Five-axis motion platform for femtosecond laser processing

Abstract

The utility model discloses a five-axis motion platform for femtosecond laser processing. The five-axis motion platform comprises a Z-axis motion assembly, an XY-axis motion assembly and an AC-axis motion assembly which are sequentially assembled in a laminated mode from bottom to top. The Z-axis moving assembly is provided with a Z-axis base, the top of the Z-axis base is transversely and slidably connected with a wedge-shaped sliding table through a lead screw assembly, the inclined face of the top of the wedge-shaped sliding table is slidably connected with two parallel wedge-shaped mounting blocks, and the planes of the tops of the two wedge-shaped mounting blocks are fixedly connected with a Z-axis load plate; the end faces of one sides of the two wedge-shaped mounting blocks are vertically connected with sliding blocks in a sliding mode, the top of the Z-axis base is further fixedly connected with a sliding block fixing block, and the side end faces of the two sliding blocks are fixedly connected with the side wall of the sliding block fixing block. The utility model provides a five-degree-of-freedom precise motion platform device which is reasonable in structural design and ensures the realization of ultrahigh precision of femtosecond laser processing.

Description

Technical Field

[0001] The utility model relates to the technical field of high-precision processing, and more specifically, to a five-axis motion table for femtosecond laser processing. Background Art

[0002] With the advancement and development of science and technology, the requirements for parts processing accuracy and quality are becoming increasingly higher, especially in micro-machining, micro-nano structure manufacturing, photonic devices, high-density storage, medical and bioengineering. Traditional processing equipment and technologies are difficult to meet the development requirements of the current manufacturing industry.

[0003] Femtosecond laser can achieve extremely high processing accuracy due to its ultra-fast time characteristics, ultra-high peak power and strong focusing ability. The emergence of femtosecond laser is particularly critical for high-end manufacturing technologies such as aviation, aerospace, and 3C. Femtosecond laser processing devices and technologies have also become an important means to solve the problem of high-precision and high-quality processing of parts.

[0004] The five coordinate axes of the five-axis machining machine can be linked to meet the processing of spatial curved surfaces and arbitrary contours, so that the workpiece can complete a large number of processing procedures after one clamping, ensuring the precision requirements of the parts in all aspects. It is increasingly used in key fields such as aerospace, medical and many other advanced manufacturing industries. However, in the prior art, both the laser head in traditional laser processing and the galvanometer in femtosecond laser processing are set on the Z axis, so that it moves up and down along the Z axis. For example, the utility model patent with the authorized patent number CN219402791U discloses a five-axis laser processing equipment with a swing head mechanism, and its galvanometer is installed on the Z-axis slide. The running accuracy of the Z axis of this machine tool has a great influence on the accuracy of the final processed part, and its error will be multiplied with the distance between the laser head or galvanometer and the surface of the processed part. In addition, the vertical movement in the prior art often adopts the side hanging method, resulting in a large motion load on the Z axis and low processing accuracy. Utility Model Content

[0005] An object of the present invention is to solve at least the above problems and to provide at least the advantages which will be described below.

[0006] Another object of the utility model is to provide a five-axis motion table for femtosecond laser processing, which provides high-precision five-degree-of-freedom motion guarantee for high-precision and high-quality femtosecond laser processing.

[0007] In order to achieve these purposes and other advantages according to the utility model, a five-axis motion table for femtosecond laser processing is provided, comprising a Z-axis motion assembly, an XY-axis motion assembly and an AC-axis motion assembly which are sequentially stacked and assembled from bottom to top;

