Laser angle calibration device and ion beam path simulation system and method
The position and angle of the fixed seat, extension seat and lens are adjusted by the laser angle calibration device, and the problem of complexity and poor adaptability of ion beam path simulation in the prior art is solved, and an efficient and highly adaptable ion beam path simulation is achieved.
Patent Information
- Application Number
- CN202311815855.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-26
- Publication Date
- 2025-06-27
AI Technical Summary
The prior art is difficult to effectively simulate the ion beam path, especially in the case of complex cavity, which requires segmented detection and poor adaptability.
Using a laser angle calibration device, the calibration and simulation of the laser path is realized by adjusting the position and angle of the fixed seat, the protruding seat and the lens, and then simulating the ion beam path.
The entire path of ion beam flow is realized at one time, without the need for multiple detections in segments and multiple detection devices, and the need to install different detection devices for different cavitys, which are more efficient and highly adaptable.
Smart Images
Figure CN120222118A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of ion beam path simulation, and particularly to a laser angle calibration device, an ion beam current path simulation system and method. Background Art
[0002] During the movement of ions, they may not move in a straight line and have a certain deflection angle. Therefore, there are certain difficulties in simulating the ion beam path. The simulation of ion beams usually cannot be detected inside the cavity because the direction of ion beams is difficult to control and some complex detection devices cannot be placed inside the cavity. Currently, most use the accuracy of structural parts to irradiate linear light beams without deflection, and ensure the path of ion beams or the installation accuracy of components through multiple irradiations of linear ion beams. When there are many cavities, it is necessary to detect in multiple segments and cannot simulate the specific path of ion beams at one time. In addition, different devices are required to detect the installation of different cavities, which greatly relies on the operator's skills during installation and consumes a large amount of devices and time, with poor adaptability. Summary of the Invention
[0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a laser angle calibration device with strong adaptability.
[0004] The present invention further provides an ion beam current path simulation system and method that can simulate the entire path of ion beam current at one time, without the need for segmented multiple detections, nor the need to install different detection devices for different cavities, with higher efficiency.
[0005] To solve the above technical problems, the present invention adopts the following technical solutions:
[0006] A laser angle calibration device includes a fixed seat, a protruding seat and an angle adjustment mechanism. The fixed seat is used to be fixed to a cavity. A first light-transmitting hole is provided on the fixed seat. The protruding seat is movably arranged on the fixed seat. The angle adjustment mechanism is arranged at one end of the protruding seat. A second light-transmitting hole is provided at the other end of the protruding seat. The first light-transmitting hole and the second light-transmitting hole are on the same straight line. The angle adjustment mechanism includes a lens mounting seat and a lens. The lens is rotatably arranged on the lens mounting seat. The lens mounting seat is detachably connected to the protruding seat and can move relative to the protruding seat.
[0007] The angle adjustment mechanism further includes a moving seat. The moving seat slides on the bottom of the protruding seat and is provided with a first locking member to lock the position of the moving seat. The lens mounting seat slides on the top of the protruding seat. The moving seat is detachably connected to the lens mounting seat through a first connecting member. A first avoidance hole for avoiding the first connecting member is provided on the protruding seat.
[0008] The top of the protruding seat is provided with an upper guiding groove, and the bottom is provided with a lower guiding groove. The lens mounting seat is slidably arranged in the upper guiding groove, and the moving seat is slidably arranged in the lower guiding groove.
[0009] The lens includes a lens body, an upper lens seat and a lower lens seat. The lens body is arranged on the upper lens seat. The lower lens seat is detachably connected to the upper lens seat through a second connecting piece. The lower lens seat is rotatably arranged in the lens mounting seat. The moving seat is provided with a second avoidance hole for avoiding the second connecting piece.
[0010] The bottom of the lower lens seat is provided with a hexagonal groove, and the hexagonal groove is located in the avoidance space of the second avoidance hole.
