Fluorination furnace and method with replaceable interlayer

Abstract

The present invention relates to the technical field of fluorination furnaces, and in particular to a fluorination furnace with replaceable interlayers and a method thereof. The furnace comprises a support platform, a fluorination furnace, a furnace cover and an interlayer, wherein the fluorination furnace is mounted on the top of the support platform, the furnace cover is provided on the top of the fluorination furnace, an interlayer is provided on the inside of the fluorination furnace, and a limiting block is provided on the inside of the fluorination furnace. The present invention, by providing components such as a support rod, a first spring, a hook plate and a limiting mechanism, can automatically trigger a replacement signal when the thickness of a certain area of ​​the interlayer becomes thinner due to corrosion or wear. This process does not require manual intervention, greatly improving the detection efficiency, while avoiding subjective errors caused by human judgment. Moreover, when the system determines that the interlayer is damaged or lost, the interlayer can be automatically taken out when the furnace cover rises, so that the old interlayer is automatically separated from the fluorination furnace, and then a new interlayer can be quickly installed. The entire replacement process is convenient to operate and responds quickly, which significantly reduces the time and labor costs required for traditional manual disassembly and assembly, and improves equipment utilization.

Description

Technical Field

[0001] The present invention relates to the technical field of fluorination furnaces, and in particular to a fluorination furnace with replaceable interlayers and a method thereof. Background Art

[0002] A fluorination furnace is a high-temperature reaction device widely used in fields such as semiconductor manufacturing, optical material processing, and special alloy preparation. Its core function is to perform surface treatment or chemical transformation on the target material under high-temperature conditions using fluorine gas or fluorides to achieve specific physical or chemical property improvements. However, due to the extreme working conditions involved in the fluorination process, such as high temperatures (usually exceeding 800°C) and highly corrosive gases (such as F2 and HF), the internal structure of the fluorination furnace, especially the interlayer part, faces severe challenges.

[0003] As a key component in the fluorination furnace, the interlayer is mainly used to protect the furnace body from corrosion. In traditional fluorination furnaces, the interlayer mostly adopts a fixed design and is usually made of high-temperature resistant and corrosion-resistant materials. Although this design can meet basic process requirements to a certain extent, it exposes many shortcomings in actual applications: First, during operation, the interlayer will inevitably be damaged by chemical erosion and thermal stress. In order to ensure the stable operation of the equipment, the operator needs to shut down the machine and open the furnace body regularly to manually inspect and evaluate the interlayer status. This manual inspection method is not only time-consuming and labor-intensive, but also inefficient. In addition, manual judgment is subjective and erroneous. Once missed or misjudged, it may cause a safety accident; secondly, when the interlayer is found to be damaged or excessively worn, the existing fixed structure makes replacement or maintenance extremely difficult. It usually requires the disassembly of a large number of accessories and the use of professional tools for long-term operations, which further extends the equipment downtime, increases maintenance costs, and seriously affects overall production capacity. Summary of the Invention

[0004] In view of this, the present invention provides a fluorination furnace and method with replaceable interlayers, which can solve the problem that the interlayers in the existing fluorination furnace need to be manually inspected during detection and maintenance, which is not only time-consuming and labor-intensive and inefficient, but also subjectivity and errors in manual judgment. In addition, maintenance requires the use of professional tools for long-term operations, further extending equipment downtime, increasing maintenance costs, and seriously affecting overall production capacity.

[0005] The technical implementation scheme of the present invention is: a fluorination furnace with replaceable interlayer, including a support platform, a fluorination furnace, a furnace cover and an interlayer, a fluorination furnace is installed on the top of the support platform, a furnace cover is provided on the top of the fluorination furnace, an interlayer is provided on the inside of the fluorination furnace, a limiting block is provided on the inside of the fluorination furnace, a strip hole adapted to the limiting block is opened on the outside of the interlayer, an annular frame is rotatably installed on the inside of the interlayer, a push rod is provided on the annular frame for sliding at intervals, the push rod contacts the inner wall of the interlayer, a first spring is connected between the push rod and the annular frame, and a hook is provided for sliding between the push rods Plate, a spring piece is connected between the push rod and the hook plate, a first annular groove is provided at the bottom inner side of the furnace cover, the push rod is used to drive the hook plate to fit into the first annular groove, a limiting mechanism is provided on the hook plate, the limiting mechanism is used to limit the hook plate, a rotating frame is rotatably provided on the furnace cover, the hook plate slides through the rotating frame, the rotating frame is used to drive the annular frame and the hook plate to rotate, a releasing mechanism is provided on the furnace cover, the releasing mechanism is used to release the limit of the hook plate, a driving mechanism is provided on the support platform, the driving mechanism is used to drive the rotating frame to rotate and lift.

