Diamond substrate surface treatment device and surface treatment method

Abstract

The invention belongs to the technical field of substrate surface treatment, and particularly relates to a diamond substrate surface treatment device and method. The fixing frame is fixedly connected to the top of the workbench; the mounting seat is arranged below the fixing frame; a second motor is started, an output shaft of the second motor drives a rotating frame to rotate, the rotating frame drives a first grinding wheel and a second grinding wheel to rotate, and when the first grinding wheel rotates to the lowest position, rough grinding is conducted; when the second grinding wheel rotates to the bottommost part, fine grinding is carried out; the effect of converting rough grinding and fine grinding is achieved; when the drying box rotates to the bottommost part, the drying box is used for drying the polished diamond sheets; during grinding, a third motor needs to be started, a second gear is driven to rotate through an output shaft of the third motor, a first gear is driven to rotate through the second gear, a rotating rod is driven to rotate through the first gear, and a first grinding wheel and a second grinding wheel are driven to rotate through the rotating rod, so that the grinding effect is achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of substrate surface treatment, in particular to a diamond substrate surface treatment device and a surface treatment method. Background Art

[0002] At present, heat dissipation is one of the core issues of vehicle operation efficiency in the international automobile system. There are many heat dissipation modes, such as natural heat dissipation, fan heat dissipation, water cooling and other liquid heat dissipation, all of which are aimed at improving vehicle energy efficiency. Using diamond materials as substrates for automotive power chips, including chip heat dissipation, heat sinks, and heat dissipation of automotive electronic modules, is the latest heat dissipation technology solution. Diamond substrates need to be treated with surface treatment devices during production.

[0003] A Chinese patent with publication number CN115476215A discloses a device for preparing an ultra-thin substrate, including a base and a carrier plate, wherein a first suction cup is fixedly connected to the carrier plate, a wafer substrate is placed on the first suction cup, and the wafer substrate is adsorbed and fixed by the first suction cup; a grinding block, wherein the grinding block is movably connected to the top of the carrier plate, after the grinding block contacts the wafer substrate, the grinding block rotates to grind the wafer substrate; a liquid tank, wherein the liquid tank is fixedly connected to the top of the base, a liquid spray pipe is connected to the liquid tank, and when the grinding block grinds the wafer substrate, the upper and lower surfaces of the wafer substrate are cooled to keep the upper and lower surfaces of the wafer substrate consistent, to prevent the upper surface temperature of the wafer substrate from being different and affecting the performance of the wafer substrate, and at the same time, cooling liquid is sprayed on the upper and lower surfaces of the wafer substrate to improve the cooling effect.

[0004] In the above technology, the grinding block can only complete one grinding of the substrate. If the grinding block is for coarse grinding, the abrasive particles are large, which will leave obvious scratches, pits and other defects on the surface of the lining, resulting in high surface roughness, and the flatness and smoothness cannot meet the requirements; if the grinding block is for fine grinding, the abrasive particles used for grinding are small, and the amount of material removed each time is very small. It takes a long grinding time to achieve a certain removal amount, resulting in low production efficiency.

[0005] To this end, the present invention provides a diamond substrate surface treatment device and a surface treatment method. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve the technical problem is: a diamond substrate surface treatment device described in the present invention comprises: Workbench; A fixed frame, fixedly connected to the top of the workbench; A mounting seat, arranged below the fixing frame; The first filter plate is arranged on the top of the workbench; A conversion mechanism is arranged below the mounting seat; The conversion mechanism includes a first grinding wheel, a second grinding wheel and a drying box; A second motor is fixedly connected to the mounting seat, an output shaft of the second motor passes through the mounting seat and is fixedly connected to a rotating frame, a rotating rod is rotatably connected to the rotating frame, one end of the rotating rod is fixedly connected to a first grinding wheel, the other end of the rotating rod is fixedly connected to a second grinding wheel, a first gear is fixedly connected to the rotating rod, a third motor is fixedly connected to an inner wall of the rotating frame, an output shaft of the third motor is fixedly connected to a second gear, and the second gear is meshed with the first gear; the first grinding wheel and the second grinding wheel are arranged above the first filter plate; The side walls of the rotating frame are fixedly connected with a drying box, and the drying box includes a heating wire and a fan.

[0008] Preferably, two fixed plates are fixedly connected to the bottom of the fixed frame, a first screw rod is rotatably connected between the two fixed plates through a bearing, a first motor is fixedly connected to one of the fixed plates, an output shaft of the first motor is fixedly connected to one end of the first screw rod, a moving block is threadedly connected to the first screw rod, two guide rods are fixedly connected between the two fixed plates, and the moving block is slidably connected to the two guide rods.

[0009] Preferably, an electric push rod is fixed to the bottom of the moving block, and the output end of the electric push rod is fixed to the top of the mounting seat; two side plates are symmetrically fixed to the side walls of the electric push rod, and two sliding columns are fixed to the top of the mounting seat, and the two side plates are respectively slidably connected to the sliding columns.