[0011] The upper lens seat is provided with a first scale for detecting the rotation angle of the lens body, and the protruding seat is provided with a second scale for detecting the protruding length of the protruding seat.
[0012] The fixed seat is provided with a fixed block, and the protruding seat is provided with a sliding groove. The fixed block is slidably arranged in the sliding groove and is detachably connected to the protruding seat through a second locking piece.
[0013] The protruding seat is provided with a handle, and the second light-transmitting hole is arranged on the handle.
[0014] An ion beam path simulation system includes a laser emitter, a plurality of cavities and a plurality of the above-mentioned laser angle calibration devices. Each of the cavities is provided with an operation window. The laser emitter is arranged on the first cavity. Each of the cavities is correspondingly provided with a laser angle calibration device. The laser angle calibration device is used to calibrate the laser deflection angle to position each cavity and realize the ion beam path simulation.
[0015] An ion beam path simulation method includes the following steps:
[0016] S1. Install the laser emitter at the light incident end of the first cavity and turn on the laser emitter;
[0017] S2. If the deflection angle of the ion beam in the first cavity is 90°, the fixed seat of the laser angle calibration device is installed at the cavity position corresponding to the deflection angle of the ion beam. Move the extending seat to adjust the length of the extending seat extending into the first cavity, so that the extending end of the extending seat reaches the turning point of the ion beam in the cavity, and make the incident laser pass through the first light-transmitting hole and the second light-transmitting hole in sequence. Then, install a lens through the operation window, and adjust the position and deflection angle of the lens by moving the lens mounting seat and rotating the lens, so that the lens refracts the incident laser, and the refracted outgoing laser can pass through the light-emitting end of the first cavity. If the deflection angle of the ion beam in the first cavity is 0, the fixed seat of the laser angle calibration device is installed at the light-emitting end of the first cavity, and adjust the length of the extending seat extending into the first cavity according to the requirements, so that the laser can pass through the first light-transmitting hole, the light-emitting end of the first cavity and the second light-transmitting hole in sequence, and there is no need to install a lens to refract the laser. If the deflection angle of the ion beam in the first cavity is other angles except 0 and 90°, the fixed seat of the laser angle calibration device is installed at the light-emitting end of the first cavity, move the extending seat to adjust the length of the extending seat extending into the first cavity, so that the extending end of the extending seat reaches the turning point of the ion beam in the cavity. Then, install a lens through the operation window, and adjust the position and angle of the lens by moving the lens mounting seat and rotating the lens, so that the lens refracts the incident laser, and the refracted outgoing laser passes through the first light-transmitting hole, the light-emitting end of the first cavity and the second light-transmitting hole in sequence. Complete the path simulation of the ion beam in the first cavity.
[0018] S3. Align the light-incident end of the second cavity with the laser emitted from the light-emitting end of the first cavity to determine the position of the second cavity. Then, repeat step S2 according to the deflection situation of the ion beam in the second cavity to complete the installation of the laser angle calibration device on the second cavity.
[0019] S4. Repeat step S3 until the positions of the third cavity, the fourth cavity and all subsequent cavities and the installation of the laser angle calibration device are determined.
[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0021] The laser angle calibration device disclosed by the present invention adjusts the laser path by adjusting the installation position of the fixed seat, the length of the extending seat extending into the cavity and the refraction angle of the lens according to the deflection angle of the ion beam in each cavity, realizes the path simulation of the ion beam in the cavity, and has strong adaptability.
[0022] The ion beam path simulation system disclosed by the present invention uses a laser to replace the ion beam and simulate the path of the ion beam in the cavity. The laser emitter is arranged at the light incident end of the first cavity and is used to provide incident laser. The laser angle calibration device on the first cavity is installed according to the deflection angle of the ion beam in the first cavity to calibrate the laser emitted from the first cavity. The light incident end of the second cavity is aligned with the laser emitted from the first cavity to determine the position of the second cavity. Then, the laser angle calibration device on the second cavity is installed according to the deflection angle of the ion beam in the second cavity to calibrate the laser emitted from the second cavity. By repeating this process, the entire path of the ion beam can be simulated at one time, without the need for multiple segmented detections, nor the need to install different detection devices for different cavities, resulting in higher efficiency.
