XY scanning table driven by magnetic axis

Abstract

The invention provides an XY scanning table driven by a magnetic axis. The XY scanning table driven by the magnetic axis comprises an XY scanning table mechanical structure module, an embedded motion control module and a host software system module. The XY scanning table mechanical structure module is used for achieving scanning movement in the X-axis direction and the Y-axis direction and collecting position feedback information in real time. The embedded motion control module is used for receiving a motion control instruction, driving the XY scanning table mechanical structure module to execute a corresponding action and feeding back real-time acquisition position feedback information to the host software system module; the host software system module is used for generating a corresponding motion control instruction according to a processing path or an operation task input by a user, sending the motion control instruction to the embedded motion control module, receiving real-time acquisition position feedback information, and performing analysis and abnormity judgment on a system state; the whole-process closed-loop control from instruction generation to motion execution to state feedback is realized, and the response speed, the positioning precision and the operation stability of the system are remarkably improved.

Description

Technical Field

[0001] This invention belongs to the field of automatic devices, and specifically relates to a magnetic axis driven XY scanning stage. Background Technology

[0002] The motorized scanning stage is a fundamental component for planar scanning motion and is widely used in industrial inspection and microscopic scanning. High-precision motion control is crucial, as it directly determines the positioning accuracy, motion stability, and repeatability of the scanning stage, and is the core guarantee for achieving high-resolution imaging and precision inspection. Especially in applications such as microscopic scanning and industrial inspection, where extremely high positional accuracy is required, traditional driving methods are insufficient to meet the demands for rapid response, high-precision positioning, and stability. Therefore, a new driving and control solution is urgently needed to overcome existing technological bottlenecks.

[0003] Currently, most two-axis scanning stages on the market use stepper motors and lead screw drives. Due to the precision limitations of stepper motors and the backlash of lead screw drives, commercially available electric scanning stages suffer from slow response speeds and low positioning accuracy, making it difficult to meet the requirements for high-precision sample positioning. Furthermore, they are prone to low-speed crawling and bulky designs, severely restricting their application in high-end microscopic inspection scenarios. These problems not only affect inspection efficiency and imaging quality but also limit the integration and application of scanning stages in high-end equipment, urgently requiring a new scanning stage solution with a more compact structure, more precise control, and smoother movement.

[0004] CN106500743A proposes a high-precision electric scanning stage and its control method, which uses a linear magnetic shaft motor and a grating ruler for precise control.

[0005] However, some shortcomings still exist in practical applications. First, the lack of detailed status monitoring and feedback mechanisms makes it impossible to fully guarantee the stability and security of the system. Second, the description of the host software system is insufficient, making it difficult to meet the needs of complex application scenarios. Third, the description of the interaction relationships between modules is relatively brief, which is not conducive to system maintenance and expansion. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the purpose of this invention is to provide a magnetic axis driven XY scanning stage.

[0007] According to the present invention, a magnetic axis driven XY scanning stage includes: an XY scanning stage mechanical structure module, an embedded motion control module, and a host software system module;

[0008] The XY scanning stage mechanical structure module is used to realize scanning motion in the X and Y axis directions and to collect position feedback information in real time;

[0009] The embedded motion control module is used to receive motion control commands, drive the XY scanning stage mechanical structure module to perform corresponding actions, and feed back real-time acquired position feedback information to the host software system module.

[0010] The host software system module is used to generate corresponding motion control commands based on the processing path or operation task input by the user, send them to the embedded motion control module, and receive the real-time acquired position feedback information to analyze the system status and judge anomalies.

[0011] The main components of the embedded motion control module include: a power adapter, a voltage converter, an X / Y axis embedded motion controller, and a standardized interface. The power adapter is used to connect to an external AC power source and output a stable DC voltage. The voltage converter is electrically connected to the power adapter and converts the DC voltage output by the power adapter into the operating voltage required by other modules. The X / Y axis embedded motion controller is electrically connected to the voltage converter and receives control commands to drive the corresponding axis motors. The standardized interface is used for data interaction and parameter configuration with the XY scanning stage mechanical structure module.

[0012] The host software system module includes a control and execution submodule and a status and monitoring submodule. The control and execution submodule is used to configure the motion mode and output motion commands for the XY scanning stage mechanical structure module. The status and monitoring submodule is used to perform real-time status monitoring and operation data feedback for the XY scanning stage mechanical structure module.