[0010] Preferably, a processing groove is provided on the workbench, and the first filter plate is rotatably connected in the processing groove through a bearing; a fifth motor is fixedly connected to the bottom inner wall of the processing groove, and the output shaft of the fifth motor is fixedly connected to a U-shaped frame, and the top of the U-shaped frame is fixedly connected to the bottom of the first filter plate; a fourth motor is fixedly connected to the bottom inner wall of the U-shaped frame, and the output shaft of the fourth motor is fixedly connected to a second screw rod, and the top of the second screw rod is rotatably connected to the bottom of the first filter plate through a bearing; a lifting block is threadedly connected to the second screw rod, and four sliding openings are provided on the first filter plate, and sliders are slidably connected in the sliding openings, and the bottoms of the sliders are rotatably connected to connecting rods through pins, and one ends of the connecting rods are rotatably connected to the lifting block through pins, and the four connecting rods are circumferentially arranged on the outside of the second screw rod.

[0011] Preferably, a second filter plate is fixedly connected to the inner wall of the bottom end of the processing groove, a collecting chamber is opened at one end of the workbench, a sealing plate is installed on one side of the collecting chamber, a scraper is fixedly connected to the output shaft of the fifth motor, the scraper is in close contact with the second filter plate, and the collecting chamber cooperates with the processing groove.

[0012] Preferably, the bottom of the workbench is fixedly connected to a base plate, the top of the base plate is provided with a water tank, the top of the water tank is fixedly connected to a water pump, the water pump is installed with a water outlet pipe, one end of the outlet pipe is connected and fixedly connected to the water tank; the top of the workbench is fixedly connected to a protective frame, the protective frame is arranged on the outside of the first filter plate; the other end of the outlet pipe is connected and fixedly connected to the protective frame; the bottom of the processing trough is connected and fixedly connected to a second drain pipe, one end of the second drain pipe is connected and fixedly connected to the water tank; the bottom of the collecting chamber is fixedly connected to a funnel, one end of the funnel is fixedly connected to the first drain pipe, one end of the first drain pipe is connected and fixedly connected to the water tank, the bottom of the collecting chamber is hollowed out and fixedly connected to a filter net, the filter net cooperates with the funnel.

[0013] Preferably, the top of the slider is fixedly connected to a mounting frame, the top of the mounting frame is fixedly connected to a pen-shaped cylinder, the output end of the pen-shaped cylinder is fixedly connected to a connecting block, the bottom of the connecting block is fixedly connected to a second clamping plate, the top of the slider is rotatably connected to the first clamping plate, the top of the first clamping plate is fixedly connected to a vertical rod, and the second clamping plate slides on the first clamping plate; a placing table is fixedly connected to the top center of the first filter plate, and the top of the placing table is flush with the first clamping plate.

[0014] Preferably, a method for treating the surface of a diamond substrate comprises the following steps: S1: Use high temperature and high pressure six-transformation diamond top press to manufacture single crystal diamond slices; S2: Place the diamond slice in an ultrasonic cleaning apparatus containing organic solvents such as acetone and ethanol, and perform ultrasonic cleaning for 30 minutes to remove oil and dust on the surface; S3: Use the first grinding wheel with a large particle size for preliminary grinding to remove large scratches and bumps on the surface, and then use the second grinding wheel with a large particle size for fine grinding to make the surface smoother and flatter; S4: Cutting the diamond slice into a set shape according to the requirements; S5: After the surface treatment is completed, the surface quality of the diamond slice needs to be tested to produce standard diamond heat sink materials.

[0015] Preferably, the method for manufacturing a single crystal diamond slice in S1 comprises the following steps: S101: Prepare raw materials: select high-purity graphite as the main raw material and add appropriate alloy catalyst powder; S102: Assembling a synthetic block: Graphite powder, alloy catalyst powder and additives are mixed in a certain proportion, and are made into a graphite core column through processes such as granulation, static pressure, vacuum reduction, inspection, and weighing; then the graphite core column is assembled with a composite block, auxiliary parts and other sealing and pressure-transmitting media to form a synthetic block; S103: Synthesis: setting synthesis conditions, starting a six-sided top press, heating and pressurizing and maintaining constant pressure for a long time, so that graphite is gradually converted into diamond under high temperature and high pressure; S104: Treatment and processing: After the crystal growth is completed, the heat is stopped and the pressure is released, and the sealed pressure transmission medium is removed to obtain the synthetic column, which is then purified and sorted to obtain the diamond single crystal; the diamond single crystal is then processed into diamond slices through cutting, grinding and polishing.

[0016] Preferably, the synthesis conditions in S103 include a pressure of 5.5-6.0 GPa and a temperature of 1450-2000° C.; the diamond flakes in S104 include round flakes, square flakes and special-shaped flakes, which are used for high heat dissipation requirements of automobiles.