[0006] Furthermore, the limiting mechanism includes a sliding rod and a second spring. The sliding rod is slidably arranged on the hook plate. The second spring is connected between the sliding rod and the hook plate. A second annular groove is opened at the bottom of the furnace cover. The sliding rod is used to be inserted into the second annular groove to limit the hook plate.

[0007] Furthermore, the releasing mechanism includes a first electric push rod and a ring plate. The first electric push rod is installed on the furnace cover. A ring plate is slidably arranged in the second annular groove on the furnace cover. The telescopic rod of the first electric push rod is connected to the ring plate, and the ring plate is used to push out the sliding rod in the second annular groove.

[0008] Furthermore, the driving mechanism includes a motor, a hydraulic cylinder, a sliding frame, a sleeve and a ball. The motor is installed on the support platform, and the hydraulic cylinder is also rotatably installed on the support platform. The hydraulic cylinder is connected to the output shaft of the motor. The telescopic rod of the hydraulic cylinder is connected to the sliding frame, and the sliding frame is slidably connected to the furnace cover. A sleeve is provided in the sliding frame, and a ball is provided in the sleeve. A threaded groove is opened on the rotating frame, and the ball is in the threaded groove.

[0009] Furthermore, it also includes a locking mechanism, which includes a second electric push rod and a card rod. The second electric push rod is symmetrically arranged on the furnace cover, and the card rod is connected to the telescopic rod of the second electric push rod. The card rod slides through the side of the furnace cover, and the partition is symmetrically provided with through holes adapted to the card rod.

[0010] Furthermore, a connecting platform is included. The connecting platform is installed on the side of the supporting platform, and the connecting platform is used to support the partition.

[0011] Furthermore, a ladder is also included. A ladder is installed on the side of the fluorination furnace to assist the operator in climbing.

[0012] The present invention also provides a method for using a fluorination furnace with a replaceable interlayer, comprising the following steps: first, driving the rotating frame to rotate half a circle by a driving mechanism, so that the rotating frame drives the annular frame, the push rod and the hook plate to rotate half a circle, thereby causing the push rod to move along the inner wall of the interlayer; if there is no worn or eroded area on the inner wall of the interlayer, the push rod will not move due to the elastic force of the first spring; if there is a worn or eroded area on the inner wall of the interlayer, the push rod will move due to the elastic force of the first spring, causing the push rod to drive the hook plate to be stuck in the first annular groove, causing the hook plate to hook the furnace cover, and the hook plate is limited by the limiting mechanism; then, driving the rotating frame to rise by the driving mechanism, causing the rotating frame to drive the furnace cover to rise, thereby causing the The furnace cover leaves the fluorination furnace. If the furnace cover does not bring the partition out of the fluorination furnace, it means that there is no worn or eroded area on the inner wall of the partition and no replacement is required. If the furnace cover brings the partition out of the fluorination furnace, it means that there is a worn or eroded area on the inner wall of the partition and it needs to be replaced. For replacement, the driving mechanism drives the rotating frame, furnace cover and partition to the specified position, and then the limit of the hook plate is released by the releasing mechanism, so that the spring drives the hook plate to leave the first annular groove, so that the hook plate releases the furnace cover, so that the old partition can be removed and the new partition is put back into the fluorination furnace to complete the replacement; then, the material adding and removing operations are completed in the partition; finally, the driving mechanism moves the rotating frame and furnace cover to reset, so that the furnace cover is put back on the fluorination furnace.