[0013] Preferably, the XY scanning stage mechanical structure module includes a supporting base plate, a lower moving plate, an upper moving plate, a linear magnetic shaft motor, and a guide rail pair;

[0014] The lower moving plate is mounted on the support base plate, and the upper moving plate is located on the lower moving plate. The lower moving plate and the upper moving plate are respectively connected to a linear magnetic shaft motor. Matching rolling / sliding guide rail pairs are respectively provided between the upper surface of the support base plate and the lower surface of the lower moving plate, and between the upper surface of the lower moving plate and the lower surface of the upper moving plate.

[0015] Preferably, the rolling / sliding guide pair adopts a stacked and embedded structure, including a fixed component and a moving component;

[0016] The fixing component is fitted onto the upper surface of the supporting base plate, and the matching moving component is fitted onto the lower surface of the moving lower plate.

[0017] The upper surface of the lower moving plate is fitted with the fixing component, and the lower surface of the upper moving plate is fitted with the matching moving component.

[0018] Preferably, the rolling / sliding guide pair between the upper surface of the supporting base plate and the lower surface of the moving lower plate is perpendicular to the movement direction of the rolling / sliding guide pair between the upper surface of the moving lower plate and the lower surface of the moving upper plate.

[0019] Preferably, the XY scanning stage mechanical structure module further includes a grating read head and a grating ruler; the grating ruler is respectively disposed on one side of the lower surface of the lower moving plate and the upper moving plate, and the grating read head is disposed on the upper surface of the support base plate and corresponds to the position of the two grating rulers.

[0020] Preferably, the XY scanning stage mechanical structure module further includes a limit switch and a cable connector. The cable connector is disposed on the side of the support base plate and is connected to the linear magnetic shaft motor, the grating read head and the limit switch through the wiring groove on the support base plate.

[0021] Preferably, the magnetic shaft mover of the linear magnetic shaft motor is installed on one side of the lower surface of the moving lower plate, and the grating ruler is installed on the other side; guide rail pair moving components are embedded on both sides of the lower surface of the moving lower plate, forming a pair of parallel rolling / sliding guide rail pairs with the guide rail pair fixing components on the upper surface of the supporting base plate;

[0022] The magnetic shaft mover of the linear magnetic shaft motor is installed on one side of the lower surface of the upper moving plate, and the grating ruler is installed on the other side; guide rail pair moving components are embedded on both sides of the lower surface of the upper moving plate, forming a pair of parallel rolling / sliding guide rail pairs with the guide rail pair fixing components on the upper surface of the lower moving plate.

[0023] Preferably, an overvoltage protection circuit is provided between the power adapter and the voltage converter. The overvoltage protection circuit is used to cut off the power supply and trigger a fault alarm signal when the input voltage is abnormal.

[0024] Preferably, the X / Y axis embedded motion controller employs PWM pulse width modulation technology and closed-loop feedback processing to monitor the motor rotor position in real time and dynamically adjust the drive current phase.

[0025] Preferably, the standardized interface adopts a USB interface design, which is used for communication with the host software system module for sending and receiving control commands, acquiring motion information, etc.

[0026] Preferably, the control and execution submodule includes: communication connection management, used for device communication base layer control to ensure that communication links can be established / released; basic motion control, used to initiate regular motion commands; synchronous motion control, used for blocking motion control to ensure the completion of actions; motion parameter configuration, used to adjust motion dynamic characteristics; motion safety control, used to define motion control modes and emergency operations; and position calibration control, used for position reference setting and limit strategy management.

[0027] Preferably, the status and monitoring submodule includes: position status feedback for core position data acquisition; motion dynamic detection for motion process status monitoring; limit safety monitoring for key hardware safety status isolation monitoring; signal status diagnosis for control signal integrity diagnosis; motion parameter monitoring for dynamic parameter observation during operation; and equipment health diagnosis for axis enable status and motion response detection.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. Utilizing an embedded motion control module, the system achieves control over operations such as homing, acceleration / deceleration, uniform motion, and interpolation linkage, significantly improving the motion stability and repeatability of the electric scanning stage. The host software system module includes application programming interfaces (APIs) for homing, displacement, current position acquisition, and parameter adjustment. Through standardized API interface protocols and embedded driving algorithms, it supports homing and uniform motion control. Combined with interpolation linkage algorithms, it can accurately plan complex trajectories. This enhances the user experience and meets various application requirements, enabling real-time command issuance and closed-loop status feedback control of the XY axes from the host. The magnetic axis driven XY scanning stage achieves closed-loop control throughout the entire process from command generation to motion execution and status feedback, significantly improving the system's response speed, positioning accuracy, and operational stability.

