Ultralow-temperature vacuum pump with efficient air compression function

Abstract

The invention discloses an ultralow-temperature vacuum pump with an efficient air compression function, and relates to the technical field of low-temperature vacuum pumps, the ultralow-temperature vacuum pump comprises a low-temperature vacuum pump body, the low-temperature vacuum pump body comprises a barrel, an inner cavity of the barrel is fixedly connected with a cold plate body, and the bottom of the barrel is fixedly communicated with a backing pump; a defrosting mechanism is arranged on the surface of the barrel; according to the ultralow-temperature vacuum pump with the efficient air compression function, by arranging the defrosting unit and the dehumidification unit, the purpose of reducing frosting can be achieved, when the low-temperature vacuum pump operates, moisture is effectively prevented from entering the low-temperature vacuum pump, and the air compression efficiency is improved. The frosting speed of the adsorption cold plate in the low-temperature vacuum pump is reduced, so that the adsorption time of the adsorption cold plate is prolonged, meanwhile, frost on the surface of the adsorption cold plate can be effectively removed, and the operation duration of the low-temperature vacuum pump and the utilization rate of equipment are improved.

Description

Technical Field

[0001] This invention relates to the field of cryogenic vacuum pump technology, specifically to an ultra-low temperature vacuum pump with a high-efficiency compressed air function. Background Technology

[0002] A cryogenic vacuum pump is a device that uses the principles of cryogenic condensation and adsorption to capture gas molecules, thereby achieving a high vacuum or ultra-high vacuum environment. Its core principle is to condense or adsorb gas molecules onto a cold surface at extremely low temperatures, thereby rapidly reducing the gas pressure in the system.

[0003] Existing cryogenic vacuum pumps are prone to frost buildup inside after a period of use. This saturates the adsorption sites of the adsorbent material, significantly reducing the pumping rate and even making it impossible to maintain the target vacuum level. This necessitates shutdown and regeneration of the cryogenic vacuum pump, shortening its effective operating time. To address this, we propose an ultra-low temperature vacuum pump with a high-efficiency compressed air function.

[0004] Combining the above issues, we find that existing cryogenic vacuum pumps on the market cannot simultaneously avoid the problems mentioned above when in use. Even if they can be solved, they require the use of external tools, thus failing to achieve the desired effect. Therefore, we propose an ultra-low temperature vacuum pump with a high-efficiency compressed air function. Summary of the Invention

[0005] The purpose of this invention is to provide an ultra-low temperature vacuum pump with a high-efficiency compressed air function to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an ultra-low temperature vacuum pump with high-efficiency compressed air function, comprising a low temperature vacuum pump body, the low temperature vacuum pump body comprising a cylinder, a cold plate body fixedly connected to the inner cavity of the cylinder, a backing pump fixedly connected to the bottom of the cylinder, and a defrosting mechanism provided on the surface of the cylinder. The defrosting mechanism includes a defrosting unit and a dehumidification unit, wherein, The defrosting unit is disposed on the surface of the cylinder; The dehumidification unit is located on one side of the defrosting unit, and the dehumidification unit is used in conjunction with the defrosting unit; A compression heating mechanism is provided on one side of the cylinder.

[0007] Preferably, the defrosting unit includes a circular shell disposed above the cylindrical body. A dual-axis motor is fixedly connected to the surface of the circular shell. One output end of the dual-axis motor passes through the inner cavity of the circular shell and is fixedly connected to an air-blowing fan blade. A conical guide plate is provided in the inner cavity of the circular shell. An arc-shaped guide ring is fixedly connected to the surface of the cylindrical body. A linkage rod is fixedly connected to the surface of the air-blowing fan blade. One end of the linkage rod passes through one side of the conical guide plate and is fixedly connected to a second gear. A support plate is fixedly connected to the inner cavity of the cylindrical body. A limit hole is formed on the surface of the support plate. A rack is provided on one side of the support plate. Two T-shaped blocks are fixedly connected to the surface of the rack.

[0008] Preferably, one end of the T-shaped block extends through to one side of the support plate, and the T-shaped block is slidably connected to the inner cavity of the limiting hole. Half gears are provided on both sides of the rack, and the half gears cooperate with the rack. A rotating rod is fixedly connected to the surface of the half gear. One end of the rotating rod extends through to the outside of the cylinder and is fixedly connected to a first gear. The first gear and the second gear mesh with each other. Three hollow rods are provided on both sides of the cold plate body. A hollow scraper is fixedly connected to the surface of the hollow rod. A connecting rod is fixedly connected between two hollow rods, and one end of the connecting rod is fixedly connected to the surface of the rack.

