Dynamically pressure-adaptive corrugated diaphragm pressure sensor

Abstract

This invention relates to the field of implantable pressure sensors and discloses a corrugated diaphragm pressure sensor with dynamic pressure adaptation. It includes a sensor housing and a built-in corrugated diaphragm assembly. The corrugated diaphragm assembly comprises a corrugated diaphragm body, a gradient composite layered structure, and a built-in damping adjustment unit. The corrugated diaphragm body has a non-uniform corrugated parameter structure, divided into at least two regions with different parameters along the radial or circumferential direction. The gradient composite layered structure is composed of at least two layers of materials with different elastic moduli. The damping adjustment unit is located on the back of the diaphragm or in the corrugation gaps and can adjust the damping according to the transient rate of dynamic pressure change. This invention achieves adaptation to the dynamic physiological pressure of the human body, possesses miniaturization and high biocompatibility, and solves the problems of narrow dynamic response range and high detection distortion rate of traditional implantable sensors.

Description

Technical Field

[0001] This invention relates to the field of implantable pressure sensor technology, and more specifically to a corrugated diaphragm pressure sensor with dynamic pressure adaptation. Background Technology

[0002] In the biomedical field, implantable pressure sensors are key devices for monitoring physiological pressures such as intracranial pressure and arterial pressure. Their dynamic response performance, miniaturization, and biocompatibility directly affect clinical diagnostic outcomes. With the development of precision medicine, clinicians are placing higher demands on the sensors' ability to adapt to different physiological dynamic pressures.

[0003] While existing implantable corrugated diaphragm pressure sensors have been optimized in terms of flexibility and biocompatibility, they generally suffer from a narrow dynamic pressure adaptation range, making it difficult to match the pressure fluctuation characteristics of the human body under different physiological scenarios, and easily leading to problems such as response lag and detection distortion.

[0004] Therefore, there is an urgent need to develop a corrugated diaphragm implantable pressure sensor that can adapt to complex physiological dynamic pressures and is miniaturized and biocompatible, in order to meet the needs of high-precision clinical monitoring. Summary of the Invention

[0005] To solve or at least partially solve the above-mentioned technical problems, the present invention provides a dynamically pressure-adaptive corrugated diaphragm pressure sensor.

[0006] This invention provides a dynamically pressure-adaptive corrugated diaphragm pressure sensor, characterized by comprising a sensor housing and a corrugated diaphragm assembly disposed within the sensor housing; the corrugated diaphragm assembly includes a corrugated diaphragm body, a gradient composite layered structure, and a built-in damping adjustment unit; the corrugated diaphragm body has a non-uniform corrugated parameter structure, divided into at least two regions with different corrugated parameters along the radial or circumferential direction of the diaphragm; the gradient composite layered structure is composited on at least one surface of the corrugated diaphragm body, and is formed by stacking at least two layers of materials with different elastic moduli; the built-in damping adjustment unit is disposed on the back side of the corrugated diaphragm body or within the corrugation gap, and is used to adjust the damping magnitude according to the transient rate of change of dynamic pressure.

[0007] Optionally, the non-uniform corrugated parameter structure of the corrugated diaphragm body is a segmented variable corrugated parameter structure, including a low-frequency adaptation region and a high-frequency adaptation region; The ripple parameters of the low-frequency adaptation region are: wavelength 80~150μm, wave height 10~30μm, and wave number 3~8. The ripple parameters of the high-frequency adaptation region are: wavelength 20~80μm, wave height 30~60μm, and wave number 8~20.

[0008] Optionally, the low-frequency adaptation region of the corrugated diaphragm body is located in the central region of the diaphragm, and the high-frequency adaptation region is arranged around the low-frequency adaptation region; the corrugated cross sections of the low-frequency adaptation region and the high-frequency adaptation region are both arc-shaped, and the curvature of the corrugated cross section of the high-frequency adaptation region is greater than the curvature of the corrugated cross section of the low-frequency adaptation region.

