Multi-layer cold trap device

Abstract

The utility model provides a multi-layer cold trap device. The multi-layer cold trap device comprises a first shell, a second shell, a third shell, an air inlet pipe and an air outlet pipe, wherein the second shell is arranged in the first shell, and a medium space is formed between the first shell and the second shell. A medium cavity is formed in the third shell, the third shell is arranged in the second shell, and a flowing space is formed between the second shell and the third shell. The air inlet pipe and the air outlet pipe are respectively communicated with the flowing space, so that extracted air can sequentially flow along the air inlet pipe, the flowing space and the air outlet pipe. Low-temperature media are placed in the medium space and the medium cavity at the same time, cold faces are formed on the inner wall of the second shell and the outer wall of the third shell, namely, double cold faces are formed in the flowing space, the area of the cold faces in the flowing space is enlarged, and the contact area of the cold faces and gas flowing through the flowing space is enlarged. Furthermore, gas molecules flowing through the flowing space are captured, the adsorption capacity of the cold trap is improved, and the vacuumizing efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to low temperature insulation equipment manufacturing technical field, especially relate to a multilayer cold trap device. BACKGROUND

[0002] In the low temperature insulation container manufacturing process, when the container is carried out vacuumizing operation, the cold trap can block the oil vapor of the oil pump such as diffusion pump into the vacuum system. Meanwhile, by the characteristics that the gas molecules move from high temperature area to low temperature area, the cold trap can form low temperature cold face and condense and capture gas molecules, thereby improving the vacuumizing effect and improving the vacuumizing efficiency.

[0003] However, in the existing vacuumizing system, the commonly used cold trap includes the inner container and the ventilation channel arranged on the outer wall of the inner container, so that the ventilation channel and the inner container are greatly affected by the ambient temperature, thereby reducing the adsorption capacity of the cold trap and increasing the difficulty of vacuumizing. UTILITY MODEL CONTENT

[0004] The utility model discloses a multilayer cold trap device which can reduce the influence of ambient temperature on the adsorption capacity of the cold trap and improve the vacuumizing efficiency.

[0005] To solve the above technical problems, the utility model adopts the following technical scheme:

[0006] According to one aspect of the utility model, the utility model provides a multilayer cold trap device which is applied to a vacuumizing system, and the multilayer cold trap device comprises a first shell, a second shell arranged in the first shell, a medium space formed between the inner wall of the first shell and the outer wall of the second shell, a third shell arranged in the second shell, a medium cavity formed in the third shell, a flow space formed between the inner wall of the second shell and the outer wall of the third shell, an air inlet pipe with one end communicated with the flow space and the other end stretched out of the first shell for connecting a container to be vacuumized so that the gas flows into the flow space along the air inlet pipe, and an air outlet pipe with one end communicated with the flow space and the other end stretched out of the first shell for connecting a vacuumizing component so that the gas in the flow space flows out of the air outlet pipe, wherein the medium space and the medium cavity are simultaneously placed with low temperature medium to form cold face on the inner wall of the second shell and the outer wall of the third shell and condense the gas molecules flowing through the flow space.

[0007] In an embodiment of the present application, the multilayer cold trap device further comprises an outer shell; the outer shell is arranged outside the first shell, and an inner wall of the outer shell and an outer wall of the first shell form an adiabatic space for isolating heat transfer between the outer shell and the first shell; the gas inlet pipe and the gas outlet pipe extend out of the outer shell at ends away from the flow space.

[0008] In an embodiment of the present application, the adiabatic space is in communication with the flow space, so that gas in the adiabatic space can be discharged along the flow space.

[0009] In an embodiment of the present application, a through hole is formed in the gas outlet pipe; the through hole is located between the outer shell and the first shell, so that the gas outlet pipe can communicate with the adiabatic space, and when gas flows in the gas outlet pipe, gas in the adiabatic space can be discharged from the adiabatic space along the through hole.

