Method and system for correcting directivity deviation of light beam

Abstract

The invention relates to the technical field of optical systems, in particular to a light beam directivity deviation correction method and system. The method comprises the following steps: acquiring a light spot centroid position offset signal of a light source beam in the camera unit; according to the light spot centroid position offset signal, decoupling control is carried out through a target coupling matrix, and a driving voltage value of the fast steering mirror unit is obtained; the target coupling matrix is used for indicating a coupling coefficient relationship between the displacement change of the fast reflecting mirror unit and the position change of light spots in the camera unit; and based on the driving voltage value, controlling each fast reflecting mirror in the fast reflecting mirror unit to rotate around the respective axis so as to correct the directivity deviation of the light beam of the light source. According to the invention, by introducing the target coupling matrix, the coupling relation of light spot centroid change in the camera caused by angle change of the reflector in the horizontal and pitching directions is successfully eliminated, the problem that the other kind of error rises when a certain kind of error is adjusted is avoided, and accurate control is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of optical systems, and in particular to a method and system for correcting light beam directivity deviation. Background Art

[0002] With the rapid development of optoelectronic technology, optical systems have been widely used in many fields, such as laser communication, laser processing, etc. However, in practical applications, optical systems often face various interferences from laser thermal characteristics, air turbulence, temperature gradients, external vibrations, etc., which cause the laser beam pointing to jitter, affecting the stability of the subsequent optical path and the characteristics of the laser pulse.

[0003] The internal optical path of high-performance lasers is complex, and active adjustment technology is needed to control the spatial position of the beam. Commercial lasers have clear requirements for pointing accuracy, such as Solstice from Spectra Physics in the United States. TM Ace TM For lasers, the laser beam stability parameter must be less than 5μrad. If the pointing jitter of a femtosecond laser is severe, it will introduce noise, reduce power stability, and affect frequency doubling, sum frequency stability, and CEP (carrier envelope phase) locking. At present, the internal beam pointing control of the laser is mainly achieved by adjusting the angle of the fast reflector (FSM) or changing the refractive index of the lens. A typical reflective laser pointing control system includes components such as two FSMs, a beam splitter, a convex lens, and an industrial camera. The camera detects the offset of the light spot position, and the controller adjusts the FSM posture according to the offset signal to achieve beam pointing control.

[0004] However, the traditional control method has a coupling problem. When the FSM changes its angle in the horizontal and pitch directions, the center of mass of the light spot in the camera has an approximately linear fixed angle coupling relationship in the x- and y-axis positions. This results in another type of error (such as angle error) being generated when eliminating one type of error (such as position error), affecting the pointing accuracy and control speed. Summary of the invention

[0005] In view of this, the present invention provides a method and system for correcting beam directivity deviation, so as to solve the problem that errors exist in the traditional laser internal beam pointing control method, which affects the pointing accuracy and control speed.

[0006] In a first aspect, the present invention provides a method for correcting a beam directivity deviation, the method being applied to a controller of a beam directivity deviation correction system, the system further comprising a fast mirror unit and a camera unit; the method comprising:

[0007] Acquire a light spot centroid position offset signal of the light source beam in the camera unit;

[0008] According to the light spot centroid position offset signal, decoupling control is performed through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit;

[0009] Based on the driving voltage value, each fast mirror in the fast mirror unit is controlled to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

[0010] In an optional embodiment, the fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, and the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes in the light spot position in the far-field camera FF and the near-field camera NF.

[0011] In an optional implementation, the system further includes a first beam splitter BS1, and the controlling each fast mirror in the fast mirror unit to rotate around its own axis based on the driving voltage value includes:

[0012] Based on the first driving voltage value, the first fast mirror FSM1 is controlled to rotate around its own X-axis and Z-axis so that the light source light beam reaches the center point of the second fast mirror FSM2, and based on the second driving voltage value, the second fast mirror FSM2 is controlled to rotate around its own Y-axis and Z-axis so that the light source light beam passes through the center of the first beam splitter BS1.

[0013] In an optional implementation, the step of performing decoupling control through a target coupling matrix according to the light spot centroid position offset signal to obtain a driving voltage value of the fast mirror unit includes:

[0014] Acquire a first corresponding relationship between a displacement change of each fast mirror in the fast mirror unit and an offset of a center of mass of a light spot of each camera in the camera unit;

[0015] Based on the first corresponding relationship, construct an initial coupling matrix;

[0016] Acquire a second corresponding relationship between a change in the driving voltage of the quick reflection mirror unit and a change in the displacement of each quick reflection mirror in the quick reflection mirror unit;

[0017] Based on the second corresponding relationship, construct a conversion matrix;

[0018] Multiplying the target coupling matrix by the conversion matrix to obtain a target coupling matrix;

[0019] The target coupling matrix is ​​decoupled to obtain a driving voltage value of the fast mirror unit.

[0020] In an optional implementation manner, the decoupling process is performed on the target coupling matrix to obtain the driving voltage value of the fast mirror unit, including:

[0021] Applying preset driving voltage values ​​from small to large to the X-axis and Y-axis of each fast mirror in the fast mirror unit respectively, and recording the centroid position offset of the light spot corresponding to each camera in the camera unit to generate a linear equation group corresponding to the target coupling matrix;

[0022] Solving the linear equations to obtain the values ​​of each element of the target coupling matrix;

[0023] Based on the values ​​of each element of the target coupling matrix, combined with PI adjustment control, the driving voltage value of the fast mirror unit at the next moment is calculated in real time according to the centroid position offset of the light spot corresponding to each camera in the camera unit at the current moment.

[0024] In a second aspect, the present invention provides a beam directivity deviation correction system, the system comprising a controller, a fast mirror unit and a camera unit;

[0025] The controller is used to:

[0026] Acquire a light spot centroid position offset signal of the light source beam in the camera unit;

[0027] According to the light spot centroid position offset signal, decoupling control is performed through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit;

[0028] Based on the driving voltage value, each fast mirror in the fast mirror unit is controlled to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

[0029] In an optional embodiment, the fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, and the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes in the light spot position in the far-field camera FF and the near-field camera NF.

