High-purity hydrogen fluoride preparation data-driven fuel energy-saving management system and method

By acquiring and analyzing preparation reaction data and dynamically adjusting compressors, fans, and waste gas treatment equipment, the problem of low fuel energy-saving management efficiency in the preparation of high-purity hydrogen fluoride was solved, and efficient energy utilization and waste gas recovery were achieved.

CN120708745AActive Publication Date: 2025-09-26FUJIAN LONGFU NEW MATERIALS CO LTD
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Patent Information

Application Number
CN202511104174.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-07
Publication Date
2025-09-26
Estimated Expiration
2045-08-07

AI Technical Summary

Technical Problem

The efficiency of fuel energy conservation management in the preparation process of high-purity hydrogen fluoride is low. In the existing technology, the preparation reaction data and preparation emission data are not fully correlated, resulting in energy waste and excessive fuel consumption.

Method used

By obtaining preparation reaction data, quantitatively judging fuel conversion efficiency and recycling efficiency, and combining the fuel reaction energy-saving management module and the fuel recovery energy-saving management module, the operating status of the compressor, fan and exhaust gas treatment equipment can be dynamically adjusted to optimize energy use.

Benefits of technology

Energy-saving management is achieved in the process of preparing high-purity hydrogen fluoride, which reduces energy consumption, improves fuel utilization efficiency, and reduces unnecessary energy consumption.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system and method, and relates to the technical field of fuel energy-saving management. The high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system comprises a fuel conversion efficiency judgment module, a fuel reaction energy-saving management module and a fuel recovery energy-saving management module. The fuel reaction conversion result is obtained through the obtained preparation reaction data, then whether fuel reaction energy-saving management optimization is carried out or not is judged according to the fuel reaction conversion result, finally, the fuel recovery management result is obtained based on the obtained preparation emission data, and whether fuel recovery energy-saving management optimization is carried out or not is judged. The fuel energy-saving management in the high-purity hydrogen fluoride preparation process is more efficiently carried out, and the problem that in the prior art, the fuel energy-saving management efficiency in the high-purity hydrogen fluoride preparation process is low is solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of fuel energy-saving management, and in particular to a data-driven fuel energy-saving management system and method for preparing high-purity hydrogen fluoride. Background Art

[0002] The production of high-purity hydrogen fluoride requires high temperatures and high pressures, creating a significant energy demand. Therefore, fuel conservation management is crucial. Furthermore, fuel conservation management also involves the treatment and recovery of waste gases. Existing technologies use precision flow control equipment such as mass flow meters, gas flow control valves, and flow sensors to regulate and monitor the flow rates of fluorine and hydrogen, maintaining the optimal reaction ratio (typically a 1:1 molar ratio of fluorine to hydrogen) and ensuring a stable reaction rate. Depending on the gas flow requirements, compressors and fans are used for gas delivery and flow control. Fans are used to deliver reactant gases such as fluorine and hydrogen to the reactor or gas mixing unit, maintaining gas flow rates and flow rates. Compressors are primarily used for the delivery and pressurization of gases such as fluorine and hydrogen, particularly in processes requiring higher pressures. Real-time collection of multi-dimensional data, including temperature, pressure, flow, power, and fuel usage, serves as the basis for subsequent analysis and optimization. Based on the collected raw high-purity hydrogen fluoride production data, machine learning and data mining techniques (such as regression analysis, neural networks, decision trees, and support vector machines) are used to construct energy consumption models to predict the relationship between energy consumption and production parameters and identify potential energy-saving opportunities. Energy-saving management of waste emissions is also a key component of the high-purity hydrogen fluoride (HF) production process. Heat energy from some exhaust gases (such as high-temperature exhaust gases) can be recovered through heat exchangers. This heat can be used to preheat intake air or supply other industrial equipment, thereby reducing energy consumption.

[0003] For example, the energy-saving management and early warning method and system based on big data disclosed in the Chinese patent application with publication number: CN118780941A include: S1: Taking the energy-saving management and early warning method based on big data heating as an example, historical heating-related data and real-time heating-related data in the heat exchange station are acquired, and the acquired historical heating-related data and real-time heating-related data are preprocessed to eliminate the impact of erroneous data on the subsequent data analysis and prediction process, and the actual supply of heat load is determined based on the preprocessed real-time heating data.

[0004] For example, the Chinese invention patent with announcement number: CN118840082B discloses an autoclave operation energy-saving management system and method based on data analysis, which includes: obtaining energy consumption data under various energy-saving modes, obtaining autoclave operation data under various energy-saving modes and production data of production products obtained by production to conduct production anomaly analysis, obtaining energy consumption data under various energy-saving modes and importing them into energy-saving evaluation strategies to conduct energy-saving evaluation analysis, comprehensively analyzing the production anomaly analysis results and energy-saving evaluation analysis results obtained under various energy-saving modes, selecting the optimal energy-saving mode for production based on the comprehensive analysis results, selecting the most suitable energy-saving mode based on the comprehensive product production quality, equipment damage and energy-saving and energy-consuming conditions, and accurately selecting and managing the energy-saving modes.

[0005] The above technology has at least the following technical problems:

[0006] The production of high-purity hydrogen fluoride involves the reaction of fluorine and hydrogen, a process that is extremely sensitive to parameters such as temperature, gas flow rate, and gas ratio. Excessive or insufficient gas flow, an improper gas ratio, and unstable temperature can all lead to excessive fuel consumption. Furthermore, the heat, chemical composition, and gas volume of exhaust emissions can reflect the efficiency of the reaction process and the degree of fuel utilization. Excessively high exhaust temperatures or excessive amounts of unreacted gases generally indicate suboptimal reaction conditions and inefficient energy utilization.

[0007] Waste gas emissions are usually monitored through fixed emission standards. Emission data during the preparation process can provide key clues for optimizing the reaction process. However, due to the lack of a tight feedback mechanism between the two, energy losses or unreacted components in the exhaust gas often cannot be fed back to fuel consumption control in a timely manner, resulting in energy waste.

[0008] In existing technologies, insufficient correlation between production reaction data and production emission data prevents timely adjustments to unstable factors in the high-purity hydrogen fluoride production process, leading to excessive fuel consumption. Consequently, fuel energy conservation management efficiency in the high-purity hydrogen fluoride production process is low. Summary of the Invention

[0009] In order to solve the problem of low efficiency of fuel energy-saving management in the high-purity hydrogen fluoride production process in the prior art, the embodiment of the present invention provides a data-driven fuel energy-saving management system and method for high-purity hydrogen fluoride production. The technical solution is as follows:

[0010] On the one hand, a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system is provided, including: a fuel conversion efficiency judgment module, a fuel reaction energy-saving management module and a fuel recovery energy-saving management module; wherein the fuel conversion efficiency judgment module is used to obtain preparation reaction data reflecting the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process, and obtain the fuel reaction conversion result based on the obtained preparation reaction data to quantitatively judge the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process; the fuel reaction energy-saving management module is used to judge whether to perform fuel reaction energy-saving management optimization according to the fuel reaction conversion result, and if so, send a preparation emission management instruction to obtain after the fuel reaction energy-saving management optimization. Preparation emission data reflecting the fuel recovery efficiency during the preparation process of high-purity hydrogen fluoride is obtained. Otherwise, the preparation emission data during the preparation process of high-purity hydrogen fluoride is directly obtained. The fuel reaction energy-saving management optimization means adjusting the operating status of the compressor and the fan in combination with the fuel reaction conversion results; the fuel recovery energy-saving management module is used to obtain the fuel recovery management results based on the obtained preparation emission data to quantitatively judge the fuel recovery efficiency during the preparation process of high-purity hydrogen fluoride, and judge whether to perform fuel recovery energy-saving management optimization based on the fuel recovery management results. The fuel recovery energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management results.