[0030] This system employs standardized interfaces to achieve efficient two-way data interaction, enhancing its real-time performance and communication capabilities. Comprehensive status monitoring and feedback mechanisms ensure high accuracy and stability. It is equipped with complete host software modules supporting path planning, command generation, status monitoring, and human-computer interaction. Furthermore, a clear modular design clarifies the functions of each module and their interrelationships, improving maintainability and scalability. These improvements work together to significantly enhance system performance and broaden its application scope.

[0031] The overall system has millisecond-level response speed, submicron-level positioning accuracy, and anti-interference capability. These characteristics provide strong support for the realization of high-end microscopic inspection applications and have broad application prospects in fields such as industrial inspection and biological microscopy.

[0032] 2. The use of a stacked and inlaid structure improves the structural compactness of the two-axis scanning stage; the use of magnetic axis drive and cross guide rails enhances the motion stability of the scanning stage.

[0033] 3. Based on the dual magnetic axis drive structure, a high-precision grating ruler and power converter are integrated to build a low-power and high-stability motion control platform. It features high precision, high response speed, no backlash, compact structure, smooth motion and intelligent control. The closed-loop feedback of the grating ruler ensures that the positioning error is less than ±1μm. Combined with servo homing logic and dynamic compensation mechanism, the influence of mechanical backlash is eliminated. Attached Figure Description

[0034] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0035] Figure 1 A complete system module classification diagram;

[0036] Figure 2 A schematic diagram of the external design of the mechanical structure module of the XY scanning stage;

[0037] Figure 3 A schematic diagram of the internal modular design of the XY scanning stage mechanical structure module;

[0038] Figure 4 This is a schematic diagram of the overall structure of the embedded motion control module;

[0039] Figure 5 A diagram illustrating the functional classification of host software system modules.

[0040] The diagram shows:

[0041] XY Scanning Stage Mechanical Structure Module 1 Control and Execution Submodule 31

[0042] Embedded motion control module 2 Communication connection management 311

[0043] Host software system module 3 Basic motion control 312

[0044] Support plate 11 Synchronous motion control 313

[0045] Lower plate 12, motion parameter configuration 314

[0046] Motion board 13 Motion safety control 315

[0047] Linear magnetic shaft motor 14 Position calibration control 316

[0048] 15-inch grating ruler status and monitoring sub-module 32

[0049] Limit switch 16, position status feedback 321

[0050] Cable connector 17 Motion dynamic detection 322

[0051] Rolling / sliding guide pair 18 Limit safety monitoring 323

[0052] Power adapter 21 Signal status diagnostics 324

[0053] Voltage converter 22 Motion parameter monitoring 325

[0054] X / Y axis embedded motion controller 23 Device health diagnosis 326

[0055] Standardized Interface 24 Detailed Implementation

[0056] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0057] This embodiment provides a magnetic axis driven XY scanning stage, comprising three main functional modules: an XY scanning stage mechanical structure module 1, an embedded motion control module 2, and a host software system module 3. The modules communicate bidirectionally via a standardized USB interface, forming a complete closed-loop control system to ensure high-precision positioning and stable operation.

[0058] The XY scanning stage mechanical structure module 1 is used to achieve high-precision scanning motion in the X and Y axes through drive components such as the linear magnetic axis motor 14. At the same time, combined with the guide rail guide assembly, grating ruler feedback device, cable connector 17 and electrical connection structure, it ensures that the motion platform runs smoothly and accurately within the set range, and has positioning feedback and stroke protection functions.

[0059] The embedded motion control module 2 incorporates motion control logic such as zero-homing positioning, acceleration / deceleration adjustment, uniform speed operation, and interpolation linkage. Combined with instruction parsing and status feedback algorithms, it enables the reception of host control instructions, precise control of XY axis motion trajectories, and real-time transmission of equipment operating status information.

[0060] The host software system module 3 establishes a communication link with the embedded motion control module 2 through the integrated motion control API interface, supporting command issuance, parameter configuration and real-time feedback of running data, and providing the system as a whole with unified control scheduling and status monitoring capabilities.

