Manufacturing method of aluminum nitride high-temperature co-fired ceramic tube shell

Abstract

According to the technical scheme, the manufacturing method of the aluminum nitride high-temperature co-fired ceramic tube shell comprises the steps that an upper part and a lower part of a green ceramic chip subjected to hole filling printing are laminated in a segmented mode, the upper part is the thickness of a boss, and the lower part is the thickness of a base; generating the appearance of the platform and a circle of blank outside the platform on the blank laminated on the upper part of the green ceramic chip, punching an electrostatic film, removing the electrostatic film in the middle of the platform, and carrying out secondary lamination and hot pressing on the base part of the blank of the green ceramic tape, the processed whole electrostatic film with the cavity, the platform part and the blank outside the platform on a lamination plate to obtain the green ceramic tape. And taking off the green body and the electrostatic film outside the platform from the laminated green ceramic block to obtain the green body of the product, and sintering the green body of the product to obtain the aluminum nitride high-temperature co-fired ceramic tube shell. According to the invention, the manufacturing of the isolated platform is realized by adopting a laminating method of combining the electrostatic film and the raw ceramic block, no connecting lappets need to be added, and the appearance of the ceramic is not influenced.

Description

Technical Field

[0001] The invention relates to the technical field of aluminum nitride high temperature co-fired ceramic multilayer substrates, in particular to a method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell. Background Art

[0002] Aluminum nitride high temperature co-fired ceramic multilayer substrate has the advantages of high thermal conductivity, high wiring density, low thermal expansion coefficient, high mechanical strength, good packaging airtightness, etc., making it the preferred substrate material and packaging material for high-power microwave components. At the same time, it has high mechanical strength and good density, and can meet the packaging airtightness requirements. It is the preferred substrate material and packaging material for high-power MCM.

[0003] At present, it is difficult to realize the HTCC isostatic pressing isolated platform. The production of the isolated platform requires adding a collar during the raw porcelain production stage, and the collar needs to be polished after the porcelain is fired. After polishing, the product has polishing marks, and the appearance of the product will be affected to a certain extent. In addition, the traditional electroplating method, whether it is adding electroplating lines and then laser etching, or electroplating by gold wire bonding, will increase costs and processing cycles. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention aims to provide a method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell.

[0005] In order to achieve the above object, the technical solution of the present invention is as follows:

[0006] A method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell comprises the following steps:

[0007] S1. The raw ceramic sheet made of aluminum nitride HTCC is punched, filled, printed, and cavitated to achieve the electrical connection and appearance of the product itself;

[0008] S2, laminating the upper and lower parts of the green ceramic sheet after the hole filling printing is completed, wherein the upper part is the thickness of the boss and the lower part is the thickness of the base;

[0009] S3, generating the shape of the platform and the outer circle of the green embryo on the green embryo after being laminated on the upper part of the green ceramic sheet;

[0010] S4, punch out a static film, and remove the static film in the middle of the platform;

[0011] S5, laminating and hot pressing the base part of the green porcelain belt, the processed whole electrostatic film with cavity, the platform part and the green embryo outside the platform for the second time on the lamination plate, and the hot pressing parameter is 2000-4000psi;

[0012] S6, removing the green ceramic block from the platform and the electrostatic film to obtain the green ceramic block;

[0013] S7, sintering the product embryo to obtain an aluminum nitride high temperature co-fired ceramic tube shell.

[0014] Preferably, the sintered aluminum nitride high temperature co-fired ceramic tube shell is subjected to chemical nickel plating and chemical gold plating.

[0015] Preferably, the thickness of the gold layer of the bonding pad is greater than 1.5 um.

[0016] Preferably, the electrostatic film is formed by laser etching technology.

[0017] Preferably, when the electrostatic film is punched out using laser etching technology, the hole is expanded outward by at least 0.02 mm according to the punching data of the platform.

[0018] Preferably, the green ceramic sheet has a total of ten layers, and the upper three layers and the lower seven layers of the green ceramic sheet are laminated in sections, and the layered lamination pressure is 1000-3000 psi.

