Quartz online heater convenient to maintain

Abstract

The utility model discloses a quartz on-line heater convenient to maintain, which comprises a heating shell, a quartz heater arranged in the heating shell and heating rod fixing seats arranged on the left side and the right side of the quartz heater, the lower ends of the heating rod fixing seats are fixedly arranged at the bottom of the heating shell, and the tops of heating rods are arranged on the inner upper surface of the heating shell. Two ends of the quartz heater are respectively connected with the heating rod fixing seats and are not in contact with the upper and lower surfaces of the heating shell through the support of the heating rod fixing seats; the heating rod fixing seat on one side is provided with three circular holes for the heating rods to enter and exit, and the sides, inserted into the quartz heater, of the heating rods are closed. The detachable heating rod has the advantages that the detachable heating rod can be well detached and installed on the heating rod, only the damaged heating rod needs to be replaced during replacement, other heating rods are kept immovable, detachment is convenient, the using effect is good, and the maintenance time of equipment maintenance personnel is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor silicon wafer cleaning, especially a quartz on -line heater convenient to maintain. BACKGROUND

[0002] The on -line quartz heater, including PP shell, quartz heating tube and quartz heating rod, the quartz heating tube is installed in the PP shell, the quartz heating tube is equipped with the quartz heating rod, the lower extreme of quartz heating tube is equipped with the liquid medicine import, the upper extreme of quartz heating tube is equipped with the liquid medicine export, the quartz heating rod is halogen lamp tube, the quartz heating tube outside is covered with aluminium foil reflector, the reflector outside is covered with heat -proof protective layer, the heat -proof protective layer is composed of heat -proof ceramic cotton and heat -proof glass fiber cloth;Quartz heating rod is unilateral, and one quartz heating tube contains 3 quartz heating rods;

[0003] In the maintenance process of quartz heating rod, the occasion of needing to disassemble 1 heating rod is encountered, the whole heater outlet end needs to be disassembled, and the heat -resistant cable of the single heating rod needing to be replaced needs to be taken out from the terminal, and the cable needs to be taken out through the joint such as cable fastening head, in short, disassembling a single heater is time -consuming and labor -intensive;

[0004] In view of the above situation, it is necessary to improve the structure of the existing quartz heater, so that it can adapt to the needs of disassembling and assembling the heating rod in the quartz heater. INVENTION CONTENTS

[0005] The technical scheme of the utility model for realizing the above-mentioned purpose is a quartz on -line heater convenient to maintain, which comprises a heating shell, a quartz heater arranged in the heating shell, heating rod fixing seats arranged on the left and right sides of the quartz heater, the lower end of the heating rod fixing seat is fixedly installed at the bottom of the heating shell, the top of the heating rod is installed on the upper surface in the heating shell, and the two ends of the quartz heater are connected with the heating rod fixing seat and are not in contact with the upper and lower surfaces of the heating shell through the support of the heating rod fixing seat;Three circular holes are arranged on one side of the heating rod fixing seat for the entry and exit of the heating rod, and the heating rod is inserted into one side of the quartz heater.

[0006] Further supplement to the technical scheme, the lower end of the heating shell is provided with mounting seats on the front and rear sides, the upper end of the mounting seat is fixedly connected with the lower surface of the heating shell, a connecting plate is arranged between the mounting seats on the two sides, and the connecting plate is fixedly connected with the mounting seats on the two sides.

[0007] Further supplement to the technical solution, the heating shell comprises a top plate, a bottom plate, a left side plate, a right side plate, a front side plate and a rear side plate, the top plate is connected with the left side plate, the right side plate, the front side plate and the rear side plate through screws, the bottom plate is connected with the left side plate, the right side plate, the front side plate and the rear side plate through screws, the right side plate is composed of two separated cover plates, and mounting holes are arranged on positions corresponding to the circular holes of the right side plate for mounting the heating rod heat-resistant cable.

[0008] Further supplement to the technical solution, the right side heating rod fixing seat is composed of two separated mounting plates.

[0009] Further supplement to the technical solution, a fixing plate is arranged on the right side heating rod fixing seat and located at positions corresponding to the three circular holes.

[0010] Further supplement to the technical solution, threaded holes are arranged on the fixing plate and located at positions corresponding to the three circular holes, and screws are arranged in the threaded holes and abut against the heating rod, and the heating rod heat-resistant cable abuts against the fixing plate.

[0011] Further supplement to the technical solution, long strip holes are arranged on the fixing plate and used for fixing the heating rod fixing seat.

[0012] The beneficial effect is that the heating rod can be well disassembled and assembled, and when the heating rod is replaced, only the damaged heating rod can be replaced, other heating rods are kept unchanged, the disassembly is convenient, the use effect is good, and the maintenance time of equipment maintenance personnel is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is a first angle overall structure schematic view of the utility model;

[0014] Figure 2 is a structure schematic view of the right side plate of the utility model without being installed;

[0015] Figure 3 is a structure schematic view of the front side plate of the utility model without being installed;

[0016] In the figure, 1 is a heating shell, 11 is a top plate, 12 is a bottom plate, 13 is a left side plate, 14 is a right side plate, 15 is a front side plate, 16 is a rear side plate, 2 is a quartz heater, 3 is a heating rod fixing seat, 4 is a circular hole, 5 is a mounting seat, 6 is a connecting plate, 7 is a mounting hole, 8 is a threaded hole, 9 is a long strip hole, and 10 is a fixing plate. DETAILED DESCRIPTION