[0013] The present invention has the following advantages: 1. By providing components such as a push rod, a first spring, a hook plate and a limit mechanism, the present invention can automatically trigger a replacement signal when the thickness of a certain area of ​​the interlayer becomes thinner due to corrosion or wear. This process does not require manual intervention, greatly improving the detection efficiency and avoiding subjective errors caused by human judgment. Moreover, when the system determines that the interlayer is damaged or lost, the interlayer can be automatically taken out when the furnace cover rises, so that the old interlayer is automatically separated from the fluorination furnace, and then a new interlayer can be quickly installed. The entire replacement process is convenient to operate and responds quickly, which significantly reduces the time and labor costs required for traditional manual disassembly and assembly, and improves equipment utilization.

[0014] 2. The present invention is provided with a limiting mechanism composed of a sliding rod and a second spring, and a releasing mechanism controlled by a first electric push rod. During the interlayer replacement process, the various components can be locked and released through mechanical linkage to prevent the components from falling off or being damaged, while also ensuring the personal safety of the operator.

[0015] 3. The newly added connecting platform of the present invention can provide temporary support during the replacement of the partition to prevent it from falling and causing damage; the ladder design makes it convenient for the operator to access the high position of the equipment to add or remove materials. These auxiliary structures not only improve the overall functionality of the equipment, but also optimize the human-computer interaction experience, facilitating daily maintenance and production operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0017] Figure 2 It is a schematic diagram of the three-dimensional structure of the partition, the limiting block and the annular frame of the present invention.

[0018] Figure 3 It is a schematic diagram of the three-dimensional structure of the fluorination furnace and the partition in the separated state of the present invention.

[0019] Figure 4 It is a schematic diagram of the three-dimensional structure of the annular frame, the support rod and the hook plate of the present invention.

[0020] Figure 5 It is a schematic diagram of the three-dimensional structure of the limiting mechanism of the present invention.

[0021] Figure 6 It is a schematic diagram of the three-dimensional structure of the furnace cover and the rotating frame of the present invention.

[0022] Figure 7 It is a schematic diagram of the three-dimensional structure of the furnace cover, the first annular groove and the second annular groove of the present invention.

[0023] Figure 8 It is a schematic diagram of the three-dimensional structure of the annular frame, hook plate and rotating frame of the present invention.

[0024] Figure 9 It is a schematic diagram of the three-dimensional structure of the releasing mechanism of the present invention.

[0025] Figure 10 It is a schematic diagram of the three-dimensional structure of the motor, hydraulic cylinder and sliding frame of the present invention.

[0026] Figure 11 It is a schematic diagram of the three-dimensional structure of the locking mechanism of the present invention.

[0027] Figure 12 This is a structural separation diagram of the driving mechanism of the present invention.

[0028] The meanings of the reference numerals in the figure are: 1: support platform, 2: fluorination furnace, 3: furnace cover, 4: partition, 5: limit block, 6: strip hole, 7: ring frame, 8: push rod, 9: first spring, 10: hook plate, 11: spring piece, 12: first annular groove, 1301: sliding rod, 1302: second spring, 1303: second annular groove, 14: rotating frame, 1501: first electric push rod, 1502: ring plate, 1601: motor, 1602: hydraulic cylinder, 1603: sliding frame, 1604: sleeve, 1605: ball, 17: second electric push rod, 18: clamping rod, 19: through hole, 20: connecting platform, 21: ladder. DETAILED DESCRIPTION

