Adhesive and preparation method thereof

Abstract

The invention discloses an adhesive and a preparation method thereof, the adhesive is used for bonding perfluoroether rubber and metal, and the adhesive is prepared from the following raw materials in parts by weight based on 100 parts of the adhesive: 80-98 parts of absolute ethyl alcohol; 0.2 to 5 parts by weight of a borane ammonia complex; 1 to 10 parts by weight of vinyl silane; and 1-5 parts by weight of silica sol. The adhesive provided by the invention is a combination of a borane ammonia complex, vinyl silane, nano silicon dioxide sol and absolute ethyl alcohol in specific parts; by selecting the combination of the borane ammonia complex, the silane coupling agent KH570 and the nano silicon dioxide sol to replace the existing common perfluoroether rubber / metal adhesive, the perfluoroether rubber / metal adhesive has excellent peel strength and high temperature resistance, and can be used for manufacturing door plates and racket products of semiconductor equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of industrial manufacturing, in particular to an adhesive and a method for manufacturing the same. BACKGROUND

[0002] Perfluoroelastomer (FFKM) is a high-performance sealing material with excellent high-temperature resistance, chemical corrosion resistance and elasticity. It was developed by DuPont in 1968, and its main component is perfluoroether, which combines the chemical resistance of polytetrafluoroethylene (Teflon) and the properties of rubber.

[0003] Perfluoroelastomer has better high-temperature compression permanent deformation performance than fluororubber. The use temperature range of perfluoroelastomer is 260-290℃, and it can intermittently withstand high temperature of 316℃, and even at 300℃, the compression deformation rate is only below 50%. The maximum temperature resistance of perfluoroelastomer can reach 327℃, and even in a constant temperature of 316℃ or an intermittent high temperature environment of 343℃, it can still maintain its elasticity and resilience performance. In addition, perfluoroelastomer has excellent corrosion resistance to more than 1600 kinds of chemical solvents such as strong acid, strong base and organic solvent. In semiconductor manufacturing, perfluoroelastomer is used in high-precision and demanding links, such as the sealing of exhaust valves in chip anhydrous etching method, the sealing of optical filters and electrical coupling in optical masking test, and the sealing of vacuum chambers and tank covers in plasma chemical vapor deposition test process.

[0004] The unique molecular structure of perfluoroelastomer gives it high-temperature resistance and excellent corrosion resistance to more than 1600 kinds of chemical solvents such as strong acid, strong base and organic solvent, but also makes it difficult to bond with other substrates. The commonly used bonding methods and adhesives are difficult to achieve ideal bonding effect, which causes certain difficulties in its application.

[0005] The existing perfluoroelastomer adhesives are mainly divided into silane type and resin type, which have the defects of low peel strength, unstable performance, poor high-temperature resistance, etc. Most of the commercially available types are used for fluororubber hot vulcanization bonding, and it is difficult to achieve the expected effect for perfluoroelastomer bonding. SUMMARY

[0006] A series of simplified concepts are introduced in the summary section, which are simplifications of the prior art in the field. This will be further described in the detailed description section. The summary section of the present application does not mean to attempt to limit the key features and necessary technical features of the claimed technical solution, nor does it attempt to determine the protection scope of the claimed technical solution.

[0007] The technical problem to be solved by the present application is to provide an adhesive with excellent peel strength and high-temperature resistance for manufacturing door panels and racket products for semiconductor equipment and a method for manufacturing the same.

[0008] To solve the above technical problems, the adhesive provided by the present application is used for the adhesion of perfluoroether rubber and metal, and the preparation raw materials of the adhesive include, by weight: anhydrous ethanol, 80-98 parts by weight; borane ammine complex, 0.2-5 parts by weight; vinyl silane, 1-10 parts by weight; nano-silica sol, 1-5 parts by weight.

[0009] Preferably, the borane ammine complex of the adhesive is borane-N,N-diethyl aniline.

[0010] The present application provides a preparation method of the adhesive, and the preparation method of the adhesive includes: mixing the borane ammine complex, the vinyl silane and the nano-silica sol in anhydrous ethanol.

[0011] Preferably, the preparation method is mixed in a dropwise manner.

