Automatic production line for continuous exposure and development

Abstract

The invention discloses an automatic production line for continuous exposure and development, which belongs to the technical field of etching and comprises a frame body, a conveying mechanism is arranged on the frame body, and a photoetching unit, a developing unit and a drying unit are sequentially arranged above the conveying mechanism along the conveying direction; the photoetching unit is used for photoetching the workpieces on the conveying mechanism, and the drying unit is used for blowing hot air to the workpieces; the developing unit comprises a liquid supply assembly and a developing spraying box body fixedly connected to the frame body, a spraying cavity is formed in the bottom of an inner cavity of the developing spraying box body, a plurality of spraying holes are evenly distributed in the bottom of the spraying cavity, a flow dividing assembly is arranged in the developing spraying box body, and the liquid supply assembly supplies developing liquid into the flow dividing assembly; and the diversion assembly uniformly distributes the developing solution into the spraying cavity and sprays the developing solution to the workpiece through the plurality of spraying holes. The steps of photoetching, developing and drying can be automatically carried out, manual intervention is not needed, the automation degree is high, diffusive and durable spraying is achieved in the developing process, the spraying uniformity of the developing solution is improved, and the developing effect is improved.

Description

Technical Field

[0001] The present invention relates to the field of etching technology, and particularly to an automated production line for continuous exposure and development. Background Art

[0002] In the fields of electrochemical etching, semiconductor manufacturing, microelectronic packaging, display panels, etc., the lithography process is the core link of patterning processing, which usually includes steps such as coating, exposure, development, and drying. In traditional lithography processes, development and drying are often carried out as independent processes, which require manual intervention or are completed in segments by multiple devices, resulting in low production efficiency and poor process consistency.

[0003] Moreover, traditional development methods mainly include immersion development and spray development. Immersion development is to directly immerse the exposed wafer into the developer tank. This method is simple to operate, but the consumption of the developer is large, and it is easy to produce uneven development on the wafer surface. Spray development is to spray the developer onto the wafer surface in the form of a mist through a nozzle. This method improves the uniformity of development to a certain extent, but has high requirements for the accuracy of the spray system of the equipment.

[0004] Therefore, an automated production line for continuous exposure and development is proposed. Summary of the Invention

[0005] The purpose of the present invention is to provide an automated production line for continuous exposure and development, aiming to solve or improve at least one of the above technical problems.

[0006] To achieve the above purpose, the present invention provides the following solution: The present invention provides an automated production line for continuous exposure and development, including a frame. A conveying mechanism is arranged on the frame. Above the conveying mechanism, a lithography unit, a development unit, and a drying unit are arranged in sequence along the conveying direction. The lithography unit is used for lithographing the workpiece on the conveying mechanism, and the drying unit is used for blowing hot air to the workpiece.

[0007] The development unit includes a liquid supply component and a development spraying box body fixedly connected to the frame. The bottom of the inner cavity of the development spraying box body has a spraying cavity, and a plurality of spraying holes are evenly distributed at the bottom of the spraying cavity. A flow splitting component is arranged in the development spraying box body. The liquid supply component supplies the developer into the flow splitting component, and the flow splitting component evenly distributes the developer into the spraying cavity and sprays it onto the workpiece through the plurality of spraying holes.

[0008] Preferably, the flow splitting component includes a first partition plate and a second partition plate fixedly connected inside the developing spray box body. The first partition plate is located above the second partition plate. The first partition plate and the second partition plate divide the inside of the developing spray box body into a first flow splitting cavity, a second flow splitting cavity, and the spray cavity from top to bottom in sequence. A plurality of first flow splitting holes are formed in the first partition plate, and a plurality of second flow splitting holes are formed in the second partition plate. The apertures of the first flow splitting holes, the second flow splitting holes, and the spray holes decrease in sequence and the numbers increase in sequence.

[0009] Preferably, the first flow splitting holes and the second flow splitting holes are arranged in a staggered manner, and the second flow splitting holes and the spray holes are arranged in a staggered manner.