[0009] Optionally, the non-uniform corrugated parameter structure of the corrugated diaphragm body is a partitioned differential cross-sectional structure, which is divided into a central region, an intermediate transition region and an edge region along the radial direction of the diaphragm. The corrugated wavelength and wave height of the three regions are consistent, and the corrugated cross-sectional shape gradually changes along the radial direction: the central region is an arc-shaped cross-section, the intermediate transition region is an arc-trapezoidal composite cross-section, and the edge region is a trapezoidal cross-section.

[0010] Optionally, the gradient composite layered structure includes a flexible elastic coating, a substrate layer, and a rigid reinforcing layer stacked sequentially; the flexible elastic coating is located on the pressure-bearing side surface of the corrugated diaphragm body, the rigid reinforcing layer is located on the back pressure side surface of the corrugated diaphragm body, and the substrate layer is sandwiched between the flexible elastic coating and the rigid reinforcing layer.

[0011] Optionally, the flexible elastic coating is made of silicone rubber-polyimide composite material with an elastic modulus of 0.5~5 GPa; the substrate layer is made of stainless steel foil or titanium alloy foil with an elastic modulus of 100~200 GPa; and the rigid reinforcing layer is an array of micro-reinforcing ribs integrally formed with the corrugated diaphragm body, with the cross-section of the reinforcing ribs being trapezoidal.

[0012] Optionally, the thickness of the flexible elastic coating is 30~100μm, the thickness of the substrate layer is 50~150μm, the height of the reinforcing ribs of the rigid reinforcing layer is 30~100μm, and the spacing between adjacent reinforcing ribs is 200~800μm.

[0013] Optionally, the built-in damping control unit includes a microporous array damping layer and a damping medium; the microporous array damping layer is disposed on the back pressure side of the corrugated diaphragm body and fixedly connected to the sensor housing; the microporous array damping layer has multiple micropores with a pore size of 1~20μm; the damping medium fills the gap between the corrugated diaphragm body and the microporous array damping layer and the micropores, and the damping medium is medical-grade silicone oil or fluorinated oil.

[0014] Optionally, the micropores of the micropore array damping layer are elastically variable pore size structures. Under dynamic pressure, the micropore size can shrink or expand synchronously with the pressure transient rate. When the pressure transient rate is ≥0.5kPa / ms, the micropore size shrinks to 30%~50% of the original pore size; when the pressure transient rate is ≤0.05kPa / ms, the micropore size expands to 120%~150% of the original pore size.

[0015] Optionally, the sensor housing is provided with a pressure inlet, the axis of which coincides with the central axis of the corrugated diaphragm body; the corrugated diaphragm assembly further includes a displacement detection element, which is disposed at the center position of the back pressure side of the corrugated diaphragm body and is used to detect the dynamic deformation of the corrugated diaphragm body.

[0016] Compared with the prior art, the present invention achieves the following technical effects: This invention designs the corrugated diaphragm body as a segmented variable corrugated parameter structure or a zoned differentiated cross-sectional structure, which can specifically adapt to low-frequency physiological pressure (such as intracranial pressure fluctuations) and high-frequency physiological pulsations (such as arterial pressure pulsations) in the human body within the range of 0.1~10Hz. The segmented structure, through differentiated wavelength, wave height, and curvature design, allows the low-frequency adaptation region and the high-frequency adaptation region to match the response requirements of the corresponding frequency pressure, avoiding the defects of traditional uniform corrugated diaphragms such as "high-frequency response lag or insufficient low-frequency sensitivity." The zoned differentiated cross-sectional structure, through radially gradual changes in cross-sectional shape, achieves a smooth transition between high and low frequency pressure adaptation, improving the consistency of pressure detection over a wide frequency range.

[0017] The gradient composite layered structure achieves the ability to withstand micro to moderate physiological pressures from the human body through a gradient combination and dimensional optimization of flexible elastic coating, substrate layer, and rigid reinforcement layer. The flexible elastic coating ensures high sensitivity detection under micro-pressure, the substrate layer provides basic structural strength to prevent plastic deformation under moderate pressure, and the rigid reinforcement layer enhances the load-bearing capacity under large transient pressures such as sudden increases in blood pressure, effectively solving the problems of "low sensitivity under micro-pressure or easy failure under high pressure" in traditional flexible diaphragms.

