Automatic correction and detection device for warping degree of copper sputtering target material

Abstract

The invention relates to the technical field of sputtering target material processing, and provides a copper sputtering target material warping degree automatic correction and detection device which comprises a correction platform and a warping degree measuring instrument for carrying out warping degree detection on a target material placed on the correction platform, and a top plate is fixed above the correction platform through guide stand columns distributed in a rectangular mode; the supporting frame is driven by the first oil cylinder to ascend and descend, the contact pressure between the rolling mechanism and the target material is adjusted, the second oil cylinder drives the rolling mechanism to move in the horizontal direction, the rolling wheels roll on the surface of the target material, local warping is dispersed into continuous rolling stress, target material damage caused by single-point excessive stress is avoided, and the target material quality is improved. Rollers of the rolling mechanism are elastically connected with the cross beam through springs, the rolling mechanism can adapt to different positions of the maximum warping degree of the target material, correction of the target material is achieved, the target material is continuously rolled and rolled through the rolling mechanism capable of ascending, descending and horizontally moving, single-point downward pressing is changed into multi-point rolling and rolling, and correction uniformity is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sputtering target processing, in particular to a copper sputtering target warping degree automatic correction and detection device. BACKGROUND

[0002] The sputtering target is generally bonded together by welding process of target blank and back plate, the material of back plate is generally oxygen-free copper, and the material of target blank has many kinds, such as high-purity aluminum, molybdenum, copper, titanium, ITO (indium tin oxide) and the like. Due to the different thermal expansion coefficients of target blank and back plate, the target will appear different degrees of warping in the process of target welding heating, and the target with deformation arch due to welding needs to be corrected according to product requirements, so that the warping degree meets the requirements.

[0003] Through retrieval, the patent technology with publication number CN110631502B discloses a device for automatic correction and measurement of sputtering target warping degree, the correction platform is installed above the equipment base, the main oil cylinder system includes a main oil cylinder support and a main oil cylinder slidingly installed on the main oil cylinder support, the main oil cylinder support is installed on the equipment base through a first motion driving mechanism; the target ejection oil cylinder system includes two or more target ejection oil cylinders, each target ejection oil cylinder is installed on the equipment base through a second motion driving mechanism, and a top ejection oil cylinder sliding groove for the top of the target ejection oil cylinder to extend and slide is formed on the upper surface of the correction platform corresponding to each target ejection oil cylinder; a target warping degree laser measuring instrument is installed on the side of the main oil cylinder and below the correction platform. The present application not only has simple structure, high efficiency and strong safety in target warping degree correction and measurement, but also realizes high-precision automatic correction and detection of target warping degree, and has strong practicability.

[0004] However, the prior art still has the following problems: The prior art applies vertical pressure to the highest point of target warping from the top through the main oil cylinder, and realizes local deformation correction (similar to "pressing correction") in cooperation with the support of the target ejection oil cylinder below. This mode relies on single-point pressure "plastic deformation forced correction", which is easy to cause stress concentration, and the correction uniformity of the target with large area or asymmetric warping is poor. The prior art does not design a special edge correction structure, and only supports from below through the ejection oil cylinder. When the target changes from warping to flatness during the correction process, the length of the target on the correction platform will inevitably increase, so that forced correction will cause secondary deformation of the edge. SUMMARY

[0005] The present application provides a copper sputtering target warping degree automatic correction and detection device, which solves the problems of poor correction uniformity of the target with large area or asymmetric warping and secondary deformation of the target edge in the prior art.

[0006] The technical scheme of the present application is as follows: a copper sputtering target warping degree automatic correction and detection device, comprising a correction platform and a warping degree measuring instrument for detecting the warping degree of a target placed on the correction platform, a top plate is fixed on the correction platform through rectangularly distributed guide columns, first oil cylinders are symmetrically fixed on the two sides of the top plate, a support frame that moves up and down under the drive of the first oil cylinders is arranged below the top plate, a second oil cylinder is fixed on one side of the support frame, a rolling mechanism that moves horizontally under the drive of the second oil cylinder to roll and correct the warped target is arranged at the middle position of the support frame, linear guides are symmetrically arranged below the correction platform, and a warping edge supporting mechanism that supports the edge of the warped target is symmetrically arranged on the surface of the correction platform.

[0007] Preferably, the support frame comprises two lifting seats, the two lifting seats are respectively slidably connected to the guide columns on the two sides of the correction platform, and a horizontally arranged guide rod is fixed between the two lifting seats.

