SIC uniform processing device and processing method thereof

Abstract

The invention discloses an SIC uniform machining device which comprises a rotating platform, an adsorption assembly is arranged on the rotating platform, a machined product is connected to the adsorption assembly in an adsorption mode, the adsorption assembly and the rotating platform rotate synchronously, a grinding wheel assembly is arranged on the adsorption assembly, and the grinding wheel assembly abuts against the machined product. The rotating platform drives the machined product to rotate, and the grinding wheel assembly rotates to grind the machined product, so that the machined product can achieve the uniform grinding effect in the machining process. Through the adsorption effect of the adsorption assembly, mechanical connection of the machined product is avoided, and therefore damage to the machined product is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing, and in particular to a SIC uniform processing device and a processing method thereof. Background Art

[0002] In the semiconductor chip industry, semiconductor process equipment has an extremely important strategic position. Precision ceramic components are the core components of chip process equipment and are widely used in vapor deposition equipment and etching equipment. With the reduction of chip feature size and the gradual increase of halogen plasma energy, higher requirements are placed on the performance and product precision of ceramics. For example, high-purity alumina (Al2O3) ceramic materials can no longer meet the requirements of electrostatic chucks for silicon carbide wafer processing. Therefore, it is urgent to develop SIC precision ceramic products with stable chemical properties, high thermal conductivity, small thermal expansion coefficient and good wear resistance as substitutes.

[0003] Compared with alumina ceramics, SIC materials have better wear resistance, so the processing is relatively more difficult and the production cost is higher. The thickness uniformity of SIC material products using traditional processing technology can reach ±0.02 mm, but in actual applications, SIC products with higher uniformity are required in specific usage scenarios. Summary of the invention

[0004] In view of the problem mentioned in the background technology that the SIC uniformity of the prior art cannot meet higher requirements, the present invention provides a SIC uniform processing device, which can perform a more uniform grinding operation on the surface of the processed product, thereby improving the surface uniformity of the processed product during the processing while ensuring the processing efficiency.

[0005] To achieve the above objectives, the present invention adopts the following technical solutions.

[0006] A SIC uniform processing device includes a rotating platform, an adsorption component is arranged on the rotating platform, the adsorption component adsorbs and connects the processed product, the adsorption component rotates synchronously with the rotating platform, and a grinding wheel component is arranged on the adsorption component, and the grinding wheel component abuts the processed product. The processed product is driven to rotate by the rotating platform, and the processed product is ground by the rotation of the grinding wheel component, so that the processed product can have a uniform grinding effect during the processing. The adsorption effect of the adsorption component avoids mechanical connection of the processed product, thereby reducing damage to the processed product.

[0007] Preferably, the adsorption component includes a vacuum cavity, the vacuum cavity includes a vacuum chamber, and the vacuum chamber is connected to an air pipe unit. By connecting the vacuum chamber to the air pipe unit, a negative pressure environment can be formed inside the vacuum chamber to produce an adsorption effect on the processed product, thereby ensuring the connection stability between the components to be adsorbed of the processed product.

[0008] Preferably, the air pipe unit comprises an air pipe body, the air pipe body is connected to a rotating joint on the side close to the vacuum chamber, a connecting airway is arranged in the rotating joint, and the connecting airway connects the air pipe body and the vacuum chamber. The rotating joint can avoid synchronously driving the air pipe body to rotate during the rotation of the vacuum chamber driven by the rotating platform, so that the state of the air pipe body can be separated from the state of the vacuum chamber.

[0009] Preferably, the vacuum chamber comprises a suction cup lower part and a suction cup upper part, the suction cup lower part is connected to the rotating platform, a vacuum chamber is formed between the suction cup lower part and the suction cup upper part, and a sealing member is provided between the suction cup upper part and the suction cup lower part. By providing a sealing member between the suction cup upper part and the suction cup lower part, the sealing performance can be improved to ensure the adsorption effect on the processed product.

[0010] Preferably, the adsorption assembly is connected with a positioning ring, which abuts against the processed product in the radial direction. The positioning ring provided on the adsorption assembly can limit the radial position of the processed product, thereby avoiding displacement of the processed product due to the force generated by the grinding wheel assembly during the grinding process.

