A method of boat conditioning, conditioned boat and use, boat conditioning apparatus

Abstract

The application provides a boat wetting method, a wetted evaporation boat and use, and a boat wetting device. The boat wetting method comprises the following steps: S1, fixing an evaporation boat to be wetted on the surface of a porous placing plate; S2, vacuumizing; S3, heating a solid aluminum to obtain aluminum liquid; S4, immersing the evaporation boat to be wetted fixed on the surface of the porous placing plate in the aluminum liquid in a vacuum environment after vacuumizing to perform boat wetting treatment; and S5, taking out the evaporation boat after S4 is completed to obtain a wetted evaporation boat. S2 and S3 have no sequence. The boat wetting method provided by the application simplifies the boat wetting procedure, improves the boat wetting efficiency, reduces the cost, improves the wetting area and form of the evaporation boat surface, the surface structure of the wetted evaporation boat is compact, and the service life of the evaporation boat is improved.

Description

Technical Field

[0001] This invention belongs to the field of evaporation boat coating technology, and relates to a boat lubrication method, a lubricated evaporation boat and its application, and a boat lubrication device. Background Technology

[0002] Vacuum ribbon metallization, also known as PVD (physical vapor deposition), is a common method for coating flexible substrates with metal. The flexible substrate can be, for example, a plastic film, metal foil, membrane, or paper; aluminum is the most commonly used metal for coating the substrate. An evaporation boat is typically used to generate the metal vapor.

[0003] Evaporation boats are typically made of high-melting-point, highly conductive materials such as tungsten, molybdenum, tantalum, graphite, and high-performance ceramic composites. These materials possess excellent high-temperature resistance, wear resistance, and corrosion resistance, ensuring stability and evaporation efficiency at high temperatures. The composition of the evaporation boat is adjusted according to different application requirements. For example, composites of boron nitride and titanium diboride are widely used in the manufacture of evaporation boats due to their high insulation and high conductivity. In addition, metallic and non-metallic compounds such as aluminum nitride, alumina, and zirconium oxide are also commonly used in the formulation of evaporation boats. Utilizing the principle of resistance evaporation, in a high-vacuum environment, a large current heats the evaporation material on the evaporation boat, causing it to melt and evaporate at high temperatures, thereby depositing the desired thin film on the sample. By adjusting the applied current, the evaporation rate of the coating material can be controlled, thus achieving precise control of the coating thickness.

[0004] To improve the service life and evaporation effect of the evaporation boat, a lubrication treatment is performed on the evaporation boat. Current lubrication treatment methods include: (1) aluminum wire placement: a certain amount of aluminum wire is placed in the liquid storage tank of the evaporation boat. This is to heat the aluminum wire through the evaporation boat to melt it and form aluminum liquid; (2) aluminum wire melting and lubrication: the aluminum wire is heated through the evaporation boat to melt it and form aluminum liquid. The aluminum liquid and the evaporation boat are mixed for a period of time, which is the lubrication process. This mixing time needs to be appropriate to ensure that the aluminum liquid can be evenly spread and leveled on the bottom wall of the evaporation boat; (3) use of liquid guiding structure: in order to improve the lubrication effect, some evaporation boats will have a liquid guiding structure on the bottom wall. These liquid guiding structures are usually a tank structure and are grid-like, which can increase the wettability of the aluminum liquid on the bottom wall, making it easier for the aluminum liquid to be spread and leveled on the bottom wall; however, the above-mentioned lubrication methods all need to be carried out on the coating equipment, which is costly, has low lubrication efficiency, and is prone to instability of the immersion surface of each evaporation boat due to the influence of voltage, temperature, wire feeding position, etc., thereby affecting the coating quality.

