Sealing track suitable for soft solder die bonder

Abstract

The utility model provides a sealing track suitable for a soft solder die bonder, relates to the technical field of semiconductor equipment processing auxiliary devices, and aims to solve the problem that in the production operation process of a conventional soft solder die bonder, a frame in a high-temperature track is influenced by track deformation, hydrogen-nitrogen mixed gas proportion, gas consumption, window size on a cover plate and the like, so that the frame is not easy to deform. The device comprises a frame, an H-shaped rail is fixedly connected to the frame, a heating rod is installed on the side wall of the H-shaped rail, cover plates are installed on the H-shaped rail, the cover plates are of a split type structural design, a tin drawing window, a die pressing window and a patch window are sequentially arranged on the second cover plate from left to right, and the tin drawing window, the die pressing window and the patch window are sequentially arranged on the second cover plate from left to right. The H rail is further provided with multiple sets of receding grooves, a blowing hole is further formed in the position, located on the H rail, of the right side of the heating rod, hydrogen and nitrogen mixed gas is input into the blowing hole, and the two sides of the H rail are designed to be heightened.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment processing auxiliary devices, in particular to a sealing track suitable for a soft solder crystal bonding machine. Background Art

[0002] A soft solder die bonder is a device used in semiconductor packaging, mainly used to fix chips or other electronic components on circuit boards or substrates.

[0003] During the production process of the existing soft solder crystal bonding machine, the frame is in the high-temperature track and is easily oxidized due to the influence of track deformation, hydrogen-nitrogen mixed gas ratio, gas consumption, window size on the cover plate, etc., which affects the quality of subsequent processing. Therefore, it is particularly important to design a sealed track suitable for soft solder crystal bonding machine to solve the above technical problems. Utility Model Content

[0004] The utility model aims to solve the problem that during the production process of the existing soft solder crystal bonding machine, the frame is in the high-temperature track and is easily oxidized quickly due to the influence of track deformation, hydrogen-nitrogen mixed gas ratio, gas consumption, window size on the cover plate, etc., which affects the quality of later processing, and proposes a sealing track suitable for the soft solder crystal bonding machine.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a sealed track suitable for a soft solder die bonding machine, comprising a frame, an H-rail fixedly connected to the frame, a heating rod installed on the side wall of the H-rail, a cover plate installed on the H-rail, the cover plate having a split structure design, a tin drawing window, a die window and a patch window are sequentially arranged on the second cover plate from left to right, a plurality of avoidance grooves are also arranged on the H-rail, a blowing hole is also installed on the right side of the heating rod on the H-rail, a hydrogen-nitrogen mixed gas is input into the blowing hole, and both sides of the H-rail are designed to be heightened.

[0006] Preferably, a cushion block is also installed on the H rail, and air guide grooves are provided at the bottom wall positions of the cushion block and the cover plate, and the air guide grooves are connected to the avoidance grooves.

[0007] Preferably, thermocouples are evenly distributed on the H rail on the right side of the blowing hole.

[0008] Preferably, the cushion blocks are distributed on the rail in multiple groups and sections, and an air storage groove is also provided on the cushion blocks. An overflow hole is provided on the cushion blocks, and the air storage groove is communicated with the air guide groove.

[0009] Preferably, the blowing hole is communicated with the interior of the H rail.

[0010] Compared with the prior art, the advantages and positive effects of the utility model are:

[0011] In the utility model, during use, an air guide groove is provided at the bottom of the multi-group segmented cover plate and an avoidance groove structure is provided on the H rail, and the hydrogen-nitrogen mixed gas is rushed in through the air blowing hole, and then enters the structure inside the H rail to complete the corresponding internal formation of air wall protection. Compared with the conventional situation where the frame is deformed due to high temperature and affects the processing quality, the technical solution adopted by the utility model makes the internal structure of the rail not easily oxidized, and an air guide groove is provided below the tin painting and die pressing window cover plate to avoid the mixed gas from rising vertically rapidly due to heat when the window is opened, forming a negative pressure area locally, drawing surrounding air into the rail to oxidize the frame, and the overall structure is compact and easy for staff to install and maintain, which solves the problem that in the production operation process of the existing soft solder solid crystal machine, the frame is in the high-temperature rail and is affected by the deformation of the rail, the ratio of hydrogen-nitrogen mixed gas, the gas consumption, the size of the window on the cover plate, etc., and is easily oxidized rapidly, thereby affecting the later processing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is an overall diagram of a sealing track of a soft solder die bonding machine according to the utility model;

[0013] Figure 2 It is a partial structural schematic diagram of a cover plate in a sealing track of a soft solder die bonding machine according to the utility model;

[0014] Legend: 1. Frame; 2. H-rail; 201. Avoidance groove; 202. Air guide groove; 203. Air storage groove; 204. Overflow hole; 3. Heating rod; 301. Blowing hole; 4. Pad; 5. Cover plate; 501. Tinning window; 502. Die window; 503. SMD window; 6. Thermocouple. DETAILED DESCRIPTION

