Agglomerated abrasive grinding fluid

Abstract

The invention discloses agglomerated abrasive grinding fluid, and belongs to the technical field of agglomerated abrasives, the agglomerated abrasive grinding fluid comprises a box body, a first water sump is arranged in the box body, a second water sump is arranged in the box body, a third water sump is arranged in the box body, the surface of the box body is fixedly connected with a fixing frame, the surface of the fixing frame is fixedly connected with a motor, and the motor is fixedly connected with a motor. According to the supply system applied to the agglomerated abrasive grinding fluid, by arranging a motor, a first chain wheel, a second chain wheel, a second rotating shaft and a cleaning brush, when a filter plate is cleaned, people control the motor to operate through a control switch, and then the first chain wheel and the second chain wheel are driven to rotate; and meanwhile, a second rotating shaft is driven to rotate, the second rotating shaft rotates to drive a cleaning brush to rotate, so that impurities on the surface of the filter plate are cleaned, under the action of a motor, a first chain wheel, a second chain wheel, the second rotating shaft and the cleaning brush, people can clean the impurities on the surface of the filter plate more conveniently, and the filtering effect is prevented from being influenced.

Description

Technical Field

[0001] The present invention relates to the technical field of agglomerated abrasives, and more particularly to agglomerated abrasive grinding liquid. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit component structures can be processed on the silicon wafer to become IC products with specific electrical functions. The original material of the wafer is silicon, and there is an inexhaustible amount of silicon dioxide on the surface of the earth's crust. The silicon dioxide ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to produce high-purity polysilicon with a purity of up to 99.999999999%. When processing the wafer, it needs to go through multiple processes of cutting and polishing. The wafer is in the process of During cutting and polishing, it is necessary to spray grinding fluid to ensure the normal processing of the wafer surface. However, when the grinding fluid is reused, the fine processing particles mixed in the grinding fluid affect the processing of the product. Therefore, the grinding fluid supply equipment generally filters the grinding fluid. However, the existing grinding fluid supply equipment requires regular maintenance and cleaning when filtering the grinding fluid to clean up the impurities filtered out of the grinding fluid to ensure the normal use of the equipment supply, which is not convenient for long-term normal use of the equipment. Therefore, the inventor designed a grinding fluid supply equipment for wafer processing. Summary of the Invention

[0003] (1) Technical problems to be solved

[0004] In view of the shortcomings of the prior art, the object of the present invention is to provide an agglomerated abrasive grinding liquid that is easy to clean.

[0005] (2) Technical solution

[0006] To achieve the above-mentioned object, the present invention provides an agglomerated abrasive grinding liquid, which is composed of the following raw materials: deionized water, a surfactant, a wetting and penetrating agent, and a defoaming agent, wherein the deionized water is 75 kg, the surfactant includes 15 kg of fatty alcohol polyoxyethylene ether and 5 kg of polypropylene glycol, the wetting and penetrating agent is 5 kg of acetylene alcohol polyoxyethylene ether, and the defoaming agent is 0.2 kg of blocked polyether.

[0007] A supply system for agglomerated abrasive grinding liquid, comprising a box body, a first water tank being provided inside the box body, a second water tank being provided inside the box body, and a third water tank being provided inside the box body, a fixing frame being fixedly connected to a surface of the box body, a motor being fixedly connected to a surface of the fixing frame, a first bearing being passed through a surface of the first water tank, two first bearings being symmetrically passed through the surface of the first water tank, a first rotating shaft being passed through a surface of the first bearing, an output shaft of the motor being fixedly connected to a surface of the first rotating shaft, a stirring shaft being fixedly connected to a surface of the first rotating shaft, a plurality of stirring shafts being symmetrically fixedly connected in pairs to the surface of the first rotating shaft, and a first sprocket being fixedly connected to a surface of the first rotating shaft;

[0008] A first connecting pipe is provided on the lower surface of the first water tank, a first solenoid valve is fixedly connected to the surface of the first connecting pipe, a water inlet pump is fixedly connected to the surface of the box body, the water inlet end of the water inlet pump is provided on the surface of the third water tank, the water outlet end of the water inlet pump is provided on the surface of the second water tank, a water outlet pump is fixedly connected to the surface of the box body, the water inlet end of the water outlet pump is provided on the surface of the second water tank, a filter plate is fixedly connected to the inside of the third water tank, there are a plurality of filter plates, all of which are fixedly connected to the inside of the third water tank, a second bearing is provided on the surface of the filter plate, there are a plurality of second bearings, which are respectively provided on the surface of the filter plate and the surface of the third water tank, a second rotating shaft is provided in the second bearing, and a cleaning brush is fixedly connected to the surface of the second rotating shaft.