[0010] In an embodiment of the present application, a plurality of through holes are arranged, and the through holes are distributed in a circumferential direction of the gas outlet pipe.

[0011] In an embodiment of the present application, the multilayer cold trap device further comprises a filter screen; the filter screen is connected to the gas outlet pipe and covers the through hole.

[0012] In an embodiment of the present application, the multilayer cold trap device further comprises a branch pipe; the branch pipe is arranged between the second shell and the third shell, so as to communicate the medium space and the medium cavity and flow low-temperature medium.

[0013] In an embodiment of the present application, a plurality of branch pipes are arranged, and the branch pipes are arranged at two ends of the third shell in an axial direction.

[0014] In an embodiment of the present application, the third shell is provided with a flow guide fin; the flow guide fin extends away from the third shell from an outer wall of the third shell; and the flow guide fin is arranged in a spaced manner with an inner wall of the second shell.

[0015] In an embodiment of the present application, the multilayer cold trap device further comprises an adiabatic member; the adiabatic member is wrapped on an outer wall of the first shell.

[0016] From the above technical solution, the present application has at least the following advantages and positive effects:

[0017] The utility model discloses a multilayer cold trap device, which comprises a first shell, a second shell, a third shell, an air inlet pipe and an air outlet pipe. The second shell is arranged inside the first shell, and a medium space is formed between the first shell and the second shell. The third shell is arranged in the second shell, and a flow space is formed between the second shell and the third shell. The air inlet pipe and the air outlet pipe are connected to the flow space, so that the extracted gas can flow through the air inlet pipe, the flow space and the air outlet pipe in sequence. Meanwhile, the medium space and the medium cavity contain low-temperature medium, so that a cold surface is formed on the inner wall of the second shell and the outer wall of the third shell, i.e., a double cold surface is formed in the flow space. The area of the cold surface in the flow space is enlarged, thereby increasing the contact area between the cold surface and the gas flowing through the flow space, improving the condensation and capture capacity of the gas molecules flowing through the flow space, and improving the adsorption capacity and vacuum extraction efficiency of the cold trap.

[0018] Meanwhile, the medium space contains low-temperature medium, which can prevent external heat transfer, thereby ensuring the adsorption effect of the two cold surfaces in the flow space and avoiding the influence of the external environment temperature on the adsorption capacity of the cold trap. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a schematic view of the multilayer cold trap device of the utility model embodiment.

[0020] Figure 2 is Figure 1 is another angle schematic view of the multilayer cold trap device.

[0021] The reference signs are explained as follows:

[0022] 1 - air inlet pipe; 2 - air outlet pipe; 10 - first shell; 11 - medium space; 12 - heat insulating part; 20 - second shell; 21 - flow space; 30 - third shell; 31 - medium cavity; 32 - branch pipe; 33 - flow guide fin; 34 - filling pipe; 35 - discharge pipe; 40 - outer shell; 41 - heat insulating space; 42 - air extraction hole. DETAILED DESCRIPTION

[0023] The typical embodiments embodying the features and advantages of the utility model will be described in detail in the following description. It should be understood that the utility model can have various changes on different embodiments, which do not deviate from the scope of the utility model, and the description and drawings in essence are used for illustration, not for limiting the utility model.

[0024] In the description of the utility model, it is understood that in the embodiment shown in the drawings, the indication of direction or position relation (such as up, down, left, right, front and back etc.) is only for the convenience of describing the utility model and simplifying the description, and is not to indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation. When these elements are in the position shown in the drawings, these descriptions are appropriate. If the position of these elements changes, the indication of direction also changes accordingly.

[0025] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0026] In the low-temperature adiabatic container manufacturing process, when the container is subjected to vacuumizing operation, the cold trap can block the oil vapor of the oil pump such as diffusion pump into the vacuum system. At the same time, by using the characteristics that gas molecules move from high temperature area to low temperature area, the cold trap can form a low-temperature cold surface and condense and capture gas molecules, thereby improving the vacuumizing effect and improving the vacuumizing efficiency.