[0030] In an optional embodiment, the system further includes a first beam splitter BS1, and the first fast reflection mirror FSM1 is used to rotate around its own X-axis and Z-axis based on the first control instruction of the controller so that the light source beam reaches the center point of the second fast reflection mirror FSM2;

[0031] The second fast mirror FSM2 is used to rotate around its own Y-axis and Z-axis based on the second control instruction of the controller, so that the light source light beam passes through the center of the first beam splitter BS1.

[0032] In a third aspect, the present invention provides a device for correcting beam directivity deviation, the device being applied to a controller of a beam directivity deviation correction system, the system further comprising a fast mirror unit and a camera unit; the device comprising:

[0033] A light spot centroid position offset signal acquisition module, used to acquire a light spot centroid position offset signal of the light source beam in the camera unit;

[0034] A driving voltage value acquisition module, used to perform decoupling control through a target coupling matrix according to the light spot centroid position offset signal to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate a coupling coefficient relationship between a displacement change of the fast mirror unit and a light spot position change in the camera unit;

[0035] The directivity deviation correction module is used to control each fast mirror in the fast mirror unit to rotate around its own axis based on the driving voltage value, so as to correct the directivity deviation of the light beam of the light source.

[0036] In a fourth aspect, the present invention provides a computer device, comprising: a memory and a processor, the memory and the processor being communicatively connected to each other, the memory storing computer instructions, and the processor executing the computer instructions to execute a method for correcting a beam directivity deviation according to the first aspect or any corresponding embodiment thereof.

[0037] In a fifth aspect, the present invention provides a computer-readable storage medium having computer instructions stored thereon, the computer instructions being used to enable a computer to execute a method for correcting a beam directivity deviation according to the first aspect or any corresponding embodiment thereof.

[0038] In a sixth aspect, the present invention provides a computer program product, comprising computer instructions for causing a computer to execute a method for correcting a beam directivity deviation according to the first aspect or any corresponding embodiment thereof.

[0039] The technical solution provided by the present invention may include the following beneficial effects:

[0040] The present invention successfully eliminates the coupling relationship of the change of the centroid of the light spot in the camera caused by the angle change of the reflector in the horizontal and pitch directions by introducing the target coupling matrix, avoiding the problem of causing another type of error to rise when adjusting a certain type of error, thereby achieving more independent and precise control. The present invention is based on the proportional-integral (PI) control strategy of the decoupling matrix. Through the use of the decoupling matrix, it is possible to break the coupling relationship between such errors, and process the complex coupling relationship through matrix operations, so that the adjustment of the position error and the angle error can be performed relatively independently, thereby avoiding the problem of causing another type of error to rise when adjusting a single type of error, and effectively improving the pointing accuracy of the light beam.

[0041] The PI control strategy based on the decoupling matrix of the present invention also adopts a more efficient control method. By using a predetermined decoupling matrix, the power supply voltage required by the piezoelectric FSM (fast reflector) can be quickly calculated through a single matrix operation, which greatly simplifies the control process, reduces the amount of calculation and operation steps, makes the control method more concise and direct, and can quickly adjust the beam deviation, thereby improving the control efficiency and response speed of the system. In actual tests, the pointing accuracy of the beam has been significantly improved from the traditional 300 order of magnitude to the 50 order of magnitude, improving the overall performance and stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 is a structural schematic diagram of a beam directivity deviation correction system according to an embodiment of the present invention;

[0044] Figure 2is a flow chart of a method for correcting beam directivity deviation according to an embodiment of the present invention;

[0045] Figure 3 is a flow chart of another method for correcting beam directivity deviation according to an embodiment of the present invention;

[0046] Figure 4 is a schematic diagram of a process for solving a target coupling matrix based on a system calibration method according to an embodiment of the present invention;

[0047] Figure 5 is a structural block diagram of a device for correcting beam directivity deviation according to an embodiment of the present invention;

[0048] Figure 6 It is a schematic diagram of the hardware structure of a computer device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0050] It should be noted that the development of optoelectronic technology has led to the widespread application of optical systems, but in actual applications, they are affected by laser thermal characteristics, air turbulence, temperature gradients, and external vibrations. High-performance lasers require external active adjustment technology to control the spatial position of the beam due to the complex internal optical path. Commercial lasers have clear requirements for pointing accuracy. For example, the stability parameter unit of a product of a US company is less than 5μrad. The jitter of the beam pointing of a femtosecond laser will affect the power stability, frequency doubling and frequency stability, and CEP locking, so internal laser beam control is necessary.

[0051] A typical reflective laser pointing control system includes FSM1, FSM2 (piezoelectric ceramic driven fast mirror), attenuation plate, beam splitter, convex lens and CCD camera. The controller controls FSM to correct the beam pointing deviation according to the position deviation signal of CCD camera. The system uses a beam splitter to separate the beam for detection, obtains the spot information (x, y, α, β) through cameras with different focal length lenses, and adjusts FSM to change the spatial position of the beam to achieve active compensation.

[0052] The traditional control method fixes the position of one FSM spot according to the fixed point position of the spot, and rotates another FSM to eliminate the error, but there is a coupling problem. There is a fixed angle coupling relationship between the change in the reflector angle and the change in the center of mass position of the camera spot, which is approximately linearized. For example, when using the near-field camera NF to eliminate the position error, eliminating the translation error will produce a rotation error; when using the far-field camera FF to eliminate the angle error, eliminating the rotation error will produce a translation error. This coupling problem seriously affects the pointing accuracy, causing beam drift and power instability. It also makes the actuator respond slowly and it is difficult to quickly compensate for the beam offset.

[0053] Figure 1 is a structural schematic diagram of a beam directivity deviation correction system according to an embodiment of the present invention. Figure 1 As shown, the system includes a controller, a fast mirror unit and a camera unit;

[0054] The controller is used to:

[0055] Acquire a light spot centroid position offset signal of the light source beam in the camera unit;

[0056] According to the light spot centroid position offset signal, decoupling control is performed through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit;

[0057] Based on the driving voltage value, each fast reflection mirror in the fast reflection mirror unit is controlled to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

[0058] Furthermore, the controller is the core control component of the entire system, responsible for receiving and processing signals and issuing control instructions. The fast mirror unit is composed of multiple fast mirrors, which adjust the direction of the light beam by rotation. The camera unit is used to detect the spot position of the light beam of the light source and provide feedback signals to the controller.