[0023] The ion beam path simulation method disclosed by the present invention can adjust the laser path by adjusting the installation position of the fixed seat, the length of the extension seat extending into the cavity, and the refraction angle of the lens according to the deflection angle of the ion beam in each cavity, so as to realize the simulation of the ion beam path in the cavity. It has strong adaptability, and can simulate the entire path of the ion beam at one time, without the need for multiple segmented detections, nor the need to install different detection devices for different cavities, resulting in higher efficiency. Brief Description of the Drawings
[0024] Figure 1 It is a three-dimensional structure schematic diagram of the laser angle calibration device of the present invention.
[0025] Figure 2 It is Figure 1 The enlarged view at A in
[0026] Figure 3 It is a three-dimensional structure schematic diagram of the fixed seat and the extension seat in the laser angle calibration device of the present invention.
[0027] Figure 4 It is an exploded view of the lens in the laser angle calibration device of the present invention.
[0028] Figure 5 It is a three-dimensional structure schematic diagram of the ion beam path simulation system of the present invention.
[0029] Figure 6 It is a schematic diagram of the simulation route of the first cavity in the ion beam path simulation system of the present invention.
[0030] The reference numerals in the figure denote: 1, fixed seat; 11, first light-transmitting hole; 12, fixing block; 2, protruding seat; 21, second light-transmitting hole; 22, first locking member; 24, upper guide groove; 25, lower guide groove; 26, sliding groove; 27, handle; 3, angle adjustment mechanism; 31, lens mounting seat; 32, lens; 321, lens body; 322, upper lens seat; 323, lower lens seat; 324, second connecting member; 325, hexagonal groove; 33, moving seat; 34, first connecting member; 4, spring; 5, laser emitter; 61, first cavity; 62, second cavity; 63, third cavity; 64, fourth cavity. Detailed implementation mode
[0031] The present invention will be further described in detail below with reference to the accompanying drawings of the specification and specific embodiments.
[0032] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.
[0033] In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more, unless otherwise specifically defined.
[0034] In the present invention, unless otherwise clearly defined and limited, the terms "assembled", "connected", "fixed", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] Embodiment 1
[0036] Figures 1 to 4An embodiment of the present invention is shown. The laser angle calibration device of this embodiment includes a fixed seat 1, an extended seat 2, and an angle adjustment mechanism 3. The fixed seat 1 is used to be fixed to the cavity. A first light-transmitting hole 11 is provided on the fixed seat 1. The extended seat 2 is movably arranged on the fixed seat 1. The angle adjustment mechanism 3 is arranged at one end of the extended seat 2. A second light-transmitting hole 21 is provided at the other end of the extended seat 2. The first light-transmitting hole 11 and the second light-transmitting hole 21 are located on the same straight line. The angle adjustment mechanism 3 includes a lens mounting seat 31 and a lens 32. The lens 32 is rotatably arranged on the lens mounting seat 31. The lens mounting seat 31 is detachably connected to the extended seat 2 and can move relative to the extended seat 2.