[0011] Preferably, the adsorption component is provided with a plurality of through holes, and the through holes are in contact with the processed product. By providing a plurality of through holes, a uniform adsorption effect on the processed product can be ensured.

[0012] Preferably, the through hole axis is tilted toward the side away from the axis of the rotating platform. The through hole is tilted so that after processing is completed, airflow toward the outside can be generated when the processed product is opened by reverse inflation, thereby blowing away the processing dust toward the outside and ensuring the cleanliness of the processing platform.

[0013] Preferably, a slide rail is provided on the adsorption assembly, a positioning column is slidably connected to the slide rail, the positioning column extends toward the axial direction of the rotating platform, and a limit block is detachably connected to the slide rail. The positioning column ensures that the processed product can be stabilized in one position after being opened, avoiding radial deviation, facilitating the staff to take it, and maintaining the stability of the airflow; further, when the positioning column loses the constraint of the limit block, centrifugal movement can be generated through the rotation of the rotating platform, thereby ensuring stable contact with the processed product.

[0014] A processing method comprises the following steps: S1. Place the processed product on the adsorption component; S2, the adsorption component positively absorbs air, generates negative pressure in the vacuum chamber, and adsorbs the processed products; S3, start the grinding wheel assembly and the rotating platform, and the grinding wheel assembly abuts against the processed product to perform processing.

[0015] Preferably, after the processing in step S3 is completed, the grinding wheel assembly is removed, the limit block on the positioning column is released, the rotating platform keeps rotating, the adsorption assembly exhausts air in the reverse direction, the processed product is lifted up, and the grinding powder is blown away toward the side away from the axis of the rotating platform. The rotating platform is kept rotating, so that the grinding powder and the positioning column can both generate centrifugal motion, and the airflow generated by the reverse inflation can ensure that the grinding powder moves outward and the neatness is ensured.

[0016] The beneficial effects of the present invention are as follows: (1) It is possible to grind the surface of the processed product more evenly, thereby improving the surface uniformity of the processed product during the processing while ensuring the processing efficiency; (2) It can reduce the residual grinding powder on the processing platform, ensure cleanliness, and facilitate the removal of processed products, thereby improving processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is an axonometric view of the present invention.

[0018] Figure 2 yes Figure 1 Cross-sectional view of the adsorption assembly.

[0019] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0020] Figure 4 yes Figure 2 A partial enlarged view of point B in the middle.

[0021] Figure 5 It is a partial axonometric view of the present invention.

[0022] Figure 6 It is a structural schematic diagram of Example 2.

[0023] Figure 7 This is a flow chart of Example 3.

[0024] Figure 8 It is a structural schematic diagram of Example 3.

[0025] In the figure: 1 Rotating platform; 2 adsorption assembly, 21 vacuum chamber, 211 suction cup lower part, 212 suction cup upper part, 22 vacuum chamber, 23 air pipe unit, 231 air pipe body, 232 rotary joint, 233 connecting airway, 24 through hole, 25 slide rail, 26 positioning column, 27 limit block, 28 sealing part; 3. Processed products; 4 grinding wheel assembly; 5. Positioning ring. DETAILED DESCRIPTION

[0026] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] Embodiment 1: like Figure 1 As shown, a SIC uniform processing device includes a rotating platform 1, an adsorption component 2 is arranged on the rotating platform 1, and a processing product 3 is adsorbed and connected to the adsorption component 2. The adsorption component 2 rotates synchronously with the rotating platform 1, and a grinding wheel component 4 is arranged on the adsorption component 2, and the grinding wheel component 4 abuts against the processing product 3. The processing product 3 is driven to rotate by the rotating platform 1, and the processing product 3 is ground by the rotation of the grinding wheel component 4, so that the processing product 3 can be ground uniformly during the processing. Through the adsorption effect of the adsorption component 2, mechanical connection of the processing product 3 is avoided, thereby reducing damage to the processing product 3.

[0028] like Figure 2 As shown, the adsorption component 2 includes a vacuum cavity 21, and the vacuum cavity 21 includes a vacuum chamber 22, and the vacuum chamber 22 is connected to the air pipe unit 23. By connecting the vacuum chamber 22 to the air pipe unit 23, a negative pressure environment can be formed inside the vacuum chamber 22 to produce an adsorption effect on the processed product 3, thereby ensuring the connection stability between the processed product 3 and the adsorption component 2.

