Single crystal furnace bottom heat preservation structure not prone to being damaged during disassembly and assembly

Abstract

The utility model discloses a single crystal furnace bottom heat preservation structure which is not easy to damage during disassembly and assembly, and comprises a furnace bottom heat preservation structure, an exhaust hole formed in the middle of the furnace bottom heat preservation structure and an electrode hole formed in the periphery of the exhaust hole, and a clamping groove device is arranged at the bottom of the furnace bottom heat preservation structure. The top of the clamping groove device is provided with a clamping groove used for a furnace bottom heat preservation structure to be inserted, and the side face of the clamping groove device is provided with a through groove communicated with the clamping groove. According to the single crystal furnace bottom heat preservation structure not prone to being damaged during disassembly and assembly, the furnace bottom heat preservation structure is conveniently inserted and embedded through the arranged clamping groove device and the arranged clamping groove, so that the furnace bottom heat preservation structure is protected and positioned, the furnace bottom heat preservation structure can be conveniently disassembled through cooperation with the arrangement of the through groove, and the furnace bottom heat preservation structure can be prevented from deviating; and the damage to the furnace bottom heat preservation structure caused by the tool during disassembly can be avoided.

Description

Technical Field

[0001] The utility model relates to the field of single crystal furnace bottom insulation structures, in particular to a single crystal furnace bottom insulation structure which is not easily damaged during disassembly and assembly. Background Art

[0002] A single crystal furnace is an industrial device that uses graphite heaters to melt polycrystalline materials such as polysilicon in an inert gas environment (such as nitrogen or helium) and grow dislocation-free single crystals through the Czochralski method. During the heating process, the furnace must maintain a high temperature to ensure proper growth of the single crystals. The insulation performance of the furnace bottom, as part of the furnace body, directly impacts the thermal efficiency of the entire furnace. By implementing an insulation structure, heat loss from the furnace bottom to the outside world can be effectively reduced, improving the furnace's insulation performance, thereby saving energy and reducing production costs.

[0003] At present, with the increase in market demand, the size of single crystal furnaces and large-scale thermal fields, the size of furnace bottom insulation has increased accordingly, and the power of melting and smelting materials has also increased accordingly, resulting in inconvenient disassembly and assembly of furnace bottom insulation, serious corrosion and powdering of electrode holes. The current furnace bottom insulation structure does not have positioning and protection structures, and is not only prone to displacement, but also requires special tooling for dismantling, which can easily cause damage and stratification on the side of the furnace bottom insulation structure, making it inconvenient to use.

[0004] Therefore, it is necessary to propose a single crystal furnace bottom insulation structure that is not easily damaged during disassembly and assembly to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide a single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly, which can effectively solve the problems in the background technology.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly comprises a furnace bottom insulation structure, an exhaust hole arranged in the middle of the furnace bottom insulation structure, and an electrode hole arranged around the exhaust hole. A slot device is provided at the bottom of the furnace bottom insulation structure, a slot for inserting the furnace bottom insulation structure is provided at the top of the slot device, a through slot connected to the slot is provided on the side of the slot device, a second positioning circular tube corresponding to the exhaust hole is provided at the bottom inner side of the slot, a first positioning circular tube corresponding to the electrode hole is provided around the second positioning circular tube, and the second positioning circular tube is used to be plugged into the bottom of the exhaust hole, and the first positioning circular tube is used to be plugged into the bottom of the electrode hole.

[0008] Preferably, the through slots are rectangular and are evenly distributed on the sides of the slot device.

[0009] Preferably, the inner diameter of the slot is larger than the diameter of the furnace bottom insulation structure.

[0010] Preferably, the upper end of the slot is provided with a chamfer;

[0011] The outer edges of the upper ends of the first positioning circular tube and the second positioning circular tube are provided with chamfers.

[0012] Preferably, the electrode holes and the exhaust holes are in the form of through-hole stretching.

[0013] Preferably, positioning seats are symmetrically provided on the side walls at both ends of the inner cavity of the slot, and the positioning seats are "L"-shaped, and a slope is provided on the upper end of the positioning seat facing the inner side of the slot, and a receiving groove is provided on the top of the lower end of the positioning seat, and the receiving groove is rotatably connected to a roller for supporting the furnace bottom insulation structure, and the upper end of the roller protrudes from the positioning seat, and the bottom periphery of the furnace bottom insulation structure is provided with a positioning notch corresponding to the positioning seat one by one, and the positioning notch is used for plugging the lower end of the positioning seat, and is configured so that when the lower end of the positioning seat is plugged into the positioning notch, the first positioning circular tube and the second positioning circular tube just coincide with and plug into the electrode hole and the exhaust hole.

[0014] Preferably, bearing holes are symmetrically provided on both sides of the inner cavity of the accommodating groove, bearings are fixed to the bearing holes, and a rotating shaft is provided at the end of the roller, and the rotating shaft is fixed to the inner wall of the bearing;

[0015] When the bottom of the furnace bottom insulation structure contacts the top of the roller, the upper ends of the first positioning circular tube and the second positioning circular tube are lower than the bottom of the furnace bottom insulation structure.