[0011] On the other hand, a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management method is provided, which includes the following steps: obtaining preparation reaction data reflecting the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process, obtaining a fuel reaction conversion result based on the obtained preparation reaction data to quantitatively judge the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process; judging whether to perform fuel reaction energy-saving management optimization according to the fuel reaction conversion result, and if so, sending a preparation emission management instruction after the fuel reaction energy-saving management optimization to obtain preparation emission data reflecting the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, otherwise directly obtaining the preparation emission data in the high-purity hydrogen fluoride preparation process, the fuel reaction energy-saving management optimization means adjusting the operating status of the compressor and the fan in combination with the fuel reaction conversion result; obtaining a fuel recovery management result based on the obtained preparation emission data to quantitatively judge the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, and judging whether to perform fuel recovery energy-saving management optimization according to the fuel recovery management result, and the fuel recovery energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management result.

[0012] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0013] 1. In the process of preparing high-purity hydrogen fluoride, the energy consumption correlation between the preparation reaction process and the preparation recovery process is not effectively utilized, which often leads to low efficiency of fuel energy-saving management in the process of preparing high-purity hydrogen fluoride. The present invention obtains fuel reaction conversion results by obtaining preparation reaction data, which helps to more accurately judge the fuel conversion efficiency in the process of preparing high-purity hydrogen fluoride. Then, it is judged whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion results, effectively reducing the energy consumption in the process of preparing high-purity hydrogen fluoride, and realizing energy-saving management in the process of preparing high-purity hydrogen fluoride. Finally, based on the obtained preparation emission data, the fuel recovery management results are obtained and it is judged whether to perform fuel recovery energy-saving management optimization, effectively reducing the energy consumption in the process of preparing high-purity hydrogen fluoride, realizing energy-saving management in the process of preparing high-purity hydrogen fluoride, and effectively solving the problem of low efficiency of fuel energy-saving management in the process of preparing high-purity hydrogen fluoride in the prior art.

[0014] 2. By comparing the obtained fuel conversion index with the preset fuel utilization capacity limit interval to obtain the fuel reaction conversion result, and when the fuel reaction conversion result corresponds to the fuel reaction conversion being qualified, the fuel reaction energy-saving management optimization is not performed, and at the same time, the preparation emission data in the high-purity hydrogen fluoride preparation process is obtained to obtain the fuel recovery management result, thereby realizing the correlation analysis between the preparation reaction data and the preparation emission data in the high-purity hydrogen fluoride preparation process. When the fuel reaction conversion result corresponds to the fuel reaction conversion being unqualified, it is determined whether to perform the compressor drive fuel energy-saving management optimization according to the energy utilization score in the fuel conversion index, thereby realizing the effective reduction of energy consumption in the high-purity hydrogen fluoride preparation process, and facilitating more efficient energy-saving management in the high-purity hydrogen fluoride preparation process.

[0015] 3. By comparing the fuel recovery and utilization index with the preset fuel recovery capacity limit value to obtain the fuel recovery management result, a more accurate judgment of the fuel recovery and utilization efficiency in the high-purity hydrogen fluoride preparation process is achieved. If the fuel recovery management result corresponds to qualified fuel recovery and utilization, fuel recovery energy-saving management optimization will not be performed. Otherwise, whether to perform preparation-recovery energy-saving management optimization is determined based on the fuel recovery and utilization index, which helps to reduce the energy consumption in the high-purity hydrogen fluoride preparation and recovery process, thereby achieving efficient management of energy consumption in the high-purity hydrogen fluoride preparation and recovery process. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 A schematic diagram of the structure of a data-driven fuel energy-saving management system for high-purity hydrogen fluoride production provided by an embodiment of the present invention;

[0018] Figure 2 A flow chart for obtaining fuel reaction conversion results for a data-driven fuel energy-saving management system for high-purity hydrogen fluoride production provided by an embodiment of the present invention;

[0019] Figure 3 A flowchart for obtaining fuel recovery management results for a data-driven fuel energy-saving management system for high-purity hydrogen fluoride production provided by an embodiment of the present invention;

[0020] Figure 4 One of the fuel reaction energy-saving management interface diagrams of the high-purity hydrogen fluoride production data-driven fuel energy-saving management system provided by an embodiment of the present invention;

[0021] Figure 5 One of the fuel recovery and energy-saving management interface diagrams of the high-purity hydrogen fluoride production data-driven fuel energy-saving management system provided by an embodiment of the present invention;

[0022] Figure 6 This is a flow chart of a data-driven fuel energy-saving management method for high-purity hydrogen fluoride production provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0023] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0024] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations, or explanations. Any embodiment or design described as an "exemplary" in the present invention should not be interpreted as being preferred or advantageous over other embodiments or designs. Rather, the use of the word "exemplary" is intended to present concepts in a concrete manner. Furthermore, in the embodiments of the present invention, "and / or" can mean both or either of the two.

[0025] In the embodiments of the present invention, sometimes a subscript such as W1 may be written as a non-subscript such as W1. When the difference is not emphasized, the meanings to be expressed are the same.

[0026] The embodiment of the present invention solves the problem of low fuel energy-saving management efficiency in the high-purity hydrogen fluoride preparation process in the prior art by providing a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system and method. The fuel reaction conversion result is obtained by obtaining the preparation reaction data to quantitatively judge the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process. Then, it is determined whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result. If so, a preparation emission management instruction is sent after the fuel reaction energy-saving management optimization to obtain preparation emission data reflecting the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process. Otherwise, the preparation emission data in the high-purity hydrogen fluoride preparation process is directly obtained. Finally, a fuel recovery management result is obtained based on the obtained preparation emission data to quantitatively judge the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, and whether to perform fuel recovery energy-saving management optimization is determined based on the fuel recovery management result, thereby achieving more efficient fuel energy-saving management in the high-purity hydrogen fluoride preparation process.

[0027] The technical solution in the embodiment of the present invention is to solve the problem of low fuel energy-saving management efficiency in the process of preparing high-purity hydrogen fluoride. The overall idea is as follows:

[0028] The fuel reaction conversion result is obtained by obtaining the preparation reaction data, and then it is determined whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result. Finally, the fuel recovery management result is obtained based on the obtained preparation emission data, and it is determined whether to perform fuel recovery energy-saving management optimization, thereby achieving a more efficient fuel energy-saving management effect in the high-purity hydrogen fluoride preparation process.