[0015] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0016] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0017] The utility model provides a sealing track suitable for a soft solder solid crystal machine, comprising a frame 1, an H-rail 2 is fixedly connected to the frame 1, a heating rod 3 is installed on the side wall of the H-rail 2, a thermocouple 6 is evenly distributed on the right side of the blowing hole 301 on the H-rail 2, a cover plate 5 is installed on the H-rail 2, the cover plate 5 is designed in a split structure, and a tin drawing window 501, a die window 502 and a patch window 503 are sequentially arranged on the second cover plate 5 from left to right, a plurality of avoidance grooves 201 are also arranged on the H-rail 2, the right side of the heating rod 3 is located on the H-rail 2 A blowing hole 301 is also installed, and the blowing hole 301 is connected to the inside of the H rail 2. The blowing hole 301 inputs a hydrogen-nitrogen mixed gas. The two sides of the H rail 2 are designed to be elevated. A cushion block 4 is also installed on the H rail 2. The cushion block 4 and the bottom wall of the cover plate 5 are both provided with an air guide groove 202, and the air guide groove 202 is connected to the avoidance groove 201. The cushion block 4 is distributed on the rail in multiple groups and sections. An air storage groove 203 is also provided on the cushion block 4. An overflow hole 204 is provided on the cushion block 4, and the air storage groove 203 is connected to the air guide groove 202

[0018] When the sealed track suitable for the soft solder die bonding machine is actually used, the edge of the H track 2 structure is raised, and the heating rod 3 and the thermocouple 6 are installed along the side. After the heating rod 3 preheats the track, a hydrogen-nitrogen mixed gas is input to the blowing hole 301, and the mixed gas is filled into the gas storage tank 203 of the cushion block 4 from the air hole, and then the mixed gas is evenly filled into the track cavity from the overflow hole 204 of the cushion block 4 to form a protection on the surface of the frame 1, and the cushion block 4 and the cover plate 5 are grooved to set the corresponding gas guide groove 202 structure to guide the positive pressure mixed gas in the heating track along the gas guide groove 202 of the cover plate 5 and the gas guide groove 202 of the cushion block 4 to the H track 2 avoidance groove 201, and the positive pressure mixed gas is filled into it to form a wind wall to reduce as much as possible. Less air enters the track. By opening an air guide groove 202 at the bottom of the multi-group segmented cover plate 5 and setting a avoidance groove 201 structure on the H track 2, the hydrogen-nitrogen mixed gas is rushed in through the blowing hole 301, and then enters the structure inside the H track 2 to complete the corresponding internal formation of air wall protection. Compared with the conventional situation where the frame 1 is deformed due to high temperature and affects the processing quality, the technical solution adopted by the utility model makes the internal structure of the track less susceptible to oxidation. An air guide groove 202 is opened under the cover plate 5 of the tin painting and die pressing window 502 to avoid the mixed gas from rising vertically rapidly due to heat when the window is opened, forming a negative pressure area locally, drawing ambient air into the track to oxidize the frame 1, and the overall structure is compact and easy for staff to install and maintain.

[0019] Working principle: The edge of the H-rail structure is raised, and heating rods and thermocouples are installed along the side. After the track is preheated by the heating rods, a hydrogen-nitrogen mixed gas is input at the blowing hole position, and the mixed gas is filled into the gas storage tank of the pad from the air hole, and then the mixed gas is evenly filled into the inner cavity of the track from the overflow hole of the pad to form a protection on the surface of the frame. The pad and the cover are grooved to set up corresponding air guide groove structures to guide the positive pressure mixed gas in the heated track along the air guide groove of the cover and the air guide groove of the pad to the H-rail avoidance groove, and the positive pressure mixed gas is filled in to form a wind wall to minimize the air entering the track.

Claims

1. A sealed track suitable for a soft solder die bonding machine, comprising a frame (1), to which an H rail (2) is fixedly connected, characterized in that: A heating rod (3) is mounted on the side wall of the H rail (2). A cover plate (5) is mounted on the H rail (2). The cover plate (5) is of split structural design. The second cover plate (5) is sequentially provided with a tinning window (501), a die pressing window (502) and a patch window (503) from left to right. The H rail (2) is also provided with a plurality of avoidance grooves (201). A blowing hole (301) is also mounted on the right side of the heating rod (3) and located on the H rail (2). A hydrogen-nitrogen mixed gas is input into the blowing hole (301). Both sides of the H rail (2) are designed to be elevated.

2. A sealing track suitable for a soft solder die bonding machine according to claim 1, characterized in that: A cushion block (4) is also installed on the H rail (2), and an air guide groove (202) is provided at the bottom wall of the cushion block (4) and the cover plate (5), and the air guide groove (202) is connected to the avoidance groove (201).

3. A sealing track suitable for a soft solder die bonding machine according to claim 1, characterized in that: Thermocouples (6) are evenly distributed on the H rail (2) on the right side of the blowing hole (301).

4. A sealing track suitable for a soft solder die bonding machine according to claim 2, characterized in that: The cushion blocks (4) are distributed on the rail in multiple groups and sections, and an air storage groove (203) is also provided on the cushion blocks (4). An air overflow hole (204) is provided on the cushion blocks (4), and the air storage groove (203) is connected to the air guide groove (202).

5. The sealing track suitable for a soft solder die bonding machine according to claim 1, characterized in that: The air blowing hole (301) is communicated with the interior of the H rail (2).

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