Regulating valve

Abstract

The invention discloses a regulating valve, comprising: a valve body comprising a valve plate for controlling the on-off of an internal gas channel, the valve plate comprising a permanent magnet, a valve plate block and a baffle plate structure connected from top to bottom; the sealing cover is mounted above the valve body and hermetically covers the outer side of the permanent magnet of the valve plate; the rotary air cylinder drives and switches the opening and closing states of the valve plate; the clamping jaw is arranged on the outer side of the sealing cover and does not make contact with the sealing cover, and the center position of the upper portion of the clamping jaw is connected to a shaft of the rotating air cylinder; a permanent magnet is arranged on each of the two sides of the clamping jaw; the rotating air cylinder drives the clamping jaw to rotate when rotating, and the valve plate rotates around the center axis of the valve plate in a non-contact mode along with the clamping jaw under the action of magnetic attraction.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment manufacturing, and in particular to a regulating valve. Background Art

[0002] In the prior art, the regulating valves on the remote plasma bypass or the cross pipe mostly adopt the solutions of Mini GV or angle valve to switch the on-off state of the pipeline. The internal rubber rings of these two regulating valves are used as dynamic seals.

[0003] The problem existing in the regulating valve of the above-mentioned remote plasma bypass or cross pipe is that the rubber ring used as dynamic seal in Mini GV or angle valve is easily worn and failed due to multiple influences such as friction, temperature, plasma, etc., which affects the service life of the valve and is prone to particle problems.

[0004] Moreover, currently, the control valve status is mainly observed and judged manually to see if it is in an abnormal state, and there is no active feedback of alarm information. In addition, manual observation is prone to misjudgment. If the abnormal situation is not discovered in time and the process is continued, it is easy to cause greater losses. In addition, the drive module itself has a rotation angle deviation, which is easy to cause false alarms. Summary of the invention

[0005] In order to overcome the defects of the prior art, the present invention provides a non-contact regulating valve based on magnetic coupling effect.

[0006] The regulating valve of the present invention includes but is not limited to a valve body, a sealing cover, a rotating cylinder, and a clamping claw.

[0007] The valve body comprises a valve plate for controlling the on-off of an internal gas passage, wherein the valve plate comprises a permanent magnet, a valve plate block and a baffle structure connected from top to bottom.

[0008] The sealing cover is installed above the valve body and sealingly covers the outer side of the permanent magnet of the valve plate.

[0009] The rotary cylinder drives and switches the on / off state of the valve plate.

[0010] The clamp is arranged on the outside of the sealing cover but does not contact the sealing cover. The upper center position of the clamp is connected to the axis of the rotating cylinder. There is a permanent magnet on each side of the clamp. When the rotating cylinder rotates, the clamp is driven to rotate. The valve plate rotates around its own central axis without contact following the clamp under the action of magnetic attraction.

[0011] In one embodiment, the switching state of the valve plate includes an open state, a closed state, and a rotation state, wherein the rotation state is a state between the open state and the closed state; the open state is that the valve plate and the direction of the gas entering the valve body are at 0°~0°±a first angle α; the closed state is that the valve plate and the direction of the gas entering the valve body are at 90°~90°±a second angle β, wherein the first angle and the second angle are both greater than the rotation angle deviation of the rotary cylinder.

[0012] In one embodiment, the regulating valve further includes a thrust bearing disposed below the permanent magnet of the valve plate and between an inner cavity wall of the valve body.

[0013] In one embodiment, the regulating valve further includes an O-ring located between below the sealing cover and above the platform of the valve body, serving as a static sealing rubber ring.

[0014] In one embodiment, the regulating valve further includes a first monitoring device disposed on both sides of the valve body.

[0015] The first monitoring device includes a first group of photoelectric sensors and a second group of photoelectric sensors arranged one above the other.

[0016] The first group of photosensors and the second group of photosensors each have a transmitting side and a receiving side.

[0017] The baffle structure includes a first step and a second step, wherein the second step is located below the first step, and the thickness of the second step is smaller than the thickness of the first step. When the valve plate rotates, the first step and the second step rotate together.

[0018] The first step is used for opening and closing the optical fiber passage of the first group of photoelectric sensors; the first step has two through holes.

[0019] The second step is used to open and close the optical fiber path of the second group of photoelectric sensors.

[0020] In one embodiment, when the valve plate is in the open state, the light signal sent by the transmitting side of the first group of photoelectric sensors passes through one of the two through holes on the first step to reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating conduction (for example, 1); the light signal sent by the transmitting side of the second group of photoelectric sensors is blocked by the second step and cannot reach the receiving side, and the second group of photoelectric sensors outputs a signal indicating non-conduction (for example, 0).

[0021] In one embodiment, when the valve plate is in the rotational state, the light signal emitted by the emitting side of the first group of photoelectric sensors cannot pass through any through hole on the first step and cannot reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating non-conduction (for example, 0); the light signal emitted by the emitting side of the second group of photoelectric sensors is blocked by the second step and cannot reach the receiving side, and the second group of photoelectric sensors outputs a signal indicating non-conduction (for example, 0).

