Micro-nano period tip acutance characteristic measurement and evaluation system and method

Abstract

The invention discloses a micro-nano period tip acutance characteristic measurement and evaluation system and method, the measurement and evaluation system comprises a measurement standard device, the measurement standard device is provided with a plurality of tip acutance characteristic units which are uniformly distributed in an array, and the four side surfaces of each tip acutance characteristic unit are of an inward concave cambered surface structure; the probe system collects contour data of the tip sharpness feature unit and sends the contour data to the data processing module, and the data processing module analyzes the contour data and calculates an error correction value of the probe system. The method comprises the steps from S1 to S3. A grating standard sample plate with a periodic tip acutance characteristic unit is designed, and online tracking calibration is carried out on nanometer values of the probe on the X axis, the Y axis and the Z axis.

Description

Technical Field

[0001] The present invention relates to the field of high-precision measurement, and in particular to a micro-nano periodic tip sharpness feature measurement and evaluation system and method. Background Art

[0002] Scanning probe microscopes (SPMs) and micro / nanoscale multi-sensor coordinate measuring machines (CMMs) are widely used in fields such as new energy battery materials and integrated circuits. The spatial measurement deviations of these instruments directly affect the measurement accuracy and repeatability of the measured objects. The primary source of measurement deviations for these instruments is probe system deviations. High-precision measurement deviation assessment is crucial for error correction. Therefore, a new system and method for measuring and evaluating micro / nano-periodic tip sharpness characteristics is proposed. Summary of the Invention

[0003] In view of the above-mentioned deficiencies in the prior art, the present invention provides a system and method for measuring and evaluating the sharpness characteristics of micro-nano periodic tips.

[0004] In order to achieve the above-mentioned object of the invention, the technical solution adopted by the present invention is: Provides a micro-nano periodic tip sharpness feature measurement and evaluation system, which is used in conjunction with probe-type micro-nano scale measurement instruments, including: A metrology standard comprising a substrate having a plurality of uniformly distributed arrays of tip sharpness characteristic units disposed on the upper end of the substrate, each tip sharpness characteristic unit comprising a square base and a pyramid-shaped tip, and the four side surfaces of the tip sharpness characteristic unit all being concave arc structures; The data processing module, a probe system of a probe-type micro- and nano-scale measuring instrument, moves between several tip sharpness feature units. The probe system collects and transmits profile data of these units to the data processing module, which analyzes the profile data and calculates error correction values ​​for the probe system. Furthermore, the four side surfaces of the tip sharpness feature units have identical concave arcuate structures, with the sides of two adjacent arcuate structures intersecting to form arc-shaped edges.

[0005] Furthermore, the bottom side length of the tip sharpness feature unit is L , height is H ,and H = L , the radius of the arc edge is r , radian angle is α , and satisfies .

[0006] Furthermore, it also includes a laser-assisted system, which includes a laser source, a cylindrical lens installed above the substrate, and a triangular beam splitter. The laser emitted by the laser source passes through the cylindrical lens and reaches the triangular beam splitter. The triangular beam splitter splits the laser beam into a cross-shaped light path. The cross-shaped light path splits the substrate into four quadrants, and a number of tip sharpness feature units are evenly distributed in the four quadrants.

[0007] Furthermore, the substrate has a rectangular structure, a cylindrical lens is installed on one side edge of the substrate, and the other three side edges of the substrate are respectively provided with a first reflector, a second reflector and a third reflector. The laser emitted by the laser source passes through the cylindrical lens, the triangular beam splitter, the first reflector, the second reflector and the third reflector to form a cross-intersecting incident light path and reflected light path.

[0008] Furthermore, a receiver is provided on the laser source. The laser source is provided on a side close to the cylindrical lens, and the triangular beam splitter is provided in the middle of the substrate. The laser emitted by the laser source passes through the cylindrical lens to form an incident light path. The incident light path passes through the triangular beam splitter and is directly projected to the third reflector to form a first incident light path. The third reflector reflects the first incident light path to form a first reflected light path. The first reflected light path then passes through the triangular beam splitter to form a reflected light path. The reflected light path is received by the receiver through the cylindrical lens. The incident light path is refracted by the triangular beam splitter to form a second incident light path perpendicular to the incident light path and the two sides of the first incident light path. The second incident light path is reflected by the first reflector and the second reflector to form a second reflected light path. The second reflected light path is refracted by the triangular beam splitter and merged into the reflected light path.