[0029] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0030] like Figure 1 As shown, it is a structural diagram of the high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system provided by an embodiment of the present invention. The high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system provided by an embodiment of the present invention includes: a fuel conversion efficiency judgment module, a fuel reaction energy-saving management module and a fuel recovery energy-saving management module.

[0031] It should be noted that when designing the data-driven fuel energy-saving management system for the preparation of high-purity hydrogen fluoride, a fuel energy-saving management database was first created to store core configuration information. Among them, the database stores various reference values ​​necessary for the operation of the system, such as the fluorine-hydrogen molar ratio reference value and the hydrogen fluoride concentration reference value and other key data. The initial settings of these set values ​​are not arbitrarily specified, but are calculated based on a large amount of actual measured data accumulated in the fuel energy-saving management database through the summation and averaging method, making the initial settings more objective and more reflective of the general situation. Of course, considering the complex and changing actual application environment and new problems that may arise during the system debugging process, these values ​​in the fuel energy-saving management database are not fixed. Technicians can manually set, adjust or fine-tune them at any time based on the specific performance of the system in actual testing to ensure that the system can be continuously optimized to achieve the best working state.

[0032] As the first module of the data-driven fuel energy-saving management system for high-purity hydrogen fluoride production, the fuel conversion efficiency judgment module is used to obtain preparation reaction data reflecting the fuel conversion efficiency during the high-purity hydrogen fluoride production process. This preparation reaction data includes fuel conversion utilization data and energy consumption data. Fuel conversion utilization data includes the fluorine-to-hydrogen molar ratio and hydrogen fluoride concentration. Specifically, the fluorine-to-hydrogen molar ratio is obtained by a mass flow meter deployed at the fuel inlet, and the hydrogen fluoride concentration is obtained by a hydrogen fluoride electrochemical sensor deployed at the fuel outlet. Energy consumption data includes compressor power consumption and fan power consumption. Specifically, compressor power consumption is obtained by a power meter deployed at the compressor power input, and fan power consumption is obtained by a power meter deployed at the fan power input. By acquiring preparation reaction data in real time, namely fuel conversion utilization data and energy consumption data, energy usage in the high-purity hydrogen fluoride production process can be accurately assessed, especially the utilization efficiency of fluorine and hydrogen, as well as power consumption. This data-driven decision-making process helps to better identify energy waste, thereby taking measures to optimize energy use, reduce unnecessary energy consumption, and achieve energy conservation.

[0033] As a further solution, the fuel reaction conversion results are obtained based on the obtained preparation reaction data to quantitatively determine the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process; wherein, Figure 2As shown, a flow chart for obtaining fuel reaction conversion results of a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system provided by an embodiment of the present invention, the corresponding logic is: based on the obtained fuel conversion score and energy utilization score, the fuel utilization capacity in the high-purity hydrogen fluoride preparation process is quantitatively evaluated to obtain a fuel conversion index, and the fuel conversion index is compared with a preset fuel utilization capacity limit interval. When the fuel conversion index is within the preset fuel utilization capacity limit interval, the fuel reaction conversion result corresponds to a qualified fuel reaction conversion; when the fuel conversion index is not within the preset fuel utilization capacity limit interval, the fuel reaction conversion result corresponds to an unqualified fuel reaction conversion.

[0034] refer to Figure 2 , and obtain the fuel reaction conversion result. The specific steps are as follows:

[0035] S1. Acquire the preparation reaction data of the high-purity hydrogen fluoride preparation process during the preparation management cycle, perform compensation calculations on the fluorine-hydrogen molar ratio deviation processing results and the hydrogen fluoride concentration ratio results with the fuel conversion compensation factor obtained from the preset database, and then couple them to obtain the fuel conversion score. The specific restricted expression of the fuel conversion score is:

[0036] ;

[0037] Where R represents the fuel conversion fraction, B1 represents the molar ratio deviation compensation factor, and M s represents the reference value of the fluorine-hydrogen molar ratio, M represents the fluorine-hydrogen molar ratio, B2 represents the hydrogen fluoride concentration compensation factor, N s represents the reference value of hydrogen fluoride concentration, and N represents the hydrogen fluoride concentration.

[0038] The fluorine-hydrogen mole ratio deviation processing result represents the comparison result of the deviation between the fluorine-hydrogen mole ratio and the fluorine-hydrogen mole ratio reference value, that is, the specific limit expression of the fuel conversion fraction The hydrogen fluoride concentration ratio result represents the ratio calculation result of hydrogen fluoride concentration and hydrogen fluoride concentration reference value, that is, the specific limit expression of fuel conversion fraction. In the fuel conversion part, the fuel conversion compensation factor includes the molar ratio deviation compensation factor and the hydrogen fluoride concentration compensation factor, which are respectively used to describe the influence of the fluorine-hydrogen molar ratio deviation processing result and the hydrogen fluoride concentration ratio result on the fuel conversion score.

[0039] S2, the energy consumption data deviation processing result is compensated by the energy consumption compensation factor and then coupled to obtain the energy utilization score; the specific restriction expression is:

[0040] ;

[0041] Where, E represents the energy utilization fraction, B3 represents the compressor consumption compensation factor, and Y s Indicates the reference value of compressor power consumption, Y indicates the compressor power consumption, B4 indicates the fan consumption compensation factor, F s It represents the reference value of fan power consumption, and F represents the fan power consumption.

[0042] Among them, the energy consumption compensation factor is used to describe the impact of the energy utilization consumption data deviation processing result on the energy utilization score, including the compressor consumption compensation factor and the fan consumption compensation factor; the energy utilization consumption data deviation processing result includes the compressor power consumption deviation processing result and the fan power consumption deviation processing result. The compressor power consumption deviation processing result is the specific restriction expression of the energy utilization score. Part, the fan power consumption deviation processing result is the specific restriction expression of energy utilization score part.

[0043] S3, reconciling and averaging the fuel conversion score and the energy utilization score to obtain a fuel conversion index to quantitatively evaluate the fuel utilization capacity in the high-purity hydrogen fluoride preparation process.

[0044] It should be understood that as the fuel conversion score and energy utilization score increase, the fuel conversion index increases accordingly. In addition, the fuel conversion index takes into account the correlation and mutual influence between various parameters. Specifically, improving fuel conversion efficiency is usually accompanied by a reduction in energy consumption. If the reaction process can more effectively convert fluorine and hydrogen into hydrogen fluoride, it will help to effectively reduce the energy consumption in the preparation process of high-purity hydrogen fluoride, thereby improving the energy utilization score. At the same time, there is also a correlation between the fuel conversion score and the various parameters in the energy utilization score. The fluorine-hydrogen molar ratio directly affects the generation efficiency of hydrogen fluoride. If the molar ratio is too high or too low, it may lead to incomplete reaction or low hydrogen fluoride concentration, thereby affecting the fuel conversion score and causing the fuel conversion score to decrease. As the fluorine-hydrogen molar ratio deviation processing result increases, additional energy input may be required to maintain reaction efficiency, thereby affecting the compressor power consumption deviation processing result and the fan power consumption deviation processing result in the energy utilization score, causing the energy utilization score to decrease, indicating that the fuel utilization capacity in the preparation process of high-purity hydrogen fluoride is reduced, that is, the fuel conversion index decreases accordingly.