[0061] XY scanning stage mechanical structure module 1 is used to realize scanning motion in the XY direction, and works with positioning, limiting and connecting components to ensure accurate operation;

[0062] The XY scanning stage mechanical structure module includes: a support base plate 11, a lower motion plate 12, an upper motion plate 13, a linear magnetic axis motor 14, a grating ruler 15, a limit switch 16, a cable connector 17, and a rolling / sliding guide pair 18.

[0063] The lower moving plate 12 is mounted on the support base plate 11, and the upper moving plate 13 is located on the lower moving plate 12. The lower moving plate 12 and the upper moving plate 13 are respectively connected to a linear magnetic shaft motor 14. Matching rolling / sliding guide rail pairs 18 are respectively provided between the upper surface of the support base plate 11 and the lower surface of the lower moving plate 12, and between the upper surface of the lower moving plate 12 and the lower surface of the upper moving plate 13.

[0064] The rolling / sliding guide pair 18 is a stacked and inlaid structure, including: ball guide rail and ball guide rail slider. Specifically, the upper surface of the supporting base plate 11 is provided with a ball guide rail or a ball guide rail slider, and the lower surface of the moving lower plate 12 is provided with a matching ball guide rail slider or ball guide rail.

[0065] If the upper surface of the lower moving plate 12 is provided with a ball guide rail or a ball guide rail slider, then the lower surface of the upper moving plate 13 is provided with a matching ball guide rail slider or ball guide rail.

[0066] The rolling / sliding guide pair 18 between the upper surface of the support base plate 11 and the lower surface of the moving lower plate 12 is perpendicular to the movement direction of the rolling / sliding guide pair 18 between the upper surface of the moving lower plate 12 and the lower surface of the moving upper plate 13.

[0067] The XY scanning stage mechanical structure module also includes a grating read head and a grating ruler 15. The grating ruler 15 is respectively disposed on one side of the lower surface of the lower moving plate 12 and the upper moving plate 13. The grating read head is disposed on the upper surface of the supporting base plate 11 and at a position corresponding to the two grating rulers 15.

[0068] The XY scanning stage mechanical structure module also includes a limit switch 16, which is connected to a cable connector 17 via a wiring groove on the support base plate. The limit switch 16 is used to detect extreme positions and limit the movement stroke during the movement.

[0069] The XY scanning stage mechanical structure module also includes a cable connector 17, which is located on one side of the support base plate 11 and is connected to the linear magnetic shaft motor 14, the grating read head and the limit switch 16 through the wiring groove on the support base plate 11.

[0070] The magnetic shaft mover of the linear magnetic shaft motor 14 is installed on one side of the lower surface of the lower moving plate 12, and the grating ruler 15 is installed on the other side of the lower surface of the lower moving plate 12. A ball guide slider is embedded on each side of the lower surface of the lower moving plate 12. The ball guide slider and the ball guide installed on the upper surface of the support base plate 11 form a pair of parallel rolling / sliding guide pairs 18.

[0071] The magnetic shaft mover of the linear magnetic shaft motor 14 is installed on one side of the lower surface of the upper moving plate 13, and the grating ruler 15 is installed on the other side of the lower surface of the upper moving plate 13. A ball guide slider is embedded on each side of the lower surface of the upper moving plate 13. The ball guide slider and the ball guide installed on the upper surface of the lower moving plate 12 form a pair of parallel rolling / sliding guide pairs 18.

[0072] like Figure 4 As shown, the embedded motion control module 2 provided by the present invention includes:

[0073] Power adapter 21: Used to connect to an external AC power source and output a stable DC voltage;

[0074] Voltage converter 22: Connected to the power adapter, used to convert the DC power output from the power supply into the operating voltage required by other modules;

[0075] X / Y axis embedded motion controller 23: electrically connected to the voltage converter, used to receive control commands and drive the corresponding axis motor to run;

[0076] Standardized Interface 24: Used for data interaction and parameter configuration with host computer or external devices.

[0077] like Figure 5 As shown, the host software system module 3 provided by the present invention includes:

[0078] Control and Execution Submodule 31: Used for configuring motion modes and outputting motion commands for the X and Y axes;

[0079] Status and Monitoring Submodule 32: Used for real-time status monitoring and operational data feedback of the XY axes.