[0009] Furthermore, it also includes a tracking and calibration coordinate system, the X-axis of the tracking and calibration coordinate system is the line between the cylindrical lens and the third reflector, the Y-axis is the line between the first reflector and the second reflector, the Z-axis is perpendicular to the substrate, and the origin is located at the center of the triangular beam splitter; the number of tip sharpness feature units in the four quadrants is equal, and the distribution position is symmetrical based on the X-axis and the Y-axis.

[0010] A method for evaluating measurement deviation using the micro-nano periodic tip sharpness feature measurement and evaluation system is provided, comprising the following steps: S1: The metrology standard is installed at the lower end of the probe system of the probe-type micro-nanoscale measuring instrument. The probe system drives the probe to take sampling points from two adjacent arc surface structures on the tip sharpness feature unit, and fits the marking points in the Z-axis direction and the marking points in the X-axis and Y-axis directions; S2: Based on the installation position of the tip sharpness feature unit on the substrate and the size parameters of the tip sharpness feature unit, obtain the marking point on the tip sharpness feature unit D , Mark Point C Theoretical coordinates of S3: Use the marking points on the tip sharpness feature units at the corresponding positions in the four quadrants D , Mark Point C Theoretical coordinates and measured coordinates of the calculated marker points D , Mark Point C The average difference between the theoretical coordinates and the measured coordinates is used to obtain the error correction values ​​of the probe system in the X-axis direction, Y-axis direction and Z-axis direction.

[0011] Furthermore, step S1 includes: S11: The probe system drives the probe to move downward from the top of the tip sharpness feature unit, and fits the surface of the curved structure during the movement, and sets the height of the probe to , the probe descends each time The position of the arc surface structure reached at the time is taken as the sampling point, and the coordinates of the sampling point in the tracking calibration coordinate system are collected; S12: Repeat step S11 n times, the probe fits the arc surface structure and decreases n After the process, the same descending height corresponds to n The coordinates of the sampling points; S13: Exploit n The coordinates of the adopted points are fitted to the sampling lines corresponding to the same drop height. Two sampling lines are fitted based on the same drop height of the adjacent curved surface structures. The intersection of the two sampling lines is used as the sampling intersection point, and the coordinates of the sampling intersection point are obtained; S14: The number of times the probe descends on the curved surface structure according to the setting i , we get the arc-shaped edges where adjacent arc surface structures intersect. i sampling intersections, and using i The coordinates of the sampling intersection points are fitted into the circular arc curve where the circular arc edge is located; S15: Fit the arc curves where two adjacent arc edges are located on the tip sharpness feature unit, and the intersection of the two adjacent arc curves is used as the marking point in the Z axis direction D , and get the marked points D The measured coordinates of S16: Set the probe's descent height H The probe is lowered from the top of the curved surface structure to fit the curved surface structure. H Afterwards, the intersection point between the probe and the arc surface structure is obtained as the base point, and the coordinates of the base point are collected; S17: Repeat step S16 to obtain a drop n After the process n coordinates of the base points, and using n The coordinates of the base points are fitted to the straight line of the bottom side length of the tip sharpness characteristic unit, and the intersection of the two adjacent bottom side length straight lines is used as the marking point in the X-axis and Y-axis directions.C , and get the marked points C The measurement coordinates of .

[0012] The beneficial effects of the present invention are as follows: Aiming to achieve online calibration and traceability of measurement deviations for scanning probe-based micro- and nanoscale measuring instruments, the present invention designs a grating standard template with periodic tip sharpness characteristic units, also known as a metrology standard, and establishes a laser interference optical path as a laser-assisted system to perform online tracking and calibration of the probe's nanometer values ​​on the X, Y, and Z axes. Based on the same set of nanoscale standards, a metrology data association is established between different nanometer measuring instruments. Through intelligent data comparison, a comparison of nanometer measuring instrument data for the entire region and the same measured object is formed, thereby achieving unified and reliable measurement values ​​across the entire region. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 Schematic diagram of the system for measuring and evaluating micro-nano periodic tip sharpness features.

[0014] Figure 2 Schematic diagram of the structure and distribution of measurement standards.