[0045] S4. Compare the obtained fuel conversion index with the preset fuel utilization capacity limit interval obtained from the preset database to obtain the fuel reaction conversion result, which includes qualified fuel reaction conversion and unqualified fuel reaction conversion; qualified fuel reaction conversion indicates that the fuel conversion index corresponds to the fuel reaction conversion result within the preset fuel utilization capacity limit interval, and unqualified fuel reaction conversion indicates that the fuel conversion index does not correspond to the fuel reaction conversion result within the preset fuel utilization capacity limit interval.

[0046] This application uses fuel conversion scores and energy utilization scores to obtain fuel conversion indicators, which helps to comprehensively and accurately evaluate the fuel utilization capacity in the high-purity hydrogen fluoride preparation process. Accurate evaluation can help professionals understand the bottlenecks in the high-purity hydrogen fluoride preparation process and promote the optimization of the reaction process. It provides detailed data support for improving reaction efficiency, reducing waste, and optimizing energy consumption.

[0047] As the second module of the data-driven fuel energy-saving management system for high-purity hydrogen fluoride preparation, the fuel reaction energy-saving management module is used to determine whether to optimize the fuel reaction energy-saving management based on the fuel reaction conversion results. The fuel reaction energy-saving management optimization means adjusting the operating status of the compressor and fan in combination with the fuel reaction conversion results. The specific process is as follows:

[0048] Y1. If the fuel reaction conversion result corresponds to a qualified fuel reaction conversion, the fuel reaction energy-saving management optimization is not performed, and the preparation emission data of the high-purity hydrogen fluoride preparation process is directly obtained and the fuel recovery management result is obtained; the preparation emission data includes the recovered exhaust gas heat and the recovered hydrogen fluoride concentration; specifically, the recovered exhaust gas heat is obtained by a calorimeter deployed at the exhaust gas emission outlet, and the recovered hydrogen fluoride concentration is obtained by a hydrogen fluoride electrochemical sensor deployed at the exhaust gas emission outlet.

[0049] like Figure 3 As shown, a flow chart for obtaining fuel recovery management results of a high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system provided by an embodiment of the present invention, the corresponding logic of which is: quantitatively evaluating the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process based on the obtained preparation emission data to obtain a fuel recovery index, and obtaining a fuel recovery management result based on the fuel recovery index, the fuel recovery management result including qualified fuel recovery and unqualified fuel recovery; qualified fuel recovery indicates that the fuel recovery index is greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value, and unqualified fuel recovery indicates that the fuel recovery index is not greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value.

[0050] Specifically, the steps to obtain fuel recovery management results are as follows:

[0051] Y11. Obtain the production emission data from the high-purity hydrogen fluoride production process during the recovery management cycle. Combine the recovered waste gas heat ratio and the recovered hydrogen fluoride concentration deviation results with the recovery compensation factors obtained from the preset database, and then perform compensation calculations to obtain a fuel recovery and utilization index to quantitatively evaluate the fuel recovery and utilization efficiency in the high-purity hydrogen fluoride production process. The specific restricted expression is:

[0052] ;

[0053] Where L represents the fuel recovery index, Q1 represents the exhaust gas heat compensation factor, and H s Indicates the reference value of recovered waste gas heat, H indicates the recovered waste gas heat, Q2 indicates the recovered hydrogen fluoride concentration compensation factor, C s represents the reference value of recovered hydrogen fluoride concentration, and C represents the recovered hydrogen fluoride concentration.

[0054] Among them, the recovery compensation factor includes the waste gas heat compensation factor and the recovered hydrogen fluoride concentration compensation factor, which are used to describe the influence of the recovered waste gas heat ratio result and the recovered hydrogen fluoride concentration deviation result on the fuel recovery index respectively; the recovered waste gas heat ratio result is the fuel recovery index in the fuel recovery index. The recovered hydrogen fluoride concentration deviates from the fuel recovery index. part.

[0055] It should be noted that the fuel recovery and utilization index is used to quantitatively evaluate the fuel recovery and utilization efficiency in the high-purity hydrogen fluoride preparation process. The correlation and mutual influence between the various parameters in the fuel recovery and utilization index are considered in a quantitative manner. For example, the recovered waste gas heat reflects the heat energy carried by the waste gas in the high-purity hydrogen fluoride preparation process. The heat energy in this waste gas can usually be recovered and used in other production links to reduce energy consumption. The increase in waste gas heat usually indicates the effective conversion of energy in the reaction process, especially in high-temperature reactions, when the waste gas heat is high. The recovered hydrogen fluoride concentration indicates the content of hydrogen fluoride in the waste gas. The higher the concentration, the more hydrogen fluoride residue is in the waste gas, which usually indicates that the hydrogen fluoride conversion efficiency in the reaction process is low. As the deviation of the recovered hydrogen fluoride concentration result increases, it indicates that hydrogen fluoride gas is recovered in the waste gas, and the waste gas heat will also increase accordingly, that is, the proportion of recovered waste gas heat will also increase, indicating that the fuel recovery and utilization efficiency in the high-purity hydrogen fluoride preparation process is enhanced, that is, the fuel recovery and utilization index will increase accordingly.

[0056] Y12, compare the obtained fuel recovery and utilization index with the preset fuel recovery capacity limit value obtained from the preset database to obtain the fuel recovery management result, and the fuel recovery management result includes qualified fuel recovery and utilization and unqualified fuel recovery and utilization; qualified fuel recovery and utilization indicates that the fuel recovery and utilization index is greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value, and unqualified fuel recovery and utilization indicates that the fuel recovery and utilization index is not greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value.

[0057] Y2. If the fuel reaction conversion result corresponds to an unqualified fuel reaction conversion, determine whether to perform compressor drive fuel energy-saving management optimization based on the energy utilization score in the fuel conversion index. If so, determine whether to perform fan drive fuel energy-saving management optimization after performing compressor drive fuel energy-saving management optimization. Otherwise, directly perform fan drive fuel energy-saving management optimization.

[0058] The specific steps for determining whether to optimize compressor drive fuel energy-saving management based on the energy utilization score in the fuel conversion index are as follows:

[0059] Y21, determines whether the energy utilization score in the fuel conversion index is within the preset energy utilization standard range. If so, the compressor drive fuel energy-saving management optimization will not be performed. Otherwise, determine whether the energy utilization score in the fuel conversion index is greater than the energy utilization limit upper limit value. The preset energy utilization standard range represents the closed interval formed by the energy utilization limit lower limit value and the energy utilization limit upper limit value.