[0059] The camera unit monitors the spot position of the light beam of the light source. When the light beam has a directional deviation, the center of mass position of the light spot will shift, and the camera unit will transmit this shift signal to the controller. The target coupling matrix reflects the coupling coefficient relationship between the displacement change of the fast mirror unit and the change of the light spot position in the camera unit. For example, when the fast mirror has a slight displacement in a certain direction, it will cause the light spot in the camera unit to change its position in a specific direction and amplitude. This relationship is described by the target coupling matrix. The controller performs decoupling control calculation based on the received light spot center of mass position offset signal and the target coupling matrix to obtain the driving voltage value required by the fast mirror unit. This process is equivalent to inferring how the fast mirror should rotate to correct the light spot position based on the known change of the light spot position and the coupling relationship between the two. After obtaining the driving voltage value, the controller applies the voltage to each fast mirror in the fast mirror unit. After receiving the corresponding driving voltage, each fast mirror will rotate around its own axis. Through this rotation, the fast mirror can change the propagation direction of the light beam, thereby correcting the directional deviation of the light source beam, so that the light beam can propagate in the expected direction.

[0060] In an optional embodiment, the fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, and the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes in the light spot position in the far-field camera FF and the near-field camera NF.

[0061] Furthermore, Figure 1 The lower left and lower right corners are the first fast mirror FSM1 and the second fast mirror FSM2 (FastSteering Mirrors) respectively. These two fast steering mirrors are the core actuators of the system, driven by piezoelectric ceramics to adjust the direction of the laser beam. They can change the spatial position of the beam to correct the directional deviation of the beam. Figure 1 There are three CCD cameras, marked as a near-field camera NF, a far-field camera FF, and another unmarked third CCD camera. The near-field camera NF can be located on the left side of the figure, the far-field camera FF can be located on the top of the figure, and the unmarked third CCD camera can be located on the right side of the figure. These CCD cameras are used as detection units to directly detect the laser spot. The near-field camera NF is used to detect the position error (x, y) of the light beam, the far-field camera FF is used to detect the angle error (α, β) of the light beam, and the unmarked third CCD camera is used to directly detect the output of the light beam after adjustment.

[0062] In an optional embodiment, the system further includes a first beam splitter BS1 and a second beam splitter BS2, the first fast reflector FSM1 being configured to rotate around its own X-axis and Z-axis based on the first control instruction of the controller so that the light source beam reaches the center point of the second fast reflector FSM2;

[0063] The second fast reflection mirror FSM2 is used to rotate around its own Y-axis and Z-axis based on the second control instruction of the controller, so as to make the light source beam pass through the center of the first beam splitter BS1.

[0064] Furthermore, the first beam splitter BS1 and the second beam splitter BS2 (Beam Splitters) are beam splitters used to split the light beam into two. The first beam splitter BS1 separates a small portion of the main beam of the light source beam for the detection system to avoid the detector from affecting the main beam. The second beam splitter BS2 evenly splits the light beam into two beams, which are respectively transmitted to two CCD cameras (i.e., the far-field camera FF and the near-field camera NF).

[0065] Furthermore, the system also includes a reflector, which can be located at Figure 1 The lower left corner, close to the first fast reflection mirror FSM1, is used to reflect the laser beam and assist in the adjustment and detection of the light source beam.

[0066] Furthermore, the system also includes a laser, which can be located at Figure 1 The far left side serves as a light source or image acquisition device, which is used to emit light from the light source or capture the reflected light. The light beam emitted by the laser is reflected by the reflector, and then adjusted by the first fast mirror FSM1 and the second fast mirror FSM2. The first beam splitter BS1 separates a small part of the light beam to the detection system, and the second beam splitter BS2 evenly divides the light beam into two beams, which are respectively transmitted to the near-field camera NF and the far-field camera FF. The controller of the system obtains the posture after FSM correction (near-field camera NF and far-field camera FF) based on the position deviation signals of the two CCD cameras (near-field camera NF and far-field camera FF). By adjusting the near-field camera NF and the far-field camera FF, the spatial position of the light beam is changed, and the near-field camera NF and the far-field camera FF are continuously adjusted using the light spot position offset detected by the camera, so as to realize active compensation of the laser beam. In other words, Figure 1 As shown, Figure 1 The black line in the figure represents the original beam, which has four deflection angles (x, y, α, β). The beam deviates from the center of the near-field camera NF and the far-field camera FF. Figure 1The p in it represents each point of the original light beam on the propagation path, L represents the unit vector of the light beam, L' is the unit vector of the corrected light beam, n represents the normal vector, n' is the corrected normal vector, O represents each point of the corrected light beam path, and e represents the deviation-related quantity. After the controller obtains the position offset signal of the center of mass of the light spot from the near-field camera NF and the far-field camera FF, it controls the two FSMs to rotate to correct the directivity deviation of the light beam. The first fast mirror FSM1 rotates around its own X-axis and Z-axis to ensure that the light beam reaches the center point of the second fast mirror FSM2, thereby eliminating the displacement deviation of the light beam. The second fast mirror FSM2 rotates around its own Y-axis and Z-axis to ensure that the light beam passes through the center of the first beam splitter BS1, thereby eliminating the angular deviation of the light beam. The corrected light beam has no directivity deviation and returns to the center of the near-field camera NF and the far-field camera FF. At the same time, the light beam leaving the system has no directivity deviation. Figure 1 The red dashed line in the figure represents the corrected beam path.

[0067] According to an embodiment of the present invention, an embodiment of a method for correcting a beam directivity deviation is provided. It should be noted that the steps shown in the flowchart of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and although a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0068] In this embodiment, a method for correcting beam directivity deviation is provided, which can be used Figure 1 In the controller of a beam directivity deviation correction system shown, the system also includes a fast mirror unit and a camera unit, Figure 2 is a flow chart of a method for correcting beam directivity deviation according to an embodiment of the present invention. Figure 2 As shown, the process includes the following steps:

[0069] Step S201, obtaining a light spot centroid position offset signal of a light source beam in the camera unit.