[0008] The Z-axis motion assembly is provided with a Z-axis base, and the top of the Z-axis base is laterally slidably connected with a wedge-shaped slide through a screw assembly, and the top inclined surface of the wedge slide is slidably connected with two mutually parallel wedge-shaped mounting blocks, and the top planes of the two wedge-shaped mounting blocks are fixedly connected with the Z-axis load plate, and one side end surfaces of the two wedge-shaped mounting blocks are vertically slidably connected with sliders, and the top of the Z-axis base is also fixedly connected with a slider fixing block, and the side end surfaces of the two sliders are fixedly connected to the side walls of the slider fixing block, and the bottoms of the two opposite triangular side end surfaces of the wedge slide are provided with transverse grooves, and the tops are provided with oblique grooves, and the tops of the two opposite triangular side end surfaces are provided with transverse grooves, and the tops are provided with oblique grooves, and the tops of the Z-axis base are also spaced apart with two mutually parallel transverse steps, and the bottom inclined surfaces of the two wedge-shaped mounting blocks are provided with oblique steps, the two transverse grooves correspond to the two transverse steps, and are slidably connected through two sets of cross roller guides A, the two oblique grooves correspond to the two oblique steps, and are slidably connected through two sets of cross roller guides B, and the side end surfaces of the two wedge-shaped mounting blocks are slidably connected with the corresponding two sliders through the slider guides.

[0009] Preferably, the screw assembly includes two supporting bearing seats arranged on the top of the Z-axis base, a screw shaft is rotatably installed between the two supporting bearing seats, a screw nut is provided on the outer periphery of the screw shaft, the screw nut is fixedly connected to the wedge slide through a screw nut mounting block, and one end of the screw shaft is connected to the output spindle of the servo motor through a coupling.

[0010] Preferably, a motor mounting seat is installed on the top of the Z-axis base, and the servo motor is fixedly connected to the motor mounting seat.

[0011] Preferably, a cavity is provided at the bottom of the wedge-shaped slide, and a notch for accommodating and installing the screw nut mounting block is provided on a rectangular side end surface of the wedge-shaped slide.

[0012] Preferably, a grating ruler is installed on the inner side wall of the cavity, a reading head mounting seat is installed on the Z-axis base, and a reading head corresponding to the grating ruler is fixedly connected to the reading head mounting seat.

[0013] Preferably, a vertically extending limit block is provided on the top of the Z-axis base, the limit block is provided with a vertically extending long strip through hole, and a limit pin is installed on the side wall of the wedge-shaped mounting block, and the outer end of the limit pin is matched and slidably accommodated in the long strip through hole.

[0014] Preferably, two side sealing plates and two shielding plates are relatively installed on the top of the Z-axis base.

[0015] Preferably, the XY-axis motion assembly is fixedly mounted on the top of the Z-axis load plate, and the AC-axis motion assembly is mounted on the top of the XY-axis motion assembly.

[0016] The present invention at least includes the following beneficial effects: the five-axis motion table for femtosecond laser processing described in the present invention can realize independent motion in five directions or multi-directional linkage, and its vertical motion adopts the method of lifting the Z-axis, that is, the Z-axis adopts a wedge-shaped structure, and is supported and guided by two groups of cross roller guides and a group of slider guides. The servo motor drives the ball screw structure to provide drive, and the linear grating scale provides position feedback to realize a large load, large stroke and high-precision lifting motion platform, which provides high-precision five-degree-of-freedom motion guarantee for the high-precision and high-quality realization of femtosecond laser processing, and when in use, the galvanometer is fixed on the bracket and does not move, eliminating the amplified motion error caused by the movement of the galvanometer, thereby ensuring the realization of ultra-high precision of femtosecond laser processing.

[0017] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of a five-axis motion table for femtosecond laser processing according to one of the technical solutions of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the Z-axis motion assembly in one of the technical solutions of the present utility model;

[0020] Figure 3 It is a schematic diagram of the longitudinal cross-section structure of the Z-axis motion assembly in one of the technical solutions of the utility model;

[0021] Figure 4 It is a partial cross-sectional view of the Z-axis motion assembly in one of the technical solutions of the utility model;

[0022] Figure 5 It is a schematic structural diagram of the cross roller guide A and the cross roller guide B described in one of the technical solutions of the utility model;

[0023] Figure 6 for Figure 5 A partial enlarged view of the cross roller guide A described in;

[0024] Figure 7 It is a structural schematic diagram of the grating ruler and the reading head described in one of the technical solutions of the utility model;