[0029] Example: A fluorination furnace with replaceable interlayer, see Figures 1-12As shown, it includes a support platform 1, a fluorination furnace 2, a furnace cover 3 and a partition 4; the fluorination furnace 2 is installed on the top of the support platform 1; the furnace cover 3 is placed on the top of the fluorination furnace 2; a partition 4 is placed on the inner side of the fluorination furnace 2, and the partition 4 is used to protect the fluorination furnace 2 body from corrosion; it also includes a limit block 5, an annular frame 7, a push rod 8, a first spring 9, a hook plate 10, a spring 11, a limit mechanism, a rotating frame 14, a release mechanism and a driving mechanism; the limit block 5 is symmetrically arranged on the upper side of the fluorination furnace 2; the outer side of the partition 4 is symmetrically provided with a strip hole 6, and the limit block 5 is stuck in the strip hole 6 to limit the partition 4; the inner side of the partition 4 is rotatably installed with an annular frame 7; the annular frame 7 is left and right Symmetrically spaced sliding supports 8 are provided, and the supports 8 are in contact with the inner wall of the partition 4; a first spring 9 is connected between the supports 8 and the annular frame 7. When the inner wall of the partition 4 is worn or eroded, the thickness of the worn or eroded area of ​​the inner wall of the partition 4 will become thinner. Later, when the supports 8 pass through the worn or eroded area, the originally squeezed supports 8 will lose pressure. At this time, the first spring 9 will use the elastic force to press the supports 8, so that the supports 8 will be pressed against the worn or eroded area of ​​the inner wall of the partition 4 after moving. In this way, whether the inner wall of the partition 4 is worn or eroded can be determined by the movement of the supports 8. A circular plate is provided at the end of the supports 8 away from the inner wall of the partition 4; the supports 8 on the same side of the left and right sides are There are hook plates 10 sliding between them, and the number of hook plates 10 is two. The circular plate on the push rod 8 is in contact with the hook plate 10; a spring piece 11 is connected between the push rod 8 and the hook plate 10; a first annular groove 12 is provided at the bottom of the furnace cover 3, and when the first spring 9 drives the push rod 8 to move, the push rod 8 can drive the hook plate 10 through the circular plate to snap into the first annular groove 12, so that the hook plate 10 hooks the furnace cover 3, so that the partition 4 can rise with the furnace cover 3 through the annular frame 7, the push rod 8 and the hook plate 10; a limiting mechanism is provided on the hook plate 10, which is used to limit the hook plate 10; a rotating frame 14 is provided in the middle of the furnace cover 3, and the two hook plates 10 are slidable through the rotating frame The rotating frame 14 is slidably stuck on the top of the annular frame 7. The rotating frame 14 is used to drive the annular frame 7 and the hook plate 10 to rotate, so that the push rod 8 on the annular frame 7 can contact other areas of the inner wall of the partition 4, thereby determining whether other areas of the inner wall of the partition 4 are worn or eroded; a release mechanism is provided on the furnace cover 3, which is used to release the limit of the hook plate 10; a driving mechanism is provided on the support platform 1, which is used to drive the rotating frame 14 to rotate and lift; the annular frame 7, the push rod 8, the first spring 9, the hook plate 10, the spring 11, the limiting mechanism, the rotating frame 14, the release mechanism and the driving mechanism are all made of high temperature resistant and corrosion resistant materials.

[0030] See Figure 4-Figure 7As shown, the limiting mechanism includes a sliding rod 1301 and a second spring 1302; a sliding rod 1301 is slidingly provided on the top of the hook plate 10; a second spring 1302 is connected between the bottom of the sliding rod 1301 and the inside of the hook plate 10; a second annular groove 1303 is opened at the bottom of the furnace cover 3, and the sliding rod 1301 is used to be clamped into the second annular groove 1303 to limit the hook plate 10.

[0031] See Figure 9 As shown, the releasing mechanism includes a first electric push rod 1501 and a ring plate 1502; the first electric push rod 1501 is symmetrically installed on the top of the furnace cover 3; a ring plate 1502 is slidably arranged in the second annular groove 1303 on the furnace cover 3, and the telescopic rods of the two first electric push rods 1501 are connected to the top of the ring plate 1502, and the ring plate 1502 is used to press out the sliding rod 1301 in the second annular groove 1303.