[0037] This laser angle calibration device adjusts the calibration method according to the deflection angle of the ion beam in different cavities. If the deflection angle of the ion beam in the cavity is 90°, the fixed seat 1 of the laser angle calibration device is installed at the position of the cavity corresponding to the deflection angle of the ion beam. Move the extended seat 2 to adjust the length of the extended seat 2 extending into the cavity, so that the extended end of the extended seat 2 reaches the turning point of the ion beam in the cavity, and make the incident laser pass through the first light-transmitting hole 11 and the second light-transmitting hole 21 in sequence. Then, install the lens 32 through the operation window, and adjust the position and deflection angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32, so that the lens 32 refracts the incident laser, and the refracted outgoing laser can pass through the light output end of the cavity; if the deflection angle of the ion beam in the cavity is 0°, the fixed seat 1 of the laser angle calibration device is installed at the light output end of the cavity, and adjust the length of the extended seat 2 extending into the cavity according to the requirement, so that the laser passes through the first light-transmitting hole 11, the light output end of the cavity and the second light-transmitting hole 21 in sequence, and there is no need to install the lens 32 to refract the laser; if the deflection angle of the ion beam in the cavity is other angles except 0° and 90°, the fixed seat 1 of the laser angle calibration device is installed at the light output end of the cavity. Move the extended seat 2 to adjust the length of the extended seat 2 extending into the cavity, so that the extended end of the extended seat 2 reaches the turning point of the ion beam in the cavity. Then, install the lens 32 through the operation window, and adjust the position and angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32, so that the lens 32 refracts the incident laser, and the refracted outgoing laser passes through the first light-transmitting hole 11, the light output end of the cavity and the second light-transmitting hole 21 in sequence.
[0038] This laser angle calibration device adjusts the laser path by adjusting the installation position of the fixed seat 1, the length of the extended seat 3 extending into the cavity, and the refraction angle of the lens 32 according to the deflection angle of the ion beam in each cavity, so as to realize the simulation of the ion beam path in the cavity, and has strong adaptability.
[0039] Further, in this embodiment, the angle adjustment mechanism 3 further includes a moving seat 33. The moving seat 33 is slidably disposed at the bottom of the protruding seat 2, and is provided with a first locking member 22 to lock the position of the moving seat 33. The lens mounting seat 31 is slidably disposed at the top of the protruding seat 2. The moving seat 33 is detachably connected to the lens mounting seat 31 through a first connecting member 34. The protruding seat 2 is provided with a first avoidance hole for avoiding the first connecting member 34. By moving the moving seat 33, the mounting positions of the lens mounting seat 31 and the lens 32 are adjusted and locked by the first locking member 22, so that the lens 32 can be fixed at a proper position. At the same time, the moving seat 33 is detachably connected to the protruding seat 2 through the first connecting member 34, and a first avoidance hole (not shown in the figure) is provided on the protruding seat 2 to avoid the disassembly of the first connecting member 34, which facilitates the disassembly and assembly of the lens mounting seat 31 and the lens 32. Preferably, the first locking member 22 is a locking screw. One end of the locking screw is threadedly connected to the protruding seat 2, and the other end is rotatably connected to the moving seat 33. By screwing the locking screw, the moving seat 33 can be driven to move, and the locking screw has a self-locking function, which is convenient for locking and positioning. Further preferably, the moving direction of the protruding seat 2 is perpendicular to the moving direction of the lens mounting seat 31, which is convenient for adjusting the horizontal and vertical positions of the lens 32.
[0040] Further, in this embodiment, the top of the protruding seat 2 is provided with an upper guiding groove 24, and the bottom is provided with a lower guiding groove 25. The lens mounting seat 31 is slidably disposed in the upper guiding groove 24, and the moving seat 33 is slidably disposed in the lower guiding groove 25. The upper guiding groove 24 and the lower guiding groove 25 provide guidance for the movement of the lens 32.
[0041] Further, in this embodiment, the lens 32 includes a lens body 321, an upper lens seat 322 and a lower lens seat 323. The lens body 321 is disposed on the upper lens seat 322. The lower lens seat 323 is detachably connected to the upper lens seat 322 through a second connecting member 324. The lower lens seat 323 is rotatably disposed in the lens mounting seat 31. The moving seat 33 is provided with a second avoidance hole for avoiding the second connecting member 324. The lower lens seat 323 is detachably connected to the upper lens seat 322 through the second connecting member 324, and a second avoidance hole (not shown in the figure) is provided on the moving seat 33 to avoid the disassembly of the second connecting member 324, which facilitates the disassembly, assembly and replacement of the upper lens seat 322 and the lens body 321.