[0009] Preferably, U-shaped plates are fixedly connected to both sides of the circular shell, one end of the U-shaped plate is fixedly connected to the surface of the cylinder, a support frame is fixedly connected to the surface of the arc-shaped guide ring, one end of the rotating rod passes through the support frame and is rotatably connected to the support frame through a bearing, a stabilizing ring is rotatably sleeved on the surface of the linkage rod through a bearing, both ends of the stabilizing ring are fixedly connected to the surface of the support frame, and one side of the conical guide plate is fixedly connected to one end of the support frame.

[0010] Preferably, the dehumidification unit includes a dehumidification cylinder disposed on one side of a circular shell. A moisture-absorbing mesh plate is fixedly connected to the inner cavity of the dehumidification cylinder. An air-suction fan blade is disposed in the inner cavity of the dehumidification cylinder. A short rod is fixedly connected to the surface of the air-suction fan blade. One end of the short rod extends through to the outside of the dehumidification cylinder. A synchronous pulley is fixedly sleeved on one of the output ends of the dual-axis motor and on the surface of the short rod. A synchronous belt is sleeved on the surfaces of the two synchronous pulleys for common transmission.

[0011] Preferably, the inner cavity of the dehumidifier cylinder is fixedly connected to two semiconductor coolers, one end of which extends through to the outside of the dehumidifier cylinder, and the surface of the dehumidifier cylinder is fixedly connected to two conveying pipes, one end of which is fixedly connected to the surface of the circular shell.

[0012] Preferably, the surface of the air intake fan blade is fitted with a support ring via a bearing, both ends of the support ring are fixedly connected to the inner wall of the dehumidification cylinder, one side of the dehumidification cylinder is fixedly connected to an air inlet pipe, one end of the dehumidification cylinder is fixedly connected to a drain pipe, and a fixing ring is fixedly fitted on the surface of the dehumidification cylinder, one end of the fixing ring being fixedly connected to the surface of the circular shell.

[0013] Preferably, the compression and heating mechanism includes a scroll compressor, which is disposed on one side of the cylinder. The inlet end of the scroll compressor is fixedly connected to a gas supply pipe. One end of the gas supply pipe is fixedly connected to a first three-way pipe. One end of the first three-way pipe is fixedly connected to the outlet end of the pre-pump. A first solenoid valve is fixedly installed at both ends of the first three-way pipe. The outlet end of the scroll compressor is fixedly connected to a second three-way pipe. One telescopic hose and a first connecting pipe are fixedly connected at both ends of the second three-way pipe, respectively.

[0014] Preferably, one end of the first telescopic hose extends into the inner cavity of the cylinder and is fixedly connected to the surface of one of the hollow rods. A short pipe is fixedly connected between the hollow rods. The inner cavity of the cylinder is provided with two discharge pipes. The air inlet end of the discharge pipe is fixedly connected to the surface of the hollow rod. The air outlet end of the discharge pipe is fixedly connected to a second telescopic hose. One end of the second telescopic hose extends to the outside of the cylinder. A connecting pipe is fixedly connected between the two hollow rods.

[0015] Preferably, an annular tube is fixedly connected to the inner cavity of the dehumidifier cylinder, one end of the annular tube extends to the outside of the dehumidifier cylinder and is fixedly connected to one end of the connecting pipe, a second solenoid valve is fixedly installed on the surface of the annular tube, an air outlet is opened on the surface of the annular tube, a mounting plate is fixedly connected to one side of the cylinder, and one side of the scroll compressor is fixedly connected to the surface of the mounting plate.

[0016] Compared with the prior art, the beneficial effects of the present invention are: 1. By setting up a defrosting unit and a dehumidification unit, this invention can reduce frost formation. During the operation of the low-temperature vacuum pump, it effectively prevents moisture from entering the low-temperature vacuum pump, reduces the frost formation rate of the adsorption cold plate inside the low-temperature vacuum pump, thereby increasing the adsorption time of the adsorption cold plate. At the same time, it can effectively remove frost from the surface of the adsorption cold plate, improving the operating time of the low-temperature vacuum pump and the utilization rate of the equipment.