[0012] Preferably, the preparation method has a mixing temperature range of 50-60°C, such as 51°C, 52°C, 53°C, 54°C, 55°C, 56°C, 57°C, 58°C or 59°C.

[0013] Preferably, the preparation method has a mixing time range of 100-180 minutes, such as 105 minutes, 120 minutes, 130 minutes, 140 minutes, 150 minutes, 160 minutes or 170 minutes.

[0014] The present application provides an adhesive composed of specific proportions of borane ammine complex, vinyl silane, nano-silica sol and anhydrous ethanol; by selecting the combination of borane ammine complex, silane coupling agent KH570 and nano-silica sol to replace the existing commonly used perfluoroether rubber / metal adhesive, the perfluoroether rubber / metal has excellent peel strength and high temperature resistance, and can be used to manufacture door panels of semiconductor equipment and racket products. It should be noted that the racket of the present application is a mechanical structure of semiconductor equipment and not a sports equipment, which is a mechanical structure for wafer handling or clamping. DETAILED DESCRIPTION

[0015] The present application is further explained in the following detailed description with reference to the accompanying drawings, wherein: Other advantages and novel features of the present application will become apparent from the following detailed description when considered in conjunction with the drawings. The application can be put into practice by different embodiments and the details of the description can be applied based on different points of view, with various modifications or changes being made without departing from the general inventive concept. It is to be understood that the following examples and features in the examples can be combined with each other, without conflict, unless otherwise specifically noted. The following exemplary embodiments of the present application can be implemented in any of various ways, and should not be construed to be limited to the specific embodiments set forth herein. It should be understood that these embodiments have been provided only for the purpose of making the present disclosure complete and complete, and to fully convey the technical solutions of the exemplary embodiments to those skilled in the art. It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. Different is that when an element is referred to as being "directly connected" or "directly coupled" to another element, there is no intermediate element.

[0016] First embodiment; The present application provides an adhesive, which comprises the following components by weight based on 100 parts by weight of the adhesive: Anhydrous ethanol, 90 parts by weight; Silane coupling agent KH570, 6 parts by weight; Borane-N,N-diethylaniline, 3 parts by weight; Nanosilica sol, 1 part by weight.

[0017] The method for preparing the adhesive provided in this embodiment comprises: mixing borane-N,N-diethylaniline, silane coupling agent KH570, nanosilica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature is in the range of 50°C to 60°C, wherein the mixing temperature can be any integer temperature within the aforementioned temperature range, to obtain the perfluoroether rubber / metal adhesive.

[0018] Second embodiment; The present application provides an adhesive, which comprises the following components by weight based on 100 parts by weight of the adhesive: Anhydrous ethanol, 85 parts by weight; Silane coupling agent KH570, 8 parts by weight; Borane-N,N-diethylaniline, 4 parts by weight; Nanosilica sol, 3 parts by weight.

[0019] The preparation method of the adhesive provided in the embodiment comprises: mixing borane-N,N-diethyl aniline, silane coupling agent KH570, nano-silica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature ranges from 50 DEG C to 60 DEG C, wherein the mixing temperature can be any integer temperature in the aforementioned temperature range, to obtain the perfluoroether rubber / metal adhesive.

[0020] The third embodiment; The present application provides an adhesive, which comprises the following components by weight based on 100 parts of the adhesive: anhydrous ethanol, 88 parts by weight; silane coupling agent KH570, 5 parts by weight; borane-N,N-diethyl aniline, 5 parts by weight; nano-silica sol, 2 parts by weight.

[0021] The preparation method of the adhesive provided in the embodiment comprises: mixing borane-N,N-diethyl aniline, silane coupling agent KH570, nano-silica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature ranges from 50 DEG C to 60 DEG C, wherein the mixing temperature can be any integer temperature in the aforementioned temperature range, to obtain the perfluoroether rubber / metal adhesive.

[0022] The fourth embodiment; The present application provides an adhesive, which comprises the following components by weight based on 100 parts of the adhesive: anhydrous ethanol, 95 parts by weight; silane coupling agent KH570, 1 part by weight; borane-N,N-diethyl aniline, 3 parts by weight; nano-silica sol, 1 part by weight.