[0019] Preferably, the green embryo after being laminated on the top of the green ceramic sheet is laser etched to generate the shape of the platform and the outer circle of the green embryo.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention adopts a lamination method combining an electrostatic film and a green porcelain block to realize the production of an isolated platform, solve the problem of platform molding, and does not need to add a collar while not affecting the appearance of the ceramic itself. Moreover, through the lamination method, the platform processing accuracy can be achieved to be ±0.1mm;

[0022] 2. The present invention adopts chemical plating, which reduces the cost and processing cycle compared with the traditional electroplating method. At the same time, there is no burning or bonding marks on the surface of the product, which meets the requirements of the national military standard 1420B. DETAILED DESCRIPTION

[0023] It is easy to understand that according to the technical solution of the present invention, without changing the essential spirit of the present invention, a person skilled in the art can propose a variety of interchangeable structural modes and implementation modes. Therefore, the following specific implementation modes are only exemplary descriptions of the technical solution of the present invention, and should not be regarded as the whole of the present invention or as a limitation or restriction to the technical solution of the present invention.

[0024] Embodiment 1

[0025] A method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell of the present invention comprises the following steps:

[0026] S1. The raw ceramic sheet made of aluminum nitride HTCC is punched, filled, printed, and cavitated to achieve the electrical connection and appearance of the product itself;

[0027] S2, after the hole filling printing is completed, the top three layers and the bottom seven layers of the raw ceramic sheet with a total of ten layers are laminated in sections, and the layered lamination pressure is 1000psi, the top three layers are the thickness of the boss, and the bottom seven layers are the thickness of the base;

[0028] S3, the green embryo after the three layers are laminated is laser etched to generate the shape of the platform and the green embryo around the outside;

[0029] S4. After the green embryo of the platform part and the green embryo of the outer circle are laser etched, they are cleaned with a brush to remove the dust brought by the laser etching process, in preparation for the next step of pressing;

[0030] S5. Use laser etching technology to punch out an electrostatic film, expand it outward by 0.02mm according to the punching data of the platform to remove the electrostatic film in the middle of the platform;

[0031] S6, laminating and hot pressing the base part of the green porcelain belt, the processed whole electrostatic film with cavity, the platform part and the green embryo outside the platform for the second time on the laminating plate, and the hot pressing parameter is 2000psi;

[0032] S7, after the green ceramic blocks are laminated, the green ceramic blocks and the electrostatic film on the outside of the platform are removed to obtain the green ceramic blocks of the product;

[0033] S8, sintering to obtain an aluminum nitride high temperature co-fired ceramic tube shell;

[0034] S9, performing chemical nickel plating and chemical gold plating on the sintered aluminum nitride high temperature co-fired ceramic tube shell.

[0035] Embodiment 2

[0036] A method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell of the present invention comprises the following steps:

[0037] S1. The raw ceramic sheet made of aluminum nitride HTCC is punched, filled, printed, and cavitated to achieve the electrical connection and appearance of the product itself;

[0038] S2, after the hole filling printing is completed, the top three layers and the bottom seven layers of the raw ceramic sheet with a total of ten layers are laminated in sections, and the layered lamination pressure is 2000psi, the top three layers are the thickness of the boss, and the bottom seven layers are the thickness of the base;

[0039] S3, the green embryo after the three layers are laminated is laser etched to generate the shape of the platform and the green embryo around the outside;

[0040] S4. After the green embryo of the platform part and the green embryo of the outer circle are laser etched, they are cleaned with a brush to remove the dust brought by the laser etching process, in preparation for the next step of pressing;

[0041] S5. Use laser etching technology to punch out an electrostatic film, expand it outward by 0.05mm according to the punching data of the platform to remove the electrostatic film in the middle of the platform;

[0042] S6, laminating and hot pressing the base part of the green porcelain belt, the processed whole electrostatic film with cavity, the platform part and the green embryo outside the platform for the second time on the laminating plate, and the hot pressing parameter is 3000psi;

[0043] S7, after the green ceramic blocks are laminated, the green ceramic blocks and the electrostatic film on the outside of the platform are removed to obtain the green ceramic blocks of the product;

[0044] S8, sintering to obtain an aluminum nitride high temperature co-fired ceramic tube shell;

[0045] S9, performing chemical nickel plating and chemical gold plating on the sintered aluminum nitride high temperature co-fired ceramic tube shell.