[0017] 2. By setting up a compression and heating mechanism, this invention can accelerate regeneration. When the cryogenic vacuum pump is shut down for regeneration, it can effectively improve the efficiency of defrosting and regeneration, enabling the cryogenic vacuum pump to defrost and regenerate more quickly, shortening the regeneration time, thereby ensuring the subsequent operation time of the cryogenic vacuum pump and improving the utilization rate of the equipment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the rear view structure of the present invention; Figure 3 For the present invention Figure 2 Enlarged view of A in the middle; Figure 4 This is a schematic diagram of the structure of the cryogenic vacuum pump body of the present invention; Figure 5 For the present invention Figure 4 Enlarged view of B in the middle; Figure 6 This is a schematic cross-sectional view of the cylindrical body of the present invention; Figure 7 This is a schematic diagram of the structure of the half-gear of the present invention; Figure 8 This is a partial structural schematic diagram of the defrosting unit of the present invention; Figure 9 This is a schematic diagram of the hollow rod structure of the present invention; Figure 10 This is a schematic diagram of the cross-sectional structure of the circular shell of the present invention; Figure 11 For the present invention Figure 10 Enlarged view of C; Figure 12 For the present invention Figure 10 Enlarged view of D; Figure 13 This is a schematic diagram of the structure of the conical guide plate of the present invention; Figure 14 This is a schematic diagram of the dehumidifier cylinder of the present invention; Figure 15 This is a cross-sectional view of the dehumidifier cylinder of the present invention, viewed from below.

[0019] In the diagram: 1. Low-temperature vacuum pump body; 101. Cylinder; 102. Backing pump; 103. Cold plate body; 2. Defrosting mechanism; 21. Defrosting unit; 2101. Circular shell; 2102. Dual-shaft motor; 2103. U-shaped plate; 2104. Support frame; 2105. Arc-shaped guide ring; 2106. Rotating rod; 2107. First gear; 2108. Support plate; 2109. Half gear; 2110. Limiting hole; 2111. T-block; 2112. Hollow rod; 2113. Linkage rod; 2114. Hollow scraper; 2115. Rack; 2116. Connecting rod; 2117. Air blowing fan blade; 2118. Conical guide plate; 2119. Second gear; 2120. Stabilizing ring; 22. Dehumidification unit; 2201 1. Dehumidifier cylinder; 2202. Fixing ring; 2203. Inlet pipe; 2204. Delivery pipe; 2205. Synchronous belt; 2206. Synchronous pulley; 2207. Semiconductor cooler; 2208. Moisture-absorbing mesh plate; 2209. Drain pipe; 2210. Suction fan blade; 2211. Short rod; 2212. Support ring; 3. Compression and heating mechanism; 301. Scroll compressor; 302. Gas delivery pipe; 303. First solenoid valve; 304. First tee pipe; 305. Connecting pipe; 306. First telescopic hose; 307. Second telescopic hose; 308. Second tee pipe; 309. Discharge pipe; 310. Short pipe; 311. Connecting pipe; 312. Ring pipe; 313. Second solenoid valve; 314. Air outlet; 315. Mounting plate. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example 1: Please refer to Figures 1-15 The present invention provides a technical solution: an ultra-low temperature vacuum pump with high efficiency compressed air function, including a low temperature vacuum pump body 1, the low temperature vacuum pump body 1 including a cylinder 101, a cold plate body 103 fixedly connected to the inner cavity of the cylinder 101, a back pump 102 fixedly connected to the bottom of the cylinder 101, and a defrosting mechanism 2 provided on the surface of the cylinder 101. The defrosting mechanism 2 includes a defrosting unit 21 and a dehumidifying unit 22, wherein, Defrosting unit 21 is disposed on the surface of cylinder 101; The dehumidification unit 22 is located on one side of the defrosting unit 21, and the dehumidification unit 22 is used in conjunction with the defrosting unit 21.