[0042] Further, in this embodiment, the bottom of the lower lens seat 323 is provided with a hexagonal groove 325, and the hexagonal groove 325 is located in the avoidance space of the second avoidance hole. Insert an inner hexagon wrench into the hexagonal groove 325 and rotate the inner hexagon wrench to rotate the lower lens seat 323 and the lens body 321, so as to realize the adjustment of the refraction angle of the lens 321.
[0043] Further, in this embodiment, a first scale for detecting the rotation angle of the lens body 321 is provided on the upper lens seat 322, and a second scale for detecting the extension length of the extension seat 2 is provided on the extension seat 2. It should be noted that neither the first scale nor the second scale is shown in the figure. A first scale reference corresponding to the first scale is provided on the lens mounting seat 31, and a second scale reference corresponding to the second scale is provided on the fixed seat 1, which is convenient for reading the refraction angle of the laser and the extension length of the extension seat 2 to verify the correctness of the cavity processing.
[0044] Further, in this embodiment, a fixed block 12 is provided on the fixed seat 1, and a sliding groove 26 is provided on the extension seat 2. The fixed block 12 is slidably disposed in the sliding groove 26 and is detachably connected to the extension seat 2 through a second locking member. The sliding groove 26 provides guidance for the movement of the extension seat 2. After the extension seat 2 moves to a suitable position, it can be locked by a second locking member (not shown in the figure).
[0045] Further, in this embodiment, a handle 27 is provided on the extension seat 2, and the second light-transmitting hole 21 is disposed on the handle 27. One end of the extension seat 2 equipped with the angle adjustment mechanism 3 extends into the cavity, and pulling the handle 27 at the other end can adjust the extension length.
[0046] Further, in this embodiment, a spring 4 is sleeved outside the first connecting member 34 to provide a pre-tightening force for the connection between the moving seat 33 and the lens mounting seat 31, which is convenient for the moving seat 33 to drive the lens mounting seat 31 to move. A spring 4 is also sleeved outside the second connecting member 324 to provide a pre-tightening force for the connection between the lower lens seat 323 and the upper lens seat 322, which is convenient for driving the upper lens seat 322 to rotate when the hexagonal groove 325 is rotated. The pre-tightening forces of both can be adjusted according to the actual situation.
[0047] Embodiment 2
[0048] Figures 1 to 6 An embodiment of the present invention is shown. The ion beam path simulation system of this embodiment includes a laser generator 5, a plurality of cavities, and a plurality of laser angle calibration devices as described above. An operation window is provided on each cavity. The laser emitter 5 is disposed on the first cavity 61, and a laser angle calibration device is correspondingly provided on each cavity. The laser angle calibration device is used to calibrate the laser deflection angle to locate the positions of the cavities and realize the ion beam path simulation.
[0049] The ion beam path simulation system uses a laser to replace the ion beam and simulate the path of the ion beam in the cavity. The laser emitter 5 is arranged at the light incident end of the first cavity 61 to provide incident laser. The laser angle calibration device on the first cavity 61 is installed according to the deflection angle of the ion beam in the first cavity 61 to calibrate the laser emitted from the first cavity 61. The light incident end of the second cavity 62 is aligned with the laser emitted from the first cavity 61 to determine the position of the second cavity 62. Then, the laser angle calibration device on the second cavity 62 is installed according to the deflection angle of the ion beam in the second cavity 62 to calibrate the laser emitted from the second cavity 62. By repeating this process, the entire path of the ion beam can be simulated at one time, without the need for multiple segmented detections or the installation of different detection devices for different cavities, resulting in higher efficiency.