[0009] When using a supply system for agglomerated abrasive grinding liquid using the present technical solution, the outlet pump operates to transport the grinding liquid in the second water tank to the water outlet for spraying out for use. The used grinding liquid is mixed with impurities and enters the third water tank through the return pipe, where it is filtered under the action of the filter plate. The filtered grinding liquid flows back to the second water tank through the water inlet pump. People can control the first solenoid valve to open by controlling the switch, thereby transporting the mixed grinding liquid to the first water tank for fluid replenishment. When cleaning the filter plate, people control the motor operation by controlling the switch, thereby driving the first sprocket, the second sprocket, the third sprocket and the fourth sprocket to rotate, and at the same time driving the cleaning brush and the auger to rotate. The cleaning brush rotates to clean impurities on the surface of the filter plate.

[0010] Furthermore, there are multiple cleaning brushes, all of which are fixedly connected to the surface of the second rotating shaft, the second rotating shaft surface is fixedly connected to the second sprocket, the second sprocket and the first sprocket are connected by a chain transmission, the second rotating shaft surface is fixedly connected to the third sprocket, and the third water tank surface is provided with a return pipe.

[0011] Furthermore, a groove is provided on the inner wall of the third water tank. There are a plurality of grooves, all of which are provided on the inner wall of the third water tank. A water pipe rack is provided on the lower surface of the groove. A movable tank is provided on the surface of the box body. The water pipe rack is provided in the movable tank. A second solenoid valve is fixedly connected to the surface of the water pipe rack.

[0012] Furthermore, a third bearing is passed through the surface of the movable bin, an auger is passed through the inside of the third bearing, a fourth sprocket is fixedly connected to the surface of the auger output shaft, and the fourth sprocket and the third sprocket are connected via a chain transmission.

[0013] Furthermore, a base is fixedly connected to the lower surface of the box body, and there are four bases in total, and two of them are symmetrically fixedly connected to the lower surface of the box body.

[0014] Furthermore, a feed port is provided on the upper surface of the box body.

[0015] (3) Beneficial effects

[0016] In summary, the present invention has the following beneficial effects:

[0017] 1. The supply system for agglomerated abrasive grinding liquid is provided with a motor, a first sprocket, a second sprocket, a second rotating shaft and a cleaning brush. When cleaning the filter plate, people control the operation of the motor through a control switch, thereby driving the first sprocket and the second sprocket to rotate, and at the same time driving the second rotating shaft to rotate. The rotation of the second rotating shaft drives the cleaning brush to rotate, thereby cleaning impurities on the surface of the filter plate. Under the action of the motor, the first sprocket, the second sprocket, the second rotating shaft and the cleaning brush, it is more convenient for people to clean the impurities on the surface of the filter plate to avoid affecting the filtering effect.

[0018] 2. The supply system for agglomerated abrasive grinding liquid is provided with a motor, a third sprocket, a fourth sprocket and an auger. When the cleaned impurities are discharged, people control the operation of the motor through a control switch, and at the same time control the opening of the second solenoid valve. The operation of the motor drives the first sprocket, the second sprocket, the third sprocket and the fourth sprocket to rotate, and at the same time drives the auger to rotate. The solenoid valve opens to transport the cleaned impurities into the movable bin, and under the action of the auger, transports them to the outside at a uniform speed. Under the action of the motor, the third sprocket, the fourth sprocket and the auger, it is more convenient for people to discharge the cleaned impurities and avoid blockage.

[0019] 3. The supply system for agglomerated abrasive grinding liquid is provided with a motor, a stirring shaft and a water outlet pump. When using the device, people control the operation of the motor through the control switch, thereby driving the first rotating shaft and the stirring shaft to rotate, thereby mixing and stirring the grinding liquid inside the first water tank. After mixing and stirring, people control the first solenoid valve to open through the control switch, thereby transporting the mixed grinding liquid to the first water tank for rehydration, and the water outlet pump operates to transport the grinding liquid to the outside for use. Under the action of the motor, the stirring shaft and the water outlet pump, it is more convenient for people to mix and stir the grinding liquid inside the first water tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation of the present invention or the technical solutions in the prior art, the drawings required for describing the specific implementation or the prior art will be briefly introduced below. Obviously, the drawings described below are only one implementation of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 It is a schematic diagram of the front view structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the front cross-sectional structure of the present invention.