[0080] The control and execution submodule 31 includes:

[0081] Communication Connection Management 311: Device communication base layer control, ensuring that communication links can be established / released;

[0082] Basic Motion Control 312: Initiates regular motion commands;

[0083] Synchronous Motion Control 313: Blocking motion control ensures the completion of the action;

[0084] Motion parameter configuration 314: Adjusts motion dynamic characteristics;

[0085] Motion Safety Control 315: Define motion control modes and emergency operations;

[0086] Position calibration control 316: Position reference setting and limit strategy management.

[0087] Among them, the status and monitoring submodule 32 includes:

[0088] Location status feedback 321: Acquisition of core location data;

[0089] Motion dynamic detection 322: Monitoring the state of motion process;

[0090] Limit switch safety monitoring 323: Isolation monitoring of critical hardware safety status;

[0091] Signal Status Diagnosis 324: Control Signal Integrity Diagnosis;

[0092] Motion Parameter Monitoring 325: Observation of dynamic parameters during runtime;

[0093] Equipment Health Diagnosis 326: Detection of Shaft Failure.

[0094] The technical solution of the present invention will be described in more detail below with reference to specific embodiments;

[0095] The XY scanning stage mechanical structure module 1 includes components such as a support base plate 11, a lower moving plate 12, an upper moving plate 13, a linear magnetic axis motor 14, a grating ruler 15, a limit switch 16, a cable connector 17, and a rolling / sliding guide rail pair 18.

[0096] This module adopts a stacked and inlaid structure design, consisting of a support base plate 11, a lower moving plate 12, and an upper moving plate 13 that are sequentially fitted together, enabling independent movement in the X and Y axes respectively. Two linear magnetic shaft motors 14 drive the lower moving plate 12 and the upper moving plate 13 respectively, and work with the grating ruler 15 to provide full closed-loop feedback, improving the system's repeatability to within ±1μm.

[0097] In the specific structure, the stator of the linear magnetic shaft motor 14 is installed on one side of the upper surface of the support base plate 11, and the grating ruler reading head is installed on the other side; a ball bearing guide rail is embedded on each side, and a cable connector 17 for external communication is provided on the end face. The lower surface of the moving lower plate 12 is equipped with the magnetic shaft mover of the linear magnetic shaft motor 14, and the upper surface of the plate is equipped with the grating ruler 15 and the ball bearing guide rail slider, forming a rolling / sliding guide pair 18 with the ball bearing guide rail on the support base plate 11. The lower surface of the moving upper plate 13 is also equipped with the magnetic shaft mover of the linear magnetic shaft motor 14 and the grating ruler 15, and achieves planar movement relative to the moving lower plate 12 through the rolling / sliding guide pair 18.

[0098] Cable connector 17 connects the linear magnetic shaft motor stator and the grating ruler reading head through the cable tray, ensuring orderly wiring and electrical connection of the motor drive line and signal line.

[0099] The embedded motion control module 2 includes a power adapter 21, a voltage converter 22, an X / Y axis embedded motion controller 23, and a standardized interface 24, which are used to receive instructions and drive the mechanical platform to perform corresponding actions.

[0100] The power adapter 21 converts external AC power into a preliminary DC voltage (such as 24VDC) as the basic power source for the system. The voltage converter 22 further regulates the input voltage, outputting voltage levels (such as 5V, 12V, 24V, etc.) that meet the needs of different electronic modules, and has voltage regulation and filtering functions to ensure stable and reliable power supply quality.

[0101] The X / Y axis embedded motion controller 23 receives motion commands from the host software system module 3, including parameters such as target position, velocity, acceleration, and homing operation, and drives the linear magnetic axis motor 14 directly to achieve high-precision displacement in the X / Y axis directions. The controller incorporates a closed-loop feedback mechanism, real-time acquisition of feedback information from the grating ruler, and dynamic adjustment of the output signal to ensure repeatability within ±1μm.

[0102] The standardized interface 24 adopts a universal serial bus interface design compliant with the USB communication protocol to realize bidirectional data interaction with the host software system module. This interface is configured to send control commands to the motion control module and acquire motion feedback data such as the device's operating status, current position, and abnormal information in real time.

[0103] The host software system module 3 includes a control and execution submodule 31 and a status and monitoring submodule 32, which are used to complete functions such as path planning, instruction generation, status monitoring and human-computer interaction, as follows:

[0104] The control and execution submodule 31 is responsible for generating and issuing standardized motion commands, which are then parsed by the embedded motion control module 2 to drive the X / Y axis motors to perform positioning operations. This submodule includes six main functional modules: communication connection management 311, basic motion control 312, synchronous motion control 313, motion parameter configuration 314, motion safety control 315, and position calibration control 316. These modules respectively implement functions such as communication link establishment, multi-axis motion scheduling, time synchronization control, dynamic parameter adjustment, safety assurance mechanisms, and zero calibration.