[0060] Y22, if the energy utilization score in the fuel conversion index is greater than the energy utilization limit upper limit, the compressor speed is updated according to the compressor speed upper limit adjustment value to reduce the initial compressor speed. The compressor speed upper limit adjustment value is the result of the arithmetic average of the fuel conversion index deviation mapping result and the energy utilization score deviation upper limit mapping result. The fuel conversion index deviation mapping result represents the result of mapping the fuel conversion index deviation degree from the fuel conversion index deviation mapping set constructed in the preset database. The fuel conversion index deviation mapping set represents the mapping relationship between the fuel conversion index deviation degree and the fuel conversion-compressor speed upper limit adjustment value. The fuel conversion index deviation degree is the result of taking the absolute value of the difference between the fuel conversion index and the fuel conversion reference value and performing a ratio operation with the fuel conversion reference value. The energy utilization score deviation upper limit mapping result represents the energy utilization score deviation degree from the energy utilization score constructed in the preset database. The upper limit deviation mapping set is used to map the result, the energy utilization score deviation degree is the result of performing a difference operation between the energy utilization score and the energy utilization limit upper limit value and performing a ratio operation with the energy utilization limit upper limit value, the energy utilization score upper limit deviation mapping set represents the mapping relationship between the energy utilization score deviation degree and the energy utilization-compressor speed upper limit adjustment value; otherwise, the compressor speed is updated according to the compressor speed lower limit adjustment value to reduce the initial compressor speed, the compressor speed lower limit adjustment value is the result of taking the arithmetic average of the compressor speed-fuel conversion index deviation mapping result and the energy utilization score deviation lower limit mapping result, the energy utilization score deviation lower limit mapping result represents the result of mapping the energy utilization score deviation degree from the energy utilization score lower limit deviation mapping set constructed in a preset database, and the energy utilization score lower limit deviation mapping set represents the mapping relationship between the energy utilization score deviation degree and the compressor speed lower limit adjustment value.

[0061] Compressor-driven fuel energy-saving management optimization means adjusting the compressor speed in combination with the fuel reaction conversion results. The compressor is one of the important equipment in the high-purity hydrogen fluoride preparation process. Its main function is to provide the mechanical energy required for gas compression. If the compressor speed is too high, it usually means excessive consumption of electricity, especially when the load is low or the demand is small. High speed will lead to unnecessary energy consumption. By dynamically adjusting the compressor speed according to the reaction requirements, its operating speed can be reduced, thereby reducing unnecessary energy consumption. In addition, the speed of the compressor is directly related to the efficiency of gas compression. Reasonable adjustment of the speed to match it with the flow and pressure of the gas demand can make the compressor operate at its optimal energy efficiency point and reduce energy consumption when running at other ineffective speeds.

[0062] The specific steps for determining whether to optimize fan drive fuel energy-saving management are as follows:

[0063] If the fuel conversion score in the fuel conversion index is not greater than the fuel conversion limit reference value, the initial fan air flow rate is increased according to the fan air flow adjustment value; otherwise, it is determined whether the fuel conversion score deviation degree is within the conversion control range obtained from the preset database; if the fuel conversion score deviation degree is within the conversion control range obtained from the preset database, the fan drive fuel energy-saving management optimization is not performed, and the fuel recovery management result is obtained; otherwise, the initial fan air flow rate is reduced according to the fan air flow management value to further achieve energy-saving management, wherein the fuel conversion score deviation degree is the result of the difference calculation between the fuel conversion score and the fuel conversion limit reference value and the proportion calculation with the fuel conversion limit reference value.

[0064] It should be added that the fan air flow adjustment value is the result of the arithmetic average of the air flow adjustment-fuel conversion index deviation mapping result and the fuel conversion score deviation mapping result. The fuel conversion score deviation mapping result represents the result of mapping the fuel conversion score deviation degree from the fuel conversion score deviation mapping set constructed in the preset database. The fuel conversion score deviation mapping set represents the mapping relationship between the fuel conversion score deviation degree and the fan air flow-adjustment value.

[0065] The fan air flow management value is the result of the arithmetic average of the air flow management-fuel conversion index deviation mapping result and the fuel conversion score management mapping result. The fuel conversion score management mapping result represents the result of mapping the fuel conversion score deviation degree from the fuel conversion score management mapping set constructed in the preset database. The fuel conversion score management mapping set represents the mapping relationship between the fuel conversion score deviation degree and the fan air flow-management value.

[0066] Fan-driven fuel energy-saving management optimization means adjusting the fan airflow rate in combination with the fuel reaction conversion results. During the preparation of high-purity hydrogen fluoride, it is usually necessary to maintain a certain gas flow rate to maintain the reaction rate and reaction conditions. If more gas (such as hydrogen fluoride gas) is required during the reaction, increasing the fan airflow rate can ensure that the reaction system has sufficient gas supply, thereby ensuring that the reaction can proceed smoothly and achieve the expected hydrogen fluoride production. However, if the fan airflow rate is too large, it means that it will provide too much gas flow, resulting in energy waste, that is, unnecessary energy consumption. By dynamically adjusting the fan airflow rate to match it with production needs and avoiding the fan from running under excessive load, the waste of electricity can be significantly reduced and the overall energy efficiency of the system can be improved.

[0067] As the third module of the high-purity hydrogen fluoride preparation data-driven fuel energy-saving management system, the fuel recovery energy-saving management module is used to obtain fuel recovery management results based on the obtained preparation emission data to quantitatively determine the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, and determine whether to optimize the fuel recovery energy-saving management based on the fuel recovery management results. Among them, the fuel recovery energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management results. Specifically, the steps for determining whether to optimize the fuel recovery energy-saving management based on the fuel recovery management results are as follows:

[0068] First, if the fuel recovery management result corresponds to qualified fuel recovery and utilization, fuel recovery energy-saving management optimization will not be performed, and the fuel reaction conversion results will be continuously monitored.

[0069] Secondly, if the fuel recovery management result corresponds to unqualified fuel recovery and utilization, it is determined whether to perform preparation-recovery energy-saving management optimization based on the fuel recovery and utilization index. If so, the recovery and utilization energy-saving management optimization is performed after the preparation-recovery energy-saving management optimization. Otherwise, the recovery and utilization energy-saving management optimization is performed directly. Among them, the preparation-recovery energy-saving management optimization means updating the initial fluorine gas flow rate and the initial hydrogen flow rate in combination with the fuel recovery management result; the recovery and utilization energy-saving management optimization means updating the exhaust gas emission flow rate and the reflux ratio in combination with the fuel recovery management result. Specifically, the specific steps for determining whether to perform preparation-recovery energy-saving management optimization based on the fuel recovery and utilization index are as follows:

[0070] Determine whether the deviation result of the recovered hydrogen fluoride concentration in the fuel recovery and utilization index is within the preset recovery concentration standard range. If so, do not perform preparation-recovery energy-saving management optimization; otherwise, update the initial fluorine flow rate and the initial hydrogen flow rate according to the preparation fluorine flow rate adjustment value and the hydrogen flow rate adjustment value to reduce the deviation of the fluorine-hydrogen molar ratio from the fluorine-hydrogen molar ratio reference value.

