X-ray fluorescence analyzer

Abstract

The present invention improves analysis accuracy and shortens measurement time by preventing a decrease in the intensity of fluorescent X-rays to be detected. A fluorescent X-ray analysis device having a sample chamber in which a sample is disposed and an irradiation chamber separated from the sample chamber by using a partition plate, the fluorescent X-ray analysis device having: an X-ray source that is disposed in the irradiation chamber and that irradiates X-rays obliquely toward an opening provided on a partition wall between the sample chamber and the irradiation chamber; a window frame member that is formed of a material that transmits the X-rays, that holds a partition film constituting a part of the partition, and that is disposed in an opening provided in the partition wall; and a film support member that has a long hole through which the X-rays pass, is disposed adjacent to the separator film on the irradiation chamber side, and supports the separator film from the irradiation chamber side. The film support member is disposed such that the long hole is parallel to an optical axis of the X-ray in a plan view from the sample chamber side toward the irradiation chamber side.

Description

Technical Field

[0001] The present invention relates to a fluorescent X-ray analysis device. Background Art

[0002] Fluorescent X-ray analyzers are known as devices for analyzing elements contained in samples. Fluorescent X-ray analyzers irradiate a sample with a single X-ray and perform analysis based on the intensity and energy of the fluorescent X-rays emitted from the sample. To prevent contamination within the device caused by the sample, simplified fluorescent X-ray analyzers are also known that utilize a separator membrane to separate the sample chamber from the irradiation chamber. For example, Patent Document 1 discloses an X-ray detection device in which a sample carrier, in an unfolded state, secures an X-ray-transmitting membrane to prevent flexure, wrinkles, or bending, and the sample carrier is positioned between the sample chamber and the irradiation chamber.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2014-38035 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] When analyzing light elements in a sample, the atmospheric attenuation of X-rays is significant, necessitating the replacement of the X-ray optical path with helium or creating a vacuum. However, helium is sometimes difficult to supply or obtain. If the sample is liquid, the sample cannot be placed in a vacuum, so the irradiation chamber must be evacuated while maintaining the sample chamber in the atmosphere. However, the X-ray detection device of Patent Document 1 does not account for the pressure difference that can arise between the front and back surfaces of the X-ray transparent membrane. Therefore, when performing measurements under conditions in which a pressure difference arises between the front and back surfaces of the X-ray transparent membrane, countermeasures such as reducing the size of the circular through-holes provided on the sample carrier or making them mesh-shaped are necessary. However, since the X-ray irradiation unit irradiates the sample at an angle, such countermeasures will result in the X-rays being blocked by the sample carrier, reducing the area of ​​the sample irradiated by the X-rays. This reduces the intensity of the fluorescent X-rays to be detected, resulting in reduced analytical accuracy and increased measurement time.

[0008] The present invention has been made in view of the above problems and aims to provide a fluorescent X-ray analyzer having a partition membrane provided between a sample chamber and an irradiation chamber, thereby improving analysis accuracy and shortening measurement time by preventing a decrease in the intensity of fluorescent X-rays to be detected.

[0009] Technical solutions to problems

[0010] (1) A fluorescence X-ray analysis device according to one embodiment of the present invention comprises a sample chamber in which a sample is arranged and an irradiation chamber separated from the sample chamber by a partition, and is characterized in that it comprises: an X-ray source which is arranged in the irradiation chamber and irradiates X-rays obliquely toward an opening on a partition wall provided between the sample chamber and the irradiation chamber; a window frame member which is formed of a material which transmits the X-rays, holds a partition film which constitutes a part of the partition, and is arranged in the opening provided on the partition wall; and a film support member which has a long hole for allowing the X-rays to pass through, is arranged adjacent to the partition film on the irradiation chamber side, and supports the partition film from the irradiation chamber side, and the film support member is arranged so that the long hole is parallel to the optical axis of the X-ray in a top view from the sample chamber side toward the irradiation chamber side.

[0011] (2) Another embodiment of the fluorescent X-ray analysis device disclosed herein is characterized in that it further includes a slit, which is arranged on the optical path of the fluorescent X-ray and is composed of a plurality of parallel plates arranged at predetermined intervals, and the plurality of parallel plates are arranged to be parallel to the long hole in a top view from the sample chamber side toward the irradiation chamber side.