[0017] The beneficial effects of the present invention are as follows: 1. A diamond substrate surface treatment device and a surface treatment method described in the present invention, through the cooperation of a first grinding wheel, a second grinding wheel and a drying box, when grinding is needed, by turning on the second motor, the output shaft of the second motor drives the rotating frame to rotate, and the rotating frame drives the first grinding wheel and the second grinding wheel to rotate, when the first grinding wheel rotates to the bottom, rough grinding is performed; when the second grinding wheel rotates to the bottom, fine grinding is performed, and the effect of switching between rough grinding and fine grinding is achieved; wherein when the drying box rotates to the bottom, it is used to dry the diamond slice after grinding; when grinding, it is necessary to turn on the third motor, the output shaft of the third motor drives the second gear to rotate, the second gear drives the first gear to rotate, the first gear drives the rotating rod to rotate, and the rotating rod drives the first grinding wheel and the second grinding wheel to rotate, thereby achieving the grinding effect.

[0018] 2. A diamond substrate surface treatment device and a surface treatment method described in the present invention use a slider, a connecting rod, a lifting block, a first clamping plate and a second clamping plate to clamp a diamond slice. The fourth motor needs to be turned on to drive the second screw to rotate through the output shaft of the fourth motor, and the lifting block is driven to move up and down through the second screw. The lifting block drives one end of the connecting rod to move. When one end of the connecting rod moves in the vertical direction, it will drive the other end to slide horizontally. The slider is driven to slide horizontally through the connecting rod, and the first clamping plate and the second clamping plate are driven to slide horizontally through the slider until the diamond slice is clamped and fixed. When grinding, the fifth motor needs to be turned on to drive the U-shaped frame to rotate through the output shaft of the fifth motor, drive the first filter plate to rotate through the U-shaped frame, and drive the first clamping plate and the second clamping plate to rotate through the first filter plate, thereby realizing a large-scale grinding function for the diamond slice.

[0019] 3. The diamond substrate surface treatment device and surface treatment method described in the present invention greatly improve the heat dissipation and efficiency of automobiles by utilizing the high heat dissipation performance of diamonds; by using heat sink technology, diamonds have irreplaceable performance advantages in various places requiring high-efficiency heat dissipation, especially places with high heat dissipation requirements such as automobiles. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1 is a stereogram of the present invention; Figure 2 is a cross-sectional view of the present invention; Figure 3 It is a structural schematic diagram of the mounting seat in the present invention; Figure 4 It is a schematic structural diagram of the first grinding wheel and the second grinding wheel in the present invention; Figure 5 It is a structural schematic diagram of the first filter plate in the present invention; Figure 6 It is a structural schematic diagram of the placement table in the present invention; Figure 7 is a cross-sectional view of the collecting chamber in the present invention; Figure 8 is a method flow chart of the diamond substrate surface treatment method of the present invention; Fig. 9 is a flow chart of the method for manufacturing a single crystal diamond slice in the present invention; Fig.10 It is a performance diagram of the diamond output power in the present invention; In the figure: 1, workbench; 11, bottom plate; 2, fixed frame; 21, fixed plate; 211, first screw rod; 212, guide rod; 213, moving block; 214, first motor; 22, electric push rod; 221, side plate; 222, slide column; 223, mounting seat; 23, second motor; 231, rotating frame; 232, first grinding wheel; 233, second grinding wheel; 234, drying box; 235, rotating rod; 236, first gear; 237, second gear; 238, third motor; 3, protection frame; 31, first filter plate; 311, sliding port; 312, Slider; 313, connecting rod; 314, lifting block; 315, second screw rod; 316, fourth motor; 317, U-shaped frame; 318, scraper; 319, fifth motor; 32, second filter plate; 321, collecting chamber; 322, blocking plate; 33, water tank; 331, water outlet pipe; 332, water pump; 333, funnel; 334, first drain pipe; 335, filter screen; 336, second drain pipe; 34, mounting frame; 341, pen-shaped cylinder; 342, connecting block; 343, first clamping plate; 344, second clamping plate; 345, vertical rod; 35, placement table. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0023] like Figures 1 to 7 As shown, a diamond substrate surface treatment device according to an embodiment of the present invention comprises: a workbench 1; a fixing frame 2, fixedly connected to the top of the workbench 1; a mounting seat 223, arranged below the fixing frame 2; a first filter plate 31, arranged at the top of the workbench 1; a conversion mechanism, arranged below the mounting seat 223; the conversion mechanism comprises a first grinding wheel 232, a second grinding wheel 233 and a drying box 234; a second motor 23 is fixedly connected to the mounting seat 223, an output shaft of the second motor 23 passes through the mounting seat 223, and is fixedly connected to a rotating frame 231, and a rotating rod 235 is rotatably connected to the rotating frame 231. A first grinding wheel 232 is fixedly connected to one end of the rotating rod 235, a second grinding wheel 233 is fixedly connected to the other end of the rotating rod 235, a first gear 236 is fixedly connected to the rotating rod 235, a third motor 238 is fixedly connected to the inner wall of the rotating frame 231, a second gear 237 is fixedly connected to the output shaft of the third motor 238, and the second gear 237 is meshed with the first gear 236; the first grinding wheel 232 and the second grinding wheel 233 are arranged above the first filter plate 31; a drying box 234 is fixedly connected to the side walls of the rotating frame 231, and the drying box 234 includes a heating wire and a fan.