[0018] The built-in damping control unit uses a microporous array damping layer with elastic variable aperture in conjunction with a medical-grade damping medium to adjust the damping magnitude according to the transient rate of physiological pressure changes in the human body. Under rapid transient pressures such as arterial systolic pressure, the micropores contract to increase damping, suppressing diaphragm overshoot and oscillation, and ensuring accurate capture of pressure peaks; under gentle pressure fluctuations such as intracranial pressure, the micropores expand to reduce damping, ensuring rapid diaphragm response.

[0019] In summary, this invention addresses the technical pain points of existing implantable pressure sensors, such as narrow dynamic response range, low detection accuracy, poor adaptability, and insufficient biocompatibility. It enables long-term, accurate detection of various physiological dynamic pressures in the human body, providing reliable physiological parameter support for clinical diagnosis and treatment, and possesses significant clinical application value and industrialization prospects. Attached Figure Description

[0020] Figure 1 A schematic diagram of the overall structure of a dynamically pressure-adaptive corrugated diaphragm pressure sensor according to an embodiment of the present invention; Figure 2 This is a side view of the corrugated diaphragm main structure provided in an embodiment of the present invention; Figure 3 This is a side view of the corrugated diaphragm main structure provided in an embodiment of the present invention; Figure 4 This is a side view of a gradient composite layered structure provided in an embodiment of the present invention; Figure 5 This is a side view of a rigid reinforcing layer structure provided in an embodiment of the present invention; Figure 6 This is a side view of a microporous array damping layer structure provided in an embodiment of the present invention; Figure 7 This is a top view of a microporous array damping layer structure provided in an embodiment of the present invention; Figure 8 This is a top view of a sensor housing structure provided in an embodiment of the present invention; Figure 9 This is a bottom view of the main structure of the corrugated diaphragm provided in an embodiment of the present invention. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the present invention clearer, specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings, not all of them. Before discussing exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe operations (or steps) as sequential processes, many of these operations can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the operations can be rearranged. The process can be terminated when its operation is completed, but may also have additional steps not included in the drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, etc.

[0022] The technical solutions of the embodiments of the present invention will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention are within the scope of protection of the present invention.

[0023] See Figures 1 to 9This invention provides a dynamically pressure-adaptive corrugated diaphragm pressure sensor, including a sensor housing 1 and a corrugated diaphragm assembly disposed within the sensor housing 1. The corrugated diaphragm assembly includes a corrugated diaphragm body 2, a gradient composite layered structure, and a built-in damping adjustment unit. The corrugated diaphragm body 2 has a non-uniform corrugated parameter structure, divided into at least two regions with different corrugated parameters along the radial or circumferential direction of the diaphragm. The gradient composite layered structure is composited on at least one side surface of the corrugated diaphragm body 2 and is formed by stacking at least two layers of materials with different elastic moduli. The built-in damping adjustment unit is disposed on the back side of the corrugated diaphragm body 2 or within the corrugation gap, and is used to adjust the damping magnitude according to the transient rate of change of dynamic pressure.

[0024] See Figure 2 In some embodiments, the non-uniform corrugated parameter structure of the corrugated diaphragm body 2 is a segmented variable corrugated parameter structure, including a low-frequency adaptation region 21 and a high-frequency adaptation region 22. The ripple parameters of the low-frequency adaptation region 21 are: wavelength λ 80~150μm, wave height h 10~30μm, wave number 3~8; The ripple parameters of the high-frequency adaptation region 22 are: wavelength λ 20~80μm, wave height h 30~60μm, and wave number 8~20.

[0025] See Figure 2 In some embodiments, the low-frequency adaptation region 21 of the corrugated diaphragm body 2 is located in the central region of the diaphragm, and the high-frequency adaptation region 22 is arranged around the low-frequency adaptation region 21; the corrugated cross sections of both the low-frequency adaptation region 21 and the high-frequency adaptation region 22 are arc-shaped, and the curvature of the corrugated cross section of the high-frequency adaptation region 22 is greater than the curvature of the corrugated cross section of the low-frequency adaptation region 21.