[0022] In one embodiment, when the valve plate is in the closed state, the light signal emitted by the emitting side of the first group of photoelectric sensors cannot pass through any through hole on the first step and cannot reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating non-conduction (for example, 0); the light signal emitted by the emitting side of the second group of photoelectric sensors bypasses the side of the second step and reaches the receiving side, and the second group of photoelectric sensors outputs a signal indicating conduction (for example, 1).

[0023] The switch state of the valve plate is determined according to a combination of signals output by the first group of photoelectric sensors and the second group of photoelectric sensors.

[0024] In one embodiment, the first angle α is the rotation angle tolerance of the valve plate in the open state, and the structural dimensions of the first step or the specifications and performance of the first group of photoelectric sensors that meet the first angle α are selected according to the following equation:

[0025]

[0026] in:

[0027] d0 is the axial diameter of the optical fiber path of the first group of photoelectric sensors;

[0028] d is the diameter of the through hole;

[0029] t is the thickness of the first step;

[0030] In one embodiment, the second angle β is the rotation angle tolerance of the valve plate in the closed state, and the structural dimensions of the second step or the specifications and performance of the second group of photoelectric sensors that meet the second angle β are selected according to the following equation:

[0031]

[0032] in:

[0033] d0' is the axial diameter of the optical fiber path of the second group of photoelectric sensors;

[0034] l is the distance from the center of the valve plate to the center of the optical fiber;

[0035] t is the thickness of the second step;

[0036] w is the width of the second step.

[0037] In one embodiment, the regulating valve further includes a second monitoring device; and the valve body further includes three ports, wherein two of the three ports are ports for external pipelines, and the other port is equipped with an observation window for connecting the second monitoring device.

[0038] The front and back surfaces of the valve plate are provided with valve plate marking lines.

[0039] The second monitoring device includes a visual sensor, which measures the distance x from the side of the valve plate or the valve plate marking line to the side of the observation window to accurately obtain the current rotation angle of the valve plate.

[0040] In one embodiment, the rotation angle of the valve plate Obtained by the following formula:

[0041]

[0042] in,

[0043] x represents the distance from the valve plate marking line to the side of the observation window;

[0044] w represents the width of the valve plate;

[0045] e represents the distance that the valve plate marking line deviates from the valve plate center line;

[0046] t represents the thickness of the valve plate;

[0047] d represents the width of the observation window.

[0048] The regulating valve of the present invention has the following beneficial technical effects:

[0049] Firstly, the sealing cover seals the valve plate inside the valve body and adopts a non-contact external drive solution. The O-ring is used for static sealing, which effectively avoids the failure of the regulating valve caused by the friction and wear of the rubber ring, and also avoids the generation of particles due to the wear of the rubber ring.

[0050] Secondly, the control valve of the present invention has dual detection means of photoelectric sensing and visual detection, which replaces manual active observation, reduces the dependence on the working habits and skill level of technicians, effectively monitors the status of the valve plate inside the control valve in real time, ensures that abnormal conditions can be discovered in time, and avoids greater losses.

[0051] Third, the size of the baffle used for photoelectric detection at the bottom of the valve plate matches the diameter of the optical fiber path and has a certain allowable angle deviation capacity, so that the valve plate can output correct signals within the ideal open state / ideal closed state ± a certain angle range, effectively avoiding false alarms caused by cylinder rotation deviations. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The above invention content and the following specific embodiments of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the claimed invention. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0053] Figure 1 A cross-sectional view of a regulating valve according to an embodiment of the present invention is shown;

[0054] Figure 2 An overall schematic diagram of a regulating valve according to an embodiment of the present invention is shown;

[0055] Figure 3 A schematic diagram of a regulating valve without a second monitoring device installed according to an embodiment of the present invention is shown;

[0056] Figure 4 A cross-sectional view of a regulating valve according to an embodiment of the present invention is shown;

[0057] Figure 5 A cross-sectional view of a valve body according to an embodiment of the present invention is shown;

[0058] Figure 6 A schematic diagram of a thrust bearing according to an embodiment of the present invention is shown;

[0059] Fig. 7A A front view of a valve plate according to an embodiment of the present invention is shown;

[0060] Figure 7B A side view of a valve plate according to an embodiment of the present invention is shown;

[0061] Fig. 8A A schematic diagram showing monitoring of the valve plate opening state according to an embodiment of the present invention is shown;

[0062] Figure 8B A schematic diagram showing monitoring of the rotation state of a valve plate according to an embodiment of the present invention is shown;

[0063] Figure 8C A schematic diagram showing monitoring of a valve plate closing state according to an embodiment of the present invention;

[0064] Fig.9A A schematic diagram showing the optical fiber path of the first group of photoelectric sensors when the valve plate has a certain rotation angle deviation when in an open state according to an embodiment of the present invention;

[0065] Fig. 9B A schematic diagram showing the optical fiber path of the first group of photoelectric sensors when the valve plate does not have a rotation angle deviation when in an open state according to an embodiment of the present invention;

[0066] Fig. 9C A schematic diagram showing the optical fiber path of the first group of photoelectric sensors when the valve plate has a certain rotation angle deviation when in an open state according to an embodiment of the present invention;