[0008] Preferably, the rolling mechanism comprises a cross beam, and first and second wheel frames symmetrically arranged on the two sides of the cross beam, the cross beam is fixed to the piston rod end of the second oil cylinder, the cross beam, the first wheel frame and the second wheel frame are all slidably connected to the guide rod, the cross beam and the first and second wheel frames are all elastically connected through springs, and rollers are rotatably connected to the bottoms of the first and second wheel frames.

[0009] Preferably, the rolling mechanism further comprises a driving member for driving the relative movement of the first and second wheel frames.

[0010] Preferably, the driving member comprises a double-shaft motor, the double-shaft motor is fixed to the middle position of the cross beam, symmetrically arranged threaded rods are fixed to the two output ends of the double-shaft motor, the threaded rods are arranged in parallel with the guide rod, a spline sleeve is rotatably connected to the outer side of the end of the threaded rod away from the double-shaft motor, the spline sleeve is slidably connected to the lifting seat, and the threaded rods at the two ends of the double-shaft motor are respectively threadedly connected with the first and second wheel frames.

[0011] Preferably, the warping degree measuring instrument comprises first and second target warping degree laser measuring instruments, the first target warping degree laser measuring instrument is fixed to the middle position of the bottom surface of the cross beam, the second target warping degree laser measuring instrument is located at the central position below the correction platform, and a through hole is formed in the correction platform directly above the second target warping degree laser measuring instrument.

[0012] Preferably, the warping edge supporting mechanism comprises a sliding seat, a supporting plate movably arranged on the sliding seat, and a tension spring elastically connecting the sliding seat and the supporting plate.

[0013] Preferably, the sliding seat is fixed on the sliding block of the linear guide rail, the top of the correction platform is provided with a sliding groove connected with the sliding seat along the length direction, the two sides of the sliding seat are provided with a waist-shaped slot and an upward half-opened clamping port, and the inside of the sliding seat is fixed with a hanging rod.

[0014] Preferably, the supporting plate is in L-shaped structure, the two sides of the supporting plate are fixed with a first limiting rod located in the waist-shaped slot and a second limiting rod capable of being clamped in the clamping port.

[0015] Preferably, the bottom of the supporting plate is provided with a through slot, the second limiting rod penetrates through the through slot, one end of the tension spring is fixed on the hanging rod, and the other end of the tension spring is fixed on the second limiting rod through the through slot.

[0016] The present application has the following beneficial effects: In the present application, the support frame is driven by the first oil cylinder to lift and adjust the contact pressure between the rolling mechanism and the target material, and the second oil cylinder drives the rolling mechanism to move horizontally, so that the roller rolls on the surface of the target material, disperses the local warping into continuous rolling stress, avoids the damage of the target material caused by the excessive stress of a single point, and elastically connects the roller of the rolling mechanism with the cross beam through the spring, so that the roller can adapt to the different positions of the maximum warping degree of the target material, and corrects the target material. The present application continuously rolls and rolls the target material through the lifting and horizontally movable rolling mechanism, realizes the change from "single point pressing" to "multi-point rolling and rolling", and improves the correction uniformity. In the present application, the sliding seat slides along the correction platform through the linear guide rail, can approach or move away from the edge of the target material, when the edge of the target material is warped, the supporting plate is resisted by the edge of the target material, rotates around the first limiting rod as the shaft, simultaneously stretches the tension spring, so that the surface of the supporting plate always adheres to the warped edge of the target material like "follow-up clamping", with the rolling of the rolling mechanism, the edge of the target material is gradually flattened, the rebounding force of the tension spring drives the supporting plate to slide through the waist-shaped slot, and always maintains the support to the edge. The present application specially adapts to the self-adaptive constraint of the warping of the edge of the target material, and prevents the edge from being warped again during the correction process. In the present application, the first target warping degree laser measuring instrument is fixed on the bottom of the cross beam of the rolling mechanism, moves synchronously with the rolling mechanism, can measure the warping degree of the current rolling position in real time, directly feeds back to the control system to adjust the rolling degree, and the second laser measuring instrument is located below the correction platform corresponding to the through hole, forms up-down echo with the first laser, respectively monitors the warping changes before and after rolling, and realizes the closed-loop control of "correction-measurement-adjustment". BRIEF DESCRIPTION OF DRAWINGS

[0017] The present application will be further described in detail in combination with the drawings and specific embodiments.

