next light path through a total reflector at the bottom to improve the energy utilization efficiency. Its disadvantage is that the light path below is reflected by the total reflector. Due to the inclination of the light path, the light spot will change from the original circle to an ellipse. When the shape of the light spot changes, the laser energy distribution will be uneven, and the line width and pulse overlap rate will change, which will greatly reduce the quality of the next scribing. And when the material and film thickness of the thin-film battery change, the power of its light path is uncontrollable when it passes through the thin-film battery to the total reflector below, that is, the power of the reflected light path is still uncontrollable, which will greatly reduce the scribing quality.

[0007] according to Fig.10 It can be seen that when the spot shape changes, the laser energy distribution will be uneven, resulting in different scribing depths. Fig.10 The three lines in the upper middle are uneven light spots, and the one at the bottom is a uniform light spot.

[0008] 2. After massive searches, it was found that the Chinese patent announcement number is CN117283146A, which discloses a laser device for scribing along the Y-axis, which includes a module frame, a laser installed on the top of the module frame, a mounting frame installed on one side of the module frame and capable of moving back and forth along the Y-axis, and a spectroscopic scribing device installed on the mounting frame; the spectroscopic module receives the light beam emitted by the laser and performs laser scribing along the Y-axis; the present invention overcomes the problem of the prior art of directly driving a large and heavy solar cell substrate, and only requires moving a lightweight laser spectroscopic scribing device to make the processing more stable and precise; by adding a polarization beam splitter and a wave plate, and adding a laser scribing device, the fixed laser power is evenly distributed to each laser scribing device, so that multiple simultaneous processing can be achieved, greatly improving the processing efficiency.

[0009] according to Fig.11 It can be seen that this solution uses a diffractive optical element (DOE) to split the light, but diffraction splitting will result in different spot qualities for each beam of light, and the energy of a single beam of light cannot be adjusted. That is, the spot qualities outside and in the middle of the DOE splitting are different (shape and energy distribution).

[0010] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a multi-path beam splitting laser engraving equipment and method to make it more valuable for industrial use. Summary of the invention

[0011] In order to solve any of the above technical problems, the object of the present invention is to provide a multi-path beam splitting laser scribing device and method.

[0012] To achieve the above object, the present invention adopts the following technical solution:

[0013] One of the purposes of the present invention:

[0014] A multi-path splitting laser scribing device, comprising an incident splitting unit and an outgoing splitting unit;

[0015] The incident light splitting unit includes a first incident light splitting module and a second incident light splitting module from left to right, and two groups of incident lasers enter the first incident light splitting module and the second incident light splitting module respectively. The front and rear sides of the first incident light splitting module each include a plurality of first polarized reflection prisms distributed along the front and rear direction, and the front and rear sides of the second incident light splitting module each include a plurality of second polarized reflection prisms distributed along the front and rear direction;

[0016] The outgoing light splitting unit includes, from left to right, a second outgoing translational reflection prism unit, a first outgoing translational reflection prism unit and an outgoing derivation reflection prism group, and the second outgoing translational reflection prism unit and the first outgoing translational reflection prism unit can both move freely in the front-back direction;

[0017] The second output translation reflection prism unit includes a rear second output translation reflection prism module and a front second output translation reflection prism module from back to front, second incident reflection prism modules are arranged on the outer sides of the rear second output translation reflection prism module and the front second output translation reflection prism module, an output reference reflection prism is fixedly arranged on the rear side of the front second incident reflection prism module, the rear second output translation reflection prism module and the front second output translation reflection prism module both include a plurality of second output translation reflection prisms staggered along the left-right direction, the plurality of second output translation reflection prisms can be freely moved in the front-back direction, and the second incident reflection prism module includes a plurality of second incident reflection prisms matched with the above-mentioned output reference reflection prism or the second output translation reflection prism;

[0018] The first output translation reflection prism unit includes a rear first output translation reflection prism module and a front first output translation reflection prism module from the back to the front, and a first incident reflection prism module is arranged outside the rear first output translation reflection prism module and the front first output translation reflection prism module. The rear first output translation reflection prism module and the front first output translation reflection prism module both include a plurality of first output translation reflection prism groups staggered along the left-right direction, and the plurality of first output translation reflection prism groups can move freely in the front-back direction. The first incident reflection prism module includes a plurality of first incident reflection prisms adapted to the above-mentioned first output translation reflection prism group.