[0067] Fig. 10A A schematic diagram showing the optical fiber path of the second group of photoelectric sensors when the valve plate has a certain rotation angle deviation when in a closed state according to an embodiment of the present invention;

[0068] Fig. 10B A schematic diagram showing the optical fiber path of the second group of photoelectric sensors when the valve plate does not have a rotation angle deviation when in a closed state according to an embodiment of the present invention;

[0069] Fig. 10C A schematic diagram showing the optical fiber path of the second group of photoelectric sensors when the valve plate has a certain rotation angle deviation when in a closed state according to an embodiment of the present invention;

[0070] Fig.11 A schematic diagram showing a design at a first angle according to an embodiment of the present invention is shown;

[0071] Fig.12 A schematic diagram showing a design of a second angle according to an embodiment of the present invention;

[0072] Fig.13 A side view of a regulating valve according to an embodiment of the present invention is shown;

[0073] Fig.14A The valve plate position monitored from the transparent observation window according to an embodiment of the present invention is shown, wherein the valve plate is in the maximum open position;

[0074] Fig. 14B The figure shows the position of the valve plate monitored from the transparent observation window according to an embodiment of the present invention, wherein the valve plate is in the maximum closed position;

[0075] Fig. 14C FIG. 2 shows the position of the valve plate monitored from the transparent observation window according to an embodiment of the present invention, wherein the valve plate is at a position different from Fig.14A and Fig. 14B Other locations;

[0076] Fig.15A A top view showing a valve plate rotation process according to an embodiment of the present invention;

[0077] Fig. 15B A front view of a camera detection according to an embodiment of the present invention is shown;

[0078] Fig.16A A top view of a valve plate in a maximum open state according to an embodiment of the present invention is shown;

[0079] Fig. 16B A front view of camera detection in a state where the valve plate is in the maximum opening state according to an embodiment of the present invention is shown;

[0080] Fig.17 An application scenario of a regulating valve according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0081] The detailed features and advantages of the present invention are described in detail in the specific embodiments below, and the content is sufficient to enable any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0082] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0083] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0084] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0085] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0086] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0087] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0088] Figure 1 A cross-sectional view of a regulating valve according to an embodiment of the present invention is shown. Figure 2 FIG. 2 shows an overall schematic diagram of a regulating valve according to an embodiment of the present invention. Figure 1 , Figure 2 As shown, the regulating valve includes a valve body 101 , a rotary cylinder 102 , a clamping jaw 105 , a thrust bearing 106 , a sealing cover 107 , an O-ring 110 , a supporting component, a first monitoring device 103 and / or a second monitoring device 108 .

[0089] In one embodiment, the support component includes a support column 109 and a support plate 111. The support column 109 is connected between the upper part of the valve body 101 and the support plate 111, and plays a role in heat insulation between the valve body and the cylinder. The support plate 111 is located above the support column 109 and is used to fix the rotating cylinder 102 and the second monitoring device 108.

[0090] In one embodiment, the O-ring 110 is located between the bottom of the sealing cover 107 and the top of the platform of the valve body 101 to serve as a static sealing rubber ring.

[0091] In one embodiment, the second monitoring device 108 is a visual sensor, which may include a visual camera.

[0092] In one embodiment, the first monitoring device 103 is two groups of photoelectric sensors installed on both sides of the valve body 101 .

[0093] Figure 3 A schematic diagram of a regulating valve without a second monitoring device installed according to an embodiment of the present invention is shown. A gas passage is provided inside the valve body 110. The valve body 110 has three ports, two of which 302 and 303 are ports for external pipes, and the other port 301 is provided with a transparent observation window for connecting the second monitoring device 108. The visual sensor 108 can monitor the internal conditions of the valve body through the transparent observation window, for example, monitor the rotation angle position of the internal valve plate. Moreover, the visual sensor 108 can observe the internal conditions of the valve body when the regulating valve is working without affecting the normal use of the regulating valve.

[0094] In one embodiment, the transparent viewing window may be a sealed transparent cover.

[0095] exist Figure 3 In the example shown, the gas passage inside the valve body 110 is L-shaped and connects ports 302 and 303. Figure 3 The regulating valve shown can be applied to the bends of the pipeline.

[0096] It should be pointed out that after the port position of the regulating valve of the present invention is modified, the regulating valve of the present invention can also be applied to straight pipelines.

[0097] Figure 4 A cross-sectional view of a regulating valve according to an embodiment of the present invention is shown. Figure 5 A cross-sectional view of a valve body according to an embodiment of the present invention is shown.

[0098] Combination Figure 3 , Figure 4 and Figure 5 As shown, the rotary cylinder 102 is used to drive and switch the switch state of the regulating valve. The clamp 105 is located outside the valve body 101, and there are permanent magnets 501, 502 on both sides of the clamp 105 (forming external magnetic poles). The upper center position of the clamp 105 is connected to the axis of the rotary cylinder 102, and is driven to rotate by the rotary cylinder 102. Specifically, the axis of the rotary cylinder and the clamp are fixedly connected by an axis and a screw. When the cylinder rotates, it will drive the clamp to rotate, and the axis of the rotary cylinder and the axis of rotation of the clamp are coaxial.

[0099] The valve body 101 has a valve plate 104 , an internal gas passage, and three ports 301 , 302 , 303 .