[0018] Figure 1A copper sputtering target material warping degree automatic correction and detection device overall structure schematic view is provided for the present application; Figure 2 A copper sputtering target material warping degree automatic correction and detection device overall front view structure schematic view is provided for the present application; Figure 3 A rolling mechanism structure schematic view is provided for the present application; Figure 4 Another view structure schematic view of the rolling mechanism provided for the present application is provided; Figure 5 A warped edge supporting mechanism structure schematic view is provided for the present application; Figure 6 A warped edge supporting mechanism initial state schematic view is provided for the present application; Figure 7 A warped edge supporting mechanism and target material warping edge contact schematic view is provided for the present application; Figure 8 A warped edge supporting mechanism and target material warping edge contact schematic view is provided for the present application; In the figure: 1, correction platform; 11, through hole; 2, guide column; 3, top plate; 4, first oil cylinder; 5, support frame; 51, lifting seat; 52, guide rod; 6, rolling mechanism; 61, cross beam; 62, first wheel frame; 63, second wheel frame; 64, roller; 65, double shaft motor; 66, threaded rod; 67, spline sleeve; 68, spring; 7, warped edge supporting mechanism; 71, sliding seat; 711, waist-shaped groove; 712, bayonet; 713, hanging rod; 72, supporting plate; 721, first limiting rod; 722, second limiting rod; 723, through groove; 73, tension spring; 8, linear guide rail; 9, warping degree measuring instrument; 10, second oil cylinder. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present application.

[0020] Please refer to Figure 1 and Figure 2The application provides a technical scheme: a copper sputtering target warping degree automatic correction and detection device, which comprises a correction platform 1 and a warping degree measuring instrument 9 for detecting the warping degree of a target placed on the correction platform 1, a top plate 3 is fixed above the correction platform 1 through rectangularly distributed guide columns 2, first oil cylinders 4 are symmetrically fixed on the two sides of the top plate 3, a support frame 5 that is driven by the first oil cylinders 4 to move up and down is arranged below the top plate 3, a second oil cylinder 10 is fixed on one side of the support frame 5, a rolling mechanism 6 that is driven by the second oil cylinder 10 to move horizontally and roll press the warped target is arranged at the middle position of the support frame 5, linear guides 8 are symmetrically arranged below the correction platform 1, and edge supporting mechanisms 7 that are driven by the linear guides 8 to adaptively support the edge of the target are symmetrically arranged on the table surface of the correction platform 1.

[0021] Further, the support frame 5 comprises two lifting seats 51, the two lifting seats 51 are respectively slidably connected to the guide columns 2 on the two sides of the correction platform 1, a horizontal guide rod 52 is fixed between the two lifting seats 51, and the support frame 5 is driven by the first oil cylinders 4 to move up and down, so that the contact pressure of the rolling mechanism 6 and the target is adjusted.

[0022] Please refer to Figure 3 and Figure 4 The rolling mechanism 6 comprises a cross beam 61, first wheel frames 62 and second wheel frames 63 that are symmetrically arranged on the two sides of the cross beam 61, the cross beam 61 is fixed to the piston rod end of the second oil cylinder 10, the cross beam 61, the first wheel frames 62 and the second wheel frames 63 are all slidably connected to the guide rod 52, the cross beam 61 is elastically connected to the first wheel frames 62 and the second wheel frames 63 through springs 68, the bottom of each of the first wheel frames 62 and the second wheel frames 63 is rotatably connected to a roller 64, the second oil cylinder 10 drives the rolling mechanism 6 to move in the horizontal direction, so that the roller 64 rolls on the surface of the target, the local warping is dispersed into continuous rolling stress, and the damage of the target caused by excessive stress of a single point is avoided, the roller 64 of the rolling mechanism is elastically connected to the cross beam 61 through the springs 68, can adapt to the different positions of the maximum warping degree of the target, and realizes the correction of the target.

[0023] Further, the rolling mechanism 6 further comprises a driving member for driving the relative movement of the first wheel frames 62 and the second wheel frames 63, the driving member comprises a double-shaft motor 65, the double-shaft motor 65 is fixed to the middle position of the cross beam 61, symmetrically threaded rods 66 are fixed to the two output ends of the double-shaft motor 65, the threaded rods 66 are arranged in parallel with the guide rod 52, a spline sleeve 67 is rotatably connected to the outer side of the end of each threaded rod 66 away from the double-shaft motor 65, the spline sleeve 67 is slidably connected to the lifting seat 51, and the threaded rods 66 at the two ends of the double-shaft motor 65 are threadedly connected with the first wheel frames 62 and the second wheel frames 63 respectively.