[0015] Figure 3 Schematic diagram of sampling of arc surface structure.

[0016] Figure 4 Schematic diagram of probe sampling plan.

[0017] Figure 5 Schematic diagram of the implementation process of the micro-nano periodic tip sharpness feature measurement and evaluation system.

[0018] Figure 6 Schematic diagram of the symmetrical distribution of tip sharpness feature units.

[0019] Figure 7 Schematic diagram of the tracking calibration coordinate system.

[0020] Among them, 1. Probe system, 2. Laser-assisted system, 3. Metrology standard, 4. Probe-type micro-nano scale measuring instrument. DETAILED DESCRIPTION

[0021] The specific embodiments of the present invention are described below to facilitate understanding of the present invention by those skilled in the art. However, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those skilled in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the appended claims, these changes are obvious, and all inventions and creations utilizing the concepts of the present invention are protected.

[0022] like Figure 1 and Figure 5As shown, a micro-nano periodic tip sharpness feature measurement and evaluation system is used in conjunction with a probe-type micro-nano scale measurement instrument 4, including: like Figure 2 As shown, the metrology standard 3 includes a substrate, and a plurality of tip sharpness characteristic units are arranged on the upper end of the substrate in a uniform array. Each tip sharpness characteristic unit includes a square bottom surface and a pyramid-shaped tip. The four side surfaces of the tip sharpness characteristic unit are all concave arc surface structures. The probe system 1 of the probe-type micro-nanoscale measuring instrument 4 moves between several tip sharpness feature units. The probe system 1 collects the contour data of the tip sharpness feature unit and sends it to the data processing module. The data processing module analyzes the contour data and calculates the error correction value of the probe system 1. In this embodiment, the four sides of the tip sharpness feature unit are the same concave arc surface structure, and the sides of two adjacent arc surface structures intersect to form an arc-shaped edge. The bottom side length of the tip sharpness feature unit is L , height is H ,and H = L , the radius of the arc edge is r , radian angle is α , and satisfies , θ is the tip angle of the tip sharpness feature unit, and the tip angle θ It is an acute angle, usually less than 5°, such as Figure 2 and Figure 3 shown.

[0023] It also includes a laser auxiliary system 2, which includes a laser source, a cylindrical lens installed above the substrate, and a triangular beam splitter. The laser emitted by the laser source passes through the cylindrical lens and reaches the triangular beam splitter. The triangular beam splitter splits the laser beam into a cross-shaped light path. The cross-shaped light path splits the substrate into four quadrants, and a number of tip sharpness feature units are evenly distributed in the four quadrants.

[0024] In this embodiment, the substrate has a rectangular structure, a cylindrical lens is installed on one side edge of the substrate, and a first reflector, a second reflector, and a third reflector are respectively provided on the other three sides of the substrate. The laser emitted by the laser source passes through the cylindrical lens, the triangular beam splitter, the first reflector, the second reflector, and the third reflector to form a cross-intersecting incident light path and reflected light path.

[0025] In this embodiment, a receiver is provided on the laser source, the laser source is provided on a side close to the cylindrical lens, and the triangular beam splitter is provided in the middle of the substrate. The laser emitted by the laser source passes through the cylindrical lens to form an incident light path, and the incident light path passes through the triangular beam splitter and is directly projected to the third reflector to form a first incident light path. The third reflector emits the first incident light path to form a first reflected light path, and the first reflected light path then passes through the triangular beam splitter to form a reflected light path, and the reflected light path is received by the receiver through the cylindrical lens.

[0026] The incident light path is refracted by the triangular beam splitter to form a second incident light path perpendicular to the incident light path and the two sides of the first incident light path. The second incident light path is reflected by the first reflector and the second reflector to form a second reflected light path. The second reflected light path is refracted by the triangular beam splitter and merged into the reflected light path.

[0027] like Figure 6 and Figure 7 As shown, it also includes a tracking and calibration coordinate system, the X-axis of the tracking and calibration coordinate system is the line between the cylindrical lens and the third reflector, the Y-axis is the line between the first reflector and the second reflector, the Z-axis is perpendicular to the substrate, and the origin is located at the center of the triangular beam splitter; the number of tip sharpness feature units in the four quadrants is equal, and the distribution position is symmetrical based on the X-axis and the Y-axis.

