Drive control circuit for electrostatic chuck power supply and electrostatic chuck power supply

Abstract

According to the driving control circuit for the electrostatic chuck power supply and the electrostatic chuck power supply, the driving control circuit is arranged in the electrostatic chuck power supply, a high-voltage output voltage signal of a high-voltage amplifying circuit can be obtained through a signal generating and processing feedback circuit, and according to a negative feedback adjusting mechanism, the driving control circuit is used for driving the electrostatic chuck power supply. A power supply waveform control signal for controlling a high-voltage amplification circuit to output a high-voltage output voltage signal is adjusted, and the high-voltage output voltage signal output by the high-voltage amplification circuit is adjusted to be output, so that the effect of controlling the signal precision of the high-voltage output voltage signal output by the electrostatic chuck power supply is achieved, and the output stability of the electrostatic chuck power supply is improved. Therefore, the stability of an electrostatic field generated by the electrostatic chuck is guaranteed, and the wafer fixing process precision of the electrostatic chuck is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of general control or regulation, and in particular to a driving control circuit for an electrostatic chuck power supply and an electrostatic chuck power supply. BACKGROUND

[0002] As a device that utilizes the invisible attractive force generated by the electrostatic field, the electrostatic chuck is often used in advanced semiconductor manufacturing processes to replace traditional mechanical clamps to achieve non-damage fixation of ultra-thin and fragile semiconductor base materials (also known as wafers), and is one of the key components to support the implementation of advanced processes below 7nm.

[0003] However, the power supply (hereinafter referred to as electrostatic chuck power supply) of the electrostatic chuck has a complex working environment and is easily disturbed, resulting in poor stability of the electrostatic field generated by the electrostatic chuck, which affects the precision of the wafer fixed by the electrostatic chuck. SUMMARY

[0004] Therefore, the embodiments of the present application provide a driving control circuit for an electrostatic chuck power supply and an electrostatic chuck power supply to improve the output stability of the electrostatic chuck power supply, thereby ensuring the stability of the electrostatic field generated by the electrostatic chuck and further ensuring the process precision of the wafer fixed by the electrostatic chuck.

[0005] In a first aspect, the present application provides a driving control circuit for an electrostatic chuck power supply, wherein the driving control circuit comprises: a signal generation and processing feedback circuit and a plurality of high-voltage amplification circuits; the output end of the signal generation and processing feedback circuit is connected to the input end of the high-voltage amplification circuit, the input end of the high-voltage amplification circuit is connected to the power supply voltage of the electrostatic chuck power supply, and the output end of the high-voltage amplification circuit is connected to the electrostatic chuck and the signal generation and processing feedback circuit; wherein: The signal generation and processing feedback circuit is configured to obtain a power waveform control signal, divide and process the power waveform control signal into a positive control signal and a negative control signal, and output the positive control signal and the negative control signal to the high-voltage amplification circuit; Each high-voltage amplification circuit is configured to linearly amplify the positive control signal and the negative control signal based on the power supply voltage to generate a high-voltage output voltage signal, and output the high-voltage output voltage signal to the electrostatic chuck; The signal generation and processing feedback circuit is further configured to obtain the high-voltage output voltage signal, compare a low-voltage processing signal corresponding to the high-voltage output voltage signal with the power waveform control signal according to a negative feedback adjustment mechanism, and generate a new power waveform control signal based on the comparison result In a second aspect, the application provides an electrostatic chuck power supply, wherein the electrostatic chuck power supply comprises the driving control circuit for the electrostatic chuck power supply according to the first aspect.

[0006] Advantages of the application: The application provides a driving control circuit for an electrostatic chuck power supply and an electrostatic chuck power supply. By arranging the driving control circuit for the electrostatic chuck power supply, the high-voltage output voltage signal of the high-voltage amplification circuit can be obtained through the signal generation and processing feedback circuit, and the power supply waveform control signal for controlling the high-voltage output voltage signal output by the high-voltage amplification circuit can be adjusted according to the negative feedback adjustment mechanism, so that the high-voltage output voltage signal output by the high-voltage amplification circuit is adjusted, the signal precision of the high-voltage output voltage signal output by the electrostatic chuck power supply is controlled, the output stability of the electrostatic chuck power supply is improved, the stability of the electrostatic field generated by the electrostatic chuck is ensured, and the process precision of the wafer fixed by the electrostatic chuck is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0007] In the following description of exemplary embodiments in conjunction with the accompanying drawings, more details, features and advantages of the application are disclosed in the drawings, in which: Figure 1 A circuit architecture schematic diagram of the driving control circuit for the electrostatic chuck power supply provided by the embodiments of the application is shown; Figure 2 A schematic diagram of the architecture of the electrostatic chuck power supply provided by the application is shown; Figure 3 A circuit architecture schematic diagram of the signal generation and processing feedback circuit provided by the application is shown; Figure 4 A circuit architecture schematic diagram of the first signal processing module of the signal generation and processing feedback circuit provided by the application is shown; Figure 5 A circuit architecture schematic diagram of the second signal processing module of the signal generation and processing feedback circuit provided by the application is shown; Figure 6 A circuit structure schematic diagram of the high-voltage amplification output circuit provided by the application is shown; Figure 7 A circuit structure schematic diagram of the high-voltage amplification output circuit provided by the application is shown; Figure 8 A circuit structure schematic diagram of the positive amplification output circuit provided by the application is shown; Figure 9 A circuit structure schematic diagram of the positive amplification output circuit provided by the application is shown; Figure 10 A circuit structure schematic diagram of the negative amplification output circuit provided by the application is shown. DETAILED DESCRIPTION

[0008] Embodiments of the present application will be described in more detail with reference to the drawings. While several embodiments of the application are shown in the drawings, it is understood that the application can be embodied in various forms and should not be construed as limited to the embodiments set forth in the description. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and fully convey the scope of the application to those skilled in the art.

[0009] It should be understood that each of the steps recited in the method embodiments of the present application can be performed in different orders and / or in parallel. In addition, the method embodiments can include additional steps and / or omit performing the steps shown. The scope of the present application is not limited in this respect.

[0010] The term "comprising" and variations thereof as used herein are used inclusively, i.e., "comprising, but not limited to." The term "based on" is "based at least in part on." The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments." Related terms are defined in the description below. It should be noted that reference to a "first," "second," etc. concept does not imply that the concepts so designated must be different, but rather that the different concepts are to be distinguished from one another by that designation.