[0005] Therefore, how to improve the lubrication efficiency of the evaporation boat, and enhance its service life and evaporation effect after lubrication, is an urgent technical problem to be solved. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the present invention aims to provide a method for lubricating an evaporating boat, the evaporating boat after lubrication, its applications, and a lubrication apparatus. The lubrication method provided by the present invention simplifies the lubrication process, improves lubrication efficiency, reduces costs, improves the surface wetting area and morphology of the evaporating boat, results in a denser surface structure on the evaporating boat after lubrication, and extends the service life of the evaporating boat.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] In a first aspect, the present invention provides a method for lubricating a boat, the method comprising the following steps:

[0009] S1: Fix the evaporation boat to be moistened onto the surface of the porous shelf;

[0010] S2: Vacuum extraction;

[0011] S3: Heat solid aluminum to obtain molten aluminum;

[0012] S4: In the vacuum environment after vacuuming, the evaporation boat to be hydrated, which is fixed on the surface of the porous plate, is immersed in the aluminum liquid for hydration treatment.

[0013] S5: After S4 is completed, take out the evaporation boat and obtain the evaporation boat after moistening;

[0014] S1, S2 and S3 have no particular order.

[0015] It should be noted that the soaking in this invention is complete immersion.

[0016] The lubrication method provided by this invention lubricates the evaporation boat by immersion, maximizing the wetting layer and wetting area on the surface of the evaporation boat. Simultaneously, the lubricated aluminum liquid can be reused, eliminating the need for costly barrier evaporation equipment; conventional heating equipment is sufficient for complete lubrication, simplifying the lubrication process. The number of evaporation boats processed each time can be controlled, improving lubrication efficiency. Furthermore, the surface structure of the lubricated evaporation boat is dense, significantly extending its service life.

[0017] In this invention, after the evaporation boat is moistened, the porous placement plate can be separated from the evaporation boat. In this invention, the porous placement plate has a through-hole structure. If the placement plate is not a porous structure, it is impossible to completely separate the aluminum liquid from the evaporation boat, and the evaporation boat cannot be demolded.

[0018] The following are preferred technical solutions of the present invention, but are not intended to limit the technical solutions provided by the present invention. The technical objectives and beneficial effects of the present invention can be better achieved and realized through the following preferred technical solutions.

[0019] Preferably, in S1, the porous shelf is made of ceramic material.

[0020] In this invention, the porous storage plate is made of ceramic material. After the boat is moistened, it will not adhere to the molten aluminum and can be easily separated from the evaporation boat. Furthermore, since the porous storage plate is made of ceramic material, its structure will not be damaged in the molten aluminum. Moreover, this invention does not specifically limit the type of ceramic material. Any type of material that does not adhere to the evaporation boat and does not react, and which merely serves a storage function, is applicable. The ceramic material includes, but is not limited to, at least one of the following: high-temperature resistant ceramics (boron nitride, boron nitride, titanium diboride, aluminum nitride, alumina, zirconium oxide, silicon carbide, silicon nitride), high-alumina refractory bricks, corundum mullite bricks, clay insulating refractory bricks, high-alumina refractory castables, refractory plastics, silicon carbide bricks, dense clay bricks, high-alumina refractory bricks, lightweight refractory castable precast blocks, or polyethylene containers.

[0021] Preferably, in S1, the aperture size of the porous shelf is 5mm to 50mm, such as 5mm, 10mm, 15mm, 20mm, 25mm, 30mm, 35mm, 40mm, 45mm or 50mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0022] In this invention, the aperture size of the porous placement plate is adjusted to 5mm to 10mm, which can better improve the wetting and demolding effect of the evaporation boat.

[0023] Preferably, in S1, the fixing method includes clamp fixing.

[0024] In this invention, there is no limitation on the method of fixing the evaporation boat to be moistened. Any fixing method that can separate the evaporation boat from the porous shelf after moistening is applicable to this invention; for example, a clamping frame can be used to fix the evaporation boat to be moistened to the surface of the porous shelf.

[0025] Preferably, in S4, the soaking method includes dynamic soaking or static soaking, with dynamic soaking being the preferred method.

[0026] In this invention, dynamic soaking is used to rinse the surface of the evaporation boat to remove some of the oxide residues on the surface of the evaporation boat, while also accelerating the boat moisturizing speed and improving the moisturizing effect.

[0027] Preferably, the dynamic soaking includes lifting soaking and / or rotating soaking.

[0028] In this invention, the lifting immersion refers to the dynamic immersion process in which the evaporation boat rises and falls in the molten aluminum, while the rotating immersion refers to the dynamic immersion achieved by rotating the evaporation boat in the molten aluminum.