[0029] like Figure 2 , 3 As shown, the air pipe unit 23 includes an air pipe body 231, and a rotating joint 232 is connected to the air pipe body 231 near the vacuum chamber 21. A connecting airway 233 is arranged in the rotating joint 232, and the connecting airway 233 connects the air pipe body 231 and the vacuum chamber 22. The rotating joint 232 can avoid synchronously driving the air pipe body 231 to rotate during the rotation of the vacuum chamber 21 driven by the rotating platform 1, so that the state of the air pipe body 231 can be separated from the state of the vacuum chamber 21.

[0030] like Figure 2 , 4 As shown, the vacuum chamber 21 includes a suction cup lower part 211 and a suction cup upper part 212, the suction cup lower part 211 is connected to the rotating platform 1, a vacuum chamber 22 is formed between the suction cup lower part 211 and the suction cup upper part 212, and a sealing member 28 is provided between the suction cup upper part 212 and the suction cup lower part 211. By providing the sealing member 28 between the suction cup upper part 212 and the suction cup lower part 211, the sealing performance can be improved, and the adsorption effect on the processed product 3 can be ensured.

[0031] like Figure 4As shown, a positioning ring 5 is connected to the adsorption component 2, and the positioning ring 5 abuts against the processed product 3 in the radial direction. The positioning ring 5 provided on the adsorption component 2 can limit the radial position of the processed product 3, thereby preventing the processed product 3 from being displaced due to the force generated by the grinding wheel component 4 during the grinding process.

[0032] like Figure 4 , 5 As shown, the adsorption component 2 is provided with a plurality of through holes 24, and the through holes 24 are in contact with the processed product 3. By providing a plurality of through holes 24, it is possible to ensure that the adsorption effect on the processed product 3 is uniform.

[0033] The assembly and working process of a SIC uniform processing device in this embodiment are as follows: In this embodiment, a rotating platform 1 is provided, and the rotating platform 1 is driven to rotate by a motor, wherein in this embodiment, the rotating platform 1 is a disc-shaped structure, and an adsorption component 2 is provided on the rotating platform 1, wherein the adsorption component 2 includes a vacuum cavity 21, and the vacuum cavity 21 is connected to the rotating platform 1. Further, in this embodiment, the vacuum cavity 21 includes a suction cup upper part 212 and a suction cup lower part 211, wherein a vacuum chamber 22 is formed between the suction cup upper part 212 and the suction cup lower part 211, and the suction cup lower part 211 is connected to the rotating platform 1, so that during the working process, the rotating platform 1 can drive the vacuum cavity 21 to rotate synchronously, and the vacuum cavity 21 is connected to the air pipe unit 23, and the air pipe unit 23 is connected to the vacuum chamber 22 inside the vacuum cavity 21, so that the air pressure value inside the vacuum chamber 22 is controlled by connecting the air source through the air pipe unit 23, so that the vacuum negative pressure effect can be achieved.

[0034] In this embodiment, a through hole 24 is provided on the suction cup upper part 212, wherein two groups of through holes 24 are provided in this embodiment, and both through holes 24 are arranged in a ring shape. Furthermore, the two groups of through holes 24 are distributed inside and outside along the radial direction, and the two groups of through holes 24 are staggered, thereby ensuring a stable adsorption effect on the processed product 3, wherein the through hole 24 is connected to the vacuum chamber 22, so that the negative pressure generated in the vacuum chamber 22 can adsorb the processed product 3 through the through hole 24.

[0035] The suction cup upper part 212 and the suction cup lower part 211 are connected by bolts. Furthermore, a sealing groove is provided on the suction cup lower part 211, wherein the sealing groove structure is a dovetail groove structure. A sealing ring is connected in the sealing groove, and the sealing ring abuts against the suction cup upper part 212, thereby ensuring the sealing of the connection between the suction cup upper part 212 and the suction cup lower part 211.