[0070] Furthermore, the present embodiment first obtains information about the beam position from the camera unit (including the near-field camera NF and the far-field camera FF). These cameras are used to capture the spot image of the beam after it passes through the internal optical system of the laser. By analyzing these images, the centroid position of the spot can be determined and compared with the ideal position to obtain a position offset signal of the centroid of the spot. The position offset signal is the basis of the subsequent control process and indicates the current state of the beam directivity deviation.

[0071] Step S202, performing decoupling control through a target coupling matrix according to the light spot centroid position offset signal to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit.

[0072] Furthermore, this embodiment uses a pre-built target coupling matrix that describes the coupling relationship between the displacement change of the fast mirror unit (FSM1 and FSM2) and the change of the spot position in the camera unit. By inputting the position offset signal of the center of mass of the spot into this coupling matrix, the system can calculate the driving voltage value that needs to be applied to the fast mirror to achieve the correction of the beam directivity deviation. This process is called decoupling control, and its purpose is to independently control each fast mirror to eliminate specific deviations without causing other deviations.

[0073] Step S203 , based on the driving voltage value, controlling each fast mirror in the fast mirror unit to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

[0074] Furthermore, in the last step, according to the driving voltage value calculated in step S202, the controller of this embodiment sends a command to the quick mirror unit to rotate the quick mirror around its axis. These rotations adjust the direction of the light beam to reduce or eliminate the offset of the center of mass position of the light spot, thereby achieving the purpose of correcting the deviation of the directivity of the light beam. By accurately controlling the rotation of the quick mirror, this embodiment can achieve precise adjustment of the light beam pointing and improve the performance and stability of the laser.

[0075] In summary, this embodiment successfully eliminates the coupling relationship of the change in the centroid of the light spot in the camera caused by the angle change of the reflector in the horizontal and pitch directions by introducing the target coupling matrix, avoiding the problem of causing another type of error to increase when adjusting a certain type of error, thereby achieving more independent and precise control. This embodiment is based on the proportional-integral (PI) control strategy of the decoupling matrix. Through the use of the decoupling matrix, it is possible to break the coupling relationship between such errors, and process the complex coupling relationship through matrix operations, so that the adjustment of the position error and the angle error can be performed relatively independently, thereby avoiding the problem of causing another type of error to increase when adjusting a single type of error, and effectively improving the pointing accuracy of the light beam.

[0076] The PI control strategy based on the decoupling matrix in this embodiment also adopts a more efficient control method. By using a predetermined decoupling matrix, the power supply voltage required by the piezoelectric FSM (fast reflector) can be quickly calculated through a single matrix operation, which greatly simplifies the control process, reduces the amount of calculation and operation steps, makes the control method more concise and direct, and can quickly adjust the beam deviation, thereby improving the control efficiency and response speed of the system. In actual tests, the pointing accuracy of the beam has been significantly improved from the traditional 300 order of magnitude to the 50 order of magnitude, improving the overall performance and stability of the system.

[0077] In this embodiment, another beam directivity deviation correction method is provided, which can be used Figure 1 In the controller of a beam directivity deviation correction system shown, the system also includes a fast mirror unit and a camera unit, Figure 3 FIG. 4 is a flow chart of another method for correcting beam directivity deviation according to an embodiment of the present invention. Figure 3 As shown, the process includes the following steps:

[0078] Step S301, obtaining a light spot centroid position offset signal of a light source beam in the camera unit.

[0079] Furthermore, the camera unit of the present embodiment is used to monitor the position of the light source beam. When the light source beam has a directional deviation, the centroid of the light spot formed on the camera unit will deviate from its ideal position. By imaging the light spot with the camera unit and analyzing the position of the light spot, a light spot centroid position offset signal can be obtained. This signal reflects the degree and direction of the current deviation of the light beam from the correct direction. The light source beam is photographed using the near-field camera NF and the far-field camera FF in the camera unit, and then the offset of the light spot centroid relative to its normal unbiased position is calculated using an image processing algorithm. This offset is the required light spot centroid position offset signal.

[0080] Step S302, obtaining a first corresponding relationship between the displacement variation of each fast mirror in the fast mirror unit and the position offset of the center of mass of the light spot of each camera in the camera unit, and constructing an initial coupling matrix based on the first corresponding relationship.

[0081] In an optional embodiment, the fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, and the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes in the light spot position in the far-field camera FF and the near-field camera NF.

[0082] Furthermore, the displacement change of the fast mirror unit (i.e., the rotation of the fast mirror) will cause the change of the spot position in the camera unit. Through experimental analysis, the correspondence between the displacement change of the fast mirror in different directions and the offset of the center of mass position of the light spot in the camera can be determined. This correspondence can be represented by a matrix (initial coupling matrix), which quantitatively describes how the rotation of the fast mirror affects the spot position. For the first fast mirror FSM1 and the second fast mirror FSM2 in the fast mirror unit, they are respectively subjected to different degrees of displacement operations (rotation), and the offset of the center of mass position of the light spot in the far-field camera FF and the near-field camera NF in the camera unit is observed. Record the displacement change of the fast mirror each time and the corresponding offset of the center of mass position of the light spot, and construct the initial coupling matrix based on these data.

[0083] Furthermore, in the actual adjustment process, this embodiment takes into account the change in the angle of the quick reflex mirror in the horizontal direction and the pitch direction, which causes the change in the centroid of the light spot in the camera. This change is a fixed angle coupling relationship between the position change in the X- and Y-axis directions, so this embodiment approximately linearizes this coupling relationship. In the beam collimation control algorithm, it is assumed that a 4x4 matrix is ​​used to characterize the inherent coupling coefficient relationship between the displacement change of the centroid position of the light spot in the two cameras in the X- and Y-axis directions and the former (i.e., the displacement change of the two quick reflex mirrors in the horizontal direction and the pitch direction) when the two quick reflex mirrors are displaced in the horizontal direction and the pitch direction. The coupling relationship is specifically characterized by the following formula, that is, the above-mentioned first corresponding relationship can be expressed as:

[0084]

[0085] Where, ΔC CCDX1 , ΔC CCDY1 They represent the X-axis and Y-axis offsets of the light spot centroid position of the near-field camera NF (i.e., the deviation between the light spot centroid coordinates and the reference position coordinates), ΔC CCDX2， ΔC CCDY2 They represent the offset of the centroid position of the light spot of the far-field camera FF on the X-axis and the Y-axis respectively; A is the initial coupling matrix mentioned above, A 11 To A 44 are the elements in the initial coupling matrix respectively.