[0022] As a further limitation of the present invention, the defrosting unit 21 includes a circular shell 2101, which is disposed above the cylinder 101. A dual-axis motor 2102 is fixedly connected to the surface of the circular shell 2101. One output end of the dual-axis motor 2102 passes through the inner cavity of the circular shell 2101 and is fixedly connected to a blower blade 2117. A conical guide plate 2118 is provided in the inner cavity of the circular shell 2101. An arc-shaped guide ring 2105 is fixedly connected to the surface of the cylinder 101. A linkage rod 2113 is fixedly connected to the surface of the blower blade 2117. One end of the linkage rod 2113 passes through one side of the conical guide plate 2118 and is fixed. A second gear 2119 is connected to the inner cavity of the cylinder 101, and a support plate 2108 is fixedly connected to it. A limit hole 2110 is opened on the surface of the support plate 2108, and a rack 2115 is provided on one side of the support plate 2108. Two T-blocks 2111 are fixedly connected to the surface of the rack 2115. By setting the T-blocks 2111, the rack 2115 can be limited to ensure the stability of the rack 2115 when moving. This can effectively drive the hollow rod 2112 to move, so that the hollow scraper 2114 can effectively defrost the cold plate body 103, effectively reduce the generation of frost on the surface of the cold plate body 103, and ensure the adsorption effect.

[0023] One end of the T-shaped block 2111 extends through to one side of the support plate 2108. The T-shaped block 2111 is slidably connected to the inner cavity of the limiting hole 2110. Half gears 2109 are provided on both sides of the rack 2115. The half gears 2109 cooperate with the rack 2115. A rotating rod 2106 is fixedly connected to the surface of the half gear 2109. One end of the rotating rod 2106 extends through to the outside of the cylinder 101 and is fixedly connected to the first gear 2107. The first gear 2107 meshes with the second gear 2119. Three hollow parts are provided on both sides of the cold plate body 103. A hollow rod 2112 has a hollow scraper 2114 fixedly connected to its surface. A connecting rod 2116 is fixedly connected between two hollow rods 2112. One end of the connecting rod 2116 is fixedly connected to the surface of the rack 2115. By setting the connecting rod 2116, the hollow rods 2112 can be connected in pairs, thereby ensuring the stable movement between the hollow rods 2112. This allows the hollow scraper 2114 to effectively defrost the cold plate body 103, reducing the amount of frost on the surface of the cold plate body 103 and thus ensuring the adsorption effect of the cold plate body 103.

[0024] Both sides of the circular shell 2101 are fixedly connected to U-shaped plates 2103. One end of the U-shaped plates 2103 is fixedly connected to the surface of the cylinder 101. The surface of the arc-shaped guide ring 2105 is fixedly connected to the support frame 2104. One end of the rotating rod 2106 passes through the support frame 2104 and is rotatably connected to the support frame 2104 through a bearing. The surface of the linkage rod 2113 is rotatably fitted with a stabilizing ring 2120 through a bearing. Both ends of the stabilizing ring 2120 are fixedly connected to the surface of the support frame 2104. One side of the conical guide plate 2118 is fixedly connected to one end of the support frame 2104.

[0025] The dehumidification unit 22 includes a dehumidification cylinder 2201, which is disposed on one side of a circular shell 2101. A moisture-absorbing mesh plate 2208 is fixedly connected to the inner cavity of the dehumidification cylinder 2201. An air intake fan blade 2210 is disposed in the inner cavity of the dehumidification cylinder 2201. A short rod 2211 is fixedly connected to the surface of the air intake fan blade 2210. One end of the short rod 2211 extends to the outside of the dehumidification cylinder 2201. A synchronous pulley 2206 is fixedly sleeved on one output end of the dual-axis motor 2102 and on the surface of the short rod 2211. The surfaces of the two synchronous pulleys 2206 are driven together. A synchronous belt 2205 is provided. By setting the synchronous belt 2205, when one synchronous pulley 2206 rotates, the other synchronous pulley 2206 can also rotate, so that the suction fan blade 2210 can rotate to generate suction, which draws air into the dehumidification cylinder 2201 for dehumidification. This allows the dry air to be blown out through the blowing fan blade 2117, forming an annular air curtain, thereby blocking the surrounding moisture and effectively reducing the amount of humid air entering the low-temperature vacuum pump body 1. This effectively prevents frost formation on the cold plate body 103 and ensures the operating time of the low-temperature vacuum pump body 1.