[0046] Embodiment 3

[0047] A method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell of the present invention comprises the following steps:

[0048] S1. The raw ceramic sheet made of aluminum nitride HTCC is punched, filled, printed, and cavitated to achieve the electrical connection and appearance of the product itself;

[0049] S2, after the hole filling printing is completed, the top three layers and the bottom seven layers of the raw ceramic sheet with a total of ten layers are laminated in sections, and the layered lamination pressure is 3000psi, the top three layers are the thickness of the boss, and the bottom seven layers are the thickness of the base;

[0050] S3, the green embryo after the three layers are laminated is laser etched to generate the shape of the platform and the green embryo around the outside;

[0051] S4. After the green embryo of the platform part and the green embryo of the outer circle are laser etched, they are cleaned with a brush to remove the dust brought by the laser etching process, in preparation for the next step of pressing;

[0052] S5. Use laser etching technology to punch out an electrostatic film, expand it outward by 0.08mm according to the punching data of the platform to remove the electrostatic film in the middle of the platform;

[0053] S6, laminating and hot pressing the base part of the green porcelain belt, the processed whole electrostatic film with cavity, the platform part and the green embryo outside the platform for the second time on the laminating plate, and the hot pressing parameter is 4000psi;

[0054] S7, after the green ceramic blocks are laminated, the green ceramic blocks and the electrostatic film on the outside of the platform are removed to obtain the green ceramic blocks of the product;

[0055] S8, sintering to obtain an aluminum nitride high temperature co-fired ceramic tube shell;

[0056] S9, performing chemical nickel plating and chemical gold plating on the sintered aluminum nitride high temperature co-fired ceramic tube shell.

[0057] The main material of the ceramic shell is aluminum nitride. The overall L01 layer is the lead pad and marking layer, which is gold-plated. The thickness of the gold layer on the bonding pad is greater than 1.5um. The L02-L10 layers are tungsten conductors and are processed accordingly. HTCC aluminum nitride raw ceramic tape and tungsten slurry are used as conductor materials. The lamination method combining electrostatic film and raw ceramic blocks is adopted to realize the production of isolated platforms. Through this lamination method, the platform processing accuracy can be achieved to be ±0.1mm.

[0058] The production of isolated platforms is achieved by combining the electrostatic film and the ceramic block itself for isostatic pressing, which solves the problem of platform molding. There is no need to add a collar, and it will not affect the appearance of the ceramic itself. The sintered ceramic tube shell is electrolessly plated with nickel and gold. The electroless gold plating can help the electroplating of the isolated island and realize the bonding function of the surface pad. Compared with the traditional electroplating method, it reduces the cost and processing cycle. At the same time, there is no trace of burning or bonding on the surface of the product, which meets the requirements of the national military standard 1420B.

[0059] The technical scope of the present invention is not limited to the contents in the above description. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical idea of ​​the present invention, and these deformations and modifications should all fall within the protection scope of the present invention.

Claims

1. A method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell, characterized in that: The following steps are involved: S1. The raw ceramic sheet made of aluminum nitride HTCC is punched, filled, printed, and cavitated to achieve the electrical connection and appearance of the product itself; S2, laminating the upper and lower parts of the green ceramic sheet after the hole filling printing is completed, wherein the upper part is the thickness of the boss and the lower part is the thickness of the base; S3, generating the shape of the platform and the outer circle of the green embryo on the green embryo after being laminated on the upper part of the green ceramic sheet; S4, punch out a static film, and remove the static film in the middle of the platform; S5, laminating and hot pressing the base part of the green porcelain belt, the processed whole electrostatic film with cavity, the platform part and the green embryo outside the platform for the second time on the lamination plate, and the hot pressing parameter is 2000-4000psi; S6, removing the green ceramic block from the platform and the electrostatic film to obtain the green ceramic block; S7, sintering the product embryo to obtain an aluminum nitride high temperature co-fired ceramic tube shell.

2. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 1, characterized in that: The sintered aluminum nitride high temperature co-fired ceramic tube shell is subjected to chemical nickel plating and chemical gold plating.

3. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 2, characterized in that: The thickness of the gold layer of the bonding pad is greater than 1.5um.

4. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 1, characterized in that: Laser etching technology is used to produce electrostatic film.

5. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 1, characterized in that: When using laser etching technology to punch out the electrostatic film, expand it outward by at least 0.02mm according to the punching data of the platform.

6. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 1, characterized in that: There are ten layers of raw porcelain sheets in total, and the upper three layers and the lower seven layers of the raw porcelain sheets are laminated in sections, and the layered lamination pressure is 1000-3000psi.

7. The method for manufacturing an aluminum nitride high temperature co-fired ceramic tube shell according to claim 6, characterized in that: The green embryo laminated on top of the green ceramic sheet is laser etched to generate the shape of the platform and the green embryo around it.