[0086] Step S303 , obtaining a second corresponding relationship between the driving voltage variation of the quick mirror unit and the displacement variation of each quick mirror in the quick mirror unit, and constructing a conversion matrix based on the second corresponding relationship.

[0087] Furthermore, the quick reflex mirror of this embodiment realizes displacement (rotation) by applying a driving voltage. The change of the driving voltage will cause the quick reflex mirror to produce a corresponding displacement change. The relationship between the driving voltage change and the quick reflex mirror displacement change can be determined through experimental measurement, and this relationship can be represented by a conversion matrix. This embodiment applies different magnitudes of driving voltage changes to each quick reflex mirror in the quick reflex mirror unit, measures and records the corresponding displacement change of each quick reflex mirror, and constructs a conversion matrix based on these data, which indicates how the driving voltage is converted into the actual displacement of the quick reflex mirror.

[0088] Furthermore, the core of the beam collimation control of this embodiment is to calculate in real time the driving voltage value required for the far-field camera FF and the near-field camera NF at the next moment based on the deviation value (i.e., the center of mass position offset of the laser spot) between the current moment measured in the far-field camera FF and the near-field camera NF. Among them, there is a certain inherent nonlinear hysteresis effect between the output displacement of the piezoelectric actuator and the driving voltage value. In this embodiment, the conversion relationship between the displacement change of each fast mirror and the driving voltage value is expressed by the following formula, that is, the above-mentioned second corresponding relationship can be expressed as:

[0089]

[0090] Wherein, ΔX1 and ΔY1 represent the displacement change of the first fast reflex mirror FSM1 on the X axis and the displacement change of the Y axis respectively, ΔX2 and ΔY2 represent the displacement change of the second fast reflex mirror FSM2 on the X axis and the displacement change of the Y axis respectively, and ΔU x1 , ΔU Y1 represent the driving voltage variation of the first fast mirror FSM1 on the X axis and the driving voltage variation on the Y axis, ΔU x2 , ΔU Y2 They respectively represent the driving voltage variation of the second fast mirror FSM2 on the X-axis and the driving voltage variation on the Y-axis; K is a conversion matrix between the driving voltage variation and the displacement variation of the fast mirror unit.

[0091] Step S304 , multiplying the target coupling matrix and the conversion matrix to obtain a target coupling matrix, and performing decoupling processing on the target coupling matrix to obtain a driving voltage value of the fast mirror unit.

[0092] In an optional implementation, step S304 includes:

[0093] Applying preset driving voltage values ​​from small to large to the X-axis and Y-axis of each fast mirror in the fast mirror unit respectively, and recording the centroid position offset of the light spot corresponding to each camera in the camera unit to generate a linear equation group corresponding to the target coupling matrix;

[0094] Solving the linear equations to obtain the values ​​of each element of the target coupling matrix;

[0095] Based on the values ​​of each element of the target coupling matrix and combined with PI regulation control, the driving voltage value of the fast mirror unit at the next moment is calculated in real time according to the centroid position offset of the light spot corresponding to each camera in the camera unit at the current moment.

[0096] Further, the target coupling matrix reflects the relationship between the change in displacement of the quick mirror and the change in the position of the camera spot, and the conversion matrix reflects the relationship between the change in the driving voltage and the change in displacement of the quick mirror. By multiplying these two matrices, a new target coupling matrix can be obtained, which directly relates the driving voltage to the change in the position of the camera spot. The decoupling process of this target coupling matrix is ​​to find out the driving voltage value required to return the spot to the correct position. In this embodiment, preset driving voltage values ​​from small to large are applied to the X-axis and Y-axis of each quick mirror in the quick mirror unit, and the centroid position offset of the spot corresponding to each camera in the camera unit is recorded at the same time. Since there is a linear relationship between the driving voltage of the quick mirror and the spot position offset (through the matrix relationship constructed previously), these data can constitute a linear equation group corresponding to the target coupling matrix. In this embodiment, a mathematical method (such as matrix inversion) is used to solve the linear equation group to obtain the values ​​of each element of the target coupling matrix. Based on the values ​​of each element of the target coupling matrix, combined with PI adjustment control. According to the centroid position offset of the spot corresponding to each camera in the camera unit at the current moment, the driving voltage value of the quick mirror unit at the next moment is calculated in real time using the PI control algorithm. The PI control algorithm can adjust the driving voltage according to the current deviation (spot position offset) and the rate of change of the deviation to quickly and accurately correct the beam directivity deviation.

[0097] Furthermore, since the conversion matrix K, the coordinates of the center of mass position of the light spot measured in the camera unit and the initial coupling matrix A are all constants, B=AK is recorded, that is, the target coupling matrix and the conversion matrix are multiplied to obtain the target coupling matrix B.

[0098]

[0099] Right now:

[0100]

[0101] The relationship derived from the above formula is based on the deviation of the center of mass position of the light spot in the near-field camera NF and the far-field camera FF measured at the current moment and the calibrated position in the X and Y axis directions (that is, the offset of the center of mass position of the light spot of each camera in the camera unit), and the target coupling matrix B. The change in the driving voltage that needs to be applied to the two fast mirrors in the X and Y axis directions at the next moment can be calculated, and then the light beam can be adjusted to point to the target point.