[0050] Embodiment III
[0051] The ion beam path simulation method of this embodiment includes the following steps:
[0052] S1. Install the laser emitter 5 at the light incident end of the first cavity 61 and turn on the laser emitter 5;
[0053] S2. If the deflection angle of the ion beam in the first cavity 61 is 90°, the fixed seat 1 of the laser angle calibration device is installed at the cavity position corresponding to the deflection angle of the ion beam. Move the extended seat 2 to adjust the length of the extended seat 2 extending into the first cavity 61, so that the extended end of the extended seat 2 reaches the turning point of the ion beam in the cavity, and make the incident laser pass through the first light-transmitting hole 11 and the second light-transmitting hole 21 in sequence. Then, install the lens 32 through the operation window, and adjust the position and deflection angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32, so that the lens 32 refracts the incident laser, and the refracted outgoing laser can pass through the light-emitting end of the first cavity 61; if the deflection angle of the ion beam in the first cavity 61 is 0°, the fixed seat 1 of the laser angle calibration device is installed at the light-emitting end of the first cavity 61, and adjust the length of the extended seat 2 extending into the first cavity 61 according to requirements, so that the laser passes through the first light-transmitting hole 11, the light-emitting end of the first cavity 61 and the second light-transmitting hole 21 in sequence, and there is no need to install the lens 32 to refract the laser; if the deflection angle of the ion beam in the first cavity 61 is other angles except 0° and 90°, the fixed seat 1 of the laser angle calibration device is installed at the light-emitting end of the first cavity 61, move the extended seat 2 to adjust the length of the extended seat 2 extending into the first cavity 61, so that the extended end of the extended seat 2 reaches the turning point of the ion beam in the cavity. Then, install the lens 32 through the operation window, and adjust the position and angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32, so that the lens 32 refracts the incident laser, and the refracted outgoing laser passes through the first light-transmitting hole 11, the light-emitting end of the first cavity 61 and the second light-transmitting hole 21 in sequence; complete the path simulation of the ion beam in the first cavity 61;
[0054] S3. Align the light-incident end of the second cavity 62 with the laser emitted from the light-emitting end of the first cavity 61 to determine the position of the second cavity 62, and then repeat step S2 according to the deflection situation of the ion beam in the second cavity 62 to complete the installation of the laser angle calibration device on the second cavity 62;
[0055] S4. Repeat step S3 until the positions of the third cavity 63, the fourth cavity 64 and all subsequent cavities and the installation of the laser angle calibration device are determined.
[0056] This ion beam path simulation method can adjust the laser path by adjusting the installation position of the fixed seat 1, the length of the extended seat 3 extending into the cavity and the refraction angle of the lens 32 according to the deflection angle of the ion beam in each cavity, realize the simulation of the ion beam path in the cavity, has strong adaptability, and can simulate the entire path of the ion beam at one time, without the need for segmented multiple detections, nor the need to install different detection devices for different cavities, with higher efficiency.
[0057] Next, take Figure 5For example, the simulation method is specifically described using four cavities. The deflection angle of the ion beam in the second cavity 62 is 90°, the deflection of the ion beam in the third cavity 63 is 0, and the first cavity 61 and the fourth cavity 64 are both at other angles except 0 and 90°.
[0058] 1) Install the laser emitter 5 at the light input end of the first cavity 61. Turn on the laser emitter 5. The fixed seat 1 of the laser angle calibration device is installed at the light output end of the first cavity 61. Move the extending seat 2 to adjust the length of the extending seat 2 extending into the first cavity 61 so that the extending end of the extending seat 2 reaches the turning point of the ion beam in the cavity. Then, install the lens 32 through the operation window, and adjust the position and angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32 so that the lens 32 refracts the incident laser. The refracted outgoing laser passes through the first light transmission hole 11, the light output end of the first cavity 61, and the second light transmission hole 21 in sequence.