[0011] It should be noted that the terms "a" and "an" and "the" and similar referents used in the context of describing the application are to be construed to cover both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. Recitation of ranges of values herein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein, and each separate value is incorporated in the specification as if it were individually recited herein.

[0012] In the advanced semiconductor manufacturing process, based on the non-contact adsorption ability of the electrostatic chuck (ESC), the electrostatic chuck is used to adsorb the wafer to realize the pick-and-place of the semiconductor wafer. The implementation principle is that a precision electrode is embedded in the electrostatic chuck, a high-voltage output voltage signal (usually the voltage range is 0~2KV) is input on the precision electrode, a high-voltage electric field is formed between the chuck surface and the wafer, the conductive wafer will generate charge induction in the high-voltage electric field, the side of the wafer close to the electrode induces the opposite charge of the electrode, and the other side induces the same charge, thereby generating stable coulomb force or Johnson-Rahbek effect to realize stable adsorption of the wafer. When the adsorbed wafer needs to be placed down, the power supply voltage of the electrode is cut off, and the residual charge in the electric field is neutralized, so that the wafer can be placed down.

[0013] It is evident that the ability of an electrostatic chuck to stably pick up and place wafers depends on whether the high-voltage electric field can stably output a stable high-voltage current. In other words, the power supply of the electrostatic chuck (hereinafter referred to as the electrostatic chuck power supply) needs to output a stable high-voltage signal under complex operating conditions (such as high-frequency electromagnetic interference, transient load changes, etc.). The technical specifications of the electrostatic chuck power supply directly determine the control accuracy of the electrostatic chuck's adsorption force and the reliability of the process.

[0014] To ensure the precision of electrostatic chuck adsorption force control, thereby controlling the accuracy of wafer pick-and-place operations, this application provides a drive control circuit for an electrostatic chuck power supply and an electrostatic chuck power supply. Firstly, this application provides a drive control circuit for the electrostatic chuck power supply; secondly, it provides an electrostatic chuck power supply internally incorporating the drive control circuit described in the first aspect. The drive control circuit provided in this application controls the electrostatic chuck power supply to stably output a high-voltage signal, thereby forming a stable high-voltage electric field, further ensuring the adsorption precision of the electrostatic chuck adsorption force and the reliability of the process.

[0015] Firstly, in some possible embodiments, the drive control circuit for the electrostatic chuck power supply provided in this application can be as follows: Figure 1 As shown, it includes: The system includes a signal generation and processing feedback circuit and several high-voltage amplifier circuits. The output of the signal generation and processing feedback circuit is connected to the input of the high-voltage amplifier circuit. The input of the high-voltage amplifier circuit is connected to the power supply voltage of the electrostatic chuck. The output of the high-voltage amplifier circuit is connected to the electrostatic chuck and the signal generation and processing feedback circuit. Wherein: The signal generation and processing feedback circuit is used to acquire the power waveform control signal, divide the power waveform control signal into a positive control signal and a negative control signal, and output the positive control signal and the negative control signal to the high voltage amplifier circuit. Each of the high-voltage amplifier circuits is used to linearly amplify the positive control signal and the negative control signal based on the power supply voltage, generate a high-voltage output voltage signal, and output the high-voltage output voltage signal to the electrostatic chuck. The signal generation and processing feedback circuit is also used to acquire the high-voltage output voltage signal, compare the low-voltage processing signal corresponding to the high-voltage output voltage signal with the power waveform control signal according to the negative feedback adjustment mechanism, and generate a new power waveform control signal based on the comparison result.

[0016] The drive control circuit provided in this application is selected. The high voltage output voltage signal of the high voltage amplifier circuit is obtained through the signal generation and processing feedback circuit. According to the negative feedback adjustment mechanism, the power waveform control signal that controls the output high voltage voltage signal of the high voltage amplifier circuit is adjusted, thereby adjusting the output high voltage voltage signal of the high voltage amplifier circuit. This achieves the effect of controlling the accuracy of the high voltage output voltage signal of the electrostatic chuck power supply, thereby improving the stability of the electrostatic chuck power supply output, ensuring the stability of the electrostatic field generated by the electrostatic chuck, and ensuring the process accuracy of the electrostatic chuck fixing the wafer.

[0017] The following section will provide a detailed explanation of the drive control circuit using specific examples: Regarding the application scenario of the drive control circuit provided in the first aspect of this application: The drive control circuit for the electrostatic chuck power supply provided in this application is specifically applied inside the electrostatic chuck power supply provided in the second aspect. As one implementation method, it can be used as follows: Figure 2 As shown, the electrostatic chuck power supply provided in the second aspect includes the drive control circuit provided in the first aspect. The drive control circuit includes: a signal generation and processing feedback circuit and a multi-channel high-voltage amplifier circuit.

[0018] For example, it can be as follows Figure 2 As shown, the electrostatic chuck power supply includes six high-voltage amplifier circuits to achieve six high-voltage outputs. Each high-voltage amplifier circuit is also called a single high-voltage amplifier circuit, so as to form six voltage outputs, which are simultaneously output to the electrostatic chuck to form a high-voltage electric field between the electrostatic chuck and the wafer.

[0019] In the embodiments of this application, each high-voltage amplifier circuit can be as follows: Figure 2 As shown in the right box, the circuit includes two parts: a positive amplification output circuit and a negative amplification output circuit. Each positive amplification output circuit and negative amplification output circuit are respectively connected to a single output electrode of the high voltage amplifier circuit to provide the required high voltage output signal to the output electrode. For example, this is to provide a ±1100V high voltage output signal input to a single output electrode.

[0020] In some possible embodiments, such as Figure 3As shown, the high-voltage amplifier circuit includes an output electrode. The signal generation and processing feedback circuit includes a first signal processing module and a second signal processing module. The input terminal of the first signal processing module is connected to the output electrode. The first signal processing module is used to acquire the high-voltage output signal output from the output electrode, perform signal processing on the high-voltage output signal to obtain a low-voltage waveform corresponding to the high-voltage output signal, and generate a new power supply waveform control signal based on the comparison result between the low-voltage waveform and the power supply waveform control signal. This new power supply waveform control signal is then output to the second signal processing module to generate a new positive control signal and a new negative control signal.