[0032] See Figure 10-12 As shown, the driving mechanism includes a motor 1601, a hydraulic cylinder 1602, a sliding frame 1603, a sleeve 1604 and a ball 1605; the motor 1601 is installed on the right side of the bottom of the support platform 1; the hydraulic cylinder 1602 is rotatably installed on the right side of the lower side of the support platform 1, and the bottom of the hydraulic cylinder 1602 is connected to the output shaft of the motor 1601, and the motor 1601 is used to drive the hydraulic cylinder 1602 to rotate; the telescopic rod of the hydraulic cylinder 1602 is connected to the sliding frame 1603, and the sliding frame 1603 is slidably connected to the furnace cover 3; the sleeve 1604 is provided on the inner side of the sliding frame 1603; the ball 1605 is provided on the inner side of the sleeve 1604, and a threaded groove is opened on the rotating frame 14, and the ball 1605 is in the threaded groove.

[0033] In the initial state, the inner wall of the partition 4 is used to squeeze the push rod 8, so that the first spring 9 is in a stretched state. The elastic force of the first spring 9 can cause the first spring 9 to press the push rod 8, so that the push rod 8 is tightly attached to the inner wall of the partition 4; and the top of the furnace cover 3 contacts the top of the sliding rod 1301, so that the furnace cover 3 squeezes the sliding rod 1301, thereby compressing the second spring 1302;

[0034] When in use, first drive the sliding frame 1603 upward through the hydraulic cylinder 1602, so that the sliding frame 1603 drives the sleeve 1604 and the ball 1605 to move upward, so that the ball 1605 drives the rotating frame 14 to rotate half a circle through the threaded groove, so that the rotating frame 14 drives the annular frame 7, the push rod 8 and the hook plate 10 to rotate half a circle, so that the push rod 8 moves half a circle along the inner wall of the partition 4. If there is no worn or eroded area on the inner wall of the partition 4, the push rod 8 will not drive the hook plate 10 to move; if there is a worn or eroded area on the inner wall of the partition 4, since the thickness of the worn or eroded area on the inner wall of the partition 4 will become thinner, therefore, when the push rod 8 moves to the worn or eroded area, the worn or eroded area no longer squeezes the push rod 8, so that the corresponding first spring 9 will use its elastic force to drive the corresponding push rod 8 to move to the side close to the inner wall of the partition 4, thereby making the corresponding When the hook plate 10 is moved and inserted into the first annular groove 12, the hook plate 10 is locked in the second annular groove 1303, thereby limiting the position of the hook plate 10. When the hook plate 10 is moved and inserted into the first annular groove 12, the hook plate 10 will squeeze the spring pieces 11 on the other unmoved push rods 8 on the same side, causing the spring pieces 11 on the other unmoved push rods 8 on the same side to deform. When the push rod 8 moves away from the worn or eroded area, the position of the inner wall area of ​​the partition 4 will squeeze the corresponding push rod 8 to move back to its original position, separating the circular plate on the corresponding push rod 8 from the hook plate 10 and stretching the corresponding first spring 9. At the same time, the corresponding push rod 8 squeezes the spring piece 11 thereon to deform.

