Six-degree-of-freedom precision motion platform

Abstract

The invention belongs to the technical field of photoetching machines, and particularly relates to a six-degree-of-freedom precise motion platform which comprises a base, a macro motion module, a micro motion module, an air floatation module and a substrate platform, the macro motion module comprises an X-direction driving module and a Y-direction driving module, and the micro motion module comprises a base, a vertical driving module, a rotary driving module and a handover module. The air floatation module comprises an air floatation left side assembly, an air floatation right side assembly and an air floatation middle assembly. The base table comprises a micropositioner and a base suction cup. In the invention, the macro-motion module realizes the movement of the substrate table in the X direction and the Y direction through the X-direction driving module and the Y-direction driving module respectively, and the micro-motion module realizes the adjustment of the substrate table in the Z direction, the Rx direction and the Ry direction, the adjustment of the substrate table in the Rz direction and the uploading and downloading of the substrate table through the vertical driving module, the rotary driving module and the handover module respectively. Therefore, the six-degree-of-freedom control of the motion platform can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography machines, and in particular to a six-degree-of-freedom precision motion table. Background Art

[0002] As a key subsystem of the lithography machine, the motion stage subsystem of the lithography machine is mainly used to support the silicon wafer and realize the horizontal and vertical precision movement of the silicon wafer in the exposure scene. The control accuracy of the motion stage plays a vital role in the overlay accuracy of the lithography machine and plays a certain role in determining whether the production process meets the requirements. In particular, high-precision positioning control technology in a small travel range is still a key factor limiting the lithography machine.

[0003] Existing motion platforms mostly use voice coil motors for micro-adjustment. Although they have the advantages of high corresponding speed, they have poor adjustment stability and high cost. In addition, when micro-stroke requirements are large, voice coil motors have relatively small output and it is difficult to achieve the required stroke requirements. If the plan is changed, the cost will rise sharply.

[0004] Therefore, the present invention proposes a six-degree-of-freedom precision motion table, which solves the disadvantage of poor stability caused by voice coil motor drive through the setting of micro-motion structure, and can meet the larger stroke requirement of the micro-motion table with relatively low cost. On the basis of meeting the functional performance of the product, it greatly reduces the development difficulty and cost output. Summary of the invention

[0005] Based on the technical problems existing in the prior art, the present invention proposes a six-degree-of-freedom precision motion table.

[0006] The invention provides a six-degree-of-freedom precision motion stage, comprising a base, a macro-motion module, a micro-motion module, an air-floating module and a substrate stage, wherein the macro-motion module comprises an X-direction drive module and a Y-direction drive module, the micro-motion module comprises a base, a vertical drive module, a rotation drive module and a handover module, the air-floating module comprises an air-floating left component, an air-floating right component and an air-floating middle component, and the substrate stage comprises a micro-motion stage and a substrate suction cup; the macro-motion module realizes movement of the substrate stage in the X-direction and the Y-direction respectively through the X-direction drive module and the Y-direction drive module, and the micro-motion module realizes adjustment of the substrate stage in the Z-direction, the Rx-direction and the Ry-direction and adjustment of the Rz-direction as well as uploading and downloading of the substrate stage respectively through the vertical drive module, the rotation drive module and the handover module, thereby realizing six-degree-of-freedom control of the motion stage.

[0007] Preferably, the base is a marble platform or other structural member that plays a supporting role.

[0008] Preferably, the air floating module realizes air floating support between the macro motion module and the base.

[0009] Preferably, the X-direction driving module has two parallel motors arranged in the X-direction, and the Y-direction driving module has one parallel motor arranged in the Y-direction; thus, movement in the X-direction and the Y-direction can be achieved by the parallel motors.

[0010] Preferably, the base of the micro-motion module is connected to the vertical driving module and the air-floating intermediate component of the air-floating module at the top and bottom, respectively, and the vertical driving module is located between the base and the substrate table.