[0012] (3) Another embodiment of the fluorescent X-ray analysis device disclosed herein is characterized in that it has an opening for allowing the X-rays to pass from the irradiation chamber to the sample chamber, and has a window frame holding member arranged in the sample chamber and supporting the outer edge of the film support member from the bottom side.

[0013] (4) Another embodiment of the fluorescence X-ray analysis device disclosed herein is characterized in that the film supporting component has an engaged portion at a position in contact with the window frame holding component, and the window frame holding component has an engaging portion at a position engaged with the engaged portion when the film supporting component is configured so that the long hole is parallel to the optical axis of the X-ray in a top view from the sample chamber side toward the irradiation chamber side.

[0014] (5) In another aspect of the present disclosure, the fluorescent X-ray analysis device is characterized in that the film support member is formed of resin.

[0015] (6) In another embodiment of the present disclosure, the fluorescent X-ray analyzer is characterized in that the film support member is formed of PEEK or PTFE.

[0016] (7) In another aspect of the present disclosure, a fluorescent X-ray analysis apparatus is characterized in that at least a portion of the film support member to be irradiated with X-rays is formed of a resin coated with aluminum.

[0017] (8) In another aspect of the present disclosure, the fluorescent X-ray analyzer is characterized in that the film support member has a thickness of 1 mm or more.

[0018] (9) Another embodiment of the fluorescent X-ray analysis device disclosed herein is characterized in that the film support component has a plurality of the long holes, and the plurality of the long holes are arranged side by side in a direction orthogonal to the optical axis of the X-ray in a top view from the sample chamber side toward the irradiation chamber side.

[0019] (10) In another embodiment of the present disclosure, the fluorescent X-ray analysis device is characterized in that the width of the long hole is at least four times the distance between adjacent long holes.

[0020] (11) Another aspect of the present disclosure provides a fluorescent X-ray analysis device characterized in that the length of the long hole is at least four times the width.

[0021] (12) Another aspect of the present disclosure provides a fluorescent X-ray analysis device characterized in that the film support member is formed of metal.

[0022] Effects of the Invention

[0023] According to the present disclosure, it is possible to improve analysis accuracy and shorten measurement time by preventing a decrease in the intensity of fluorescent X-rays to be detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a diagram schematically showing a fluorescent X-ray analyzer.

[0025] Figure 2 It is a diagram showing a cross section of a sample stage.

[0026] Figure 3 These are the top view, side view, and bottom view of the film support component.

[0027] Figure 4 It is from Figure 1 Projection of viewpoint A in the direction of the arrow.

[0028] Figure 5 It is from Figure 1 Projection of viewpoint A in the direction of the arrow.

[0029] Figure 6 It is from Figure 1 Projection of viewpoint B in the direction of the arrow. DETAILED DESCRIPTION

[0030] Hereinafter, preferred embodiments for carrying out the present disclosure (hereinafter referred to as embodiments) will be described with reference to the drawings. Figure 1 1 is a diagram schematically showing the X-ray fluorescence analysis apparatus 100. Figure 1As shown, fluorescent X-ray analysis apparatus 100 includes a sample chamber 102 in which a sample 118 is placed, and an irradiation chamber 106 separated from sample chamber 102 by a partition. Sample chamber 102 and irradiation chamber 106 are separated by a partition including a partition wall 104 to prevent gas from migrating between them. Partition wall 104 is provided with an opening for passing X-rays from irradiation chamber 106 to sample chamber 102.

[0031] The irradiation chamber 106 is provided with an X-ray source 108 for emitting X-rays, a slit 110, a spectroscopic element 111 for spectroscopically ... Figure 4 ) is formed into a Soller slit. Spectroscopic element 111 separates fluorescent X-rays having a predetermined wavelength from the fluorescent X-rays passing through slit 110. Detector 112 is positioned at the position where the fluorescent X-rays are incident and detects the fluorescent X-rays separated by spectroscopic element 111. Detector 112 is, for example, a proportional counter tube that measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signals output from detector 112 to obtain the intensity of the fluorescent X-rays. Sample 118 is analyzed based on the intensity of the fluorescent X-rays.

[0032] also, Figure 1 This diagram shows the positional relationship between the X-ray source 108, slit 110, spectrometer 111, and detector 112 in the x- and z-axis directions. These are located on the same xz plane. However, since detector 112 is positioned where the spectroscopically separated fluorescent X-rays enter, the position of detector 112 in the y-axis direction differs from the positions of X-ray source 108, slit 110, and spectrometer 111 in the y-axis direction.