[0026] See Figure 3 In some embodiments, the non-uniform corrugated parameter structure of the corrugated diaphragm body 2 is a zoned differential cross-sectional structure, which is divided into a central region 23, an intermediate transition region 24 and an edge region 25 along the radial direction of the diaphragm. The corrugated wavelength and wave height of the three regions are consistent, and the corrugated cross-sectional shape gradually changes along the radial direction: the central region 23 is an arc-shaped cross-section, the intermediate transition region 24 is an arc-trapezoidal composite cross-section, and the edge region 25 is a trapezoidal cross-section.

[0027] See Figure 4 In some embodiments, the gradient composite layered structure includes a flexible elastic coating 3, a substrate layer 4, and a rigid reinforcing layer 5 stacked sequentially; the flexible elastic coating 3 is located on the pressure-bearing side surface of the corrugated diaphragm body 2, the rigid reinforcing layer 5 is located on the back pressure side surface of the corrugated diaphragm body 2, and the substrate layer 4 is sandwiched between the flexible elastic coating 3 and the rigid reinforcing layer 5.

[0028] See Figure 5In some embodiments, the flexible elastic coating 3 is made of silicone rubber-polyimide composite material with an elastic modulus of 0.5~5GPa; the substrate layer 4 is made of stainless steel foil or titanium alloy foil with an elastic modulus of 100~200GPa; and the rigid reinforcing layer 5 is a micro-reinforcing rib array integrally formed with the corrugated diaphragm body 2, with the cross section of the reinforcing ribs being trapezoidal.

[0029] See Figure 5 In some embodiments, the thickness of the flexible elastic coating 3 is 30~100μm, the thickness of the substrate layer 4 is 50~150μm, the height a of the reinforcing ribs of the rigid reinforcing layer 5 is 30~100μm, and the spacing b between adjacent reinforcing ribs is 200~800μm.

[0030] See Figure 6 , 7 In some embodiments, the built-in damping control unit includes a microporous array damping layer 6 and a damping medium; the microporous array damping layer 6 is disposed on the back pressure side of the corrugated diaphragm body 2 and is fixedly connected to the sensor housing 1; a plurality of micropores 61 are formed on the microporous array damping layer 6, and the pore diameter of the micropores 61 is 1~20μm; the damping medium is filled in the gap between the corrugated diaphragm body 2 and the microporous array damping layer 6 and in the micropores 61, and the damping medium is medical grade silicone oil or fluorinated oil.

[0031] See Figure 6 , 7 In some embodiments, the micropores 61 of the micropore array damping layer 6 are elastically variable pore size structures. Under dynamic pressure, the pore size of the micropores 61 can shrink or expand synchronously with the pressure transient rate. When the pressure transient rate is ≥0.5kPa / ms, the pore size of the micropores 61 shrinks to 30%~50% of the original pore size; when the pressure transient rate is ≤0.05kPa / ms, the pore size of the micropores 61 expands to 120%~150% of the original pore size.

[0032] See Figure 8 , 9 In some embodiments, the sensor housing 1 is provided with a pressure inlet 8, the axis of which coincides with the central axis of the corrugated diaphragm body 2; the corrugated diaphragm assembly also includes a displacement detection element 10, which is disposed at the center position of the back pressure side of the corrugated diaphragm body 2 and is used to detect the dynamic deformation of the corrugated diaphragm body 2.

[0033] Example 1 See the image for reference. Figure 1 , 2 as well as Figures 4 to 9As shown, this embodiment provides a dynamically pressure-adaptive corrugated diaphragm pressure sensor, including a sensor housing 1 and a corrugated diaphragm assembly disposed within the sensor housing 1; the corrugated diaphragm assembly includes a corrugated diaphragm body 2, a gradient composite layered structure, and a built-in damping control unit.

[0034] The sensor housing 1 is made of medical-grade titanium alloy and is cylindrical in shape. A pressure inlet 8 is provided at the top of the sensor housing 1. The axis of the pressure inlet 8 coincides with the central axis of the corrugated diaphragm body 2. The pressure inlet 8 is used to allow human physiological pressure (such as arterial pressure) to act directly on the pressure-receiving side of the corrugated diaphragm body 2.