[0025] Figure 8 It is a structural schematic diagram of the wedge-shaped slide described in one of the technical solutions of the utility model;

[0026] Fig. 9 It is a bottom view of the AC axis motion assembly in one of the technical solutions of the utility model;

[0027] Fig.10 It is a bottom view of the XY axis motion assembly in one of the technical solutions of the utility model;

[0028] Fig.11 It is a three-dimensional diagram of the XY axis motion assembly in one of the technical solutions of the utility model;

[0029] Fig.12 for Fig.11 A partial enlarged view of the junction box of the XY axis;

[0030] Fig.13 It is a schematic diagram of the working layout of the five-axis motion table for femtosecond laser processing described in one of the technical solutions of the utility model;

[0031] Fig.14 for Fig.13 A partial enlarged view of the adjustment mirror described in . DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0033] It should be understood that the terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.

[0034] like Figure 1-14 As shown, the utility model provides a five-axis motion table for femtosecond laser processing, including a Z-axis motion assembly 100, an XY-axis motion assembly 200, and an AC-axis motion assembly 300 which are sequentially stacked and assembled from bottom to top;

[0035] The Z-axis motion assembly 100 is provided with a Z-axis base 101, the top of the Z-axis base 101 is slidably connected to a wedge-shaped slide 102 via a lead screw assembly, the top inclined surface of the wedge-shaped slide 102 is slidably connected to two mutually parallel wedge-shaped mounting blocks 103, the top planes of the two wedge-shaped mounting blocks 103 are fixedly connected to a Z-axis load plate 104, one side end surfaces of the two wedge-shaped mounting blocks 103 are both vertically slidably connected to a slider 105, and the top of the Z-axis base 101 is also fixedly connected to a slider fixed The fixed block 106, the side end surfaces of the two sliders 105 are fixedly connected to the side wall of the slider fixed block 106, the bottoms of the two opposite triangular side end surfaces of the wedge-shaped slide 102 are provided with transverse slide grooves 118, and the tops are provided with oblique slide grooves 119. The top of the Z-axis base 101 is also provided with two mutually parallel transverse steps at intervals, and the bottom inclined surfaces of the two wedge-shaped mounting blocks 103 are provided with oblique steps. The two transverse slide grooves 118 correspond to the two transverse steps and are slidably connected through two groups of cross roller guides A 120. The two oblique slide grooves 119 correspond to the two oblique steps and are slidably connected through two groups of cross roller guides B 121. The side end surfaces of the two wedge-shaped mounting blocks 103 and the corresponding two sliders 105 are slidably connected through the slider guide 122.