[0071] It should be noted that the fluorine gas flow rate adjustment value is the result of the arithmetic average of the fuel recovery index and the recovered hydrogen fluoride concentration deviation fluorine gas mapping result, and the recovered hydrogen fluoride concentration deviation fluorine gas mapping result represents the result of mapping the recovered hydrogen fluoride concentration deviation result in the fuel recovery index from the fluorine gas flow rate adjustment mapping set constructed in the preset database, and the fluorine gas flow rate adjustment mapping set represents the mapping relationship between the recovered hydrogen fluoride concentration deviation result and the fluorine gas-flow rate adjustment value.

[0072] The hydrogen flow regulation value is the result of the arithmetic average of the hydrogen regulation-fuel recovery and utilization index and the recovered hydrogen fluoride concentration deviation hydrogen mapping result. The recovered hydrogen fluoride concentration deviation hydrogen mapping result represents the result of mapping the recovered hydrogen fluoride concentration deviation result in the fuel recovery and utilization index from the hydrogen flow regulation mapping set constructed in the preset database. The hydrogen flow regulation mapping set represents the mapping relationship between the recovered hydrogen fluoride concentration deviation result and the hydrogen-flow regulation value.

[0073] It should be added that the specific steps for recycling and energy-saving management are:

[0074] The fuel recovery and utilization index is input into the mapping set of fuel recovery and utilization index and exhaust gas emission flow rate adjustment value constructed in the preset database to obtain the exhaust gas emission flow rate adjustment value; the initial exhaust gas emission flow rate is reduced according to the obtained exhaust gas emission flow rate adjustment value; the reflux ratio recovery adjustment value is obtained, and the initial reflux ratio is increased based on the obtained reflux ratio recovery adjustment value; the reflux ratio recovery adjustment value represents the result of mapping the fuel conversion index and the fuel recovery and utilization index from the reflux ratio adjustment mapping set constructed in the preset database after harmonized averaging, and the reflux ratio adjustment mapping set represents the mapping relationship between the result of harmonized averaging of the fuel conversion index and the fuel recovery and utilization index and the reflux ratio recovery adjustment value.

[0075] By optimizing the exhaust gas emission flow rate, ensuring that exhaust gas emissions meet optimal energy efficiency requirements, the power consumption of the exhaust gas treatment equipment is reduced. A lower exhaust gas emission flow rate means that the exhaust gas treatment equipment does not need to work excessively, thereby reducing energy consumption. The reflux ratio refers to the reflow of part of the reaction gas into the system to improve reaction efficiency. During the reflux ratio optimization process, adjusting the appropriate reflux ratio can improve the utilization efficiency of the reactants in the high-purity hydrogen fluoride preparation process, thereby accelerating the reaction rate and enhancing the efficiency of the preparation process. While increasing the reflux ratio, the need for additional energy input is reduced. By optimizing the utilization of the reflux gas, the resources within the system can be used more efficiently, the demand for additional gas can be reduced, and the consumption of external energy can be reduced.

[0076] In addition, in the process of preparing high-purity hydrogen fluoride, the correlation analysis between the preparation reaction data and the preparation emission data can reveal the mutual influence between various factors. The reaction conditions for preparing high-purity hydrogen fluoride directly affect the fuel consumption and the level of waste gas emissions. If the preparation reaction data and the preparation emission data are not fully correlated, it is difficult to understand the intrinsic connection between fuel consumption and waste gas emissions under different reaction conditions. Failure to deeply analyze the interaction between these data means that it is impossible to accurately optimize the energy consumption in the production process. This application achieves more efficient fuel energy-saving management in the process of preparing high-purity hydrogen fluoride by mining the correlation between the preparation reaction data and the preparation emission data in the process of preparing high-purity hydrogen fluoride.

[0077] like Figure 4 As shown, it is one of the fuel reaction energy-saving management interface diagrams of the high-purity hydrogen fluoride production data-driven fuel energy-saving management system provided by an embodiment of the present invention; Figure 4 It can be seen that the hydrogen fluoride preparation energy-saving management system provided in the embodiment of the present application includes a main menu, energy consumption management and system settings, wherein the main menu includes the home page and real-time monitoring, the energy consumption management part includes energy consumption analysis, equipment management, energy-saving regulation and data reports, and the system settings are used for system management; specifically, the energy consumption analysis is divided into fuel reaction energy-saving management and fuel recovery energy-saving management, and the fuel reaction energy-saving management includes high-purity hydrogen fluoride preparation reaction conditions, such as reaction temperature, reaction pressure and reaction time, and can also be used to display fuel reaction conversion results, and provide options for parameter adjustment and report viewing; in addition, the fuel reaction energy-saving management interface also includes a fuel reaction energy-saving management optimization part, which is specifically used to display the adjustment status of compressor speed adjustment and fan air flow adjustment.

[0078] like Figure 5 As shown, it is one of the fuel recovery energy-saving management interface diagrams of the high-purity hydrogen fluoride production data-driven fuel energy-saving management system provided by an embodiment of the present invention; Figure 5 It can be seen that the fuel recovery energy-saving management interface in the hydrogen fluoride preparation energy-saving management system provided in the embodiment of the present application includes high-purity hydrogen fluoride preparation recovery conditions, such as recovery temperature, recovery pressure and recovery rate, and can also be used to display fuel recovery management results. In addition, the interface also includes a fuel recovery energy-saving management optimization part, which is specifically used to display the adjustment status of fluorine gas flow adjustment, hydrogen flow adjustment, exhaust gas emission flow rate adjustment and reflux ratio adjustment.

[0079] like Figure 6As shown, it is a flow chart of a data-driven fuel energy-saving management method for high-purity hydrogen fluoride preparation provided by an embodiment of the present invention. The data-driven fuel energy-saving management method for high-purity hydrogen fluoride preparation provided by an embodiment of the present invention comprises the following steps: obtaining preparation reaction data reflecting fuel conversion efficiency in the high-purity hydrogen fluoride preparation process, obtaining a fuel reaction conversion result based on the obtained preparation reaction data to quantitatively determine the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process; judging whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result; if so, sending a preparation emission management instruction after the fuel reaction energy-saving management optimization to obtain preparation emission data reflecting fuel recovery efficiency in the high-purity hydrogen fluoride preparation process; otherwise, directly obtaining the preparation emission data in the high-purity hydrogen fluoride preparation process; the fuel reaction energy-saving management optimization means adjusting the operating status of the compressor and the fan in combination with the fuel reaction conversion result; obtaining a fuel recovery management result based on the obtained preparation emission data to quantitatively determine the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, judging whether to perform fuel recovery energy-saving management optimization based on the fuel recovery management result, and the fuel recovery energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management result.