[0102] Among them, the values ​​of each element in the target coupling matrix B (i.e., B 11 To B 44 ), are all related to the focal length of the lens, the distance size in the optical path, and the FSM response model; that is, when the target coupling matrix B does not change under the experimental conditions, the values ​​of the elements in the target coupling matrix B do not change. Therefore, if the target coupling matrix B can be accurately obtained, the power supply voltage U of the two fast mirror units on the X axis can be accurately and quickly obtained. x , supply voltage U on the Y axis y , thereby achieving the correction of the light source beam.

[0103] When solving for the target coupling matrix B, see Figure 4 The flowchart of solving the target coupling matrix based on the system calibration method is shown in the figure. The values ​​of each element in the target coupling matrix are calibrated to control the beam collimation. The preset driving voltage values ​​from small to large are applied to the X-axis and Y-axis of the two fast mirrors respectively, and the centroid position offset of the spot in the near-field camera NF and the far-field camera FF (i.e., ΔC CCDX1 , ΔC CCDY1 , ΔC CCDX2 , ΔC CCDY2 ).

[0104] According to the following formula, when only the preset driving voltage value (ie, ΔU x1 ), other ΔU Y1 , ΔU x2 , ΔU Y2 When both are 0, we can get:

[0105]

[0106] Through the above formula, we can get a quaternary linear equation, which can be solved by continuously changing ΔU x1 , and obtain the remaining three quaternary linear equations, and then obtain the first row of four elements B in the target coupling matrix B according to each quaternary linear equation 11 , B 12 , B 13 , B 14; Similarly, the same method can be used to solve the values ​​of the elements in other columns in turn, and then complete the calibration of the values ​​of each element in the target coupling matrix B, obtain the decoupling matrix, and thus achieve the decoupling goal.

[0107] In actual control, this embodiment calculates the driving voltage values ​​to be applied to each fast mirror in the X and Y axis directions at the next moment according to the centroid position offset of the light spot in the near-field camera NF and the far-field camera FF at the current moment, so that the light beam pointing continuously approaches the spatial position of the target point.

[0108] This embodiment also applies proportional-integral (PI) control to the collimation control algorithm to improve the dynamic response characteristics and steady-state control accuracy of the control system. The driving voltage value applied to the dual-axis of the piezoelectric fast mirror after the kth closed-loop cycle can be calculated in real time according to the following formula, as shown in the following formula:

[0109]

[0110] Among them, K p is the proportional coefficient in the PI controller, K i is the integral coefficient in the PI controller, ΔC CCDX1 (k), ΔC CCDY1 (k), ΔC CCDX2 (k), ΔC CCDY2 (k) are the centroid position offsets of the near-field camera NF and the far-field camera FF in the kth sampling period, ΔC CCDX1 (k-1), ΔC CCDY1 (k-1), ΔC CCDX2 (k-1), ΔC CCDY2 (k-1) are the centroid position offsets of the light spots corresponding to the near-field camera NF and the far-field camera FF in the (k-1)th sampling period.

[0111] Step S305, based on the first driving voltage value, controlling the first fast mirror FSM1 to rotate around its own X-axis and Z-axis so that the light source light beam reaches the center point of the second fast mirror FSM2, and based on the second driving voltage value, controlling the second fast mirror FSM2 to rotate around its own Y-axis and Z-axis so that the light source light beam passes through the center of the first beam splitter BS1.

[0112] Furthermore, in this embodiment, the first driving voltage value and the second driving voltage value calculated by the previous steps can respectively control the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 to rotate. By reasonably adjusting the rotation angle of the fast reflex mirror, the light source beam can be propagated along a predetermined path, and finally the directivity deviation of the light beam can be corrected. The first driving voltage value is applied to the first fast reflex mirror FSM1 to rotate it around its own X-axis and Z-axis, and the direction of the light beam is adjusted so that the light source beam can accurately reach the center point of the second fast reflex mirror FSM2. Then, the second driving voltage value is applied to the second fast reflex mirror FSM2 to rotate it around its own Y-axis and Z-axis, and the direction of the light beam is further adjusted so that the light source beam can pass through the center of the first beam splitter BS1, thereby achieving the correction of the directivity deviation of the light beam.

[0113] In summary, this embodiment successfully eliminates the coupling relationship of the change in the centroid of the light spot in the camera caused by the angle change of the reflector in the horizontal and pitch directions by introducing the target coupling matrix, avoiding the problem of causing another type of error to increase when adjusting a certain type of error, thereby achieving more independent and precise control. This embodiment is based on the proportional-integral (PI) control strategy of the decoupling matrix. Through the use of the decoupling matrix, it is possible to break the coupling relationship between such errors, and process the complex coupling relationship through matrix operations, so that the adjustment of the position error and the angle error can be performed relatively independently, thereby avoiding the problem of causing another type of error to increase when adjusting a single type of error, and effectively improving the pointing accuracy of the light beam.

[0114] The PI control strategy based on the decoupling matrix in this embodiment also adopts a more efficient control method. By using a predetermined decoupling matrix, the power supply voltage required by the piezoelectric FSM (fast reflector) can be quickly calculated through a single matrix operation, which greatly simplifies the control process, reduces the amount of calculation and operation steps, makes the control method more concise and direct, and can quickly adjust the beam deviation, thereby improving the control efficiency and response speed of the system. In actual tests, the pointing accuracy of the beam has been significantly improved from the traditional 300 order of magnitude to the 50 order of magnitude, improving the overall performance and stability of the system.

[0115] In this embodiment, a beam directivity deviation correction device is also provided, which is used to implement the above-mentioned embodiments and preferred implementation modes, and the descriptions that have been made will not be repeated. As used below, the term "module" can be a combination of software and / or hardware that implements a predetermined function. Although the devices described in the following embodiments are preferably implemented in software, the implementation of hardware, or a combination of software and hardware, is also possible and conceivable.

[0116] This embodiment provides a device for correcting beam directivity deviation, which is applied to Figure 1In the controller of a beam directivity deviation correction system shown in FIG. 1 , the system further includes a fast mirror unit and a camera unit; Figure 5 As shown, including:

[0117] A light spot centroid position offset signal acquisition module 501 is used to acquire a light spot centroid position offset signal of the light source beam in the camera unit;

[0118] A driving voltage value acquisition module 502 is used to perform decoupling control according to the light spot centroid position offset signal through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit;

[0119] The directivity deviation correction module 503 is used to control each fast mirror in the fast mirror unit to rotate around its own axis based on the driving voltage value, so as to correct the directivity deviation of the light beam of the light source.