[0033] A sample stage 114 is provided in the sample chamber 102, and a sample pool 116 is arranged on the sample stage 114. The interior of the sample chamber 102 can be filled with helium or filled with atmospheric air. According to the present invention, the sample 118 can be measured regardless of whether it is placed in a helium environment or an atmospheric environment. Below, as the simplest case of the measurement method, the case where the sample 118 is placed in an atmospheric environment is described. In addition, the sample 118 can be liquid or solid (including powder), and the case where the sample 118 is liquid is described below. The liquid sample is arranged in the sample pool 116. The sample pool 116 is cylindrical in shape, and the bottom surface is sealed with a sample retaining film. The liquid sample is arranged on the sample retaining film. In addition, the upper surface of the sample pool 116 can also be sealed with other films to prevent the sample 118 from overflowing. The sample stage 114 includes a window frame retaining component, a window frame component 208, a film support component 210 and a cover component 212. Figure 2 114 is a diagram showing a cross section of the sample stage 114 .

[0034] The window frame holding member has an opening that allows X-rays from the irradiation chamber 106 to pass through the sample chamber 102. The window frame holding member is disposed in the sample chamber 102 and supports the outer edge 306 of the film support member 210 and the outer edge of the window frame member 208 from below. Specifically, the window frame holding member includes a lower holding member 202 and an upper holding member 204. Both the lower holding member 202 and the upper holding member 204 have openings that allow X-rays from the irradiation chamber 106 to pass through the sample chamber 102.

[0035] The lower holding member 202 is a member that is arranged in contact with the upper portion of the partition wall 104. The lower holding member 202 has a substantially circular outer edge when viewed from the upper and lower surfaces, and has a circular opening at a position corresponding to the opening provided on the partition wall 104. The opening of the lower holding member 202 has a shape corresponding to the area except for the outer edge portion 306 (described later) of the film support member 210. In addition, as shown in FIG. Figure 2 As shown, the lower holding member 202 has a step corresponding to the outer edge of the film support member 210. In addition, the lower holding member 202 has a portion 304 (see FIG. 1 ) that is engaged with the film support member 210. Figure 3 ) and the engaging portion 206. The film support member 210 is arranged so that its outer edge is located on the step of the lower holding member 202, and the portion other than the outer edge is located in the opening of the lower holding member 202. The engaged portion 304 is engaged with the engaging portion 206 of the lower holding member 202. Thus, the lower holding member 202 supports the outer edge 306 of the film support member 210.

[0036] Furthermore, the lower holding member 202 supports the window frame member 208 disposed on the upper side of the film supporting member 210. Figure 2As shown, lower retaining member 202 has a step corresponding to the outer edge of the curved portion of window frame member 208. Lower retaining member 202 has an O-ring at the location where this step is provided. When window frame member 208 is placed on lower retaining member 202, this O-ring contacts the curved portion of window frame member 208, thereby creating an airtight seal between window frame member 208 and lower retaining member 202.

[0037] The upper retaining member 204 is positioned to contact the upper portion of the lower retaining member 202. The upper retaining member 204 has a generally circular outer edge when viewed from its top and bottom surfaces, and has a circular opening with a larger diameter than the opening in the lower retaining member 202, centered at the same position. The upper retaining member 204 has an O-ring where it contacts the lower retaining member 202. Together with the lower retaining member 202, the upper retaining member 204 supports the window frame member 208.

[0038] The window frame member 208 is formed of a material that allows X-rays to pass through, holds a partition membrane 214 that constitutes a portion of the partition, and is arranged in an opening provided on the partition wall 104. Specifically, the window frame member 208 is formed of a material that allows X-rays to pass through, holds a partition membrane 214 that constitutes another portion of the partition, and is arranged in the opening of the window frame retaining member. The window frame member 208 includes an inner film retaining member and an outer film retaining member each having a circular ring shape. The window frame member 208 is arranged in the opening of the window frame retaining member with the partition membrane 214 being clamped by the inner film retaining member and the outer film retaining member. The partition membrane 214 located in the opening constitutes a portion of the partition.

