Brake of semiconductor production equipment

Abstract

The utility model discloses a semiconductor production equipment brake which comprises a coil body shell, a rubber ring is fixedly connected to the interior of the coil body shell, a connecting layer is fixedly connected to the right side of the exterior of the coil body shell, an armature plate is slidably connected to the interior of the connecting layer, and a lining is fixedly connected to the right side of the exterior of the armature plate. A brake plate is arranged in the brake lining, an elastic assembly is arranged in the coil body shell, a gear shaft sleeve is fixedly connected to the right side of the exterior of the brake plate, a protection assembly is arranged on the right side of the exterior of the connecting layer, and a driving shaft is fixedly connected to the interior of the gear shaft sleeve. According to the utility model, transverse reciprocating movement can be carried out by utilizing the rigidity of the brake plate, and the shaft sleeve is tightly locked on the axis of the motor by utilizing an opening opposite locking mode, so that the problems that a lateral rotation multiple gap exists after stopping and braking cannot be carried out when a circuit is out of order are solved.

Description

Technical Field

[0001] The present application relates to the technical field of equipment brakes, and in particular to a brake for semiconductor production equipment. Background Art

[0002] Semiconductor production equipment brakes are one of the key components used in semiconductor manufacturing equipment. Their function is to control and regulate the movement of the equipment to ensure that the position and movement speed of the workpiece can be accurately and stably controlled during the production process. This type of brake is usually used in mechanical structures in semiconductor production equipment, such as rotating parts or motion platforms.

[0003] In the prior art, during the use of some devices, the brake usually includes an electromagnetic coil. When current passes through the coil, a magnetic field is generated in the coil. This electromagnetic excitation is the starting point for the brake to work. When braking is required, the electromagnetic excitation will be released, causing the electromagnetic force to decrease or disappear. This will break the balance between the electromagnetic force and the spring force. When the electromagnetic excitation is released, the brake plate contacts the friction surface and generates friction. This friction hinders the movement of the moving parts, resulting in a braking effect, but there is a problem of lateral rotation backlash after the device stops. Summary of the invention

[0004] The purpose of the present application is to provide a brake for semiconductor production equipment to improve the problem of lateral rotational clearance after stopping.

[0005] The present application provides a brake for semiconductor production equipment using the following technical solution:

[0006] A brake for semiconductor production equipment includes a coil body shell, a rubber ring is fixedly connected to the inside of the coil body shell, a connecting layer is fixedly connected to the outer right side of the coil body shell, an armature plate is slidably connected to the inside of the connecting layer, a brake pad is fixedly connected to the outer right side of the armature plate, a brake plate is arranged inside the brake pad, an elastic component is arranged inside the coil body shell, a gear sleeve is fixedly connected to the outer right side of the brake plate, a protective component is arranged on the outer right side of the connecting layer, a drive shaft is fixedly connected to the inside of the gear sleeve, a limiting ring is fixedly connected to the outside of the protective component, and two limiting rods are fixedly connected to the outer right side of the protective component.

[0007] By adopting the above technical solution, the rigidity of the brake plate can be used to perform lateral reciprocating movement, and the shaft sleeve is tightly locked on the motor shaft by using an open locking method, which solves the problem of lateral rotation clearance after stopping.

[0008] Optionally, the elastic component includes a spring 1, which is arranged inside the coil body shell, one end of the spring 1 is fixedly connected to the outer left side of the armature plate, and the other end of the spring 1 is fixedly connected to the left side of the inner wall of the coil body shell.

[0009] By adopting the above technical solution, the stored elastic force is used to provide power to the structures at both ends, so that the internal structure of the device can be kept stable without external interference.

[0010] Optionally, the protective component includes a fixing rivet and a shell, the outside of the fixing rivet is fixedly connected to the inside of the coil body shell and the connecting layer, the outside left side of the shell is fixedly connected to the outside right side of the connecting layer, and the inner wall of the shell is fixedly connected to the outside of the limiting ring.

[0011] By adopting the above technical solution, the internal structure can be kept safe during the operation of the device so that it is not disturbed by the outside.

[0012] Optionally, the outside of the shell is fixedly connected to a central axis, the outside of the central axis is rotatably connected to two clamping arms, adjacent sides of the two clamping arms are fixedly connected to fixed blocks, and adjacent sides of the two fixed blocks are fixedly connected to resistance plates.

[0013] By adopting the above technical solution, the movement of the device can be restricted by manpower.

[0014] Optionally, one of the clamping arms is rotatably connected to follower rod 1 on its outer right side, and the other clamping arm is rotatably connected to follower rod 2 on its outer right side, and follower rod 2 is rotatably connected to a V-block on its outer right side, and a handle is fixedly connected to the bottom of the V-block.

[0015] By adopting the above technical solution, the power of the user is transmitted to the braking mechanism through the connecting rod.