[0100] Two ports 302 and 303 of the three ports are ports for connecting to external pipelines, and the other port 301 is used to connect to the second monitoring device 108 .

[0101] The valve plate 104 is in the shape of an inverted I-beam. The valve plate 104 can rotate around its own central axis. The upper part of the valve plate 104 has a row of permanent magnets 401 (forming inner magnetic poles). Figure 5 As shown, the permanent magnet 401 has an S pole and an N pole. The S pole position of the permanent magnet 401 corresponds to the N pole position of the permanent magnet 501 on one side of the clamp 105. The N pole position of the permanent magnet 401 corresponds to the S pole position of the permanent magnet 502 on the other side of the clamp. When the clamp 105 is driven to rotate by the rotary cylinder 102, the magnetic field formed by the permanent magnets 501 and 502 on both sides thereof drives the permanent magnet 401 of the valve plate 104 to rotate in a non-contact manner, so that the valve plate rotates around its own central axis, thereby realizing the non-contact adjustment of the valve state switching.

[0102] like Figure 4 The regulating valve shown is in the open state, the valve plate is parallel to the air inlet direction (or can be at a certain angle), and the gas can flow in the internal gas channel of the valve body. Figure 4 Basically, after the valve plate rotates another 90 degrees, the valve plate will block the internal gas passage and the regulating valve will be in a closed state.

[0103] The sealing cover 107 is installed above the valve body 101 and sealingly covers the outer side of the permanent magnet 401 of the valve plate 104 to seal the valve plate 104 to prevent gas leakage.

[0104] The clamping jaw 105 is arranged on the outside of the sealing cover 107, but does not contact the sealing cover 107. The valve plate 104 is located on the inside of the sealing cover 107, and the clamping jaw 105 and the valve plate 104 are separated by the sealing cover 107 and do not directly contact each other. Since both the clamping jaw 105 and the valve plate 104 are equipped with magnets, there is an attraction between the magnets on the clamping jaw 105 and the magnets on the valve plate 104, so that the magnetic pole direction of a row of magnets on the valve plate 104 can always be consistent with the magnetic pole direction of the magnets on the clamping jaw 105. Therefore, when the clamping jaw 105 rotates, the internal valve plate 104 will rotate in a non-contact manner following the clamping jaw 105 under the action of magnetic attraction. The use of magnets can achieve driving without direct contact but can transmit power.

[0105] The regulating valve of the present invention is driven by an external magnetic claw by a rotating cylinder, and a sealing cover seals the valve plate inside the valve body. The magnetic coupling effect is utilized to non-contactly drive the internal magnetic valve plate to control on and off. Moreover, the rubber ring (O-ring) is used for static sealing, and there is no rubber ring for dynamic sealing. This can effectively avoid the problem of easy wear and failure of the internal dynamic sealing rubber ring when the Mini GV valve or angle valve is used to adjust the on and off of the pipeline, and at the same time avoid the generation of particles due to wear of the rubber ring.

[0106] Figure 6 FIG. 2 is a schematic diagram of a thrust bearing according to an embodiment of the present invention. Figure 1 , Figure 4 and Figure 6 The thrust bearing 106 is disposed between the lower part of the permanent magnet of the valve plate 104 and the inner cavity wall of the valve body 101 , so that the valve plate 104 can rotate easily.

[0107] The purpose of setting the thrust bearing is that if the valve plate is in direct contact with the valve body, the relative movement between the valve plate and the valve body needs to overcome the sliding friction. By adding a set of thrust ball bearings between the two, the sliding friction can be converted into rolling friction, greatly reducing the friction, so that the valve plate can be easily rotated under a very small driving force.

[0108] Fig. 7A A front view of a valve plate according to an embodiment of the present invention is shown. Figure 7B A side view of a valve plate according to an embodiment of the present invention is shown. The valve plate includes a permanent magnet 401 located at the top, a valve plate 701 located in the middle, and a baffle structure located at the bottom. There are marking lines 706 on both sides of the valve plate 701. The baffle structure is used to turn on and off the monitoring signal of the first monitoring device 103. The baffle structure includes a first step 702 and a second step 703. The second step is located below the first step, and the thickness of the second step is less than the thickness of the first step. When the valve plate rotates, the first step 702 and the second step 703 also rotate together. The first step 702 and the second step 703 are baffles for turning on and off the upper and lower groups of photoelectric sensor signals, respectively. Among them, the front of the first step 702 has two left and right through holes 704 and 705.

[0109] return Figure 4 The first monitoring device of the control valve of the present invention includes two groups of photoelectric sensors 402 and 403 arranged in an upper and lower position, which are used to actively monitor the switch state of the valve plate inside the non-contact control valve of the present invention. The first step 702 and the second step 703 are used to open and close the optical fiber paths of the upper and lower groups of photoelectric sensors, respectively. According to the signals sent by the two groups of photoelectric sensors 402 and 403, it is possible to determine the state of the valve plate. When the valve plate state is abnormal, the system actively feeds back alarm information to avoid the abnormality not being discovered by manual active observation and continuing the process, resulting in greater losses.