[0036] In the above technical solution, the five-axis motion platform for femtosecond laser processing is integrated and assembled in a modular stacking manner, which is composed of a bottom Z-axis motion component 100, a middle XY-axis motion component 200 and a top AC-axis motion component 300. Each connecting component is fixed and installed by screws. The Z-axis motion assembly 100 includes a Z-axis base 101 and a Z-axis load plate 104 which are parallel to each other, and a wedge slide 102 and two wedge mounting blocks 103 which are arranged opposite to each other are installed between the two. The bottom of the wedge slide 102 is slidably connected to the top of the Z-axis base 101, and the wedge slide 102 is driven by a screw assembly to slide laterally on the Z-axis base 101. The top inclined surface of the wedge slide 102 is slidably connected to the inclined bottom surfaces of the two wedge mounting blocks 103. The tops of the two wedge mounting blocks 103 are fixedly connected to the bottom of the Z-axis load plate 104. The side walls on the same side of the two wedge mounting blocks 103 are slidably connected with a slider 105, so that the wedge mounting blocks 103 slide vertically relative to the slider 105. The end of the slider 105 away from the wedge mounting block 103 is fixedly connected to a sliding fixed block, and the bottom of the sliding fixed block extends downward to be fixedly connected to the top of the Z-axis base 101. The cross roller guide A 120 is accommodated in the transverse slide groove 118 at the bottom of the wedge slide 102, and the cross roller guide B 121 is accommodated in the oblique slide groove 119 at the top of the wedge slide 102. The structures of the cross roller guide A 120 and the cross roller guide B 121 are consistent with the structures of the cross roller guides disclosed in the prior art, and are composed of two cross roller guides having VThe rollers are composed of guide rails, roller cages, cylindrical rollers, etc. The cylindrical rollers are arranged crosswise and are precisely ground. V The Z-axis base 101 can reciprocate on the rolling surface, bear loads in all directions, and realize high-precision and smooth linear motion. The inner side surface of the horizontal step on the top surface of the Z-axis base 101 is attached to the outer side rail of the cross roller guide A 120 and fixedly connected by screws. The inner side rail of the cross roller guide A 120 is fixedly connected to the inner side wall of the horizontal slide 118 by screws. The inner side wall of the oblique slide 119 is attached to the inner side rail of the cross roller guide B 121 and fixedly connected by screws. The outer side rail of the cross roller guide B 121 is fixedly connected to the inner side surface of the oblique step at the bottom of the two wedge-shaped mounting blocks 103 by screws. The side walls of the two wedge-shaped mounting blocks 103 are fixedly installed with a vertically extending slider guide 122 by screws, and the slider 105 is slidably sleeved on the slider guide 122. The slider guide 122 is a linear guide, which facilitates the up and down sliding of the wedge-shaped mounting block 103. Two groups of cross roller guides and one group of slider guides 122 constitute the support and motion guiding structure of the Z-axis motion table. During use, the lead screw assembly drives the wedge slide 102 to slide horizontally. Under the squeezing effect of the wedge slide 102 and the vertical guiding effect of the slider 105 and the slider fixing block 106, the two wedge mounting blocks 103 move vertically, thereby driving the Z-axis load plate 104 to move vertically, thereby realizing the movement of the five-axis motion table for femtosecond laser processing in the Z-axis direction. The Z-axis motion assembly 100 is provided with the slider 105 fixedly connected to the Z-axis base 101 through the slider fixing block 106, which plays a role in supporting and guiding the motion of the wedge mounting block 103, so that the two wedge mounting blocks 103 can move vertically. The wedge structure is used to realize the horizontal lifting motion in the vertical direction, realizing a lifting motion platform with large load, large stroke and high precision, and making the motion in the Z-axis direction more stable.

[0037] like Figure 4As shown, in another technical solution, the screw assembly includes two support bearing seats arranged on the top of the Z-axis base 101, and a screw shaft 108 is rotatably installed between the two support bearing seats. A screw nut is provided on the outer periphery of the screw shaft 108, and the screw nut is fixedly connected to the wedge slide 102 through a screw nut mounting block 109, and one end of the screw shaft 108 is connected to the output spindle of the servo motor 111 through a coupling 110. In this technical solution, the screw assembly includes two support bearing seats, both of which are fixed to the Z-axis base 101 by screws, and the two ends of the screw shaft 108 rotate through the two support bearing seats, one end of which is connected to the output spindle of the servo motor 111 through a coupling 110, and the servo motor 111 is fixedly installed on the motor mounting seat by screws, and the motor mounting seat is fixed to the Z-axis base 101 by screws, and the screw nut is connected to the screw nut mounting block 109 by screws, and the screw nut mounting block 109 is fixedly connected to the wedge slide 102 by screws. The servo motor 111 drives the screw shaft 108 to rotate, thereby driving the screw nut, the screw nut mounting block 109, and the wedge slide 102 to move horizontally, and realizes the lifting movement of the Z-axis load plate 104 through the wedge-shaped structure arrangement, so that the movement stability in the Z-axis direction is good and the accuracy is high.

[0038] like Figure 4 As shown, in another technical solution, a motor mounting seat is installed on the top of the Z-axis base 101, and the servo motor 111 is fixedly connected to the motor mounting seat. In this technical solution, the servo motor 111 is fixedly installed on the motor mounting seat by screws, and the motor mounting seat is fixed to the Z-axis base 101 by screws to improve the structural stability.