[0016] Optionally, the outer front side of the clamping arm is rotatably connected to a connecting block, and the adjacent sides of the two connecting blocks are fixedly connected to a second spring.

[0017] By adopting the above technical solution, the mechanism can be kept in the same state during use.

[0018] Optionally, adjacent sides of the two resistance plates are in contact with the exterior of the gear sleeve, and the inner wall of the clamping arm is in contact with the exterior of the limiting rod.

[0019] By adopting the above technical solution, the gear sleeve can be fixed to brake it.

[0020] Optionally, part of the outer portion of the brake pad contacts the outer right side of the armature plate, another part of the outer portion of the brake pad contacts the outer left side of the housing, and the outer portion of the brake pad contacts the outer portion of the brake plate.

[0021] By adopting the above technical solution, the motion state of the device is changed through electrical signals.

[0022] In summary, the present application includes at least one of the following beneficial technical effects:

[0023] 1 In the utility model, with the coordinated use of the armature plate, the brake pad, the spring, the connecting layer and other structures, the rigidity of the brake plate can be used to perform lateral reciprocating activities, and the shaft sleeve is tightly locked on the motor shaft center by the open locking method, which solves the problem of lateral rotation clearance after stopping;

[0024] 2. In the utility model, with the coordinated use of the resistance plate, follower rod 1, follower rod 2, V-shaped block and other structures, the device can be used in the process of use, by manually controlling the handle to make the two resistance plates brake the middle gear sleeve, thereby solving the problem that some devices cannot brake when the circuit fails. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A three-dimensional diagram of a brake for semiconductor production equipment proposed by the utility model;

[0026] Figure 2 This is a schematic diagram of the gear sleeve structure of a semiconductor production equipment brake proposed by the utility model;

[0027] Figure 3 This is a structural schematic diagram of a follower rod of a semiconductor production equipment brake proposed by the utility model;

[0028] Figure 4 The utility model is a cross-sectional view of the coil body shell structure of a semiconductor production equipment brake.

[0029] In the figure, 1. coil body shell; 2. rubber ring; 3. armature plate; 4. brake pad; 5. spring one; 6. connecting layer; 7. fixing rivet; 8. outer shell; 9. gear bushing; 10. brake plate; 11. driving shaft; 12. limiting ring; 13. limiting rod; 14. center axis; 15. clamping arm; 16. fixing block; 17. resistance plate; 18. follower rod one; 19. follower rod two; 20. V-block; 21. handle; 22. connecting block; 23. spring two. DETAILED DESCRIPTION

[0030] Reference Figure 1 , Figure 2 , Figure 4The utility model provides an embodiment: a semiconductor production equipment brake, including a coil body shell 1, the coil body shell 1 is the outer shell 8 of the entire brake, a rubber ring 2 is arranged inside the coil body shell 1 for generating electromagnetic, for protecting internal components, providing structural support and protecting internal mechanical components from the influence of the external environment, a connecting layer 6 is located on the right side of the outside of the coil body shell 1, and an armature plate 3 is slidably connected inside, connecting the coil body shell 1 and the armature plate 3, supporting the sliding movement of the armature plate 3, the armature plate 3 is connected to the coil body shell 1 through the connecting layer 6, a brake pad 4 is fixedly connected on the right side, participates in the transmission of braking force during braking, and works with the brake pad 4, the brake pad 4 is located on the right side of the outside of the armature plate 3, a brake plate 10 is arranged inside, generates friction, and works with the brake plate 10 to brake the movement of the armature plate 3, the brake plate 10 is located inside the brake pad 4, contacts with the brake pad 4, and provides friction The movement of the armature plate 3 is braked. The elastic component includes a spring 5, which is fixedly connected to the coil body shell 1 and the armature plate 3 to provide elastic support. During the braking process, the armature plate 3 and the brake plate 10 are separated. The outer right side of the gear sleeve 9 is fixedly connected to the outer right side of the brake plate 10. The drive shaft 11 is fixedly connected inside to connect the brake plate 10 and the drive shaft 11 to transmit the braking force. The protective component includes a fixed rivet 7 and an outer shell 8, which are connected to the coil body shell 1 and the connecting layer 6 to provide a protective function to protect the internal components and ensure the normal operation of the brake. The limit ring 12 is used to limit the movement of the gear sleeve 9 on the outside. The external rotation of the central shaft 14 is connected to the clamping arm 15 to provide the rotation center of the entire structure. The two clamping arms 15 are connected through the central shaft 14. A fixed block 16 is fixedly connected to the adjacent side to contact the outside of the limit rod 13 to support the movement of the clamping arm 15 and work in conjunction with the limit rod 13.

[0031] refer to Figure 1 and Figure 3 The V-shaped block 20 will move under the drive of the handle 21. During the movement, the follower rod 18 will move downward, and the follower rod 2 will move upward, thereby driving the upper and lower contact structures to move. The spring 23 between the two connecting blocks 22 will provide elastic force to restore the structure to its original position without external interference.