[0035] The corrugated diaphragm body 2 has a non-uniform corrugated parameter structure, specifically a segmented variable corrugated parameter structure, divided radially into a low-frequency adaptation region 21 and a high-frequency adaptation region 22. The low-frequency adaptation region 21 is located in the central region of the diaphragm, with corrugated parameters of 80 μm wavelength λ, 10 μm wave height h, and 3 wave numbers, adapting to low-frequency dynamic pressures (0.1~1 Hz) such as intracranial pressure. The high-frequency adaptation region 22 surrounds the low-frequency adaptation region 21, with an outer diameter consistent with the outer diameter of the corrugated diaphragm body 2, and has corrugated parameters of 20 μm wavelength λ, 30 μm wave height h, and 8 wave numbers, adapting to high-frequency dynamic pressures (1~10 Hz) such as arterial pulsation. The corrugated cross-sections of both the low-frequency adaptation region 21 and the high-frequency adaptation region 22 are arc-shaped, and the curvature of the corrugated cross-section of the high-frequency adaptation region 22 is 300 μm. -1 The corrugated section curvature (100μm) is greater than that of the low-frequency adaptation region 21. -1 The membrane response sensitivity under different frequency pressures can be further optimized by using the difference in ripple curvature.

[0036] The gradient composite layered structure is composited on both sides of the corrugated diaphragm body 2, including a flexible elastic coating 3, a substrate layer 4, and a rigid reinforcing layer 5 stacked sequentially. The flexible elastic coating 3 is located on the pressure-bearing side surface of the corrugated diaphragm body 2, and is made of silicone rubber-polyimide composite material with an elastic modulus of 0.5 GPa and a thickness of 30 μm. This material has excellent flexibility and biocompatibility, avoiding irritation to human tissue while ensuring detection sensitivity under slight physiological pressure. The substrate layer 4 is sandwiched between the flexible elastic coating 3 and the rigid reinforcing layer 5. Between the reinforcing layers 5, the material is 316L medical-grade stainless steel foil with an elastic modulus of 100 GPa and a thickness of 50 μm, providing basic structural strength for the diaphragm and preventing plastic deformation under moderate pressure. The rigid reinforcing layer 5 is located on the back pressure side surface of the corrugated diaphragm body 2 and is an array of micro-reinforcing ribs integrally formed with the corrugated diaphragm body 2. The cross-section of the reinforcing ribs is trapezoidal, the height a of the reinforcing ribs is 30 μm, and the spacing b between adjacent reinforcing ribs is 200 μm. This can improve the load-bearing capacity of the diaphragm under large transient pressures such as a sudden increase in blood pressure and prevent diaphragm failure.

[0037] The built-in damping control unit is disposed on the back side of the corrugated diaphragm body 2, and includes a microporous array damping layer 6 and a damping medium. The microporous array damping layer 6 is made of medical-grade polyether ether ketone (PEEK) material, disposed on the back pressure side of the corrugated diaphragm body 2 and fixedly connected to the sensor housing 1 by laser welding. A plurality of micropores 61 are uniformly opened on the microporous array damping layer 6, and the pore diameter of the micropores 61 is 1μm. The damping medium is medical-grade silicone oil, which fills the gap between the corrugated diaphragm body 2 and the microporous array damping layer 6 and the micropores 61, with a filling amount of 95% of the gap volume to ensure the stability of damping control. The micropores 61 of the microporous array damping layer 6 are elastically variable pore size structures. Under dynamic pressure, the pore size of the micropores 61 can synchronously contract or expand with the transient rate of pressure change. When detecting human arterial systolic pressure (transient rate ≥ 0.5 kPa / ms), the pore size of the micropores 61 contracts to 30% of the original pore size, increasing damping to suppress diaphragm overshoot. When detecting human intracranial pressure (transient rate ≤ 0.05 kPa / ms), the pore size of the micropores 61 expands to 120% of the original pore size, reducing damping to ensure rapid diaphragm response.

[0038] The corrugated diaphragm assembly also includes a displacement detection element 10. The displacement detection element 10 is a miniature fiber optic sensor, which is attached to the center position of the back pressure side of the corrugated diaphragm body 2 with medical adhesive. It is used to detect the dynamic deformation of the corrugated diaphragm body 2 in real time and convert the deformation signal into an optical signal to be transmitted to an external demodulation device to achieve accurate detection of physiological dynamic pressure.