[0010] Preferably, the spaces of the first flow splitting cavity and the spray cavity are smaller than the space of the second flow splitting cavity; the liquid supply component includes a liquid storage tank fixedly connected to the frame body. A water pump is fixedly connected between the bottom of the liquid storage tank and the top of the developing spray box body. The liquid outlet end of the water pump is communicated with the first flow splitting cavity.

[0011] Preferably, the photolithography unit includes a first lifting component arranged on the frame body. A lifting plate is arranged at the lifting end of the first lifting component. A mask storage plate is fixedly connected to the lifting plate. A clamping hole for placing a mask is formed in the mask storage plate. A second lifting component is arranged on the lifting plate. A lighting box is arranged on the second lifting component. A plurality of lighting lamps are fixedly connected to the bottom of the lighting box. The plurality of lighting lamps are arranged in a rectangular array. The plurality of lighting lamps are located directly above the clamping hole. A light source emitter is fixedly connected to the frame body. The light source emitter is electrically connected to the plurality of lighting lamps.

[0012] Preferably, the second lifting component includes a support plate fixedly connected to the lifting plate. A threaded rod is rotatably connected to the support plate. A sliding block is slidably connected to the support plate. The threaded rod penetrates through the sliding block and is threadedly connected to the sliding block. The lighting box is fixedly connected to the sliding block.

[0013] Preferably, the first lifting component includes a fixing plate fixedly connected to the frame body. A lead screw is rotatably connected to the fixing plate. A ball nut is threadedly sleeved on the lead screw. A slider is fixedly connected to the ball nut. The slider is slidably connected to the fixing plate. The lifting plate is fixedly connected to the slider. A lead screw motor is fixedly connected to the fixing plate. The output shaft of the lead screw motor is fixedly connected to the lead screw.

[0014] Preferably, the drying unit includes a support frame fixedly connected to the frame body. A fan is fixedly connected inside the support frame. An air inlet and an air outlet are respectively formed at the top and bottom of the support frame. The fan blades are located between the air inlet and the air outlet. A heating element is fixedly connected inside the support frame, and the heating element is located between the fan blades and the air outlet.

[0015] Preferably, the heating element is a heating resistance wire, and the heating resistance wire is in a spiral shape. A filter screen is fixedly connected to the air inlet.

[0016] Preferably, the conveying mechanism includes a plurality of rollers rotatably connected to the frame body. A driven sprocket is fixedly connected to one end of each roller. A plurality of the driven sprockets are engaged with a conveyor chain. A driving motor is fixedly connected to the frame body. A driving sprocket is fixedly connected to the output shaft of the driving motor, and the driving sprocket is engaged with the conveyor chain. A feeding plate and a discharging plate are fixedly connected to the frame body, and the feeding plate and the discharging plate are respectively located at both ends of the plurality of rollers.

[0017] The present invention discloses the following technical effects: The workpieces are sequentially conveyed under the lithography unit, the developing unit, and the drying unit through the conveying mechanism, so as to sequentially perform the steps of lithography, developing, and drying, without manual intervention and with high automation. And during the developing process, the developing solution is supplied into the flow dividing component through the liquid supply component. The flow dividing component distributes the developing solution evenly to the spraying cavity and sprays it onto the workpiece through a plurality of fine spraying holes, realizing diffusive and persistent spraying, improving the spraying uniformity of the developing solution, and improving the developing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of this application. The schematic embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation to this application. In the drawings:

[0019] Figure 1 is a schematic structural diagram of the present invention;

[0020] Figure 2 is a schematic structural diagram of the developing unit in the present invention;

[0021] Figure 3 is a schematic structural diagram of the lithography unit in the present invention;

[0022] Figure 4 is a schematic structural diagram of the drying unit in the present invention;

[0023] Figure 5 is a schematic structural diagram of the conveying mechanism in the present invention.