[0023] The preparation method of the adhesive provided in the embodiment comprises: mixing borane-N,N-diethyl aniline, silane coupling agent KH570, nano-silica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature ranges from 50 DEG C to 60 DEG C, wherein the mixing temperature can be any integer temperature in the aforementioned temperature range, to obtain the perfluoroether rubber / metal adhesive.

[0024] The first comparative example; A perfluoroether rubber / metal adhesive, which comprises the following components by weight based on 100 parts of the adhesive: anhydrous ethanol, 90 parts by weight; silane coupling agent KH570, 6 parts by weight; borane-N,N-diethyl aniline, 0 parts by weight; Nano-silica sol, 4 parts by weight.

[0025] The preparation method of the adhesive provided by the present comparative example comprises: mixing borane-N,N-diethyl aniline, silane coupling agent KH570, nano-silica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature ranges from 50°C to 60°C, to obtain the perfluoroether rubber / metal adhesive.

[0026] The second comparative example; A perfluoroether rubber / metal adhesive, in terms of 100 parts by weight of the adhesive, comprises the following components in parts by weight: Anhydrous ethanol, 90 parts by weight; Silane coupling agent KH570, 5 parts by weight; Borane-N,N-diethyl aniline, 5 parts by weight; Nano-silica sol, 0 parts by weight.

[0027] The preparation method of the adhesive provided by the present comparative example comprises: mixing borane-N,N-diethyl aniline, silane coupling agent KH570, nano-silica sol and anhydrous ethanol under stirring for 180 min under the condition that the mixing temperature ranges from 50°C to 60°C, to obtain the perfluoroether rubber / metal adhesive.

[0028] Sample preparation: After the aluminum part is degreased with acetone, pickled and sandblasted, the prepared perfluoroether rubber / metal adhesive is applied, dried at 60°C for 2 hours, and then the prepared perfluoroether rubber compound (peroxide vulcanization system) is attached to the surface of the aluminum part and placed in a mold. The first stage vulcanization condition is 15 MP of pressure at 170°C for 10 minutes, and the second stage vulcanization condition is 230°C for 24 hours. After taking out of the oven, the peel strength is tested after 24 hours of placement at 25°C.

[0029] Performance test: (1) Peel strength: tested according to the test standard provided in GB / T 7122-1996; The perfluoroether rubber / metal composite samples obtained by the adhesives of the first to fourth examples, the first comparative example and the second comparative example are tested for peel strength according to the above test method, and the test results are shown in Table 1.

[0030] Table 1 90° peel strength of perfluoroether rubber / aluminum; Peeling strength (unit: N / cm) Peeling strength after 300°C 7-day aging (unit: N / cm) First embodiment 93 96 Second embodiment 82 86 Third embodiment 85 89 Fourth embodiment 73 81 First comparative example 5 6 Second comparative example 3 5 According to the data in Table 1, it can be concluded that the peel strength of the adhesive provided by the present application can reach more than 70 N / cm, and the peel strength is better after one week of high temperature aging.

[0031] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0032] The application has been described in detail by specific reference to implementations and embodiments. These are not intended to limit the application, but to explain the principles of the application. Many variations and modifications of the application can be made by those skilled in the art without departing from the spirit or scope of the application, and it is to be understood that such variations and modifications are to be included within the scope of the application.

Claims

1. An adhesive for bonding perfluoroether rubber and metal, characterized in that: Based on 100 parts by weight of the adhesive, the raw materials for preparing the adhesive include, in parts by weight: Anhydrous ethanol, 80-98 parts by weight; Borane ammonia complex, 0.2-5 parts by weight; Vinylsilane, 1 to 10 parts by weight; Nano-silica sol, 1-5 parts by weight.

2. The adhesive according to claim 1, wherein: The borane ammonia complex is borane-N,N-diethylaniline.

3. A method for producing an adhesive, which is used to produce the adhesive according to claim 1 or 2, characterized in that: include: The borane-ammine complex, vinylsilane and nano-silica sol are mixed in anhydrous ethanol.

4. The adhesive preparation method according to claim 3, wherein: Mix by adding dropwise.

5. The adhesive preparation method according to claim 3, wherein: The mixing temperature range is 50℃~60℃.

6. The adhesive preparation method according to claim 3, wherein: The mixing time ranges from 100 min to 180 min.