[0026] Two semiconductor coolers 2207 are fixedly connected to the inner cavity of the dehumidification cylinder 2201. One end of the semiconductor cooler 2207 extends to the outside of the dehumidification cylinder 2201. Two conveying pipes 2204 are fixedly connected to the surface of the dehumidification cylinder 2201. One end of the conveying pipe 2204 is fixedly connected to the surface of the circular shell 2101. By setting the conveying pipe 2204, filtered dry air can be conveyed into the circular shell 2101 and discharged from the circular shell 2101 to form a dry annular air curtain. This can effectively block the external moisture and reduce the amount of moisture entering the low-temperature vacuum pump body 1, thereby effectively preventing internal frost formation and ensuring the utilization rate of the low-temperature vacuum pump body 1.

[0027] A support ring 2212 is mounted on the surface of the intake fan blade 2210 via a bearing. Both ends of the support ring 2212 are fixedly connected to the inner wall of the dehumidification cylinder 2201. An air inlet pipe 2203 is fixedly connected to one side of the dehumidification cylinder 2201, and a drain pipe 2209 is fixedly connected to one end of the dehumidification cylinder 2201. A fixing ring 2202 is fixedly mounted on the surface of the dehumidification cylinder 2201, and one end of the fixing ring 2202 is fixedly connected to the surface of the circular shell 2101.

[0028] By setting up defrosting unit 21 and dehumidifying unit 22, the purpose of reducing frost formation can be achieved. During the operation of the low-temperature vacuum pump, moisture is effectively prevented from entering the low-temperature vacuum pump, reducing the frost formation rate of the adsorption cold plate inside the low-temperature vacuum pump, thereby increasing the adsorption time of the adsorption cold plate. At the same time, it can effectively remove the frost on the surface of the adsorption cold plate, improving the operating time of the low-temperature vacuum pump and the utilization rate of the equipment.

[0029] The specific implementation of this embodiment is as follows: During use, the drain pipe 2209 is connected to an external pipe. When the cryogenic vacuum pump body 1 is in use, the dual-axis motor 2102 is started via an external controller and power supply. The dual-axis motor 2102 drives the air-blowing fan blade 2117 to rotate, causing the air-blowing fan blade 2117 to blow air. When the air-blowing fan blade 2117 rotates, it drives the linkage rod 2113 to rotate, thereby causing the second gear 2119 on it to rotate. The second gear 2119 drives the first gear 2107 to rotate, causing the rotating rod 2106 to rotate. The rotation of the rotating rod 2106 drives the half gear 2109 to rotate. At this time, one of the half gears 2109 meshes with the teeth on one side of the rack 2115, thereby allowing the rack 2115 to rotate. The rack 2115 moves while the T-block 2111 on the rack 2115 moves within the limiting hole 2110, ensuring the stability of the rack 2115's movement. As the rack 2115 moves, it drives the connecting rod 2116 to move, which in turn drives the hollow rod 2112 to move, allowing the hollow scraper 2114 to move and scrape the cold plate body 103, removing frost from its surface. When one half-gear 2109 disengages from the teeth on one side of the rack 2115, the other half-gear 2109 engages with the teeth on the other side of the rack 2115, causing the rack 2115 to move back. This reciprocating motion allows the hollow scraper 2114 to effectively scrape the surface of the cold plate body 103. Defrosting is performed on the surface, improving the defrosting effect and ensuring that the cold plate body 103 can effectively adsorb, increasing the time to reach saturation. While the dual-shaft motor 2102 is running, its synchronous pulley 2206 rotates, driving the synchronous belt 2205. The synchronous belt 2205 drives another synchronous pulley 2206, causing the short rod 2211 to rotate, thus rotating the suction fan blades 2210 to draw in air. Air is then drawn into the dehumidification cylinder 2201 through the intake pipe 2203. The moisture is effectively removed by the moisture-absorbing mesh plate 2208, which can be made of materials such as loaded silica gel, lithium chloride, or zeolite molecular sieves. The filtered dry air is then conveyed through the delivery pipe 220... 4. The air is fed into the circular shell 2101. When the air blowing fan blades 2117 blow air, dry air is blown out. Through the guidance of the conical guide plate 2118, an annular air curtain can be formed within the circular shell 2101. The blown air is blown onto the arc-shaped guide ring 2105, which further guides the air to form an air curtain, thereby blocking the surrounding air and preventing humid air from entering the low-temperature vacuum pump body 1. This further reduces frost formation inside the low-temperature vacuum pump body 1, ensuring the operating time of the low-temperature vacuum pump body 1 and improving its utilization rate. When dehumidification of the moisture-absorbing mesh plate 2208 is required, the operation of the semiconductor cooler 2207 condenses the moisture-absorbing mesh plate 2208.The moisture on the surface of the moisture-absorbing mesh plate 2208 condenses into water droplets, which are then drained away through the drain pipe 2209, allowing the moisture-absorbing mesh plate 2208 to regain its moisture-absorbing capacity.