[0017] In order to make the technical solution more clear for those skilled in the art, the technical solution of the utility model will be described in detail below with reference to the accompanying drawings. Figure 1 -3:

[0018] The utility model provides a quartz on -line heater convenient to maintain, including heating shell 1, the quartz heater 2 of setting in heating shell 1, the heating rod fixed seat 3 of setting in the left and right sides of quartz heater 2, the lower end of heating rod fixed seat 3 is fixedly installed in the bottom of heating shell 1, the top of heating rod is installed in the upper surface in heating shell 1, the both ends of quartz heater 2 are connected with heating rod fixed seat 3 respectively and are supported with the upper and lower surfaces of heating shell 1 not contact through heating rod fixed seat 3, the heating rod fixed seat 3 of one side is equipped with 3 round holes 4 for the access of heating rod, and the side of the quartz heater 2 is closed for the insertion of heating rod, wherein, heating rod fixed seat 3 can support quartz heater 2, and the round hole 4 arranged on it facilitates the installation and removal of heating rod.

[0019] Wherein, the lower end of heating shell 1 is provided with mounting seat 5 on the front and rear sides, the upper end of mounting seat 5 is fixedly connected with the lower surface of heating shell 1, connecting plate 6 is arranged between the mounting seats 5 on both sides, the connecting plate 6 is fixedly connected with the mounting seats 5 on both sides, which can support the heating shell 1 and facilitate installation.

[0020] The structure of the heating shell 1 will be described in detail below. The heating shell 1 includes a top plate 11, a bottom plate 12, a left side plate 13, a right side plate 14, a front side plate 15, and a rear side plate 16. The top plate 11 is connected to the left side plate 13, the right side plate 14, the front side plate 15, and the rear side plate 16 through screws. The bottom plate 12 is connected to the left side plate 13, the right side plate 14, the front side plate 15, and the rear side plate 16 through screws. The right side plate 14 is composed of two separate cover plates, and mounting holes 7 for mounting heating rod heat-resistant cables are provided on the right side plate 14 corresponding to the positions of the round holes 4. The right side plate 14 is designed in a separate manner to facilitate subsequent disassembly.

[0021] To facilitate disassembly, the right side heating rod fixed seat 3 is composed of two separate mounting plates.

[0022] A fixing plate 10 is provided on the right side heating rod fixed seat 3 at the positions of the three round holes 4. The fixing plate 10 is fixedly installed on the fixed seat and can limit the position of the heating rod, and the heating rod heat-resistant cable can pass out of the fixing plate 10. Threaded holes 8 are provided on the fixing plate 10 corresponding to the positions of the three round holes 4, and screws are installed in the threaded holes 8 to press against the heating rod. The heating rod heat-resistant cable rests on the fixing plate 10. Longitudinal holes 9 are provided on the fixing plate 10 for fixing with the heating rod fixed seat 3.

[0023] The above technical solution only embodies the preferred technical solution of the utility model. Any changes made by the skilled in the art to certain parts of the utility model embody the principles of the utility model and are within the scope of protection of the utility model.

Claims

1. A quartz online heater that is easy to maintain, characterized in that: The invention comprises a heating shell (1), a quartz heater (2) arranged in the heating shell (1), and heating rod fixing seats (3) arranged on the left and right sides of the quartz heater (2), wherein the lower end of the heating rod fixing seat (3) is fixedly mounted on the bottom of the heating shell (1), and the top of the heating rod fixing seat (3) is mounted on the inner upper surface of the heating shell (1); the two ends of the quartz heater (2) are respectively connected to the heating rod fixing seat (3) and are supported by the heating rod fixing seat (3) so as not to contact the upper and lower surfaces of the heating shell (1); three circular holes (4) are provided on one side of the heating rod fixing seat (3) for the heating rod to enter and exit, and the side where the heating rod is inserted into the quartz heater (2) is closed; A fixing plate (10) is provided on the right heating rod fixing seat (3) at the positions of the three circular holes (4), and the fixing plate (10) is fixedly mounted on the fixing seat; The fixing plate (10) is provided with threaded holes (8) at positions corresponding to the three circular holes (4), and screws are installed in the threaded holes to support the heating rod, and the heat-resistant cable of the heating rod is supported on the fixing plate (10); The fixing plate (10) is provided with an elongated hole (9) for fixing to the heating rod fixing seat (3).

2. The quartz online heater easy to maintain according to claim 1, characterized in that: Mounting seats (5) are provided on both front and rear sides of the lower end of the heating shell (1); the upper ends of the mounting seats (5) are fixedly connected to the lower surface of the heating shell (1); a connecting plate (6) is provided between the mounting seats (5) on both sides; the connecting plate (6) is fixedly connected to the mounting seats (5) on both sides.

3. The quartz online heater easy to maintain according to claim 2, characterized in that: The heating shell (1) comprises a top plate (11), a bottom plate (12), a left side plate (13), a right side plate (14), a front side plate (15), and a rear side plate (16); the top plate (11) is connected to the left side plate (13), the right side plate (14), the front side plate (15), and the rear side plate (16) by screws; the bottom plate (12) is connected to the left side plate (13), the right side plate (14), the front side plate (15), and the rear side plate (16) by screws; the right side plate (14) is composed of two separate cover plates and a mounting hole (7) is also provided at a position corresponding to the circular hole (4) on the right side plate for mounting a heating rod heat-resistant cable.

4. The quartz online heater easy to maintain according to claim 3, characterized in that: The heating rod fixing seat (3) on the right side is composed of two separate mounting plates.

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