[0021] As one implementation method, the first signal processing module can be as follows: Figure 4 As shown, it includes: a signal acquisition unit, a voltage follower unit, a filtering unit, and a signal generation unit. The high-voltage output voltage signal is acquired by the signal acquisition unit in this first signal processing module. The signal acquisition unit, voltage follower unit, and filtering unit in the first signal processing module then process this high-voltage output voltage signal to obtain the corresponding low-voltage processed signal, specifically a low-voltage waveform signal. Specifically: The signal acquisition unit is connected to the output electrode of the high-voltage amplifier circuit. The output of the signal acquisition unit is connected to a voltage follower unit, the output of the voltage follower unit is connected to a filter unit, and the output of the filter unit is connected to the signal generation unit. The signal acquisition unit is used to acquire the high-voltage output signal from the output electrode. This signal acquisition unit can be a sampling module, such as a voltage sampler, used to acquire the high-voltage output signal. In one implementation, a voltage divider resistor is connected between the signal acquisition unit and the voltage follower unit to step down the high-voltage output signal from the output electrode, for example, stepping down the 1100V high-voltage output signal to a 10V low-voltage output signal, and then outputting this low-voltage output signal to the voltage follower unit.

[0022] The voltage follower unit performs impedance matching and signal isolation processing on the high-voltage output signal acquired by the signal acquisition unit. Specifically, the voltage follower unit can be a voltage follower that samples the low-voltage signal output by the signal acquisition unit, acquires a sampled signal, and isolates this sampled signal from the low-voltage signal output by the signal acquisition unit to avoid instability issues with the low-voltage signal. Further, the isolated sampled signal is sent to the filtering unit.

[0023] The filtering unit is used to filter the sampled signal output by the voltage follower unit and output the filtered signal to the signal generation unit. For example, the filter can be used to remove noise from the sampled signal and output the filtered signal to the signal generation unit.

[0024] The signal generation unit, including a comparison circuit, compares the waveform of the low-voltage processed signal output by the filter unit with the waveform of the power supply waveform control signal to determine whether there is an anomaly in the high-voltage output voltage signal of the current high-voltage amplifier circuit. If the comparison result shows that the current high-voltage output voltage signal is abnormal, a new power supply waveform control signal is further generated to generate a new high-voltage output voltage signal, thereby suppressing the anomaly. For example, assuming the current high-voltage output voltage signal is a sine wave, a voltage spike appears at 1 / 3T (T is the period of the sine wave). At this time, a new power supply waveform control signal can be generated to control a voltage signal at the 1 / 3T position that is opposite to the voltage spike. When a new high-voltage sine wave is further generated, the opposite voltage signal can be used to suppress the voltage spike, thereby maintaining the stability of the high-voltage output voltage signal.

[0025] In some possible embodiments, the high-voltage amplifier circuit includes an optocoupler, and the second signal processing module includes a switching unit, with the output terminal of the second signal processing module connected to the optocoupler. The second signal processing module is used to acquire the power waveform control signal and, according to the positive or negative polarity of the power waveform control signal, control the switching unit to form a positive control signal path or a negative control signal path, so that the positive control signal in the power waveform control signal flows to the optocoupler through the positive control signal path, or so that the negative control signal in the power waveform control signal flows to the optocoupler through the negative control signal path.

[0026] As one implementation method, it can be as follows Figure 5 As shown, the second signal processing module includes an integrating filter unit and a switching unit (also known as a signal separation unit). The integrating filter unit includes an integrating circuit and a filtering circuit. The output of the integrating circuit is connected to the input of the filtering circuit. The integrating circuit is used to prevent voltage spikes from damaging the electrostatic chuck. In this embodiment, the integrating circuit includes a protection diode for circuit protection.

[0027] The switching unit can be a switching circuit composed of transistors, specifically including: a switching circuit with NPN transistors and a switching circuit with PNP transistors. In this application, the power waveform control signal is a signal that can control the high-voltage amplifier circuit to output a corresponding high-voltage output voltage waveform. This power waveform control signal can initially come from program settings, such as a pulse width modulation (PWM) signal set by an industrial control computer based on semiconductor wafer processing. For example, for the semiconductor lithography process, a stable high-voltage DC voltage signal and a small pulse modulation signal are required. In this case, the industrial control computer can set a corresponding power waveform control signal according to the lithography process to control the high-voltage amplifier circuit to output a stable high-voltage DC voltage signal and the corresponding small pulse modulation signal. Alternatively, for the etching process, a high-frequency pulse high-voltage signal is required. In this case, the industrial control computer can set a corresponding power waveform control signal according to the etching process requirements to control the high-voltage amplifier circuit to amplify the power waveform control signal to obtain the corresponding high-frequency pulse high-voltage signal.

[0028] In this embodiment, due to the different processes required for semiconductor wafer fabrication, the waveform and magnitude of the corresponding high-voltage output voltage signal will vary. Therefore, the power waveform control signal initially depends on the program set for the process. In this application, the power waveform control signal can also be adjusted through the negative feedback mechanism of the signal generation and processing feedback circuit. After the first signal processing module collects, voltage-follows, and filters the high-voltage output voltage signal, the comparator in the signal generation unit compares the difference between the actual high-voltage output voltage signal and the expected high-voltage output voltage signal corresponding to the power waveform control signal, and fine-tunes the power waveform control signal to achieve fine-tuning of the actual high-voltage output voltage signal so that the final output high-voltage output voltage signal meets the requirements of semiconductor wafer fabrication.

[0029] The second signal processing module in the signal generation and processing feedback circuit separates the power waveform control signal through a switching unit. Based on the polarity of the power waveform control signal, it outputs two parts: a positive control signal and a negative control signal. Specifically, for the positive portion of the power waveform control signal, the switching circuit of the NPN transistor is turned on to form a positive control signal path. Similarly, for the negative portion of the power waveform control signal, the switching circuit of the PNP transistor is turned on to form a negative control signal path.

[0030] In this application, the output terminal of the positive control signal path is connected to an optocoupler in the high-voltage amplifier circuit, and the output terminal of the negative control signal path is also connected to an optocoupler in the high-voltage amplifier circuit. Based on the polarity of the power supply waveform control signal, the optocouplers in the high-voltage amplifier circuit can be further divided into positive input optocouplers and negative input optocouplers. Thus, the power supply waveform control signal can be integrated and filtered by the second signal processing module, simultaneously splitting the power supply waveform control signal into two parts: a positive control signal and a negative control signal. This allows the subsequent high-voltage amplifier circuit to amplify the positive and negative control signal parts of the power supply waveform control signal separately, thereby improving the stability of the high-voltage output voltage signal from the high-voltage amplifier circuit.