[0036] During the use of the processing device in this embodiment, since the rotating platform 1 will drive the vacuum chamber 21 to rotate, and the vacuum chamber 21 is connected to the air pipe unit 23, the air pipe unit 23 needs to be kept fixed to ensure the stability of the air supply, otherwise it will be twisted into a twisted structure during the rotation process. Therefore, the air pipe unit 23 is divided into an air pipe body 231 and a rotating joint 232. The air pipe body 231 is connected to the air source, and the rotating joint 232 is connected to the air pipe body 231, so that during the operation, the rotating platform 1 only drives the vacuum chamber 21 to move, while ensuring that the position of the air pipe body 231 is fixed.

[0037] A grinding wheel assembly 4 is arranged above the suction cup upper part 212, wherein the grinding wheel assembly 4 rotates during the processing, and the rotation plane is opposite to the rotation plane of the rotating platform 1. Furthermore, in this embodiment, the grinding wheel assembly 4 can be moved, so that the processed product 3 can be placed and taken conveniently.

[0038] In this embodiment, a positioning ring 5 is provided on the suction cup upper part 212, wherein the inner ring edge of the positioning ring 5 is adapted to the outer ring edge of the processed product 3, so that when the positioning ring 5 is placed on the suction cup upper part 212, the processed product 3 adsorbed on the inner side can be fixed and constrained.

[0039] The processing method in this embodiment is as follows: first, the product is placed on the area where the through hole 24 is provided, and at the same time, the outer edge of the processed product 3 is ensured to be in contact with the inner edge of the positioning ring 5, and then the gas source is started to suck the air in the vacuum chamber 22, so that a negative pressure environment is generated in the vacuum chamber 22, and the vacuum chamber 22 produces an adsorption effect on the processed product 3 through the through hole 24, so that the processed product 3 is attached to the suction cup upper part 212, so that the processed product 3 can be driven to rotate synchronously during the rotation of the rotating platform 1, and the relative rotation of the processed product 3 relative to the grinding wheel assembly 4 is realized. At the same time, the grinding wheel assembly 4 rotates to process the area of ​​the processed product 3 passing through the grinding wheel assembly 4. After the rotating platform 1 rotates one circle, the grinding wheel assembly 4 completes the all-round processing of the processed product 3. After the processing is completed, the gas source stops sucking the vacuum chamber 22, so that the air pressure inside the vacuum chamber 22 is restored to balance, and then the processed product 3 is removed and the next processing cycle step is performed.

[0040] Embodiment 2: like Figure 6 As shown, different from the embodiment 1, the axis of the through hole 24 in this embodiment is inclined toward the side away from the axis of the rotating platform 1. The through hole 24 is inclined so that after the processing is completed, when the processed product 3 is opened by reverse inflation, an airflow toward the outside can be generated, thereby blowing the processing dust toward the outside to ensure the cleanliness of the processing platform.

[0041] The assembly and working process of a SIC uniform processing device in this embodiment are as follows: In this embodiment, a rotating platform 1 is provided, and the rotating platform 1 is driven to rotate by a motor, wherein in this embodiment, the rotating platform 1 is a disc-shaped structure, and an adsorption component 2 is provided on the rotating platform 1, wherein the adsorption component 2 includes a vacuum cavity 21, and the vacuum cavity 21 is connected to the rotating platform 1. Further, in this embodiment, the vacuum cavity 21 includes a suction cup upper part 212 and a suction cup lower part 211, wherein a vacuum chamber 22 is formed between the suction cup upper part 212 and the suction cup lower part 211, and the suction cup lower part 211 is connected to the rotating platform 1, so that during the working process, the rotating platform 1 can drive the vacuum cavity 21 to rotate synchronously, and the vacuum cavity 21 is connected to the air pipe unit 23, and the air pipe unit 23 is connected to the vacuum chamber 22 inside the vacuum cavity 21, so that the air pressure value inside the vacuum chamber 22 is controlled by connecting the air source through the air pipe unit 23, so that the vacuum negative pressure effect can be achieved.