[0105] The status and monitoring submodule 32 continuously receives operating status data sent by the embedded motion control module through an asynchronous communication mechanism to complete system status monitoring and anomaly warning. This submodule includes six main functional modules: position status feedback 321, motion dynamic detection 322, limit safety monitoring 323, signal status diagnosis 324, motion parameter monitoring 325, and equipment health diagnosis 326, which respectively realize coordinate acquisition, motion behavior evaluation, limit protection, signal integrity detection, parameter dynamic tracking, and power unit status monitoring.

[0106] The modules interact with each other through standardized API interfaces, transmit instruction codes and parameters using binary protocols, and improve communication reliability through redundancy checks and timer mechanisms.

[0107] During system operation, the host software system module 3 generates corresponding motion control commands based on the processing path or operation task input by the user, and sends them to the embedded motion control module 2 through the standardized interface 24. After parsing the commands, this module drives the linear magnetic axis motor 14 to perform the corresponding actions, thereby driving the XY scanning stage mechanical structure module 1 to perform precise planar movement.

[0108] Meanwhile, the grating ruler 15 collects the position feedback information of the motion platform in real time, which is then processed by the embedded motion control module 2 and uploaded to the status and monitoring submodule 32 of the host software system module 3 for system status analysis and anomaly judgment, thereby realizing a complete closed-loop control process.

[0109] This system employs a standardized interface 24 to achieve efficient bidirectional data interaction, enhancing its real-time performance and communication capabilities. A comprehensive status monitoring and feedback mechanism ensures high precision and stability. It is equipped with a complete host software system module 3, supporting functions such as path planning, command generation, status monitoring, and human-machine interaction. Furthermore, a clear modular design clarifies the functions of each module and their interrelationships, improving the system's maintainability and scalability. These improvements work together to significantly enhance system performance and broaden its application scope. Through the coordinated operation of these modules, this invention achieves closed-loop control throughout the entire process, from command generation to motion execution and status feedback, significantly improving the system's response speed, positioning accuracy, and operational stability.

[0110] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0111] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A magnetic axis driven XY scanning stage, characterized in that, include: The XY scanning stage mechanical structure module (1), the embedded motion control module (2), and the host software system module (3) are also included. The XY scanning stage mechanical structure module (1) is used to realize scanning motion in the X and Y axis directions and to collect position feedback information in real time; The embedded motion control module (2) is used to receive motion control commands, drive the XY scanning stage mechanical structure module (1) to perform corresponding actions, and feed back the position feedback information collected in real time to the host software system module (3); The host software system module (3) is used to generate the corresponding motion control command according to the processing path or operation task input by the user and send it to the embedded motion control module (2); and receive the position feedback information collected in real time to analyze the system status and make anomaly judgments. The main components of the embedded motion control module (2) include: a power adapter (21), a voltage converter (22), an X / Y axis embedded motion controller (23), and a standardized interface (24); the power adapter (21) is used to connect to an external AC power supply and output a stable DC voltage; the voltage converter (22) is electrically connected to the power adapter (21) and is used to convert the DC voltage output by the power adapter (21) into the working voltage required by other modules; the X / Y axis embedded motion controller (23) is electrically connected to the voltage converter (22) and is used to receive control commands and drive the motor of the corresponding axis to run; the standardized interface (24) is used to perform data interaction and parameter configuration with the XY scanning stage mechanical structure module (1); The host software system module (3) includes a control and execution submodule (31) and a status and monitoring submodule (32); the control and execution submodule (31) is used to configure the motion mode and output motion commands for the XY scanning stage mechanical structure module (1); the status and monitoring submodule (32) is used to monitor the real-time status and provide operational data feedback for the XY scanning stage mechanical structure module (1).

2. The magnetic axis driven XY scanning stage according to claim 1, characterized in that, The XY scanning stage mechanical structure module (1) includes a supporting base plate (11), a lower moving plate (12), an upper moving plate (13), a linear magnetic axis motor (14), and a rolling / sliding guide rail pair (18); The lower moving plate (12) is mounted on the support base plate (11), and the upper moving plate (13) is located on the lower moving plate (12). The lower moving plate (12) and the upper moving plate (13) are respectively connected to a linear magnetic shaft motor (14). Matching rolling / sliding guide rail pairs (18) are respectively provided between the upper surface of the support base plate (11) and the lower surface of the lower moving plate (12), and between the upper surface of the lower moving plate (12) and the lower surface of the upper moving plate (13).