[0031] Among them, such as Figure 2 As shown, each high-voltage amplifier circuit may include a positive amplification output circuit and a negative amplification output circuit. In some possible embodiments, the positive amplification output circuit and the negative amplification output circuit have the same circuit structure and performance parameters, and the positive amplification output circuit and the negative amplification output circuit are connected in a push-pull topology. The identical circuit structure and performance parameters ensure that the output positive high-voltage voltage signal and the negative high-voltage voltage signal are identical in all aspects except for polarity, such as waveform, amplitude, period, and frequency. Specifically, identical circuit structure and performance parameters mean that the electronic components used in the positive amplification output circuit are the same, and the connection methods between the electronic components are the same.

[0032] The positive amplification output circuit and the negative amplification output circuit are connected in a push-pull topology, which can be used as follows: Figure 6 As shown, the output terminal of the positive amplification output circuit and the output terminal of the negative amplification output circuit are respectively connected to the output electrodes. The power supply terminal of the positive amplification output circuit is connected to the positive power supply voltage signal provided by the electrostatic chuck power supply, and the power supply terminal of the negative amplification output circuit is connected to the negative power supply voltage signal provided by the electrostatic chuck power supply. The positive amplification output circuit is used to linearly amplify the positive control signal based on the positive power supply voltage signal to generate a positive high voltage output signal, and output it through the output electrode. The negative amplification output circuit is used to linearly amplify the negative control signal based on the negative power supply voltage signal to generate a negative high voltage output signal, and output it through the output electrode.

[0033] The positive amplification output circuit includes a positive input optocoupler, through which the positive control signal is obtained. Further, the positive control signal is linearly amplified by the positive amplification output circuit, where the specific amplification factor depends on the control module in the positive amplification output circuit and the positive power supply voltage signal obtained by the positive amplification output circuit. Similarly, the negative amplification output circuit includes a negative input optocoupler, through which the negative control signal is obtained. The negative control signal is linearly amplified by the negative amplification output circuit, where the specific amplification factor depends on the control module in the negative amplification output circuit and the negative power supply voltage signal obtained by the negative amplification output circuit. For example, it can be as follows... Figure 7 As shown, the positive amplification output circuit includes: a first control module, a second control module, a third control module, and a positive input optocoupler. The negative amplification output circuit includes: a fourth control module, a fifth control module, a sixth control module, and a negative input optocoupler.

[0034] Since the positive and negative amplification output circuits have the same circuit structure and performance parameters, this means that the first and fourth control modules, the second and fifth control modules, the third and sixth control modules, and the positive and negative input optocouplers also have the same circuit structure and performance parameters. In other words, the first, second, and third control modules and the positive input optocoupler in the positive amplification output circuit correspond one-to-one with the fourth, fifth, and sixth control modules and the optocoupler in the negative amplification output circuit.

[0035] As one implementation method, it can be as follows Figure 7 As shown, the first, second, and third control modules in the positive amplification output circuit are connected in series and then connected to the positive input optocoupler. Similarly, the fourth, fifth, and sixth control modules in the negative amplification output circuit are connected in series and then connected to the negative input optocoupler. This multi-stage series control circuit topology enables linear amplification of both positive and negative control signals from low-voltage input to high-voltage output.

[0036] In this application, the control module can be a combined circuit composed of a power switching transistor and electronic components configured for that power switching transistor. For example, the control module can be a modular control circuit composed of a transistor and a voltage-regulating capacitor and resistor near the transistor. For example, it can be as follows... Figure 8As shown, the first control module may include a first control unit, a first voltage regulator unit near the first control unit, and a first unidirectional conduction unit. The second control module may include a second control unit, a second voltage regulator unit near the second control unit, and a second unidirectional conduction unit. The third control module may include a third control unit, a third voltage regulator unit near the third control unit, and a third unidirectional conduction unit. The positive amplification output circuit further includes: a fourth voltage regulator unit, a first unidirectional conduction control circuit, and a second unidirectional conduction control circuit, with the positive input optocoupler connected in parallel with the fourth voltage regulator unit. The first control module, second control module, and third control module are... Figure 8 Not shown in the image.

[0037] As shown in Figure 8, the input terminal of the first control unit is connected to a positive power supply voltage signal, the output terminal of the first control unit is connected to the input terminal of the second control unit, the control terminal of the first control unit is connected to the negative terminal of the first unidirectional conduction unit, the positive terminal of the first unidirectional conduction unit is connected to the output terminal of the first control unit, the control terminal of the first control unit is connected to the output terminal of the first voltage regulator unit, and the input terminal of the first voltage regulator unit is connected to a positive power supply voltage signal (e.g., +1100V). In this application, the positive power supply voltage signal comes from the power supply terminal of the electrostatic chuck power supply, specifically, it can be a high-voltage signal output from the power supply cabinet.

[0038] The output terminal of the second control unit is connected to the input terminal of the third control unit. The control terminal of the second control unit is connected to the negative terminal of the second unidirectional conduction unit. The positive terminal of the second unidirectional conduction unit is connected to the output terminal of the second control unit. The control terminal of the second control unit is connected to the output terminal of the second voltage regulator unit. The input terminal of the second voltage regulator unit is connected to the control terminal of the first control unit. The output terminal of the third control unit is connected to the input terminal of the positive input optocoupler, the control terminal of the third control unit is connected to the negative terminal of the third unidirectional conduction unit, the positive terminal of the third unidirectional conduction unit is connected to the output terminal of the third control unit, the control terminal of the third control unit is connected to the output terminal of the third voltage regulator unit, and the input terminal of the third voltage regulator unit is connected to the control terminal of the second control unit. The output terminal of the positive input optocoupler is connected to the output electrode, the output terminal of the fourth voltage regulator unit, and the positive input terminal of the second unidirectional conduction control circuit. The input terminal of the fourth voltage regulator unit is connected to the negative output terminal of the second unidirectional conduction control circuit.

[0039] The negative output terminal of the second unidirectional conduction control circuit is connected to the positive input terminal of the first unidirectional conduction control circuit and the control terminal of the second control unit. The negative output terminal of the first unidirectional conduction control circuit is connected to the positive power supply voltage signal.