[0042] In this embodiment, a through hole 24 is provided on the suction cup upper part 212, wherein two groups of through holes 24 are provided in this embodiment, and both through holes 24 are arranged in a ring shape. Furthermore, the two groups of through holes 24 are distributed inside and outside along the radial direction, and the two groups of through holes 24 are staggered, thereby ensuring a stable adsorption effect on the processed product 3, wherein the through hole 24 is connected to the vacuum chamber 22, so that the negative pressure generated in the vacuum chamber 22 can adsorb the processed product 3 through the through hole 24.

[0043] The suction cup upper part 212 and the suction cup lower part 211 are connected by bolts. Furthermore, a sealing groove is provided on the suction cup lower part 211, wherein the sealing groove structure is a dovetail groove structure. A sealing ring is connected in the sealing groove, and the sealing ring abuts against the suction cup upper part 212, thereby ensuring the sealing of the connection between the suction cup upper part 212 and the suction cup lower part 211.

[0044] During the use of the processing device in this embodiment, since the rotating platform 1 will drive the vacuum chamber 21 to rotate, and the vacuum chamber 21 is connected to the air pipe unit 23, the air pipe unit 23 needs to be kept fixed to ensure the stability of the air supply, otherwise it will be twisted into a twisted structure during the rotation process. Therefore, the air pipe unit 23 is divided into an air pipe body 231 and a rotating joint 232. The air pipe body 231 is connected to the air source, and the rotating joint 232 is connected to the air pipe body 231, so that during the operation, the rotating platform 1 only drives the vacuum chamber 21 to move, while ensuring that the position of the air pipe body 231 is fixed.

[0045] A grinding wheel assembly 4 is arranged above the suction cup upper part 212, wherein the grinding wheel assembly 4 rotates during the processing, and the rotation plane is opposite to the rotation plane of the rotating platform 1. Furthermore, in this embodiment, the grinding wheel assembly 4 can be moved, so that the processed product 3 can be placed and taken conveniently.

[0046] In this embodiment, a positioning ring 5 is provided on the suction cup upper part 212, wherein the inner ring edge of the positioning ring 5 is adapted to the outer ring edge of the processed product 3, so that when the positioning ring 5 is placed on the suction cup upper part 212, the processed product 3 adsorbed on the inner side can be fixed and constrained.

[0047] The processing method in this embodiment is as follows: first, place the product on the area where the through hole 24 is provided, and ensure that the outer edge of the processed product 3 is in contact with the inner edge of the positioning ring 5, and then start the air source to suck the air in the vacuum chamber 22, so that a negative pressure environment is generated in the vacuum chamber 22. The vacuum chamber 22 produces an adsorption effect on the processed product 3 through the through hole 24, so that the processed product 3 is attached to the suction cup upper part 212, so that the processed product 3 can be driven to rotate synchronously during the rotation of the rotating platform 1, and the relative rotation of the processed product 3 relative to the grinding wheel assembly 4 is realized. At the same time, the grinding wheel assembly 4 rotates to process the processed product 3 area passing through the grinding wheel assembly 4. After the rotating platform 1 rotates one circle, the grinding wheel assembly 4 completes the all-round processing of the processed product 3. After the processing is completed, the air source reversely inflates the inside of the vacuum chamber 22 through the air pipe unit 23, while ensuring that the inflation action is uninterrupted. Due to the throttling effect of the small hole of the through hole 24, a large upward airflow will be generated at the through hole 24, thereby ejecting the processed product 3. At the same time, in this process, since the air flow direction is to exhaust from the inside of the vacuum chamber 22 to the outside, it can prevent the dust generated during the grinding of the SIC from entering the through hole 24, affecting the placement accuracy and flatness of the subsequent SIC products. At the same time, the reverse air outlet can make the processed product 3 quickly separated from the suction cup upper piece 212, making it convenient for the staff to take the processed products.

[0048] Furthermore, in the present embodiment, the axis of the through hole 24 is inclined, wherein the inclination direction of the axis of the through hole 24 is toward the outside. Therefore, when the gas source is reversely inflated, the airflow inside the vacuum chamber 22 will be blown out obliquely along the through hole 24. The direction of the airflow is inclined toward the outside. Therefore, the airflow can drive the grinding powder to disperse toward the outside, thereby avoiding the accumulation of excessive grinding dust at the rotation center. In the subsequent rotation process, the dust will contact with the next processed product 3 due to the centrifugal force. At the same time, since the processed dust moves outward as a whole, in the subsequent processing process, the dust on the suction cup upper part 212 will be affected by the centrifugal force and will also move toward the outside, thereby ensuring the cleanliness of the surface of the device.

