A processing technology for recycling of gallium antimonide seed crystal

Abstract

This invention belongs to the field of semiconductor materials and discloses a processing technology for the reuse of gallium antimonide seed crystals. The processing technology includes: grinding and cleaning the gallium antimonide seed crystal, then immersing the gallium antimonide seed crystal in a first etching solution and a second etching solution sequentially, followed by cleaning and drying. Through a synergistic process of mechanical grinding, ultrasonic hydrolysis, chemical passivation, and selective etching, contaminants are thoroughly removed while protecting the seed crystal itself.

Images