[0029] Preferably, the number of times the lifting and lowering soaking is 5 to 30 times, such as 5, 8, 10, 13, 15, 18, 20, 23, 25, 28 or 30 times, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0030] In this invention, a rise and fall is considered a complete rise and fall cycle when the position is raised and then lowered back to the original position.

[0031] Preferably, the rising speed of the lifting soaking device is 400 mm / min to 2000 mm / min, such as 400 mm / min, 500 mm / min, 750 mm / min, 1000 mm / min, 1250 mm / min, 1500 mm / min, 1750 mm / min, or 2000 mm / min; the falling speed is 400 mm / min to 2000 mm / min, such as 400 mm / min, 500 mm / min, 750 mm / min, 1000 mm / min, 1250 mm / min, 1500 mm / min, 1750 mm / min, or 2000 mm / min, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0032] In this invention, by adjusting the number of lifting and lowering cycles and the speed of rising and falling, it is more conducive to the complete immersion of the evaporation boat and improves the immersion effect.

[0033] Preferably, the rotational speed of the rotary soaking is 400 mm / min to 2000 mm / min, for example, 400 mm / min to 2000 mm / min, such as 400 mm / min, 500 mm / min, 750 mm / min, 1000 mm / min, 1250 mm / min, 1500 mm / min, 1750 mm / min or 2000 mm / min, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0034] In this invention, the rotation speed of the rotary soaking is adjusted to 400 mm / min to 2000 mm / min to better improve the wetting effect; however, if the rotation speed is too fast, it is not conducive to the integrity of the wetting layer.

[0035] Preferably, in S4, the temperature of the boat moistening treatment is 600 to 900°C, for example, 600°C, 650°C, 700°C, 750°C, 800°C, 850°C or 900°C, but is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0036] In this invention, the temperature of the lubrication treatment is 600-900℃, which ensures that the aluminum exists in a liquid form and avoids the contamination of the chamber and material waste caused by aluminum evaporation.

[0037] Preferably, in S4, the time for the moistening treatment is 15 min to 120 min, such as 15 min, 20 min, 30 min, 40 min, 50 min, 60 min, 70 min, 80 min, 90 min, 100 min, 110 min or 120 min, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0038] Preferably, in step S5, after the evaporation boat is removed and the boat moistening process is completed, a drying process is performed to obtain the moistened evaporation boat.

[0039] It should be noted that the specific drying methods in this invention are all conventional solutions, such as natural cooling drying or purging drying. Those skilled in the art can make adaptive selections and adjustments according to actual needs.

[0040] As a preferred technical solution, the boat lubrication method includes the following steps:

[0041] S1: Fix the evaporation boat to be moistened onto the surface of a porous storage plate with a pore size of 5mm to 50mm, wherein the porous storage plate is made of ceramic material;

[0042] S2: Vacuum extraction;

[0043] S3: Heat solid aluminum to obtain molten aluminum;

[0044] S4: In a vacuum environment, at 600-900℃, the boat to be evaporated, which is fixed on the surface of the porous plate, is dynamically immersed in the aluminum liquid for evaporation treatment.

[0045] S5: After S4 is completed, take out the evaporation boat, dry it, and obtain the evaporation boat after moistening;

[0046] S1, S2 and S3 have no particular order.

[0047] It should also be noted that:

[0048] In S2 of this invention, the purpose of evacuation is to obtain a vacuum environment, and the degree of vacuum can be selected and adjusted according to actual needs.

[0049] This invention does not impose any special limitations on the method of obtaining molten aluminum from solid aluminum in S2. Any method that can obtain molten aluminum and will not be oxidized is applicable to this invention.

[0050] For example, a solid aluminum source to be melted (such as an aluminum plate, aluminum block, aluminum ingot, or aluminum wire) can be placed in a container to be immersed, and molten aluminum can be added under vacuum to obtain molten aluminum.

[0051] Secondly, the present invention provides an evaporation boat after being moistened, wherein the moistened evaporation boat is obtained by the moistening method as described in the first aspect.

