A combined rotary target and a method for manufacturing the same

Abstract

The application provides a combined rotary target material and a preparation method thereof, and belongs to the technical field of target materials. The preparation method of the combined rotary target material comprises the following steps: sequentially performing first sand blasting treatment, nickel-aluminum alloy electric arc spraying bottoming and plasma spraying of silicon powder on the middle region of a target material back tube to obtain a first intermediate body; sequentially performing second sand blasting treatment and plasma spraying of nickel-aluminum alloy powder on the region of the first intermediate body which is not sprayed with a silicon coating to obtain a second intermediate body; and performing plasma spraying of a silicon-containing composite powder on the nickel-aluminum alloy surface of the second intermediate body to obtain the combined rotary target material. The sand blasting treatment before spraying improves the bonding strength between the target material and the substrate; the bottoming operation is performed in a plasma spraying mode, so that the switching movement of the target material between multiple devices can be reduced; and the nickel-aluminum alloy powder is sprayed before the silicon-containing composite powder is sprayed, so that the possibility of the cracking problem of the target material can be greatly reduced.

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