[0024] Diamond has the highest thermal conductivity among the natural materials known so far, which is 4 times greater than silicon carbide, 13 times greater than silicon, and 43 times greater than gallium arsenide. The output power of a single chip can reach 17KW, which is the highest output power of semiconductor materials at present. The operating frequency also reaches 600GHz, which is also the highest operating frequency of semiconductor materials at present. Therefore, the high heat dissipation performance of diamond can be used to greatly improve the heat dissipation and efficiency of automobiles. In the prior art, only one grinding of the substrate can be completed. If it is rough grinding, the abrasive particles are large, which will leave obvious scratches, pits and other defects on the surface of the lining, resulting in high surface roughness, and the flatness and finish cannot meet the requirements; if it is fine grinding, the abrasive particles used for grinding are small, and the amount of material removed each time is very small. It takes a long grinding time to achieve a certain removal amount, resulting in low production efficiency. When the conversion mechanism provided by the present invention is used, when grinding is required, the second motor 23 is turned on, and the output shaft of the second motor 23 drives the rotating frame 231 to rotate, and the rotating frame 231 drives the first grinding wheel 232 and the second grinding wheel 233 Rotate, when the first grinding wheel 232 rotates to the bottom, rough grinding is performed; when the second grinding wheel 233 rotates to the bottom, fine grinding is performed; the effect of switching between rough grinding and fine grinding is achieved; wherein when the drying box 234 rotates to the bottom, it is used to dry the diamond slice after grinding; when grinding, it is necessary to turn on the third motor 238, and the second gear 237 is driven to rotate by the output shaft of the third motor 238, and the first gear 236 is driven to rotate by the second gear 237, and the rotating rod 235 is driven to rotate by the first gear 236, and the first grinding wheel 232 and the second grinding wheel 233 are driven to rotate by the rotating rod 235, so as to achieve the grinding effect.

[0025] like Figure 3 As shown, two fixed plates 21 are fixedly connected to the bottom of the fixed frame 2, and a first screw rod 211 is rotatably connected between the two fixed plates 21 through a bearing, a first motor 214 is fixedly connected to one of the fixed plates 21, an output shaft of the first motor 214 is fixedly connected to one end of the first screw rod 211, a moving block 213 is threadedly connected to the first screw rod 211, two guide rods 212 are fixedly connected between the two fixed plates 21, and the moving block 213 is slidably connected to the two guide rods 212.

[0026] When the first screw rod 211 provided by the present invention is in use, the positions of the first grinding wheel 232 and the second grinding wheel 233 need to be adjusted according to the size of the diamond slice. By turning on the first motor 214, the output shaft of the first motor 214 drives the first screw rod 211 to rotate, and the first screw rod 211 drives the moving block 213 to move, and the moving block 213 drives the electric push rod 22, the mounting seat 223, the first grinding wheel 232 and the second grinding wheel 233 to move until they move to a suitable position, so as to facilitate the grinding of diamond slices of different sizes.

[0027] like Figure 3 As shown, the bottom of the moving block 213 is fixedly connected to an electric push rod 22, and the output end of the electric push rod 22 is fixedly connected to the top of the mounting seat 223; two side plates 221 are symmetrically fixedly connected to the side wall of the electric push rod 22, and the top of the mounting seat 223 is fixedly connected to two sliding columns 222, and the two side plates 221 are slidably connected to the sliding columns 222 respectively.

[0028] The electric push rod 22 provided by the present invention is convenient for adjusting the height of the first grinding wheel 232 and the second grinding wheel 233 when in use. The height of the first grinding wheel 232 and the second grinding wheel 233 should be adjusted during grinding and loading and unloading. By turning on the electric push rod 22, the mounting seat 223 is driven to move through the output end of the electric push rod 22. When the mounting seat 223 moves, the sliding column 222 is driven to move. When the sliding column 222 moves, the sliding column 222 slides on the side plate 221, thereby ensuring that the mounting seat 223 moves in the vertical direction. The first grinding wheel 232 and the second grinding wheel 233 are driven to move through the mounting seat 223, thereby adjusting the height of the first grinding wheel 232 and the second grinding wheel 233.

[0029] like Figure 2 and Figure 5 As shown, a processing groove is provided on the workbench 1, and the first filter plate 31 is rotatably connected in the processing groove through a bearing; a fifth motor 319 is fixedly connected to the bottom inner wall of the processing groove, and the output shaft of the fifth motor 319 is fixedly connected to a U-shaped frame 317, and the top of the U-shaped frame 317 is fixedly connected to the bottom of the first filter plate 31; a fourth motor 316 is fixedly connected to the bottom inner wall of the U-shaped frame 317, and the output shaft of the fourth motor 316 is fixedly connected to a second screw rod 315, and the second screw rod 315 is fixedly connected to the bottom inner wall of the U-shaped frame 317. The top is rotatably connected to the bottom of the first filter plate 31 through a bearing; the second screw rod 315 is threadedly connected to a lifting block 314, and the first filter plate 31 is provided with four sliding openings 311, and sliders 312 are slidably connected in the sliding openings 311, and the bottoms of the sliders 312 are rotatably connected to connecting rods 313 through pins, and one end of the connecting rods 313 is rotatably connected to the lifting block 314 through a pin, and the four connecting rods 313 are arranged circumferentially on the outside of the second screw rod 315.