[0052] Thirdly, the present invention provides an application of a humidified evaporation boat, the application including using the humidified evaporation boat as described in the second aspect in a vacuum evaporation apparatus.

[0053] Fourthly, the present invention also provides a boat-moistening apparatus for the boat-moistening method as described in the first aspect, the boat-moistening apparatus comprising:

[0054] Heated cavity;

[0055] A liquid container, located at the bottom of the heatable cavity, is used to hold molten aluminum;

[0056] A porous placement plate, located in the heatable cavity, is used to fix the evaporation boat to be moistened.

[0057] The boat lubrication device provided by this invention does not require evaporation equipment; conventional heating devices (such as muffle furnaces) are all acceptable. The device has a simple structure and does not require complex lubrication conditions; maintaining a vacuum environment is sufficient. Furthermore, the number of boats lubricated at one time can be controlled according to the size of the heatable cavity.

[0058] In this invention, the heatable cavity includes, but is not limited to, the sintering cavity inside a muffle furnace, the furnace chamber of a sintering furnace, etc., which are cavity structures that can realize the heating function. This invention is applicable to all of them.

[0059] The shape, size, and material of the liquid container can be adapted to the size of the heatable cavity and actual needs. For example, the material can be ceramic, which is heat-resistant and will not cause the aluminum liquid to stick together, thus achieving a good wetting effect.

[0060] After the porous plate is fixed to the evaporating boat, it is immersed in molten aluminum for the evaporation process.

[0061] Preferably, the bottom of the liquid container is provided with a drain port for draining the molten aluminum after the lubrication process is completed.

[0062] In this invention, after the lubrication process is completed, the molten aluminum is discharged through the drain port for reuse in the next lubrication process, thus realizing the reuse of molten aluminum.

[0063] Preferably, an air inlet is provided at the top of the heatable cavity for the drying process of the evaporation boat after the boat has been moistened.

[0064] In this invention, the drying and cooling process of the evaporation boat after lubrication can be achieved by purging the protective gas.

[0065] Preferably, the bottom of the liquid container is also provided with a lifting device for dynamic soaking treatment of the evaporation boat to be moistened.

[0066] In this invention, the lifting and lowering of the liquid container can be controlled by a lifting device, and the lifting and lowering of the evaporation boat to be moistened can also be controlled by a lifting device, both of which can achieve the same technical effect.

[0067] Preferably, the porous plate is used to fix the evaporation boat to be moistened by a rotating clamp, for dynamic soaking treatment of the evaporation boat to be moistened.

[0068] In this invention, both the lifting device and the rotating clamping frame device use conventional technologies in terms of their specific structure and shape. Those skilled in the art can make adaptive selections and adjustments based on actual needs to achieve the above-mentioned structural components. This invention applies to all of them.

[0069] It should also be noted that in a vacuum environment, the present invention can realize the operation of placing the porous plate in the molten aluminum in the heated cavity through an external control switch, and can realize the dynamic immersion process control without manual operation, such as by activating a valve.

[0070] Compared with the prior art, the present invention has the following beneficial effects:

[0071] The lubrication method provided by this invention lubricates the evaporation boat by immersion, maximizing the wetting layer and wetting area on the surface of the evaporation boat. Simultaneously, the lubricated aluminum liquid can be reused, eliminating the need for costly barrier evaporation equipment; conventional heating equipment is sufficient for complete lubrication, simplifying the lubrication process. The number of evaporation boats processed each time can be controlled, improving lubrication efficiency. Furthermore, the surface structure of the lubricated evaporation boat is dense, significantly extending its service life. Attached Figure Description

[0072] Figure 1 This is a schematic diagram of the boat-lubricating device provided in one embodiment of the present invention.

[0073] Figure 2 This is a schematic diagram of the boat-lubricating device provided in another embodiment of the present invention.

[0074] Figure 3 This is a schematic diagram of the rotating clamping frame in another embodiment of the present invention.

[0075] Figure 4 This is a flowchart illustrating the boat-lubricating method provided in Embodiment 1 of the present invention.