[0019] The second polarized reflection prism is matched with the second incident reflection prism, and the first polarized reflection prism is matched with the first incident reflection prism.

[0020] As a further improvement of the present invention, an eight-shaped structure distribution is presented between the rear second output translation reflection prism module and the front second output translation reflection prism module, and an eight-shaped structure distribution is presented between the two second incident reflection prism modules; a figure eight structure distribution is presented between the rear first output translation reflection prism module and the front first output translation reflection prism module, and an eight-shaped structure distribution is presented between the two first incident reflection prism modules.

[0021] As a further improvement of the present invention, the rear second output translation reflection prism module and the front second output translation reflection prism module both include four second output translation reflection prisms staggered along the left-right direction, the second incident reflection prism module at the rear end includes four second incident reflection prisms, the second incident reflection prism module at the front end includes three second incident reflection prisms, and the number of second polarized reflection prisms is four; the rear first output translation reflection prism module and the front first output translation reflection prism module both include four first output translation reflection prism groups staggered along the left-right direction, the two first incident reflection prism modules both include four first incident reflection prisms, and the number of first polarized reflection prisms is four.

[0022] As a further improvement of the present invention, the output output reflecting prism group includes a lower output reflecting prism, an upper output reflecting prism and a front output reflecting prism. The lower output reflecting prism is located directly below the upper output reflecting prism, the front output reflecting prism is located directly in front of the upper output reflecting prism, and the front output reflecting prism is located directly below the exit port. The output laser passes through the lower output reflecting prism, the upper output reflecting prism and the front output reflecting prism in sequence before being emitted through the exit port.

[0023] As a further improvement of the present invention, the first output translation reflection prism group includes, from bottom to top, a lower first output translation reflection prism and an upper first output translation reflection prism that are adapted to each other, the lower first output translation reflection prism is adapted to the outer first incident reflection prism, and the upper first output translation reflection prism is adapted to the output derivation reflection prism group.

[0024] As a further improvement of the present invention, a quarter wave plate is installed between adjacent first polarized reflection prisms or second polarized reflection prisms; a plano-convex lens is arranged on one side of the second output translation reflection prism or the first output translation reflection prism group, and the plano-convex lens moves with the second output translation reflection prism or the first output translation reflection prism group.

[0025] As a further improvement of the present invention, it also includes a high-speed visual camera and a laser spacing detector adapted to the above-mentioned output spectroscopic unit.

[0026] The second purpose of the present invention is:

[0027] A multi-path splitting laser scribing method comprises the following steps:

[0028] Step S1, two groups of incident lasers enter the first incident light splitting module and the second incident light splitting module respectively;

[0029] Step S2, the first group of incident laser light enters the first incident light splitting module, passes through a plurality of first polarized reflection prisms, and then enters the incident port, and then passes through the first incident reflection prism, the first output translation reflection prism group, and the output derivation reflection prism group in sequence, and finally forms an output laser light through the output port;

[0030] Step S3, the second group of incident laser light enters the second incident light splitting module and then passes through a plurality of second polarized reflection prisms to enter the incident port, and then passes through the second incident reflection prism or the exit reference reflection prism, the second exit translation reflection prism and the exit export reflection prism group in sequence, and finally forms an exit laser light through the exit port.

[0031] As a further improvement of the present invention, in step S2 or step S3, the spacing between adjacent optical paths is adjusted by independently moving a plurality of second output translation reflection prisms and a plurality of first output translation reflection prism groups in the front-to-back direction, and laser spacing detection processing is performed in conjunction with a laser spacing detector.