[0035] Then, when the ball 1605 moves to the uppermost end of the thread groove, the ball 1605 will drive the rotating frame 14 to move upward together. At this time, if the hook plate 10 does not hook the furnace cover 3, the rotating frame 14 will only drive the furnace cover 3 to move upward, so that the rotating frame 14 leaves the top of the annular frame 7 and the partition 4 remains in the fluorination furnace 2. During this period, when the top of the furnace cover 3 separates from the sliding rod 1301, the second spring 1302 returns to its original state, and the second spring 1302 drives the sliding rod 1301 to move upward. The operator can determine that there is no worn or eroded area on the inner wall of the partition 4 based on the fact that the partition 4 remains in the fluorination furnace 2. Then, the operator can add or remove materials normally.If the hook plate 10 hooks the furnace cover 3, the rotating frame 14 will drive the furnace cover 3, the hook plate 10, the support rod 8, the annular frame 7 and the partition 4 to move upward, so that the partition 4 leaves the fluorination furnace 2. The operator can determine that there is an area of ​​wear or erosion on the inner wall of the partition 4 based on the partition 4 leaving the fluorination furnace 2. Then the operator drives the hydraulic cylinder 1602 to rotate 180 degrees through the motor 1601, so that the hydraulic cylinder 1602 drives the sliding frame 1603, the furnace cover 3 and the partition 4 to rotate 180 degrees, and then drives the sliding frame 1603, the furnace cover 3 and the partition 4 to move downward again through the hydraulic cylinder 1602. The first electric push rod 1501 drives the ring plate 1502 to move downward. When the ring plate 1502 contacts the sliding rod 1301 in the second annular groove 1303, the ring plate 1502 squeezes the sliding rod 1301 to move downward and reset. The second spring 1302 is compressed to make the sliding rod 1301 leave the second annular groove 1303, so that the sliding rod 1301 releases the limit of the hook plate 10. At this time, the spring piece 11 returns to its original state, and the spring piece 11 drives the hook plate 10 to move away from the first annular groove 12 and reset, so that the hook plate 10 releases the furnace cover 3, thereby making the hook plate 10, the push rod 8, The annular frame 7 and the partition 4 fall down to the ground under the influence of gravity, and the top of the annular frame 7 is separated from the rotating frame 14. During the movement and reset of the hook plate 10, when the sliding rod 1301 on the hook plate 10 contacts the top of the furnace cover 3, the top of the furnace cover 3 presses the sliding rod 1301. During the downward falling of the hook plate 10, when the sliding rod 1301 on the hook plate 10 is separated from the top of the furnace cover 3, the second spring 1302 returns to its original state, and the second spring 1302 drives the sliding rod 1301 to move upward. Then, if there is material in the partition 4 that has not been taken, the material can be taken in the partition 4. If there is no material in layer 4 or the material is taken out, the first electric push rod 1501 drives the ring plate 1502 to move upward and reset, and then the new interlayer 4 is put back into the fluorination furnace 2, thereby replacing the interlayer 4, and the limit block 5 on the fluorination furnace 2 is inserted into the strip hole 6 of the new interlayer 4, and then the hydraulic cylinder 1602 drives the sliding frame 1603 and the furnace cover 3 to move upward, and then the motor 1601 drives the hydraulic cylinder 1602 to rotate 180 degrees in the opposite direction, so that the hydraulic cylinder 1602 drives the sliding frame 1603 and the furnace cover 3 to rotate 180 degrees in the opposite direction, and then the operator can add materials normally;

[0036] After the operator finishes feeding or taking out the materials, the hydraulic cylinder 1602 drives the sliding frame 1603 to move downward and reset, so that the sliding frame 1603 drives the sleeve 1604, the ball 1605, the rotating frame 14 and the furnace cover 3 to move downward and reset, so that the rotating frame 14 falls back on the annular frame 7 in the compartment 4. When the top of the furnace cover 3 contacts the sliding rod 1301, the top of the furnace cover 3 will squeeze the sliding rod 1301 to move downward and reset, and the second spring 1302 is compressed. When the rotating frame When 14 contacts the annular frame 7, the annular frame 7 will stop the rotating frame 14 and the furnace cover 3 from moving downward. Then, as the sliding frame 1603, the sleeve 1604 and the ball 1605 continue to move downward, the ball 1605 will drive the rotating frame 14 to rotate half a circle in the opposite direction through the threaded groove to reset, so that the rotating frame 14 drives the annular frame 7, the push rod 8 and the hook plate 10 to rotate half a circle in the opposite direction to reset. In this way, the material loading or unloading operation can be completed, and then the operator can perform the corresponding process operation.

[0037] See Figure 3 、 Figure 10 and Figure 11 As shown, a locking mechanism is also included, which includes a second electric push rod 17 and a clamping rod 18; the furnace cover 3 is symmetrically provided with second electric push rods 17 in front and back; the telescopic rods of the two second electric push rods 17 are connected to the clamping rod 18, and the clamping rod 18 slides through the side of the furnace cover 3. The clamping rod 18 is made of high-temperature resistant and corrosion-resistant material; the upper side of the partition 4 is symmetrically provided with through holes 19 in front and back, and the through holes 19 are aligned with the clamping rod 18.