[0023] The symbols in the accompanying drawings are:

[0024] 1. Box body; 2. First water tank; 3. Fixed frame; 4. Motor; 5. First bearing; 6. First rotating shaft; 7. Stirring shaft; 8. First sprocket; 9. Second water tank; 10. First connecting pipe; 11. First solenoid valve; 12. Third water tank; 13. Water inlet pump; 14. Water outlet pump; 15. Feed port; 16. Filter plate; 17. Second bearing; 18. Second rotating shaft; 19. Cleaning brush; 20. Second sprocket; 21. Third sprocket; 22. Return pipe; 23. Groove; 24. Water pipe rack; 25. Second solenoid valve; 26. Movable tank; 27. Third bearing; 28. Auger; 29. ​​Fourth sprocket; 30. Base. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the technical solutions in the specific implementation methods of the present invention are clearly and completely described below to further illustrate the present invention. Obviously, the specific implementation methods described are only part of the implementation methods of the present invention, rather than all styles.

[0026] Example:

[0027] The following is combined with Figure 1-2 The present invention is described in further detail.

[0028] See also Figure 1-2 The present invention provides a technical solution: a grinding liquid for agglomerated abrasives, which is composed of the following raw materials: deionized water, a surfactant, a wetting and penetrating agent, and a defoaming agent, wherein the deionized water is 75 kg, the surfactant includes 15 kg of fatty alcohol polyoxyethylene ether and 5 kg of polypropylene glycol, the wetting and penetrating agent is 5 kg of acetylene alcohol polyoxyethylene ether, and the defoaming agent is 0.2 kg of blocked polyether.

[0029] A supply system for agglomerated abrasive grinding liquid includes a box body 1, a first water tank 2 is provided inside the box body 1, a second water tank 9 is provided inside the box body 1, a third water tank 12 is provided inside the box body 1, a fixing frame 3 is fixedly connected to the surface of the box body 1, a motor 4 is fixedly connected to the surface of the fixing frame 3, a first bearing 5 is passed through the surface of the first water tank 2, there are two first bearings 5, and they are symmetrically passed through the surface of the first water tank 2, a first rotating shaft 6 is passed through the first bearing 5, an output shaft of the motor 4 is fixedly connected to the surface of the first rotating shaft 6, a stirring shaft 7 is fixedly connected to the surface of the first rotating shaft 6, there are multiple stirring shafts 7, and they are symmetrically fixed to the surface of the first rotating shaft 6 in pairs, and a first sprocket 8 is fixedly connected to the surface of the first rotating shaft 6;

[0030] A first connecting pipe 10 is passed through the lower surface of the first water tank 2, and a first solenoid valve 11 is fixedly connected to the surface of the first connecting pipe 10. A water inlet pump 13 is fixedly connected to the surface of the box body 1, and the water inlet end of the water inlet pump 13 is passed through the surface of the third water tank 12, and the water outlet end of the water inlet pump 13 is passed through the surface of the second water tank 9. A water outlet pump 14 is fixedly connected to the surface of the box body 1, and the water inlet end of the water outlet pump 14 is passed through the surface of the second water tank 9. A filter plate 16 is fixedly connected to the inside of the third water tank 12. There are multiple filter plates 16, all of which are fixedly connected to the inside of the third water tank 12. A second bearing 17 is passed through the surface of the filter plate 16. There are multiple second bearings 17, which are respectively passed through the surface of the filter plate 16 and the surface of the third water tank 12. A second rotating shaft 18 is passed through the second bearing 17, and a cleaning brush 19 is fixedly connected to the surface of the second rotating shaft 18.