[0030] Example 2: Please refer to Figures 1-15 The present invention provides a technical solution: an ultra-low temperature vacuum pump with high-efficiency compressed air function. The present invention makes corresponding improvements to the technical problems mentioned in the background art.

[0031] As a further limitation of the present invention, a compression heating mechanism 3 is provided on one side of the cylinder 101; The compression and heating mechanism 3 includes a scroll compressor 301, which is disposed on one side of the cylinder 101. The inlet end of the scroll compressor 301 is fixedly connected to a gas delivery pipe 302. One end of the gas delivery pipe 302 is fixedly connected to a first three-way pipe 304. One end of the first three-way pipe 304 is fixedly connected to the outlet end of the pre-pump 102. First solenoid valves 303 are fixedly installed at both ends of the first three-way pipe 304. The outlet end of the scroll compressor 301 is fixedly connected to a second three-way pipe 303. 8. One end of the second three-way pipe 308 is fixedly connected to the first telescopic hose 306 and the first connecting pipe 305 respectively. By setting the first telescopic hose 306, the movement of the hollow rod 2112 will not be hindered. At the same time, during regeneration, compressed and heated air can be delivered into the hollow rod 2112 to heat the hollow rod 2112, effectively improving the defrosting and regeneration effect of the hollow scraper 2114 on the cold plate body 103 and improving the regeneration efficiency.

[0032] One end of the first telescopic hose 306 extends into the inner cavity of the cylinder 101 and is fixedly connected to the surface of one of the hollow rods 2112. A short pipe 310 is fixedly connected between the hollow rods 2112. The inner cavity of the cylinder 101 is provided with two discharge pipes 309. The air inlet end of the discharge pipe 309 is fixedly connected to the surface of the hollow rod 2112, and the air outlet end of the discharge pipe 309 is fixedly connected to a second telescopic hose 307. One end of the second telescopic hose 307 extends to the outside of the cylinder 101. A connecting pipe 311 is fixedly connected between the two hollow rods 2112. By setting the connecting pipe 311, after the first telescopic hose 306 delivers compressed hot air into one side of the hollow rod 2112, it can then be delivered into the other side of the hollow rod 2112, ensuring the heating of the hollow rods 2112 and thus effectively ensuring the defrosting effect on the cold plate body 103.

[0033] An annular tube 312 is fixedly connected to the inner cavity of the dehumidification cylinder 2201. One end of the annular tube 312 extends to the outside of the dehumidification cylinder 2201 and is fixedly connected to one end of the connecting pipe 305. A second solenoid valve 313 is fixedly installed on the surface of the annular tube 312. An air outlet 314 is opened on the surface of the annular tube 312. A mounting plate 315 is fixedly connected to one side of the cylinder 101. One side of the scroll compressor 301 is fixedly connected to the surface of the mounting plate 315. By setting the air outlet 314, when condensing and dehumidifying the moisture-absorbing mesh plate 2208, and when it is necessary to prevent icing, the compressed and heated hot air is delivered into the annular tube 312 and can be discharged through the air outlet 314, increasing the temperature inside the dehumidification cylinder 2201 and preventing water droplets from freezing when condensing on the moisture-absorbing mesh plate 2208. This ensures the subsequent dehumidification effect of the moisture-absorbing mesh plate 2208 and effectively reduces the frost inside the low-temperature vacuum pump body 1.

[0034] By setting up the compression heating mechanism 3, the regeneration can be accelerated. When the cryogenic vacuum pump stops for regeneration, the efficiency of defrosting and regeneration can be effectively improved, allowing the cryogenic vacuum pump to defrost and regenerate more quickly, shortening the regeneration time, thereby ensuring the subsequent operation time of the cryogenic vacuum pump and improving the utilization rate of the equipment.