[0032] As a further improvement of the present invention, in step S2 or step S3, laser tracing processing is performed by moving the second output translation reflection prism unit and the first output translation reflection prism unit in the front-to-back direction in combination with a high-speed visual camera.

[0033] By means of the above scheme, the present invention has at least the following advantages:

[0034] The present invention improves the existing spectroscopic optical path design, improves the marking efficiency and accuracy, and has the functions of trajectory tracking and automatic focusing. Trajectory tracking can effectively solve the accuracy of marking in the existing spectroscopic marking system and ensure the product processing yield.

[0035] The present invention is compatible with sub-cell scribing with various widths of 1 to 14 mm and is applicable to a variety of products.

[0036] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 It is a structural schematic diagram of a multi-path beam splitting laser scribing device of the present invention;

[0039] Figure 2 is a schematic diagram of the laser beam splitting before adjustment of the present invention;

[0040] Figure 3 is a schematic diagram of the laser beam splitting adjustment of the present invention;

[0041] Figure 4 is a schematic diagram of the laser automatic focusing of the present invention;

[0042] Figure 5 It is a schematic diagram of the laser automatic focusing of the present invention;

[0043] Figure 6 is a schematic diagram of the present invention before laser tracing;

[0044] Figure 7 is a schematic diagram of the present invention after laser tracing;

[0045] Figure 8 This is a schematic diagram of product processing without laser tracing in the prior art;

[0046] Fig. 9 It is a schematic diagram of product processing after laser tracing of the present invention;

[0047] Fig.10 It is a schematic diagram of laser scribing when the spot shape changes in the prior art;

[0048] Fig.11 It is a schematic diagram showing the difference in quality between the outer and middle light spots when light is split by a diffractive optical element (DOE) in the prior art.

[0049] The meanings of the various reference numerals in the figures are as follows.

[0050] Incident laser 1, outgoing laser 2, first polarized reflection prism 3, second polarized reflection prism 4, second incident reflection prism 5, outgoing reference reflection prism 6, second outgoing translation reflection prism 7, first incident reflection prism 8, first outgoing translation reflection prism group 9, outgoing export reflection prism group 10. DETAILED DESCRIPTION

[0051] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0052] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The components of the embodiment of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiment of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0053] Example

[0054] like Figures 1 to 11 As shown,

[0055] The first embodiment of the present invention:

[0056] A multi-path beam splitting laser scribing device comprises an incident beam splitting unit and an outgoing beam splitting unit.

[0057] The incident beam splitting unit includes a first incident beam splitting module and a second incident beam splitting module from left to right, and two groups of incident lasers 1 enter the first incident beam splitting module and the second incident beam splitting module respectively. The front and rear sides of the first incident beam splitting module include a plurality of first polarized reflection prisms 3 distributed along the front and rear directions, and the front and rear sides of the second incident beam splitting module include a plurality of second polarized reflection prisms 4 distributed along the front and rear directions.

[0058] The outgoing light splitting unit includes a second outgoing translational reflection prism unit, a first outgoing translational reflection prism unit and an outgoing derivation reflection prism group 10 from left to right. Both the second outgoing translational reflection prism unit and the first outgoing translational reflection prism unit can move freely in the front-rear direction.

[0059] The second output translation reflection prism unit includes, from back to front, a rear second output translation reflection prism module and a front second output translation reflection prism module. Second incident reflection prism modules are arranged on the outer sides of the rear second output translation reflection prism module and the front second output translation reflection prism module. An output reference reflection prism 6 is fixedly arranged on the rear side of the second incident reflection prism module at the front end. The rear second output translation reflection prism module and the front second output translation reflection prism module both include a plurality of second output translation reflection prisms 7 staggered along the left-right direction. The plurality of second output translation reflection prisms 7 can move freely in the front-back direction. The second incident reflection prism module includes a plurality of second incident reflection prisms 5 matched with the above-mentioned output reference reflection prism 6 or the second output translation reflection prism 7.