[0032] Compared with some existing technologies, the above content can utilize the rigidity of the brake plate 10 to perform lateral reciprocating movement, and the shaft sleeve is tightly locked on the motor shaft by an open locking method. The two resistance plates 17 are used to brake the middle gear shaft sleeve 9 by manually controlling the handle 21, which solves the problem of lateral rotation clearance after stopping and the inability to brake when the circuit fails.

[0033] The implementation principle of the embodiment of the present application is as follows: the brake pad is directly attached to the brake plate 10, and then the brake plate 10 is locked on the sleeve with a fixing screw, and the rigidity of the brake plate 10 is used to perform lateral reciprocating movement. The sleeve uses an open locking method to tightly lock the sleeve on the motor shaft center. At this time, the brake pad has been locked on the sleeve with a fixing screw, and there is no lateral rotation clearance. It can be accurately stopped at the required position, and there will be no lateral rotation clearance problem after stopping. The spring 15 will release the brake pad between the pads 4 when the device is not powered on so that it can rotate with the gear bearing, thereby not affecting the movement of the device. In the event of circuit failure, the handle 21 is pulled to press down, so that the V-block 20 is driven to move. During its movement, the follower rod 18 is pressed down and the follower rod 2 19 is raised. Because the follower rod 1 18 is connected to the structure at the top of the gear bearing and the follower rod 2 19 is connected to the structure at the bottom, the upper and lower structures will move together to fix the gear bearing.

[0034] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A semiconductor production equipment brake, comprising a coil body housing (1), characterized in that: The coil body shell (1) is fixedly connected with a rubber ring (2) inside, the outer right side of the coil body shell (1) is fixedly connected with a connecting layer (6), the inner part of the connecting layer (6) is slidably connected with an armature plate (3), the outer right side of the armature plate (3) is fixedly connected with a brake pad (4), the brake pad (4) is provided with a brake plate (10), the inner part of the coil body shell (1) is provided with an elastic component, the outer right side of the brake pad (10) is fixedly connected with a gear sleeve (9), the outer right side of the connecting layer (6) is provided with a protective component, the inner part of the gear sleeve (9) is fixedly connected with a drive shaft (11), the outer part of the protective component is fixedly connected with a limiting ring (12), and the outer right side of the protective component is fixedly connected with two limiting rods (13).

2. A semiconductor production equipment brake according to claim 1, characterized in that: The elastic component comprises a spring (5), wherein the spring (5) is arranged inside the coil body housing (1), one end of the spring (5) is fixedly connected to the left side of the outside of the armature plate (3), and the other end of the spring (5) is fixedly connected to the left side of the inner wall of the coil body housing (1).

3. The semiconductor production equipment brake according to claim 1, characterized in that: The protective component comprises a fixing rivet (7) and an outer shell (8), wherein the outer portion of the fixing rivet (7) is fixedly connected to the inside of the coil body shell (1) and the connecting layer (6), the outer left side of the outer shell (8) is fixedly connected to the outer right side of the connecting layer (6), and the inner wall of the outer shell (8) is fixedly connected to the outside of the limiting ring (12).

4. A semiconductor production equipment brake according to claim 3, characterized in that: The outer part of the housing (8) is fixedly connected to a central shaft (14), and the outer part of the central shaft (14) is rotatably connected to two clamping arms (15). The adjacent sides of the two clamping arms (15) are fixedly connected to a fixing block (16), and the adjacent sides of the two fixing blocks (16) are fixedly connected to a resistance plate (17).

5. A semiconductor production equipment brake according to claim 4, characterized in that: The right side of the outside of one of the clamping arms (15) is rotatably connected to a follower rod 1 (18), the right side of the outside of the other clamping arm (15) is rotatably connected to a follower rod 2 (19), the right side of the outside of the follower rod 2 (19) is rotatably connected to a V-shaped block (20), and the bottom of the V-shaped block (20) is fixedly connected to a handle (21).

6. A semiconductor production equipment brake according to claim 5, characterized in that: The outer front side of the clamping arm (15) is rotatably connected to a connecting block (22), and the adjacent sides of the two connecting blocks (22) are fixedly connected to a second spring (23).

7. The semiconductor production equipment brake according to claim 4, characterized in that: The adjacent sides of the two resistance plates (17) are in contact with the outside of the gear shaft sleeve (9), and the inner wall of the clamping arm (15) is in contact with the outside of the limiting rod (13).

8. The semiconductor production equipment brake according to claim 3, characterized in that: Part of the outer portion of the brake pad (4) contacts the outer right side of the armature plate (3), another part of the outer portion of the brake pad (4) contacts the outer left side of the housing (8), and the outer portion of the brake pad (4) contacts the outer portion of the brake plate (10).

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