[0039] Example 2 like Figure 3As shown, the difference between this embodiment and Embodiment 1 is that the non-uniform corrugated parameter structure of the corrugated diaphragm body 2 is a zoned differential cross-sectional structure, which is divided into a central region 23, an intermediate transition region 24, and an edge region 25 along the radial direction of the diaphragm. The corrugated wavelength λ of the three regions is uniformly 80μm, and the wave height h is uniformly 20μm. The shape of the corrugated cross-section gradually changes along the radial direction: the central region 23 is an arc-shaped cross-section with a cross-sectional curvature of 150μm. -1 The intermediate transition zone 24 is an arc-trapezoidal composite cross section, with a smooth arc transition between the arc segment and the central zone 23. The waist angle of the trapezoidal segment is 80°, achieving a smooth connection for adapting to high and low frequency pressure. The edge zone 25 is a trapezoidal cross section with a waist angle of 60°, improving the structural stability of the membrane edge.

[0040] In this embodiment, the parameters of the gradient composite layered structure are adjusted as follows: the thickness of the flexible elastic coating 3 is 60 μm, and the elastic modulus is 2 GPa; the thickness of the substrate layer 4 is 100 μm, the material is medical titanium alloy foil, and the elastic modulus is 150 GPa; the height a of the reinforcing ribs of the rigid reinforcing layer 5 is 60 μm, and the spacing b between adjacent reinforcing ribs is 500 μm. The pore size of the micropore 61 of the built-in damping control unit is 10 μm. When the pressure transient rate is ≥0.5 kPa / ms, the pore size of the micropore 61 shrinks to 40% of the original pore size; when the pressure transient rate is ≤0.05 kPa / ms, the pore size of the micropore 61 expands to 135% of the original pore size. The remaining structure and parameters are the same as in Example 1.

[0041] Example 3 The difference between this embodiment and Embodiment 1 is that the gradient composite layered structure is only composited on the pressure-bearing surface of the corrugated diaphragm body 2, comprising two layers: a flexible elastic coating 3 and a substrate layer 4. The flexible elastic coating 3 has a thickness of 100 μm and an elastic modulus of 5 GPa; the substrate layer 4 has a thickness of 150 μm and an elastic modulus of 200 GPa. The damping medium of the built-in damping control unit is medical-grade fluorinated oil, and the micropores 61 have a pore size of 20 μm. When the pressure transient rate is ≥0.5 kPa / ms, the pore size of the micropores 61 shrinks to 50% of the original pore size; when the pressure transient rate is ≤0.05 kPa / ms, the pore size of the micropores 61 expands to 150% of the original pore size. The displacement detection element 10 adopts a miniature piezoresistive sensor, and the remaining structure and parameters are the same as in Embodiment 1.

[0042] This invention achieves precise adaptation to physiological dynamic pressure in the human body within the frequency range of 0.1~10Hz, the amplitude range of micro to medium amplitude, and the transient rate range of 0.05~0.5kPa / ms through the synergistic effect of the non-uniform corrugated parameters of the corrugated diaphragm body, the gradient composite layered structure design, and the built-in variable damping control unit. It solves the problems of narrow dynamic response range and high detection distortion rate of traditional implantable pressure sensors. Moreover, all parts in contact with the human body are made of medical-grade materials, ensuring biocompatibility and long-term stability after implantation.

[0043] The above description is merely a preferred embodiment of the present invention and the technical principles employed. The present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions that can be made by those skilled in the art will not depart from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention.

Claims

1. A dynamically pressure-adaptive corrugated diaphragm pressure sensor, characterized in that, The sensor includes a sensor housing and a corrugated diaphragm assembly disposed within the sensor housing. The corrugated diaphragm assembly includes a corrugated diaphragm body, a gradient composite layered structure, and a built-in damping adjustment unit. The corrugated diaphragm body has a non-uniform corrugated parameter structure, divided into at least two regions with different corrugated parameters along the radial or circumferential direction of the diaphragm. The gradient composite layered structure is composited on at least one surface of the corrugated diaphragm body and is formed by stacking at least two layers of materials with different elastic moduli. The built-in damping adjustment unit is disposed on the back side of the corrugated diaphragm body or within the corrugation gap, and is used to adjust the damping magnitude according to the transient rate of dynamic pressure.

2. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 1, characterized in that, The non-uniform corrugated parameter structure of the corrugated diaphragm body is a segmented variable corrugated parameter structure, including a low-frequency adaptation region and a high-frequency adaptation region. The ripple parameters of the low-frequency adaptation region are: wavelength 80~150μm, wave height 10~30μm, and wave number 3~8. The ripple parameters of the high-frequency adaptation region are: wavelength 20~80μm, wave height 30~60μm, and wave number 8~20.

3. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 2, characterized in that, The low-frequency adaptation region of the corrugated diaphragm body is located in the central region of the diaphragm, and the high-frequency adaptation region is arranged around the low-frequency adaptation region; the corrugated cross sections of the low-frequency adaptation region and the high-frequency adaptation region are both arc-shaped, and the curvature of the corrugated cross section of the high-frequency adaptation region is greater than the curvature of the corrugated cross section of the low-frequency adaptation region.

4. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 1, characterized in that, The non-uniform corrugated parameter structure of the corrugated diaphragm body is a zoned differentiated cross-sectional structure, which is divided into a central area, an intermediate transition area and an edge area along the radial direction of the diaphragm. The corrugated wavelength and wave height of the three areas are consistent, and the corrugated cross-sectional shape gradually changes along the radial direction: the central area is an arc-shaped cross-section, the intermediate transition area is an arc-trapezoidal composite cross-section, and the edge area is a trapezoidal cross-section.

5. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 1, characterized in that, The gradient composite layered structure includes a flexible elastic coating, a substrate layer, and a rigid reinforcing layer stacked sequentially; the flexible elastic coating is located on the pressure-bearing side surface of the corrugated diaphragm body, the rigid reinforcing layer is located on the back pressure side surface of the corrugated diaphragm body, and the substrate layer is sandwiched between the flexible elastic coating and the rigid reinforcing layer.

6. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 5, characterized in that, The flexible elastic coating is made of silicone rubber-polyimide composite material with an elastic modulus of 0.5~5 GPa; the substrate layer is made of stainless steel foil or titanium alloy foil with an elastic modulus of 100~200 GPa; the rigid reinforcing layer is an array of micro-reinforcing ribs integrally formed with the corrugated diaphragm body, and the cross-section of the reinforcing ribs is trapezoidal.

7. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 5, characterized in that, The thickness of the flexible elastic coating is 30~100μm, the thickness of the substrate layer is 50~150μm, the height of the reinforcing ribs in the rigid reinforcing layer is 30~100μm, and the spacing between adjacent reinforcing ribs is 200~800μm.

8. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 1, characterized in that, The built-in damping control unit includes a microporous array damping layer and a damping medium; the microporous array damping layer is disposed on the back pressure side of the corrugated diaphragm body and is fixedly connected to the sensor housing; the microporous array damping layer has multiple micropores with a pore diameter of 1~20μm; the damping medium fills the gap between the corrugated diaphragm body and the microporous array damping layer and the micropores, and the damping medium is medical-grade silicone oil or fluorinated oil.

9. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 8, characterized in that, The micropores in the micropore array damping layer have an elastic variable pore size structure. Under dynamic pressure, the pore size can shrink or expand synchronously with the pressure transient rate. When the pressure transient rate is ≥0.5kPa / ms, the pore size shrinks to 30%~50% of the original pore size; when the pressure transient rate is ≤0.05kPa / ms, the pore size expands to 120%~150% of the original pore size.

10. The dynamically pressure-adapted corrugated diaphragm pressure sensor according to claim 1, characterized in that, The sensor housing has a pressure inlet, the axis of which coincides with the central axis of the corrugated diaphragm body; the corrugated diaphragm assembly also includes a displacement detection element, which is located at the center of the back pressure side of the corrugated diaphragm body and is used to detect the dynamic deformation of the corrugated diaphragm body.

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