[0040] Among them, it can be like Figure 9As shown, the first voltage regulator unit includes: a first voltage regulator capacitor (C1) and a first voltage regulator resistor (a resistor obtained by connecting 1-R1 to 1-R4 in series). The first voltage regulator unit is formed by connecting the first voltage regulator capacitor (C1) and the first voltage regulator resistor (a resistor obtained by connecting 1-R1 to 1-R4 in series) in parallel. The first terminal of the first voltage regulator unit is connected to the positive power supply voltage signal (+1100V), and the second terminal of the first voltage regulator unit is connected to the control terminal of the first control unit. The second voltage regulator unit includes a second voltage regulator capacitor (C2) and a second voltage regulator unidirectional conduction unit (D21). The second voltage regulator capacitor (C2) and the second voltage regulator unidirectional conduction unit (D21) are connected in parallel. The positive terminal of the second voltage regulator unidirectional conduction unit (D21) is connected to the second terminal of the second voltage regulator capacitor (C2) and the control terminal of the second control unit. The negative terminal of the second voltage regulator unidirectional conduction unit (D21) is connected to the first terminal of the second voltage regulator capacitor (C2) and the control terminal of the first control unit. The third voltage regulator unit includes: a third voltage regulator capacitor (C3) and a third voltage regulator resistor (a resistor obtained by connecting 3-R1 to 3-R4 in series), and a third voltage regulator unit obtained by connecting the third voltage regulator capacitor (C3) and the third voltage regulator resistor (a resistor obtained by connecting 3-R1 to 3-R4 in series) in parallel. The first end of the third voltage regulator unit is connected to the control terminal of the second control unit, and the second end of the third voltage regulator unit is connected to the control terminal of the third control unit. The fourth voltage regulator unit includes: a fourth voltage regulator capacitor (C4) and a fourth voltage regulator unidirectional conduction unit (D41). The fourth voltage regulator capacitor (C4) and the fourth voltage regulator unidirectional conduction unit (D41) are connected in parallel. The positive terminal of the fourth voltage regulator unidirectional conduction unit (D41) is connected to the second terminal of the fourth voltage regulator capacitor (C4) and the output terminal of the positive input optocoupler. The negative terminal of the fourth voltage regulator unidirectional conduction unit (D41) is connected to the first terminal of the fourth voltage regulator capacitor (C4) and the control terminal of the third control module.

[0041] In this embodiment, the first control unit, the third control unit, the fourth control unit, and the sixth control unit are transistors, specifically as follows: Figure 9 As shown, this is an NPN transistor, which can be a low-power NPN transistor or a high-power bipolar transistor. The second and fifth control units are MOSFETs, as shown in the diagram. Figure 9The diagram shows an N-channel MOSFET. Using the high-voltage amplifier circuit provided in this application, multiple low-power power transistors are connected in series. The collector of the previous stage power transistor is directly connected to the emitter of the next stage. Thus, the carriers output from the collector of the previous stage power transistor can be directly used as the input to the emitter of the next stage power transistor. This divides the long-distance carrier migration, which originally needed to be completed at a single base, into multiple short-distance carrier migrations. The residence time of carriers at the base of each stage power transistor is greatly shortened, the recombination probability is reduced, and the energy loss generated during migration can be effectively reduced, thereby achieving the effect of reducing static power consumption.

[0042] In this embodiment, the voltage-regulating unidirectional conduction unit is a Zener diode with positive and negative terminals. The Zener diode and the Zener capacitor are connected in parallel to form a voltage-regulating unit, which can prevent the generation of a capacitive effect between the wafer and the electrostatic chuck when the circuit switches between the positive and negative power supply voltage signals, thus preventing excessive voltage from damaging the circuit.

[0043] In this embodiment, the positive input optocoupler and negative input optocoupler are high-power optocouplers capable of withstanding high voltage, up to 15KV. When the positive control signal input to the optocoupler (the negative amplifier output circuit uses the same logic) is low, the optocoupler is in a cutoff state. The voltage across the third unidirectional conduction unit D3 is the same, thus the third control unit K3 is in a cutoff state, and the second control unit K2 is also in a cutoff state. Correspondingly, the voltage across the second unidirectional conduction unit D2 is the same, and the first control unit K1 is also in a cutoff state. Furthermore, the voltage across the first unidirectional conduction unit D1 is the same.

[0044] In this embodiment, the voltage-regulating resistors (1-R1~1-R4 and 3-R1~3-R4) are all high-resistance resistors, each with a resistance of 300KΩ. The current flow in the circuit is as follows: +1100V → First voltage-regulating resistor (1-R1~1-R4) → Second voltage-regulating unidirectional conducting unit (D21) → Third voltage-regulating resistor (3-R1~3-R4) → Fourth voltage-regulating unidirectional conducting unit (D41). At this time, the clamping voltage of the second voltage-regulating unidirectional conducting unit D21 and the fourth voltage-regulating unidirectional conducting unit D41 is 15V, and the entire circuit is in the off state.

[0045] When the positive control signal of the positive input optocoupler is high, the optocoupler will exhibit different resistance values ​​depending on the input voltage level. At this time, when the optocoupler's resistance changes, the previously off third unidirectional conducting unit D3 will conduct, and the third control unit K3 will also conduct. Correspondingly, the second unidirectional conducting unit D2 will conduct, and the second control unit K2 will also conduct, thus turning on the first unidirectional conducting unit D1 and the first control unit K1. Since a second voltage regulator unit, which includes a second voltage-regulated unidirectional conducting unit, is connected between the first and second control units, excessive voltage applied between the collector and emitter of the third control unit K3 can prevent damage to the MOSFET.

[0046] At this time, the current flow in the circuit is as follows: +1100V → First input resistor R1 → First control unit K1 → Second control unit K2 → Second input resistor R2 → Third control unit K3 → Output terminal of positive input optocoupler → Output electrode.

[0047] In this application, since the positive amplification output circuit and the negative amplification output circuit are connected in series, and the voltage drop of the transistor and MOSFET is fixed, and the resistance value of each resistor is fixed, the resistance value of the optocoupler will change, and the resistance value in the positive amplification output circuit and the negative amplification output circuit will change. According to the series voltage divider principle, the output electrodes can output different high voltage output signal waveforms.

[0048] In this application, the high-voltage amplifier circuit includes multiple voltage regulator units connected in parallel. Each voltage regulator unit has a parallel-connected voltage regulator capacitor to prevent sharp voltage waveforms caused by sudden voltage changes, thus avoiding damage to the wafer or electrostatic chuck. Furthermore, the high-voltage amplifier circuit of this application, for example, includes a first unidirectional conduction control circuit in the positive amplification output circuit, which is formed by multiple diodes connected in series. Specifically, it can be formed by multiple Zener diodes connected in series. For example, the first unidirectional conduction control circuit is formed by connecting the positive and negative terminals of Zener diodes D11~D16 in series, and the second unidirectional conduction control circuit is formed by connecting the positive and negative terminals of Zener diodes D21~D26 in series. This forms a two-stage protection circuit. If the entire electrostatic chuck power supply experiences an external high-voltage surge, the first and second unidirectional conduction control circuits will conduct, clamping a portion of the voltage to approximately 1200V to prevent circuit breakdown and excessive current damage to the wafer or electrostatic chuck.