3. The magnetic axis driven XY scanning stage according to claim 2, characterized in that, The rolling / sliding guide pair (18) adopts a stacked and embedded structure, including a fixed component and a moving component; The upper surface of the supporting base plate (11) is fitted with the fixing component, and the lower surface of the moving lower plate (12) is fitted with the matching moving component. The upper surface of the lower moving plate (12) is fitted with the fixing component, and the lower surface of the upper moving plate (13) is fitted with the matching moving component.

4. The magnetic axis driven XY scanning stage according to claim 2, characterized in that, The rolling / sliding guide pair (18) between the upper surface of the supporting base plate (11) and the lower surface of the moving lower plate (12) is perpendicular to the movement direction of the rolling / sliding guide pair (18) between the upper surface of the moving lower plate (12) and the lower surface of the moving upper plate (13).

5. The magnetic axis driven XY scanning stage according to claim 2, characterized in that, The XY scanning stage mechanical structure module (1) also includes a grating read head, a grating ruler (15) limit switch (16) and a cable connector (17); the grating ruler (15) is respectively set on one side of the lower surface of the lower moving plate (12) and the upper moving plate (13), and the grating read head is set on the upper surface of the support base plate (11) and corresponds to the position of the two grating rulers (15); The cable connector (17) is disposed on the side of the support base plate (11) and is connected to the linear magnetic shaft motor (14), the grating reader and the limit switch (16) through the wiring groove on the support base plate (11).

6. The magnetic axis driven XY scanning stage according to claim 5, characterized in that, The magnetic shaft mover of the linear magnetic shaft motor (14) is installed on one side of the lower surface of the lower moving plate (12), and the grating ruler (15) is installed on the other side; the guide rail pair moving components are embedded on both sides of the lower surface of the lower moving plate (12), and together with the guide rail pair fixing components on the upper surface of the supporting base plate (11), they form a pair of parallel rolling / sliding guide rail pairs (18). The magnetic shaft mover of the linear magnetic shaft motor (14) is installed on one side of the lower surface of the upper moving plate (13), and the grating ruler (15) is installed on the other side; the guide rail pair moving components are embedded on both sides of the lower surface of the upper moving plate (13), forming a pair of parallel rolling / sliding guide rail pairs (18) with the guide rail pair fixing components on the upper surface of the lower moving plate (12).

7. The magnetic axis driven XY scanning stage according to claim 1, characterized in that, An overvoltage protection circuit is provided between the power adapter (21) and the voltage converter (22). The overvoltage protection circuit is used to cut off the power supply and trigger a fault alarm signal when the input voltage is abnormal.

8. The magnetic axis driven XY scanning stage according to claim 1, characterized in that, The X / Y axis embedded motion controller (23) adopts PWM pulse width modulation technology and closed-loop feedback processing function to monitor the motor rotor position in real time and dynamically adjust the phase of the drive current.

9. The magnetic axis driven XY scanning stage according to claim 1, characterized in that, The standardized interface (24) adopts a USB interface design and is used to communicate with the host software system module (3) for control command transmission and reception, motion information acquisition, etc.

10. The magnetic axis driven XY scanning stage according to claim 1, characterized in that, The control and execution submodule (31) includes: Communication connection management (311) is used for device communication base layer control to ensure that communication links can be established / released; Basic motion control (312) is used to initiate regular motion commands; Synchronous motion control (313) is used for blocking motion control to ensure the completion of the action; Motion parameter configuration (314) is used to adjust the dynamic characteristics of motion; Motion safety controls (315) are used to define motion control modes and emergency operations; Position calibration control (316) is used for position reference setting and limit strategy management; The aforementioned status and monitoring submodule (32) includes: Location status feedback (321) is used for core location data acquisition; Motion dynamic detection (322) is used for monitoring the state of motion processes; Limit switch safety monitoring (323) is used for isolation monitoring of the safety status of critical hardware; Signal status diagnostics (324) are used for control signal integrity diagnostics; Motion parameter monitoring (325) is used for dynamic parameter observation during runtime; Equipment health diagnostics (326) are used to detect shaft enable status and motion response.

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