[0076] Figure 5 This is a SEM image of the surface of the evaporation boat after it has been moistened using the moistening method provided in Example 1 of this invention.

[0077] Figure 6 This is a SEM image of the surface of the evaporation boat after being moistened using the moistening method provided in Comparative Example 1.

[0078] Among them, 1-heatable cavity, 2-liquid container, 3-perforated plate, 4-drain outlet, 5-lifting device, 6-air blowing port, 7-rotating clamping frame, 8-evaporation boat to be moistened. Detailed Implementation

[0079] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0080] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this application; the terms “comprising” and “having” and any variations thereof in this application are intended to cover non-exclusive inclusion.

[0081] In the description of this application, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0082] It should be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "set up," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0083] Those skilled in the art should understand that this application necessarily includes the necessary pipelines, conventional valves and general pump equipment for achieving process integrity, but the above content is not the main inventive point of this application. Those skilled in the art can add layouts based on process flow and equipment structure selection, and this application does not make any special requirements or specific limitations in this regard.

[0084] In one embodiment, the present invention provides a boat lubrication device, such as... Figure 1 As shown, the boat lubrication device includes:

[0085] Heated cavity 1;

[0086] Liquid container 2, located at the bottom of the heatable cavity 1, is used to hold molten aluminum;

[0087] The porous placement plate 3, located in the heatable cavity 1, is used to fix the evaporation boat to be moistened.

[0088] The bottom of the liquid container 2 is provided with a drain port 4 for draining the aluminum liquid after the lubrication process is completed;

[0089] The bottom of the liquid container 2 is also equipped with a lifting device 5 for dynamic soaking treatment of the evaporation boat to be moistened;

[0090] An air inlet 6 is provided at the top of the heatable cavity 1 for the drying process of the evaporation boat after the boat has been moistened.

[0091] In another embodiment, the present invention provides a boat lubrication device, such as... Figure 2 As shown, the boat lubrication device includes:

[0092] Heated cavity 1;

[0093] Liquid container 2, located at the bottom of the heatable cavity 1, is used to hold molten aluminum;

[0094] The porous placement plate 3, located in the heatable cavity 1, is used to fix the evaporation boat to be moistened.

[0095] The bottom of the liquid container 2 is provided with a drain port 4 for draining the aluminum liquid after the lubrication process is completed;

[0096] The porous shelf 3 is obtained by means of, for example Figure 3 The rotating clamp 7 shown fixes the evaporation boat 8 to be moistened, and is used for dynamic soaking treatment of the evaporation boat 8.

[0097] The following embodiments all use the boat lubrication device provided in the above embodiments for boat lubrication treatment.

[0098] Example 1

[0099] This embodiment provides a boat lubrication method, employing the methods described above. Figure 1 One embodiment of the provided boat-lubricating device performs boat lubrication treatment, such as... Figure 4 As shown, the boat lubrication method includes the following steps:

[0100] A vacuum muffle furnace is used as the heating container (heatable chamber 1). The liquid container 2 is a crucible with dimensions of 90*90*30cm and made of silicon carbide. The porous plate is a wall mesh with dimensions of 85*85*20cm and made of silicon carbide. The wall mesh has a through-hole structure with a hole diameter of 5mm. The evaporation boat 8 is an evaporation boat with dimensions of 150*30mm. The lifting and lowering of the porous plate 3 is controlled by the lifting device 5.

[0101] (1) Fill the crucible with aluminum ingots, aluminum plates or aluminum wires, stack them to a height of 10cm, and lay a layer of evaporation boats on the wall mesh. Each evaporation boat is fixed to the wall mesh by a clamp. Place 20 evaporation boats.

[0102] Vacuum level reaches 1.0E -02 Then, the muffle furnace is heated, and after the temperature reaches 800°C, wait 10 minutes to allow the solid aluminum to melt completely.

[0103] (2) Open the start valve and slowly lower the wall mesh into the crucible. Continue heating for 30 minutes to fully immerse the evaporation boat in the aluminum liquid. Start the lifting device 5. The rising speed is 1000 mm / min and the falling speed is 1000 mm / min. Use the above rising and falling speeds to continuously and rapidly lift the wall mesh for dynamic immersion. The number of lifting and lowering times is 20. After dynamic immersion for 30 minutes, slowly lift the wall mesh and remove it from the aluminum liquid.