[0049] As mentioned above, the negative amplification output circuit and the positive amplification output circuit have the same circuit structure and performance parameters, and their corresponding operating principles are also the same. Therefore, in some possible embodiments, such as Figure 7As shown, the negative amplification output circuit includes: a fourth control module, a fifth control module, a sixth control module, and a negative input optocoupler; the fourth control module, the fifth control module, and the sixth control module are connected in series and then connected to the negative input optocoupler.

[0050] As one implementation method, it can be as follows Figure 10 As shown, the fourth control module includes: a fourth control unit, a fifth voltage regulator unit, and a fourth unidirectional conduction unit; the fifth control module includes: a fifth control unit, a sixth voltage regulator unit, and a fifth unidirectional conduction unit; the sixth control module includes: a sixth control unit, a seventh voltage regulator unit, and a sixth unidirectional conduction unit; the negative amplification output circuit also includes: an eighth voltage regulator unit, a third unidirectional conduction control circuit, and a fourth unidirectional conduction control circuit; the negative input optocoupler is connected in parallel with the eighth voltage regulator unit, wherein: The input terminal of the fourth control unit is connected to the output electrode, the output terminal of the fourth control unit is connected to the input terminal of the fifth control unit, the control terminal of the fourth control unit is connected to the negative terminal of the fourth unidirectional conduction unit, the positive terminal of the fourth unidirectional conduction unit is connected to the output terminal of the fourth control unit, the control terminal of the fourth control unit is connected to the output terminal of the fifth voltage regulator unit, and the input terminal of the fifth voltage regulator unit is connected to the output electrode. The output terminal of the fifth control unit is connected to the input terminal of the sixth control unit. The control terminal of the fifth control unit is connected to the negative terminal of the fifth unidirectional conduction unit. The positive terminal of the fifth unidirectional conduction unit is connected to the output terminal of the fifth control unit. The control terminal of the fifth control unit is connected to the output terminal of the sixth voltage regulator unit. The input terminal of the sixth voltage regulator unit is connected to the control terminal of the fourth control unit. The output terminal of the sixth control unit is connected to the input terminal of the negative input optocoupler, the control terminal of the sixth control unit is connected to the negative terminal of the sixth unidirectional conduction unit, the positive terminal of the sixth unidirectional conduction unit is connected to the output terminal of the sixth control unit, the control terminal of the sixth control unit is connected to the output terminal of the seventh voltage regulator unit, and the input terminal of the seventh voltage regulator unit is connected to the control terminal of the fifth control unit. The output terminal of the negative input optocoupler is connected to the negative power supply voltage signal, the output terminal of the eighth voltage regulator unit, and the positive input terminal of the fourth unidirectional conduction control circuit. The input terminal of the eighth voltage regulator unit is connected to the negative output terminal of the fourth unidirectional conduction control circuit. The negative output terminal of the fourth unidirectional conduction control circuit is connected to the positive input terminal of the third unidirectional conduction control circuit and the control terminal of the fifth control unit. The negative output terminal of the third unidirectional conduction control circuit is connected to the output electrode.

[0051] In one implementation, the fifth voltage regulator unit includes a fifth voltage regulator capacitor and a fifth voltage regulator resistor. The fifth voltage regulator capacitor and the fifth voltage regulator resistor are connected in parallel to form the fifth voltage regulator unit. The first terminal of the fifth voltage regulator unit is connected to the output electrode, and the second terminal of the fifth voltage regulator unit is connected to the control terminal of the fourth control module. The sixth voltage regulator unit includes a sixth voltage regulator capacitor and a sixth voltage regulator unidirectional conduction unit. The sixth voltage regulator capacitor and the sixth voltage regulator unidirectional conduction unit are connected in parallel. The positive terminal of the sixth voltage regulator unidirectional conduction unit is connected to the second terminal of the sixth voltage regulator capacitor and the control terminal of the fifth control module; the negative terminal of the sixth voltage regulator unidirectional conduction unit is connected to the first terminal of the sixth voltage regulator capacitor and the control terminal of the fourth control module. The seventh voltage regulator unit includes: a seventh voltage regulator capacitor and a seventh voltage regulator resistor. The seventh voltage regulator capacitor and the seventh voltage regulator resistor are connected in parallel to form the seventh voltage regulator unit. The first end of the seventh voltage regulator unit is connected to the control terminal of the fifth control module, and the second end of the seventh voltage regulator unit is connected to the control terminal of the sixth control module. The eighth voltage regulator unit includes an eighth voltage regulator capacitor and an eighth voltage regulator unidirectional conduction unit. The eighth voltage regulator capacitor and the eighth voltage regulator unidirectional conduction unit are connected in parallel. The positive terminal of the eighth voltage regulator unidirectional conduction unit is connected to the second terminal of the eighth voltage regulator capacitor and the output terminal of the negative input optocoupler. The negative terminal of the eighth voltage regulator unidirectional conduction unit is connected to the first terminal of the eighth voltage regulator capacitor and the control terminal of the sixth control module.

[0052] The drive control circuit provided in this application allows for real-time negative feedback regulation of the high-voltage output signal through the signal generation and processing feedback circuit within the circuit, resulting in a stable high-voltage output signal. Furthermore, voltage regulation via a voltage regulator circuit in the high-voltage amplifier circuit, multi-stage power transistors connected in series, and changes in the optocoupler resistance ensures a more precise high-voltage output signal. The multi-stage power transistors connected in series achieve high input impedance, guaranteeing the safety of the entire circuit. In this application, except for the optocoupler, which is a high-power component, other components can be low-power components. This series connection of multiple low-voltage components with transistors prevents excessive voltage load on individual devices. Additionally, the low cost of the voltage components in the circuit reduces manufacturing and maintenance costs. The low heat generation of each low-voltage component also reduces the need for heat sinks, further lowering costs.

[0053] Based on the drive control circuit for the electrostatic chuck power supply provided in the first aspect, in the second aspect, this application provides an electrostatic chuck power supply, which includes a power supply device itself and a drive control circuit as described in the first aspect disposed within the power supply device, which can effectively adjust the output accuracy of the high voltage output signal to achieve the effect of protecting the electrostatic chuck process and the precision of wafer production.