[0011] Preferably, the vertical driving module includes a vertical motor driving component and a transmission component, the transmission component is connected to the substrate table, and the vertical driving module of the micro-motion module can adjust the substrate table in the Z direction, Rx direction and Ry direction; in this way, the substrate table can be driven to move in the Z direction, Rx direction and Ry direction by the vertical motor driving component and the transmission component, thereby achieving the adjustment effect in the corresponding direction.

[0012] Preferably, the rotation driving module comprises a rotation driving assembly and a rotating table, and the rotation driving module is located between the base and the substrate table. The rotation driving module of the micro-motion module can realize the adjustment of the substrate table in the Rz direction; in this way, the substrate table can be driven to move in the Rz direction by the rotation driving assembly and the rotating table, thereby achieving an adjustment effect in the corresponding direction.

[0013] Preferably, the handover module includes a handover drive mechanism and a handover motion mechanism, and the handover module of the micro-motion module realizes uploading and downloading of the substrate table; in this way, the substrate table can be driven to move in the up and down directions by the handover drive mechanism and the handover motion mechanism, thereby realizing uploading and downloading of the substrate table.

[0014] Compared with the prior art, the present invention provides a six-degree-of-freedom precision motion platform, which has the following beneficial effects: 1. A six-degree-of-freedom precision motion stage, which is equipped with a macro-motion module, a micro-motion module and an air flotation module. The macro-motion module is used to realize the movement of the substrate stage in the X and Y directions, and the micro-motion module is used to realize the adjustment of the substrate stage in the Z, Rx and Ry directions and the adjustment of the Rz direction as well as the upload and download of the substrate stage, thereby realizing the six-degree-of-freedom control of the motion stage.

[0015] 2. A six-degree-of-freedom precision motion table. By setting a micro-motion module, the micro-motion structure proposed by the present invention solves the disadvantage of poor stability caused by the voice coil motor drive, and can meet the larger stroke requirements of the micro-motion table. The cost is relatively low. On the basis of meeting the product functional performance, it greatly reduces the development difficulty and cost output. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall structure of a six-degree-of-freedom precision motion platform proposed by the present invention; Figure 2 A schematic diagram of the installation structure of a vertical drive module of a six-degree-of-freedom precision motion platform proposed by the present invention; Figure 3 This is a schematic diagram of the installation structure of an air-floating intermediate component of a six-degree-of-freedom precision motion platform proposed by the present invention; Figure 4 A schematic diagram of the side structure of a base and a substrate table of a six-degree-of-freedom precision motion table proposed by the present invention; Figure 5 This is a schematic diagram of the structure of a handover module of a six-degree-of-freedom precision motion platform proposed by the present invention.

[0017] In the figure: 1. base; 2. X-axis drive module; 3. Y-axis drive module; 4. base; 5. vertical drive module; 6. rotation drive module; 7. handover module; 8. air-floating left component; 9. air-floating right component; 10. air-floating middle component; 11. micro-motion stage; 12. base suction cup. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0020] Reference Figure 1-Figure 5 A six-degree-of-freedom precision motion table includes a base 1, a macro-motion module, a micro-motion module, an air-floating module and a substrate table, wherein the macro-motion module includes an X-axis drive module 2 and a Y-axis drive module 3, the micro-motion module includes a base 4, a vertical drive module 5, a rotation drive module 6 and a handover module 7, the air-floating module includes an air-floating left component 8, an air-floating right component 9 and an air-floating middle component 10, and the substrate table includes a micro-motion table 11 and a substrate suction cup 12; It should be noted that the macro-motion module realizes the movement of the substrate table in the X-direction and Y-direction respectively through the X-direction drive module 2 and the Y-direction drive module 3, and the micro-motion module realizes the adjustment of the substrate table in the Z-direction, Rx-direction and Ry-direction and the Rz-direction as well as the uploading and downloading of the substrate table through the vertical drive module 5, the rotation drive module 6 and the handover module 7, thereby realizing the six-degree-of-freedom control of the motion table.