[0059] 2) Align the light input end of the second cavity 62 with the laser emitted from the light output end of the first cavity 61 to determine the position of the second cavity 62. The fixed seat 1 of the laser angle calibration device is installed at the cavity position corresponding to the deflection angle of the ion beam. Move the extending seat 2 to adjust the length of the extending seat 2 extending into the second cavity 62 so that the extending end of the extending seat 2 reaches the turning point of the ion beam in the second cavity 62, and make the incident laser pass through the first light transmission hole 11 and the second light transmission hole 21 in sequence. Then, install the lens 32 through the operation window, and adjust the position and deflection angle of the lens 32 by moving the lens mounting seat 31 and rotating the lens 32 so that the lens 32 refracts the incident laser and makes the refracted outgoing laser pass through the light output end of the second cavity 62.
[0060] 3) Align the light input end of the third cavity 63 with the laser emitted from the light output end of the second cavity 62 to determine the position of the third cavity 63. The fixed seat 1 of the laser angle calibration device is installed at the light output end of the third cavity 63, and adjust the length of the extending seat 2 extending into the third cavity 63 according to requirements so that the laser passes through the first light transmission hole 11, the light output end of the third cavity 63, and the second light transmission hole 21 in sequence. There is no need to install the lens 32.
[0061] 4) Align the light incident end of the fourth cavity 64 with the laser beam emitted from the light output end of the third cavity 63 to determine the position of the fourth cavity 64. The fixing base 1 of the laser angle calibration device is installed at the light output end of the four cavities 64. Move the extending seat 2 to adjust the length of the extending seat 2 extending into the four cavities 64, so that the extending end of the extending seat 2 reaches the turning point of the ion beam in the cavity. Then, install the lens 32 through the operation window, and adjust the position and angle of the lens 32 by moving the lens mounting base 31 and rotating the lens 32, so that the lens 32 refracts the incident laser. The refracted laser beam passes through the first light-transmitting hole 11, the four cavities 64, and the second light-transmitting hole 21 in sequence.
[0062] Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention shall fall within the scope of the technical solution of the present invention.
Claims
1. A laser angle calibration device, characterized in that: It includes a fixed base (1), a protruding base (2) and an angle adjustment mechanism (3). The fixed base (1) is used to be fixed to a cavity. A first light-transmitting hole (11) is provided on the fixed base (1). The protruding base (2) is movably arranged on the fixed base (1). The angle adjustment mechanism (3) is arranged at one end of the protruding base (2). A second light-transmitting hole (21) is provided at the other end of the protruding base (2). The first light-transmitting hole (11) and the second light-transmitting hole (21) are located on the same straight line. The angle adjustment mechanism (3) includes a lens mounting base (31) and a lens (32). The lens (32) is rotatably arranged on the lens mounting base (31). The lens mounting base (31) is detachably connected to the protruding base (2) and can move relative to the protruding base (2).
2. The laser angle calibration device according to claim 1, wherein: The angle adjustment mechanism (3) further includes a moving base (33). The moving base (33) is slidably arranged at the bottom of the protruding base (2), and is equipped with a first locking member (22) to lock the position of the moving base (33). The lens mounting base (31) is slidably arranged at the top of the protruding base (2). The moving base (33) is detachably connected to the lens mounting base (31) through a first connecting member (34). A first avoidance hole for avoiding the first connecting member (34) is provided on the protruding base (2).
3. The laser angle calibration device according to claim 2, characterized in that: An upper guiding groove (24) is provided at the top of the protruding base (2), and a lower guiding groove (25) is provided at the bottom. The lens mounting base (31) is slidably arranged in the upper guiding groove (24), and the moving base (33) is slidably arranged in the lower guiding groove (25).
4. The laser angle calibration device according to claim 2, wherein: The lens (32) includes a lens body (321), an upper lens base (322) and a lower lens base (323). The lens body (321) is arranged on the upper lens base (322). The lower lens base (323) is detachably connected to the upper lens base (322) through a second connecting member (324). The lower lens base (323) is rotatably arranged in the lens mounting base (31). A second avoidance hole for avoiding the second connecting member (324) is provided on the moving base (33).