Claims

1. A drive control circuit for an electrostatic chuck power supply, characterized by, The drive control circuit comprises a signal generation and processing feedback circuit and a plurality of high-voltage amplification circuits; an output end of the signal generation and processing feedback circuit is connected to an input end of the high-voltage amplification circuit, an input end of the high-voltage amplification circuit is connected to a power supply voltage of the electrostatic chuck power supply, and an output end of the high-voltage amplification circuit is connected to an electrostatic chuck, the signal generation and processing feedback circuit; wherein: The signal generation and processing feedback circuit is configured to obtain a power waveform control signal, split and process the power waveform control signal into a positive control signal and a negative control signal, and output the positive control signal and the negative control signal to the high-voltage amplification circuit. Each of the high-voltage amplification circuits is configured to perform linear amplification processing on the positive control signal and the negative control signal based on the power supply voltage, generate a high-voltage output voltage signal, and output the high-voltage output voltage signal to the electrostatic chuck. The signal generation and processing feedback circuit is further configured to obtain the high-voltage output voltage signal, compare a low-voltage processing signal corresponding to the high-voltage output voltage signal with the power waveform control signal according to a negative feedback adjustment mechanism, and generate a new power waveform control signal based on a comparison result.

2. The drive control circuit according to claim 1, characterized by The high-voltage amplification circuit comprises an output electrode, and the signal generation and processing feedback circuit comprises a first signal processing module, an input end of the first signal processing module being connected to the output electrode. The first signal processing module is configured to collect the high-voltage output voltage signal output by the output electrode, perform signal processing on the high-voltage output voltage signal, obtain a low-voltage voltage waveform corresponding to the high-voltage output voltage signal, and generate a new power waveform control signal based on a comparison result of the low-voltage voltage waveform and the power waveform control signal.

3. The drive control circuit according to claim 1, characterized by The high-voltage amplification circuit comprises an optocoupler, and the signal generation and processing feedback circuit comprises a second signal processing module, the second signal processing module comprising a switching unit, and an output end of the second signal processing module being connected to the optocoupler. The second signal processing module is configured to obtain the power waveform control signal, control the switching unit to form a positive control signal path or a negative control signal path according to a positive or negative polarity of the power waveform control signal, so that a positive control signal in the power waveform control signal flows to the optocoupler through the positive control signal path, or so that a negative control signal in the power waveform control signal flows to the optocoupler through the negative control signal path.

4. The drive control circuit according to claim 1, characterized by The high-voltage amplification circuit comprises a positive amplification output circuit and a negative amplification output circuit, the circuit structure and performance parameters of the positive amplification output circuit and the negative amplification output circuit are the same, and the positive amplification output circuit and the negative amplification output circuit are connected in a push-pull topology.

5. The drive control circuit according to claim 4, characterized by An output end of the positive amplification output circuit and an output end of the negative amplification output circuit are respectively connected to an output electrode, a power supply end of the positive amplification output circuit is connected to a positive power supply voltage signal provided by the electrostatic chuck power supply, and a power supply end of the negative amplification output circuit is connected to a negative power supply voltage signal provided by the electrostatic chuck power supply. The positive amplification output circuit is configured to perform linear amplification processing on the positive control signal based on the positive power supply voltage signal, generate a positive high-voltage output voltage signal, and output the positive high-voltage output voltage signal through the output electrode. The negative amplification output circuit is configured to perform linear amplification processing on the negative control signal based on the negative power supply voltage signal, generate a negative high-voltage output voltage signal, and output the negative high-voltage output voltage signal through the output electrode.

6. The drive control circuit according to claim 5, wherein The positive amplification output circuit comprises a first control module, a second control module, a third control module, and a positive input optocoupler.

7. The drive control circuit according to claim 6, characterized by The first control module comprises a first control unit, a first voltage stabilizing unit, and a first unidirectional conduction unit; the second control module comprises a second control unit, a second voltage stabilizing unit, and a second unidirectional conduction unit; the third control module comprises a third control unit, a third voltage stabilizing unit, and a third unidirectional conduction unit; the positive amplification output circuit further comprises a fourth voltage stabilizing unit, a first unidirectional conduction control circuit, and a second unidirectional conduction control circuit, and the positive input optocoupler is connected in parallel with the fourth voltage stabilizing unit. The input end of the first control unit is connected to the positive power supply voltage signal, the output end of the first control unit is connected to the input end of the second control unit, the control end of the first control unit is connected to the negative electrode of the first unidirectional conduction unit, the positive electrode of the first unidirectional conduction unit is connected to the output end of the first control unit, the control end of the first control unit is connected to the output end of the first voltage stabilizing unit, and the input end of the first voltage stabilizing unit is connected to the positive power supply voltage signal. The output end of the second control unit is connected to the input end of the third control unit, the control end of the second control unit is connected to the negative electrode of the second unidirectional conduction unit, the positive electrode of the second unidirectional conduction unit is connected to the output end of the second control unit, the control end of the second control unit is connected to the output end of the second voltage stabilizing unit, and the input end of the second voltage stabilizing unit is connected to the control end of the first control unit. The output end of the third control unit is connected to the input end of the positive input optocoupler, the control end of the third control unit is connected to the negative electrode of the third unidirectional conduction unit, the positive electrode of the third unidirectional conduction unit is connected to the output end of the third control unit, the control end of the third control unit is connected to the output end of the third voltage stabilizing unit, and the input end of the third voltage stabilizing unit is connected to the control end of the second control unit. The output end of the positive input optocoupler is connected to the output electrode, the output end of the fourth voltage stabilizing unit, and the positive input end of the second unidirectional conduction control circuit, and the input end of the fourth voltage stabilizing unit is connected to the negative output end of the second unidirectional conduction control circuit. The negative output end of the second unidirectional conduction control circuit is connected to the positive input end of the first unidirectional conduction control circuit and the control end of the second control unit, and the negative output end of the first unidirectional conduction control circuit is connected to the positive power supply voltage signal.