[0039] The film support member 210 has a long hole 302 for allowing X-rays to pass therethrough, is disposed adjacent to the diaphragm film 214 on the irradiation chamber 106 side, and supports the diaphragm film 214 from the irradiation chamber 106 side. Figure 3 : The top view (upper side), side view (center), and bottom view (lower side) of the film support member 210. In the side view, the position of the long hole 302 is indicated by a dotted line. When viewed from the top and bottom surfaces, the outer edge of the film support member 210 is approximately circular. Figure 3 As shown, the film support member 210 may be provided with a thin outer edge portion 306 that contacts the upper surface of the lower holding member 202. For example, the film support member 210 may be circular with a diameter of 30 mm excluding the outer edge portion 306 when viewed from the top and bottom.

[0040] The film support member 210 is formed to a thickness that allows negligible deformation due to the pressure difference between the sample chamber 102 and the irradiation chamber 106. Specifically, for example, the thickness of the film support member 210 is 1 mm or greater, preferably 2 mm or greater. The thickness of the outer edge portion 306 that contacts the upper surface of the lower holding member 202 is 0.5 mm. The portion of the film support member 210 other than the outer edge 306 has a shape corresponding to the opening of the lower holding member 202.

[0041] The film support member 210 has an engaged portion 304 at a position in contact with the window frame holding member. Specifically, for example, the film support member 210 has two holes on the surface of the lower side of the outer edge portion 306 (the side in contact with the lower holding member 202). Figure 3 In the embodiment, the engaged portion 304 is a through hole, but the engaged portion 304 may also be a non-through hole or a groove. In the case where the outer edge portion 306 is not provided, a cutout may be provided around it. In the case where the film support member 210 has an outer edge portion 306, the portion other than the outer edge portion 306 is located at the opening of the lower retaining member 202, and the outer edge is located on the step of the lower retaining member 202. At this time, the film support member 210 is configured so that the two holes (engaged portion 304) are engaged with the convex portion (engaging portion 206) of the lower retaining member 202.

[0042] The film support member 210 has a plurality of long holes 302. For example, the film support member 210 has five long holes 302 in an elongated shape. The length of the long hole 302 is preferably at least 4 times the width, and the width of the long hole 302 is preferably at least 4 times the interval between adjacent long holes 302. For example, each long hole 302 is formed to have the same width but is the largest in the film support member 210 except for the outer edge 306. Therefore, each long hole 302 is longer as it approaches the center. Figure 3 In the example shown, the lengths of the long holes 302 are 26 mm, 24 mm, and 17 mm from the inside to the outside, respectively. The width of each long hole 302 is the same, 4 mm. The interval between adjacent long holes 302 (the width of the beam portion) is 0.5 mm.

[0043] The portion between adjacent elongated holes 302 of the film support member 210 (hereinafter conveniently referred to as the beam portion) supports the separator membrane 214. When multiple elongated holes 302 are connected to form a large opening, the separator membrane 214 is supported only by the outer edge 306 of the film support member 210. When the sample chamber 102 is at atmospheric pressure and the irradiation chamber 106 is in a vacuum, the large force exerted on the separator membrane 214 can damage it. However, as disclosed herein, by configuring the film support member 210 with multiple elongated holes 302, the separator membrane 214 can be supported by the beam portion.

[0044] Furthermore, the longer the length of the elongated hole 302 is, the thicker the film support member 210 is. For example, the ratio of the length of the elongated hole 302 to the thickness of the film support member 210 (thickness / length) is preferably greater than the ratio of the x-component to the z-component (z-component / x-component) contained in the optical axis of the X-rays emitted by the X-ray source. Specifically, as described above, if the thickness of the central portion of the film support member 210 is 3.4 mm, a length of the elongated hole 302 of 26 mm can prevent X-rays from being blocked by the film support member 210.

[0045] The film support member 210 is formed of a resin. Specifically, for example, the film support member 210 is formed of polyetheretherketone (PEEK) or polytetrafluoroethylene (PTFE). When the film support member 210 is made of metal, interference lines are generated, and some elements cannot be analyzed. By forming the film support member 210 with a resin that is less likely to generate interference lines, samples containing elements that cause interference lines can be analyzed. In addition, when the film support member 210 is formed of a resin, the portion other than the outer edge 306 is preferably at least 2 mm thick.

[0046] Furthermore, at least the portion of membrane support member 210 exposed to X-rays may be formed from a resin coated with aluminum. Specifically, for example, aluminum may be spray-coated onto the portion of membrane support member 210 formed from PEEK or PTFE, excluding outer edge 306. This further reduces interference lines caused by impurities within the resin.