[0080] In summary, in the high-purity hydrogen fluoride preparation process of the embodiments of the present invention, the energy consumption correlation between the preparation reaction process and the preparation recovery process is not effectively utilized, which often leads to low efficiency of fuel energy-saving management in the high-purity hydrogen fluoride preparation process. The present invention obtains the fuel reaction conversion result by obtaining the preparation reaction data, which helps to more accurately judge the fuel conversion efficiency in the high-purity hydrogen fluoride preparation process. Then, it is judged whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result, effectively reducing the energy consumption in the high-purity hydrogen fluoride preparation process and realizing energy-saving management in the high-purity hydrogen fluoride preparation process. Finally, the fuel recovery management result is obtained based on the obtained preparation emission data and it is judged whether to perform fuel recovery energy-saving management optimization, effectively reducing the energy consumption in the high-purity hydrogen fluoride preparation recovery process and realizing energy-saving management in the high-purity hydrogen fluoride preparation recovery process, effectively solving the problem of low efficiency of fuel energy-saving management in the high-purity hydrogen fluoride preparation process in the prior art.

[0081] Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, systems, or computer program products. Thus, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0082] The present invention is described with reference to flowcharts and / or block diagrams of systems, devices (systems), and computer program products according to embodiments of the present invention. It should be understood that each process and / or block in the flowcharts and / or block diagrams, as well as combinations of processes and / or blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowcharts and / or block diagrams. Figure 1 a process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0083] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 a process or multiple processes and / or boxes Figure 1 The function specified in one or more boxes.

[0084] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operational steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing the instructions executed on the computer or other programmable device for implementing the process. Figure 1 a process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0085] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0086] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. High-purity hydrogen fluoride production data-driven fuel energy-saving management system, characterized by: include: Fuel conversion efficiency judgment module, fuel reaction energy-saving management module and fuel recovery energy-saving management module; The fuel conversion efficiency judgment module is used to obtain preparation reaction data reflecting the fuel conversion efficiency during the preparation of high-purity hydrogen fluoride, and obtain a fuel reaction conversion result based on the obtained preparation reaction data to quantitatively judge the fuel conversion efficiency during the preparation of high-purity hydrogen fluoride; The fuel reaction energy-saving management module is used to determine whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result. If so, after the fuel reaction energy-saving management optimization, a preparation emission management instruction is sent to obtain preparation emission data reflecting the fuel recovery efficiency during the high-purity hydrogen fluoride preparation process; otherwise, the preparation emission data during the high-purity hydrogen fluoride preparation process is directly obtained. The fuel reaction energy-saving management optimization indicates adjusting the operating status of the compressor and the fan in combination with the fuel reaction conversion result; The fuel recovery and energy-saving management module is used to obtain fuel recovery management results based on the obtained preparation emission data to quantitatively determine the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, and determine whether to perform fuel recovery and energy-saving management optimization based on the fuel recovery management results. The fuel recovery and energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management results.

2. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 1, characterized in that: The specific steps of obtaining the fuel reaction conversion result are as follows: Acquire the preparation reaction data of the high-purity hydrogen fluoride preparation process during the preparation management cycle, and perform compensation calculations on the fluorine-hydrogen molar ratio deviation processing results and the hydrogen fluoride concentration ratio results with the fuel conversion compensation factors obtained from the preset database, thereby obtaining a fuel conversion score. The preparation reaction data includes fuel conversion utilization data and energy utilization consumption data, wherein the fuel conversion utilization data includes the fluorine-hydrogen molar ratio and the hydrogen fluoride concentration, and the energy utilization consumption data includes the compressor power consumption and the fan power consumption; The fluorine-hydrogen molar ratio deviation processing result represents a comparison result of the deviation between the fluorine-hydrogen molar ratio and the fluorine-hydrogen molar ratio reference value; the hydrogen fluoride concentration proportion result represents a result of a proportion calculation between the hydrogen fluoride concentration and the hydrogen fluoride concentration reference value; and the fuel conversion compensation factor includes a molar ratio deviation compensation factor and a hydrogen fluoride concentration compensation factor; The energy consumption data deviation processing result is compensated by the energy consumption compensation factor and then coupled to obtain the energy utilization score; The fuel conversion score and the energy utilization score are harmonized and averaged to obtain the fuel conversion index to quantitatively evaluate the fuel utilization capacity in the high-purity hydrogen fluoride preparation process; Comparing the obtained fuel conversion index with a preset fuel utilization capacity limit interval obtained from a preset database to obtain a fuel reaction conversion result, wherein the fuel reaction conversion result includes a fuel reaction conversion qualified result and a fuel reaction conversion unqualified result; The qualified fuel reaction conversion indicates that the fuel conversion index corresponds to the fuel reaction conversion result within the preset fuel utilization capacity limit range, and the unqualified fuel reaction conversion indicates that the fuel conversion index does not correspond to the fuel reaction conversion result within the preset fuel utilization capacity limit range.

3. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 2, characterized in that: The specific process of determining whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result is as follows: If the fuel reaction conversion result corresponds to a qualified fuel reaction conversion, the fuel reaction energy-saving management optimization is not performed, and the preparation emission data of the high-purity hydrogen fluoride preparation process is directly obtained to obtain the fuel recovery management result; If the fuel reaction conversion result corresponds to an unqualified fuel reaction conversion, it is determined whether to perform compressor drive fuel energy-saving management optimization based on the energy utilization score in the fuel conversion index. If so, it is determined whether to perform fan drive fuel energy-saving management optimization after performing compressor drive fuel energy-saving management optimization. Otherwise, fan drive fuel energy-saving management optimization is directly performed.

4. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 3, characterized in that: The specific steps of determining whether to perform compressor drive fuel energy-saving management optimization based on the energy utilization score in the fuel conversion index are: Determine whether the energy utilization score in the fuel conversion index is within a preset energy utilization standard range. If so, do not perform compressor drive fuel energy-saving management optimization. Otherwise, determine whether the energy utilization score in the fuel conversion index is greater than an energy utilization limit upper limit. The preset energy utilization standard range represents a closed interval formed by an energy utilization limit lower limit and an energy utilization limit upper limit. If the energy utilization score in the fuel conversion index is greater than the energy utilization limit upper limit, the compressor speed is updated according to the compressor speed upper limit adjustment value to reduce the initial compressor speed; otherwise, the compressor speed is updated according to the compressor speed lower limit adjustment value to reduce the initial compressor speed; The compressor speed upper limit adjustment value is a result of arithmetic averaging a fuel conversion index deviation mapping result and an energy utilization score deviation upper limit mapping result, wherein the fuel conversion index deviation mapping result represents a result of mapping the fuel conversion index deviation degree from a fuel conversion index deviation mapping set constructed in a preset database, and the energy utilization score deviation upper limit mapping result represents a result of mapping the energy utilization score deviation degree from an energy utilization score upper limit deviation mapping set constructed in a preset database; The compressor speed lower limit adjustment value is the result of arithmetic averaging the fuel conversion index deviation mapping result and the energy utilization score deviation lower limit mapping result. The energy utilization score deviation lower limit mapping result represents the result of mapping the energy utilization score deviation degree from an energy utilization score lower limit deviation mapping set constructed in a preset database.

5. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 4, characterized in that: The specific steps of determining whether to perform fan drive fuel energy-saving management optimization are: If the fuel conversion score in the fuel conversion index is not greater than the fuel conversion limit reference value, the initial fan air flow rate is increased according to the fan air flow rate adjustment value; otherwise, it is determined whether the fuel conversion score deviation degree is within the conversion control range obtained from the preset database; if the fuel conversion score deviation degree is within the conversion control range obtained from the preset database, the fan drive fuel energy-saving management optimization is not performed, and the fuel recovery management result is obtained; otherwise, the initial fan air flow rate is reduced according to the fan air flow rate management value; The fan air flow adjustment value is the result of arithmetic averaging the fuel conversion index deviation mapping result and the fuel conversion score deviation mapping result, wherein the fuel conversion score deviation mapping result represents the result of mapping the fuel conversion score deviation degree from a fuel conversion score deviation mapping set constructed in a preset database; The fan air flow management value is the result of arithmetic averaging the fuel conversion index deviation mapping result and the fuel conversion score management mapping result. The fuel conversion score management mapping result represents the result of mapping the fuel conversion score deviation degree from the fuel conversion score management mapping set constructed in a preset database.

6. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 5, characterized in that: The specific steps of obtaining the fuel recovery management result are: Acquire preparation emission data during the high-purity hydrogen fluoride preparation process during the recovery management cycle, wherein the preparation emission data includes the heat of recovered waste gas and the concentration of recovered hydrogen fluoride; The recovered waste gas heat ratio result and the recovered hydrogen fluoride concentration deviation result are respectively coupled with the recovery compensation factor obtained from the preset database for compensation calculation to obtain a fuel recovery index to quantitatively evaluate the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process, wherein the recovery compensation factor includes the waste gas heat compensation factor and the recovered hydrogen fluoride concentration compensation factor; Comparing the obtained fuel recovery index with a preset fuel recovery capacity limit value obtained from a preset database to obtain a fuel recovery management result, wherein the fuel recovery management result includes a fuel recovery qualified result and a fuel recovery unqualified result; The qualified fuel recovery and utilization indicates that the fuel recovery and utilization index is greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value, and the unqualified fuel recovery and utilization indicates that the fuel recovery and utilization index is not greater than the fuel recovery management result corresponding to the preset fuel recovery capacity limit value.

7. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 6, characterized in that: The specific steps of determining whether to perform fuel recovery energy-saving management optimization based on the fuel recovery management results are: If the fuel recovery management result corresponds to qualified fuel recovery and utilization, fuel recovery energy-saving management optimization will not be performed, and the fuel reaction conversion results will be continuously monitored; If the fuel recovery management result corresponds to unqualified fuel recovery and utilization, then determine whether to perform preparation-recovery energy-saving management optimization based on the fuel recovery and utilization indicators. If so, then perform recycling energy-saving management optimization after performing preparation-recovery energy-saving management optimization. Otherwise, perform recycling energy-saving management optimization directly. The preparation-recovery energy-saving management optimization means updating the initial fluorine gas flow rate and the initial hydrogen flow rate in combination with the fuel recovery management result; The recycling and energy-saving management optimization refers to updating the exhaust gas emission flow rate and the recirculation ratio in combination with the fuel recycling management results.

8. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 7, characterized in that: The specific steps of determining whether to perform preparation-recovery energy-saving management optimization based on the fuel recovery and utilization index are as follows: Determine whether the deviation result of the recovered hydrogen fluoride concentration in the fuel recovery and utilization index is within the preset recovery concentration standard range. If so, do not perform preparation-recovery energy-saving management optimization; otherwise, update the initial fluorine flow rate and the initial hydrogen flow rate according to the preparation fluorine flow rate adjustment value and the hydrogen flow rate adjustment value to reduce the deviation degree of the fluorine-hydrogen molar ratio from the fluorine-hydrogen molar ratio reference value; The fluorine gas flow rate adjustment value is the result of arithmetic averaging the fuel recovery index and the recovered hydrogen fluoride concentration deviation fluorine gas mapping result, and the recovered hydrogen fluoride concentration deviation fluorine gas mapping result represents the result of mapping the recovered hydrogen fluoride concentration deviation result in the fuel recovery index from the fluorine gas flow rate adjustment mapping set constructed in the preset database; The hydrogen flow rate adjustment value is the result of arithmetic averaging the fuel recovery index and the recovered hydrogen fluoride concentration deviation hydrogen mapping result, and the recovered hydrogen fluoride concentration deviation hydrogen mapping result represents the result of mapping the recovered hydrogen fluoride concentration deviation result in the fuel recovery index from a hydrogen flow rate adjustment mapping set constructed in a preset database.

9. The high-purity hydrogen fluoride production data-driven fuel energy-saving management system according to claim 8, characterized in that: The specific steps of recycling and energy-saving management are: Inputting the fuel recovery index into a mapping set of fuel recovery indexes and exhaust gas emission flow rate adjustment values ​​constructed in a preset database to obtain the exhaust gas emission flow rate adjustment value; reducing the initial exhaust gas emission flow rate according to the obtained exhaust gas emission flow rate adjustment value; Obtaining a reflux ratio recovery adjustment value, and increasing the initial reflux ratio based on the obtained reflux ratio recovery adjustment value; The reflux ratio recovery adjustment value represents a result of mapping the fuel conversion index and the fuel recovery utilization index from a reflux ratio adjustment mapping set constructed in a preset database after harmonizing and averaging the index.

10. A data-driven fuel energy-saving management method for high-purity hydrogen fluoride production, applied to the data-driven fuel energy-saving management system for high-purity hydrogen fluoride production according to any one of claims 1 to 9, characterized in that: The method comprises the following steps: Acquiring preparation reaction data reflecting fuel conversion efficiency during the preparation of high-purity hydrogen fluoride, and obtaining fuel reaction conversion results based on the acquired preparation reaction data to quantitatively determine the fuel conversion efficiency during the preparation of high-purity hydrogen fluoride; Determining whether to perform fuel reaction energy-saving management optimization based on the fuel reaction conversion result; if so, sending a preparation emission management instruction after the fuel reaction energy-saving management optimization to obtain preparation emission data reflecting the fuel recovery efficiency during the high-purity hydrogen fluoride preparation process; otherwise, directly obtaining the preparation emission data during the high-purity hydrogen fluoride preparation process; the fuel reaction energy-saving management optimization means adjusting the operating status of the compressor and the fan in combination with the fuel reaction conversion result; Based on the obtained preparation emission data, the fuel recovery management results are obtained to quantitatively determine the fuel recovery efficiency in the high-purity hydrogen fluoride preparation process. According to the fuel recovery management results, it is determined whether to perform fuel recovery energy-saving management optimization. The fuel recovery energy-saving management optimization means adjusting the high-purity hydrogen fluoride preparation process and recovery process in combination with the fuel recovery management results.

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