8. The drive control circuit according to claim 7, characterized by The first voltage stabilizing unit comprises a first voltage stabilizing capacitor and a first voltage stabilizing resistor, the first voltage stabilizing capacitor and the first voltage stabilizing resistor are connected in parallel to obtain the first voltage stabilizing unit, a first end of the first voltage stabilizing unit is connected to the positive power supply voltage signal, and a second end of the first voltage stabilizing unit is connected to a control end of the first control unit. The second voltage stabilizing unit comprises a second voltage stabilizing capacitor and a second voltage stabilizing unidirectional conducting unit, the second voltage stabilizing capacitor and the second voltage stabilizing unidirectional conducting unit are connected in parallel, a positive electrode of the second voltage stabilizing unidirectional conducting unit is connected to a second end of the second voltage stabilizing capacitor and a control end of the second control unit, and a negative electrode of the second voltage stabilizing unidirectional conducting unit is connected to a first end of the second voltage stabilizing capacitor and a control end of the first control unit. The third voltage stabilizing unit comprises a third voltage stabilizing capacitor and a third voltage stabilizing resistor, the third voltage stabilizing capacitor and the third voltage stabilizing resistor are connected in parallel to obtain the third voltage stabilizing unit, a first end of the third voltage stabilizing unit is connected to a control end of the second control unit, and a second end of the third voltage stabilizing unit is connected to a control end of the third control unit. The fourth voltage stabilizing unit comprises a fourth voltage stabilizing capacitor and a fourth voltage stabilizing unidirectional conducting unit, the fourth voltage stabilizing capacitor and the fourth voltage stabilizing unidirectional conducting unit are connected in parallel, a positive electrode of the fourth voltage stabilizing unidirectional conducting unit is connected to a second end of the fourth voltage stabilizing capacitor and an output end of the positive input optocoupler, and a negative electrode of the fourth voltage stabilizing unidirectional conducting unit is connected to a first end of the fourth voltage stabilizing capacitor and a control end of the third control unit.

9. The drive control circuit according to claim 4, characterized by The negative amplification output circuit comprises a fourth control module, a fifth control module, a sixth control module and a negative input optocoupler, and the fourth control module, the fifth control module and the sixth control module are connected in series and connected to the negative input optocoupler.

10. The drive control circuit according to claim 9, characterized by The fourth control module comprises a fourth control unit, a fifth voltage stabilizing unit and a fourth unidirectional conducting unit, the fifth control module comprises a fifth control unit, a sixth voltage stabilizing unit and a fifth unidirectional conducting unit, the sixth control module comprises a sixth control unit, a seventh voltage stabilizing unit and a sixth unidirectional conducting unit, the negative amplification output circuit further comprises an eighth voltage stabilizing unit, a third unidirectional conducting control circuit and a fourth unidirectional conducting control circuit, and the negative input optocoupler is connected in parallel to the eighth voltage stabilizing unit. An input end of the fourth control unit is connected to an output electrode, an output end of the fourth control unit is connected to an input end of the fifth control unit, a control end of the fourth control unit is connected to a negative electrode of the fourth unidirectional conducting unit, a positive electrode of the fourth unidirectional conducting unit is connected to the output end of the fourth control unit, a control end of the fourth control unit is connected to an output end of the fifth voltage stabilizing unit, and an input end of the fifth voltage stabilizing unit is connected to the output electrode. An output end of the fifth control unit is connected to an input end of the sixth control unit, a control end of the fifth control unit is connected to a negative electrode of a fifth unidirectional conducting unit, a positive electrode of the fifth unidirectional conducting unit is connected to an output end of the fifth control unit, a control end of the fifth control unit is connected to an output end of a sixth voltage stabilizing unit, and an input end of the sixth voltage stabilizing unit is connected to a control end of the fourth control unit; An output end of the sixth control unit is connected to an input end of the negative input optocoupler, a control end of the sixth control unit is connected to a negative electrode of a sixth unidirectional conducting unit, a positive electrode of the sixth unidirectional conducting unit is connected to an output end of the sixth control unit, a control end of the sixth control unit is connected to an output end of a seventh voltage stabilizing unit, and an input end of the seventh voltage stabilizing unit is connected to a control end of the fifth control unit; An output end of the negative input optocoupler is connected to a negative power supply voltage signal, an output end of an eighth voltage stabilizing unit, and a positive electrode input end of a fourth unidirectional conducting control circuit, and an input end of the eighth voltage stabilizing unit is connected to a negative electrode output end of the fourth unidirectional conducting control circuit; A negative electrode output end of the fourth unidirectional conducting control circuit is connected to a positive electrode input end of a third unidirectional conducting control circuit and a control end of the fifth control unit, and a negative electrode output end of the third unidirectional conducting control circuit is connected to the output electrode.

11. The drive control circuit according to claim 10, wherein The fifth voltage stabilizing unit comprises a fifth voltage stabilizing capacitor and a fifth voltage stabilizing resistor, the fifth voltage stabilizing capacitor and the fifth voltage stabilizing resistor are connected in parallel to obtain the fifth voltage stabilizing unit, a first end of the fifth voltage stabilizing unit is connected to the output electrode, and a second end of the fifth voltage stabilizing unit is connected to the control end of the fourth control module; The sixth voltage stabilizing unit comprises a sixth voltage stabilizing capacitor and a sixth voltage stabilizing unidirectional conducting unit, the sixth voltage stabilizing capacitor and the sixth voltage stabilizing unidirectional conducting unit are connected in parallel, a positive electrode of the sixth voltage stabilizing unidirectional conducting unit is connected to a second end of the sixth voltage stabilizing capacitor and a control end of the fifth control module, and a negative electrode of the sixth voltage stabilizing unidirectional conducting unit is connected to a first end of the sixth voltage stabilizing capacitor and a control end of the fourth control module; The seventh voltage stabilizing unit comprises a seventh voltage stabilizing capacitor and a seventh voltage stabilizing resistor, the seventh voltage stabilizing capacitor and the seventh voltage stabilizing resistor are connected in parallel to obtain the seventh voltage stabilizing unit, a first end of the seventh voltage stabilizing unit is connected to the control end of the fifth control module, and a second end of the seventh voltage stabilizing unit is connected to the control end of the sixth control module; The eighth voltage stabilizing unit comprises an eighth voltage stabilizing capacitor and an eighth voltage stabilizing unidirectional conducting unit, the eighth voltage stabilizing capacitor and the eighth voltage stabilizing unidirectional conducting unit are connected in parallel, a positive electrode of the eighth voltage stabilizing unidirectional conducting unit is connected to a second end of the eighth voltage stabilizing capacitor and an output end of the negative input optocoupler, and a negative electrode of the eighth voltage stabilizing unidirectional conducting unit is connected to a first end of the eighth voltage stabilizing capacitor and a control end of the sixth control module.

12. An electrostatic chuck power supply, characterized by, The electrostatic chuck power supply comprises the driving control circuit for the electrostatic chuck power supply according to any one of claims 1-11.

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