[0024] In a preferred embodiment, the warping degree measuring instrument 9 comprises a first target warping degree laser measuring instrument and a second target warping degree laser measuring instrument, the first target warping degree laser measuring instrument is fixed at the middle position of the bottom surface of the beam 61, and the second target warping degree laser measuring instrument is located at the center position below the correction platform 1, and the correction platform 1 is located directly above the second target warping degree laser measuring instrument and is provided with a through hole 11.

[0025] Please refer to Figure 5 、 Figure 6 、 Figure 7 and Figure 8 , the edge warping supporting mechanism 7 comprises a sliding seat 71, a supporting plate 72 movably arranged on the sliding seat 71, and a tension spring 73 elastically connecting the sliding seat 71 and the supporting plate 72, the sliding seat 71 is fixed on the sliding block of the linear guide rail 8, the top of the correction platform 1 is provided with a sliding groove in the length direction of the correction platform 1 and is in sliding connection with the sliding seat 71, the two sides of the sliding seat 71 are provided with a waist-shaped groove 711 consistent with the direction of the sliding groove and a half-opened clamping hole 712, a hanging rod 713 is fixed on the inner side of the sliding seat 71, the supporting plate 72 is in L-shaped structure, the two sides of the supporting plate 72 are fixed with a first limiting rod 721 located in the waist-shaped groove 711 and a second limiting rod 722 capable of being clamped in the clamping hole 712, the bottom of the supporting plate 72 is provided with a through groove 723, the second limiting rod 722 penetrates through the through groove 723, one end of the tension spring 73 is fixed on the hanging rod 713, and the other end of the tension spring 73 is fixed on the second limiting rod 722 through the through groove 723, the sliding seat 71 slides along the correction platform 1 through the linear guide rail 8 and can approach or move away from the edge of the target material, when the edge of the target material is warped, the supporting plate 72 is resisted by the edge of the target material, rotates about the first limiting rod 721, and stretches the tension spring 73 at the same time, so that the surface of the supporting plate 72 always adheres to the warped edge of the target material, which is similar to "follow-up clamping", with the rolling of the rolling mechanism 6, the edge of the target material is gradually flattened, the rebounding force of the tension spring 73 drives the supporting plate 72 to slide through the waist-shaped groove 711 and always supports the edge of the target material.

[0026] The working principle and use process of the present application are as follows: when in use, the target material to be corrected is placed on the first door frame edge 1, and the center line of the target material to be corrected is close to the length direction axis of the first door frame edge 1, then the 8 synchronous working drive reinforcing plate member 7 below the two sides of the first door frame edge 1 is used to approach the target material, in the initial state, 72 on the through hole 71 is in the state shown in Figure 6 , because the middle part of the target material is upwardly arched, the edge end surface of the target material has a certain angle with the table surface of the first door frame edge 1, therefore, when the through hole 71 continues to approach the target material, 72 can be blocked by the edge of the target material to start stretching 73 and adaptively rotate outwardly about 721, until the plate surface of 72 is adhered to the end surface of the target material in the warped state; Then 10 starts to drive the second fastener 6 to move horizontally, and the first target warping laser measuring instrument at the bottom of 61 detects the warping degree of the target at different positions in the length direction in real time during the movement, and 64 on 62 and 63 are in the position where the axes coincide in the initial state, and 64 is in the position where the target warping degree is maximum under the adjustment of 10; After the adjustment is completed, the positioning pin 4 starts to work, and the pressing height is adjusted according to the data measured by the first target warping laser measuring instrument, and then 64 presses the position where the target warping degree is maximum to the horizontal, and then 65 in the middle position of 61 starts to work, drives 66 to rotate, and 62 and 63 are driven to move outward by the screw action of 66, 62 and 63, until 64 on one side touches 72, at this time, the position of 64 on the side does not change, and 64 on the other side continues to move to the opposite side until it touches 72 on the opposite side; When 64 on 62 and 63 moves relatively to roll and press the target, the edge warping of the target is gradually flattened, and 72 is adapted to the change in the width of the target on the first door frame edge 1 after the target is flattened by the sliding limit of 721 and 711 and the tension of the cooperation 73, so as to support and flatten the edge warping of the target, and 64 on 62 and 63 is continuously rolled and pressed on the target by the reciprocating drive of 65, and the real-time detection of the second target warping laser measuring instrument, until the warping degree of the target meets the production requirements.