[0047] Furthermore, the film support member 210 may be formed of metal. Specifically, for example, the film support member 210 may be formed of a metal such as stainless steel (SUS) or titanium. Forming the film support member 210 from metal improves mechanical strength and suppresses deformation caused by a pressure difference between the irradiation chamber 106 and the sample chamber 102.

[0048] The cover member 212 seals the space where the sample pool 116 is disposed. Figure 2 As shown, the cover member 212 has a shape covering the space where the sample cell 116 is arranged, and is arranged in contact with the upper holding member 204 of the window frame holding member. The cover member 212 has an O-ring at a position in contact with the upper holding member 204.

[0049] Next, the orientation of the flat plate in which the long holes 302 and the slits 110 are arranged will be described. Figure 4 The cover part 212, the sample pool 116 and the window frame part 208 are removed. Figure 1Projection of viewpoint A in the direction of the arrow. Figure 5 The cover member 212, the sample cell 116, the window frame member 208, the film support member 210 and the window frame support member are removed. Figure 1 Projection of viewpoint A in the direction of the arrow. Figure 6 The cover part 212, the sample cell 116, the window frame part 208 and the window frame support part are removed. Figure 1 The projection of viewpoint B in the direction of the arrow. In addition, Figure 6 , portions of the slit 110 other than the parallel plate 402 and the detector 112 are omitted, and the X-ray source 108 , the slit 110 , and the spectroscopic element 111 disposed below the partition wall 104 are indicated by dotted lines.

[0050] The optical axis 602 of the X-rays emitted by the X-ray source 108 is tilted relative to the surface of the irradiated sample 118 (i.e., the surface including the sample holding film, the xy plane). The optical axis 602 of the X-rays is contained in the xz plane. In other words, the optical axis 602 of the X-rays includes an x-axis component and a z-axis component, but does not include a y-component.

[0051] The film support member 210 is arranged so that the elongated holes 302 are parallel to the X-ray optical axis 602 in a top view from the sample chamber 102 toward the irradiation chamber 106 (a top view viewed in the -z direction). In other words, the film support member 210 is arranged so that the elongated holes 302 are along the x-axis. Furthermore, in a top view from the sample chamber 102 toward the irradiation chamber 106, the plurality of elongated holes 302 are arranged side by side in a direction perpendicular to the X-ray optical axis 602. In other words, the film support member 210 is arranged so that the plurality of elongated holes 302 are arranged side by side in the y-axis.

[0052] Film support member 210 has a predetermined thickness, and X-ray optical axis 602 includes an x-axis component. Therefore, some X-rays are blocked by the beam portion of film support member 210 (the X-ray optical path interferes with the beam portion). However, by arranging slot 302 along the x-axis, interference between the X-ray optical path and the beam portion can be minimized.

[0053] Furthermore, the slit 110 is arranged so that the plurality of parallel flat plates 402 are parallel to the long hole 302 in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side. Figure 4 The depth of the long hole 302 shows the Figure 5 The long hole 302 shown is a portion of a plurality of parallel plates 402 arranged in the same direction. In other words, the slit 110 is arranged such that the plurality of parallel plates 402 are along the x-axis direction.

[0054] like Figure 6As shown, X-rays emitted from X-ray source 108 pass through slot 302 and irradiate sample 118 at irradiation position 600. Fluorescent X-rays emitted from sample 118 pass through slot 302 and slit 110, are split into spectroscopic elements 111, and are incident on detector 112. In this case, slot 302 is parallel to the optical axis 602 of the X-rays in a plan view from sample chamber 102 toward irradiation chamber 106. In other words, film support member 210 is arranged so that slot 302 lies along the intersection (x-axis) of a plane (xz plane) containing the optical axis 602 of the X-rays emitted by X-ray source 108 and the optical axis 604 of the fluorescent X-rays from slit 110, and a plane (xy plane) formed by film support member 210. Furthermore, engaging portion 206 and engaged portion 304 are arranged to achieve this arrangement. That is, when the film support member 210 is arranged so that the long hole 302 is parallel to the optical axis 602 of the X-ray in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side, the window frame holding member has the engaging portion 206 at a position that engages with the engaged portion 304. Therefore, the user can easily arrange the film support member 210 so that the long hole 302 is parallel to the optical axis 602 of the X-ray.