[0030] When the slider 312, the connecting rod 313 and the lifting block 314 provided by the present invention are in use, when clamping the diamond slice, the fourth motor 316 needs to be turned on, and the second screw rod 315 is driven to rotate through the output shaft of the fourth motor 316, and the lifting block 314 is driven to move up and down through the second screw rod 315, and one end of the connecting rod 313 is driven to move through the lifting block 314. When one end of the connecting rod 313 moves in the vertical direction, it will drive the other end to slide horizontally, and the slider 312 is driven to slide horizontally through the connecting rod 313, and the first clamping plate 343 and the second clamping plate 344 are driven to slide horizontally through the slider 312 until the diamond slice is clamped and fixed; when grinding, the fifth motor 319 needs to be turned on, and the U-shaped frame 317 is driven to rotate through the output shaft of the fifth motor 319, and the first filter plate 31 is driven to rotate through the U-shaped frame 317, and the first clamping plate 343 and the second clamping plate 344 are driven to rotate through the first filter plate 31, so as to realize the grinding function of the diamond slice in a large range.

[0031] like Figure 2 and Figure 7 As shown, a second filter plate 32 is fixedly connected to the inner wall of the bottom end of the processing groove, a collecting chamber 321 is opened at one end of the workbench 1, a sealing plate 322 is installed on one side of the collecting chamber 321, and a scraper 318 is fixedly connected to the output shaft of the fifth motor 319. The scraper 318 is in close contact with the second filter plate 32, and the collecting chamber 321 cooperates with the processing groove.

[0032] The collecting chamber 321 provided by the present invention is used to collect grinding waste when in use. The aperture of the first filter plate 31 is relatively large, and both the grinding waste and water can flow down, and the waste is filtered when passing through the second filter plate 32; by turning on the fifth motor 319, the fifth motor 319 drives the scraper 318 to rotate, and the fertilizer on the second filter plate 32 is scraped into the collecting chamber 321 through the scraper 318, so as to prevent the waste from clogging the second filter plate 32 and affecting the water flow.

[0033] like Figure 1 to Figure 2As shown, the bottom of the workbench 1 is fixedly connected to a bottom plate 11, the top of the bottom plate 11 is provided with a water tank 33, the top of the water tank 33 is fixedly connected to a water pump 332, the water pump 332 is installed with a water outlet pipe 331, one end of the water outlet pipe 331 is connected and fixedly connected to the water tank 33; the top of the workbench 1 is fixedly connected to a protective frame 3, the protective frame 3 is arranged on the outside of the first filter plate 31; the other end of the water outlet pipe 331 is connected and fixedly connected to the protective frame 3; the bottom of the processing groove is connected and fixedly connected to a second drain pipe 336, one end of the second drain pipe 336 is connected and fixedly connected to the water tank 33; the bottom of the collecting chamber 321 is fixedly connected to a funnel 333, one end of the funnel 333 is fixedly connected to a first drain pipe 334, one end of the first drain pipe 334 is connected and fixedly connected to the water tank 33, the bottom of the collecting chamber 321 is hollowed out and fixedly connected to a filter screen 335, the filter screen 335 cooperates with the funnel 333.

[0034] The first drain pipe 334 and the second drain pipe 336 provided by the present invention are used for circulating water when in use. During grinding, spraying is required to prevent the high grinding temperature from damaging the diamond slice, and spraying can also prevent the grinding waste from splashing. By turning on the water pump 332, the water pump 332 draws out the water in the water tank 33, sprays it on the diamond slice through the outlet pipe 331, and then is filtered through the second filter plate. The water in the processing tank flows to the water tank 33 through the second drain pipe 336, and the water in the collection box is filtered through the filter net 335, and finally flows to the water tank 33 through the funnel 333 and the first drain pipe 334, and is used to spray the diamond slice again.

[0035] like Figure 6 As shown, the top of the slider 312 is fixedly connected to a mounting frame 34, the top of the mounting frame 34 is fixedly connected to a pen-shaped cylinder 341, the output end of the pen-shaped cylinder 341 is fixedly connected to a connecting block 342, the bottom of the connecting block 342 is fixedly connected to a second clamping plate 344, the top of the slider 312 is rotatably connected to a first clamping plate 343, the top of the first clamping plate 343 is fixedly connected to a vertical rod 345, and the second clamping plate 344 slides on the first clamping plate 343; the top center of the first filter plate 31 is fixedly connected to a placing table 35, and the top of the placing table 35 is flush with the first clamping plate 343.