[0060] The first output translation reflection prism unit includes, from back to front, a rear first output translation reflection prism module and a front first output translation reflection prism module, and first incident reflection prism modules are arranged on the outer sides of the rear first output translation reflection prism module and the front first output translation reflection prism module, and the rear first output translation reflection prism module and the front first output translation reflection prism module both include a plurality of first output translation reflection prism groups 9 staggered along the left-right direction, and the plurality of first output translation reflection prism groups 9 can move freely in the front-back direction, and the first incident reflection prism module includes a plurality of first incident reflection prisms 8 matched with the above-mentioned first output translation reflection prism groups 9.

[0061] The second polarized reflection prism 4 is matched with the second incident reflection prism 5 , and the first polarized reflection prism 3 is matched with the first incident reflection prism 8 .

[0062] An eight-shaped structure distribution is presented between the rear second output translational reflection prism module and the front second output translational reflection prism module, and an eight-shaped structure distribution is presented between the two second incident reflection prism modules; an eight-shaped structure distribution is presented between the rear first output translational reflection prism module and the front first output translational reflection prism module, and an eight-shaped structure distribution is presented between the two first incident reflection prism modules.

[0063] The rear second output translation reflection prism module and the front second output translation reflection prism module both include four second output translation reflection prisms 7 staggered along the left-right direction, the second incident reflection prism module at the rear end includes four second incident reflection prisms 5, the second incident reflection prism module at the front end includes three second incident reflection prisms 5, and the number of the second polarized reflection prisms 4 is four; the rear first output translation reflection prism module and the front first output translation reflection prism module both include four first output translation reflection prism groups 9 staggered along the left-right direction, the two first incident reflection prism modules both include four first incident reflection prisms 8, and the number of the first polarized reflection prisms 3 is four.

[0064] The output reflective prism group 10 includes a lower output reflective prism, an upper output reflective prism and a front output reflective prism. The lower output reflective prism is located directly below the upper output reflective prism, the front output reflective prism is located directly in front of the upper output reflective prism, and the front output reflective prism is located directly below the output port. The output laser 2 passes through the lower output reflective prism, the upper output reflective prism and the front output reflective prism in sequence before being emitted through the output port.

[0065] The first output translation reflection prism group 9 includes, from bottom to top, a lower first output translation reflection prism and an upper first output translation reflection prism that are adapted to each other. The lower first output translation reflection prism is adapted to the outer first incident reflection prism 8, and the upper first output translation reflection prism is adapted to the output derivation reflection prism group 10.

[0066] A quarter wave plate is installed between adjacent first polarized reflection prisms 3 or second polarized reflection prisms 4; a plano-convex lens is arranged on one side of the second output translation reflection prism 7 or the first output translation reflection prism group 9, and the plano-convex lens moves with the second output translation reflection prism 7 or the first output translation reflection prism group 9.

[0067] It also includes a high-speed visual camera and a laser spacing detector that are compatible with the above-mentioned output spectroscopic unit.

[0068] The second embodiment of the present invention:

[0069] A multi-path splitting laser scribing method comprises the following steps:

[0070] Step S1, two groups of incident lasers 1 enter the first incident light splitting module and the second incident light splitting module respectively;

[0071] Step S2, the first group of incident laser light 1 enters the first incident light splitting module, passes through a plurality of first polarized reflection prisms 3, and then enters the incident port, and then passes through the first incident reflection prism 8, the first outgoing translation reflection prism group 9 and the outgoing derivation reflection prism group 10 in sequence, and finally forms an outgoing laser light 2 through the outgoing port;

[0072] Step S3, the second group of incident laser light 1 enters the second incident light splitting module and then passes through a plurality of second polarized reflection prisms 4 to enter the incident port, and then passes through the second incident reflection prism 5 or the exit reference reflection prism 6, the second exit translation reflection prism 7 and the exit export reflection prism group 10 in sequence, and finally forms an exit laser light 2 through the exit port.