[0055] The fluorescent X-rays generated by the sample 118 have no particular directionality. However, since the long hole 302 is arranged along the x-axis direction, a portion of the fluorescent X-rays having the y-component is blocked by the beam portion (the optical path of the X-rays interferes with the beam portion). Figure 6 , the optical axis 604 of the generated fluorescent X-rays that pass through slit 110 is depicted. Because the fluorescent X-rays with the y component are partially blocked by the beam, the intensity of the fluorescent X-rays that do not have the y component reaching irradiation chamber 106 is higher than that of the fluorescent X-rays with the y component. By arranging slit 110 so that the multiple parallel plates 402 are parallel to the elongated hole 302, the intensity of the fluorescent X-rays incident on detector 112 can be increased.

[0056] The film support member 210 is formed of a material that is less susceptible to X-ray degradation (e.g., thermoplastic resin such as polyetheretherketone), but is preferably replaced at regular intervals. According to the present disclosure, the film support member 210 can be easily arranged in the above configuration when it is replaced.

[0057] The present disclosure can be applied to either wavelength-dispersive or energy-dispersive X-ray fluorescence analyzers 100. Furthermore, the present disclosure is not limited to the above-described embodiment and can be modified in various ways. The structure of the above-described X-ray fluorescence analyzer 100 is merely an example and is not intended to be limiting. The present disclosure can be replaced with a structure that is substantially the same as the structure shown in the above-described embodiment, a structure that produces the same effect, or a structure that achieves the same purpose. For example, while the film support member is described as having a circular shape, it can also be a polygonal or other shape.

[0058] Description of Reference Numerals

[0059] 100 Fluorescent X-ray analysis device, 102 sample chamber, 104 partition wall, 106 irradiation chamber, 108 X-ray source, 110 slit, 112 detector, 114 sample stage, 116 sample cell, 118 sample, 202 lower holding component, 204 upper holding component, 206 fitting portion, 208 window frame component, 210 film support component, 212 cover component, 214 partition film, 302 long hole, 304 fitted portion, 306 outer edge portion, 402 parallel plate, 600 irradiation position, 602 optical axis of X-rays, 604 optical axis of fluorescent X-rays.

Claims

1. A fluorescent X-ray analysis apparatus comprising a sample chamber in which a sample is arranged and an irradiation chamber separated from the sample chamber by a partition, wherein: have: an X-ray source disposed in the irradiation chamber and irradiating X-rays obliquely toward an opening provided on a partition wall between the sample chamber and the irradiation chamber; a window frame member formed of a material that transmits the X-rays, holding a partition film constituting a portion of the partition, and disposed in an opening provided in the partition wall; as well as a film supporting member having a long hole for passing the X-rays, arranged adjacent to the diaphragm film on the irradiation chamber side, and supporting the diaphragm film from the irradiation chamber side; The film support member is arranged so that the long hole is parallel to the optical axis of the X-ray in a plan view from the sample chamber side toward the irradiation chamber side.

2. The fluorescent X-ray analysis device according to claim 1, characterized in that It also has a slit, which is arranged on the optical path of the fluorescent X-ray and is composed of a plurality of parallel plates arranged at predetermined intervals. The plurality of parallel flat plates are arranged parallel to the long hole in a plan view from the sample chamber side toward the irradiation chamber side.

3. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The apparatus includes an opening for passing the X-rays from the irradiation chamber to the sample chamber, and a window frame holding member disposed in the sample chamber and supporting the outer edge of the film supporting member from below.

4. The fluorescent X-ray analysis device according to claim 3, characterized in that The film supporting member has an engaged portion at a position in contact with the window frame holding member. The window frame holding member has a fitting portion at a position fitting with the fitted portion when the film supporting member is arranged so that the long hole is parallel to the optical axis of the X-ray in a plan view from the sample chamber side toward the irradiation chamber side.

5. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The film supporting member is formed of resin.

6. The fluorescent X-ray analysis device according to claim 5, characterized in that The membrane supporting member is formed of PEEK or PTFE.

7. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: At least a portion of the film support member that is irradiated with X-rays is formed of a resin coated with aluminum.

8. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The film supporting member has a thickness of 1 mm or more.

9. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The film supporting member has a plurality of the long holes. The plurality of long holes are arranged side by side in a direction perpendicular to the optical axis of the X-rays in a plan view from the sample chamber side toward the irradiation chamber side.

10. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The width of the long hole is at least four times the distance between adjacent long holes.

11. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The length of the long hole is more than 4 times the width.

12. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The film supporting member is formed of metal.

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