[0110] The first group of photoelectric sensors 402 corresponds to monitoring the light path blocking condition of the first channel (the upper channel where the first step is located). Fig. 7A and Figure 7B The rotation degree of the first step 702 determines the on and off of the first group of photosensor signals.

[0111] The second group of photoelectric sensors 403 corresponds to monitoring the light path blocking condition of the second channel (the lower channel where the second step is located). Fig. 7A and Figure 7B The rotation degree of the second step 703 determines the on and off of the second group of photosensor signals.

[0112] Fig. 8A A schematic diagram showing monitoring of the valve plate opening state according to an embodiment of the present invention is shown.

[0113] The first group of photosensors 402 includes a transmitting side 801 and a receiving side 802 .

[0114] The second group of photosensors 403 includes a transmitter 803 and a receiver 804 .

[0115] When the valve plate is in the open state, the valve plate 701 of the valve plate and the direction of the gas 810 entering the valve body are 0° to ±α (where α is the first angle). Fig. 7A and Figure 7B For the upper channel, the optical signal emitted by the emission side 801 of the first group of photosensors 402 can pass through the through hole on the first step 702 to reach the receiving side 802, so the first group of photosensors outputs a signal of 1. For the lower channel, the optical signal emitted by the emission side 803 of the second group of photosensors 403 is blocked by the second step 703 and cannot reach the receiving side 804, so the second group of photosensors outputs a signal of 0.

[0116] Therefore, the output signals of the two groups of photoelectric sensors of the first monitoring device are 1-0.

[0117] Figure 8B A schematic diagram showing monitoring of the rotation state of a valve plate according to an embodiment of the present invention is shown.

[0118] When the valve plate is in a rotating state (i.e., between an open state and a closed state), in conjunction with FIG7 , for the upper channel, the optical signal emitted by the emission side 801 of the first group of photoelectric sensors 402 cannot pass through the through hole on the first step 702 and cannot reach the receiving side 802, so the first group of photoelectric sensors outputs a signal of 0. For the lower channel, the optical signal emitted by the emission side 803 of the second group of photoelectric sensors 403 is blocked by the second step 703 and cannot reach the receiving side 804, so the second group of photoelectric sensors outputs a signal of 0.

[0119] Therefore, the output signals of the two groups of photoelectric sensors of the first monitoring device are 0-0.

[0120] Figure 8C A schematic diagram showing monitoring of the valve plate closing state according to an embodiment of the present invention is shown.

[0121] When the valve plate is in a closed state, the direction of the valve plate segment 701 of the valve plate is 90° to 90° ± β (where β is a second angle) with the direction of the gas 810 entering the valve body. At this time, in conjunction with FIG. 7 , for the upper channel, the optical signal emitted by the emission side 801 of the first group of photoelectric sensors 402 cannot pass through the through hole on the first step 702 and cannot reach the receiving side 802, so the first group of photoelectric sensors outputs a signal of 0. For the lower channel, the optical signal emitted by the emission side 803 of the second group of photoelectric sensors 403 is not blocked by the second step 703, and the optical signal bypasses the side of the second step 703 and reaches the receiving side 804, so the second group of photoelectric sensors outputs a signal of 1.

[0122] Therefore, the output signals of the two groups of photoelectric sensors of the first monitoring device are 0-1.

[0123] The photoelectric detection method of the first group of photoelectric sensors 402 of the present invention is a light path through-hole type. The photoelectric detection method of the second group of photoelectric sensors 403 is a light path bypass type. The present invention can judge whether the valve plate is working in an open state, a rotating state or a closed state according to the combination (1-0 or 0-0 or 0-1) of the output signal of the first group of photoelectric sensors 402 and the output signal of the second group of photoelectric sensors 403.

[0124] It should be pointed out that the purpose of providing two through holes on the left and right sides of the first step is to ensure the symmetry of the device so that it can be used in both the forward and reverse directions during installation. In addition, the first group of photoelectric sensors and the second group of photoelectric sensors of the present invention are preferably arranged directly above and directly below to save space. Under this structural arrangement, considering that the lower channel adopts the light path bypass type and the symmetry of the device, it is better to arrange the through holes of the first step in two arrangements on the left and right sides. Of course, the baffle structure of the present invention and the specific layout of the photoelectric sensors can be modified or changed according to the application scenario without departing from the spirit of the present invention.

[0125] Fig.9A A schematic diagram of the optical fiber path of the first group of photoelectric sensors is shown when the valve plate has a certain rotation angle deviation when in an open state according to an embodiment of the present invention. Fig. 9B A schematic diagram of the optical fiber pathway of the first group of photoelectric sensors is shown when the valve plate has no rotation angle deviation when in an open state according to an embodiment of the present invention. Fig. 9C A schematic diagram of the optical fiber path of the first group of photoelectric sensors is shown when the valve plate has a certain rotation angle deviation when in an open state according to an embodiment of the present invention.

[0126] Combination Fig.9A , Fig. 9C and Fig. 8A As shown, the valve plate and the direction of the gas entering the valve body form a first angle ±α (for example, Fig.9A is -10°, Fig. 9C At this time, the optical fiber path of the first group of photoelectric sensors can still pass through the through hole of the first step 702, that is, the valve plate is still determined to be in the open state. Fig. 9C and Fig.9A The difference is that the first angles of the two are in opposite directions.