[0036] When the first clamping plate 343 and the second clamping plate 344 provided by the present invention are in use, during the clamping process, it is necessary to open the pen-shaped cylinder 341, and the connecting block 342 is driven to move through the output end of the pen-shaped cylinder 341, and the second clamping plate 344 is driven to move through the connecting block 342, and the second clamping plate 344 slides on the vertical rod 345 until the diamond sheet is fixed; wherein the placing table 35 is used to support the diamond sheet to prevent the diamond sheet from breaking when the grinding force is large.

[0037] like Figure 8-Figure 10 As shown, a method for treating the surface of a diamond substrate comprises the following steps: S1: Use high temperature and high pressure six-transformation diamond top press to manufacture single crystal diamond slices; S2: Place the diamond slice in an ultrasonic cleaning apparatus containing organic solvents such as acetone and ethanol, and perform ultrasonic cleaning for 30 minutes to remove oil and dust on the surface; S3: Firstly use the first grinding wheel 232 with a large particle size to perform preliminary grinding to remove large scratches and protrusions on the surface, and then use the second grinding wheel 233 with a large particle size to perform fine grinding to make the surface smoother and flatter; S4: Cutting the diamond slice into a set shape according to the requirements; S5: After the surface treatment is completed, the surface quality of the diamond slice needs to be tested to produce standard diamond heat sink materials.

[0038] The method for manufacturing a single crystal diamond slice in S1 comprises the following steps: S101: Prepare raw materials: select high-purity graphite as the main raw material and add appropriate alloy catalyst powder; S102: Assembling a synthetic block: Graphite powder, alloy catalyst powder and additives are mixed in a certain proportion, and are made into a graphite core column through processes such as granulation, static pressure, vacuum reduction, inspection, and weighing; then the graphite core column is assembled with a composite block, auxiliary parts and other sealing and pressure-transmitting media to form a synthetic block; S103: Synthesis: setting synthesis conditions, starting a six-sided top press, heating and pressurizing and maintaining constant pressure for a long time, so that graphite is gradually converted into diamond under high temperature and high pressure; S104: Treatment and processing: After the crystal growth is completed, the heat is stopped and the pressure is released, and the sealed pressure transmission medium is removed to obtain the synthetic column, which is then purified and sorted to obtain the diamond single crystal; the diamond single crystal is then processed into diamond slices through cutting, grinding and polishing.

[0039] Embodiment 1: The synthesis conditions in S103 include a pressure of 5.5 GPa and a temperature of 1450° C. The diamond flakes in S104 include round flakes, square flakes and special-shaped flakes, which are used for high heat dissipation requirements of automobiles.

[0040] Embodiment 2: The synthesis conditions in S103 include a pressure of 5.75 GPa and a temperature of 1725° C. The diamond flakes in S104 include round flakes, square flakes and special-shaped flakes, which are used for high heat dissipation requirements of automobiles.

[0041] Embodiment three: The synthesis conditions in S103 include a pressure of 6.0 GPa and a temperature of 2000° C. The diamond flakes in S104 include round flakes, square flakes and special-shaped flakes, which are used for high heat dissipation requirements of automobiles.

[0042] The diamond provided by the present invention greatly improves automobile heat dissipation and efficiency by utilizing the high heat dissipation performance of diamond during use; by using heat sink technology, diamond has irreplaceable performance advantages in various places requiring high-efficiency heat dissipation, especially places with high heat dissipation requirements such as automobiles.