[0027] The technical innovation of the present application is to solve the problems of the prior art in the uniformity of large-area target correction, edge deformation control, dynamic precision feedback and the like by three innovations of "multi-point rolling and rolling instead of single-point pressing", "edge self-adaptive support" and "measurement-correction real-time linkage", which is especially suitable for copper sputtering target and other materials with high requirements for surface flatness and easy to be damaged by rigid correction, and significantly improves the correction efficiency and the qualified rate of finished products.

[0028] The above is only a preferred embodiment of the present application, and is not used to limit the present application, and any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An automatic correction and detection device for the warpage of a copper sputtering target, comprising a correction platform (1) and a warpage measuring instrument (9) for detecting the warpage of the target placed on the correction platform (1), characterized in that, A top plate (3) is fixed above the correction platform (1) by rectangular guide columns (2). A first hydraulic cylinder (4) is symmetrically fixed on both sides of the top plate (3). A support frame (5) is provided below the top plate (3) and moves up and down under the drive of the first hydraulic cylinder (4). A second hydraulic cylinder (10) is fixed on one side of the support frame (5). A rolling mechanism (6) is provided in the middle of the support frame (5) and moves horizontally under the drive of the second hydraulic cylinder (10) to roll and correct the warped target material. A linear guide rail (8) is symmetrically provided below the correction platform (1). A warped edge support mechanism (7) is symmetrically provided on the table surface of the correction platform (1) and adaptively supports the warped edge of the target material under the drive of the linear guide rail (8).

2. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 1, characterized in that, The support frame (5) includes two lifting seats (51), which are slidably connected to the guide columns (2) on both sides of the correction platform (1), and a horizontally arranged guide rod (52) is fixed between the two lifting seats (51).

3. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 2, characterized in that, The rolling mechanism (6) includes a crossbeam (61) and a first wheel frame (62) and a second wheel frame (63) symmetrically distributed on both sides of the crossbeam (61). The crossbeam (61) is fixed to the piston rod end of the second oil cylinder (10). The crossbeam (61), the first wheel frame (62) and the second wheel frame (63) are all slidably connected to the guide rod (52). The crossbeam (61) is elastically connected to the first wheel frame (62) and the second wheel frame (63) by springs (68). The bottom of the first wheel frame (62) and the second wheel frame (63) are rotatably connected to rollers (64).

4. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 3, characterized in that, The rolling mechanism (6) also includes a drive component for driving the first wheel frame (62) and the second wheel frame (63) to move relative to each other.

5. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 4, characterized in that, The driving component includes a dual-axis motor (65), which is fixed at the middle position of the crossbeam (61). The two output ends of the dual-axis motor (65) are fixed with symmetrical threaded rods (66), and the threaded rods (66) are arranged parallel to the guide rod (52). A spline sleeve (67) is rotatably connected to the outer side of the threaded rod (66) away from the dual-axis motor (65). The spline sleeve (67) is slidably connected to the lifting seat (51). The threaded rods (66) at both ends of the dual-axis motor (65) are threadedly connected to the first wheel frame (62) and the second wheel frame (63) respectively.

6. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 3, characterized in that, The warpage measuring instrument (9) includes a first target warpage laser measuring instrument and a second target warpage laser measuring instrument. The first target warpage laser measuring instrument is fixed at the middle position of the bottom surface of the crossbeam (61). The second target warpage laser measuring instrument is located at the center position below the calibration platform (1). The calibration platform (1) is provided with a through hole (11) directly above the second target warpage laser measuring instrument.

7. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 1, characterized in that, The edge support mechanism (7) includes a slide (71), a support plate (72) movably mounted on the slide (71), and a tension spring (73) elastically connecting the slide (71) and the support plate (72).

8. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 7, characterized in that, The slide block (71) is fixed on the slider of the linear guide rail (8). The top of the calibration platform (1) is provided with a sliding groove that is slidably connected to the slide block (71) along its length direction. The two sides of the slide block (71) are provided with waist-shaped grooves (711) that are consistent with the direction of the sliding groove, and a half-opening buckle (712). A hanging rod (713) is fixed inside the slide block (71).

9. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 8, characterized in that, The support plate (72) has an L-shaped structure. The two sides of the support plate (72) are fixed with a first limiting rod (721) located in the waist-shaped groove (711) and a second limiting rod (722) that can be locked in the slot (712).

10. The automatic correction and detection device for the warpage of a copper sputtering target according to claim 9, characterized in that, The bottom of the support plate (72) is provided with a through groove (723), the second limiting rod (722) passes through the through groove (723), one end of the tension spring (73) is fixed to the hanging rod (713), and the other end of the tension spring (73) is fixed to the second limiting rod (722) through the through groove (723).

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