[0027] However, in the existing vacuumizing system, the commonly used cold trap includes an inner container and a ventilation channel arranged on the outer wall of the inner container, so that the ventilation channel and the inner container are greatly affected by the ambient temperature, thereby reducing the adsorption capacity of the cold trap and increasing the difficulty of vacuumizing. Therefore, a multi-layer cold trap device is proposed to solve the above problems.

[0028] The scheme is further illustrated by the following embodiments:

[0029] Figure 1 It is a schematic view of the multi-layer cold trap device of the utility model embodiment. Figure 2 It is Figure 1 Another angle schematic view of the multi-layer cold trap device.

[0030] Please refer to Figure 1 and Figure 2 The multi-layer cold trap device of the embodiment can be applied to the vacuumizing system to improve the efficiency of vacuumizing.

[0031] Specifically, the multi-layer cold trap device can include a first shell 10, a second shell 20, a third shell 30, an inlet pipe 1 and an outlet pipe 2. The second shell 20 is arranged inside the first shell 10, and a medium space 11 is formed between the inner wall of the first shell 10 and the outer wall of the second shell 20. The third shell 30 is arranged inside the second shell 20, and a flow space 21 is formed between the inner wall of the second shell 20 and the outer wall of the third shell 30.

[0032] Meanwhile, one end of the inlet pipe 1 communicates with the flow space 21, and the other end of the inlet pipe 1 extends out of the first shell 10 to communicate with a container to be evacuated, so that the gas flows into the flow space 21 along the inlet pipe 1. One end of the outlet pipe 2 communicates with the flow space 21, and the other end of the outlet pipe 2 extends out of the first shell 10 and communicates with an evacuation assembly, so that the gas in the flow space 21 flows out of the outlet pipe 2 under the driving of the evacuation assembly. That is, under the driving of the evacuation assembly, the gas in the container to be evacuated flows into the flow space 21 from the inlet pipe 1 and flows out of the flow space 21 from the outlet pipe 2, so that the container to be evacuated is evacuated.

[0033] It should be noted that the container to be evacuated can be a low-temperature storage tank, such as a tank body or a tank box. The evacuation assembly can be a vacuum pump.

[0034] In this embodiment, a medium cavity 31 can be formed inside the third shell 30. Specifically, the medium cavity 31 can be used to place low-temperature medium, so that the outer wall of the third shell 30 forms a cold surface under the influence of the low-temperature medium. Meanwhile, the medium space 11 can also be used to place low-temperature medium, so that the inner wall of the second shell 20 forms a cold surface under the influence of the low-temperature medium. Therefore, when the medium space 11 and the medium cavity 31 both contain low-temperature medium, cold surfaces can be formed on the inner wall of the second shell 20 and the outer wall of the third shell 30, so that cold surfaces can be formed on both the inner and outer walls of the flow space 21, thereby expanding the area of the cold surface in the flow space 21 and improving the ability to capture gas molecules flowing through the flow space 21, thereby improving the efficiency of evacuation.

[0035] Referring to Figure 1 The multi-layer cold trap device can also include an outer shell 40. The outer shell 40 can be arranged outside the first shell 10, and the inner wall of the outer shell 40 is arranged spaced apart from the outer wall of the first shell 10 to form a heat insulation space 41. The heat insulation space 41 can be used to insulate heat transfer between the outer shell 40 and the first shell 10, thereby preventing the external environment temperature of the multi-layer cold trap device from affecting the low-temperature medium in the medium space 11, and thereby affecting the cold surface effect of the inner wall of the second shell 20.

[0036] It should be noted that the heat insulation space 41 can be provided as a vacuum or low pressure environment, so as to reduce the heat conduction rate between the first shell 10 and the outer shell 40, thereby achieving the heat preservation or cold preservation effect of the first shell 10.