[0043] Working principle: When clamping the diamond slice, the fourth motor 316 needs to be turned on, and the second screw rod 315 is driven to rotate through the output shaft of the fourth motor 316, and the lifting block 314 is driven to move up and down through the second screw rod 315, and one end of the connecting rod 313 is driven to move through the lifting block 314. When one end of the connecting rod 313 moves in the vertical direction, it will drive the other end to slide horizontally, and the slider 312 is driven to slide horizontally through the connecting rod 313, and the first clamping plate 343 and the second clamping plate 344 are driven to slide horizontally through the slider 312 until the diamond slice is clamped and fixed; when grinding, the fifth motor 319 needs to be turned on, and the fifth motor 319 is driven to rotate. The output shaft drives the U-shaped frame 317 to rotate, and the U-shaped frame 317 drives the first filter plate 31 to rotate, and the first filter plate 31 drives the first clamping plate 343 and the second clamping plate 344 to rotate, so as to realize the grinding function of the diamond slice in a large range; during the clamping process, it is necessary to open the pen-shaped cylinder 341, and the output end of the pen-shaped cylinder 341 drives the connecting block 342 to move, and the connecting block 342 drives the second clamping plate 344 to move, and the second clamping plate 344 slides on the vertical rod 345 until the diamond slice is fixed; wherein the placing table 35 is used to support the diamond slice to prevent the diamond slice from breaking when the grinding force is large; When grinding is required, the second motor 23 is turned on, and the output shaft of the second motor 23 drives the rotating frame 231 to rotate, and the rotating frame 231 drives the first grinding wheel 232 and the second grinding wheel 233 to rotate. When the first grinding wheel 232 rotates to the bottom, rough grinding is performed; when the second grinding wheel 233 rotates to the bottom, fine grinding is performed, so as to achieve the effect of switching between rough grinding and fine grinding; wherein when the drying box 234 rotates to the bottom, it is used to dry the diamond slice after grinding; when grinding, the third motor 238 needs to be turned on, and the output shaft of the third motor 238 drives the second gear 237 to rotate, and the second gear 237 drives the first gear 236 The first gear 236 drives the rotating rod 235 to rotate, and the rotating rod 235 drives the first grinding wheel 232 and the second grinding wheel 233 to rotate, so as to achieve the grinding effect; the positions of the first grinding wheel 232 and the second grinding wheel 233 need to be adjusted according to the size of the diamond slice, and the first motor 214 is turned on, and the output shaft of the first motor 214 drives the first screw rod 211 to rotate, and the first screw rod 211 drives the moving block 213 to move, and the moving block 213 drives the electric push rod 22, the mounting seat 223, the first grinding wheel 232 and the second grinding wheel 233 to move until they move to a suitable position, so as to facilitate the grinding of diamond slices of different sizes; During grinding, spraying is required to prevent the diamond slices from being damaged by the high grinding temperature, and spraying can also prevent the grinding waste from splashing; by turning on the water pump 332, the water in the water tank 33 is pumped out by the water pump 332, and the water is sprayed on the diamond slices through the outlet pipe 331, and then filtered by the second filter plate, the water in the processing tank flows to the water tank 33 through the second drain pipe 336, the water in the collection box is filtered through the filter net 335, and finally flows to the water tank 33 through the funnel 333 and the first drain pipe 334, and is used to spray the diamond slices again; the aperture of the first filter plate 31 is relatively large, and both the grinding waste and water can flow down, and the waste is filtered when passing through the second filter plate 32; by turning on the fifth motor 319, the fifth motor 319 drives the scraper 318 to rotate, and the fertilizer on the second filter plate 32 is scraped into the collection chamber 321 through the scraper 318, so as to prevent the waste from clogging the second filter plate 32 and affecting the water flow.

[0044] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A diamond substrate surface treatment device, comprising: Workbench (1); A fixed frame (2) fixedly connected to the top of the workbench (1); A mounting seat (223) is disposed below the fixing frame (2); A first filter plate (31) is arranged on the top of the workbench (1); A conversion mechanism is arranged below the mounting seat (223); Features: The conversion mechanism comprises a first grinding wheel (232), a second grinding wheel (233) and a drying box (234); The mounting seat (223) is fixedly connected to a second motor (23); an output shaft of the second motor (23) passes through the mounting seat (223) and is fixedly connected to a rotating frame (231); a rotating rod (235) is rotatably connected to the rotating frame (231); one end of the rotating rod (235) is fixedly connected to a first grinding wheel (232); the other end of the rotating rod (235) is fixedly connected to a second grinding wheel (233); a first gear (236) is fixedly connected to the rotating rod (235); a third motor (238) is fixedly connected to an inner wall of the rotating frame (231); an output shaft of the third motor (238) is fixedly connected to a second gear (237); the second gear (237) is meshed with the first gear (236); the first grinding wheel (232) and the second grinding wheel (233) are arranged above the first filter plate (31); A drying box (234) is fixedly connected to the side walls of the rotating frame (231), and the drying box (234) includes a heating wire and a fan.

2. A diamond substrate surface treatment device according to claim 1, characterized in that: Two fixed plates (21) are fixedly connected to the bottom of the fixed frame (2); a first screw rod (211) is rotatably connected between the two fixed plates (21) via a bearing; a first motor (214) is fixedly connected to one of the fixed plates (21); an output shaft of the first motor (214) is fixedly connected to one end of the first screw rod (211); a moving block (213) is threadedly connected to the first screw rod (211); two guide rods (212) are fixedly connected between the two fixed plates (21); and the moving block (213) is slidably connected to the two guide rods (212).

3. A diamond substrate surface treatment device according to claim 2, characterized in that: An electric push rod (22) is fixedly connected to the bottom of the moving block (213), and an output end of the electric push rod (22) is fixedly connected to the top of a mounting seat (223); two side plates (221) are symmetrically fixedly connected to the side wall of the electric push rod (22), and two sliding columns (222) are fixedly connected to the top of the mounting seat (223), and the two side plates (221) are slidably connected to the sliding columns (222) respectively.

4. A diamond substrate surface treatment device according to claim 3, characterized in that: The workbench (1) is provided with a processing groove, and the first filter plate (31) is rotatably connected in the processing groove via a bearing; a fifth motor (319) is fixedly connected to the inner wall of the bottom of the processing groove, the output shaft of the fifth motor (319) is fixedly connected to a U-shaped frame (317), and the top of the U-shaped frame (317) is fixedly connected to the bottom of the first filter plate (31); a fourth motor (316) is fixedly connected to the inner wall of the bottom of the U-shaped frame (317), the output shaft of the fourth motor (316) is fixedly connected to a second screw rod (315), and the top of the second screw rod (315) is fixedly connected to the inner wall of the bottom of the U-shaped frame (317). The second screw rod (315) is rotatably connected to the bottom of the first filter plate (31) via a bearing; a lifting block (314) is threadedly connected to the second screw rod (315); four sliding openings (311) are provided on the first filter plate (31); a slider (312) is slidably connected in each of the sliding openings (311); the bottom of each of the sliders (312) is rotatably connected to a connecting rod (313) via a pin; one end of each of the connecting rods (313) is rotatably connected to the lifting block (314) via a pin; and the four connecting rods (313) are arranged circumferentially on the outside of the second screw rod (315).