[0024] In the figure: 1. Conveyor mechanism; 1-1. Roller; 1-2. Driven sprocket; 1-3. Conveyor chain; 1-4. Side mounting plate; 1-5. Support pillar; 1-6. Cross beam; 1-7. Feeding plate; 1-8. Discharging plate; 1-9. Driving motor; 1-10. Motor support plate;

[0025] 2. Lithography unit; 2-1. Fixed plate; 2-2. Spacer cage; 2-3. Lifting plate; 2-4. Slide block; 2-5. Ball nut; 2-6. Lead screw; 2-7. Lead screw support seat; 2-8. Top plate; 2-9. Light source emitter; 2-10. Lighting box; 2-11. Second lifting assembly; 2-12. Mask storage plate; 2-13. Clamping hole;

[0026] 3. Developing unit; 3-1. Liquid storage tank; 3-2. Water pump; 3-3. Developing spray box body; 3-4. First diversion cavity; 3-5. Second diversion cavity; 3-6. Spray cavity; 3-7. Spray hole; 3-8. First partition board; 3-9. Second partition board;

[0027] 4. Drying unit; 4-1. Air inlet; 4-2. Fan; 4-3. Heating element; 4-4. Air outlet. Detailed implementation mode

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] To make the above objects, features, and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific implementation modes.

[0030] Refer to Figures 1 - 5 , the present invention provides an automated production line for continuous exposure and development, including a frame body. A conveyor mechanism 1 is arranged on the frame body. Above the conveyor mechanism 1, a lithography unit 2, a developing unit 3, and a drying unit 4 are sequentially arranged along the conveying direction. The lithography unit 2 is used for lithographing the workpiece on the conveyor mechanism 1, and the drying unit 4 is used for blowing hot air to the workpiece;

[0031] The developing unit 3 includes a liquid supply component and a developing spray box body 3-3 fixedly connected to the frame body. The inner cavity bottom of the developing spray box body 3-3 has a spray cavity 3-6. A plurality of spray holes 3-7 are evenly distributed at the bottom of the spray cavity 3-6. A diversion component is arranged in the developing spray box body 3-3. The liquid supply component supplies developing liquid to the diversion component. The diversion component evenly distributes the developing liquid into the spray cavity 3-6 and sprays it onto the workpiece through a plurality of spray holes 3-7.

[0032] During use, the workpiece is sequentially conveyed under the lithography unit 2, the developing unit 3, and the drying unit 4 through the conveying mechanism, so as to sequentially perform the steps of lithography, development, and drying without manual intervention, with a high degree of automation; and during the developing process, the developing solution is supplied into the flow splitting component by the liquid supply component, and the flow splitting component distributes the developing solution evenly to the spraying cavity 3-6 and sprays it onto the workpiece through a number of fine spraying holes 3-7, realizing diffusive and persistent spraying, improving the spraying uniformity of the developing solution, and improving the developing effect.

[0033] In some alternative embodiments, the flow splitting component includes a first partition plate 3-8 and a second partition plate 3-9 fixedly connected in the developing spraying box body 3-3. The first partition plate 3-8 is located above the second partition plate 3-9. The first partition plate 3-8 and the second partition plate 3-9 sequentially divide the inside of the developing spraying box body 3-3 from top to bottom into a first flow splitting cavity 3-4, a second flow splitting cavity 3-5, and a spraying cavity 3-6. A number of first flow splitting holes are formed in the first partition plate 3-8, and a number of second flow splitting holes are formed in the second partition plate 3-9. The aperture diameters of the first flow splitting holes, the second flow splitting holes, and the spraying holes 3-7 decrease in sequence and the numbers increase in sequence.

[0034] In some alternative embodiments, the first flow splitting holes and the second flow splitting holes are arranged in a staggered manner, and the second flow splitting holes and the spraying holes 3-7 are arranged in a staggered manner.

[0035] In some alternative embodiments, the spaces of the first flow splitting cavity 3-4 and the spraying cavity 3-6 are smaller than the space of the second flow splitting cavity 3-5; the liquid supply component includes a liquid storage tank 3-1 fixedly connected to the frame. A water pump 3-2 is fixedly connected between the bottom of the liquid storage tank 3-1 and the top of the developing spraying box body 3-3. The liquid outlet end of the water pump 3-2 is communicated with the first flow splitting cavity 3-4.