[0039] like Figure 8 As shown, in another technical solution, a cavity 113 is provided at the bottom of the wedge-shaped slide 102, and a notch 114 for accommodating and installing the screw nut mounting block 109 is provided on a rectangular side end surface of the wedge-shaped slide 102.

[0040] like Figure 7 As shown, in another technical solution, a grating ruler 115 is installed on the inner wall of the cavity 113, and a reading head mounting seat 116 is installed on the Z-axis base 101, and a reading head 117 corresponding to the grating ruler 115 is fixedly connected to the reading head mounting seat 116. In this technical solution, a slot 107 for installing the grating ruler 115 is provided on the inner wall of the cavity 113 near the bottom of the wedge slide 102, and the grating ruler 115 is pasted in the slot 107, and the reading head 117 is fixedly connected to the reading head mounting seat 116 by screws, and corresponds to the grating ruler 115, and the reading head mounting seat 116 is fixedly connected to the Z-axis base 101 by screws. The grating ruler 115 cooperates with the reading head 117 to realize real-time position feedback of Z-axis movement.

[0041] like Figure 3 As shown, in another technical solution, a vertically extending limit block 123 is provided on the top of the Z-axis base 101, and the limit block 123 is provided with a vertically extending long strip through hole 124, and a limit pin 125 is installed on the side wall of the wedge-shaped mounting block 103, and the outer end of the limit pin 125 is matched and slidably accommodated in the long strip through hole 124. In this technical solution, the limit block 123 is fixedly mounted on the Z-axis base 101 by screws, and the limit pin 125 is fixed to one side of the wedge-shaped mounting block 103 by screwing, and the limit pin 125 can move up and down in the long strip through hole 124 of the limit block 123, and they cooperate together to realize the mechanical limit of the up and down movement stroke of the Z-axis motion table.

[0042] like Figure 2 As shown, in another technical solution, the top of the Z-axis base 101 is also relatively installed with two side sealing plates 126 and two shielding plates 127. In this technical solution, the two side sealing plates 126 and the two shielding plates 127 are installed around the outer periphery of the wedge-shaped slide 102.

[0043] like Figure 9-14 As shown, in another technical solution, the XY-axis motion assembly 200 is fixedly mounted on the top of the Z-axis load plate 104, and the AC-axis motion assembly 300 is mounted on the top of the XY-axis motion assembly 200. In this technical solution, the five-axis motion table is integrated and assembled in a modular stacking manner, which is respectively composed of a bottom Z-axis motion assembly 100, a middle XY-axis motion assembly 200 and a top AC-axis motion assembly 300. Each connecting assembly is fixedly installed by screws. The five-axis motion table optimizes the design of the cable system. The cable of the AC axis is transferred to the junction box 201 of the XY axis and then exported to the motion table in the form of a flat motion cable 202 to connect to the control system. The cable of the Z axis is structurally designed to ensure that the cable is fixed and has no moving parts. The AC axis motion assembly 300 refers to the patent application (application publication number CN116275632A) "High-precision and high-load AC axis". Compared with the above patent application, the AC axis motion assembly 300 of this application is further streamlined and optimized in structure and size, especially the 6 cables in the original structure are regularized into 2 cables. Figure 8The eight fixed mounting holes 301 are fixedly connected to the XY axis motion assembly 200 by screws. The four threaded through holes 302 can be used for the leveling operation of the AC axis motion assembly 300 by screwing in the top screws. The bottom of the XY axis motion assembly 200 is provided with eight mounting holes 203 which are fixedly connected to the Z axis load plate 104 by screws. When used and installed, the five-axis motion table for femtosecond laser processing is installed on the bottom plate 400 of the frame assembly. The frame assembly is also provided with a top plate 401. The top plate 401 and the bottom plate 400 are supported by two support plates 402. The femtosecond laser 403 and multiple groups of adjustment mirrors 404 are installed on the top plate. The dynamic focusing assembly 405 is installed at the edge of the top plate 401. One side of the dynamic focusing assembly 405 is directly opposite to a group of adjustment mirrors 404, and the other side is installed with a scanning galvanometer 407. The scanning galvanometer 407 is suspended and placed directly above the five-axis motion table for femtosecond laser processing.