5. A diamond substrate surface treatment device according to claim 4, characterized in that: A second filter plate (32) is fixedly connected to the inner wall of the bottom end of the processing groove, a collecting chamber (321) is opened at one end of the workbench (1), a blocking plate (322) is installed on one side of the collecting chamber (321), a scraper (318) is fixedly connected to the output shaft of the fifth motor (319), the scraper (318) is in close contact with the second filter plate (32), and the collecting chamber (321) cooperates with the processing groove.

6. A diamond substrate surface treatment device according to claim 5, characterized in that: The bottom of the workbench (1) is fixedly connected to a bottom plate (11); a water tank (33) is provided on the top of the bottom plate (11); a water pump (332) is fixedly connected to the top of the water tank (33); a water outlet pipe (331) is installed on the water pump (332); one end of the water outlet pipe (331) is connected to and fixedly connected to the water tank (33); a protective frame (3) is fixedly connected to the top of the workbench (1); the protective frame (3) is provided on the outside of the first filter plate (31); the other end of the water outlet pipe (331) is connected to and fixedly connected to the protective frame (3). The bottom of the processing groove is connected and fixedly connected to a second drainage pipe (336), one end of which is connected and fixedly connected to the water tank (33); the bottom of the collecting chamber (321) is fixedly connected to a funnel (333), one end of which is fixedly connected to a first drainage pipe (334), one end of which is connected and fixedly connected to the water tank (33); the bottom of the collecting chamber (321) is hollowed out and fixedly connected to a filter screen (335), and the filter screen (335) cooperates with the funnel (333).

7. A diamond substrate surface treatment device according to claim 6, characterized in that: The top of each of the sliders (312) is fixedly connected to a mounting frame (34), the top of each of the mounting frames (34) is fixedly connected to a pen-shaped cylinder (341), the output end of each of the pen-shaped cylinders (341) is fixedly connected to a connecting block (342), the bottom of each of the connecting blocks (342) is fixedly connected to a second clamping plate (344), the top of each of the sliders (312) is rotatably connected to a first clamping plate (343), the top of each of the first clamping plate (343) is fixedly connected to a vertical rod (345), and the second clamping plate (344) slides on the first clamping plate (343); a placement platform (35) is fixedly connected to the center of the top of the first filter plate (31), and the top of the placement platform (35) is flush with the first clamping plate (343).

8. A diamond substrate surface treatment method, applicable to a diamond substrate surface treatment device according to any one of claims 1 to 7, characterized in that: The following steps are involved: S1: Use high temperature and high pressure six-transformation diamond top press to manufacture single crystal diamond slices; S2: Place the diamond slice in an ultrasonic cleaning apparatus containing an organic solvent and perform ultrasonic cleaning for 30 minutes to remove oil and dust on the surface; S3: first use a first grinding wheel (232) with a large particle size to perform preliminary grinding to remove large scratches and protrusions on the surface, and then use a second grinding wheel (233) with a large particle size to perform fine grinding to make the surface smoother and flatter; S4: Cutting the diamond slice into a set shape according to the requirements; S5: After the surface treatment is completed, the surface quality of the diamond slice needs to be tested to produce standard diamond heat sink materials.

9. A diamond substrate surface treatment method according to claim 8, characterized in that: The method for manufacturing a single crystal diamond slice in S1 comprises the following steps: S101: Prepare raw materials: select high-purity graphite as the main raw material and add alloy catalyst powder; S102: Assembling a synthetic block: Graphite powder, alloy catalyst powder and additives are mixed in a certain proportion, and a graphite core column is made through processes such as granulation, static pressure, vacuum reduction, inspection and weighing; and then the graphite core column and the sealing pressure transmission medium are assembled together to form a synthetic block; S103: Synthesis: setting synthesis conditions, starting a six-sided top press, heating and pressurizing and maintaining constant pressure for a long time, so that graphite is gradually converted into diamond under high temperature and high pressure; S104: Treatment and processing: After the crystal growth is completed, the heat is stopped and the pressure is released, and the sealed pressure transmission medium is removed to obtain the synthetic column, which is then purified and sorted to obtain the diamond single crystal; the diamond single crystal is then processed into diamond slices through cutting, grinding and polishing.

10. A diamond substrate surface treatment method according to claim 9, characterized in that: The synthesis conditions in S103 include a pressure of 5.5-6.0 GPa and a temperature of 1450-2000° C. The diamond flakes in S104 include round flakes, square flakes and special-shaped flakes, which are used for high heat dissipation requirements of automobiles.

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