[0049] Embodiment 3: like Figure 7 , 8 As shown, different from Example 1, a processing method in this embodiment includes the following steps: S1, placing the processed product 3 on the adsorption component 2; S2, the adsorption component 2 positively absorbs air, generates negative pressure in the vacuum chamber 22, and adsorbs the processed product 3; S3, starting the grinding wheel assembly 4 and the rotating platform 1, the grinding wheel assembly 4 abuts against the processing product 3 to perform processing.

[0050] The adsorption assembly 2 is provided with a slide rail 25, and a positioning column 26 is slidably connected to the slide rail 25. The positioning column 26 extends in the axial direction of the rotating platform 1, and a limit block 27 is detachably connected to the slide rail 25. The positioning column 26 ensures that the processed product 3 can be stabilized in one position after being opened, avoiding radial deviation, facilitating the staff to take it, and maintaining the stability of the airflow; further, when the positioning column 26 loses the constraint of the limit block 27, it can generate centrifugal motion through the rotation of the rotating platform 1, thereby ensuring stable contact with the processed product 3.

[0051] After the processing in step S3 is completed, the grinding wheel assembly 4 is removed, the limit of the positioning block 27 on the positioning column 26 is released, the rotating platform 1 keeps rotating, and the adsorption assembly 2 exhausts air in the reverse direction to lift the processed product 3, and at the same time, the grinding powder is blown away toward the side away from the axis of the rotating platform 1. The rotating platform 1 is kept rotating, so that the grinding powder and the positioning column 26 can both generate centrifugal motion, and the airflow generated by the reverse inflation can ensure that the grinding powder moves outward and the neatness is ensured.

[0052] The assembly and working process of a SIC uniform processing device in this embodiment are as follows: In this embodiment, a rotating platform 1 is provided, and the rotating platform 1 is driven to rotate by a motor, wherein in this embodiment, the rotating platform 1 is a disc-shaped structure, and an adsorption component 2 is provided on the rotating platform 1, wherein the adsorption component 2 includes a vacuum cavity 21, and the vacuum cavity 21 is connected to the rotating platform 1. Further, in this embodiment, the vacuum cavity 21 includes a suction cup upper part 212 and a suction cup lower part 211, wherein a vacuum chamber 22 is formed between the suction cup upper part 212 and the suction cup lower part 211, and the suction cup lower part 211 is connected to the rotating platform 1, so that during the working process, the rotating platform 1 can drive the vacuum cavity 21 to rotate synchronously, and the vacuum cavity 21 is connected to the air pipe unit 23, and the air pipe unit 23 is connected to the vacuum chamber 22 inside the vacuum cavity 21, so that the air pressure value inside the vacuum chamber 22 is controlled by connecting the air source through the air pipe unit 23, so that the vacuum negative pressure effect can be achieved.

[0053] In this embodiment, a through hole 24 is provided on the suction cup upper part 212, wherein two groups of through holes 24 are provided in this embodiment, and both through holes 24 are arranged in a ring shape. Furthermore, the two groups of through holes 24 are distributed inside and outside along the radial direction, and the two groups of through holes 24 are staggered, thereby ensuring a stable adsorption effect on the processed product 3, wherein the through hole 24 is connected to the vacuum chamber 22, so that the negative pressure generated in the vacuum chamber 22 can adsorb the processed product 3 through the through hole 24.

[0054] The suction cup upper part 212 and the suction cup lower part 211 are connected by bolts. Furthermore, a sealing groove is provided on the suction cup lower part 211, wherein the sealing groove structure is a dovetail groove structure. A sealing ring is connected in the sealing groove, and the sealing ring abuts against the suction cup upper part 212, thereby ensuring the sealing of the connection between the suction cup upper part 212 and the suction cup lower part 211.