[0037] In other embodiments, the heat insulation space 41 can also be injected with inert gas, so as to reduce the heat conduction rate between the first shell 10 and the outer shell 40.

[0038] In the embodiment, the gas inlet pipe 1 and the gas outlet pipe 2 extend out of the outer shell 40 at the ends away from the flow space 21, so that the gas drawn out by the vacuum flows through the flow space 21. That is, the gas inlet pipe 1 and the gas outlet pipe 2 are partially wrapped in the outer shell 40.

[0039] In addition, the heat insulation space 41 is in communication with the flow space 21, so that the gas in the heat insulation space 41 can be discharged along the flow space 21, thereby reducing the pressure in the heat insulation space 41, even forming a vacuum space, thereby reducing the heat conduction rate between the first shell 10 and the outer shell 40, and achieving the heat preservation or cold preservation effect of the first shell 10.

[0040] Referring to Figure 1 and Figure 2 , the gas outlet pipe 2 can be provided with a through gas extraction hole 42, and the gas extraction hole 42 is located between the outer shell 40 and the first shell 10, so that the gas outlet pipe 2 can communicate with the heat insulation space 41.

[0041] It should be noted that since the gas extraction hole 42 is provided in a through manner, when the gas flows in the gas outlet pipe 2, the gas in the heat insulation space 41 can be discharged from the heat insulation space 41 along the gas extraction hole 42, thereby reducing the gas pressure in the heat insulation space 41, and further reducing the heat conduction rate between the first shell 10 and the outer shell 40, and achieving the heat preservation or cold preservation effect of the first shell 10.

[0042] Specifically, when the vacuum assembly is working, the gas in the container to be vacuumized flows from the gas inlet pipe 1 through the flow space 21, and is discharged from the flow space 21 by the gas outlet pipe 2. In addition, due to the gas flow in the gas outlet pipe 2, the gas in the heat insulation space 41 is simultaneously extracted through the gas extraction hole 42, so that the gas pressure in the heat insulation space 41 is reduced, so that the heat insulation space 41 enters a vacuum or low vacuum state, or the pressure in the heat insulation space 41 is consistent with the gas pressure in the gas outlet pipe 2, thereby reducing the heat conduction rate between the first shell 10 and the outer shell 40.

[0043] It should be noted that when the vacuum assembly stops working, the vacuum degree in the heat insulation space 41 and the gas outlet pipe 2 is reduced together and returns to the normal pressure state. At this time, the external heat can be conducted to the heat insulation space 41, so that the temperature of the heat insulation space 41 rises, avoiding the phenomenon of icing of the heat insulation space 41 and affecting the subsequent working effect of the multi-layer cold trap device.

[0044] Meanwhile, since the heat insulation space 41 can be dynamically switched between the vacuum state and the normal pressure state, problems such as the vacuum state being easily invalidated after the static vacuum interlayer remains in the vacuum state for a long time are avoided, and the static vacuum interlayer does not need to be regularly evacuated, thereby prolonging the service life of the multilayer cold trap device.

[0045] In this embodiment, the air extraction hole 42 can be provided in multiple numbers, and the multiple air extraction holes 42 are distributed along the circumference of the gas outlet pipe 2, thereby improving the vacuum extraction efficiency in the heat insulation space 41 or improving the replacement efficiency of the gas in the heat insulation space 41 and the gas outlet pipe 2 when the gas flows in the gas outlet pipe 2.

[0046] In addition, the multilayer cold trap device can further include a filter screen. Specifically, the filter screen is connected to the gas outlet pipe 2 and covers the air extraction hole 42, so that impurities enter the heat insulation space 41 or objects such as heat insulation materials in the heat insulation space 41 are prevented from entering the gas outlet pipe 2.