[0127] It should be understood that the rotary drive module (e.g., rotary cylinder) usually has a rotation angle deviation γ, for example, γ = 4°. In order to avoid false alarms caused by the rotation angle deviation γ brought by the rotary drive module itself, the present invention designs a first angle α as the rotation angle tolerance of the valve plate when it is in the open state, and makes the first angle α greater than γ. Then, when the valve plate is in the open state, the maximum allowable rotation angle error can be α, so as to improve the stability of the output signal of the photoelectric sensor.

[0128] In one embodiment, the first angle α is in the range of 4° to 10°.

[0129] In one embodiment, the diameter of the through hole is larger than the diameter of the light beam emitted by the first group of photoelectric sensors, so that the optical fiber path of the first group of photoelectric sensors can still pass through the through hole of the first step 702 when there is a first angle α deviation in the valve plate open state.

[0130] Fig. 9B This is an ideal situation where there is no rotation angle deviation when the valve plate is in the open state. At this time, the angle between the valve plate and the direction of the gas entering the valve body is 0°, and the valve plate is in the maximum open position.

[0131] Fig. 10A A schematic diagram of the optical fiber path of the second group of photoelectric sensors is shown when the valve plate has a certain rotation angle deviation when in a closed state according to an embodiment of the present invention. Fig. 10B A schematic diagram of the optical fiber pathway of the second group of photoelectric sensors is shown when the valve plate has no rotation angle deviation when in a closed state according to an embodiment of the present invention. Fig. 10C A schematic diagram of the optical fiber path of the second group of photoelectric sensors is shown when the valve plate has a certain rotation angle deviation when in a closed state according to an embodiment of the present invention.

[0132] Combination Fig. 10A , Fig. 10C and Figure 8C As shown, the angle between the valve plate and the direction of the gas entering the valve body is 90°±β (for example, Fig. 10A 90°-10°, Fig. 10CAt this time, the optical fiber path of the second group of photoelectric sensors can still pass by the side of the second step 703, that is, the valve plate is still determined to be in a closed state. Fig. 10C and Fig. 10A The difference is that the second angles of the two are in opposite directions.

[0133] It should be understood that the rotary drive module (e.g., rotary cylinder) usually has a rotation angle deviation γ, for example, γ = 4°. In order to avoid false alarms caused by the rotation angle deviation γ brought by the rotary drive module itself, the present invention designs a second angle β as the rotation angle tolerance of the valve plate when it is in the closed state, and makes the second angle β greater than γ. Then, when the valve plate is in the closed state, the allowable rotation angle error can be as large as β, so as to improve the stability of the output signal of the photoelectric sensor.

[0134] In one embodiment, the second angle β is in the range of 4° to 10°.

[0135] In one embodiment, there is a certain distance between the side of the second step and the optical fiber path of the second group of photoelectric sensors, so that the optical fiber path of the second group of photoelectric sensors can still pass by the side of the second step when there is a rotation angle deviation in the valve plate closed state.

[0136] Fig. 10B This is an ideal situation where there is no rotation angle deviation when the valve plate is in the closed state. At this time, the angle between the valve plate and the direction of the gas entering the valve body is 90°, and the valve plate is in the maximum closed position.

[0137] Fig.11 A schematic diagram showing a design at a first angle according to an embodiment of the present invention is shown.

[0138] The first angle α satisfies the following equation:

[0139]

[0140] in:

[0141] d0 is the axial diameter of the light beam emitted by the first group of photoelectric sensors;

[0142] d is the diameter of the through hole;

[0143] t is the thickness of the first step.

[0144] In practical applications, the value of the first angle (i.e., the redundant angle) can be determined first according to the inherent deviation of the rotation angle of the rotary drive module (rotary cylinder). Then, according to the logical relationship between the first angle and the specifications and performance of the photoelectric sensor (e.g., diameter specifications, optical fiber setting detection flux), and the structural dimensions of the first step (e.g., thickness) (see the above formula), the structural dimensions of the first step that meet the set redundant angle or the specifications and performance of the selected photoelectric sensor can be set accordingly.

[0145] Fig.12 A schematic diagram showing a design at a second angle according to an embodiment of the present invention is shown.

[0146] The second angle β satisfies the following equation:

[0147]

[0148] in:

[0149] d0' is the axial diameter of the light beam emitted by the second group of photoelectric sensors;

[0150] l is the distance from the center of the valve plate to the center of the light beam;

[0151] t is the thickness of the second step;

[0152] w is the width of the second step.

[0153] In practical applications, the value of the second angle can be determined first according to the inherent deviation of the rotation angle of the rotary drive module (rotary cylinder). Then, according to the logical relationship between the second angle and the specifications and performance of the photoelectric sensor (for example, diameter specifications, optical fiber setting detection flux), and the structural dimensions of the second step (thickness, width and other parameters) (see the above formula), the structural dimensions of the second step that meet the set redundant angle (i.e., the second angle) or the specifications and performance of the selected photoelectric sensor can be set accordingly.

[0154] It should be pointed out that the valve plate rotation angle tolerances α and β corresponding to the two detection modes (optical path through-hole mode and optical path bypass mode) of the present invention may be consistent or different.