[0055] During the use of the processing device in this embodiment, since the rotating platform 1 will drive the vacuum chamber 21 to rotate, and the vacuum chamber 21 is connected to the air pipe unit 23, the air pipe unit 23 needs to be kept fixed to ensure the stability of the air supply, otherwise it will be twisted into a twisted structure during the rotation process. Therefore, the air pipe unit 23 is divided into an air pipe body 231 and a rotating joint 232. The air pipe body 231 is connected to the air source, and the rotating joint 232 is connected to the air pipe body 231, so that during the operation, the rotating platform 1 only drives the vacuum chamber 21 to move, while ensuring that the position of the air pipe body 231 is fixed.

[0056] A grinding wheel assembly 4 is arranged above the suction cup upper part 212, wherein the grinding wheel assembly 4 rotates during the processing, and the rotation plane is opposite to the rotation plane of the rotating platform 1. Furthermore, in this embodiment, the grinding wheel assembly 4 can be moved, so that the processed product 3 can be placed and taken conveniently.

[0057] In this embodiment, a positioning ring 5 is provided on the suction cup upper part 212, wherein the inner ring edge of the positioning ring 5 is adapted to the outer ring edge of the processed product 3, so that when the positioning ring 5 is placed on the suction cup upper part 212, the processed product 3 adsorbed on the inner side can be fixed and constrained.

[0058] The processing method in this embodiment is as follows: first, place the product on the area where the through hole 24 is provided, and ensure that the outer edge of the processed product 3 is in contact with the inner edge of the positioning ring 5, and then start the air source to suck the air in the vacuum chamber 22, so that a negative pressure environment is generated in the vacuum chamber 22. The vacuum chamber 22 produces an adsorption effect on the processed product 3 through the through hole 24, so that the processed product 3 is attached to the suction cup upper part 212, so that the processed product 3 can be driven to rotate synchronously during the rotation of the rotating platform 1, and the relative rotation of the processed product 3 relative to the grinding wheel assembly 4 is realized. At the same time, the grinding wheel assembly 4 rotates to process the processed product 3 area passing through the grinding wheel assembly 4. After the rotating platform 1 rotates one circle, the grinding wheel assembly 4 completes the all-round processing of the processed product 3. After the processing is completed, the air source reversely inflates the inside of the vacuum chamber 22 through the air pipe unit 23, while ensuring that the inflation action is uninterrupted. Due to the throttling effect of the small hole of the through hole 24, a large upward airflow will be generated at the through hole 24, thereby ejecting the processed product 3. At the same time, in this process, since the air flow direction is to exhaust from the inside of the vacuum chamber 22 to the outside, it can prevent the dust generated during the grinding of the SIC from entering the through hole 24, affecting the placement accuracy and flatness of the subsequent SIC products. At the same time, the reverse air outlet can make the processed product 3 quickly separated from the suction cup upper piece 212, making it convenient for the staff to take the processed products.

[0059] Furthermore, in the present embodiment, the axis of the through hole 24 is inclined, wherein the inclination direction of the axis of the through hole 24 is toward the outside. Therefore, when the gas source is reversely inflated, the airflow inside the vacuum chamber 22 will be blown out obliquely along the through hole 24. The direction of the airflow is inclined toward the outside. Therefore, the airflow can drive the grinding powder to disperse toward the outside, thereby avoiding the accumulation of excessive grinding dust at the rotation center. In the subsequent rotation process, the dust will contact with the next processed product 3 due to the centrifugal force. At the same time, since the processed dust moves outward as a whole, in the subsequent processing process, the dust on the suction cup upper part 212 will be affected by the centrifugal force and will also move toward the outside, thereby ensuring the cleanliness of the surface of the device.