[0038] By setting up a locking mechanism, when the operator needs to take out the partition 4 in the fluorination furnace 2, before the furnace cover 3 moves upward, the second electric push rod 17 can drive the card rod 18 to move toward the inner side of the fluorination furnace 2, so that the card rod 18 is stuck in the through hole 19 of the partition 4. In this way, when the furnace cover 3 moves upward, the furnace cover 3 can drive the partition 4 to move upward together through the second electric push rod 17 and the card rod 18, and then the second electric push rod 17 drives the card rod 18 to move and reset, so that the card rod 18 leaves the through hole 19 of the partition 4, so that the furnace cover 3 and the partition 4 can be separated, thereby making it convenient for the operator to take out the partition 4 in the fluorination furnace 2.

[0039] See Figure 1 As shown, a connecting platform 20 is also included; the connecting platform 20 is installed on the right side of the support platform 1, and the connecting platform 20 is used to support the partition 4.

[0040] By setting up the connecting platform 20, when the sliding frame 1603, the furnace cover 3 and the partition 4 are driven by the hydraulic cylinder 1602 to move downward and reset, the partition 4 will fall on the connecting platform 20, and the partition 4 will be supported by the connecting platform 20. Thereafter, when the hook plate 10 releases the furnace cover 3, the partition 4 is supported by the connecting platform 20, which can prevent the hook plate 10, the support rod 8, the annular frame 7 and the partition 4 from falling to the ground due to gravity, and avoid the partition 4 from being deformed due to severe impact and making a loud noise that affects surrounding offices.

[0041] See Figure 1 As shown, a ladder 21 is also included; a ladder 21 is installed on the front side of the fluorination furnace 2, and the ladder 21 is used to assist the operator in climbing.

[0042] By providing the ladder 21 , an operator can add or remove materials to or from the partition 4 in the fluorination furnace 2 by climbing the ladder 21 , thereby making it convenient for the operator to add or remove materials.

Claims

1. A fluorination furnace with a replaceable interlayer, comprising a support platform (1), a fluorination furnace (2), a furnace cover (3) and an interlayer (4), wherein the fluorination furnace (2) is mounted on the top of the support platform (1), the furnace cover (3) is provided on the top of the fluorination furnace (2), and an interlayer (4) is provided inside the fluorination furnace (2), wherein: A limiting block (5) is provided on the inner side of the fluorination furnace (2), a strip hole (6) adapted to the limiting block (5) is provided on the outer side of the partition (4), an annular frame (7) is rotatably installed on the inner side of the partition (4), a push rod (8) is provided on the annular frame (7) for sliding, the push rod (8) contacts the inner wall of the partition (4), a first spring (9) is connected between the push rod (8) and the annular frame (7), a hook plate (10) is provided for sliding between the push rod (8), a spring piece (11) is connected between the push rod (8) and the hook plate (10), a first annular groove (12) is provided on the inner bottom of the furnace cover (3), the push rod (8) is provided for sliding, and a spring piece (11) is provided between the push rod (8) and the hook plate (10). ) is used to drive the hook plate (10) to be clamped into the first annular groove (12), a limiting mechanism is provided on the hook plate (10), and the limiting mechanism is used to limit the hook plate (10), a rotating frame (14) is rotatably provided on the furnace cover (3), the hook plate (10) slides through the rotating frame (14), and the rotating frame (14) is used to drive the annular frame (7) and the hook plate (10) to rotate, a releasing mechanism is provided on the furnace cover (3), and the releasing mechanism is used to release the limit of the hook plate (10), and a driving mechanism is provided on the support platform (1), and the driving mechanism is used to drive the rotating frame (14) to rotate and lift.

2. A fluorination furnace with replaceable interlayer according to claim 1, characterized in that: The limiting mechanism includes a sliding rod (1301) and a second spring (1302). The sliding rod (1301) is slidably arranged on the hook plate (10). The second spring (1302) is connected between the sliding rod (1301) and the hook plate (10). A second annular groove (1303) is provided at the bottom of the furnace cover (3). The sliding rod (1301) is used to be clamped into the second annular groove (1303) to limit the hook plate (10).