[0047] Referring to Figure 1 , the multilayer cold trap device can further include a heat insulation member 12. The heat insulation member 12 is wrapped on the outer wall of the first shell 10, so that after the low-temperature medium is injected into the medium space 11, the heat insulation member 12 can keep the first shell 10 cold, block the heat convection and radiation between the first shell 10 and the heat insulation space 41 or the outside, thereby reducing the loss of cold, maintaining the state of the low-temperature medium in the medium space 11, and maintaining the low-temperature state of the cold surface of the inner wall of the second shell 20.

[0048] It should be noted that the filter screen can prevent the heat insulation member 12 from falling into the gas outlet pipe 2.

[0049] Referring to Figure 1 and Figure 2 , the multilayer cold trap device can further include a branch pipe 32.

[0050] Specifically, the branch pipe 32 can be arranged between the second shell 20 and the third shell 30, and the branch pipe 32 can be used to communicate the medium space 11 and the medium cavity 31 and to circulate the low-temperature medium.

[0051] In this embodiment, the multilayer cold trap device can further include a filling pipe 34 and a discharge pipe 35. The filling pipe 34 is used to fill the low-temperature medium, and the discharge pipe 35 is used to discharge the low-temperature medium. Specifically, the filling pipe 34 and the discharge pipe 35 both communicate with the medium space 11 to inject the low-temperature medium into the medium space 11 or discharge the low-temperature medium in the medium space 11.

[0052] Therefore, when the medium space 11 and the medium cavity 31 are communicated through the branch pipe 32, the cryogenic medium can be filled into the medium space 11 and the medium cavity 31 through the filling pipe 34 at the same time, so that the cold surface can be formed on both sides of the flow space 21, and the ability to capture the gas molecules flowing in the flow space 21 is improved. In addition, the medium in the medium space 11 and the medium cavity 31 can be discharged through the discharge pipe 35 at the same time, so that the operator can operate conveniently.

[0053] In the embodiment, a plurality of branch pipes 32 can be provided, and the plurality of branch pipes 32 are communicated at both ends of the third shell 30 in the axial direction, so that the medium space 11 and the medium cavity 31 can be kept in communication.

[0054] Referring to Figure 1 and Figure 2 , the third shell 30 can be provided with a flow guide fin 33.

[0055] The flow guide fin 33 extends from the outer wall of the third shell 30 in a direction away from the third shell 30, so that the free end of the flow guide fin 33 can extend into the flow space 21. In addition, the flow guide fin 33 is spaced apart from the inner wall of the second shell 20, that is, the free end of the flow guide fin 33 is spaced apart from the inner wall of the second shell 20, so as to avoid the flow guide fin 33 blocking the flow space 21, and further avoid affecting the gas flow through the flow space 21.

[0056] In the embodiment, a plurality of flow guide fins 33 can be provided, and the plurality of flow guide fins 33 are spaced apart from the gas flow direction on the outer wall of the third shell 30. Specifically, the flow guide fin 33 can increase the cold surface of the outer wall of the third shell 30, and also increase the area of the cold surface in contact with the gas, thereby improving the vacuum pumping effect of the multi-layer cold trap device and improving the vacuum pumping efficiency.

[0057] In summary, the second shell 20 is arranged inside the first shell 10, and the medium space 11 is formed between the first shell 10 and the second shell 20. The third shell 30 is internally provided with the medium cavity 31, and the third shell 30 is arranged in the second shell 20, so that the flow space 21 is formed between the second shell 20 and the third shell 30. The inlet pipe 1 and the outlet pipe 2 are respectively communicated with the flow space 21, so that the extracted gas can flow along the inlet pipe 1, the flow space 21 and the outlet pipe 2 in sequence.

[0058] At the same time, the cryogenic medium is placed in the medium space 11 and the medium cavity 31 at the same time, so that the cold surface is formed on the inner wall of the second shell 20 and the outer wall of the third shell 30, that is, the double cold surface is formed in the flow space 21, the contact area between the flow space 21 and the gas flowing in the flow space 21 is increased, and the gas molecules flowing in the flow space 21 are captured, the adsorption capacity of the cold trap is improved, and the vacuum pumping efficiency is improved.