[0120] In some optional embodiments, the fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, and the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes in the light spot position in the far-field camera FF and the near-field camera NF.

[0121] In some optional embodiments, the system further includes a first beam splitter BS1, and the directivity deviation correction module 503 is further used for:

[0122] Based on the first driving voltage value, the first fast mirror FSM1 is controlled to rotate around its own X-axis and Z-axis so that the light source light beam reaches the center point of the second fast mirror FSM2, and based on the second driving voltage value, the second fast mirror FSM2 is controlled to rotate around its own Y-axis and Z-axis so that the light source light beam passes through the center of the first beam splitter BS1.

[0123] In some optional implementations, the driving voltage value acquisition module 502 is further used to:

[0124] Based on the first corresponding relationship, construct an initial coupling matrix;

[0125] Acquire a second corresponding relationship between a change in the driving voltage of the quick reflection mirror unit and a change in the displacement of each quick reflection mirror in the quick reflection mirror unit;

[0126] Based on the second corresponding relationship, construct a transformation matrix;

[0127] The target coupling matrix is ​​multiplied by the conversion matrix to obtain a target coupling matrix;

[0128] The target coupling matrix is ​​decoupled to obtain a driving voltage value of the fast mirror unit.

[0129] In some optional implementations, preset driving voltage values ​​from small to large are applied to the X-axis and Y-axis of each fast mirror in the fast mirror unit, and the light spot centroid position offset corresponding to each camera in the camera unit is recorded to generate a linear equation group corresponding to the target coupling matrix;

[0130] Solving the linear equations to obtain the values ​​of each element of the target coupling matrix;

[0131] Based on the values ​​of each element of the target coupling matrix and combined with PI regulation control, the driving voltage value of the fast mirror unit at the next moment is calculated in real time according to the centroid position offset of the light spot corresponding to each camera in the camera unit at the current moment.

[0132] The further functional description of each of the above modules and units is the same as that of the above corresponding embodiments and will not be repeated here.

[0133] The XXX device in this embodiment is presented in the form of a functional unit, where the unit refers to an ASIC (Application Specific Integrated Circuit) circuit, a processor and memory that executes one or more software or fixed programs, and / or other devices that can provide the above functions.

[0134] In summary, this embodiment successfully eliminates the coupling relationship of the change in the centroid of the light spot in the camera caused by the angle change of the reflector in the horizontal and pitch directions by introducing the target coupling matrix, avoiding the problem of causing another type of error to increase when adjusting a certain type of error, thereby achieving more independent and precise control. This embodiment is based on the proportional-integral (PI) control strategy of the decoupling matrix. Through the use of the decoupling matrix, it is possible to break the coupling relationship between such errors, and process the complex coupling relationship through matrix operations, so that the adjustment of the position error and the angle error can be performed relatively independently, thereby avoiding the problem of causing another type of error to increase when adjusting a single type of error, and effectively improving the pointing accuracy of the light beam.

[0135] The PI control strategy based on the decoupling matrix in this embodiment also adopts a more efficient control method. By using a predetermined decoupling matrix, the power supply voltage required by the piezoelectric FSM (fast reflector) can be quickly calculated through a single matrix operation, which greatly simplifies the control process, reduces the amount of calculation and operation steps, makes the control method more concise and direct, and can quickly adjust the beam deviation, thereby improving the control efficiency and response speed of the system. In actual tests, the pointing accuracy of the beam has been significantly improved from the traditional 300 order of magnitude to the 50 order of magnitude, improving the overall performance and stability of the system.

[0136] The embodiment of the present invention also provides a computer device, see Figure 6 , Figure 6 is a schematic diagram of the structure of a computer device provided by an optional embodiment of the present invention, such as Figure 6 As shown, the computer device includes: one or more processors 10, a memory 20, and interfaces for connecting various components, including high-speed interfaces and low-speed interfaces. Various components are connected to each other using different buses for communication, and can be installed on a common mainboard or installed in other ways as needed. The processor can process the instructions executed in the computer device, including instructions stored in or on the memory to display the graphical information of the GUI on an external input / output device (such as, a display device coupled to the interface). In some optional embodiments, if necessary, multiple processors and / or multiple buses can be used together with multiple memories and multiple memories. Similarly, multiple computer devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Figure 6 A processor 10 is taken as an example.

[0137] The processor 10 may be a central processing unit, a network processor or a combination thereof. The processor 10 may further include a hardware chip. The hardware chip may be a dedicated integrated circuit, a programmable logic device or a combination thereof. The programmable logic device may be a complex programmable logic device, a field programmable gate array, a general purpose array logic or any combination thereof.

[0138] The memory 20 stores instructions executable by at least one processor 10, so that at least one processor 10 executes the method shown in the above embodiment.

[0139] The memory 20 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the computer device, etc. In addition, the memory 20 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some optional embodiments, the memory 20 may optionally include a memory remotely arranged relative to the processor 10, and these remote memories may be connected to the computer device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0140] The memory 20 may include a volatile memory, such as a random access memory; the memory may also include a non-volatile memory, such as a flash memory, a hard disk or a solid state drive; the memory 20 may also include a combination of the above types of memory.

[0141] The computer device further comprises a communication interface 30 for the computer device to communicate with other devices or a communication network.

[0142] The embodiment of the present invention also provides a computer-readable storage medium. The method according to the embodiment of the present invention can be implemented in hardware, firmware, or can be implemented as a computer code that can be recorded in a storage medium, or can be implemented as a computer code that is originally stored in a remote storage medium or a non-temporary machine-readable storage medium and will be stored in a local storage medium through a network download, so that the method described herein can be stored in such software processing on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. Among them, the storage medium can be a magnetic disk, an optical disk, a read-only storage memory, a random access memory, a flash memory, a hard disk or a solid-state hard disk, etc.; further, the storage medium can also include a combination of the above types of memories. It can be understood that a computer, a processor, a microprocessor controller, or programmable hardware includes a storage component that can store or receive software or computer code. When the software or computer code is accessed and executed by a computer, a processor, or hardware, the method shown in the above embodiment is implemented.