[0031] By adopting the above technical solution, by setting the motor 4, the first sprocket 8, the second sprocket 20, the second rotating shaft 18 and the cleaning brush 19, when cleaning the filter plate 16, people control the motor 4 to operate by controlling the switch, thereby driving the first sprocket 8 and the second sprocket 20 to rotate, and at the same time driving the second rotating shaft 18 to rotate, and the rotation of the second rotating shaft 18 drives the cleaning brush 19 to rotate, thereby cleaning the impurities on the surface of the filter plate 16. Under the action of the motor 4, the first sprocket 8, the second sprocket 20, the second rotating shaft 18 and the cleaning brush 19, it is more convenient for people to clean the impurities on the surface of the filter plate 16 to avoid affecting the filtration efficiency. As a result, by setting the motor 4, the stirring shaft 7 and the water outlet pump 14, when using the device, people control the operation of the motor 4 through the control switch, thereby driving the first rotating shaft 6 and the stirring shaft 7 to rotate, thereby mixing and stirring the grinding liquid inside the first water tank 2. After mixing and stirring, people control the first solenoid valve 11 to open through the control switch, thereby transporting the mixed grinding liquid to the first water tank 2 for fluid replenishment, and the water outlet pump 14 operates to transport the grinding liquid to the outside for use. Under the action of the motor 4, the stirring shaft 7 and the water outlet pump 14, it is easier for people to mix and stir the grinding liquid inside the first water tank 2.

[0032] Specifically, there are multiple cleaning brushes 19, all of which are fixedly connected to the surface of the second rotating shaft 18. The second sprocket 20 is fixedly connected to the surface of the second rotating shaft 18. The second sprocket 20 and the first sprocket 8 are connected by a chain transmission. The third sprocket 21 is fixedly connected to the surface of the second rotating shaft 18, and a return pipe is provided on the surface of the third water tank 12.

[0033] Specifically, a groove 23 is provided on the inner wall of the third water tank 12. There are multiple grooves 23, all of which are provided on the inner wall of the third water tank 12. A water pipe rack 24 is passed through the lower surface of the groove 23. A movable tank 26 is provided on the surface of the box body 1. The water pipe rack 24 is passed through the movable tank 26. A second solenoid valve 25 is fixedly connected to the surface of the water pipe rack 24.

[0034] Specifically, a third bearing 27 is provided on the surface of the movable bin 26, an auger 28 is provided inside the third bearing 27, a fourth sprocket 29 is fixedly connected to the output shaft surface of the auger 28, and the fourth sprocket 29 and the third sprocket 21 are connected via a chain transmission.

[0035] By adopting the above technical solution, by setting up the motor 4, the third sprocket 21, the fourth sprocket 29 and the auger 28, when discharging the cleaned impurities, people control the operation of the motor 4 by controlling the switch, and at the same time control the second solenoid valve 25 to open. The operation of the motor 4 drives the first sprocket 8, the second sprocket 20, the third sprocket 21 and the fourth sprocket 29 to rotate, and at the same time drives the auger 28 to rotate. The solenoid valve opens to transport the cleaned impurities into the movable bin 26, and under the action of the auger 28, it is transported to the outside at a uniform speed. Under the action of the motor 4, the third sprocket 21, the fourth sprocket 29 and the auger 28, it is easier for people to discharge the cleaned impurities and avoid blockage.

[0036] Specifically, a base 30 is fixedly connected to the lower surface of the box body 1 . There are four bases 30 in total, and two of them are symmetrically fixedly connected to the lower surface of the box body 1 .

[0037] Specifically, a feed port 15 is provided on the upper surface of the box body 1 .

[0038] The working principle of the present invention is:

[0039] First, people turn on the power of the device, connect the outlet end of the water outlet pump 14 to the grinding liquid outlet, and connect the return pipe to the liquid recovery end. When using the device, people control the water inlet pump 13 and the water outlet pump 14 to run at the same time through the control switch. The water outlet pump 14 runs to transport the grinding liquid in the second water tank 9 to the water outlet for use. The used grinding liquid is mixed with impurities and enters the third water tank 12 through the return pipe. It is filtered under the action of the filter plate 16. The filtered grinding liquid flows back to the second water tank 9 through the water inlet pump 13. People can control the switch The first solenoid valve 11 is controlled to open, so that the mixed grinding liquid is transported to the first water tank 2 for rehydration. When cleaning the filter plate 16, people control the motor 4 to operate by controlling the switch, thereby driving the first sprocket 8, the second sprocket 20, the third sprocket 21 and the fourth sprocket 29 to rotate, and at the same time driving the cleaning brush 19 and the auger 28 to rotate. The cleaning brush 19 rotates to clean the impurities on the surface of the filter plate 16. The solenoid valve opens to transport the cleaned impurities into the movable tank 26, and under the action of the auger 28, they are transported to the outside at a uniform speed to avoid blockage, which is more convenient and efficient.