[0021] The base 1 is a marble platform or other structural member that plays a supporting role.

[0022] The air floating module realizes the air floating support between the macro motion module and the base 1 .

[0023] Among them, the X-direction driving module 2 has two parallel motors arranged in the X direction, and the Y-direction driving module 3 has one parallel motor arranged in the Y direction; It should be noted that in this way, movement in the X and Y directions can be achieved through parallel motors.

[0024] The base 4 of the micro-motion module is connected to the vertical driving module 5 and the air-floating intermediate component 10 of the air-floating module at the top and bottom, respectively, and the vertical driving module 5 is located between the base 4 and the substrate table.

[0025] The vertical driving module 5 includes a vertical motor driving component and a transmission component, the transmission component is connected to the substrate table, and the vertical driving module 5 of the micro-motion module can adjust the substrate table in the Z direction, Rx direction and Ry direction; It should be noted that, in this way, the substrate table can be driven to move in the Z direction, Rx direction and Ry direction by the vertical motor driving assembly and the transmission assembly, thereby achieving the adjustment effect in the corresponding direction.

[0026] The rotation drive module 6 includes a rotation drive assembly and a rotation stage. The rotation drive module 6 is located between the base 4 and the substrate stage. The rotation drive module 6 of the micro-motion module can realize the adjustment of the substrate stage in the Rz direction. It should be noted that, in this way, the substrate table can be driven to move in the Rz direction by the rotation driving assembly and the rotating table, thereby achieving an adjustment effect in the corresponding direction.

[0027] Among them, the handover module 7 includes a handover drive mechanism and a handover motion mechanism, and the handover module 7 of the micro-motion module realizes the uploading and downloading of the substrate stage; It should be noted that in this way, the substrate table can be driven to move in the up and down directions through the handover drive mechanism and the handover motion mechanism, thereby realizing the uploading and unloading of the substrate table.

[0028] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A six-degree-of-freedom precision motion stage, comprising a base (1), a macro-motion module, a micro-motion module, an air-floating module and a substrate stage, characterized in that: The macro-motion module comprises an X-axis drive module (2) and a Y-axis drive module (3); the micro-motion module comprises a base (4), a vertical drive module (5), a rotation drive module (6) and a handover module (7); the air-floating module comprises an air-floating left component (8), an air-floating right component (9) and an air-floating middle component (10); and the substrate stage comprises a micro-motion stage (11) and a substrate suction cup (12); The vertical drive module (5) comprises a vertical motor drive component and a transmission component, wherein the transmission component is connected to the substrate table, and the vertical drive module (5) of the micro-motion module can adjust the substrate table in the Z direction, Rx direction and Ry direction; The rotation drive module (6) comprises a rotation drive assembly and a rotation stage, the rotation drive module (6) being located between the base (4) and the substrate stage, and the rotation drive module (6) of the micro-motion module can realize adjustment of the substrate stage in the Rz direction; The handover module (7) comprises a handover drive mechanism and a handover motion mechanism, and the handover module (7) of the micro-motion module realizes uploading and downloading of the substrate table.

2. A six-degree-of-freedom precision motion table according to claim 1, characterized in that: The base (1) is a marble platform or other structural member that plays a supporting role.

3. A six-degree-of-freedom precision motion table according to claim 1, characterized in that: The air floating module realizes air floating support between the macro motion module and the base (1).

4. A six-degree-of-freedom precision motion table according to claim 1, characterized in that: The X-direction drive module (2) has two parallel motors arranged in the X direction, and the Y-direction drive module (3) has one parallel motor arranged in the Y direction.

5. The six-degree-of-freedom precision motion table according to claim 1, characterized in that: The base (4) of the micro-motion module is connected to the vertical drive module (5) and the air-floating intermediate component (10) of the air-floating module at the top and bottom, respectively; the vertical drive module (5) is located between the base (4) and the substrate table.

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