[0044] The number of devices and processing scale described here are used to simplify the description of the utility model. The application, modification and variation of the five-axis motion platform for femtosecond laser processing of the utility model are obvious to those skilled in the art.

[0045] Although the implementation scheme of the utility model has been disclosed as above, it is not limited to the applications listed in the specification and implementation modes. It can be fully applied to various fields suitable for the utility model. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the utility model is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A five-axis motion table for femtosecond laser processing, characterized in that: It includes a Z-axis motion assembly, an XY-axis motion assembly and an AC-axis motion assembly which are stacked and assembled in sequence from bottom to top; The Z-axis motion assembly is provided with a Z-axis base, and the top of the Z-axis base is laterally slidably connected with a wedge-shaped slide through a screw assembly, and the top inclined surface of the wedge slide is slidably connected with two mutually parallel wedge-shaped mounting blocks, and the top planes of the two wedge-shaped mounting blocks are fixedly connected with the Z-axis load plate, and one side end surfaces of the two wedge-shaped mounting blocks are vertically slidably connected with sliders, and the top of the Z-axis base is also fixedly connected with a slider fixing block, and the side end surfaces of the two sliders are fixedly connected to the side walls of the slider fixing block, and the bottoms of the two opposite triangular side end surfaces of the wedge slide are provided with transverse grooves, and the tops are provided with oblique grooves, and the tops of the two opposite triangular side end surfaces are provided with transverse grooves, and the tops are provided with oblique grooves, and the tops of the Z-axis base are also spaced apart with two mutually parallel transverse steps, and the bottom inclined surfaces of the two wedge-shaped mounting blocks are provided with oblique steps, the two transverse grooves correspond to the two transverse steps, and are slidably connected through two sets of cross roller guides A, the two oblique grooves correspond to the two oblique steps, and are slidably connected through two sets of cross roller guides B, and the side end surfaces of the two wedge-shaped mounting blocks are slidably connected with the corresponding two sliders through the slider guides.

2. The five-axis motion table for femtosecond laser processing according to claim 1, characterized in that: The screw assembly includes two supporting bearing seats arranged on the top of the Z-axis base, a screw shaft is rotatably installed between the two supporting bearing seats, a screw nut is provided on the outer periphery of the screw shaft, the screw nut is fixedly connected to the wedge slide through a screw nut mounting block, and one end of the screw shaft is connected to the output spindle of the servo motor through a coupling.

3. The five-axis motion table for femtosecond laser processing according to claim 2, characterized in that: A motor mounting seat is installed on the top of the Z-axis base, and the servo motor is fixedly connected to the motor mounting seat.

4. The five-axis motion table for femtosecond laser processing according to claim 2, characterized in that: A cavity is provided at the bottom of the wedge-shaped slide, and a notch for accommodating and installing the screw nut mounting block is provided on a rectangular side end surface of the wedge-shaped slide.

5. The five-axis motion table for femtosecond laser processing according to claim 4, characterized in that: A grating ruler is installed on the inner wall of the cavity, a reading head mounting seat is installed on the Z-axis base, and a reading head corresponding to the grating ruler is fixedly connected to the reading head mounting seat.

6. The five-axis motion table for femtosecond laser processing according to claim 1, characterized in that: A vertically extending limit block is arranged on the top of the Z-axis base, and a vertically extending long strip through hole is opened in the limit block. A limit pin is installed on the side wall of the wedge-shaped mounting block, and the outer end of the limit pin is matched and slidably accommodated in the long strip through hole.

7. The five-axis motion table for femtosecond laser processing according to claim 1, characterized in that: The top of the Z-axis base is also relatively mounted with sealing plates on both sides and two shielding plates.

8. The five-axis motion table for femtosecond laser processing according to claim 1, characterized in that: The XY axis motion assembly is fixedly mounted on the top of the Z axis load plate, and the AC axis motion assembly is mounted on the top of the XY axis motion assembly.

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