[0155] Fig.13 1 shows a side view of a regulating valve according to an embodiment of the present invention. A transparent observation window 1301 is provided on one end of the valve body. The second monitoring device 108 can monitor the internal conditions of the valve body through the transparent observation window 1301, for example, monitor the angular position of the internal valve plate. Moreover, the second monitoring device 108 can observe the internal conditions of the valve body when the regulating valve is working without affecting the normal use of the regulating valve. The second monitoring device 108 can automatically feedback the accurate angular position of the valve plate, replacing manual observation, and avoiding losses caused by manual judgment errors of technicians.

[0156] In one embodiment, the second detection device 108 may be a visual sensor, which includes a visual camera.

[0157] Fig.14A The figure shows the position of the valve plate monitored from the transparent observation window according to an embodiment of the present invention, wherein the valve plate is in the maximum open position.

[0158] Fig. 14B The valve plate position monitored from the transparent observation window according to an embodiment of the present invention is shown, wherein the valve plate is in the maximum closed position. In this figure, it can be seen that there are vertical valve plate marking lines on the front and rear surfaces of the valve plate, and the marking lines are located between the center line and the side of the valve plate.

[0159] Fig. 14C FIG. 2 shows the position of the valve plate monitored from the transparent observation window according to an embodiment of the present invention, wherein the valve plate is at a position different from Fig.14A and Fig. 14B In this figure, the valve plate is in a rotating state, and the marking line moves with it.

[0160] The visual sensor is used to measure (photograph) the distance from the side of the valve plate 701 or the valve plate marking line 706 to the side of the observation window to accurately determine the current angular position of the valve plate, with a measurement accuracy of ±0.2°.

[0161] Fig.15A FIG. 1 shows a top view of a valve plate rotating process according to an embodiment of the present invention, wherein the valve plate rotates at an angle of The distance e between the valve plate marking line 706 and the center line of the valve plate is as shown in the figure.

[0162] Fig. 15B A front view of camera detection according to an embodiment of the present invention is shown, wherein the valve plate marking line 706 is shown in the figure, the visual detection distance x represents the distance from the valve plate marking line 706 to the side of the observation window, and d represents the width of the observation window.

[0163] Fig.16A A top view of a fully opened valve plate according to an embodiment of the present invention is shown, wherein a valve plate marking line 706 is shown in the figure.

[0164] Fig. 16B A front view of camera detection when the valve plate is in the maximum open state according to an embodiment of the present invention is shown, wherein t represents the thickness of the valve plate, and x0 is the visual detection distance when the valve plate is fully opened.

[0165] Combination Fig.15A , Fig. 15B , Fig.16A as well as Fig. 16B , the rotation angle of the valve plate The following relationship exists between the visual detection distance x:

[0166]

[0167] in,

[0168] x represents the distance from the valve plate marking line to the side of the observation window;

[0169] w represents the width of the valve plate;

[0170] e represents the distance that the valve plate marking line deviates from the valve plate center line;

[0171] t represents the thickness of the valve plate;

[0172] d is the width of the observation window.

[0173] When x=x0=(dt) / 2, the valve plate is in the maximum open state.

[0174] According to the valve plate thickness, valve plate width, observation window size, scale offset distance, and the distance from the valve plate marking line to the side of the observation window, the current valve plate rotation angle can be accurately detected.

[0175] It should be understood that, from the application perspective, the photoelectric sensor solution or the visual sensor solution is a detection method for the non-contact control valve, and both can detect and judge the switch state of the control valve in the present invention. The characteristics of each are: the photoelectric sensor focuses on judging whether the rotation angle of the valve plate exceeds a certain limit value, and then judges whether the control valve is in an open state, a closed state or a rotating state. The visual sensor can accurately measure the rotation angle of the valve plate through the valve plate marking line to detect the switch state of the valve. In one embodiment, considering that the space in the semiconductor device is relatively limited, this type of non-contact valve can freely choose to use any one of the solutions as a detection method according to the specific application location / space limitations. In another embodiment, a combination of the two detection methods can be used at the same time to further verify the accuracy of the output signal.

[0176] Fig.17 FIG. 2 shows an application scenario of a regulating valve according to an embodiment of the present invention. The regulating valve of the present invention can be applied to a reaction chamber. The position of the regulating valve is as follows: Fig.17 As shown, different from Figure 1-Figure 3 The regulating valve is used for the bends of the pipeline. The positions of the air inlet port, the air outlet port and the observation window port of the regulating valve in this example have been modified so that it can be applied to the cross pipe.

[0177] When the cleaning gas is passed from the RPS chamber into the left and right chambers for cleaning, the two regulating valves can be opened to clean the chambers.

[0178] When the process gas 1701 is introduced into the reaction chamber for the process, if there is no regulating valve, the process gas 1701 may flow into the chamber on the other side along the path 1702, causing the process gases in the left and right chambers to mix and affect the process performance. Therefore, the regulating valve can be closed to prevent the gas in a certain chamber from flowing back and affecting the reaction of another chamber.