[0104] (3) Argon gas is sprayed through the air blowing port above the wall mesh to dry the evaporation boat after it has been moistened. The boat is then allowed to cool down naturally to below 100 degrees Celsius. The evaporation boat is then removed along with the wall mesh. The wall mesh and the evaporation boat are then separated. The moistening process is now complete.

[0105] At the same time, open the drain port at the bottom of the crucible to drain the molten aluminum inside, so that it can be used again next time.

[0106] Example 2

[0107] This embodiment provides a boat lubrication method, employing the methods described above. Figure 2 One embodiment provides a boat-moistening apparatus for boat moistening treatment, the boat-moistening method comprising the following steps:

[0108] A vacuum muffle furnace is used as the heating container (heatable chamber 1). The liquid container 2 is a 90*90*30cm crucible made of silicon carbide. The porous plate is a silicon carbide mesh with a through-hole structure and a hole diameter of 50mm. The evaporation boat 8 is an evaporation boat with a size of 150*30mm. The evaporation boat 8 is fixed to the surface of the porous plate 3 by a rotating clamp 7, and the rotation process of the evaporation boat is controlled.

[0109] (1) Fill the crucible with aluminum ingots, aluminum plates or aluminum wires, stack them to a height of 10cm, and lay a layer of evaporation boats on the wall mesh. Each evaporation boat is fixed to the wall mesh by a clamp. Place 20 evaporation boats.

[0110] Vacuum level reaches 1.0E -02 Then, the muffle furnace is heated, and after the temperature reaches 800°C, wait 10 minutes to allow the solid aluminum to melt completely.

[0111] (2) Open the start valve and slowly place the evaporation boat into the crucible. Continue heating for 30 minutes to fully immerse the evaporation boat in the aluminum liquid. Start the rotating device of the rotating clamp 7 and rotate it at low speed in the aluminum liquid for 30 minutes to perform dynamic immersion. After 30 minutes, remove the wall mesh and detach it from the aluminum liquid.

[0112] (3) Continue the rotation process of the rotating clamp 7 for 10 minutes to accelerate the aluminum liquid to fall off and cool down naturally to below 100 degrees Celsius. Take out the evaporation boat along with the wall mesh, separate the wall mesh and the evaporation boat, and the boat lubrication is completed.

[0113] At the same time, open the drain port at the bottom of the crucible to empty the molten aluminum inside, reserving it for the next use.

[0114] Example 3

[0115] The difference between this embodiment and Embodiment 1 is that the heating temperature of the muffle furnace in this embodiment is 600°C.

[0116] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0117] Example 4

[0118] The difference between this embodiment and Embodiment 1 is that the heating temperature of the muffle furnace in this embodiment is 1000℃.

[0119] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0120] Example 5

[0121] The difference between this embodiment and Embodiment 1 is that in this embodiment, no dynamic immersion process is performed. Instead, after the evaporation boat is fully immersed in the molten aluminum, no further treatment is done, and the static immersion process is maintained. After 30 minutes, the wall mesh is slowly lifted and removed from the molten aluminum.

[0122] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0123] Example 6

[0124] The difference between this embodiment and Embodiment 1 is that the aperture of the mesh in this embodiment is 3mm.

[0125] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0126] Example 7

[0127] The difference between this embodiment and Embodiment 1 is that the aperture of the mesh in this embodiment is 80mm.

[0128] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0129] Example 8

[0130] The difference between this embodiment and embodiment 1 is that, in the dynamic soaking process of this embodiment, the lifting device 5 has an upward speed of 400 mm / min and a downward speed of 400 mm / min.

[0131] The remaining preparation methods and parameters are consistent with those in Example 1.

[0132] Example 9

[0133] The difference between this embodiment and embodiment 1 is that, in the dynamic soaking process of this embodiment, the lifting device 5 has an upward speed of 2000 mm / min and a downward speed of 2000 mm / min.

[0134] The remaining preparation methods and parameters are consistent with those in Example 1.