3. A fluorination furnace with replaceable interlayer according to claim 2, characterized in that: The release mechanism comprises a first electric push rod (1501) and a ring plate (1502); the first electric push rod (1501) is mounted on the furnace cover (3); the ring plate (1502) is slidably arranged in the second annular groove (1303) on the furnace cover (3); the telescopic rod of the first electric push rod (1501) is connected to the ring plate (1502); and the ring plate (1502) is used to press the sliding rod (1301) in the second annular groove (1303) out.

4. A fluorination furnace with replaceable interlayer according to claim 3, characterized in that: The driving mechanism comprises a motor (1601), a hydraulic cylinder (1602), a sliding frame (1603), a sleeve (1604) and a ball (1605). The motor (1601) is mounted on the support platform (1). The hydraulic cylinder (1602) is also rotatably mounted on the support platform (1). The hydraulic cylinder (1602) is connected to the output shaft of the motor (1601). The telescopic rod of the hydraulic cylinder (1602) is connected to the sliding frame (1603). The sliding frame (1603) is slidably connected to the furnace cover (3). The sleeve (1604) is arranged in the sliding frame (1603). The ball (1605) is arranged in the sleeve (1604). A threaded groove is provided on the rotating frame (14), and the ball (1605) is located in the threaded groove.

5. A fluorination furnace with replaceable interlayer according to claim 1, characterized in that: The invention also includes a locking mechanism, which includes a second electric push rod (17) and a clamping rod (18). The second electric push rod (17) is symmetrically arranged on the furnace cover (3). The clamping rod (18) is connected to the telescopic rod of the second electric push rod (17). The clamping rod (18) slides through the side of the furnace cover (3). The partition (4) is symmetrically provided with a through hole (19) adapted to the clamping rod (18).

6. A fluorination furnace with replaceable interlayer according to claim 1, characterized in that: It also includes a connecting platform (20), which is installed on the side of the support platform (1). The connecting platform (20) is used to support the partition (4).

7. A fluorination furnace with replaceable interlayer according to claim 1, characterized in that: A ladder (21) is also included. The ladder (21) is installed on the side of the fluorination furnace (2). The ladder (21) is used to assist the operator in climbing.

8. A method for using the fluorination furnace with replaceable interlayer as claimed in claim 4, characterized in that: The invention comprises the following steps: first, the rotating frame (14) is driven by a driving mechanism to rotate half a circle, so that the rotating frame (14) drives the annular frame (7), the push rod (8) and the hook plate (10) to rotate half a circle, so that the push rod (8) moves along the inner wall of the partition (4); if there is no worn or eroded area on the inner wall of the partition (4), the push rod (8) will not move due to the elastic force of the first spring (9); if there is a worn or eroded area on the inner wall of the partition (4), the push rod (8) will move due to the elastic force of the first spring (9), so that the push rod (8) drives the hook plate (10) to be stuck in the first annular groove (12), so that the hook plate (10) hooks the furnace cover (3), and the limit mechanism limits the hook plate (10); then, the rotating frame (14) is driven by the driving mechanism to rise, so that the rotating frame (14) drives the furnace cover (3) to rise, so that the furnace cover (3) leaves the fluorination furnace (2), and if the furnace cover (3) If the partition (4) is not taken out of the fluorination furnace (2), it means that there is no area of ​​wear or erosion on the inner wall of the partition (4) and no replacement is required. If the furnace cover (3) takes the partition (4) out of the fluorination furnace (2), it means that there is an area of ​​wear or erosion on the inner wall of the partition (4) and it needs to be replaced. For replacement, the rotating frame (14), the furnace cover (3) and the partition (4) are driven by the driving mechanism to move to the specified position, and then the limit of the hook plate (10) is released by the releasing mechanism, so that the spring (11) drives the hook plate (10) to leave the first annular groove (12), so that the hook plate (10) releases the furnace cover (3), so that the old partition (4) can be removed, and then the new partition (4) is put back into the fluorination furnace (2) to complete the replacement; then, the material addition and removal operation is completed in the partition (4); finally, the rotating frame (14) and the furnace cover (3) are moved and reset by the driving mechanism, so that the furnace cover (3) is put back on the fluorination furnace (2).

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