[0028] A method for evaluating measurement deviation using the above-mentioned micro-nano periodic tip sharpness feature measurement and evaluation system comprises the following steps: S1: If Figure 5 As shown, the metrology standard 3 is installed at the lower end of the probe system 1 of the probe-type micro-nanoscale measuring instrument 4. The probe system 1 drives the probe to take sampling points from two adjacent arc surface structures on the tip sharpness feature unit and fit the marking points in the Z axis direction and the marking points in the X and Y axis directions. Step S1 specifically includes the following steps: S11: Probe system 1 drives the probe to move downward from the top of the tip sharpness feature unit, and fits the surface of the curved structure during the movement, and sets the height of the probe to be ,like Figure 4 As shown, the probe descends each time The position of the arc surface structure reached at the time is taken as the sampling point, and the coordinates of the sampling point in the tracking calibration coordinate system are collected; S12: Repeat step S11 n times, the probe fits the arc surface structure and decreases n After the process, the same descending height corresponds to n The coordinates of the sampling points; S13: Exploit nThe coordinates of the adopted points are used to fit the sampling lines corresponding to the same drop height. According to the two sampling lines fitted at the same drop height of the adjacent arc surface structure, the intersection of the two sampling lines is used as the sampling intersection point, and the coordinates of the sampling intersection point are obtained, such as Figure 3 As shown; S14: The number of times the probe descends on the curved surface structure according to the setting i , we get the arc-shaped edges where adjacent arc surface structures intersect. i sampling intersections, and using i The coordinates of the sampling intersection points are fitted into the circular arc curve where the circular arc edge is located; S15: Fit the arc curves where two adjacent arc edges are located on the tip sharpness feature unit, and the intersection of the two adjacent arc curves is used as the marking point in the Z axis direction D , and get the marked points D The measured coordinates of S16: Set the probe's descent height H The probe is lowered from the top of the curved surface structure to fit the curved surface structure. H Afterwards, the intersection point between the probe and the arc surface structure is obtained as the base point, and the coordinates of the base point are collected; S17: Repeat step S16 to obtain a drop n After the process n coordinates of the base points, and using n The coordinates of the base points are fitted to the straight line of the bottom side length of the tip sharpness characteristic unit, and the intersection of the two adjacent bottom side length straight lines is used as the marking point in the X-axis and Y-axis directions. C , and get the marked points C The measurement coordinates of .

[0029] like Figure 3 and Figure 4 As shown, this embodiment uses the first quadrant k Taking the sampling of the tip sharpness feature unit as an example, k Starting from the top tip of the sharpness feature unit, scanning in a single downward direction to Z The sampling interval of the axis direction is set to .by Figure 3 The fitting line segment ( , ) and line segment ( , ) as the intersection point of the X-axis and Y-axis directions , to fit the line segment ( , ) and line segment ( , ) as the marking point in the Z-axis direction . kis the number of the tip sharpness feature unit in the quadrant.

[0030] S2: Based on the installation position of the tip sharpness feature unit on the substrate and the size parameters of the tip sharpness feature unit, obtain the marking point on the tip sharpness feature unit D , Mark Point C Theoretical coordinates.

[0031] In this embodiment, the distance between the cylindrical lens and the nearest tip sharpness feature unit in the X-axis direction is set to 2 T x , the distance from the Y axis is 0; the distance between the third reflector and the nearest tip sharpness feature unit in the X axis direction is 2 T x , the distance from the Y axis is 0; the distance between the first reflector and the nearest tip sharpness feature unit in the Y axis direction is 2 T y , the distance from the Y axis is 0; the distance between the second reflector and the nearest tip sharpness feature unit in the Y axis direction is 2 T y , the distance from the Y axis is 0.

[0032] In the entire tracking calibration coordinate system O-XYZ, O is the coordinate origin, and statistical classification is performed in four quadrants. Assume that in the first quadrant, there are m 1* n 1 tip sharpness characteristic unit, sorted in clockwise order, where k Marking points of the tip sharpness feature unit in the X-axis and Y-axis directions C 1, k , mark the point in the tracking calibration coordinate system C 1, k The theoretical coordinates are ( Tx× ( k%n 1+1 / 2), Ty× ( k / / m 1+1 / 2),0), at the same time k The tip sharpness feature unit is marked in the Z-axis direction D 1, k The theoretical coordinates are ( Tx× ( k%n 1+1 / 2)- L / 2, Ty× ( k / / m 1+1 / 2)+ L / 2, H ), % Indicates divisibility, / / Indicates the remainder.