[0059] In addition, the medium space 11 is placed with low-temperature medium, can isolate external heat transfer, and further ensure the adsorption effect of the two cold surfaces in the flow space 21, avoid the influence of external environment temperature on the adsorption capacity of the cold trap.

[0060] Although the utility model has been described with reference to several exemplary embodiments, it should be understood that the terms used are illustrative and exemplary, rather than restrictive terms. Since the utility model can be embodied in various forms without departing from the spirit or essence of the utility model, it should be understood that the above-mentioned embodiments are not limited to any of the above-mentioned details, but should be interpreted broadly within the spirit and scope defined by the appended claims, and therefore all changes and modifications falling within the scope of the claims or their equivalents should be covered by the appended claims.

Claims

1. A multi-layer cold trap device for use in a vacuum pumping system, characterized in that, The multi-layer cold trap device comprises: a first shell; a second shell arranged inside the first shell, and a medium space formed between the inner wall of the first shell and the outer wall of the second shell; a third shell arranged inside the second shell, a medium cavity formed inside the third shell, and a flow space formed between the inner wall of the second shell and the outer wall of the third shell; an air inlet pipe, one end of which communicates with the flow space and the other end of which extends out of the first shell for connecting to a container to be vacuumized, so that gas flows into the flow space along the air inlet pipe; an air outlet pipe, one end of which communicates with the flow space and the other end of which extends out of the first shell for connecting to a vacuumizing assembly, so that gas in the flow space flows out of the air outlet pipe; wherein the medium space and the medium cavity are simultaneously filled with cryogenic medium to form cold surfaces on the inner wall of the second shell and the outer wall of the third shell, and to condense gas molecules flowing through the flow space.

2. The multi-layer cold trap apparatus of claim 1, wherein, Further comprising an outer shell, the outer shell is arranged outside the first shell, and a heat insulation space is formed between the inner wall of the outer shell and the outer wall of the first shell to insulate heat transfer between the outer shell and the first shell; the ends of the air inlet pipe and the air outlet pipe away from the flow space both extend out of the outer shell.

3. The multi-layer cold trap apparatus of claim 2, wherein, The heat insulation space communicates with the flow space, so that gas in the heat insulation space can be discharged along the flow space.

4. The multi-layer cold trap apparatus of claim 2, wherein, A through air hole is formed on the air outlet pipe; the air hole is located between the outer shell and the first shell, so that the air outlet pipe can communicate with the heat insulation space, and when gas flows in the air outlet pipe, the gas in the heat insulation space can be discharged out of the heat insulation space along the air hole.

5. The multi-layer cold trap apparatus of claim 4, wherein, A plurality of air holes are arranged, and the air holes are distributed along the circumference of the air outlet pipe.

6. The multi-layer cold trap apparatus of claim 4, wherein, Further comprising a filter screen, the filter screen is connected to the air outlet pipe and covers the air hole.

7. The multi-layer cold trap apparatus of claim 1, wherein, Further comprising a branch pipe, the branch pipe is arranged between the second shell and the third shell to communicate the medium space and the medium cavity and to circulate cryogenic medium.

8. The multi-layer cold trap apparatus of claim 7, wherein, A plurality of branch pipes are arranged, and the branch pipes communicate at both ends of the third shell in the axial direction.

9. The multi-layer cold trap apparatus of claim 1, wherein, The third shell is provided with a flow guide fin, the flow guide fin extends away from the third shell from the outer wall of the third shell, and the flow guide fin is arranged in a spaced manner with the inner wall of the second shell.

10. The multi-layer cold trap apparatus of claim 1, wherein, Further comprising a heat insulation member, the heat insulation member is wrapped on the outer wall of the first shell.

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