[0036] During use, the developing solution in the liquid storage tank 3-1 is pumped into the first flow splitting cavity 3-4 by the water pump 3-2. The cavity space of the first flow splitting cavity 3-4 is small, so that the developing solution quickly fills the first flow splitting cavity 3-4. The developing solution is sprayed into the lower second flow splitting cavity 3-5 under the action of pressure. Since the first flow splitting holes and the second flow splitting holes are arranged in a staggered manner, the developing solution flowing out of the first flow splitting holes does not directly flow out through the second flow splitting holes, but is sprayed onto the bottom plate of the second flow splitting cavity 3-5 and then diffuses around, so that the developing solution is evenly sprayed into the spraying cavity 3-6 through the second flow splitting holes. The spraying holes 3-7 are distributed densely and evenly, so that the developing solution can be evenly sprayed out from a number of spraying holes 3-7, realizing uniform diffusive spraying and improving the developing effect.

[0037] Furthermore, a recovery box is arranged at the bottom of the frame for recovering the developing solution flowing down from the workpiece.

[0038] In some alternative embodiments, the lithography unit 2 includes a first lifting assembly disposed on a frame. The lifting end of the first lifting assembly is provided with a lifting plate 2-3. A mask storage plate 2-12 is fixedly connected to the lifting plate 2-3. The mask storage plate 2-12 is provided with clamping holes 2-13 for holding masks. A second lifting assembly 2-11 is disposed on the lifting plate 2-3. A lighting box 2-10 is disposed on the second lifting assembly 2-11. A plurality of lighting lamps are fixedly connected to the bottom of the lighting box 2-10. The plurality of lighting lamps are arranged in a rectangular array. The plurality of lighting lamps are located directly above the clamping holes 2-13. A light source emitter 2-9 is fixedly connected to the frame. The light source emitter 2-9 is electrically connected to the plurality of lighting lamps.

[0039] In some alternative embodiments, the second lifting assembly 2-11 includes a support plate fixedly connected to the lifting plate 2-3. A threaded rod is rotatably connected to the support plate. A sliding block is slidably connected to the support plate. The threaded rod passes through the sliding block and is threadedly connected to the sliding block. The lighting box 2-10 is fixedly connected to the sliding block.

[0040] By rotating the threaded rod, the sliding block is driven to slide on the support plate, thereby realizing the lifting function, and further realizing the adjustment of the distance between the lighting box 2-10 and the mask storage plate 2-12.

[0041] In some alternative embodiments, the first lifting assembly includes a fixing plate 2-1 fixedly connected to the frame. A lead screw 2-6 is rotatably connected to the fixing plate 2-1. A ball nut 2-5 is sleeved on the lead screw 2-6 in a threaded manner. A slider 2-4 is fixedly connected to the ball nut 2-5. The slider 2-4 is slidably connected to the fixing plate 2-1. The lifting plate 2-3 is fixedly connected to the slider 2-4. A lead screw motor is fixedly connected to the fixing plate 2-1. The output shaft of the lead screw motor is fixedly connected to the lead screw 2-6.

[0042] In this embodiment, a top plate 2-8 is fixedly connected to the frame. The light source emitter 2-9 is fixedly connected to the top plate 2-8. Two spacer holders 2-2 are fixedly connected to the fixing plate 2-1. The slider 2-4 is slidably connected to the spacer holders 2-2. Two lead screw support seats 2-7 are fixedly connected to the fixing plate 2-1. Both ends of the lead screw 2-6 are rotatably connected to the two lead screw support seats 2-7. By driving the lead screw 2-6 to rotate through the lead screw motor, the slider 2-4 on the ball nut 2-5 is driven to lift, and further the mask storage plate 2-12 is lifted, so as to adjust the mask storage plate 2-12 to a suitable height. When the workpiece flows to below the mask storage plate 2-12, the mask at the clamping holes 2-13 is precisely attached to the workpiece. The plurality of lighting lamps on the lighting box 2-10 are adjusted to a suitable height through the second lifting assembly 2-11, so as to realize uniform illumination of the workpiece, and further realize the precise lithography function.

[0043] In some alternative embodiments, the drying unit 4 includes a support frame fixedly connected to the frame body. A fan 4-2 is fixedly connected inside the support frame. An air inlet 4-1 and an air outlet 4-4 are respectively formed in the top and bottom of the support frame. The fan blades of the fan 4-2 are located between the air inlet 4-1 and the air outlet 4-4. A heating element 4-3 is fixedly connected inside the support frame, and the heating element 4-3 is located between the fan blades of the fan 4-2 and the air outlet 4-4.