[0073] like Figure 2 and Figure 3As shown, in step S2 or step S3, the spacing between adjacent light paths is adjusted by independently moving a plurality of second output translation reflection prisms 7 and a plurality of first output translation reflection prism groups 9 in the front-to-back direction, and a laser spacing detector is used to perform laser spacing detection processing.

[0074] By operating the plurality of second output translational reflection prisms 7 and the first output translational reflection prism group 9 separately, the spacing between the optical paths can be adjusted from the initial 8 mm to 14 mm, which can meet the 1-14 mm sub-cell width marking, wherein the adjustable optical path spacing is an integer multiple of the cell width.

[0075] like Figure 4 and Figure 5 As shown, automatic focusing instructions: Since the processing of perovskite solar cells requires heating annealing treatment, as well as ALD, PVD and other coating processes, the substrate glass will be deformed after heating. Automatic focusing can be used to maintain the consistency of the markings and avoid the phenomenon of uneven depth.

[0076] like Figure 6 and Figure 7 As shown, in step S2 or step S3, the second output translation reflection prism unit and the first output translation reflection prism unit are moved in the front-to-back direction and a high-speed visual camera is used to perform laser tracking processing.

[0077] like Figure 8 As shown, after the glass is heated and deformed, there is no trajectory tracking, which causes the dead zone to become larger, the ineffective area of ​​the battery to increase, and the power generation efficiency to decrease.

[0078] like Fig. 9 As shown, after the glass is heated and deformed, the trajectory tracking function is turned on to avoid the situation where the dead zone before and after the P1, P2, and P3 lines becomes larger.

[0079] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0080] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A multi-path splitting laser scribing device, comprising an incident splitting unit and an outgoing splitting unit; Features: The incident light splitting unit comprises a first incident light splitting module and a second incident light splitting module from left to right, two groups of incident lasers (1) enter the first incident light splitting module and the second incident light splitting module respectively, the front and rear sides of the first incident light splitting module each comprise a plurality of first polarized reflection prisms (3) distributed along the front and rear direction, and the front and rear sides of the second incident light splitting module each comprise a plurality of second polarized reflection prisms (4) distributed along the front and rear direction; The outgoing light splitting unit comprises, from left to right, a second outgoing translational reflection prism unit, a first outgoing translational reflection prism unit and an outgoing derivation reflection prism group (10), and the second outgoing translational reflection prism unit and the first outgoing translational reflection prism unit can both move freely in the front-rear direction; The second outgoing translational reflection prism unit comprises, from back to front, a rear second outgoing translational reflection prism module and a front second outgoing translational reflection prism module in sequence; second incident reflection prism modules are arranged on the outer sides of the rear second outgoing translational reflection prism module and the front second outgoing translational reflection prism module; an outgoing reference reflection prism (6) is fixedly arranged on the rear side of the second incident reflection prism module at the front end; the rear second outgoing translational reflection prism module and the front second outgoing translational reflection prism module both comprise a plurality of second outgoing translational reflection prisms (7) staggered along the left-right direction; the plurality of second outgoing translational reflection prisms (7) can freely move in the front-back direction; the second incident reflection prism module comprises a plurality of second incident reflection prisms (5) adapted to the above-mentioned outgoing reference reflection prism (6) or the second outgoing translational reflection prism (7); The first outgoing translational reflection prism unit comprises, from back to front, a rear first outgoing translational reflection prism module and a front first outgoing translational reflection prism module, first incident reflection prism modules are arranged on the outer sides of the rear first outgoing translational reflection prism module and the front first outgoing translational reflection prism module, the rear first outgoing translational reflection prism module and the front first outgoing translational reflection prism module both comprise a plurality of first outgoing translational reflection prism groups (9) staggered along the left-right direction, the plurality of first outgoing translational reflection prism groups (9) can freely move in the front-back direction, and the first incident reflection prism module comprises a plurality of first incident reflection prisms (8) adapted to the first outgoing translational reflection prism groups (9); Furthermore, the second polarized reflection prism (4) is matched with the second incident reflection prism (5), and the first polarized reflection prism (3) is matched with the first incident reflection prism (8).

2. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that An eight-shaped structure distribution is presented between the rear second-emitting translational reflection prism module and the front second-emitting translational reflection prism module, and an eight-shaped structure distribution is presented between the two second-incident reflection prism modules; an eight-shaped structure distribution is presented between the rear first-emitting translational reflection prism module and the front first-emitting translational reflection prism module, and an eight-shaped structure distribution is presented between the two first-incident reflection prism modules.

3. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that The rear second output translational reflection prism module and the front second output translational reflection prism module both include four second output translational reflection prisms (7) staggered along the left-right direction, the second incident reflection prism module at the rear end includes four second incident reflection prisms (5), the second incident reflection prism module at the front end includes three second incident reflection prisms (5), and the number of the second polarized reflection prisms (4) is four; the rear first output translational reflection prism module and the front first output translational reflection prism module both include four first output translational reflection prism groups (9) staggered along the left-right direction, the two first incident reflection prism modules both include four first incident reflection prisms (8), and the number of the first polarized reflection prisms (3) is four.

4. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that The output deflection prism group (10) comprises a lower output reflection prism, an upper output reflection prism and a front output reflection prism, wherein the lower output reflection prism is located directly below the upper output reflection prism, the front output reflection prism is located directly in front of the upper output reflection prism, and the front output reflection prism is located directly below an output port, and the output laser (2) passes through the lower output reflection prism, the upper output reflection prism and the front output reflection prism in sequence before being emitted through the output port.

5. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that The first outgoing translational reflection prism group (9) comprises, from bottom to top, a lower first outgoing translational reflection prism and an upper first outgoing translational reflection prism which are adapted to each other, the lower first outgoing translational reflection prism being adapted to the outer first incident reflection prism (8), and the upper first outgoing translational reflection prism being adapted to the outgoing derivation reflection prism group (10).

6. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that A quarter wave plate is installed between adjacent first polarized reflection prisms (3) or second polarized reflection prisms (4); a plano-convex lens is arranged on one side of the second output translation reflection prism (7) or the first output translation reflection prism group (9), and the plano-convex lens moves together with the second output translation reflection prism (7) or the first output translation reflection prism group (9).

7. A multi-path splitting laser scribing device as claimed in claim 1, It is characterized in that It also includes a high-speed visual camera and a laser spacing detector that are compatible with the above-mentioned output spectroscopic unit.

8. A multi-path splitting laser scribing method according to any one of claims 1 to 7, It is characterized in that The following steps are involved: Step S1, two groups of incident lasers (1) enter the first incident light splitting module and the second incident light splitting module respectively; Step S2, after the first group of incident laser light (1) enters the first incident light splitting module, it passes through a plurality of first polarized reflection prisms (3) and then enters the incident port, and then passes through the first incident reflection prism (8), the first outgoing translation reflection prism group (9) and the outgoing derivation reflection prism group (10) in sequence, and finally forms an outgoing laser light (2) through the outgoing port; Step S3, after the second group of incident laser light (1) enters the second incident light splitting module, it passes through a plurality of second polarized reflection prisms (4) and then enters the incident port, and then passes through the second incident reflection prism (5) or the outgoing reference reflection prism (6), the second outgoing translation reflection prism (7) and the outgoing derivation reflection prism group (10) in sequence, and finally forms an outgoing laser light (2) through the outgoing port.

9. A multi-path splitting laser scribing method as claimed in any one of claims 8, It is characterized in that In step S2 or step S3, the spacing between adjacent light paths is adjusted by independently moving a plurality of second outgoing translational reflection prisms (7) and a plurality of first outgoing translational reflection prism groups (9) in the front-rear direction, and a laser spacing detector is used to perform laser spacing detection processing.

10. A multi-path splitting laser scribing method as claimed in any one of claims 8, It is characterized in that In step S2 or step S3, laser tracing is performed by moving the second output translation reflection prism unit and the first output translation reflection prism unit in the front-to-back direction in combination with a high-speed visual camera.

Images