[0135] Example 10

[0136] The difference between this embodiment and embodiment 1 is that, in the dynamic soaking process of this embodiment, the lifting device 5 has an upward speed of 200 mm / min and a downward speed of 200 mm / min.

[0137] The remaining preparation methods and parameters are consistent with those in Example 1.

[0138] Example 11

[0139] The difference between this embodiment and embodiment 1 is that, in the dynamic soaking process of this embodiment, the lifting device 5 has an upward speed of 2500 mm / min and a downward speed of 2500 mm / min.

[0140] The remaining preparation methods and parameters are consistent with those in Example 1.

[0141] Comparative Example 1

[0142] This comparative example provides a method for lubricating a boat, the method comprising the following steps:

[0143] (1) Ensure that the two rows of clamps are aligned and the surfaces are clean. This is to ensure good electrical and mechanical contact of the evaporation boat and avoid generating additional heat during the heating process, which would affect the performance and service life of the evaporation boat.

[0144] (2) Using graphite paper ensures good electrical contact and thermal conduction, which helps to improve the heating efficiency of the evaporation boat and ensures a uniform temperature distribution in the evaporation boat.

[0145] (3) When the new boat is heated for the first time, place a piece of aluminum wire in the center of the groove of the evaporation boat; this helps to accurately determine the temperature of the evaporation boat. The contact point of the aluminum wire should be located at 1 / 3 to half of the boat length to ensure effective temperature monitoring.

[0146] (4) The aluminum feeding speed should be gradually increased from about 75% of the normal speed, and the power should be gradually reduced to achieve a larger liquid aluminum spreading area. This step is to optimize the use of the evaporation boat, ensure that the liquid aluminum is evenly distributed on the evaporation boat, thereby improving the uniformity of the coating and the service life of the evaporation boat.

[0147] Comparative Example 2

[0148] The difference between this comparative example and Example 1 is that the perforated shelf in this comparative example has a pore size of 0, that is, the shelf does not contain a hole structure.

[0149] The remaining methods and parameters for lubricating the boat are consistent with those in Example 1.

[0150] The shelf in Comparative Example 2 is a non-porous structure, which poses a risk that the molten aluminum cannot be completely separated from the evaporation boat, and the evaporation boat cannot be demolded.

[0151] Figure 5 The image shows a SEM image of the surface of the evaporation boat after it has been moistened using the boat moistening method provided in Example 1 of this invention.

[0152] Figure 6 The image shows a SEM image of the surface of the evaporation boat after it has been moistened using the moistening method provided in Comparative Example 1.

[0153] from Figure 5 and Figure 6 The comparison shows that the evaporation boat treated by the lubrication method provided by the present invention has a dense surface structure and a good lubrication effect; while the evaporation boat treated by the lubrication method using a conventional coating machine has a loose surface structure and a poor lubrication effect.

[0154] The evaporation boats provided in Examples 1-11 and Comparative Examples 1-2 were tested for their evaporation effects, including evaporation time, effective evaporation area, and service life. The test conditions were as follows: evaporation boats with different evaporation times were simultaneously placed in a coating machine for vapor deposition. During vapor deposition, the time from film formation to the occurrence of a major anomaly, while ensuring the same evaporation efficiency, was defined as the service life of the evaporation boat. Insufficient heat generation from the evaporation boat would cause the metal wire to melt, or the film appearance would be subject to uncontrollable splashing (due to failure of voltage control and other related methods), failing to meet product requirements. The final test results are shown in Table 1.

[0155] Table 1

[0156]

[0157]

[0158] The purchase cost of the vacuum muffle furnace used in the embodiments of the present invention is much lower than the purchase cost of the coating machine in Comparative Example 1. Obviously, the cost of the boat lubrication method provided by the present invention is much lower than the cost of boat lubrication using the coating machine in the prior art.

[0159] In the embodiments of this invention, a boat-lubricating heating device such as a vacuum muffle furnace is selected, which allows the number of evaporation boats processed each time to be adjustable, thereby improving the boat-lubricating efficiency.