[0044] When the fan 4-2 starts, external air enters the support frame through the air inlet 4-1, and then is heated by the heating element 4-3 and discharged from the air outlet 4-4 to dry the workpiece.

[0045] In some alternative embodiments, the heating element 4-3 is a heating resistance wire, and the heating resistance wire is in a spiral shape. A filter screen is fixedly connected to the air inlet 4-1. The impurities are filtered out through the filter screen to reduce the influence of the impurities on the workpiece.

[0046] In some alternative embodiments, the conveying mechanism 1 includes a plurality of rollers 1-1 rotatably connected to the frame body. A driven sprocket 1-2 is fixedly connected to one end of the roller 1-1. A plurality of driven sprockets 1-2 are engaged with a conveyor chain 1-3. A driving motor 1-9 is fixedly connected to the frame body. A driving sprocket is fixedly connected to the output shaft of the driving motor 1-9, and the driving sprocket is engaged with the conveyor chain 1-3. A feeding plate 1-7 and a discharging plate 1-8 are fixedly connected to the frame body, and the feeding plate 1-7 and the discharging plate 1-8 are respectively located at both ends of the plurality of rollers 1-1.

[0047] In this embodiment, the top of the feeding plate 1-7, the discharging plate 1-8 and the plurality of rollers 1-1 are flush. Two side mounting plates 1-4 are fixedly connected to the frame body. Both ends of the roller 1-1 are respectively rotatably connected to the two side mounting plates 1-4. A cross beam 1-6 is fixedly connected to the support column 1-5 of the frame body. A motor support plate 1-10 is fixedly connected to the cross beam 1-6. The driving motor 1-9 is fixedly connected to the motor support plate 1-10. The driving motor 1-9 drives the driving sprocket to rotate, thereby driving the conveyor chain 1-3 to drive, and further driving the plurality of rollers 1-1 to rotate simultaneously to realize the conveying of the workpiece.

[0048] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0049] The embodiments described above are only descriptions of the preferred embodiments of the present invention and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations and improvements made by those of ordinary skill in the art to the technical solutions of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. An automated production line for continuous exposure and development, characterized in that, Comprising: A frame body, on which a conveying mechanism (1) is arranged. Above the conveying mechanism (1), a photolithography unit (2), a developing unit (3), and a drying unit (4) are arranged in sequence along the conveying direction. The photolithography unit (2) is used for photolithographing a workpiece on the conveying mechanism (1), and the drying unit (4) is used for blowing hot air to the workpiece. The developing unit (3) includes a liquid supply assembly and a developing spray box body (3-3) fixedly connected to the frame body. The inner cavity bottom of the developing spray box body (3-3) has a spray cavity (3-6), and a plurality of spray holes (3-7) are evenly distributed at the bottom of the spray cavity (3-6). A flow dividing assembly is arranged in the developing spray box body (3-3). The liquid supply assembly supplies developing liquid into the flow dividing assembly, and the flow dividing assembly evenly distributes the developing liquid into the spray cavity (3-6) and sprays it onto the workpiece through a plurality of the spray holes (3-7).

2. The automated production line for continuous exposure and development according to claim 1, characterized in that: The flow dividing assembly includes a first partition plate (3-8) and a second partition plate (3-9) fixedly connected in the developing spray box body (3-3). The first partition plate (3-8) is located above the second partition plate (3-9). The first partition plate (3-8) and the second partition plate (3-9) divide the inside of the developing spray box body (3-3) into a first flow dividing cavity (3-4), a second flow dividing cavity (3-5), and the spray cavity (3-6) from top to bottom in sequence. A plurality of first flow dividing holes are formed in the first partition plate (3-8), and a plurality of second flow dividing holes are formed in the second partition plate (3-9). The apertures of the first flow dividing holes, the second flow dividing holes, and the spray holes (3-7) decrease in sequence and the numbers increase in sequence.