[0040] This specific embodiment is merely an explanation of the present invention and is not intended to limit the present invention. After reading this specification, those skilled in the art may make non-creative modifications to this embodiment as needed. However, as long as such modifications are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. An agglomerated abrasive grinding liquid, characterized in that: The invention is composed of the following raw materials: deionized water, surfactant, wetting and penetrating agent and defoaming agent, wherein the deionized water is 75 kg, the surfactant includes 15 kg of fatty alcohol polyoxyethylene ether and 5 kg of polypropylene glycol, the wetting and penetrating agent is 5 kg of acetylene alcohol polyoxyethylene ether, and the defoaming agent is 0.2 kg of blocked polyether.

2. A supply system for agglomerated abrasive grinding liquid, comprising a box (1), wherein a first water tank (2) is provided inside the box (1), a second water tank (9) is provided inside the box (1), and a third water tank (12) is provided inside the box (1), a fixed frame (3) is fixedly connected to the surface of the box (1), a motor (4) is fixedly connected to the surface of the fixed frame (3), a first bearing (5) is passed through the surface of the first water tank (2), there are two first bearings (5), and they are symmetrically passed through the surface of the first water tank (2), a first rotating shaft (6) is passed through the first bearing (5), an output shaft of the motor (4) is fixedly connected to the surface of the first rotating shaft (6), a stirring shaft (7) is fixedly connected to the surface of the first rotating shaft (6), there are a plurality of stirring shafts (7), and they are symmetrically fixedly connected to the surface of the first rotating shaft (6), and a first sprocket (8) is fixedly connected to the surface of the first rotating shaft (6); A first connecting pipe (10) is provided on the lower surface of the first water tank (2), and a first solenoid valve (11) is fixedly connected to the surface of the first connecting pipe (10). A water inlet pump (13) is fixedly connected to the surface of the box body (1), and the water inlet end of the water inlet pump (13) is provided on the surface of the third water tank (12). The water outlet end of the water inlet pump (13) is provided on the surface of the second water tank (9). A water outlet pump (14) is fixedly connected to the surface of the box body (1), and the water inlet end of the water outlet pump (14) is provided on the surface of the second water tank ( 9) surface, a filter plate (16) is fixedly connected inside the third water tank (12), there are a plurality of filter plates (16), all of which are fixedly connected inside the third water tank (12), a second bearing (17) is passed through the surface of the filter plate (16), there are a plurality of second bearings (17), which are respectively passed through the surface of the filter plate (16) and the surface of the third water tank (12), a second rotating shaft (18) is passed through the second bearing (17), and a cleaning brush (19) is fixedly connected to the surface of the second rotating shaft (18).

3. A supply system for agglomerated abrasive grinding liquid according to claim 2, characterized in that: There are a plurality of cleaning brushes (19), all of which are fixedly connected to the surface of the second rotating shaft (18); a second sprocket (20) is fixedly connected to the surface of the second rotating shaft (18); the second sprocket (20) and the first sprocket (8) are connected via a chain transmission; a third sprocket (21) is fixedly connected to the surface of the second rotating shaft (18); and a return pipe is provided on the surface of the third water tank (12).

4. The supply system for agglomerated abrasive grinding liquid according to claim 3, characterized in that: The inner wall of the third water tank (12) is provided with a groove (23), and there are a plurality of grooves (23), all of which are provided on the inner wall of the third water tank (12). A water pipe rack (24) is provided on the lower surface of the groove (23). A movable tank (26) is provided on the surface of the box body (1), and the water pipe rack (24) is provided in the movable tank (26). A second solenoid valve (25) is fixedly connected to the surface of the water pipe rack (24).

5. The supply system for agglomerated abrasive grinding liquid according to claim 4, characterized in that: A third bearing (27) is provided on the surface of the movable bin (26), an auger (28) is provided inside the third bearing (27), a fourth sprocket (29) is fixedly connected to the output shaft surface of the auger (28), and the fourth sprocket (29) and the third sprocket (21) are connected via a chain transmission.

6. The supply system for agglomerated abrasive grinding liquid according to claim 2, characterized in that: The lower surface of the box body (1) is fixedly connected to a base (30), and there are four bases (30) in total, and two of them are symmetrically fixedly connected to the lower surface of the box body (1).

7. The supply system for agglomerated abrasive grinding liquid according to claim 2, characterized in that: A feed port (15) is provided on the upper surface of the box body (1).

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