[0160] In summary, the lubrication method provided by this invention lubricates the evaporation boat by immersion, maximizing the wetting layer and wetting area on the surface of the evaporation boat. Furthermore, the lubricated aluminum liquid can be reused, eliminating the need for costly barrier evaporation equipment; conventional heating equipment is sufficient for complete lubrication, simplifying the lubrication process. The number of evaporation boats processed each time can be controlled, improving lubrication efficiency. Moreover, the surface structure of the lubricated evaporation boat is dense, significantly extending its service life.

[0161] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for lubricating a boat, characterized in that, The method for lubricating a boat includes the following steps: S1: Fix the evaporation boat to be moistened onto the surface of the porous shelf; S2: Vacuum extraction; S3: Heat solid aluminum to obtain molten aluminum; S4: In the vacuum environment after vacuuming, the evaporation boat to be hydrated, which is fixed on the surface of the porous plate, is immersed in the aluminum liquid for hydration treatment. S5: After S4 is completed, take out the evaporation boat and obtain the evaporation boat after moistening; S1, S2 and S3 have no particular order.

2. The method for lubricating a boat according to claim 1, characterized in that, In S1, the porous storage plate is made of ceramic material; Preferably, in S1, the aperture size of the porous storage plate is 5mm to 50mm; Preferably, in S1, the fixing method includes clamp fixing.

3. The method for lubricating a boat according to claim 1 or 2, characterized in that, In S4, the soaking method includes dynamic soaking or static soaking, preferably dynamic soaking; Preferably, the dynamic soaking includes lifting soaking and / or rotating soaking; Preferably, the lifting and lowering of the soaking device is performed 5 to 30 times; Preferably, the rising speed of the lifting soaking evaporation boat is 400 mm / min to 2000 mm / min, and the falling speed is 400 mm / min to 2000 mm / min; Preferably, the linear velocity of the rotary soaking evaporation boat is 400 mm / min to 1000 mm / min.

4. The method for lubricating a boat according to any one of claims 1-3, characterized in that, In S4, the temperature of the boat moistening treatment is 600-900℃, and the time of the boat moistening treatment is 15-120 minutes. Preferably, in step S5, after the evaporation boat is removed, it is dried to obtain a moistened evaporation boat.

5. The method for lubricating a boat according to any one of claims 1-4, characterized in that, The method for lubricating a boat includes the following steps: S1: Fix the evaporation boat to be moistened onto the surface of a porous storage plate with a pore size of 5mm to 50mm, wherein the porous storage plate is made of ceramic material; S2: Vacuum extraction; S3: Heat solid aluminum to obtain molten aluminum; S4: In a vacuum environment, at 600-900℃, the boat to be evaporated, which is fixed on the surface of the porous plate, is dynamically immersed in the aluminum liquid for evaporation treatment. S5: After S4 is completed, take out the evaporation boat, dry it, and obtain the evaporation boat after moistening; S1, S2 and S3 have no particular order.

6. An evaporation boat after moistening, characterized in that, The evaporating boat after being moistened is obtained by the moistening method as described in any one of claims 1-5.

7. The use of an evaporation boat after it has been moistened, characterized in that, The application includes using the evaporation boat, after being moistened as described in claim 6, in a vacuum evaporation apparatus.

8. A boat-moistening apparatus for use in the boat-moistening method as described in any one of claims 1-5, characterized in that, The boat-lubricating device includes: Heated cavity; A liquid container, located at the bottom of the heatable cavity, is used to hold molten aluminum; A porous placement plate, located in the heatable cavity, is used to fix the evaporation boat to be moistened.

9. The boat lubrication device according to claim 8, characterized in that, The bottom of the liquid container is provided with a drain port for draining the molten aluminum after the lubrication process is completed; Preferably, an air inlet is provided at the top of the heatable cavity for the drying process of the evaporation boat after the boat has been moistened.

10. The boat lubrication device according to claim 8 or 9, characterized in that, The bottom of the liquid container is also equipped with a lifting device for dynamic soaking treatment of the evaporation boat to be moistened; Preferably, the porous plate is used to fix the evaporation boat to be moistened by a rotating clamp, for dynamic soaking treatment of the evaporation boat to be moistened.

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