[0035] The specific implementation of this embodiment is as follows: During use, one end of the first three-way pipe 304 and one end of the second telescopic hose 307 are connected to external pipes. When the cryogenic vacuum pump body 1 needs to be heated and regenerated, the heating program inside the cryogenic vacuum pump body 1 is started. The gas generated after heating inside the cryogenic vacuum pump body 1 is discharged through the pre-pump 102 and enters the first three-way pipe 304. The first solenoid valve 303 is opened, allowing the gas to enter the gas delivery pipe 302 and be delivered into the scroll compressor 301. The gas is heated by the compression of the scroll compressor 301 and then delivered through the second three-way pipe 308 into the first telescopic hose 306 and the connecting pipe 305. After the moisture-absorbing mesh plate 2208 in the dehumidification cylinder 2201 has finished condensing, if icing occurs, the second solenoid valve 313 can be opened. Gas is introduced into the annular pipe 312 and discharged through it, thereby increasing the heat inside the dehumidification cylinder 2201, allowing the ice to melt and improving the dehumidification effect on the moisture-absorbing mesh plate 2208. At the same time, hot air can be delivered into one of the hollow rods 2112 through the first telescopic hose 306, and into other hollow rods 2112 through the short pipe 310 and the connecting pipe 311, thereby heating the hollow rods 2112 and the hollow scraper 2114. Simultaneously, driven by the half gear 2109 and the rack 2115, it can more effectively defrost and regenerate the cold plate body 103, thereby improving the regeneration efficiency of the cold plate body 103 and effectively ensuring the utilization rate of the low-temperature vacuum pump body 1. The gas entering the hollow rod 2112 can be discharged through the discharge pipe 309 and the second telescopic hose 307.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cryogenic vacuum pump with high-efficiency compressed air function, comprising a cryogenic vacuum pump body (1), characterized in that: The cryogenic vacuum pump body (1) includes a cylinder (101), a cold plate body (103) is fixedly connected to the inner cavity of the cylinder (101), a back pump (102) is fixedly connected to the bottom of the cylinder (101), and a defrosting mechanism (2) is provided on the surface of the cylinder (101). The defrosting mechanism (2) includes a defrosting unit (21) and a dehumidifying unit (22), wherein, The defrosting unit (21) is disposed on the surface of the cylinder (101); The dehumidification unit (22) is disposed on one side of the defrosting unit (21), and the dehumidification unit (22) is used in conjunction with the defrosting unit (21); A compression heating mechanism (3) is provided on one side of the cylinder (101).

2. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 1, characterized in that: The defrosting unit (21) includes a circular shell (2101) located above the cylinder (101). A dual-axis motor (2102) is fixedly connected to the surface of the circular shell (2101). One output end of the dual-axis motor (2102) extends into the inner cavity of the circular shell (2101) and is fixedly connected to an air-blowing fan blade (2117). A conical guide plate (2118) is provided in the inner cavity of the circular shell (2101). An arc-shaped guide ring (2105) is fixedly connected to the surface of the cylinder (101). A linkage rod (2113) is fixedly connected to the surface of the air blowing fan blade (2117). One end of the linkage rod (2113) passes through to one side of the conical guide plate (2118) and is fixedly connected to a second gear (2119). A support plate (2108) is fixedly connected to the inner cavity of the cylinder (101). A limit hole (2110) is opened on the surface of the support plate (2108). A rack (2115) is provided on one side of the support plate (2108). Two T-shaped blocks (2111) are fixedly connected to the surface of the rack (2115).

3. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 2, characterized in that: One end of the T-shaped block (2111) extends through to one side of the support plate (2108). The T-shaped block (2111) is slidably connected to the inner cavity of the limiting hole (2110). Half gears (2109) are provided on both sides of the rack (2115). The half gears (2109) cooperate with the rack (2115). A rotating rod (2106) is fixedly connected to the surface of the half gears (2109). One end of the rotating rod (2106) extends through to the outer side of the cylinder (101). A first gear (2107) is fixedly connected to the side, and the first gear (2107) meshes with the second gear (2119). Three hollow rods (2112) are provided on both sides of the cold plate body (103). A hollow scraper (2114) is fixedly connected to the surface of the hollow rod (2112). A connecting rod (2116) is fixedly connected between two hollow rods (2112). One end of the connecting rod (2116) is fixedly connected to the surface of the rack (2115).

4. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 3, characterized in that: Both sides of the circular shell (2101) are fixedly connected to U-shaped plates (2103). One end of the U-shaped plate (2103) is fixedly connected to the surface of the cylinder (101). The surface of the arc-shaped guide ring (2105) is fixedly connected to a support frame (2104). One end of the rotating rod (2106) passes through the support frame (2104) and is rotatably connected to the support frame (2104) through a bearing. The surface of the linkage rod (2113) is rotatably fitted with a stabilizing ring (2120) through a bearing. Both ends of the stabilizing ring (2120) are fixedly connected to the surface of the support frame (2104). One side of the conical guide plate (2118) is fixedly connected to one end of the support frame (2104).

5. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 2, characterized in that: The dehumidification unit (22) includes a dehumidification cylinder (2201), which is located on one side of a circular shell (2101). A moisture-absorbing mesh plate (2208) is fixedly connected to the inner cavity of the dehumidification cylinder (2201). An air-absorbing fan blade (2210) is provided in the inner cavity of the dehumidification cylinder (2201). A short rod (2211) is fixedly connected to the surface of the air-absorbing fan blade (2210). One end of the short rod (2211) extends to the outside of the dehumidification cylinder (2201). A synchronous pulley (2206) is fixedly sleeved on one of the output ends of the dual-axis motor (2102) and on the surface of the short rod (2211). A synchronous belt (2205) is sleeved on the surfaces of the two synchronous pulleys (2206) for common transmission.

6. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 5, characterized in that: The inner cavity of the dehumidifier cylinder (2201) is fixedly connected to two semiconductor coolers (2207). One end of the semiconductor cooler (2207) extends through to the outside of the dehumidifier cylinder (2201). The surface of the dehumidifier cylinder (2201) is fixedly connected to two conveying pipes (2204). One end of the conveying pipes (2204) is fixedly connected to the surface of the circular shell (2101).

7. The cryogenic vacuum pump with high-efficiency compressed air function according to claim 6, characterized in that: The surface of the air intake fan blade (2210) is fitted with a support ring (2212) through a bearing. Both ends of the support ring (2212) are fixedly connected to the inner wall of the dehumidification cylinder (2201). One side of the dehumidification cylinder (2201) is fixedly connected to an air inlet pipe (2203). One end of the dehumidification cylinder (2201) is fixedly connected to a drain pipe (2209). A fixing ring (2202) is fixedly fitted on the surface of the dehumidification cylinder (2201). One end of the fixing ring (2202) is fixedly connected to the surface of the circular shell (2101).

8. A cryogenic vacuum pump with high-efficiency compressed air function according to claim 5, characterized in that: The compression and heating mechanism (3) includes a scroll compressor (301), which is located on one side of the cylinder (101). The inlet end of the scroll compressor (301) is fixedly connected to a gas delivery pipe (302). One end of the gas delivery pipe (302) is fixedly connected to a first three-way pipe (304). One end of the first three-way pipe (304) is fixedly connected to the outlet end of the pre-pump (102). Both ends of the first three-way pipe (304) are fixedly installed with a first solenoid valve (303). The outlet end of the scroll compressor (301) is fixedly connected to a second three-way pipe (308). Both ends of the second three-way pipe (308) are fixedly connected to a first telescopic hose (306) and a first connecting pipe (305), respectively.

9. A cryogenic vacuum pump with high-efficiency compressed air function according to claim 8, characterized in that: One end of the first telescopic hose (306) extends into the inner cavity of the cylinder (101) and is fixedly connected to the surface of one of the hollow rods (2112). A short pipe (310) is fixedly connected between the hollow rods (2112). The inner cavity of the cylinder (101) is provided with two discharge pipes (309). The air inlet end of the discharge pipe (309) is fixedly connected to the surface of the hollow rod (2112). The air outlet end of the discharge pipe (309) is fixedly connected to a second telescopic hose (307). One end of the second telescopic hose (307) extends into the outer side of the cylinder (101). A connecting pipe (311) is fixedly connected between the two hollow rods (2112).

10. A cryogenic vacuum pump with high-efficiency compressed air function according to claim 9, characterized in that: The inner cavity of the dehumidifier cylinder (2201) is fixedly connected to an annular tube (312). One end of the annular tube (312) extends through to the outside of the dehumidifier cylinder (2201) and is fixedly connected to one end of the connecting tube (305). A second solenoid valve (313) is fixedly installed on the surface of the annular tube (312). An air outlet (314) is opened on the surface of the annular tube (312). A mounting plate (315) is fixedly connected to one side of the cylinder (101). One side of the scroll compressor (301) is fixedly connected to the surface of the mounting plate (315).

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