[0033] Assume that in the second quadrant, coexistence m 2*n 2 tip sharpness characteristic units, sorted in clockwise order, where the first k The tip sharpness feature unit marks points in the X-axis and Y-axis directions C 2, k , its theoretical coordinates in the tracking calibration coordinate system are (- Tx× ( k%n 2+1 / 2) , Ty× ( k / / m 2+1 / 2),0), and at the same time obtain the marking point of the tip sharpness feature unit in the Z axis direction D 2, k The theoretical coordinates are (- Tx× ( k%n 1+1 / 2)+ L / 2, Ty× ( k / / m 2+1 / 2)+ L / 2, H ).

[0034] Assume that in the third quadrant, coexistence m 3* n 3 tip sharpness characteristic units, sorted in clockwise order, among which the first k Marking points of the tip sharpness feature unit in the X-axis and Y-axis directions C 3, k , its theoretical coordinates in the tracking calibration coordinate system are (- Tx× ( k%n 3+1 / 2),- Ty× ( k / / m 1+1 / 2), 0), and at the same time obtain the marking point of the tip sharpness feature unit in the Z axis direction D 3, k The theoretical coordinates are (- Tx× ( k%n 3+1 / 2)+ L / 2, - Ty× ( k / / m 3+1 / 2)- L / 2, H ).

[0035] Assume that in the fourth quadrant, coexistence m 4* n 4 tip sharpness characteristic units, sorted in clockwise order, among which k The tip sharpness feature unit marks points in the X-axis and Y-axis directions C 4, k , its theoretical coordinates in the tracking calibration coordinate system are ( Tx× ( k%n 1+1 / 2),- Ty× ( k / / m 1+1 / 2), 0), and at the same time obtain the marking point of the tip sharpness feature unit in the Z axis direction D 4, k The theoretical coordinates are ( Tx× ( k%n 1+1 / 2)- L / 2,- Ty× ( k / / m 1+1 / 2)- L / 2, H ).

[0036] When designing the metrology standard 3, the height of the sharpness characteristic unit of the tip is usually designed H and bottom side length L Equal. The interval between adjacent sharpness characteristics T x and T This is not only beneficial to the machining accuracy of the standard, but also makes it easier to eliminate feature errors in symmetric error analysis.

[0037] Using the tip sharpness feature unit and the laser-assisted system 2, it is possible to correct the measurement errors in the X / Y / Z axis directions of micro-nano measuring instruments such as scanning probe microscopes.

[0038] S3: Use the marking points on the tip sharpness feature units at the corresponding positions in the four quadrants D , Mark Point C Theoretical coordinates and measured coordinates of the calculated marker points D , Mark Point C The average difference between the theoretical coordinates and the measured coordinates is used to obtain the error correction values ​​of the probe system 1 in the X-axis, Y-axis, and Z-axis directions. Typically, a continuous and equal number of tip sharpness feature units are selected in each quadrant as the measured objects to correct and evaluate the spatial measurement errors of micro-nano measurement instruments such as scanning probe microscopes.

[0039] In this embodiment, the number of tip sharpness characteristic units in the four quadrants is defined to be the same, that is, the number of tip sharpness characteristic units vertically distributed in the four quadrants is m 1 and m 2. m 3. m 4Equal, laterally distributed number of tip sharpness feature units n 1 and n 2. n 3. n 4 are equal, adjacent quadrants are X axis 、Y Axisymmetrical distribution.

[0040] During the measurement process, Figure 6As shown, four adjacent tip sharpness feature units are selected in the first quadrant as the measured objects, that is, the first four adjacent tip sharpness feature units in the first quadrant are selected as the measured objects. k - m 1-1, k - m 1. k -1. k The second quadrant is based on the tip sharpness characteristic unit distribution of the first quadrant, with four adjacent tip sharpness characteristic units symmetrical on the Y axis as the measured objects, that is, the order of the first and second quadrants. k - m 2-1, k - m 2. k -1. k The third quadrant selects the four adjacent tip features symmetrical at the origin based on the tip sharpness feature unit in the first quadrant as the measured objects, that is, the first tip features in the third quadrant. k - m 3-1, k - m 3. k -1. k The fourth quadrant selects the tip sharpness feature unit based on the first quadrant, with four adjacent tip features symmetrical on the X axis as the measured objects, that is, the first in the fourth quadrant. k - m 4-1、 k - m 4. k -1. k The distribution of cutting-edge features.