[0016] Compared with the prior art, the present invention provides a single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly, and has the following beneficial effects:

[0017] 1. The single crystal furnace bottom insulation structure is not easily damaged during assembly and disassembly. The slot device and the slot are provided to facilitate the insertion and embedding of the furnace bottom insulation structure, thereby protecting and positioning the furnace bottom insulation structure. The provision of the through slot facilitates the removal of the furnace bottom insulation structure, thereby avoiding the deviation of the furnace bottom insulation structure and the damage of the furnace bottom insulation structure caused by the tooling during disassembly. The structure can effectively isolate heat and reduce the pulverization phenomenon at the electrode holes at the furnace bottom.

[0018] 2. The single crystal furnace bottom insulation structure is not easily damaged during assembly and disassembly. The mutual cooperation of the positioning seat, positioning notch and roller can facilitate the insertion of the furnace bottom insulation structure and the card slot. It is only necessary to place the furnace bottom insulation structure on the lower end of multiple positioning seats, and then rotate the furnace bottom insulation structure. When the lower end of the positioning seat enters the positioning notch, it becomes the card slot, and the first positioning round tube enters the electrode hole and the exhaust hole, which saves time and effort and increases convenience. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of the utility model;

[0020] Figure 2 This is a structural diagram of the utility model in which the furnace bottom insulation structure and the slot device are separated;

[0021] Figure 3 This utility model Figure 2 A structural diagram from another perspective based on the above;

[0022] Figure 4 This is a structural diagram of the card slot device of the utility model;

[0023] Figure 5 It is a structural schematic diagram of the utility model in a state where the roller and the positioning seat are separated.

[0024] In the figure: 1. Furnace bottom insulation structure; 2. Slot device; 3. Electrode hole; 4. Exhaust hole; 5. Through slot; 6. Slot; 7. First positioning circular tube; 8. Second positioning circular tube; 9. Positioning notch; 10. Positioning seat; 11. Roller; 12. Rotating shaft; 13. Receiving groove; 14. Bearing hole; 15. Slope. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0026] like Figure 1-5 As shown, a single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly comprises a furnace bottom insulation structure 1, an exhaust hole 4 arranged in the middle of the furnace bottom insulation structure 1, and an electrode hole 3 arranged on the periphery of the exhaust hole 4. The electrode hole 3 and the exhaust hole 4 are through-hole stretched shapes. A card slot device 2 is provided at the bottom of the furnace bottom insulation structure 1. A card slot 6 for inserting the furnace bottom insulation structure 1 is provided at the top of the card slot device 2. The inner diameter of the card slot 6 is larger than the diameter of the furnace bottom insulation structure 1. The upper end of the card slot 6 is provided with a chamfer. The card slot device 2 is provided with a through groove 5 connected with the card slot 6. The through groove 5 is rectangular and evenly distributed on the side of the card slot device 2. A second positioning circular tube 8 corresponding to the exhaust hole 4 is provided at the bottom of the inner side of the card slot 6. A first positioning circular tube 7 corresponding to the electrode hole 3 is provided on the periphery of the second positioning circular tube 8. The second positioning circular tube 8 is used to be plugged into the bottom of the exhaust hole 4, and the first positioning circular tube 7 is used to be plugged into the bottom of the electrode hole 3. The outer edges of the upper ends of the first positioning circular tube 7 and the second positioning circular tube 8 are provided with chamfers.

[0027] Furthermore, in order to facilitate the installation of the furnace bottom insulation structure 1, positioning seats 10 are symmetrically provided on the side walls at both ends of the inner cavity of the slot 6, and the positioning seat 10 is "L"-shaped, and a slope 15 is provided on the end of the upper end of the positioning seat 10 facing the inner side of the slot 6, and a receiving groove 13 is provided on the top of the lower end of the positioning seat 10. The receiving groove 13 is rotatably connected to a roller 11 for supporting the furnace bottom insulation structure 1, and the upper end of the roller 11 protrudes from the positioning seat 10, and when the bottom of the furnace bottom insulation structure 1 contacts the top of the roller 11, the first positioning tube 7 and the second positioning tube 8 are in contact. The upper end is lower than the bottom of the furnace bottom insulation structure 1. Specifically, bearing holes 14 are symmetrically provided on both sides of the inner cavity of the accommodating groove 13, and bearings are fixed to the bearing holes 14. A rotating shaft 12 is provided at the end of the roller 11, and the rotating shaft 12 is fixed to the inner wall of the bearing. The bottom periphery of the furnace bottom insulation structure 1 is provided with a positioning notch 9 corresponding to the positioning seat 10, and the positioning notch 9 is used for plugging the lower end of the positioning seat 10, and is configured so that when the lower end of the positioning seat 10 is plugged into the positioning notch 9, the first positioning circular tube 7 and the second positioning circular tube 8 just coincide with and are plugged into the electrode hole 3 and the exhaust hole 4.