3. The automated production line for continuous exposure and development according to claim 2, wherein: The first flow dividing holes and the second flow dividing holes are arranged in a staggered manner, and the second flow dividing holes and the spray holes (3-7) are arranged in a staggered manner.

4. The automated production line for continuous exposure and development according to claim 2, characterized in that: The spaces of the first flow dividing cavity (3-4) and the spray cavity (3-6) are smaller than the space of the second flow dividing cavity (3-5). The liquid supply assembly includes a liquid storage tank (3-1) fixedly connected to the frame body. A water pump (3-2) is fixedly connected between the bottom of the liquid storage tank (3-1) and the top of the developing spray box body (3-3). The liquid outlet end of the water pump (3-2) is communicated with the first flow dividing cavity (3-4).

5. The automated production line for continuous exposure and development according to claim 1, wherein: The photolithography unit (2) includes a first lifting assembly arranged on the frame body. The lifting end of the first lifting assembly is provided with a lifting plate (2-3). A mask plate storage plate (2-12) is fixedly connected to the lifting plate (2-3). A clamping hole (2-13) for placing a mask plate is formed in the mask plate storage plate (2-12). A second lifting assembly (2-11) is arranged on the lifting plate (2-3). A lighting box (2-10) is arranged on the second lifting assembly (2-11). A plurality of lighting lamps are fixedly connected to the bottom of the lighting box (2-10). The plurality of lighting lamps are arranged in a rectangular array. The plurality of lighting lamps are located directly above the clamping hole (2-13). A light source emitter (2-9) is fixedly connected to the frame body. The light source emitter (2-9) is electrically connected to the plurality of lighting lamps.

6. The automated production line for continuous exposure and development according to claim 5, wherein: The second lifting assembly (2-11) includes a support plate fixedly connected to the lifting plate (2-3). A threaded rod is rotatably connected to the support plate. A sliding block is slidably connected to the support plate. The threaded rod penetrates through the sliding block and is threadedly connected to the sliding block. The lighting box (2-10) is fixedly connected to the sliding block.

7. The automated production line for continuous exposure and development according to claim 5, characterized in that: The first lifting assembly includes a fixed plate (2-1) fixedly connected to the frame body. A lead screw (2-6) is rotatably connected to the fixed plate (2-1). A ball nut (2-5) is threadedly sleeved on the lead screw (2-6). A slider (2-4) is fixedly connected to the ball nut (2-5). The slider (2-4) is slidably connected to the fixed plate (2-1). The lifting plate (2-3) is fixedly connected to the slider (2-4). A lead screw motor is fixedly connected to the fixed plate (2-1). The output shaft of the lead screw motor is fixedly connected to the lead screw (2-6).

8. The automated production line for continuous exposure and development according to claim 1, wherein: The drying unit (4) includes a support frame fixedly connected to the frame body. A fan (4-2) is fixedly connected inside the support frame. An air inlet (4-1) and an air outlet (4-4) are respectively formed at the top and bottom of the support frame. The fan blades of the fan (4-2) are located between the air inlet (4-1) and the air outlet (4-4). A heating element (4-3) is fixedly connected inside the support frame. The heating element (4-3) is located between the fan blades of the fan (4-2) and the air outlet (4-4).

9. The automated production line for continuous exposure and development according to claim 8, wherein: The heating element (4-3) is a heating resistance wire. The heating resistance wire is in a spiral shape. A filter screen is fixedly connected to the air inlet (4-1).

10. The automated production line for continuous exposure and development according to claim 1, characterized in that: The conveying mechanism (1) includes a plurality of rollers (1-1) rotatably connected to the frame body. A driven sprocket (1-2) is fixedly connected to one end of each roller (1-1). A plurality of the driven sprockets (1-2) are engaged with a conveyor chain (1-3). A drive motor (1-9) is fixedly connected to the frame body. A driving sprocket is fixedly connected to the output shaft of the drive motor (1-9). The driving sprocket is engaged with the conveyor chain (1-3). A feed plate (1-7) and a discharge plate (1-8) are fixedly connected to the frame body. The feed plate (1-7) and the discharge plate (1-8) are respectively located at both ends of the plurality of rollers (1-1).

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