[0041] The error characterization is as follows: Scanning probe microscopy and other micro-nano measurement instruments acquire sampling points of the selected measured object and fit the marking points in the first quadrant respectively. The measured coordinates of the mark point in the second quadrant are obtained in the same way. The measured coordinates of the marked point in the 3rd quadrant The measured coordinates of the marked point in the 4th quadrant The measurement coordinates of .

[0042] X Axis direction error correction value passes through the mark point and , and , and , and , and , and , and , and The corresponding measured coordinates and theoretical coordinates are calculated. The measured coordinates and theoretical coordinates corresponding to the 8 pairs of marked points are calculated. X The average value of the coordinate difference in the axis direction is X Axis direction error correction value. Similarly, the measured coordinates and theoretical coordinates corresponding to the 8 pairs of marking points are Y The average value of the coordinate difference in the axis direction is Y Axis direction error correction value.

[0043] Similarly, Z Axis direction error correction value passes through the mark point 、 、 、 , 、 、 、 、 、 、 、 、 、 、 、 The corresponding measured coordinates and theoretical coordinates are calculated. The measured coordinates and theoretical coordinates corresponding to the 16 marking points are in Z The average value of the coordinate difference in the axis direction is taken as the height deviation, and the height deviation is Z Axis direction error correction value.

[0044] This invention aims to achieve online calibration and traceability of measurement deviations for scanning probe-based micro- and nanoscale measuring instruments (4). It designs a grating standard template with periodic tip sharpness characteristic units, also known as a metrology standard (3), and establishes a laser interferometer optical path as a laser-assisted system (2). This system performs online tracking and calibration of the probe's nanometer measurements along the X, Y, and Z axes. Based on a common set of nanoscale standards, metrological data associations are established between different nanometer measuring instruments. Through intelligent data comparison, data from nanometer measuring instruments across the entire region, measuring the same object under test, is compared, thereby achieving uniform and reliable measurement values ​​across the entire region.

Claims

1. A micro-nano periodic tip sharpness feature measurement and evaluation system, characterized in that: Used in conjunction with probe-type micro-nano scale measurement instruments, including: A metrology standard comprising a substrate, the upper end of which is provided with a plurality of tip sharpness characteristic units distributed in a uniform array, each of the tip sharpness characteristic units comprising a square base and a pyramid-shaped tip, and the four side surfaces of the tip sharpness characteristic unit all having an inwardly concave arc surface structure; The data processing module is a probe system of the probe-type micro-nanoscale measuring instrument that moves between a plurality of tip sharpness feature units. The probe system collects contour data of the tip sharpness feature units and sends the data processing module. The data processing module analyzes the contour data and calculates the error correction value of the probe system.

2. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 1, characterized in that: The four side surfaces of the tip sharpness characteristic unit are the same concave arc surface structure, and the side edges of two adjacent arc surface structures intersect to form an arc-shaped edge.

3. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 2, characterized in that: The bottom side length of the tip sharpness feature unit is L , height is H ,and H = L , the radius of the arc-shaped edge is r , radian angle is α , and satisfies , θ is the tip angle of the tip sharpness feature unit.

4. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 3, characterized in that: It also includes a laser-assisted system, which includes a laser source, a cylindrical lens installed above the substrate, and a triangular beam splitter. The laser emitted by the laser source passes through the cylindrical lens and reaches the triangular beam splitter. The triangular beam splitter splits the laser beam into a cross-shaped light path. The cross-shaped light path splits the substrate into four quadrants, and a number of the tip sharpness feature units are evenly distributed in the four quadrants.

5. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 4, characterized in that: The substrate has a rectangular structure, the cylindrical lens is installed on one side edge of the substrate, and the other three sides of the substrate are respectively provided with a first reflector, a second reflector and a third reflector. The laser emitted by the laser source passes through the cylindrical lens, the triangular beam splitter, the first reflector, the second reflector and the third reflector to form a cross-intersecting incident light path and reflected light path.

6. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 5, characterized in that: A receiver is provided on the laser source, the laser source is provided on a side close to the cylindrical lens, the triangular beam splitter is provided in the middle of the substrate, the laser light emitted by the laser source passes through the cylindrical lens to form an incident light path, the incident light path passes through the triangular beam splitter and is directly incident on the third reflector to form a first incident light path, the third reflector reflects the first incident light path to form a first reflected light path, the first reflected light path then passes through the triangular beam splitter to form a reflected light path, and the reflected light path is received by the receiver through the cylindrical lens; The incident light path is refracted by the triangular beam splitter to form a second incident light path perpendicular to the incident light path and the two sides of the first incident light path. The second incident light path is reflected by the first reflector and the second reflector to form a second reflected light path. The second reflected light path is refracted by the triangular beam splitter and merged into the reflected light path.

7. The micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 6, characterized in that: It also includes a tracking and calibration coordinate system, wherein the X-axis of the tracking and calibration coordinate system is the line between the cylindrical lens and the third reflector, the Y-axis is the line between the first reflector and the second reflector, the Z-axis is perpendicular to the substrate, and the origin is located at the center of the triangular beam splitter; the number of tip sharpness feature units in the four quadrants is equal, and the distribution positions are symmetrical based on the X-axis and the Y-axis.

8. A method for evaluating measurement deviation using the micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 7, characterized in that: The following steps are involved: S1: The metrology standard is installed at the lower end of the probe system of the probe-type micro-nanoscale measuring instrument. The probe system drives the probe to take sampling points from two adjacent arc surface structures on the tip sharpness feature unit, and fits the marking points in the Z-axis direction and the marking points in the X-axis and Y-axis directions; S2: Based on the installation position of the tip sharpness feature unit on the substrate and the size parameters of the tip sharpness feature unit, obtain the marking point on the tip sharpness feature unit D , Mark Point C Theoretical coordinates of S3: Use the marking points on the tip sharpness feature units at the corresponding positions in the four quadrants D , Mark Point C Theoretical coordinates and measured coordinates of the calculated marker points D , Mark Point C The average difference between the theoretical coordinates and the measured coordinates is used to obtain the error correction values ​​of the probe system in the X-axis direction, Y-axis direction and Z-axis direction.

9. The method for evaluating measurement deviation using a micro-nano periodic tip sharpness feature measurement and evaluation system according to claim 8, characterized in that: The step S1 comprises: S11: The probe system drives the probe to move downward from the top of the tip sharpness feature unit, and fits the surface of the curved structure during the movement, and sets the height of the probe to , the probe descends each time The position of the arc surface structure reached at the time is taken as the sampling point, and the coordinates of the sampling point in the tracking calibration coordinate system are collected; S12: Repeat step S11 n times, the probe fits the arc surface structure and decreases n After the process, the same descending height corresponds to n The coordinates of the sampling points; S13: Exploit n The coordinates of the adopted points are fitted to the sampling lines corresponding to the same drop height. Two sampling lines are fitted based on the same drop height of the adjacent curved surface structures. The intersection of the two sampling lines is used as the sampling intersection point, and the coordinates of the sampling intersection point are obtained; S14: The number of times the probe descends on the curved surface structure according to the setting i , we get the arc-shaped edges where adjacent arc surface structures intersect. i sampling intersections, and using i The coordinates of the sampling intersection points are fitted into the circular arc curve where the circular arc edge is located; S15: Fit the arc curves where two adjacent arc edges are located on the tip sharpness feature unit, and the intersection of the two adjacent arc curves is used as the marking point in the Z axis direction D , and get the marked points D The measured coordinates of S16: Set the probe's descent height H The probe is lowered from the top of the curved surface structure to fit the curved surface structure. H Afterwards, the intersection point between the probe and the arc surface structure is obtained as the base point, and the coordinates of the base point are collected; S17: Repeat step S16 to obtain a drop n After the process n coordinates of the base points, and using n The coordinates of the base points are fitted to the straight line of the bottom side length of the tip sharpness characteristic unit, and the intersection of the two adjacent bottom side length straight lines is used as the marking point in the X-axis and Y-axis directions. C , and get the marked points C The measurement coordinates of .

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