5. The laser angle calibration device according to claim 4, characterized in that: A hexagonal groove (325) is provided at the bottom of the lower lens base (323). The hexagonal groove (325) is located in the avoidance space of the second avoidance hole.
6. The laser angle calibration device according to claim 4, characterized in that: A first scale for detecting the rotation angle of the lens body (321) is provided on the upper lens base (322), and a second scale for detecting the protruding length of the protruding base (2) is provided on the protruding base (2).
7. The laser angle calibration device according to any one of claims 1 to 6, characterized in that: A fixed block (12) is provided on the fixed base (1), and a sliding groove (26) is provided on the protruding base (2). The fixed block (12) is slidably arranged in the sliding groove (26) and is detachably connected to the protruding base (2) through a second locking member.
8. The laser angle calibration device according to any one of claims 1 to 6, characterized in that: A handle (27) is provided on the protruding base (2), and the second light-transmitting hole (21) is provided on the handle (27).
9. An ion beam path simulation system, characterized in that: It includes a laser emitter (5), multiple cavities, and multiple laser angle calibration devices as described in any one of claims 1 to 8. An operation window is provided on each of the cavities. The laser emitter (5) is arranged on the first cavity (61). A laser angle calibration device is correspondingly arranged on each of the cavities. The laser angle calibration device is used to calibrate the laser deflection angle to position each cavity and realize the ion beam path simulation.
10. A method for simulating an ion beam path, characterized in that: It includes the following steps: S1. Install the laser emitter (5) at the light incident end of the first cavity (61) and turn on the laser emitter (5). S2. If the deflection angle of the ion beam in the first cavity (61) is 90°, install the fixed seat (1) of the laser angle calibration device at the cavity position corresponding to the ion beam deflection angle. Move the extending seat (2) to adjust the length of the extending seat (2) extending into the first cavity (61) so that the extending end of the extending seat (2) reaches the turning point of the ion beam in the cavity. Make the incident laser pass through the first light-transmitting hole (11) and the second light-transmitting hole (21) in sequence, then install a lens (32) through the operation window, and adjust the position and deflection angle of the lens (32) by moving the lens mounting seat (31) and rotating the lens (32) so that the lens (32) refracts the incident laser and the refracted outgoing laser passes through the light exit end of the first cavity (61). If the deflection angle of the ion beam in the first cavity (61) is 0°, install the fixed seat (1) of the laser angle calibration device at the light exit end of the first cavity (61), and adjust the length of the extending seat (2) extending into the first cavity (61) as required so that the laser passes through the first light-transmitting hole (11), the light exit end of the first cavity (61), and the second light-transmitting hole (21) in sequence. There is no need to install a lens (32) to refract the laser. If the deflection angle of the ion beam in the first cavity (61) is other than 0° and 90°, install the fixed seat (1) of the laser angle calibration device at the light exit end of the first cavity (61). Move the extending seat (2) to adjust the length of the extending seat (2) extending into the first cavity (61) so that the extending end of the extending seat (2) reaches the turning point of the ion beam in the cavity. Then install a lens (32) through the operation window, and adjust the position and angle of the lens (32) by moving the lens mounting seat (31) and rotating the lens (32) so that the lens (32) refracts the incident laser and the refracted outgoing laser passes through the first light-transmitting hole (11), the light exit end of the first cavity (61), and the second light-transmitting hole (21) in sequence. Complete the path simulation of the ion beam in the first cavity (61). S3. Align the light incident end of the second cavity (62) with the laser emitted from the light exit end of the first cavity (61) to determine the position of the second cavity (62). Then repeat step S2 according to the deflection situation of the ion beam in the second cavity (62) to complete the installation of the laser angle calibration device on the second cavity (62). S4. Repeat step S3 until the positions of the third cavity (63), the fourth cavity (64) and all subsequent cavities and the installation of the laser angle calibration device are determined.