[0143] A part of the present invention may be applied as a computer program product, such as a computer program instruction, which, when executed by a computer, can call or provide the method and / or technical solution according to the present invention through the operation of the computer. Those skilled in the art should understand that the existence of the computer program instruction in a computer-readable medium includes, but is not limited to, a source file, an executable file, an installation package file, etc., and accordingly, the way in which the computer program instruction is executed by the computer includes, but is not limited to: the computer directly executes the instruction, or the computer compiles the instruction and then executes the corresponding compiled program, or the computer reads and executes the instruction, or the computer reads and installs the instruction and then executes the corresponding installed program. Here, the computer-readable medium may be any available computer-readable storage medium or communication medium accessible to the computer.

[0144] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the defined scope.

Claims

1. A method for correcting beam directivity deviation, characterized in that: The method is applied to a controller of a beam directivity deviation correction system, wherein the system further comprises a fast mirror unit and a camera unit; the method comprises: Acquire a light spot centroid position offset signal of the light source beam in the camera unit; According to the light spot centroid position offset signal, decoupling control is performed through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the light spot position change in the camera unit; Based on the driving voltage value, each fast mirror in the fast mirror unit is controlled to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

2. The method according to claim 1, characterized in that The fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; The target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes of the light spot positions in the far-field camera FF and the near-field camera NF.

3. The method according to claim 2, characterized in that The system further includes a first beam splitter BS1, and the control of each fast mirror in the fast mirror unit to rotate around its own axis based on the driving voltage value includes: Based on the first driving voltage value, the first fast mirror FSM1 is controlled to rotate around its own X-axis and Z-axis so that the light source light beam reaches the center point of the second fast mirror FSM2, and based on the second driving voltage value, the second fast mirror FSM2 is controlled to rotate around its own Y-axis and Z-axis so that the light source light beam passes through the center of the first beam splitter BS1.

4. The method according to any one of claims 1 to 3, characterized in that: The step of performing decoupling control according to the light spot centroid position offset signal through a target coupling matrix to obtain a driving voltage value of the fast mirror unit includes: Acquire a first corresponding relationship between a displacement change of each fast mirror in the fast mirror unit and an offset of a center of mass of a light spot of each camera in the camera unit; Based on the first corresponding relationship, construct an initial coupling matrix; Acquire a second corresponding relationship between a change in the driving voltage of the quick reflection mirror unit and a change in the displacement of each quick reflection mirror in the quick reflection mirror unit; Based on the second corresponding relationship, construct a conversion matrix; Multiplying the target coupling matrix by the conversion matrix to obtain a target coupling matrix; The target coupling matrix is ​​decoupled to obtain a driving voltage value of the fast mirror unit.

5. The method according to claim 4, characterized in that The decoupling process is performed on the target coupling matrix to obtain the driving voltage value of the fast mirror unit, including: Applying preset driving voltage values ​​from small to large to the X-axis and Y-axis of each fast mirror in the fast mirror unit respectively, and recording the centroid position offset of the light spot corresponding to each camera in the camera unit to generate a linear equation group corresponding to the target coupling matrix; Solving the linear equations to obtain the values ​​of each element of the target coupling matrix; Based on the values ​​of each element of the target coupling matrix, combined with PI adjustment control, the driving voltage value of the fast mirror unit at the next moment is calculated in real time according to the centroid position offset of the light spot corresponding to each camera in the camera unit at the current moment.

6. A beam directivity deviation correction system, characterized in that: The system includes a controller, a fast mirror unit and a camera unit; The controller is used to: Acquire a light spot centroid position offset signal of the light source beam in the camera unit; According to the light spot centroid position offset signal, decoupling control is performed through a target coupling matrix to obtain a driving voltage value of the fast mirror unit; The target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement change of the fast mirror unit and the change of the light spot position in the camera unit; Based on the driving voltage value, each fast mirror in the fast mirror unit is controlled to rotate around its own axis to correct the directivity deviation of the light beam of the light source.

7. The system according to claim 6, characterized in that The fast reflex mirror unit includes a first fast reflex mirror FSM1 and a second fast reflex mirror FSM2, the camera unit includes a far-field camera FF and a near-field camera NF; the driving voltage value includes a first driving voltage value of the first fast reflex mirror FSM1 and a second driving voltage value of the second fast reflex mirror FSM2; The target coupling matrix is ​​used to indicate the coupling coefficient relationship between the displacement changes of the first fast reflex mirror FSM1 and the second fast reflex mirror FSM2 in the horizontal direction and the pitch direction and the changes of the light spot positions in the far-field camera FF and the near-field camera NF.

8. The system according to claim 7, characterized in that The system further comprises a first beam splitter BS1, the first fast reflection mirror FSM1 being configured to rotate around its own X-axis and Z-axis based on a first control instruction of the controller so that the light source beam reaches the center point of the second fast reflection mirror FSM2; The second fast mirror FSM2 is used to rotate around its own Y-axis and Z-axis based on the second control instruction of the controller, so that the light source light beam passes through the center of the first beam splitter BS1.

9. A beam directivity deviation correction device, characterized in that: The device is applied to a controller of a beam directivity deviation correction system, the system further comprising a fast mirror unit and a camera unit; the device comprises: A light spot centroid position offset signal acquisition module, used to acquire a light spot centroid position offset signal of the light source beam in the camera unit; A driving voltage value acquisition module, used to perform decoupling control through a target coupling matrix according to the light spot centroid position offset signal to obtain a driving voltage value of the fast mirror unit; the target coupling matrix is ​​used to indicate a coupling coefficient relationship between a displacement change of the fast mirror unit and a light spot position change in the camera unit; The directivity deviation correction module is used to control each fast mirror in the fast mirror unit to rotate around its own axis based on the driving voltage value, so as to correct the directivity deviation of the light beam of the light source.

10. A computer device, characterized in that: include: A memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes a method for correcting a beam directivity deviation as described in any one of claims 1 to 5 by executing the computer instructions.

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