[0060] Furthermore, in the present embodiment, a slide rail 25 is provided on the suction cup upper member 212, wherein a positioning column 26 is slidably connected to the slide rail 25, and the positioning column 26 can move freely on the slide rail 25, and a detachably connected limit block 27 is provided on the slide rail 25. The limit block 27 can be connected to the suction cup upper member 212 or the slide rail 25 by bolts to produce a limiting effect on the movement of the positioning column 26, and can also be connected to the suction cup upper member 212 or the slide rail 25 by a quick disassembly structure, such as a snap connection or plug-in connection, so as to facilitate the disassembly and placement of the limit block 27. When the limit block 27 is removed, the positioning column 26 can move freely on the slide rail 25, and the axial extension of the positioning column 26 is longer. When the positioning column 26 abuts against the inner ring of the processed product 3, it can produce a radial limiting effect on the processed product 3, so that the processed product 3 moves upward along the axial direction of the positioning column 26 when blown by the airflow without generating radial displacement. Therefore, in the present embodiment, when the processed product 3 is processed, the limit block 27 is removed and the rotating platform 1 is rotated. Since the positioning column 26 loses the limiting effect of the limit block 27, the positioning column 26 can move the end of the slide rail 25 under the action of centrifugal force to abut against the inner ring of the processed product 3. At this time, the processed powder also moves outward due to the centrifugal force. At this time, reverse inflation is performed to make the processed product 3 rise, and a radial channel is formed between the processed product 3 and the suction cup upper part 212. The gas will be discharged horizontally to blow all the dust outward. Moreover, due to the limiting constraint of the positioning column 26, the processed product 3 can be maintained in a stable position driven by the airflow, so that the staff can take the processed product 3 conveniently.

Claims

1. A SIC uniform processing device, characterized in that: The invention comprises a rotating platform (1), a suction component (2) is arranged on the rotating platform (1), a product (3) is suction-connected to the suction component (2), the suction component (2) rotates synchronously with the rotating platform (1), a grinding wheel component (4) is arranged on the suction component (2), and the grinding wheel component (4) abuts against the product (3).

2. A SIC uniform processing device according to claim 1, characterized in that: The adsorption component (2) comprises a vacuum cavity (21), the vacuum cavity (21) comprises a vacuum chamber (22), and the vacuum chamber (22) is connected to an air pipe unit (23).

3. A SIC uniform processing device according to claim 2, characterized in that: The air pipe unit (23) comprises an air pipe body (231), and a rotating joint (232) is connected to the air pipe body (231) on a side close to the vacuum chamber (21), and a connecting airway (233) is arranged inside the rotating joint (232), and the connecting airway (233) connects the air pipe body (231) and the vacuum chamber (22).

4. A SIC uniform processing device according to claim 2, characterized in that: The vacuum chamber (21) comprises a suction cup lower part (211) and a suction cup upper part (212); the suction cup lower part (211) is connected to the rotating platform (1); a vacuum chamber (22) is formed between the suction cup lower part (211) and the suction cup upper part (212); and a sealing part (28) is provided between the suction cup upper part (212) and the suction cup lower part (211).

5. A SIC uniform processing device according to claim 1, characterized in that: A positioning ring (5) is connected to the adsorption component (2), and the positioning ring (5) abuts against the processed product (3) in the radial direction.

6. A SIC uniform processing device according to claim 1, characterized in that: The adsorption component (2) is provided with a plurality of through holes (24), and the through holes (24) are in contact with the processed product (3).

7. A SIC uniform processing device according to claim 6, characterized in that: The axis of the through hole (24) is arranged to be inclined toward a side away from the axis of the rotating platform (1).

8. A SIC uniform processing device according to any one of claims 1 to 7, characterized in that: The adsorption assembly (2) is provided with a slide rail (25), a positioning column (26) is slidably connected to the slide rail (25), the positioning column (26) extends in the axial direction of the rotating platform (1), and a limit block (27) is detachably connected to the slide rail (25).

9. A processing method, using a SIC uniform processing device as claimed in any one of claims 1 to 8, characterized in that: The following steps are included: S1, placing the processed product (3) on the adsorption component (2); S2, the adsorption component (2) positively absorbs air to generate negative pressure in the vacuum chamber (22) to adsorb the processed product (3); S3, starting the grinding wheel assembly (4) and the rotating platform (1), so that the grinding wheel assembly (4) abuts against the processed product (3) to perform processing.

10. A processing method according to claim 9, characterized in that: After the processing in step S3 is completed, the grinding wheel assembly (4) is removed, the limit block (27) on the positioning column (26) is released, the rotating platform (1) continues to rotate, the adsorption assembly (2) exhausts air in the reverse direction, lifts up the processed product (3), and at the same time blows the grinding powder toward the side away from the axis of the rotating platform (1).

Images