[0179] The terms and expressions used above are for descriptive purposes only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0180] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0181] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions may be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A regulating valve, characterized in that: include: The valve body comprises a valve plate for controlling the opening and closing of the internal gas passage, wherein the valve plate comprises a permanent magnet, a valve plate and a baffle structure connected from top to bottom; A sealing cover is installed above the valve body and sealingly covers the outer side of the permanent magnet of the valve plate; A rotating cylinder drives and switches the on / off state of the valve plate; The clamping jaw is arranged on the outer side of the sealing cover but does not contact the sealing cover. The upper center position of the clamping jaw is connected to the shaft of the rotating cylinder. There is a permanent magnet on each side of the clamping jaw. When the rotating cylinder rotates, the clamping jaw is driven to rotate. The valve plate rotates around its own central axis without contact following the clamping jaw under the action of magnetic attraction.

2. The regulating valve according to claim 1, characterized in that: The switching state of the valve plate includes an open state, a closed state, and a rotation state, wherein the rotation state is a state between the open state and the closed state; the open state is that the valve plate and the direction of the gas entering the valve body are at a 0°~0°±first angle α; the closed state is that the valve plate and the direction of the gas entering the valve body are at a 90°~90°±second angle β, wherein the first angle and the second angle are both greater than the rotation angle deviation of the rotary cylinder.

3. The regulating valve according to claim 1, characterized in that: Also includes: A thrust bearing is arranged below the permanent magnet of the valve plate and between the inner cavity wall of the valve body.

4. The regulating valve according to claim 1, characterized in that: Also includes: The O-ring is located between the bottom of the sealing cover and the top of the platform of the valve body and serves as a static sealing rubber ring.

5. The regulating valve according to claim 2, characterized in that: It also includes a first monitoring device, which is arranged on both sides of the valve body; wherein, The first monitoring device includes a first group of photoelectric sensors and a second group of photoelectric sensors arranged one above the other; The first group of photosensors and the second group of photosensors each have a transmitting side and a receiving side; The baffle structure includes a first step and a second step, the second step is located below the first step, the thickness of the second step is less than the thickness of the first step, and when the valve plate rotates, the first step and the second step rotate together; The first step is used to open and close the optical fiber path of the first group of photoelectric sensors; the first step has two through holes; The second step is used to open and close the optical fiber path of the second group of photoelectric sensors.

6. The regulating valve according to claim 5, characterized in that: When the valve plate is in the open state, the optical signal sent by the transmitting side of the first group of photoelectric sensors passes through one of the two through holes on the first step to reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating conduction; the optical signal sent by the transmitting side of the second group of photoelectric sensors is blocked by the second step and cannot reach the receiving side, and the second group of photoelectric sensors outputs a signal indicating non-conduction; When the valve plate is in the rotating state, the light signal emitted by the emitting side of the first group of photoelectric sensors cannot pass through any through hole on the first step and cannot reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating non-conduction; the light signal emitted by the emitting side of the second group of photoelectric sensors is blocked by the second step and cannot reach the receiving side, and the second group of photoelectric sensors outputs a signal indicating non-conduction; When the valve plate is in the closed state, the optical signal emitted by the emitting side of the first group of photoelectric sensors cannot pass through any through hole on the first step and cannot reach the receiving side, and the first group of photoelectric sensors outputs a signal indicating non-conduction; the optical signal emitted by the emitting side of the second group of photoelectric sensors bypasses the side of the second step and reaches the receiving side, and the second group of photoelectric sensors outputs a signal indicating conduction; The switch state of the valve plate is determined according to a combination of signals output by the first group of photoelectric sensors and the second group of photoelectric sensors.

7. The regulating valve according to claim 5, characterized in that: The first angle α is the rotation angle tolerance of the valve plate in the open state. The structural dimensions of the first step or the specifications and performance of the first group of photoelectric sensors that meet the first angle α are selected according to the following equation: in: d0 is the axial diameter of the optical fiber path of the first group of photoelectric sensors; d is the diameter of the through hole; t is the thickness of the first step.

8. The regulating valve according to claim 5, characterized in that: The second angle β is the rotation angle tolerance of the valve plate in the closed state. The structural dimensions of the second step or the specifications and performance of the second group of photoelectric sensors that meet the second angle β are selected according to the following equation: in: d0' is the axial diameter of the optical fiber path of the second group of photoelectric sensors; l is the distance from the center of the valve plate to the center of the optical fiber; t is the thickness of the second step; w is the width of the second step.

9. The regulating valve according to claim 1, characterized in that: It also includes a second monitoring device; and the valve body also includes three ports, wherein two of the three ports are ports for externally connected pipelines, and the other port is equipped with an observation window for connecting the second monitoring device; The front and back surfaces of the valve plate are provided with valve plate marking lines; The second monitoring device includes a visual sensor, which measures the distance x from the side of the valve plate or the valve plate marking line to the side of the observation window to accurately obtain the current rotation angle of the valve plate.

10. The regulating valve according to claim 9, characterized in that: The rotation angle of the valve plate Obtained by the following formula: in, x represents the distance from the valve plate marking line to the side of the observation window; w represents the width of the valve plate; e represents the distance that the valve plate marking line deviates from the valve plate center line; t represents the thickness of the valve plate; d represents the width of the observation window.

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