[0028] It should be noted that the present invention is a single crystal furnace bottom insulation structure that is not easily damaged by assembly and disassembly. When in use, the furnace bottom insulation structure 1 is placed on a plurality of positioning seats 10 on the card slot device 2. Under the action of the slope 15, the furnace bottom insulation structure 1 falls onto the roller 11 at the lower end of the positioning seat 10, and then the furnace bottom insulation structure 1 is rotated for adjustment. When the plurality of positioning notches 9 respectively coincide with the lower ends of the plurality of positioning seats 10, the first positioning circular tube 7 and the second positioning circular tube 8 just coincide with the electrode hole 3 and the exhaust hole 4, so that the furnace bottom insulation structure 1 falls, and the lower end of the positioning seat 10 is plugged into the positioning notch 9, and the first positioning circular tube 7 and the second positioning circular tube 8 are just coincident with the electrode hole 3 and the exhaust hole 4. The two positioning circular tubes 8 are respectively plugged into the electrode hole 3 and the exhaust hole 4, so as to realize the stable positioning of the furnace bottom insulation structure 1, thereby protecting and positioning the furnace bottom insulation structure 1. The setting of the through slot 5 can facilitate the removal of the furnace bottom insulation structure 1. It is only necessary to clamp the special tooling on the outside of the slot device 2 and cooperate with the through slot 5 to remove the furnace bottom insulation structure 1 together with the slot device 2. The disassembly tooling does not directly contact the furnace bottom insulation structure 1, which can avoid the deviation of the furnace bottom insulation structure 1 and the damage of the furnace bottom insulation structure 1 caused by the tooling during disassembly. It can effectively isolate heat and reduce the powdering phenomenon at the furnace bottom electrode hole 3.

[0029] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly, comprising a furnace bottom insulation structure (1), an exhaust hole (4) provided in the middle of the furnace bottom insulation structure (1), and an electrode hole (3) provided on the periphery of the exhaust hole (4), characterized in that: The bottom of the furnace bottom insulation structure (1) is provided with a slot device (2), the top of the slot device (2) is provided with a slot (6) for inserting the furnace bottom insulation structure (1), the side of the slot device (2) is provided with a through slot (5) communicating with the slot (6), the bottom of the inner side of the slot (6) is provided with a second positioning circular tube (8) corresponding to the exhaust hole (4), the outer periphery of the second positioning circular tube (8) is provided with a first positioning circular tube (7) corresponding to the electrode hole (3), and the second positioning circular tube (8) is used to be plugged into the bottom of the exhaust hole (4), and the first positioning circular tube (7) is used to be plugged into the bottom of the electrode hole (3).

2. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 1, characterized in that: The through slots (5) are rectangular, and the through slots (5) are evenly distributed on the side surfaces of the card slot device (2).

3. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 1, characterized in that: The inner diameter of the clamping groove (6) is larger than the diameter of the furnace bottom insulation structure (1).

4. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 1, characterized in that: The upper end of the slot (6) is provided with a chamfer; The outer edges of the upper ends of the first positioning circular tube (7) and the second positioning circular tube (8) are provided with chamfers.

5. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 1, characterized in that: The electrode holes (3) and the exhaust holes (4) are in the form of through-hole stretching.

6. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 1, characterized in that: Positioning seats (10) are symmetrically provided on the side walls at both ends of the inner cavity of the card slot (6), and the positioning seat (10) is in an "L" shape. A slope (15) is provided on one end of the upper end of the positioning seat (10) facing the inner side of the card slot (6). A receiving groove (13) is provided on the top of the lower end of the positioning seat (10). The receiving groove (13) is rotatably connected to a roller (11) for supporting the furnace bottom insulation structure (1), and the upper end of the roller (11) protrudes from the positioning seat (10). Positioning notches (9) corresponding to the positioning seats (10) are provided on the outer periphery of the bottom of the furnace bottom insulation structure (1), and the positioning notches (9) are used for plugging the lower end of the positioning seat (10). The first positioning circular tube (7) and the second positioning circular tube (8) are just matched with and plugged into the electrode hole (3) and the exhaust hole (4) when the lower end of the positioning seat (10) is plugged into the positioning notch (9).

7. The single crystal furnace bottom insulation structure that is not easily damaged during assembly and disassembly according to claim 6, characterized in that: Bearing holes (14) are symmetrically provided on both sides of the inner cavity of the accommodating groove (13), and bearings are fixed to the bearing holes (14). A rotating shaft (12) is provided at the end of the roller (11), and the rotating shaft (12) is fixed to the inner wall of the bearing; When the bottom of the furnace bottom insulation structure (1) contacts the top of the roller (11), the upper ends of the first positioning circular tube (7) and the second positioning circular tube (8) are lower than the bottom of the furnace bottom insulation structure (1).

Images